JP2915954B2 - Method for producing oxygen-deficient magnetite - Google Patents
Method for producing oxygen-deficient magnetiteInfo
- Publication number
- JP2915954B2 JP2915954B2 JP2051262A JP5126290A JP2915954B2 JP 2915954 B2 JP2915954 B2 JP 2915954B2 JP 2051262 A JP2051262 A JP 2051262A JP 5126290 A JP5126290 A JP 5126290A JP 2915954 B2 JP2915954 B2 JP 2915954B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetite
- oxygen
- deficient
- carbon dioxide
- electrons
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- SZVJSHCCFOBDDC-UHFFFAOYSA-N iron(II,III) oxide Inorganic materials O=[Fe]O[Fe]O[Fe]=O SZVJSHCCFOBDDC-UHFFFAOYSA-N 0.000 title claims description 50
- 239000001301 oxygen Substances 0.000 title claims description 28
- 229910052760 oxygen Inorganic materials 0.000 title claims description 28
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 title claims description 25
- 230000002950 deficient Effects 0.000 title claims description 16
- 238000004519 manufacturing process Methods 0.000 title claims description 4
- 239000000463 material Substances 0.000 claims description 4
- MWUXSHHQAYIFBG-UHFFFAOYSA-N nitrogen oxide Inorganic materials O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 63
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 30
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 22
- 229910002092 carbon dioxide Inorganic materials 0.000 description 15
- 239000001569 carbon dioxide Substances 0.000 description 15
- 238000006243 chemical reaction Methods 0.000 description 12
- 239000007789 gas Substances 0.000 description 12
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 7
- 229910052742 iron Inorganic materials 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 150000001450 anions Chemical class 0.000 description 4
- 239000001257 hydrogen Substances 0.000 description 4
- 229910052739 hydrogen Inorganic materials 0.000 description 4
- -1 oxygen ions Chemical class 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 238000000354 decomposition reaction Methods 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 description 1
- 206010021143 Hypoxia Diseases 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 238000005755 formation reaction Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 235000000396 iron Nutrition 0.000 description 1
- 150000002926 oxygen Chemical class 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 230000036632 reaction speed Effects 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
Landscapes
- Compounds Of Iron (AREA)
- Catalysts (AREA)
- Treating Waste Gases (AREA)
- Exhaust Gas Treatment By Means Of Catalyst (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 この発明は、炭酸ガスや窒素酸化物等を分解する酸素
欠陥マグネタイトの製造方法に関する。Description: TECHNICAL FIELD The present invention relates to a method for producing oxygen-deficient magnetite that decomposes carbon dioxide, nitrogen oxides and the like.
従来技術とその問題点 従来からマグネタイト自体は、よく知られているが、
これまで酸素の欠陥したものは知られておらず、これら
の化学的な反応性などについては一切知られていなかっ
た。Conventional technology and its problems Although magnetite itself is well known,
Up to now, no oxygen deficiency has been known, and no information on their chemical reactivity has been known.
ところが、マグネタイトの分子構造内は、２価の鉄
（Fe2+）が１個と３価の鉄（Fe3+）が２個存在して計８
価のプラス電荷になり、これが陰イオンを保有する酸素
（O2-）４個と結び付いてFe3O4の安定マグネタイトにな
っているが、このマグネタイトを300℃近辺の雰囲気の
もとでは水素（H2）と反応して酸素（O2-）が水（H2O）
になって逃げ、酸素が欠乏した活性のマグネタイトが得
られることが最近の研究で判明した。However, in the molecular structure of magnetite, there is one divalent iron (Fe 2+ ) and two trivalent irons (Fe 3+ ), and a total of 8
It becomes a positive positive charge, and this is combined with four oxygen (O 2− ) holding anions to form stable magnetite of Fe 3 O 4 , which can be converted to hydrogen under an atmosphere around 300 ° C. (H 2 ) reacts with oxygen (O 2− ) to form water (H 2 O)
Recent research has shown that it is possible to escape and obtain active magnetite that is oxygen deficient.
