JP2897503B2 - Heat treatment equipment for metallic materials - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heat treatment apparatus for metal-based materials, and more particularly, to a method for absorbing hydrogen into a metal-based material and releasing hydrogen from the metal-based material having absorbed the hydrogen. The present invention relates to a heat treatment apparatus for crushing a metal-based material, changing the structure of the metal-based material, adjusting physical properties, or crushing the metal-based material.

[0002]

2. Description of the Related Art Conventionally, for example, adjustment of physical properties of a metal-based material or the like (for example, improvement of magnetic characteristics by making crystal grains of a rare-earth (R) -Fe-B-based alloy finer, or coarsening of a structure of a Ti-based alloy) As described above, as one method for improving the fatigue strength and creep resistance characteristics, as described above, at a certain processing temperature, hydrogen is absorbed into the metal-based material and then the hydrogen is released again, whereby the metallographic structure is obtained. In the past, a heat treatment apparatus having a structure shown in FIG. 4 has been studied.

The heat treatment apparatus 1 receives a metal-based material W therein, and heat-treats the metal-based material W to a predetermined processing temperature. The heat-treatment furnace 2 is connected to the heat-treatment furnace 2 through an air supply path 3. Hydrogen tank for storing hydrogen for reaction
And an exhaust means 5 connected to the heat treatment furnace 2 for sucking and exhausting the gas in the heat treatment furnace 2 and an exhaust treatment means 6 for incinerating the exhausted gas and releasing it to the atmosphere. It has a configuration.

[0004] In the heat treatment apparatus 1, after the metallic material W is carried into the heat treatment furnace 2, hydrogen is supplied from the hydrogen cylinder 4 into the heat treatment furnace 2, and the metal material W is supplied into the heat treatment furnace 2. By maintaining the temperature at 500 ° C. to 1000 ° C., the metal-based material W is heated to a predetermined temperature in a hydrogen gas atmosphere to absorb hydrogen, and then while maintaining the temperature in the heat treatment furnace 2 at the temperature. By reducing the pressure in the heat treatment furnace 2 to a vacuum state, hydrogen is released from the metal material W that has absorbed hydrogen.

The hydrogen released from the metal-based material W is exhausted by an exhaust means 5, burned in an exhaust processing means 6 at a later stage, and then released outside the apparatus.

[0006]

In the above-mentioned prior art, the hydrogen used for heat treatment of the metal-based material is supplied from the hydrogen cylinder 4 to the heat treatment furnace 2 and then passed through the exhaust treatment means 6 to the atmosphere. Therefore, new hydrogen must be supplied for each processing step, and as a result, the consumption of hydrogen becomes enormous, and in addition, this hydrogen is stored. In addition, there is a problem that a large-capacity hydrogen cylinder 4 is required.

On the other hand, as a method for dealing with such a problem, for example, it is conceivable to return hydrogen discharged from the heat treatment furnace 2 to the hydrogen cylinder 4 on the supply side.

However, even in such a method, a liquefaction treatment facility for returning hydrogen once vaporized to a liquid is required, which results in an increase in the size of the heat treatment apparatus as a whole and an increase in construction costs of the treatment facility and the like. As a result, it cannot be an effective solution.

Further, when hydrogen once used for heat treatment is reused, it is conceivable that impurities are involved in the treatment in the heat treatment furnace, which may affect the properties of the metal-based material to be heat treated at the time of reuse.

[0010]

SUMMARY OF THE INVENTION The present invention provides a heat treatment apparatus for a metal material which can effectively solve the above-mentioned problems in the prior art. The heat treatment apparatus is a heat treatment furnace that performs a hydrogen storage process for storing hydrogen in a metal-based material, and a hydrogen release process for releasing hydrogen from the metal-based material that stores the hydrogen. A hydrogen storage means made of a hydrogen storage alloy to be stored; an exhaust path for feeding hydrogen released from the heat treatment furnace to the hydrogen storage means; a supply path for supplying hydrogen from the hydrogen storage means to the heat treatment furnace; Vacuum evacuation means for sucking gas in the heat treatment furnace and sending it to the hydrogen storage means, hydrogen purification means provided downstream of the vacuum evacuation means for purifying hydrogen flowing in the exhaust path, Pressure adjusting means provided in the supply path and adjusting the pressure of hydrogen supplied to the heat treatment furnace, and a pressure sensor provided in each of the heat treatment furnace and the hydrogen storage means to measure the internal pressure and internal temperature thereof, and Temperature sensors and, based on the detection signals of these sensors, adjust the internal pressure or internal temperature of the heat treatment furnace and the hydrogen storage means and adjust the operation of the vacuum exhaust means, according to the processing state of the heat treatment furnace. And control means for controlling supply and discharge of hydrogen to the heat treatment furnace.

