JP2909396B2 - Measuring jig for ultra-fine pitch inspection - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a measurement for an ultra-fine pitch inspection capable of accurately performing a tri-inspection of a disconnection, a short circuit, etc. of an electrode, a terminal or a pattern of a semiconductor, a liquid crystal or the like having an extremely small pitch interval. It is related to a jig.

[0002]

2. Description of the Related Art In recent years, with the remarkable technological progress in the electronics industry, ultra-fine high-integration circuits having a pitch interval of 300 microns or less have been developed. In order to inspect such a high-integrated circuit for disconnection, short-circuit, etc., a conventional plastic measuring jig is formed with a large number of through holes at every pitch interval to be inspected, and a contact probe with a built-in spring is formed in the through hole. A measuring jig in which is fitted and fixed is used.

However, according to the current drilling technique, if fine holes are formed at intervals of 300 microns, an error of about ± 20 microns (up to 40 microns) occurs.
Inspection of ultra-small highly integrated circuits has a problem that it cannot be used with high accuracy. This is because the drilling machine itself has high performance and high machine accuracy, but when performing ultra-fine drilling, an error of about 10 times the machine accuracy occurs because the drill to be machined has no rigidity.

[0004] A measuring jig is formed by forming a U-shaped groove in a plastic measuring jig, fitting a contact probe into the U-shaped portion, and closing the opening of the U-shaped portion with a lid. Was also known. However, this measuring jig is 300
When forming on a measuring jig for inspection of ultra-micron highly integrated circuits of submicron or less, if the contact probe is closely fitted in the groove, the wall between the grooves breaks, so it has to be loosely fitted. Did not. For this reason, a slight gap is formed between the wall and the contact probe, so that an error of about ± 20 μm still occurs. I didn't get it.

[0005] Therefore, the conventional method using a measuring jig is to produce a device which can be used satisfactorily in industry for inspection of ultra-fine highly integrated circuits with a pitch interval of 300 microns or less. Was impossible.

[0006]

SUMMARY OF THE INVENTION The present invention is to solve such a problem, and has a pitch interval of three.
An object of the present invention is to provide a measuring jig for an ultra-fine pitch inspection capable of performing a circuit inspection of an ultra-fine high-integrated circuit of not more than 00 microns without any trouble.

[0007]

Means for Solving the Problems In order to achieve the above object, the present inventors have made intensive studies and as a result, formed a groove for fitting a contact probe into a tapered shape toward the bottom, so that a gap between the grooves was formed. Because the wall of the contact probe becomes strong, the contact probe can be brought into close contact with the wall, and the contact probe can be held at two points on both walls. They found what they could do and arrived at the present invention.

That is, according to the present invention, in a measuring jig in which a number of grooves are formed in a measuring jig and a contact probe is set in the grooves, the grooves are formed in a substantially inverted trapezoidal cross section tapered toward a bottom. The tapered intersection is characterized by an acute angle .

[0009]

Next, an embodiment of the present invention will be described with reference to the drawings. 1 to 3, the groove 2 has a V-shaped cross section.
In the present invention, the grooves 2
It is formed to have a substantially trapezoidal cross section with a cut corner end.

[0010] Figure 1 is a measuring tool 1 formed from a block of plastic, by machining, forming a groove 2,
An example in which a contact probe 3 is bonded and fixed to the groove 2 is shown.

A groove 4 for injecting an adhesive is formed perpendicular to the groove 2 of the measuring jig 1. As shown in FIG. 1, the groove 2, after mounting the spring-loaded contact probe 3, and a groove 2 upward and injecting the adhesive 5 to the groove 4, the adhesive 5 as shown in FIG. 2, the grooves 2 and the contact probe 3 is bonded and fixed to the groove 2.

The depth of the groove 4 for injecting the adhesive is preferably deeper than the depth of the contact probe 3 mounted in the groove 2 as shown in FIG. If the contact probe 3 is bonded and fixed after the adhesive is injected into the groove 2, the groove 4 may be omitted. However, as described above, if the adhesive is injected from the groove 4, all the contact probes 3 can be bonded at one time, which is preferable in terms of production efficiency.

The fixing of the contact probe 3 to the groove 2 does not necessarily require the use of an adhesive. For example, the contact probe to be fixed, a socket portion, or a retaining collar may be formed in the groove 2.

The angle between the grooves 2 can be increased in accuracy by making the intersection as acute as possible.

In order to hold the contact probe 3 in the groove 2, it is preferable to hold the contact probe 3 at two points on both side walls. Contact probe 3
If the points are held, play occurs somewhere, and the accuracy is reduced by the play.

The wall 6 between the adjacent grooves 2 may have a trapezoidal cross section as shown in FIG. 1 or a triangular shape as shown in FIG.

Although the measuring jig of the present invention may be used in the state shown in FIG. 1, the lid 7 may be fixed to the surface on which the contact probe 3 is adhered and fixed as shown in FIG. In FIG. 3, the lid 7 is fixed to the measuring jig 1 by screws 9 on the contact probe 3 via a soft rubber sheet 8.

The measuring jig of the present invention has a pitch interval of 50 to 3
It is particularly suitable as a measuring jig for inspecting highly integrated circuits of about 00 microns.

The measuring jig of the present invention is preferably formed of plastic from the viewpoint of cost and the like, but may be formed of metal or wood. In the case of metal, it is of course necessary to completely insulate.

In order to form the groove 2, it may be molded by a mold or may be cut by ordinary machining. As the contact probe to be held and fixed to the measuring jig of the present invention, a spring built-in or mounted contact probe is particularly suitable.

[0021]

According to the present invention, since the contact probe is held in the tapered groove, it can be held densely in the groove, so that the pitch (A, A 'in FIG. 2) can be maintained.
Can be extremely reduced. This is because the contact probe can be held without a gap, and the error between the pitches can be increased to the accuracy of machining or molding for forming the groove. Also, when holding in a conventional U-shaped groove, it is held at three points, but according to the present invention, it is also held at two points, which is also why a highly accurate measuring jig can be obtained. It has become.

Since the precision of machining or molding for forming a groove in plastic is extremely higher than the precision of drilling, a high-precision jig can be manufactured according to the present invention.

Specifically, conventionally, when manufacturing a measuring jig having a very small pitch of 300 μm or less (A, A ′ in FIG. 2), an error of about ± 20 μm is avoided. However, according to the present invention, it can be easily increased to about ± 5 microns. Since it is linked with the machine precision to be used, the pitch interval of the precision of the current machine precision of the micron precision itself can be obtained.

Measurement of pitch interval of 300 microns or less
In order to make a tool, the intersection of both sides of the trapezoidal groove can be made
It must be sharp. Groove 2 is V-shaped, intersection is sharp
If it is a corner , the groove will be deeper, so the groove should be formed facing
Becomes difficult and the strength becomes weak.

[0025]

As described above, according to the present invention, the strength of the wall between the grooves for holding the contact probes can be extremely increased, so that the contact probes can be tightly held in the grooves without any gap. can be, moreover since it is intended to hold at two points, it is possible to extremely high accuracy of the measurement jig, since the groove was a substantially trapezoidal groove of exchange
Since the groove can be made small even if the point is formed at an acute angle, it is possible to perform a trie inspection of a highly integrated circuit or the like having an extremely small pitch interval without any trouble.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a measuring jig for ultra-fine pitch inspection .

FIG. 2 is a partial top view of FIG.

FIG. 3 is a cross-sectional view showing another example of a measuring jig for ultra-fine pitch inspection .

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Measuring jig 2 Groove 3 Contact probe 4 Groove to inject adhesive 5 Adhesive 6 Wall between grooves

Claims (7)

(57) [Claims] 1. A measuring jig in which a plurality of grooves are formed in a measuring jig and a contact probe is set in the grooves.
Is formed in a generally inverted trapezoidal shape with a tapered cross-section toward the bottom.
A contact probe with an acute angle of intersection
Cron ~ 300 micron pitch set
50 micron to 300 micron ultra-fine pin
Ultra- fine pitch inspection jig for inspecting switch electrodes or patterns . 2. The measuring jig according to claim 1, wherein the contact probe is fixed to the groove with an adhesive. 3. The measuring tool according to claim 1, wherein a wall between the adjacent grooves is formed in a triangular or trapezoidal cross section. Wherein in a direction crossing the groove of the jig, ultrafine pitch inspection measuring jig according to claim 1 comprising a groove for the flow of adhesive in the groove. Wherein said measuring jig, ultrafine pitch inspection measuring jig according to claim 2 obtained by forming a plastic. Wherein said contact probe, ultrafine pitch inspection measuring jig according to claim 1 comprising holding at two points of both walls of the groove. Wherein said contact probe is, ultrafine pitch inspection measuring jig according to claim 1 which is spring-loaded or mounted contact probe.