そこで、この酸素が欠乏した酸素欠陥マグネタイト
は、非常に酸素イオン（O2-）を要求する化学反応をす
る物質であり、炭酸ガス等と反応して炭素（Ｃ）を析出
させ、簡単に炭酸ガス分解ができることになり極めて有
望な素材であることがわかり、大きく謂うならば、炭酸
ガス分解の決め手になって地球温暖化を防止できる期待
がかかっている。Thus, oxygen-deficient oxygen-deficient magnetite is a substance that undergoes a chemical reaction requiring extremely oxygen ions (O 2− ), and reacts with carbon dioxide gas and the like to precipitate carbon (C), thereby easily producing carbon dioxide. It is possible to decompose the gas, which proves to be a very promising material. In other words, there is an expectation that carbon dioxide will be decisive and that global warming can be prevented.
ところが、これまでの研究では、酸素欠陥マグネタイ
トを造るには、どうしても水素（H2）が必要であり、こ
のためにナフサ分解や、水の電解で得た水素をマグネタ
イトに反応させるために水素の無駄があり、また、反応
させる装置を必要とする欠点があった。However, according to previous research, hydrogen (H 2 ) is indispensable to produce oxygen-deficient magnetite. For this reason, it is necessary to convert hydrogen obtained by naphtha decomposition or electrolysis of water into magnetite. There is a drawback that it is wasteful and requires a reaction device.
問題点を解決する手段 この発明は、従来技術である水素を反応させることを
しない次の方法で活性の酸素欠陥マグネタイトを得る方
法である。Means for Solving the Problems The present invention is a method of obtaining active oxygen-deficient magnetite by the following method which does not react hydrogen, which is a conventional technique.
即ち、マグネタイトの素材を250℃〜350℃の雰囲気に
保持した状態で電子を供与し、この電子によって酸素分
子を逃避ならしめてマグネタイトを活性化する酸素欠陥
マグネタイトの製造方法とした。That is, a method for producing an oxygen-deficient magnetite is provided in which electrons are donated while the magnetite material is kept in an atmosphere at 250 ° C. to 350 ° C., and the electrons escape oxygen molecules to activate the magnetite.
発明の作用及び効果 先ず、作用から説明すると、マグネタイトを300℃近
辺の温度に保って、例えば、高電圧をかけると、陰極端
子側のマグネタイト3aから電子（ｅ）が陽極端子側のマ
グネタイトに放電される。このとき、陽極側のマグネタ
イト中の鉄イオン（Fe3+）が還元され、次式によって
（Fe2+）となる。First, when the magnetite is maintained at a temperature around 300 ° C., for example, when a high voltage is applied, electrons (e) are discharged from the magnetite 3a on the cathode terminal side to the magnetite on the anode terminal side. Is done. At this time, iron ions (Fe 3+ ) in the magnetite on the anode side are reduced to (Fe 2+ ) according to the following equation.