Further, the heat treatment furnace for a metal material according to the present invention performs a hydrogen storage process for storing hydrogen in the metal material and a hydrogen release process for releasing hydrogen from the metal material storing the hydrogen. A plurality of heat treatment furnaces, hydrogen storage means made of a hydrogen storage alloy for storing hydrogen supplied to and discharged from these heat treatment furnaces, and each of the heat treatment furnaces and the hydrogen storage means are communicated with each other. An exhaust path for feeding hydrogen to the hydrogen storage means, a supply path for supplying hydrogen from the hydrogen storage means to each of the heat treatment furnaces, and Vacuum evacuation means for feeding into the storage means, hydrogen purification means provided downstream of the evacuation means for purifying hydrogen flowing in the evacuation path, and connected to the supply path to be supplied to each of the heat treatment furnaces. Pressure adjusting means for adjusting the pressure of hydrogen, switching means for selectively communicating one of the plurality of exhaust paths and supply paths with the hydrogen storage means, and each of the heat treatment furnace and the hydrogen storage means are provided. By adjusting the temperature of the heat treatment furnace and the hydrogen storage means and the operation of the vacuum evacuation means based on the detection signals from the pressure sensors and the temperature sensors for measuring the internal pressure and the internal temperature thereof, and the detection signals from these sensors, Control means for supplying and discharging hydrogen to each heat treatment furnace according to the processing state of each heat treatment furnace is provided.

[0012]

In the heat treatment apparatus for a metal material according to the first aspect, when the heat treatment furnace is in the step of absorbing hydrogen into the metal material, first, the heat treatment furnace is controlled by the temperature control means controlled by the control means. And the internal temperature of the hydrogen storage means is maintained at a predetermined temperature.

On the other hand, since the hydrogen storage means is kept in a state of storing hydrogen and is in a pressurized state, and the heat treatment furnace is in a depressurized state, the pressure adjusting means is operated. Thereby, the hydrogen in the hydrogen storage means flows into the heat treatment furnace, the internal pressure of the hydrogen storage means decreases, and the internal pressure of the heat treatment furnace increases.

As a result, a hydrogen release phenomenon occurs in the hydrogen storage alloy of the hydrogen storage means, and a hydrogen storage phenomenon occurs in the heat treatment furnace due to the metallic material.

As a result, hydrogen is sequentially sent from the hydrogen storage means to the heat treatment furnace, and the metal-based material is occluded with hydrogen in the heat treatment furnace.

When the heat treatment furnace is in the step of releasing hydrogen from the metal-based material, the internal temperature of the heat treatment furnace and the hydrogen storage means are maintained at predetermined temperatures by the temperature control means controlled by the control means. In addition, the evacuation unit is operated, and the gas in the heat treatment furnace is sucked and sent to the hydrogen storage unit, so that the inside of the heat treatment furnace is depressurized and the inside of the hydrogen storage unit is pressurized.

As a result, a phenomenon of releasing hydrogen from the metallic material occurs in the heat treatment furnace, and a phenomenon of storing hydrogen in the hydrogen storage alloy of the hydrogen storage means.

As a result, the hydrogen released from the metal-based material is purified through the hydrogen purifying means, and then sequentially sent to the hydrogen storing means, and is absorbed and recovered by the hydrogen storage alloy in the hydrogen storing means. You.

In such a heat treatment operation, hydrogen is circulated between the hydrogen storage means and the heat treatment furnace to suppress leakage of hydrogen to the outside, and a hydrogen storage alloy for storing hydrogen is formed by: Since the hydrogen storage capacity is three to four times that of a cylinder having the same capacity, the size of the apparatus can be reduced.

In the heat treatment apparatus for a metal material according to the present invention, when the heat treatment furnace is in a step of absorbing hydrogen into the metal material, first, the heat treatment is performed by the temperature control means controlled by the control means. The internal temperature of the furnace and the hydrogen storage means is maintained at a predetermined temperature.

On the other hand, since the hydrogen storage means is kept in a state of storing hydrogen and is in a pressurized state, and the heat treatment furnace is in a depressurized state, the pressure adjusting means is operated. Thereby, the hydrogen in the hydrogen storage means flows into the heat treatment furnace, the internal pressure of the hydrogen storage means decreases, and the internal pressure of the heat treatment furnace increases.

As a result, a hydrogen release phenomenon occurs in the hydrogen storage alloy of the hydrogen storage means, and a hydrogen storage phenomenon occurs in the heat treatment furnace due to the metallic material.

As a result, hydrogen is sequentially sent from the hydrogen storage means to the heat treatment furnace, and the metal-based material is occluded with hydrogen in the heat treatment furnace.

When the heat treatment furnace is in the step of releasing hydrogen from the metal-based material, the internal temperature of the heat treatment furnace and the hydrogen storage means are maintained at predetermined temperatures by the temperature control means controlled by the control means. In addition, the evacuation unit is operated, and the gas in the heat treatment furnace is sucked and sent to the hydrogen storage unit, so that the inside of the heat treatment furnace is depressurized and the inside of the hydrogen storage unit is pressurized.

As a result, a phenomenon of releasing hydrogen from the metallic material occurs in the heat treatment furnace, and a phenomenon of storing hydrogen occurs in the hydrogen storage alloy of the hydrogen storage means.

