JP2001263944A - Conveyor furnace for drying sheet-form material - Google Patents

Conveyor furnace for drying sheet-form material

Info

Publication number
JP2001263944A
JP2001263944A JP2000073655A JP2000073655A JP2001263944A JP 2001263944 A JP2001263944 A JP 2001263944A JP 2000073655 A JP2000073655 A JP 2000073655A JP 2000073655 A JP2000073655 A JP 2000073655A JP 2001263944 A JP2001263944 A JP 2001263944A
Authority
JP
Japan
Prior art keywords
conveyor
sheet
furnace
chain
drying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000073655A
Other languages
Japanese (ja)
Other versions
JP3412043B2 (en
Inventor
Akira Ito
璋 伊東
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP2000073655A priority Critical patent/JP3412043B2/en
Publication of JP2001263944A publication Critical patent/JP2001263944A/en
Application granted granted Critical
Publication of JP3412043B2 publication Critical patent/JP3412043B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Landscapes

  • Drying Of Solid Materials (AREA)
  • Tunnel Furnaces (AREA)
  • Furnace Details (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Chain Conveyers (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a conveyor furnace for drying sheet-form material which is capable of restraining the attachment of fine dust to the sheet-form material as much as possible even when a chain conveyor is employed, and capable of effecting the drying treatment of the material efficiently. SOLUTION: The conveyor furnace for drying the sheet-form material is provided in a furnace body housing 9 with an inside surrounding wall 21 for surrounding the upper part of an upper transfer passage 10a for the chain conveyor 10, and a ventilating passage 22 formed at one side of a space between the inside surrounding wall and the furnace body housing. A communication port 23 for communicating the ventilating passage 22 with the inside of the inside surrounding wall 21 is formed at the lower side of the conveyor chain 12 in the lower part of the inside surrounding wall 21. A fan 26 for ventilating air in the ventilating passage into a furnace chamber 25 in the inside surrounding wall is provided in the upper part of the ventilating passage 22. A furnace chamber filter 27 is arranged in the upper part of the furnace chamber while a distributing panel 28 is arranged in the lower part of the furnace chamber so as to cover the lower side of the upper transfer passage of the chain conveyor.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、クリーンルーム内
等の清浄雰囲気で使用され、柔軟性のある印刷処理した
薄いプリント基板等のシート状物を、搬送しながら乾燥
させるシート状物乾燥用コンベヤ炉に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sheet drying furnace for drying a sheet-like material, such as a thin printed circuit board, which has been subjected to a flexible printing process and is used in a clean atmosphere such as in a clean room. About.

【0002】[0002]

【従来の技術】例えば、印刷処理を施した薄いプリント
基板(シート状物)を乾燥させる場合、連続的に効率よ
く乾燥処理するために、コンベヤを設けたトンネル式の
乾燥炉が使用され、シート状物を乾燥炉内でコンベヤに
より搬送しながら連続的に乾燥処理を行っている。
2. Description of the Related Art For example, in the case of drying a thin printed circuit board (sheet-like material) that has been subjected to a printing process, a tunnel-type drying furnace provided with a conveyor is used to continuously and efficiently perform a drying process. The drying process is continuously performed while the articles are conveyed by a conveyor in a drying furnace.

【0003】印刷処理を施した薄いプリント基板を乾燥
処理する場合、プリント基板表面への微細な塵の付着を
極力抑制する必要があるが、トンネル式の乾燥炉の場
合、内部に敷設されたコンベヤの摺動部から微細な塵が
少なからず発生し、プリント基板に付着して製品に悪影
響を与える。
[0003] When drying a thin printed circuit board subjected to a printing process, it is necessary to minimize the adhesion of fine dust to the surface of the printed circuit board. In the case of a tunnel type drying furnace, a conveyor laid inside is required. Not a small amount of fine dust is generated from the sliding portion of the substrate and adheres to the printed circuit board, which adversely affects the product.

【0004】[0004]

【発明が解決しようとする課題】このために、従来で
は、できるだけ摺動部からの発塵の少ないビームコンベ
ヤなどを使用して、プリント基板表面への微細な塵の付
着を抑制しているが、製造ラインの構造上、チェーンコ
ンベヤを使用する場合がある。チェーンコンベヤは、比
較的構造が簡単で、搬送機器としては故障が少なく、簡
便に使用することができるものの、摺動部分が多いため
に、発塵が多く、被乾燥物であるプリント基板への塵の
付着が増大し、製品に悪影響を与える問題があった。
For this reason, in the prior art, the adhesion of fine dust to the printed circuit board surface has been suppressed by using a beam conveyor or the like that generates as little dust as possible from the sliding portion. In some cases, a chain conveyor is used due to the structure of the production line. The chain conveyor has a relatively simple structure and has few failures as a transport device, and can be used easily.However, since there are many sliding parts, it generates a lot of dust and can be used for printed circuit boards that are to be dried. There is a problem that the adhesion of dust increases and the product is adversely affected.

【0005】本発明は、上記の点に鑑みてなされたもの
で、チェーンコンベヤを使用する場合であっても、微細
な塵のシート状物への付着を極力抑制し、シート状物を
効率良く乾燥処理することができるシート状物乾燥用コ
ンベヤ炉を提供することを目的とする。
The present invention has been made in view of the above points, and minimizes the adhesion of fine dust to a sheet-like material even when a chain conveyor is used, and efficiently removes the sheet-like material. An object of the present invention is to provide a conveyor for drying a sheet-like material that can be subjected to a drying treatment.