Fe3+＋ｅ→Fe2+ … この時、陽極側のマグネタイトは電気的中性を保つ為
にマイナスの荷電を放出しようとし、O2-イオンが消滅
するような反応が促進される。即ち、 2O2-→O2＋4e … の反応が起こる。この時、さらに余分の電子が陽極側の
マグネタイト中に取り残されることになるが、この電子
は式の反応によってFe2+イオンの形成に使われる。結
果的に陽極側のマグネタイト中にはマイナス電荷が過剰
となる為、O2-イオンが消滅するようなポテンシャルが
生じ、式の反応が起こる。即ち、電子が放電によって
打ち込まれるのをきっかけに、連鎖反応的にO2-イオン
がマグネタイトから引き抜かれることとなる。最初の放
電過程を別にすると活性化マグネタイトの形成反応は、 Fe3O4→Fe3O4−ｘ＋x/2O2 となり、1/2個の酸素が逃げて行くために、３価の鉄が
２価の鉄に還元される反応に帰着される。Fe 3+ + e → Fe 2 + ... At this time, the magnetite on the anode side tries to release a negative charge in order to maintain electrical neutrality, and a reaction such that O 2− ions disappear is promoted. That is, a reaction of 2O 2- → O 2 + 4e. At this time, extra electrons are left behind in the magnetite on the anode side, and the electrons are used for forming Fe 2+ ions by the reaction of the formula. As a result, a negative charge becomes excessive in the magnetite on the anode side, so that a potential such that O 2− ions disappear is generated, and the reaction of the equation occurs. That is, the O 2- ions are extracted from the magnetite in a chain reaction triggered by the discharge of electrons. Except for the first discharge process, the activated magnetite formation reaction is Fe 3 O 4 → Fe 3 O 4 -x + x / 2O 2 , and since half of the oxygen escapes, trivalent iron becomes 2 This results in a reaction that is reduced to monovalent iron.
換言すれば、電子が最初に強制的にマグネタイト内に
投入されるれるために同じ陰イオンを持つ酸素分子が放
出された状態を保つことが反応を開始させるのである。
しかし、温度が400℃を超えるようになると鉄イオンが
さらに電子を受けとって金属鉄になってしまう。したが
って、雰囲気温度は、300℃近辺が適当である。In other words, keeping the state in which oxygen molecules having the same anion are released because electrons are forcibly injected into the magnetite first initiates the reaction.
However, when the temperature exceeds 400 ° C., iron ions receive more electrons and become metallic iron. Therefore, the ambient temperature is preferably around 300 ° C.
このようにして造った酸素欠陥マグネタイトにおいて
は、炭酸ガス（CO2）や窒素酸化物（NOx）のような酸素
で代表される陰イオンを持つ化合物と反応しやすく、例
えば、活性化させた酸素欠陥マグネタイトを収容中の室
内に炭酸ガスを吹き込むと酸素イオン（O2-）が取られ
てマグネタイトの表面に炭素（Ｃ）が析出する。The oxygen-deficient magnetite thus produced easily reacts with a compound having an anion represented by oxygen such as carbon dioxide (CO 2 ) or nitrogen oxide (NOx). When carbon dioxide gas is blown into the room containing the defective magnetite, oxygen ions (O 2− ) are taken out and carbon (C) precipitates on the surface of the magnetite.
したがって、炭酸ガスの分解に利用される。また、窒
素酸化物（NOx）の場合では、反応速度が非常に速くて
窒素自体はガスとして分解された後に逃げ、マグネタイ
トの表面に付着しないから300℃の雰囲気で減圧状態に
した容器内にマグネタイトを収容してこの容器内に間欠
的に窒素酸化物を通してやれば、自動的、半永久的に有
害な窒素酸化物（NOx）が酸素と窒素に分解されること
になる。Therefore, it is used for decomposition of carbon dioxide gas. In the case of nitrogen oxides (NOx), the reaction rate is very fast and nitrogen itself escapes after being decomposed as a gas and does not adhere to the surface of magnetite. If nitrogen oxide is intermittently passed through the container and nitrogen oxide (NOx) is automatically and semipermanently decomposed, harmful nitrogen oxide (NOx) is decomposed into oxygen and nitrogen.
実施例 この発明の一実施例について詳述すると、第１図で示
した通り周囲の温度を概ね300℃にヒータ１で保温した
ガスが流通可能な筒状の室２内に、マグネタイト板材3a
及び3bを１〜2mm程度離して設け、この両板材3a,3b間に
数千〜数万ボルトの高電圧を間欠的にかけ得るように構
成する。尚、この室２内を真空ポンプ４で真空状態にし
ておく。また、該室２の前後両側には開閉バルブ5,6を
設けた排ガス供給路７と排出路８を連通し、開閉バルブ
５は３方弁構造になっていて外気あるいは蒸気に連通可
能になっている。Embodiment One embodiment of the present invention will be described in detail. As shown in FIG. 1, a magnetite plate 3a is placed in a cylindrical chamber 2 through which a gas kept at an ambient temperature of approximately 300 ° C. by a heater 1 can flow.