As a result, the hydrogen released from the metal-based material is purified through the hydrogen purifying means and then sequentially sent to the hydrogen storing means, where it is absorbed and recovered by the hydrogen storage alloy in the hydrogen storing means. You.

[0027] Also in this case, hydrogen is circulated between the hydrogen storage means and the heat treatment furnace.

Then, when the hydrogen release process in one heat treatment furnace is completed and the hydrogen used for the treatment is occluded in the hydrogen storage device, the switching device connects the hydrogen storage device to another heat treatment furnace, and In addition, hydrogen is supplied to the other heat treatment furnace by the operation of the control means described above, and the hydrogen occlusion process is performed in the other heat treatment furnace.

By switching the connection between the hydrogen storage means and the plurality of heat treatment furnaces, hydrogen is supplied to and discharged from the plurality of heat treatment furnaces by one hydrogen storage means, and the plurality of heat treatment furnaces are connected in parallel. And run.

[0030]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to FIGS. 1 and 2. The heat treatment apparatus 10 for a metal-based material W shown in this embodiment includes:
Storage furnace for performing a hydrogen storage process for storing hydrogen in the metal and a hydrogen release process for releasing hydrogen from the metal-based material W storing the hydrogen, and a hydrogen storage for storing hydrogen supplied to and discharged from the heat processing furnace 11 A hydrogen storage means 12 made of an alloy M; an exhaust passage 13 for feeding hydrogen released from the heat treatment furnace 11 to the hydrogen storage means 12;
A supply path 14 for supplying hydrogen from the heat treatment furnace 11 to the heat treatment furnace 11, and a vacuum evacuation means 15 provided in the exhaust path 13 for sucking gas in the heat treatment furnace 11 and sending it to the hydrogen storage means 12.
A hydrogen purifying means 16 provided on the downstream side of the vacuum evacuation means 15 for purifying hydrogen flowing in the evacuation path 13, and a hydrogen purification means provided in the supply path 14 and supplied to the heat treatment furnace 11. Pressure adjusting means 17 for adjusting the pressure, a pressure sensor 18 and a temperature sensor 19 provided in each of the heat treatment furnace 11 and the hydrogen storage means 12 for measuring the internal pressure and the internal temperature thereof, and the sensors 18 and 19 Based on the detection signal, the heat treatment furnace 1
The supply and discharge of hydrogen to the heat treatment furnace 11 are controlled in accordance with the processing state of the heat treatment furnace 11 by adjusting the internal pressure or the internal temperature of the hydrogen storage means 12 and the operation of the vacuum evacuation means 15. Control means 2
0.

Next, the heat treatment furnace 11 will be described in detail. The heat treatment furnace 11 is an internal heat type having a heater 2 in a vacuum vessel made of graphite, tungsten, molybdenum, or the like, or a vacuum vessel made of Kanthal, siliconite, or the like. An external heating type having an external heater 21 is used. In this embodiment, an external heating type heat treatment furnace 11 is shown.

The external heat type and the internal heat type heat treatment furnace 11 are appropriately changed depending on the type of the metal material W to be treated.

As shown in FIG. 2, the hydrogen storage means 12 includes a pressure vessel 22 forming an outer shell,
Inside, a heat transfer container 23 made of a good heat conductor material and disposed at a predetermined distance from the inner peripheral surface thereof, and a support tube formed of a porous material disposed at the center of the heat transfer container 23 24, the support tube 24 and the heat transfer container 23
Hydrogen storage alloy M filled in the space formed between
And a heater 25 provided to surround the heat transfer container 23.

As the hydrogen storage alloy M, R—Ni alloy (R is a rare earth element), Ti—Fe—Mn alloy, T
An alloy having a large hydrogen absorption and desorption rate near normal temperature, such as an i-Mn alloy, is used.

On the other hand, in FIG. 1, the support tube 2 extends through the wall of the pressure vessel 22 through the wall.
4 and the pressure vessel 22
The pressure sensor 18 and the temperature sensor 19 for measuring the internal pressure and the internal temperature, that is, the pressure and the temperature around the hydrogen storage alloy M, are provided.

The heater 25 is connected to a temperature control means 27 for controlling the amount of heat generated by controlling the current supplied to the heater 25 to adjust the temperature in the pressure vessel 22. I have.

The evacuation means 15 is, for example, a vacuum pump, and is provided with an opening / closing valve before and after the evacuation means. The suction part is connected to the heat treatment furnace 11 and the evacuation part is connected to the evacuation means 15. The hydrogen gas is connected to the hydrogen storage means 12 via the hydrogen purification means 16 and the exhaust path 41 formed therebetween is kept airtight.

The pressure adjusting means 17 is provided with an open / close valve and a pressure reducing valve, respectively.
When the supply of hydrogen to the heat treatment furnace 11 is interrupted and the supply of hydrogen to the heat treatment furnace 11 is performed, the pressure of the hydrogen supplied to the heat treatment furnace 11 is reduced to 1 atm by the pressure reducing valve.
It is made to hold below.

The heat treatment furnace 11 is provided with a pressure sensor 18, a temperature sensor 19, and a temperature control means 28 in the same manner as the hydrogen storage means 12, and is connected to the control means 20, respectively. The current supply to each of the heaters 21 and 25 is controlled based on a control signal from the means 20.

The control means 20 stores a central processing circuit (hereinafter referred to as CPU) 29, a read-only memory (hereinafter referred to as ROM) 30 in which an operation program of the CPU 29 is stored, and a control program for the heat treatment furnace 11. Random access memory (hereinafter referred to as RAM) 31
And the CPU 29, the ROM 30, and the RAM
31 are connected via a bus line to each of the pressure sensors 18, the temperature sensor 19, and the temperature control means 27.2.
8 and I for transmitting and receiving signals to and from the pressure adjusting means 17
/ O interface 32.

On the other hand, the composition of the metal-based material W to be subjected to the heat treatment in this embodiment is, for example, as follows.

One of them is an R-Fe-B alloy (R is a rare earth element) having the following composition. R: 10 to 20 at% B: 3 to 10 at% Fe: balance and unavoidable impurities The following composition is added as necessary. Co: 0.1 to 50 at% M: 0.001 to 5.0 at% where M is Al, Si, Ga, Ti, V, Cr, Zr,
One or two of Nb, Mo, Hf, Ta, W, C, N
More than a species.

The other is a structural material of a Ti-based alloy, for example, the following alloy composition.

1) Al: 6.5 wt%, Sn: 1.4 w
t%, Zr: 1 wt%, Mo: 2.9 wt%, Cr:
2.1 wt%, Fe: 1.7 wt%, and the balance T
2) Al: 6 wt%, V: 4 wt%, and the balance T
3) Al: 6 wt%, Sn: 2 wt%, Zr: 4 wt%
%, Mo: 2 wt%, and the balance being Ti 4) V: 10 wt%, Fe: 2 wt%, Al: 3 wt%
% And the alloy whose balance is Ti

In addition, it can be used as an activation treatment or powdering treatment of a hydrogen storage alloy such as a rare earth-Ni alloy or a Zr-Co alloy. )

A specific example in the case where the heat treatment of the metal-based material W is performed in the heat treatment apparatus 10 of the present embodiment configured as described above will be described as follows.

(Embodiment 1) First, an embodiment using the former R-Fe-B-based alloy as the metal-based material W used for the heat treatment will be described.

The R-Fe-B alloys having the compositions shown in Tables 1 to 4 were melted in a plasma arc melting furnace and then cast.
The homogenization treatment is performed under the condition of 0 hour. This metallic material W
Has a coarse ferromagnetic phase with a particle size of about 120 μm.

[0049]

[Table 1]

When such a metal-based material W is installed in the heat treatment furnace 11, the atmosphere in the heat treatment furnace 11 is evacuated by a device (not shown), and then the control means 20 controls the temperature control means 27 and 28. The control signal is output, and the internal heating of the heat treatment furnace 11 and the hydrogen storage unit 12 is started.

On the other hand, the internal temperatures of the heat treatment furnace 11 and the hydrogen storage means 12 are detected by temperature sensors 19 provided respectively, and fed back to the control means 20. By correcting the control signals output to the control means 27 and 28, the heat treatment furnace 11 is maintained at a predetermined temperature of about 830 ° C., and the internal temperature of the hydrogen storage means 12 is reduced to a predetermined temperature of about 70 ° C. Will be retained.

From this, the control means 20 to the pressure adjusting means 1
7, a drive signal is output and the on-off valve therein is opened, so that the hydrogen storage means 12
It is made to communicate with.

Here, the internal pressure of the heat treatment furnace 11 is detected by the pressure sensor 18 and fed back to the control means 20. Based on the feedback signal, the flow control valve of the pressure control means 17 is adjusted. As a result, the pressure of the hydrogen gas fed into the heat treatment furnace 11 is maintained at about 1 atm or less.

After the supply of hydrogen is completed, the temperature in the heat treatment furnace 11 is adjusted to about 83 by the temperature control means 28.
The temperature is adjusted to 0 ° C., and the metal-based material W is held at the temperature for about 3 hours, whereby hydrogen is absorbed in the metal-based material W.

Next, the temperature in the heat treatment furnace 11 was set to 83
With the temperature maintained at 0 ° C., a drive signal is output from the control device 20 to the pressure adjusting means 17, the on-off valve is closed, and a control signal is output to the vacuum exhaust means 15. 15 is operated to suck the hydrogen in the heat treatment furnace 11 and send it to the hydrogen storage means 12.

As a result, the pressure in the heat treatment furnace 11 is reduced, and the pressure in the hydrogen storage means 12 is increased.
Is released, and the metal-based material W is dehydrogenated.

The pressure in the heat treatment furnace 11 at this time is 1 × 10 ⁻ by the detection signal from the pressure sensor 18 and the control of the operation amount of the vacuum exhaust means 15 by the control means 20 based on the detection signal. It is kept below ¹ Torr.

With the operation of the vacuum evacuation means 15, the hydrogen released in the heat treatment furnace 11 is sent into the pressure vessel 17 of the hydrogen storage means 12 via the hydrogen purification means 16. During the passage, impurities taken into hydrogen or a gas containing hydrogen are removed.

Further, the gas is sent into the hydrogen storage means 12 by the vacuum evacuation means 15 so that the pressure vessel 1
The hydrogen pressure in 7 is increased, whereby the hydrogen is absorbed and recovered in the hydrogen storage alloy M in the hydrogen storage means 12.

Incidentally, the Nd-Fe-B-based alloy of each of the above-mentioned compositions after this treatment is pulverized to 400 μm or less, and Nd2Fe of 0.2 to 0.4 μm is contained inside the powder.
It was confirmed that it had a structure composed of recrystallized grains of 14B and had desired magnetic properties.

As described above, in the heat treatment apparatus 10 of this embodiment, hydrogen used for heat treatment of the metal material W is
Exchanged between the hydrogen storage means 12 and the heat treatment furnace 11,
Since the release of hydrogen to the outside of the equipment is suppressed, the amount of hydrogen used is greatly reduced, and various equipment for the exhaust treatment system is not required. Can be.

Further, since the hydrogen storage alloy M used as the hydrogen storage means 12 has three to four times the hydrogen storage capacity as compared with a conventional cylinder having the same capacity, the hydrogen storage alloy M is also used in this device. Since the size is reduced and the hydrogen is purified by the hydrogen purifying means 16 in the stage of recovery to the hydrogen storage means 12, the hydrogen can be re-used at the time of reuse.
The influence on the heat treatment of the metal material W is suppressed.

Here, in the heat treatment apparatus 11 of this embodiment, the initial hydrogen storage amount in the hydrogen storage
The left column of Table 2 shows the results obtained by measuring the amount of hydrogen reduction after treating the metal-based material W of each composition 10 times each with Nm ³ .

[0064]

[Table 2]

For comparison, the right column of Table 2 shows the remaining amount of hydrogen when the same metal-based material W is subjected to a heat treatment by a conventional apparatus.

As is clear from these results, according to the present embodiment, hydrogen is hardly reduced, and an extremely large effect can be obtained.

(Example 2) Next, an example using the latter Ti-based alloy as the metal-based material W will be described.

First, for each of the Ti-based alloy powders having the composition shown in Table 3 and having an average particle diameter of 120 μm, the hot isostatic pressure was maintained at 750 ° C., 2000 atm and 3 hours. Pressing was performed to form a structural member as a metal-based material W having a predetermined shape.

[0069]

[Table 3]

This metal-based material W was placed in a heat treatment furnace 11 equipped with an internal heat type graphite heater,
After evacuating the air in 1 with equipment not shown,
By operating each component of the heat treatment apparatus 10 by the control means 20, 850 can be obtained in the same manner as in the previous embodiment.
Hydrogen was absorbed in the metal-based material W in an atmosphere of 1 ° C. and 1 atm, and then the metal-based material W was subjected to dehydrogenation at 850 ° C. and 1 × 10 ⁻⁴ Torr.

By such a heat treatment, the coarse α
A Ti-based alloy having a + β phase is obtained, and the Ti-based alloy having such a composition is excellent in high cycle fatigue strength and creep resistance.

Also in this case, the hydrogen used for the heat treatment is exchanged between the hydrogen storage means 12 and the heat treatment furnace 11, whereby the leakage of hydrogen to the outside of the apparatus is suppressed.

Here, the hydrogen storage amount in the initial state is 35 Nm
^The results of measuring the amount of hydrogen reduction when the above-described treatment was performed 20 times for each Ti-based alloy by the apparatus of Example ^{3 shown} in FIG. ³ are shown in the left column of Table 4, and are shown in the right column of Table 4. The column shows, for comparison, the amount of hydrogen reduction when heat treatment was performed on each Ti-based alloy of this example using a conventional apparatus.

[0074]

[Table 4]

As is apparent from the results, no reduction in hydrogen was observed in this embodiment, and a significant improvement was achieved as compared with the conventional apparatus.

Next, one embodiment of the present invention will be described with reference to FIG. In the following description, the same components as those in the above-mentioned embodiment will be omitted from description using the same reference numerals.

The heat treatment apparatus 40 for a metal-based material according to the present embodiment performs a hydrogen storage process for storing hydrogen in the metal-based material W and a hydrogen release process for releasing hydrogen from the metal-based material storing the hydrogen. A plurality of heat treatment furnaces 11 (1
1a and 11b) and these heat treatment furnaces 11 (11a and 1b).
1b), a hydrogen storage means 12 made of a hydrogen storage alloy M for storing hydrogen supplied and discharged to and from each of the heat treatment furnaces 11 (11a).
11b) and the hydrogen storage means 12 are communicated with each other, and the exhaust path 41 (41) for feeding hydrogen released from each heat treatment furnace 11 (11a / 11b) to the hydrogen storage means 12
a. 41b) and a supply path 42 for supplying hydrogen from the hydrogen storage means 12 to each of the heat treatment furnaces 11 (11a and 11b).
(42a and 42b) and the exhaust passage 41 (41a and 41b).
b), each of the heat treatment furnaces 11 (11a
b) Vacuum exhaust means 15 (15a, 15b) for sucking the gas inside and sending it to the hydrogen storage means 12, and the exhaust path 41 (41a) provided downstream of these vacuum exhaust means 15 (15a, 15b). The hydrogen purifying means 16 (16a, 16b) for purifying the hydrogen flowing through 41b) is connected to the supply path 42 (42a, 42b) and supplied to each of the heat treatment furnaces 11 (11a, 11b). The pressure adjusting means 17 (17a / 17b) for adjusting the pressure of hydrogen, the plurality of exhaust paths 41 (41a / 41b) and the supply path 4
Switching means 43 for selectively communicating one of the hydrogen storage units 2 (42a and 42b) with the hydrogen storage means 12; and the heat treatment furnaces 11 (11a and 11b) and the hydrogen storage means 12 are provided respectively in Pressure sensor 18 for measuring pressure and internal temperature and temperature sensor 19
Based on the detection signals from the sensors 18 and 19, the temperatures of the heat treatment furnaces 11 (11a and 11b) and the hydrogen storage means 12 and the evacuation means 15 (15a.
By controlling the operation of 15b), control means 20 for supplying and discharging hydrogen to and from each heat treatment furnace 11 (11a / 11b) in accordance with the processing state of each heat treatment furnace 11 (11a / 11b). It has a schematic configuration.

Each of the vacuum evacuation means 15 is provided with an on-off valve at the front and back, and in this embodiment, each of the heat treatment furnaces 11 is provided.
(11a, 11b), each suction unit is connected to each of the heat treatment furnaces 11 (11a, 11b), and an exhaust unit is connected to the hydrogen storage unit 12 via the switching unit 43. The exhaust passage 41 formed therebetween is kept airtight.

In the present embodiment, the pressure adjusting means 17 is provided for each of the heat treatment furnaces 11 (11a and 11b), and is provided with an opening / closing valve and a pressure reducing valve, respectively. The supply path 42
(42a, 42b) is closed, the communication between the hydrogen storage means 12 and each of the heat treatment furnaces 11 (11a, 11b) is cut off, and hydrogen is supplied to each of the heat treatment furnaces 11 (11a, 11b). In this case, the pressure of hydrogen supplied to each of the heat treatment furnaces 11 (11a and 11b) is reduced by 1 by the pressure reducing valve.
atm or less.

The evacuation means 15 and the pressure adjusting means 1
7 does not necessarily have to be provided for each heat treatment furnace 11, and can be shared by a plurality of heat treatment furnaces 11 by further adding a switching means 43.

The switching means 43 is provided with evacuation means 15a (1) provided for each of the heat treatment furnaces 11a and 11b.
5b) and a flow switching valve 43a (43b) connected to the pressure adjusting means 17a (17b), and these flow switching valves 43a and 43b are connected to selectively communicate these with the hydrogen storage means 12. And a flow path switching valve 43c.
By the combination of the operating positions of 3a, 43b and 43c,
The following four hydrogen flow paths are formed.

A: hydrogen storage means 12 → flow path switching valve 4
3c → flow path switching valve 43a → pressure adjusting means 17a → one heat treatment furnace 11a B; one heat treatment furnace 11a → vacuum exhaust means 15a → flow path switching valve 43a → flow path switching valve 43c → hydrogen storage means 12C; hydrogen Storage means 12 → flow path switching valve 43 c → flow path switching valve 43 b → pressure adjusting means 17 b → other heat treatment furnace 11 b D; other heat treatment furnace 11 b → evacuation means 15 b → flow path switching valve 43 b → flow path switching valve 43 c → hydrogen storage means 12

Further, in this embodiment, a hydrogen cylinder 46 is connected between the flow path switching valve 43c and the hydrogen storage means 12 via an on-off valve 45, so that the hydrogen filling at the beginning of operation can be performed. Alternatively, it is used for replenishment when hydrogen is reduced due to leakage or the like.

The on-off valve 45 is connected to the evacuation unit 15.
(15a, 15b) and the pressure adjusting means 17 (17a.
17b) is connected to the control means 20, and the operation is controlled by a control signal output from the control means 20.

On the other hand, the metal material W to be treated in the heat treatment apparatus 40 of the present embodiment is the same as that shown in the above-described embodiment.

The heat treatment apparatus 40 according to the present embodiment
For example, when the metal-based material W is installed in one of the heat treatment furnaces 11a and the apparatus is started, the respective heaters 21 and 25 are caused to generate heat by the respective temperature controllers 27 and 28 controlled by the controller 20. The temperature information in the heat treatment furnaces 11 (11a and 11b) and the hydrogen storage means 12 is fed back to the control means 20 by the temperature sensors 19, so that the heat treatment furnaces 11
(11a and 11b) and the inside of the pressure vessel 22 of the hydrogen storage means 12 are maintained at a predetermined temperature.

Thus, each of the flow path switching valves 43a.
43b and 43c are operated by the control means to form the hydrogen flow path indicated by A, and the hydrogen storage means 12
From the heat treatment furnace 11 while its pressure is maintained at 1 atm or less by the action of the pressure reducing valve of the pressure adjusting means 17a.
a.

By the above operation, the heat treatment furnace 11a
In the inside, a process of absorbing hydrogen into the metal-based material W is performed.

After the above-described hydrogen storage processing on the metal storage rectangular material W is completed, the flow path switching valve 43a is operated by the control means 20, the flow path B is formed, and the opening and closing of the pressure adjustment means 17a is performed. By closing the valve and activating the evacuation means 15a,
Hydrogen in the heat treatment furnace 11a is sucked and sent to the hydrogen storage means 12.

As a result, the pressure in the heat treatment furnace 11a is reduced and the pressure in the hydrogen storage unit 12 is increased.
a, a hydrogen release phenomenon occurs, and a hydrogen storage phenomenon occurs in the hydrogen storage alloy M of the hydrogen storage means 12.

Then, when supplying hydrogen to the heat treatment furnace 11 and discharging hydrogen from the heat treatment furnace 11, the hydrogen flowing in the system is passed through the hydrogen purification means 16 to purify the hydrogen.

As a result, the metal material W is dehydrogenated in the heat treatment furnace 11a, and the hydrogen released from the metal material W is sent to the hydrogen storage means 12 through the discharge path 41a. Hydrogen storage alloy M inside
Occluded and collected.

Such an operation is performed by both heat treatment furnaces 11a and 1a.
1b, the hydrogen stored in the single hydrogen storage means 12 is used alternately in each of the heat treatment furnaces 11a and 11b, similarly to the above embodiment.

As described above, while the hydrogen storage process is being performed in the other heat treatment furnace 11b, the one heat treatment furnace 11a cools or unloads the heat-treated metal-based material W or removes the new metal-based material. The loading operation of W is performed.

When the amount of hydrogen is reduced by repeating the heat treatment or by opening the system to the outside air for inspection or the like, in this embodiment, the on-off valve 45 is operated, and A desired amount of hydrogen is supplied from the cylinder 46 to the apparatus.

The thermal conditions and pressure conditions in the heat treatment of this embodiment are almost the same as those of the above-described embodiment, and the characteristics of the heat-treated metal material W are almost the same as those of the above-described embodiment. was gotten.

Also in the heat treatment of this embodiment, hydrogen used for the heat treatment is transferred between the hydrogen storage means 12 and each of the heat treatment furnaces 11 (11a and 11b).
Since the leakage to the outside of the apparatus is suppressed, the amount of hydrogen used is small, and two heat treatment furnaces 11 (11a and 11a) are used.
b) is operated by a single hydrogen storage means 12 with the amount of hydrogen required for one heat treatment, thereby minimizing the size of the apparatus.

Also in this embodiment, as in the first embodiment, the hydrogen in the heat treatment furnace 11 (11a, 11b) is directly sent to the hydrogen storage means 12, so that the hydrogen in the heat treatment furnace 11 The depressurization, the pressurization in the hydrogen storage means 12, and the operation of feeding hydrogen into the hydrogen storage means 12 are performed at the same time, thereby simplifying the operation system, and further providing the pressure adjusting means 17 in the supply path 42. As a result, the pressure of hydrogen supplied from the hydrogen storage unit 12 to the heat treatment furnace 11 is accurately controlled, and stable heat treatment is performed.
Moreover, since the hydrogen recovered by the hydrogen storage means 12 is purified by the hydrogen purification means 16 at a stage prior to the recovery, the effect on the heat treatment of the metal-based material W when the hydrogen is reused is suppressed.

In the above embodiment, the pressurization in the hydrogen storage means 12 is performed by the vacuum exhaust means 43.
It is also possible to provide a pressurizing means between the hydrogen storage means 2 and the pressure generating means 2 to further increase the pressure in the hydrogen storage means 12.

This is an effective means for increasing the amount of hydrogen stored in the hydrogen storage means 12.

The various shapes and configurations of the constituent members shown in each of the above embodiments, the processing conditions, and the like are merely examples, and can be variously changed based on the composition of the metal material to be applied, design requirements, and the like. .

For example, in each of the above embodiments, an example was described in which hydrogen gas was used for the heat treatment. Alternatively, a mixed gas with an inert gas may be used. The hydrogen partial pressure may be used as a control factor for pressure control.

Also, an example in which two heat treatment furnaces 11 are provided has been described. However, the present invention is not limited to this, and three or more heat treatment furnaces 11 may be provided as long as the cycles of the heat treatment furnace 11 do not overlap. It is also possible to provide a furnace 11.

[0104]

As described above, according to the first aspect of the present invention,
According to the heat treatment apparatus for a metal-based material described above, the following excellent effects can be obtained.

A closed circuit for transferring hydrogen is formed between the hydrogen storage means and the heat treatment furnace, and the hydrogen is transferred between the hydrogen storage means and the heat treatment furnace so that the hydrogen can be used repeatedly. Can be greatly reduced.

Further, by using a hydrogen storage alloy for the hydrogen storage means, the hydrogen storage capacity can be increased, the size of the container for storing hydrogen can be reduced, and the size of the entire apparatus can be reduced.

The hydrogen used for the heat treatment is directly sent from the heat treatment furnace to the hydrogen storage means by the vacuum exhaust means, so that the pressure reduction operation in the heat treatment furnace, the pressurization operation in the hydrogen storage means, and the hydrogen transfer operation , The operation system of the heat treatment apparatus can be simplified.

Since the supply of hydrogen to the heat treatment furnace is performed through the pressure adjusting means, the pressure of hydrogen supplied to the heat treatment furnace can be finely controlled, and stable heat treatment can be performed.

On the other hand, according to the heat treatment apparatus for a metal material according to the second aspect of the present invention, the following excellent effects are obtained in addition to the heat treatment apparatus according to the first aspect.

A plurality of heat treatment furnaces can be operated with the amount of hydrogen necessary for one heat treatment by the action of a single hydrogen storage means and a switching means. Can be minimized.

[Brief description of the drawings]

FIG. 1 is a block diagram schematically showing a heat treatment furnace for a metal-based material according to claim 1 of the present invention.

FIG. 2 is a partially cutaway perspective view showing a hydrogen storage means used in the metal material heat treatment furnace according to claims 1 and 2 of the present invention.

FIG. 3 is a block diagram schematically showing a heat treatment furnace for a metal-based material according to claim 2 of the present invention.

FIG. 4 is a block diagram showing a conventional metal material heat treatment furnace.

[Explanation of symbols]

 REFERENCE SIGNS LIST 10 heat treatment apparatus 11 heat treatment furnace 12 hydrogen storage means 13 exhaust path 14 air supply path 15 evacuation means 16 hydrogen purification means 17 pressure adjustment means 18 pressure sensor 19 temperature sensor 20 control means 22 pressure vessel 27 temperature control means 28 temperature control means 40 Heat treatment apparatus 41 Exhaust path 42 Supply path 43 Switching means 43a Flow switching valve 43b Flow switching valve 43c Flow switching valve

Continuation of the front page (58) Field surveyed (Int.Cl. ⁶ , DB name) C21D 1 / 00,1 / 74 C21D 1 / 76,6 / 00 C22F 1/02 F27D 7/06 H01F 1/053

Claims (2)

(57) [Claims] 1. A heat treatment furnace for performing a hydrogen storage process for storing hydrogen in a metal material and a hydrogen release process for releasing hydrogen from the metal material having stored hydrogen, and hydrogen supplied to and discharged from the heat treatment furnace A hydrogen storage means made of a hydrogen storage alloy for storing hydrogen, an exhaust path for feeding hydrogen released from the heat treatment furnace to the hydrogen storage means, a supply path for supplying hydrogen from the hydrogen storage means to the heat treatment furnace, and an exhaust path. Vacuum evacuation means provided for sucking gas in the heat treatment furnace and sending the gas to the hydrogen storage means; hydrogen purification means provided downstream of the vacuum evacuation means for purifying hydrogen flowing in an exhaust path; Pressure control means for adjusting the pressure of hydrogen supplied to the heat treatment furnace, and pressure control means provided in each of the heat treatment furnace and the hydrogen storage means. The pressure sensor and the temperature sensor to be measured, and the internal pressure or internal temperature of the heat treatment furnace and the hydrogen storage unit are adjusted based on the detection signals of these sensors, and the operation of the vacuum exhaust unit is adjusted. A heat treatment apparatus for a metal-based material, comprising: control means for controlling supply and discharge of hydrogen to a heat treatment furnace according to a treatment state. 2. A plurality of heat treatment furnaces for performing a hydrogen storage process for storing hydrogen in a metal material and a hydrogen release process for releasing hydrogen from the metal material storing the hydrogen, and supplying and discharging the heat to and from these heat treatment furnaces. A hydrogen storage means made of a hydrogen storage alloy for storing hydrogen to be performed, and an exhaust passage for communicating hydrogen released from each heat treatment furnace to the hydrogen storage means while connecting the heat treatment furnaces to the hydrogen storage means; A supply path for supplying hydrogen from the hydrogen storage means to each heat treatment furnace,
Vacuum exhaust means connected to the exhaust path and sucking the gas in each of the heat treatment furnaces and sending it to the hydrogen storage means, and is provided downstream of the vacuum exhaust means and purifies hydrogen flowing in the exhaust path. Hydrogen purification means, which is connected to the supply path,
Pressure adjusting means for adjusting the pressure of hydrogen supplied to each of the heat treatment furnaces, switching means for selectively communicating one of the plurality of exhaust paths and supply paths to the hydrogen storage means, A pressure sensor and a temperature sensor which are provided in each of the hydrogen storage means and measure the internal pressure and the internal temperature thereof, and the temperature of the heat treatment furnace and the hydrogen storage means and the vacuum exhaust means based on the detection signals from these sensors. A heat treatment apparatus for a metal-based material, comprising: control means for supplying and discharging hydrogen to and from each of the heat treatment furnaces according to the processing state of each of the heat treatment furnaces by adjusting the operation.