【0006】[0006]

【課題を解決するための手段】上記目的を達成するため
に、本発明のシート状物乾燥用コンベヤ炉は、両側のコ
ンベヤチェーン間に多数の横断フレームが一定間隔で連
結され、各横断フレーム上にシート状物をクリップで保
持するシート状物保持枠が固定されてなるチェーンコン
ベヤと、チェーンコンベヤの上搬送路の上方周囲を断熱
壁で包囲して配設された炉体ハウジングと、炉体ハウジ
ング内を加熱するためのヒータと、を備えたシート状物
乾燥用コンベヤ炉において、炉体ハウジング内に、チェ
ーンコンベヤの上搬送路の上方を囲う内側包囲壁が配設
され、内側包囲壁と炉体ハウジングの断熱壁間の一側に
通風路が形成され、通風路内にヒータが設置され、内側
包囲壁の下部に通風路と内側包囲壁内を連通する連通口
がコンベヤチェーンの下側に形成され、通風路の上部に
通風路内の空気を内側包囲壁内の炉室内に送風するため
の送風機が設けられ、炉室内の上部に炉室フィルタが配
設され、炉室内の下部にチェーンコンベヤの上搬送路の
下側を覆うように分流板が配設され、内側包囲壁の下端
部と分流板の両端部により炉室内の熱風を両側コンベヤ
チェーンの近傍に流すように構成したことを特徴とす
る。
In order to achieve the above object, a conveyor furnace for drying a sheet-like material according to the present invention comprises a plurality of crossing frames connected at regular intervals between conveyor chains on both sides, and each crossing frame has A chain conveyor in which a sheet-like material holding frame for holding a sheet-like material with clips is fixed, a furnace body housing arranged so as to surround an upper periphery of an upper conveying path of the chain conveyor with a heat insulating wall, and a furnace body. A heater for heating the inside of the housing, wherein the inner oven surrounding the upper conveying path of the chain conveyor is disposed in the furnace body housing, wherein the inner oven is provided with a heater for heating the inside of the sheet. A ventilation path is formed on one side between the heat insulating walls of the furnace housing, a heater is installed in the ventilation path, and a communication opening communicating between the ventilation path and the inside of the inner surrounding wall is provided below the inner surrounding wall. A blower for blowing air in the ventilation path into the furnace chamber in the inner surrounding wall is provided at an upper part of the ventilation path, a furnace chamber filter is disposed at an upper part of the furnace chamber, and a furnace chamber is provided. A diversion plate is provided at the lower part of the chain conveyor so as to cover the lower side of the upper conveying path, and the lower end of the inner surrounding wall and both ends of the diversion plate allow hot air in the furnace chamber to flow near the conveyor chains on both sides. It is characterized by comprising.

【0007】[0007]

【作用】このような構成のシート状物乾燥用コンベヤ炉
では、ヒータを設けた通風路で発生した熱風が、送風機
の動作により、内側包囲壁内の炉室内上部に送気され、
炉室フィルタを通過して炉室内を下方に流れる。炉室内
を下方に流下する熱風は、チェーンコンベヤ上のシート
状物保持枠のクリップに保持されたシート状物の間を通
過して下方に流れ、シート状物を乾燥させる。そして、
流下した熱風は、炉室内の底部の分流板に当てって両側
のコンベヤチェーン側に分流し、内側包囲壁の下端部と
分流板の両端部のガイドによって、熱風が両側コンベヤ
チェーンの近傍を流れ、連通口を通って再び通風路内に
戻り、循環する。
With the sheet furnace for drying a sheet-like material having such a configuration, hot air generated in a ventilation path provided with a heater is blown into an upper portion of a furnace chamber in an inner surrounding wall by an operation of a blower.
It passes through the furnace chamber filter and flows downward in the furnace chamber. The hot air flowing downward in the furnace chamber passes between the sheet-like materials held by clips of the sheet-like material holding frame on the chain conveyor, flows downward, and dries the sheet-like material. And
The hot air that has flowed down hits the distribution plate at the bottom of the furnace chamber and is divided into the conveyor chains on both sides.The hot air flows near the conveyor chains on both sides by the guides at the lower end of the inner surrounding wall and both ends of the distribution plate. , Returns to the ventilation path again through the communication port and circulates.

【0008】従って、炉室内を上方から下方に流れる熱
風が、両側コンベヤチェーンの近傍を流れて通風路に戻
るため、コンベヤチェーンで発塵する微細な塵を集め
て、上部の炉室フィルタでこれを捕捉し、コンベヤ炉内
のクリーン度を高く保持することができる。
Accordingly, the hot air flowing from above to below in the furnace chamber flows near the conveyor chains on both sides and returns to the ventilation path, so that fine dust generated by the conveyor chain is collected and filtered by the upper furnace chamber filter. And cleanliness in the conveyor furnace can be kept high.

【0009】また、両側コンベヤチェーンの近傍を流れ
た熱風が、炉体ハウジング外に設けた排気ファンにより
炉体ハウジング外にフィルタを通して排気されるように
構成すれば、コンベヤチェーンの近傍を流れた空気は、
外部に設けた排気ファンにより外部に導出され、フィル
タを通して排気されるから、コンベヤチェーンで発塵す
る微細な塵をフィルタで捕捉することができる。
Further, if the hot air flowing near the conveyor chains on both sides is configured to be exhausted through a filter outside the furnace housing by an exhaust fan provided outside the furnace housing, the air flowing near the conveyor chain can be obtained. Is
Since the air is exhausted to the outside by an exhaust fan provided outside and exhausted through a filter, fine dust generated by the conveyor chain can be captured by the filter.

【0010】また、シート状物保持枠の一面に、隣接す
るシート状物保持枠との間隔をとるための間隔保持板を
突設した構成とすれば、シート状物を接触させずに搬送
して乾燥させることができ、間隔保持板の先端に軟質部
材を被覆しておけば、間隔保持板が前のシート状物保持
枠に当った際の発塵を防止することができる。
[0010] Further, if a spacing plate is provided on one surface of the sheet holding frame so as to project an interval from an adjacent sheet holding frame, the sheet is transported without contact. If the space holding plate is covered with a soft member at the tip thereof, dust generation when the space holding plate hits the previous sheet-like material holding frame can be prevented.

【0011】さらに、チェーンコンベヤの下搬送路のコ
ンベヤチェーンがカバー体により覆われ、カバー体内の
空気を吸引して外部に排気する排気ファンが設けられる
と共に、その排気通路にフィルタを設けた構成とすれ
ば、下搬送路のコンベヤチェーンで発塵した微細な塵を
フィルタに良好に捕捉することができ、クリーンルーム
内での使用が可能となる。
[0011] Further, the conveyor chain in the lower conveying path of the chain conveyor is covered with a cover body, and an exhaust fan for sucking air in the cover body and exhausting the air to the outside is provided, and a filter is provided in the exhaust passage. Then, the fine dust generated by the conveyor chain of the lower transport path can be satisfactorily captured by the filter, and can be used in a clean room.

【0012】[0012]

【発明の実施の形態】以下、本発明の実施の形態を図面
に基づいて説明する。図1は、印刷後のプリント基板で
あるシート状物Sを乾燥させる乾燥装置の全体正面図を
示している。1は印刷を施したシート状物Sを図示しな
い印刷装置から本装置に搬入する搬入装置、2は搬入装
置1により搬入されたシート状物Sをチェーンコンベヤ
10のシート状物保持枠15に投入するための投入部で
ある。
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is an overall front view of a drying apparatus for drying a sheet-shaped material S as a printed circuit board after printing. 1 is a carry-in device for carrying the printed sheet material S from a printing device (not shown) to the apparatus, and 2 is a device for feeding the sheet material S carried in by the carry-in device 1 into the sheet material holding frame 15 of the chain conveyor 10. It is an input section for performing.

【0013】投入部2に続いて、風によりシート状物S
を乾燥させる風乾部3が設置され、風乾部3に続いて、
シート状物Sを熱風により乾燥させるコンベヤ炉4が設
置される。さらに、コンベヤ炉4に続いて、加熱乾燥し
たシート状物Sを冷やすための冷却部5が配置され、冷
却部5に続いて、乾燥したシート状物Sを搬出する搬出
部6が設置される。チェーンコンベヤ10は、図1に示
すように、投入部2から搬出部6にかけて、乾燥装置内
を水平に貫通して敷設されるコンベヤであり、先端部と
末端部に回転軸が配設され、その回転軸の両側にチェー
ンスプロケットが軸支され、2対のチェーンスプロケッ
ト間に各々、無端状のコンベヤチェーン(ローラチェー
ン)12が掛け渡される。
Following the charging section 2, the sheet-like material S
An air drying unit 3 for drying is installed. Following the air drying unit 3,
A conveyor furnace 4 for drying the sheet material S by hot air is provided. Further, following the conveyor furnace 4, a cooling unit 5 for cooling the heated and dried sheet material S is arranged, and following the cooling unit 5, an unloading unit 6 for unloading the dried sheet material S is installed. . As shown in FIG. 1, the chain conveyor 10 is a conveyor that is laid horizontally from the input unit 2 to the unloading unit 6 so as to pass through the drying device horizontally, and a rotating shaft is disposed at a front end and a rear end. Chain sprockets are supported on both sides of the rotating shaft, and an endless conveyor chain (roller chain) 12 is stretched between the two pairs of chain sprockets.

【0014】コンベヤ炉4は、図2の断面図に示すよう
に、断熱壁9aで両側面及び上下面を形成された炉体ハ
ウジング9内に、チェーンコンベヤ10を敷設して形成
される。炉体ハウジング9内におけるチェーンコンベヤ
10の上搬送路10aの上方を囲うように、内側包囲壁
21が縦方向に、且つコンベヤの長手方向に沿って連続
して配設される。内側包囲壁21と炉体ハウジング9の
断熱壁9a間の一側に通風路22が形成され、内側包囲
壁21内に形成された炉室25内にチェーンコンベヤ1
0の上搬送路10aが配設される。
As shown in the cross-sectional view of FIG. 2, the conveyor furnace 4 is formed by laying a chain conveyor 10 in a furnace housing 9 having both sides and upper and lower surfaces formed by heat insulating walls 9a. An inner surrounding wall 21 is disposed vertically and continuously along the longitudinal direction of the conveyor so as to surround the upper portion of the upper conveying path 10a of the chain conveyor 10 in the furnace housing 9. A ventilation path 22 is formed on one side between the inner surrounding wall 21 and the heat insulating wall 9 a of the furnace housing 9, and the chain conveyor 1 is provided in a furnace chamber 25 formed in the inner surrounding wall 21.
No. 0 upper transport path 10a is provided.

【0015】内側包囲壁21の両側の下部に連続して、
チェーンカバー部21a,21bが、コンベヤチェーン
12を覆うように設けられ、そのチェーンカバー部21
aの下部につまりコンベヤチェーンの下側に、通風路2
2と内側包囲壁21内を連通する連通口23が設けられ
る。炉体ハウジング9内の一側に形成された縦方向の通
風路22内に、加熱用のヒータ24が設置され、その通
風路22の上部には、通風路22内の空気を内側包囲壁
21内の炉室25内に送風するための送風機26が設け
られる。送風機26は遠心ファンを用いたもので、その
ケーシングの吸気口が通風路22側に開口し、そのケー
シングの排気口が内側包囲壁21の上部に連通・接続さ
れる。ヒータ24と送風機26は、コンベヤ炉4内の長
手方向に間隔をおいて複数台設置される。
Continuing to the lower part on both sides of the inner surrounding wall 21,
Chain cover portions 21a and 21b are provided so as to cover the conveyor chain 12, and the chain cover portions 21a and 21b are provided.
a, that is, below the conveyor chain,
A communication port 23 is provided to communicate between the inside 2 and the inside of the inner surrounding wall 21. A heater 24 for heating is installed in a vertical ventilation path 22 formed on one side of the furnace body housing 9, and the air in the ventilation path 22 is provided above the ventilation path 22 with the inner surrounding wall 21. A blower 26 for blowing air into the furnace chamber 25 is provided. The blower 26 uses a centrifugal fan. The intake port of the casing opens to the ventilation path 22 side, and the exhaust port of the casing communicates with and is connected to the upper part of the inner surrounding wall 21. A plurality of heaters 24 and blowers 26 are installed at intervals in the longitudinal direction in the conveyor furnace 4.

【0016】さらに、内側包囲壁21の上部の炉室25
内にフィルタ保持部21cが形成され、そこに炉室フィ
ルタ27が配設される。炉室フィルタ27には微細な塵
を捕捉可能なHEPAフィルタが使用されるが、この炉
室フィルタ27の前段には、比較的大粒の塵を捕捉する
ためのガラス繊維を用いた前段フィルタ27aが配置さ
れる。炉室25内の下部で、チェーンコンベヤ10の上
搬送路10aの下側中央付近には、その上搬送路10a
の中央を下側から覆うように、分流板28が配設され
る。
Further, a furnace chamber 25 above the inner surrounding wall 21 is provided.
A filter holding portion 21c is formed therein, and a furnace chamber filter 27 is provided therein. A HEPA filter capable of catching fine dust is used for the furnace chamber filter 27, but a pre-filter 27a using glass fiber for catching relatively large dust is provided in front of the furnace chamber filter 27. Be placed. In the lower part of the furnace chamber 25, near the lower center of the upper transport path 10a of the chain conveyor 10, the upper transport path 10a
A flow dividing plate 28 is provided so as to cover the center of the plate from below.

【0017】送風機26の動作により、炉室25内には
下向きの空気流が発生し、この下向き空気流は連通口2
3を通って通風路22への流入するが、この下向きの空
気流を、両側のコンベヤチェーン12の近傍に効果的に
流すために、分流板28が設けられる。分流板28はそ
の中央部が上方に膨出し両側が下方に傾斜して形成さ
れ、一方、チェーンコンベヤ10の下搬送路10bで
は、そのコンベヤチェーン10aがカバー体29により
覆われる。カバー体29は両側に分かれて炉体ハウジン
グ9の下側に固定され、両側のコンベヤチェーン10a
の周囲を覆う。各カバー体29には、その中の空気を吸
引して外部に排気する排気ファン30が設けられ、その
排気通路32にフィルタ31が設けられる。
By the operation of the blower 26, a downward air flow is generated in the furnace chamber 25, and this downward air flow is
A flow dividing plate 28 is provided for effectively flowing the downward air flow to the vicinity of the conveyor chain 12 on both sides. The flow dividing plate 28 is formed so that its central portion bulges upward and both sides are inclined downward, while the conveyor chain 10 a is covered by a cover body 29 in the lower transport path 10 b of the chain conveyor 10. The cover body 29 is divided into two sides and fixed to the lower side of the furnace housing 9, and the conveyor chains 10a on both sides are provided.
Cover around. Each cover body 29 is provided with an exhaust fan 30 that sucks air therein and exhausts the air to the outside, and a filter 31 is provided in an exhaust passage 32 thereof.

【0018】チェーンコンベヤ10は、図3〜図5に示
すごとく、両側のコンベヤチェーン12、12間に、横
断する形態で、多数の横断フレーム14が取付金具13
を介して取り付けられ、各横断フレーム14上に、略コ
字状のシート状物保持枠15が開口部分を上方に向けて
固定される。シート状物保持枠15は、横断フレーム1
4の両側に縦枠15aを立設し、その下部に横枠15b
を水平に連結固定して形成され、開口部の大きさは、そ
こに保持されて搬送されるシート状物Sの大きさに略等
しい。
As shown in FIGS. 3 to 5, the chain conveyor 10 has a large number of crossing frames 14 between the conveyor chains 12, 12 on both sides.
, And a substantially U-shaped sheet-like material holding frame 15 is fixed on each of the transverse frames 14 with the opening portion facing upward. The sheet-like object holding frame 15 is
4 is provided with a vertical frame 15a on both sides thereof, and a horizontal frame 15b
Are horizontally connected and fixed, and the size of the opening is substantially equal to the size of the sheet material S held and conveyed there.

【0019】シート状物保持枠15の両側に、少なくと
も2対のクリップ16が内側を向けて取り付けられる。
ここでは高さの異なる二種類のシート状物を保持するた
めに上側に2対、下側に1対、合計で3対のクリップ1
6が設けられる。クリップ16は、挟持部材の間にバネ
を設けその先端でシート類をバネ力で挟むように形成さ
れ、元部の片側が保持枠15の縦枠に固定され、他方の
元部をバネ力に抗して内側に押すことにより、クリップ
16の先端は開かれる。3対のクリップ16の挟持面
は、略同一平面上に位置するように取り付けられ、その
平面上に搬入されたシート状物Sの縁部を両側で挟んで
保持する。
At least two pairs of clips 16 are attached to both sides of the sheet-like material holding frame 15 with the inside facing inward.
Here, in order to hold two kinds of sheet materials having different heights, two pairs of clips are provided on the upper side and one pair is provided on the lower side, and a total of three pairs of clips 1 are provided.
6 are provided. The clip 16 is formed so that a spring is provided between the holding members and the sheets are sandwiched at the tip by a spring force. One side of the base is fixed to the vertical frame of the holding frame 15, and the other base is subjected to the spring force. By pushing inward against the tip, the tip of the clip 16 is opened. The holding surfaces of the three pairs of clips 16 are attached so as to be located on substantially the same plane, and hold the edges of the sheet-like material S carried on the plane on both sides.

【0020】シート状物保持枠15下部の横枠15b上
には、そこに保持されたシート状物Sの揺れを防止する
ために、揺れ止め枠17が取り付けられる。揺れ止め枠
17は上部にV字状の切欠を有し、その切欠にシート状
物Sの下端を入れ、揺れを防止する。シート状物保持枠
15の前面側には、隣接する保持枠都の間の間隔を保持
するために、間隔保持板18が突設される。この間隔保
持板18の先端は、運転中、前のシート状物保持枠15
に当るが、その当った際の発塵を防止するために、間隔
保持板18の先端は軟質部材18aにより被覆される。
An anti-sway frame 17 is mounted on the horizontal frame 15b below the sheet-like material holding frame 15 to prevent the sheet-like material S held there from shaking. The anti-sway frame 17 has a V-shaped notch in the upper part, and the lower end of the sheet-like material S is inserted into the notch to prevent shaking. On the front side of the sheet holding frame 15, an interval holding plate 18 is provided so as to protrude in order to maintain an interval between adjacent holding frames. During the operation, the front end of the gap holding plate 18 is
However, the tip of the spacing plate 18 is covered with a soft member 18a in order to prevent dust from being generated.

【0021】次に、上記構成のシート状物乾燥用コンベ
ヤ炉の動作を説明する。薄く柔軟性のあるプリント基板
(シート状物S)に、図示しない印刷装置で印刷が施さ
れ、印刷後のシート状物Sは、搬入装置1により投入部
2に送られ、投入部2で図示しない搬入用コンベヤとク
リップ開閉装置を用いて、クリップ16を開放した状態
のシート状物保持枠15上に送られ、その後、クリップ
16を閉じて、クリップ16のバネ力でシート状物Sの
縁部を挟持し、このクリップ16により、シート状物S
は、チェーンコンベヤ10上の保持枠15に保持され
る。
Next, the operation of the conveyer furnace for drying a sheet-like material having the above configuration will be described. Printing is performed on a thin and flexible printed circuit board (sheet-like material S) by a printing device (not shown), and the printed sheet-like material S is sent to the loading unit 2 by the carry-in device 1, and is illustrated by the loading unit 2. The clip 16 is sent onto the sheet holding frame 15 in a state where the clip 16 is opened by using a carry-in conveyor and a clip opening / closing device which are not used. Thereafter, the clip 16 is closed, and the edge of the sheet S is Portion of the sheet-like object S
Is held by a holding frame 15 on the chain conveyor 10.

【0022】このようにして、シート状物Sが順次、チ
ェーンコンベヤ10上に保持され、風乾部3からコンベ
ヤ炉4へと搬入され、コンベヤ炉4内では、十数分の時
間をかけながら前進し、熱風を受けてシート状物Sが乾
燥される。
In this way, the sheet-like materials S are sequentially held on the chain conveyor 10 and are carried from the air drying unit 3 to the conveyor furnace 4, where the sheet S advances over ten minutes and more. Then, the sheet-shaped material S is dried by receiving hot air.

【0023】コンベヤ炉4では、図2に示すように、ヒ
ータ24と送風機26が運転されており、通風路22内
でヒータ24により加熱された空気つまり熱風は、送風
機26により吸引され、内側包囲壁21内の炉室25内
に送気される。このとき、熱風が前段フィルタ27aと
炉室フィルタ27を通過する際、そこに含まれる大粒か
ら微細な塵までが効果的に捕捉される。
In the conveyor furnace 4, as shown in FIG. 2, a heater 24 and a blower 26 are operated, and the air heated by the heater 24 in the ventilation passage 22, that is, the hot air, is sucked by the blower 26 and surrounded by the inside air. Air is supplied into the furnace chamber 25 in the wall 21. At this time, when the hot air passes through the pre-stage filter 27a and the furnace chamber filter 27, large particles to fine dust contained therein are effectively captured.

【0024】炉室フィルタ27を通過した熱風は、炉室
25内を下方に流れ、チェーンコンベヤ10上のシート
状物保持枠15上で、垂直に且つ間隔をおいて保持され
たシート状物Sの周囲を流下し、シート状物Sを乾燥さ
せる。この際、シート状物Sは、その下端が揺れ止め枠
17により保持されるため、揺れは発生せず、また、隣
接する前後のシート状物Sとの接触が生じず、印刷面に
傷をつけずにシート状物Sを乾燥・処理することができ
る。
The hot air that has passed through the furnace chamber filter 27 flows downward in the furnace chamber 25, and is held vertically and at intervals on the sheet holding frame 15 on the chain conveyor 10. , And the sheet material S is dried. At this time, since the lower end of the sheet-like material S is held by the anti-swing frame 17, the sheet-like material S does not oscillate and does not come into contact with the adjacent front and rear sheet-like materials S. The sheet S can be dried and processed without attaching.

【0025】炉室25内を上方から下方に流下した熱風
は、チェーンコンベヤ10の下の分流板28に当って両
側に分流し、チェーンカバー部21a内から、コンベヤ
チェーン12の周囲を通って、連通口23から通風路2
2内に入る。そして通風路22内に戻った熱風は、再び
ヒータ24で加熱され、送風機26により炉室25内に
送気され、熱風が循環する。
The hot air that has flowed downward from above in the furnace chamber 25 hits a distribution plate 28 below the chain conveyor 10 and is diverted to both sides, from inside the chain cover portion 21a, around the conveyor chain 12, and Ventilation path 2 from communication port 23
Go inside 2. Then, the hot air that has returned to the ventilation path 22 is heated again by the heater 24, is sent into the furnace chamber 25 by the blower 26, and the hot air circulates.

【0026】このように、送風機26の動作により炉室
25内と通風路22を循環する熱風が、コンベヤチェー
ン12の周囲を良好に通過するから、コンベヤチェーン
12で発塵しやすい微細な塵を効果的に集め、それをフ
ィルタ27に導くことにより、効率よく良好に熱風中の
塵を捕捉することができる。また、運転中、チェーンコ
ンベヤ10のシート状物保持枠15に設けた間隔保持板
18の先端は、前のシート状物保持枠15に当るが、間
隔保持板18の先端に軟質部材18aが被覆されている
から、その当った際の発塵を防止することができる。従
って、発塵を極力抑制して、炉室25内のクリーン度を
高く保持することができるから、印刷後のプリント基板
のような塵の付着を嫌うシート状物を、良好に乾燥させ
ることができる。
As described above, since the hot air circulating in the furnace chamber 25 and the ventilation passage 22 by the operation of the blower 26 passes well around the conveyor chain 12, fine dust which is easily generated by the conveyor chain 12 is removed. By effectively collecting and guiding it to the filter 27, dust in the hot air can be efficiently and satisfactorily captured. During operation, the leading end of the spacing member 18 provided on the sheet holding frame 15 of the chain conveyor 10 hits the preceding sheet holding frame 15, but the leading end of the spacing plate 18 is covered with the soft member 18a. Therefore, it is possible to prevent dust from being generated. Therefore, the generation of dust can be suppressed as much as possible, and the degree of cleanness in the furnace chamber 25 can be kept high. Therefore, it is possible to favorably dry a sheet-like material such as a printed circuit board which is not likely to adhere to dust after printing. it can.

【0027】一方、チェーンコンベヤ10の下搬送路1
0bを進行するコンベヤチェーン12の下側は、カバー
体29で覆われ、その中の空気は排気ファン30により
フィルタ31を通して排気されるから、そのコンベヤチ
ェーン12で発塵した微細な塵をフィルタ31に良好に
捕捉することができ、本装置がクリーンルーム内に設置
される場合であっても、クリーンルーム内への塵の放出
を防止することができる。
On the other hand, the lower conveying path 1 of the chain conveyor 10
0b is covered with a cover body 29, and the air in the lower part of the conveyor chain 12 is exhausted through a filter 31 by an exhaust fan 30, so that the fine dust generated by the conveyor chain 12 is removed by the filter 31. Thus, even when the present apparatus is installed in a clean room, it is possible to prevent the release of dust into the clean room.

【0028】図6は他の実施例のコンベヤ炉の拡大断面
図を示している。この例では、チェーンコンベヤ10の
上搬送路10aのコンベヤチェーン12付近を流れる空
気を、下搬送路10bの場合と同様に、排気ファン40
によりフィルタ41と排気ダクト42を介して、炉体ハ
ウジング9の外側に排気する構造を採用する。なお、上
記実施例と同様な構成については、同じ符号を付してそ
の説明を省略する。
FIG. 6 is an enlarged sectional view of a conveyor furnace according to another embodiment. In this example, the air flowing in the vicinity of the conveyor chain 12 in the upper transport path 10a of the chain conveyor 10 is supplied to the exhaust fan 40 like the lower transport path 10b.
Thus, a structure in which the gas is exhausted to the outside of the furnace housing 9 through the filter 41 and the exhaust duct 42 is adopted. In addition, about the structure similar to the said Example, the same code | symbol is attached | subjected and the description is abbreviate | omitted.

【0029】即ち、上搬送路10aのコンベヤチェーン
12の一方は、チェーンカバー部21aと下側カバー部
28aにより覆われ、他方のコンベヤチェーン12はチ
ェーンカバー部21bと下側カバー部28bにより覆わ
れる。このカバー部21a,21b,28a,28bは
長手方向に連続して配置され、そこに間隔をおいて排気
ダクト43が接続される。それらの排気ダクト43は、
炉体ハウジング9内から外部に導出され、外部に設置さ
れた排気ファン40の吸気側に接続される。一方、コン
ベヤの下搬送路10bのコンベヤチェーン12を覆うカ
バー体29には、間隔をおいて排気ダクト44が接続さ
れ、各排気ダクト44は外部に導出され、上側の排気ダ
クト43と同様に、各排気ファン40の吸気側に接続さ
れる。排気ファン40の排気口に接続された排気ダクト
42にはフィルタ41が接続される。
That is, one of the conveyor chains 12 in the upper transport path 10a is covered by the chain cover 21a and the lower cover 28a, and the other conveyor chain 12 is covered by the chain cover 21b and the lower cover 28b. . The covers 21a, 21b, 28a, 28b are arranged continuously in the longitudinal direction, and the exhaust duct 43 is connected to the cover 21 at intervals. Those exhaust ducts 43
It is led out of the furnace housing 9 to the outside and connected to the intake side of an exhaust fan 40 installed outside. On the other hand, exhaust ducts 44 are connected to the cover body 29 covering the conveyor chain 12 on the lower transport path 10b of the conveyor at intervals, and each exhaust duct 44 is led out to the outside, and like the upper exhaust duct 43, Each exhaust fan 40 is connected to the intake side. A filter 41 is connected to an exhaust duct 42 connected to an exhaust port of the exhaust fan 40.

【0030】図6のコンベヤ炉では、上記実施例と同様
に、通風路22内でヒータ24により加熱された熱風
は、送風機26により吸引され、内側包囲壁21内の炉
室25内に送気される。熱風は前段フィルタ27aと炉
室フィルタ27を通過する際、そこに含まれる大粒から
微細な塵が捕捉される。炉室フィルタ27を通過した熱
風は、炉室25内を下方に流れ、チェーンコンベヤ10
上のシート状物保持枠15上で、垂直に且つ間隔をおい
て保持されたシート状物Sの周囲を流下し、シート状物
Sを乾燥させる。炉室25内を上方から下方に流下した
熱風は、チェーンコンベヤ10の下の分流板28に当っ
て両側に分流するが、カバー体28a,28bの下側を
通過した熱風は、その下側の開口部45から通風路22
内に入り、通風路22内に戻った熱風は、再びヒータ2
4で加熱され、送風機26により炉室25内に送気さ
れ、熱風が循環する。
In the conveyor furnace shown in FIG. 6, the hot air heated by the heater 24 in the ventilation passage 22 is sucked by the blower 26 and sent into the furnace chamber 25 in the inner surrounding wall 21 in the same manner as in the above embodiment. Is done. When the hot air passes through the pre-stage filter 27a and the furnace chamber filter 27, fine dust is captured from large particles contained therein. The hot air that has passed through the furnace chamber filter 27 flows downward in the furnace chamber 25, and
On the upper sheet-like material holding frame 15, the sheet-like material S is allowed to flow down around the sheet-like material S held vertically and at intervals, and the sheet-like material S is dried. The hot air that has flowed downward from above in the furnace chamber 25 hits a distribution plate 28 below the chain conveyor 10 and is diverted to both sides, but the hot air that has passed below the cover bodies 28a and 28b is From the opening 45 to the ventilation path 22
The hot air that has entered the inside and returned to the ventilation passage 22
4, the air is blown into the furnace chamber 25 by the blower 26, and the hot air is circulated.

【0031】一方、チェーンカバー部21a、21b内
に入った熱風は、排気ファン40により排気ダクト43
側に吸引され、コンベヤチェーン12の周囲を通って、
排気ダクト43から排気ファン40に入る。また、下搬
送路10bのコンベヤチェーン12を覆うカバー体29
内の空気も、排気ダクト44を介して排気ファン40に
吸引される。そして、排気ファン40の排気側から排気
ダクト42、フィルタ41を介して外部に排気される。
従って、この実施例では、コンベヤチェーン12で発塵
した微細な塵は、排気ダクト43、44を通して外部の
排気ファン40により炉体ハウジング外に吸引され、フ
ィルタ41により捕捉される。
On the other hand, the hot air entering the chain cover portions 21a and 21b is exhausted by an exhaust fan 40 into an exhaust duct 43.
Side, passing around the conveyor chain 12,
The air enters the exhaust fan 40 from the exhaust duct 43. Further, a cover body 29 covering the conveyor chain 12 of the lower transport path 10b.
The air inside is also sucked into the exhaust fan 40 via the exhaust duct 44. Then, the air is exhausted from the exhaust side of the exhaust fan 40 to the outside via the exhaust duct 42 and the filter 41.
Therefore, in this embodiment, fine dust generated by the conveyor chain 12 is sucked out of the furnace body housing by the external exhaust fan 40 through the exhaust ducts 43 and 44, and is captured by the filter 41.

【0032】[0032]

【発明の効果】以上説明したように、本発明のシート状
物乾燥用コンベヤ炉によれば、チェーンコンベヤを使用
した場合でも、炉室内を上方から下方に流れる熱風が、
両側コンベヤチェーンの近傍を流れて通風路に戻り、こ
のとき、コンベヤチェーンで発塵する微細な塵を集め
て、上部の炉室フィルタでこれを捕捉し、或は両側コン
ベヤチェーンの近傍を流れる熱風を炉体ハウジング外に
吸引して、外部に設けたフィルタでこれを捕捉するか
ら、コンベヤ炉内のクリーン度を高く保持することがで
き、印刷後のプリント基板のような塵の付着を嫌うシー
ト状物を、良好に乾燥させることができる。
As described above, according to the conveyor for drying a sheet-like material of the present invention, even when a chain conveyor is used, hot air flowing downward from above in the furnace chamber is
The air flows near the conveyor chains on both sides and returns to the ventilation path.At this time, the fine dust generated by the conveyor chains is collected and captured by the upper furnace chamber filter, or the hot air flowing near the conveyor chains on both sides is collected. Is sucked out of the furnace housing and captured by a filter provided outside, so that the cleanliness inside the conveyor furnace can be kept high, and sheets that do not like the adhesion of dust such as printed circuit boards after printing The substance can be dried well.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施形態を示すシート状物乾燥用コ
ンベヤ炉を設けた乾燥装置の全体正面図である。
FIG. 1 is an overall front view of a drying apparatus provided with a conveyor for drying a sheet-like material according to an embodiment of the present invention.

【図2】図1のII-II 拡大断面図である。FIG. 2 is an enlarged sectional view taken along the line II-II of FIG.

【図3】図2のIII-III 拡大部分断面図である。FIG. 3 is an enlarged partial sectional view taken along the line III-III of FIG. 2;

【図4】同コンベヤのシート状物保持枠の正面図であ
る。
FIG. 4 is a front view of a sheet holding frame of the conveyor.

【図5】コンベヤ上のシート状物保持枠の部分拡大側面
図である。
FIG. 5 is a partially enlarged side view of a sheet-like material holding frame on a conveyor.

【図6】他の実施例の拡大断面図である。FIG. 6 is an enlarged sectional view of another embodiment.

【符号の説明】[Explanation of symbols]

4−コンベヤ炉 9−炉体ハウジング 10−チェーンコンベヤ 10a−上搬送路 12−コンベヤチェーン 15−シート状物保持枠 16−クリップ 21−内側包囲壁 21a,21b−チェーンカバー部 22−通風路 23−連通口 24−ヒータ 25−炉室 26−送風機 27−炉室フィルタ 28−分流板 4-Conveyor Furnace 9-Furnace Housing 10-Chain Conveyor 10a-Upper Conveying Path 12-Conveyor Chain 15-Sheet-Retaining Frame 16-Clip 21-Inner Surrounding Walls 21a and 21b-Chain Cover 22-Ventilation Path 23- Communication port 24-heater 25-furnace chamber 26-blower 27-furnace chamber filter 28-distribution plate

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 FI テーマコート゛(参考) // F27D 7/04 F27D 7/04 Fターム(参考) 3F034 NA03 NB01 NB12 3L113 AA02 AB02 AC08 AC35 AC42 BA34 DA01 4K050 AA05 BA17 CD06 CD17 CF06 CF16 CG10 4K063 AA09 AA15 DA26 5E343 AA02 AA11 AA33 ER33 FF09 GG11 ──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 7 Identification symbol FI Theme coat ゛ (Reference) // F27D 7/04 F27D 7/04 F term (Reference) 3F034 NA03 NB01 NB12 3L113 AA02 AB02 AC08 AC35 AC42 BA34 DA01 4K050 AA05 BA17 CD06 CD17 CF06 CF16 CG10 4K063 AA09 AA15 DA26 5E343 AA02 AA11 AA33 ER33 FF09 GG11

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 両側のコンベヤチェーン間に多数の横断
フレームが一定間隔で連結され、該各横断フレーム上に
シート状物をクリップで保持するシート状物保持枠が固
定されてなるチェーンコンベヤと、該チェーンコンベヤ
の上搬送路の上方周囲を断熱壁で包囲して配設された炉
体ハウジングと、該炉体ハウジング内を加熱するための
ヒータと、を備えたシート状物乾燥用コンベヤ炉におい
て、 前記炉体ハウジング内に、前記チェーンコンベヤの上搬
送路の上方を囲う内側包囲壁が配設され、該内側包囲壁
と該炉体ハウジングの断熱壁間の一側に通風路が形成さ
れ、該内側包囲壁の下部に該通風路と該内側包囲壁内を
連通する連通口が該コンベヤチェーンの下側に形成さ
れ、該通風路内に前記ヒータが設置され、該通風路の上
部に該通風路内の空気を該内側包囲壁内の炉室内に送風
するための送風機が設けられ、該炉室内の上部に炉室フ
ィルタが配設され、該炉室内の下部にチェーンコンベヤ
の上搬送路の下側を覆うように分流板が配設され、該内
側包囲壁の下端部と該分流板の両端部により該炉室内の
熱風を該両側コンベヤチェーンの近傍に流すように構成
したことを特徴とするシート状物乾燥用コンベヤ炉。
1. A chain conveyor in which a number of transverse frames are connected at regular intervals between conveyor chains on both sides, and a sheet-like material holding frame for holding a sheet-like material with a clip is fixed on each of the transverse frames. A sheet drying furnace for drying a sheet-like material, comprising: a furnace body housing disposed so as to surround an upper periphery of an upper conveying path of the chain conveyor with a heat insulating wall; and a heater for heating the inside of the furnace body housing. Inside the furnace housing, an inner surrounding wall surrounding the upper conveyor path of the chain conveyor is disposed, and a ventilation path is formed on one side between the inner surrounding wall and the heat insulating wall of the furnace housing. A communication port communicating with the ventilation path and the inside of the inner surrounding wall is formed below the conveyor chain at a lower portion of the inner surrounding wall, and the heater is installed in the ventilation path. Inside the ventilation path A blower for blowing air into the furnace chamber in the inner surrounding wall is provided, a furnace chamber filter is provided in an upper part of the furnace chamber, and a lower part of the upper part of the chain conveyor is provided in a lower part of the furnace chamber. A sheet-shaped sheet, wherein a flow dividing plate is provided so as to cover, and the lower end portion of the inner surrounding wall and both end portions of the flow dividing plate are configured to flow hot air in the furnace chamber near the both-side conveyor chain. Conveyor furnace for drying goods.
【請求項2】 前記両側コンベヤチェーンの近傍を流れ
た熱風が、前記内側包囲壁の下端部近傍に設けた連通口
を通して、前記通風路に戻されるように構成したことを
特徴とする請求項1記載のシート状物乾燥用コンベヤ
炉。
2. The hot air flowing in the vicinity of the conveyor chains on both sides is returned to the ventilation path through a communication port provided near a lower end of the inner surrounding wall. A conveyor furnace for drying a sheet-like material as described in the above.
【請求項3】 前記両側コンベヤチェーンの近傍を流れ
た熱風が、前記炉体ハウジング外に設けた排気ファンに
より該炉体ハウジング外にフィルタを通して排気される
ように構成したことを特徴とする請求項1記載のシート
状物乾燥用コンベヤ炉。
3. The hot air flowing near the conveyor chains on both sides is exhausted through a filter outside the furnace housing by an exhaust fan provided outside the furnace housing. 2. The conveyor furnace for drying a sheet material according to 1.
【請求項4】 前記シート状物保持枠が前記チェーンコ
ンベヤ上に間隔をおいて立設され、該シート状物保持枠
の一面に、隣接するシート状物保持枠との間隔をとるた
めの間隔保持板が突設され、該間隔保持板の先端に軟質
部材が被覆されている請求項1記載のシート状物乾燥用
コンベヤ炉。
4. The sheet-like material holding frame is erected on the chain conveyor at an interval, and one surface of the sheet-like material holding frame is spaced from an adjacent sheet-like material holding frame. The conveyor furnace for drying a sheet-like material according to claim 1, wherein a holding plate is protruded, and a distal end of the spacing holding plate is covered with a soft member.
【請求項5】 前記チェーンコンベヤの下搬送路のコン
ベヤチェーンがカバー体により覆われ、カバー体内の空
気を吸引して外部に排気する排気ファンが設けられると
共に、その排気通路にフィルタが設けられたことを特徴
とする請求項1、2または3記載のシート状物乾燥用コ
ンベヤ炉。
5. A conveyer chain in a lower conveying path of the chain conveyor is covered with a cover, an exhaust fan for sucking air inside the cover and exhausting the air to the outside is provided, and a filter is provided in the exhaust passage. The conveyor furnace for drying a sheet material according to claim 1, 2 or 3, wherein:
JP2000073655A 2000-03-16 2000-03-16 Conveyor furnace for drying sheet materials Expired - Lifetime JP3412043B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000073655A JP3412043B2 (en) 2000-03-16 2000-03-16 Conveyor furnace for drying sheet materials

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000073655A JP3412043B2 (en) 2000-03-16 2000-03-16 Conveyor furnace for drying sheet materials

Publications (2)

Publication Number Publication Date
JP2001263944A true JP2001263944A (en) 2001-09-26
JP3412043B2 JP3412043B2 (en) 2003-06-03

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ID=18591869

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JP3412043B2 (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008185246A (en) * 2007-01-29 2008-08-14 Central Glass Co Ltd Circulation fan casing structure in heating furnace
KR101311606B1 (en) 2006-02-24 2013-09-26 쥬가이로 고교 가부시키가이샤 Heating method for plate materials and retaining device for heating of plate materials
KR101350885B1 (en) 2012-11-13 2014-01-14 신현만 Drying device of pcb substrate
CN104089469A (en) * 2014-07-25 2014-10-08 昆山市三建模具机械有限公司 Infrared spectrum drier
CN107631603A (en) * 2017-11-08 2018-01-26 东莞市科隆威自动化设备有限公司 Silicon chip drying stove
CN111306922A (en) * 2020-03-31 2020-06-19 贵州苗西南饮品有限公司 Online drying equipment for water bucket
CN113648851A (en) * 2021-09-15 2021-11-16 宝应县润华静电涂装工程有限公司 Dewatering device for preparing LTA molecular sieve membrane

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101311606B1 (en) 2006-02-24 2013-09-26 쥬가이로 고교 가부시키가이샤 Heating method for plate materials and retaining device for heating of plate materials
JP2008185246A (en) * 2007-01-29 2008-08-14 Central Glass Co Ltd Circulation fan casing structure in heating furnace
KR101350885B1 (en) 2012-11-13 2014-01-14 신현만 Drying device of pcb substrate
CN104089469A (en) * 2014-07-25 2014-10-08 昆山市三建模具机械有限公司 Infrared spectrum drier
CN104089469B (en) * 2014-07-25 2017-06-06 昆山市三建模具机械有限公司 A kind of infrared spectrum drying machine
CN107631603A (en) * 2017-11-08 2018-01-26 东莞市科隆威自动化设备有限公司 Silicon chip drying stove
CN111306922A (en) * 2020-03-31 2020-06-19 贵州苗西南饮品有限公司 Online drying equipment for water bucket
CN111306922B (en) * 2020-03-31 2023-10-03 贵州苗西南饮品有限公司 Online drying equipment of cask
CN113648851A (en) * 2021-09-15 2021-11-16 宝应县润华静电涂装工程有限公司 Dewatering device for preparing LTA molecular sieve membrane
CN113648851B (en) * 2021-09-15 2024-01-02 宝应县润华静电涂装工程有限公司 Dehydration device for LTA molecular sieve membrane preparation

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