And 3b are provided at a distance of about 1 to 2 mm so that a high voltage of several thousands to several tens of thousands volts can be intermittently applied between the two plate members 3a and 3b. The interior of the chamber 2 is evacuated by the vacuum pump 4. On the front and rear sides of the chamber 2, an exhaust gas supply path 7 provided with on-off valves 5 and 6 and an exhaust path 8 are communicated. The on-off valve 5 has a three-way valve structure and can communicate with outside air or steam. ing.
尚、図例中の記号９は高電圧発生装置、10は排気用の
吸引機を示す。In addition, the symbol 9 in the example of the drawing indicates a high voltage generator, and 10 indicates a suction device for exhaust.
上例の作用について説明すると、先ず最初に、開閉弁
5,6を閉じて、室２内をポンプ４で真空状態にすると共
に、ヒータ１で室２の外周部を加温して室内部を300℃
近辺に保持する。このような状態のもとで高電圧発生装
置９により室２内の陰極端子として使用したマグネタイ
ト3a側から反応素材としてのマグネタイト3b間に高電圧
をかける。すると、マグネタイト3a側の陰極端子から電
子（ｅ）が放電されて陽極端子側のマグネタイト3b側に
電子が強制的にとりこまれる。To explain the operation of the above example, first, the on-off valve
The chambers 5 and 6 are closed and the inside of the chamber 2 is evacuated by the pump 4 and the outer periphery of the chamber 2 is heated by the heater 1 to 300 ° C.
Keep near. Under this condition, a high voltage is applied by the high voltage generator 9 between the magnetite 3a used as the cathode terminal in the chamber 2 and the magnetite 3b as a reaction material. Then, electrons (e) are discharged from the cathode terminal on the magnetite 3a side, and the electrons are forcibly taken into the magnetite 3b side on the anode terminal side.
したがって、このマグネタイト3b内の陰イオンをもつ
酸素分子がとりこめられた電子（ｅ）のために放出を余
儀なくされて跳び出る。このためにマグネタイト3bが活
性化される。即ち、 Fe3O4→Fe3O4-x＋x/2O2 の化学変化を起こし、酸素欠陥マグネタイト（Fe3O
4-x）になる。Therefore, oxygen molecules having anions in the magnetite 3b are forced to release due to the captured electrons (e) and jump out. For this reason, the magnetite 3b is activated. That is, a chemical change of Fe 3 O 4 → Fe 3 O 4- x + x / 2O 2 occurs, and oxygen-deficient magnetite (Fe 3 O 4
4- x).
このようにして室２内のマグネタイト3aが活性マグネ
タイトに変身される。次に、真空ポンプ４を停止し、開
閉弁５を開いて室２内に排ガスの一例である炭酸ガス
（CO2）や窒素酸化物（NOx）を供給する。Thus, the magnetite 3a in the chamber 2 is transformed into active magnetite. Next, the vacuum pump 4 is stopped, the on-off valve 5 is opened, and carbon dioxide (CO 2 ) and nitrogen oxide (NOx), which are examples of exhaust gas, are supplied into the chamber 2.
このとき、炭酸ガスと窒素酸化物との混合ガスである
場合には反応速度の速い窒素酸化物の酸素（O2）が酸素
欠陥マグネタイトに反応して窒素のみがガス状態で室２
内に溜る。At this time, in the case of a mixed gas of carbon dioxide and nitrogen oxide, oxygen (O 2 ) of nitrogen oxide having a high reaction rate reacts with oxygen-deficient magnetite, and only nitrogen is in a gaseous state.
Accumulate inside.
次に、開閉弁５を操作して室２内と大気中とを連通さ
せたのち、開閉弁６を開口して吸引機10で室２内に溜っ
た窒素ガスを放出する。尚、開閉弁５を開口して空気を
取入れて室３内を浄化する方法の他、蒸気を吹き込み蒸
気清浄してもよい。この場合には吸引機10は不要にな
る。Next, after operating the on-off valve 5 to communicate the inside of the chamber 2 with the atmosphere, the on-off valve 6 is opened, and the suction device 10 releases the nitrogen gas accumulated in the chamber 2. In addition, other than the method of opening the on-off valve 5 to take in air to purify the inside of the chamber 3, steam may be blown and steam-purified. In this case, the suction device 10 becomes unnecessary.
このようにして一行程の窒素酸化物の分解を終えるこ
とになる。Thus, the decomposition of the nitrogen oxides in one step is completed.
更に、炭酸ガスの分解をさせる場合には、適宜な手法
で予め窒素酸化物を除去して略々純粋な炭酸ガスにした
後、前記と同じ前行程でマグネタイトを酸素欠陥マグネ
タイトに変化させておき、開閉弁５を開口して炭酸ガス
を室２内に送り込むと、酸素が反応して炭素（Ｃ）がマ
グネタイトの表面に吸着する。したがって、炭酸ガスが
容易に分解されることになる。Further, in the case of decomposing carbon dioxide, after removing nitrogen oxides in advance by an appropriate method to obtain substantially pure carbon dioxide, magnetite is changed into oxygen-deficient magnetite in the same previous step as described above. When the on-off valve 5 is opened and carbon dioxide gas is fed into the chamber 2, oxygen reacts and carbon (C) is adsorbed on the surface of magnetite. Therefore, carbon dioxide is easily decomposed.
尚、炭酸ガス（CO2）と窒素酸化物（NOx）との混合気
体の分離方法は、非常に困難であるが、先に説明した通
り、窒素酸化物の方が反応速度が速いことを利用して、
同じ装置で先ず窒素酸化物の分解をして除去し、再度同
装置で炭酸ガスを分解してもよい。Although it is very difficult to separate a mixed gas of carbon dioxide (CO 2 ) and nitrogen oxide (NOx), as described above, the reaction speed of nitrogen oxide is higher than that of nitrogen oxide. do it,
The nitrogen oxide may be first decomposed and removed by the same apparatus, and the carbon dioxide gas may be decomposed again by the same apparatus.
いずれにしても、この発明は、マグネタイトを300℃
近くの雰囲気のもとで電子を供与して不活性なマグネタ
イト（Fe3O4）を酸素が欠乏した活性のマグネタイト（F
e3O4-x）にし、この酸素欠陥マグネタイト（Fe3O4-x）
を利用できるようにしたものである。In any case, the invention provides a magnetite at 300 ° C.
Under a nearby atmosphere, electrons are donated to make inactive magnetite (Fe 3 O 4 ) oxygen-deficient active magnetite (F
e 3 O 4- x) and this oxygen-deficient magnetite (Fe 3 O 4- x)
Is made available.
図は、この発明の一実施例であって、第１図は一部断面
の要部斜面図、第２図は一部断面の側面図である。 図中の記号 １はヒータ、２は室、3aは陰極端子としてのマグネタイ
ト、3bはマグネタイト、４は真空ポンプ、５と６は切換
弁、７と８は通路、９は高電圧発生装置、10は吸引機を
示す。FIG. 1 shows an embodiment of the present invention. FIG. 1 is a perspective view of a main part of a partial cross section, and FIG. 2 is a side view of a partial cross section. Symbol 1 in the figure is a heater, 2 is a chamber, 3a is magnetite as a cathode terminal, 3b is magnetite, 4 is a vacuum pump, 5 and 6 are switching valves, 7 and 8 are passages, 9 is a high voltage generator, 10 Indicates a suction machine.
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.6，ＤＢ名) C01G 49/00 - 49/08 B01D 53/36 ＣＡＳ ｏｎ−ｌｉｎｅ──────────────────────────────────────────────────続 き Continued on the front page (58) Fields surveyed (Int. Cl. 6 , DB name) C01G 49/00-49/08 B01D 53/36 CAS on-line
Claims (1)
気に保持した状態で電子を供与し、この電子によって酸
素分子を逃避ならしめてマグネタイトを活性化する酸素
欠陥マグネタイトの製造方法。1. A method for producing oxygen-deficient magnetite, in which electrons are donated while a magnetite material is kept in an atmosphere at 250 ° C. to 350 ° C., and the electrons escape oxygen molecules to activate magnetite.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2051262A JP2915954B2 (en) | 1990-03-01 | 1990-03-01 | Method for producing oxygen-deficient magnetite |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2051262A JP2915954B2 (en) | 1990-03-01 | 1990-03-01 | Method for producing oxygen-deficient magnetite |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03252317A JPH03252317A (en) | 1991-11-11 |
| JP2915954B2 true JP2915954B2 (en) | 1999-07-05 |
Family
ID=12882035
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2051262A Expired - Fee Related JP2915954B2 (en) | 1990-03-01 | 1990-03-01 | Method for producing oxygen-deficient magnetite |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2915954B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2524609C1 (en) * | 2013-03-14 | 2014-07-27 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "ДАГЕСТАНСКИЙ ГОСУДАРСТВЕННЫЙ УНИВЕРСИТЕТ" | Method of producing magnetite |
-
1990
- 1990-03-01 JP JP2051262A patent/JP2915954B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2524609C1 (en) * | 2013-03-14 | 2014-07-27 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "ДАГЕСТАНСКИЙ ГОСУДАРСТВЕННЫЙ УНИВЕРСИТЕТ" | Method of producing magnetite |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03252317A (en) | 1991-11-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS60221566A (en) | Thin film forming device | |
| JPS6235521A (en) | Surface processor | |
| JPH0770509B2 (en) | Dry process equipment | |
| JP2915954B2 (en) | Method for producing oxygen-deficient magnetite | |
| JPS5766625A (en) | Manufacture of film | |
| JPH0496226A (en) | Manufacture of semiconductor device | |
| JP2915955B2 (en) | Method for producing oxygen-deficient magnetite | |
| KR102103601B1 (en) | A [process and system for producing iron nitride nano powders and the iron nitride nano powers produced by the process | |
| JPWO2003052167A1 (en) | F ▲ Lower 2 ▼ Gas generator, F ▲ Lower 2 ▼ Gas generation method and F ▲ Lower 2 ▼ Gas | |
| KR101276240B1 (en) | Preparation method of vanadium pentoxide coated titanium oxide powder using thermal plasma, and the vanadium pentoxide coated titanium oxide powder thereby | |
| JPS57161057A (en) | Chemical vapor phase growth device using plasma | |
| JPH03285830A (en) | Activating method for magnetite | |
| Liang et al. | Fast atom and fast ion bombardment of solid nitrogen oxides--an FT-IR study | |
| JPH0794427A (en) | Doping method | |
| JPS5986224A (en) | Removing method of resist | |
| JP2623715B2 (en) | Thin film forming equipment | |
| JPH0437129A (en) | Etching and device thereof | |
| JPS6132414A (en) | Thin film forming equipment | |
| JP4086918B2 (en) | Detoxification method for ferroelectric thin film treatment exhaust gas | |
| JPH02225670A (en) | Formation of thin metallic film by cvd method | |
| JPH03285829A (en) | Magnetite stuck with activated carbon | |
| JPS61136677A (en) | Apparatus for producing silicon | |
| JPH06291095A (en) | Pattern forming method | |
| JPH03285828A (en) | Oxygen-deficient magnetite | |
| JP2585257B2 (en) | Gas treatment method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |