TW205572B - - Google Patents

Description

A6 Π557Γ _ ^ _ printed by Beigong Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (3) The present invention relates to a method and device for heat treatment of metal materials, in particular, to absorb hydrogen in metal materials and absorb gold. The argon gas in the material is released to change the structure of the metal material for physical adjustment, or a heat treatment device for the crushing of the gold material. There is a method for adjusting the physical properties of metal materials, etc. in the conventional technology. T _ (for example, the crystal grains of the rare earth (R) -Fe-B alloys are refined to improve their magnetic properties, or Ti The structure of the bar alloy is coarsened to improve fatigue strength and creep characteristics). This method is like absorbing hydrogen gas to a metal material at one of its processing temperatures and releasing the hydrogen gas again, thereby changing the metal structure. Fig. 1 shows a conventional heat treatment device. The heat treatment device 101 of No. 1 includes: a heat treatment furnace 102 that contains a metal material W and heats the metal material W to a specific processing temperature; a hydrogen pin bottle that is connected to the heat treatment furnace 102 via a gas supply path 103 and stores hydrogen for reaction 104; an exhaust device 105 connected to the heat treatment furnace 102 to attract the gas in the heat treatment furnace 102 and discharge it; and an exhaust treatment device 106 that burns the exhausted gas and discharges it into the atmosphere. After the metal material W is carried into the heat treatment furnace 102 for vacuum treatment, the heat treatment device 101 supplies hydrogen from the hydrogen pin 104 to the heat treatment lub 102, and maintains the temperature in the heat treatment furnace 102 at 500¾ ~ 1000C, thereby The metal material W is heated to a specific temperature in the surrounding environment of hydrogen to absorb hydrogen, and then the temperature in the heat treatment furnace 102 is maintained at this temperature, and the pressure in the heat treatment furnace 102 is reduced to a vacuum state, thereby making the metal material W Release the absorbed hydrogen. The hydrogen gas emitted from the metal material W is exhausted through the exhaust device 105, and this paper standard is applicable to the Chinese National Standard (CNS) A 4 specifications (210 X 297 mm) 3 〃 Please read the precautions on the back before filling this page)

A pack. Order. A6 B6 205572 5. Description of the invention (4) After being burned in the exhaust treatment device 106 in the rear stage, it is discharged outside the device. In this conventional technique, the hydrogen used in the heat treatment of the metal material is supplied from the hydrogen cylinder 104 to the heat treatment furnace 102, and then discharged into the atmosphere through the exhaust treatment device 106. Therefore, the hydrogen must be supplied again every time the treatment process is performed. The hydrogen consumption becomes very large, and in order to store hydrogen, a large-capacity hydrogen cylinder 104 must be used. f The solution to the above problem is, for example, a method of returning the hydrogen gas discharged from the heat treatment tank 102 to the hydrogen dysprosium bottle 104 on the supply side. However, this method still requires the use of liquefaction treatment equipment to restore the vaporized hydrogen gas to liquid. As a result, the overall heat treatment device becomes large, and the installation cost of the treatment equipment increases, which is not an effective solution. Especially when many heat treatment furnaces are used for heat treatment, it is necessary to install a hydrogen gas supply system on each heat treatment furnace, and as a result, the equipment becomes larger. In addition, when the hydrogen once used for heat treatment is reused, impurities may be mixed during the treatment in the heat treatment furnace, which adversely affects the treatability of the gold tantalum material that has been heat-treated at the same time. The main object of the present invention is to provide a heat treatment method for metal materials that can solve the problems of the above-mentioned conventional techniques. Another object of the present invention is to provide an apparatus that can implement the heat treatment method. According to the first aspect of the present invention, there can be provided a heat treatment method for gold-thorium materials. The method includes the following processes: hydrogen absorption treatment for absorbing hydrogen in metallic materials and hydrogen gas-releasing treatment for releasing hydrogen from the gold-thorax materials for hydrogen absorption; And release the metal materials · Hydrogen recovery and recovery of hydrogen. This paper standard applies to China National Standard (CNS) A 4 specifications (210 X 297 mm)-, ------------- (Installed ------ Order ^ 1 · 4 V, please read the precautions on the back before writing this page) Printed 205572 A6 B6 by the Beigong Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economy _ V. Invention Instructions (5) Again The hydrogen recovery process supplied to the hydrogen absorption and release process. In the hydrogen recovery process, hydrogen can also be stored in the hydrogen absorbing alloy and the stored hydrogen can be released; it can also be repeated to include hydrogen absorption treatment that absorbs hydrogen in the gold and gold material and releases from the metal material that absorbs hydrogen Hydrogen hydrogen release process hydrogen absorption process. During the argon treatment, the amount of hydrogen absorbed and the amount of dehydrogenation are approximately equal, and the amount of recovered hydrogen is approximately equal to the amount of hydrogen at the next lotus turn, so it is almost unnecessary to re-supply hydrogen. The leakage disappears, and the amount of disappearance is extremely small, as long as the amount of hydrogen gas that disappears is supplemented. According to the second aspect of the present invention, there can be provided a heat treatment apparatus for a metal material, the apparatus including: a hydrogen absorption process for absorbing hydrogen in a gold lute material and releasing hydrogen from the hydrogen-absorbing metal material The heat treatment lobe for release treatment; and attached to the heat treatment furnace for recovering the hydrogen gas released from the heat treatment furnace and supplying the hydrogen to the hydrogen recovery device of the heat treatment furnace again. The hydrogen recovery device may also be composed of a hydrogen storage device made of a hydrogen absorption alloy, and may also be composed of a hydrogen absorption process for absorbing hydrogen in a metal material and a hydrogen release process for releasing hydrogen from a metal material that absorbs hydrogen 2 Composition of heat treatment furnace. For the hydrogen absorbing alloy storage device, for example, the hydrogen absorbing alloy storage device shown in Japanese Patent Laid-Open No. 55-126198 or U.S. Patent No. 4270360 can be used. The device is composed of two porous plates fixed in parallel in a closed container at a certain interval, and a heating and cooling section provided on the outside of the two porous plates and separated from each porous plate by an interval, and formed in the porous The size of the paper on the board is in accordance with China National Standard (CNS) A4 (210 X 297). Please read the precautions on the back before writing this page) 丨 Installed-Printed by the Employee Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5 clothing 205572 a6 Ββ 5. Description of the invention (6) Store, after storage. However, if it is cold or the hot gold addition part is stored, the cold storage gas will be filled with hot hydrogen filling in the hydrogen space inside the air. At the same time, the Jinjin Department absorbed the cold storage or the hot gas was added and added a hydrogen ¾ and j in the heated part of the furnace as far as possible in the heat and pressure, such as the heat and pressure, the department changed its letter and measured the test The tester can be used to set the sensor, and the sensor can be installed on the device according to the reason for storage and heat storage. The gas generator can detect hydrogen and sense the temperature of the furnace. The heat exhausting furnace is arranged to borrow heat here, and the pressurized part of the autoclave is filled with hydrogen from the temperature and the furnace or the force, and the stored gas is stored in the state of storage. The hydrogen is placed and installed in the argon pressure to maintain the temperature control system. The temperature is controlled in the installed formal furnace. The control and installation place is used for heat storage and storage. When the hydrogen is in the middle, the process will be installed. In the manufacturing structure, the material temperature is controlled and the material is placed in the structure of the storage, absorption and temperature control, so that the furnace can be gasified, and the heat of hydrogen is like this. At the same pressure as suction, the vitality will be compressed into gold, the pressure will be fixed, and the special harvest will be combined with the suction pressure and the gas will be degraded and the temperature will be set at the same time. Was expected to follow. The material gas belongs to the place of hydrogen. The gold is collected from the gas, the gas is stored in the argon, and the hydrogen is charged. The raw materials are stored. The gas is produced. The hydrogen in the gas is processed properly. It is hot everywhere, and now it is inhaled until it is sent / received / please read the precautions on the back and then fill out this page.) The installation material is controlled by the power system, and the heat control is made at the furnace installation location. It is made with a square face, and it is formulated for a period of time and is specially tailored to the temperature and temperature. The temperature of the gas storage furnace in which the temperature is kept and the temperature is kept at the same time will be the same as the heat, and the material is collected and the material is collected and the gas is absorbed. The hydrogen heat is present in the gas management department, and, for example, as shown in the figure, the pressure is released and the gas is released until the hydrogen is released and the paper ruler is fully compliant with the Chinese National Standard (CNS) A 4 specifications (210 X 297 mm) a6 B6 V. Description of the invention (7) Printed by the Employee Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economy I —---------------- ^ -------- Installed ----- -Subscribe ----- 1.4 ------------------------ V Please read the precautions on the back and then write this page) The furnace is supplied with compressed gas When the hydrogen is supplied to the suction gas, the hydrogen supplied by the suction gas may be connected or connected, but the power of the gas is placed in the place of the gas hydrogen furnace and the furnace is installed in the same way. The hydrogen is reasonably hot Empty furnace pressure furnace gas structure, intercommunicating storage location for transportation and storage. Furnace will install the truth gas distribution center in the middle storage area with gas. The heat in the hydrogen gas and the heat in the middle of the heat is really stored when the hydrogen is stored, _ gas is placed in the heat, placed in the middle section for the storage, and the material is installed from the top. Furnace regulation and supply site, gas path, general order, hydrogen equipment, secondary storage, storage and management, but heating hydrogen back to Lian Shun, heating gold will be stored in the storage location, controlled and closed. The control of a gas-gas-gas-gas-heating furnace can be installed in the same way as when it is installed. When hydrogen and hydrogen are also discharged, the hydrogen is stored in a temperature-selective installation. It should be in the flow to the storage department of the storage department to describe the conversion of the image, the central gas supply can be used to control the internal storage of hot gas, and it can be used for hydrogen storage in the future gas installation. After the hydrogen gas is irradiated and the hydrogen is stored, the hydrogen gas will be stored in the same way as the argon, and the hydrogen will be compressed and stored in the argon. The hydrogen gas is stored here and the hydrogen is stored in the furnace at the right part of the furnace. During the installation, the furnace gas is stored as hot hydrogen, and the internal heat is released in the furnace. From the description to the suction arrangement, there are many places. Install and store the hydrogen at the storage place, and the device is equipped with heat outside the furnace. The gas is hot at the seeding point. Send back. In the case of gas transmission and installation, it is more reasonable to wait for the hot hydrogen to be sent to the ring gas in the heat, the Lushen storage office should be replaced by another gold in his place, and the hydrogen is built in. Hot set, it will be transferred to one. Receiving one: The paper size of the paper is applicable to the Chinese National Standard (CNS) A 4 specifications (210 X 297 mm) 7 205572 A6 B6 5. Invention description (8) Central Bureau of Standards, Ministry of Economic Affairs Printed by employee consumer cooperatives, please read the precautions on the back before writing this page) t at the state, the internal heat of the upper and middle heat and the road gas furnace transmission one reason t Set in the middle and section, the furnace is equipped with hydrogen. Λ 、、 The pressure knot is more flat and installed in the place where the furnace power is adjusted to the gas. It is installed in addition to the S5 and even the furnace. The gas is stored in the row of the heat and pressure. The heat is refined in the row. Disposal of the heat installed in the storage and supply department. In the road, the gas is supplied to the gas in the middle of the way. Each gas can be passed through. The hydrogen can be purified. Yu Yiqi, hydrogen too: Unexpected ?, Road. At the same time, there is a lot of gas / placed in the fixed gas supply, the row structure is made of through the material, the hydrogen is allowed to be placed ... As a result, the heat of the I company in the middle of the I will make the stored air supply the number of air, and it can be used as a gas. It can be used to store the gas section with genuine hydrogen hydrogen. This hydrogen gas can be installed on 1 way. Moreover, the gas-hydrogen control has been measured and will be described as the gas recovery and storage, and the Ϊ5 hydrogen body has been set up from the root state, the gas is closed and the hydrogen is stored, until the gas is used. The temperature setting is α. This hydrogen prevention gas is installed and the hydrogen sent by S3 is installed. The side gas can be installed. The hydrogen gas can be stored at the same place. .Package, Ϊ stream storage Furnace Μ gas furnace is used to make air or time under the gas installed in the previous section. The gas is conditioned for hydrogen, and the gas is stored in the arsenal to store the gas. The disposal of multiple hydrogen gas is useful for measuring storage. The vacant gas is filled with hydrogen and heated to generate heat from the heat 0 to the pressure-sensing gas. The hydrogen is stored with the hydrogen. 2. There are shapes, and each hydrogen can be released from the gas. The storage will make the first and second row and the middle row of the power and the hydrogen produced by each furnace can be affected by the furnace, and the furnace is located in the hydrogen of the air. If the temperature is good, the temperature will be matched with the heat so that the hydrogen will not be transferred to the location where the lotus is located. The hydrogen will be released here. The paper standard for heat generation is in accordance with Chinese national standards ( CNS) A4 specifications (210 X 297 mm) 8 205572 A6 B6 Printed by the employee consumer cooperative of the China National Funeral Standards Bureau of the Ministry of Economy 5. Description of the invention (9) The control device is used for hydrogen absorption treatment in each heat treatment furnace The internal pressure is boosted and hydrogen is supplied, while the hydrogen pressure is released in each heat treatment furnace to reduce the internal pressure and discharge the hydrogen In the heat treatment device of this structure, if one of the heat treatments is suspected to be in the process of absorbing hydrogen in the metal material, after the heat treatment furnace is heated to a predetermined temperature, the pressure control device supplies hydrogen to the inside, and Raise the internal pressure to a fixed pressure, whereby the hydrogen absorption of the metal material occurs in the heat treatment furnace to perform the hydrogen absorption treatment of the metal material. When the hydrogen absorption treatment is completed by the one heat treatment furnace, the treatment in the heat treatment is switched After the hydrogen gas is released, the hydrogen gas in the heat treatment is absorbed and discharged by the pressure control device, and the pressure in the heat treatment chamber is depressurized while the hydrogen gas is discharged. As a result, the phenomenon of hydrogen evolution from the gold-thorax material occurs in the heat treatment furnace, and the hydrogen evolution treatment of the metal material is performed. On the one hand, when hydrogen release treatment is performed in a heat treatment furnace in this way, other heat treatment furnaces connected to the heat treatment furnace through the communication path are preparing for hydrogen absorption treatment by heating the inside thereof to a specific temperature parallel to the treatment. When the heat treatment is deemed to be completed or parallel to the hydrogen release process, the pressure control device transports the hydrogen drawn from the one heat treatment furnace to other heat treatment lumens. Therefore, the pressure increase operation of the internal pressure and the filling operation of hydrogen are performed on the other heat treatment furnaces, and hydrogen absorption treatment is performed in the other heat treatment furnaces. As described above, according to the present invention, the hydrogen used in the heat treatment of the metal materials between the heat treatment furnaces can be prevented from being released from the device, and the amount of hydrogen required by one heat treatment furnace can be used for at least 2 hot places. The size of this paper is in accordance with Chinese National Standard (CNS) A4 specifications (210 X 297 mm) 〇: Please read the precautions on the back before writing this page) 丨 Installation-Order R Quan _ 205572 A6 B6 Central Bureau of Economic Standards Du-printing by negative labor consumption cooperation 5. Description of the invention (10) The heat treatment of the furnace not only reduces the amount of hydrogen used, but also avoids the increase in the shape of the device. It is also possible to connect the heat treatment furnaces to each other to form a hydrogen gas refining device in the middle of the communication path of a general closed loop forming a hydrogen gas flow between the heat treatment furnaces. In this way, when hydrogen gas is sent from one heat treatment furnace to another heat treatment furnace, the hydrogen gas can be passed through a hydrogen refining device to send clean hydrogen gas to the heat treatment furnace. The heat treatment method and apparatus of the present invention will be described below with reference to the drawings. Fig. 2 is a conceptual diagram showing the concept of the present invention, that is, a schematic drawing of the heat treatment apparatus according to the first embodiment of the present invention. In Fig. 2, 1 is a heat treatment furnace for hydrogen treatment. 2 is a vacuum exhaust device. 3 is the filter. 4 is hydrogen storage alloy storage device. 5, 6, 7 are valves. 8 is the pipeline. These valves 5, 6, 7 prevent backflow of used hydrogen that has been released and regulate the pressure and flow of hydrogen. The vacuum evacuation device 2 may be omitted according to the raw material used for hydrogen treatment. Fig. 3 shows a schematic diagram when omitted. In Fig. 3, 1 is a heat treatment furnace for hydrogen embedding. 3 is the filter. 4 is hydrogen storage alloy storage device. 5, 6, 7 are valves. 8 is the pipeline. These valves 5, 6, 7 prevent backflow of used hydrogen that has been discharged, and regulate the pressure and flow of hydrogen. When the vacuum evacuation device is omitted in this way, the dehydrogenation of the raw material for absorbing hydrogen in the heat treatment furnace 1 can be performed by using the difference in hydrogen absorption pressure from the hydrogen absorption alloy storage device 4. In other words, if the hydrogen absorption capacity of the hydrogen absorption alloy storage device 4 is greater than the hydrogen absorption capacity of the raw material, the hydrogen absorption of the argon absorption alloy storage device 4 can be used to make the heat treatment furnace 1 negative pressure, whereby the heat treatment furnace 1 can be performed Dehydrogenation of raw materials within. This paper scale is applicable to the Chinese National Standard (CNS) Grade A 4 (210 X 297 public goods). Λ V Please read the precautions on the back and then fill out this page) 丨 installation. ΤΓ_: .4. 20557 A6 B6 Central Ministry of Economic Affairs Printed by the Bureau of Standards, Industry and Consumers Co., Ltd. 5. Description of the invention (11) In FIGS. 2 and 3, the hydrogen filled hydrogen storage alloy storage device 4 is released, and at the same time the valve 7 is opened to supply hydrogen to the heat treatment furnace 1. 1. Hydrogen treatment of dehydrogenation after absorbing hydrogen in the raw material is carried out. The used hydrogen released due to dehydrogenation is sucked by the vacuum exhaust device 2 through the pipeline 8 or directly sucked by the hydrogen absorption alloy storage device 4 . The used hydrogen gas released from the raw material after dehydrogenation is mixed with oxygen, moisture and other impure gas and dust, etc., which are released from the raw material, so the impure gas and dust are removed by the filter 3 and supplied again. Hydrogen absorption, —._ · — " ---------------------------------- '. Gold storage device 4 in. Hydrogen stored in the hydrogen absorbing alloy storage device 4 The absorbing alloy must have a capacity to fully absorb the dehydrogenated hydrogen. According to the conventional technology, a large amount of hydrogen needs to be consumed; however, according to the above method, since it is not necessary to release the used hydrogen to the outside, the hydrogen can be reused. Even if young children are consumed, as long as the amount of hydrogen consumed is properly supplemented. As described above, the present invention can effectively use hydrogen, has high safety, and is simple to operate, and its effect is extremely great. The present invention can be applied to the hydrogen treatment of alloys, but its application range is not limited to the hydrogen treatment of alloys, and can also be applied to various other heat treatments that require the use of hydrogen. The embodiments of the present invention will be described below with reference to the embodiments. [Experimental example 1] The cymbals (Nd): 12.5 at%, Co (Co): 11.6 at%, boron (B): 6.0 at% will be dissolved in the electric propeller arc (Plasma A "c) dissolution furnace Error (Zr): 0.1 at%, gallium (Ga): 0.4 at%, the rest is composed of iron (Fe) composed of alloy ingots with a temperature of 1130t: around the argon gas. This paper standard is applicable to Chinese national standards ( CNS) A 4 specifications (210 X 297 mm) ·, ν Please read the precautions on the back before filling out this page). Installed .. ST. --Line-A6 Printed by the Male Workers' Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs B6_ V. Description of the invention (1 2) A 20-hour homogenization treatment is carried out in the environment. On the other hand, as shown in FIG. 2, the heat treatment furnace 1 is vacuum-exhausted by the pipeline 8 via the valves 5, 6, 7. 2, the filter 3, and the hydrogen absorption alloy storage device 4 are connected, the homogenized alloy ingot is placed in the heat treatment furnace 1, the hydrogen absorption alloy is heated to 7010 and hydrogen is supplied from the hydrogen absorption alloy storage device 4 to heat treatment The pressure in Lu 1 is maintained at 1 ℃, and the temperature of the homogenized alloy ingot is raised from room temperature to 830 it. In this surrounding environment, the temperature is maintained. At 83010, about 3 hours, hydrogen is absorbed by this to perform hydrogen treatment. Then, the valve 5 is opened while maintaining the temperature of 830t and 7 is closed to stop the supply of hydrogen, and the hydrogen in the hydrogen treatment furnace 1 is discharged by the vacuum exhaust device 2 for dehydration Hydrogen is below IX lO ^ Torr, the exhausted hydrogen gas is filtered *-" 3 to remove dust, etc., and then supplied to the hydrogen absorption alloy storage device 4, the hydrogen absorption alloy is cooled to 10t to store hydrogen again. The heat treatment furnace 1 used in the example uses a vacuum tubular furnace with an externally heated Kanthal wire heater, which is stored in a hydrogen absorption alloy ... I ......... 1 -.-... * The atomic ratio of storage in 4 is LaNU .7 A 10.3. Hydrogen absorbing alloys of composition, and using a hydrogen absorbing alloy storage device with a hydrogen storage capacity of 15 Nm3. Hydrogen stored again in the hydrogen absorbing alloy storage device 4 is stored by storing in the hydrogen absorbing alloy The hydrogen absorbing alloy in the device 4 is heated to 70t: the stored hydrogen is discharged again and used again. As a result of repeatedly performing this hydrogen treatment cycle 10 times, the amount of hydrogen disappeared is only 0.05Nι 3 0 [Practical example 1] 12 Κ Please read the notes on the back before filling in this page) -installation. ≫ ΤΓ. 7 brigades. This paper scale is applicable to the National Standards (CNS) A 4 specifications (210 X 297 Mm) 205572 A6 B6 Λ7 3 1 / — 'Explanatory notes, Wulu tn: The diagram of the bottle-selling gas hydrogen hydrogen and the bottle-selling bottle hydrogen gas hydrogen are not included in the trip. The source of the same supply phase L gas hydrogen is used as an example and the hydrogen gas in the gas is less than 10 cases. The consumption is 30%. The amount of 30 Nm of hydrogen is 6.6 of 5. The amount is a large amount of gas. The example of hydrogen is useless. The result is dissipated. At the end of the press, the hot water will be joined together

The compressed gas V .1 enters the T of the m &lt; hour W small ο 3 12 Holds a flat strip under the diameter and grain retention, and the shape of the piece is fixed for the system. The storage and storage gold furnace is reasonably received. The endothermic gas hydrogen is useful. Li furnace 1) Ao box with empty Mm true 3 (L heat is 4 hydrogen in the original storage of Gabi Mozi stone, and the combined harvest is a.) .. 1 of 1 ] Soil a is equal to dilute 5H and I1J1 d is an example of M measurement Γ, the actual storage of P and e, and the gas is used to make it use α hydrogen to make it, Μ 6 卜 Ϊ, at the same time but ί δ 金 置 10 combined 5Α Storing 4 absorbing and storing Νί 气 金 <Please read the precautions on the back before filling out this page)

Furnace mn is handled and stored hot, the gas is stored in the hydrogenation of the gas, the gas is absorbed and the hydrogen is released, and the V Μ ^ hot pressure D gas power wide gold 1 is used to hold the hydrogen in the gas. Ϊ 5 around 0〇 to gas high hydrogen ascension furnace m: heat treatment

The V temperature component is 85 gold and is held together. 1 T The internal temperature I will be around the border. The 2S will be printed at the Beigong Consumer Cooperative of the Central Standards Bureau of the Ministry of Economy. Exhaust and evacuate the air so that it becomes small, and it becomes a single air ^ truly to be pumped. The inner fabric of the group I is composed of the metal furnace m: the treatment of gas and hydrogen will be done

X down. Install 丨 Riqi to discharge 0Γ gas at t, 4t hydrogen true 0- from the IL conversion phase + α to pre-weave the organization will be applied and argon de-traveling and suck 2 in the filter containing the filter 3 through the filtered hydrogen The gold is absorbed and stored in the installed equipment, and the stored gold is collected to absorb hydrogen until it is delivered to the temperature, and then the gas is stored. The V ο 1A to the cold gold is collected to absorb hydrogen. This paper standard is suitable for China. National Standard (CNS) A 4 specifications (210 X 297 mm) 205572 A6 ___B6 _ _ V. Description of the invention (1 4) Please read the precautions on the back before filling this page) in the hydrogen absorption alloy storage device 4. After this hydrogen treatment was performed 20 times, the amount of hydrogen disappeared was 0.1 Nm3. [Conventional Example 2] Using a hydrogen dysprosium bottle (not shown) as a hydrogen supply source, the hydrogen copper bottle and the hydrogen treatment furnace were connected by a pipeline, and hydrogen treatment was performed 20 times under the same conditions as in Experimental Example 2, and the resulting hydrogen gas disappeared. The amount is 26.6Nm3. In Experimental Example 2, there is almost no hydrogen consumption, but in the conventional example, a large amount of hydrogen is consumed. [Experimental Example 3] The alloy used in this example is ZrCo alloy. The heat treatment Lu 1 uses a vacuum box furnace with an external heat type high-purity sulfonated silicon heater, and the atomic ratio stored in the hydrogen absorbing alloy storage device 4 is (La0.7Mm0.3) Hi3.2Co0.5 Μη〇 · 7Α1 〇.6 (Mπ is La, Ce, Pr, Hd and other rare earth elements) composed of hydrogen absorption alloy, and the use of hydrogen storage capacity of 15Nm3 hydrogen storage alloy storage device. At this time, the vacuum evacuation device is omitted, and the device shown in FIG. 3, which is configured by connecting the valve 5 and the data device 3 with the pipeline 8, is used. Printed by the Beigong Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs, the hydrogen absorption alloy in the hydrogen absorption alloy storage device 4 is heated to 20 ° to release the hydrogen stored therein, and the heat treatment atmosphere 1 is maintained at a hydrogen atmosphere of 6 atmospheres. The temperature of the ZrCo alloy placed in the heat-treated ember 1 is increased to 1501C, and the temperature is maintained at 150 in the surrounding environment for about 5 hours to allow it to absorb argon gas, and the temperature is reduced to 3010 and maintained at a temperature of 301C Hydrogenation pulverization was carried out in 2 hours. Then, the temperature was raised to 200t: hydrogen gas was released from the ZrCo alloy, and the hydrogen pressure in the hydrogen storage alloy storage device 4 was used to evacuate the heat treatment 1 to lxl0_1 Torr hL for dehydrogenation. At this time, the paper scale is applicable to the Chinese National Standard (CNS) A4 specifications (210 X 297 mm) ia A6 B6 205572 5. Invention description (15) (please read the precautions on the back before filling this page) Hydrogen absorption alloy The hydrogen absorption capacity of the storage device 4 is greater than the hydrogen absorption capacity of the ZrCo alloy at a temperature of 200 t, so the hydrogen generation pressure difference is generated, so the hydrogen pressure difference can be used to perform dehydrogenation in the heat treatment furnace 1. After the hydrogen gas discharged from the heat treatment furnace 1 is removed by the filter 3 to remove the metal particles contained therein, it is transported to the argon absorption alloy storage device 4 again, and the hydrogen absorption alloy is cooled to ίου and stored in the hydrogen absorption alloy storage device 4 in. After this hydrogen treatment was performed 20 times, the amount of hydrogen disappeared was 0.2 Nm3. [Conventional Example 3] Using a hydrogen cylinder (not shown) as a hydrogen supply source, the hydrogen pin cylinder and the hydrogen treatment furnace were connected by a pipeline. The hydrogen treatment was performed 20 times under the same conditions as in Example 3, and as a result, the amount of hydrogen disappeared was 31.5 Hm3. In Experimental Example 2, there is almost no hydrogen consumption, but in the conventional example, a large amount of hydrogen is consumed. The following describes more specific embodiments of the heat treatment apparatus of the present invention. Printed by R Industry and Consumer Cooperative, Central Bureau of Standards, Ministry of Economic Affairs. Figures 4 and 5 show a heat treatment apparatus 10 for a metal material W according to a second embodiment of the present invention. The heat treatment apparatus 10 includes: a heat treatment furnace 11 that performs hydrogen absorption processing that absorbs hydrogen in the Jinge material V, and hydrogen release processing that releases hydrogen from the metal material that absorbs hydrogen; A hydrogen storage device 12 made of a hydrogen absorption alloy M for the hydrogen discharged from the furnace 11; respectively provided on the heat-treated perch 11 and the hydrogen storage device 12, a pressure sensor 13 and a temperature for detecting its internal pressure and internal temperature Sensor 14; adjust the internal pressure or temperature of the heat treatment furnace 11 and the hydrogen storage device 12 according to the detection signals of the sensors 1 3, 14 to thereby supply hydrogen to the heat treatment furnace in accordance with the processing state of the heat treatment furnace 11 11 and from the heat treatment of this paper, the standard of China National Standard (CNS) A 4 (210 X 297 mm)-, κ ^ 05572 A6 B6_ V. Description of the invention (16) Furnace discharge control device 15. The heat treatment furnace 11 uses an internal heat treatment furnace with a heater 16 composed of graphite, tungsten wire, or molybdenum in a vacuum container; or a heater 16 with a Kanthal line, high-purity sulfonated silicon, etc. outside the vacuum container External heat treatment furnace. In this embodiment, the external heat type heat treatment furnace 11 is used. These external heat type and internal heat type heat treatment furnaces 11 can be changed as appropriate according to the type of the metal material W to be processed. As shown in FIG. 5, the hydrogen storage device 12 includes: a pressure vessel 17 that forms an outer shell; a heat transfer vessel 18 made of a heat-conducting skull material disposed in the pressure vessel 17 at a certain distance from its inner circumferential surface; A support tube 19 made of a porous body in the central portion of the container 18; a hydrogen absorption alloy M filled in the space formed between the support tube 19 and the heat transfer container 18; and heating surrounding the heat transfer container 18器 20. As the hydrogen absorption alloy Msu, for example, R-Ni strip alloy (R is a rare earth element) is used. Ti-Fe-Mn bar alloys, Ή-Mη bar alloys, etc. have large hydrogen absorption rate and release rate near room temperature. In FIG. 4, a communication tube 21 is formed on the wall of the pressure vessel 17 and penetrates the wall and is located in the support tube 19; it is used to detect the internal pressure and internal temperature of the pressure vessel 17, that is, hydrogen absorption alloy Pressure sensors 1 3 and temperature sensors 14 for pressure and temperature around the M. The heater 20 is connected to a temperature control device 22 that controls the amount of heat generated by controlling the current supplied to the heater 20 so as to adjust the temperature in the pressure vessel 17. The other end of the connecting tube 21 connected to the pressure vessel 17 is connected to the heat treatment 16 r. Please read the precautions on the back before writing this page) 丨 Installation-Order · I. Printed copies of clothes by the Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs The paper scale is in accordance with Chinese National Standard (CNS) A4 specifications (210 X 297 mm). 205572 A6 Printed by Beigong Consumer Cooperation, Central Bureau of Standards, Ministry of Economic Affairs _B6_ V. Description of invention (17) In 11 cases, the two are connected In the middle, there is a pressure control device 23 for controlling the pressure in the hydrogen storage device 12 and the heat treatment furnace 11. The pressure control device 23 uses a structure such as a cylinder that can reduce its volume and does not exchange gas with the gas outside the device, such as a cylinder, and the control device 15 selectively communicates with the heat treatment furnace 11 and the pressure Container 17; and enlarge the interconnected volumes to reduce the pressure in the heat treatment furnace 11 or the pressure vessel 17 to reduce the pressure of the hydrogen inside; and reduce the volume to increase the pressure in the pressure vessel 17 and increase Hydrogen is fed into it. The heat treatment furnace 11 is provided with the same temperature control device 22 as the hydrogen storage device 12; each temperature control device 22 is connected to the control device 15, and the supply to each heater 16 is controlled according to the control signal generated by the control device 15; 2 0 current. The control device 15 includes: a central processing circuit (hereinafter referred to as a CPU) 24; a memory, a read-only memory device for the operation program of the CPU 24 ; Hereinafter referred to as R0M) 25; arbitrarily access the billions of memories (hereinafter referred to as RAM) 26 with the control program of the heat treatment furnace 11; connected to the CPU24, R0M25, and RAM26 via the bus bar. The pressure sensor 1 3, the temperature sensor 14, the temperature control device 2 2, and the pressure control device 23 perform an I / O interface 27 for signal transmission and reception. On the communication tubes 21 on both sides of the pressure control device 23, on-off valves 28, 28 are provided; these on-off valves 28, 28 are opened and closed by separate operations of the control device 15 to thereby control the pressure control device 23 is selectively connected to the heat treatment furnace 11 or the hydrogen storage device 12. In this embodiment, the composition of the metal material W as the heat treatment object is 17 (please read the precautions on the back before writing this page) 丨 Packed. Ordered. This paper scale is applicable to the Chinese National Standard (CNS) A 4 specifications (210 X 297 mm) 2055 * 72 A6 B6 Printed by the Employee Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs V. Invention Instructions (18). One of the metal materials is R-Fe-B series alloy (R is a rare earth element), which has the following composition: R: 10 ～ 20 at% B: 3 ～ 10 at% Fe: the rest and the impure physical vision that cannot be avoided If necessary, the following composition can be added. Co: 0.1 ~ 50 at% Μ '0.001 ~ 5.0 at% but Μ is one or two of Al, Si, Ga, Ti, V, Cr, Zr, Nb, Mo, Hf, Ta, W, C, N the above. Another metal material is the structural material of the Ti series alloy, which has the following alloy composition: 1) A1: 6.5 wt%, Sn: 1.4 vf t%, Zr: 1 wt%, Mo: 2.9 wt% , C r: 2.1 wt ^, Fe: 1.7 wt%, the rest is Ti alloy. 2) A 1: 6wt%, V: 4wt%, the rest is Ti alloy. 3) A1: 6 wt%, Sn: 2wt%, Zr: 4wt%, Mo: 2wt%, and the rest are Ti alloys. 4) V: 10 wt%, Fe: 2 wt%, Al: 3 wt%, and the rest are Ti alloys. Others can also be used for activation treatment and powdering treatment of hydrogen absorption alloys such as rare earth-Ni strip alloys, Zr-Co strip alloys. In the following, specific examples of heat treatment using the apparatus of this embodiment will be described using Experimental Examples 4 and 5. 18: Please read the precautions on the back before filling in this page) i 装 _ 定 ·. 泉. This paper scale is applicable to China National Standard (CNS) A 4 specifications (210 X 297 mm) 205572 A6 B6 V. Description of invention ( 〗 9) VPlease read the precautions on the back before filling in this page) [Experimental Example 4] Dissolve and cast the R-Fe-B Shito column alloy with the composition shown in Table 1 1 to 4 in the plasma arc dissolution furnace After that, homogenization treatment is carried out under the conditions of 11301 and 20 hours in the surrounding environment of the gas "A. The metal material W has a coarse ferromagnetic phase with a particle size of about 120 ju m. The gold tantalum material W is put into the heat treatment furnace 11 After evacuating the heat treatment chamber 11, the control device 15 supplies control signals to the two temperature control devices 22 to start heating the heat treatment furnace 11 and the hydrogen storage device 12. At this time, the temperature sensor 14 picks up The internal temperature of each heat treatment furnace 11 and hydrogen storage device 12 is output and fed back to the control device 15, and the control signal supplied to each temperature control device 22 is compensated according to the feedback signal, thereby the internal temperature of the heat treatment furnace 11 Maintain the temperature to be determined (about 830C), and put hydrogen The internal temperature of the storage device 12 is maintained at a predetermined temperature (about 70 °). Then, the control device 15 supplies the drive signal to the on-off valve 2 8 on the side of the hydrogen storage device 12 and opens the on-off valve 28 to store the hydrogen gas. The device 1 2 is connected to the pressure control device 23. Printed by the Beigong Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs At this time, the control device 15 supplies the control signal to the pressure control device 2 3 to absorb the hydrogen of the hydrogen storage device 12, thereby Reduce the pressure in the pressure vessel 17 of the hydrogen storage device 12. In this way, hydrogen is released from the hydrogen absorption alloy M in the hydrogen storage device 12, and the hydrogen is attracted to the pressure regulating device 23. Then, the control device 15 supplies the driving signal On the two-valve on-off valve 2 8, the on-off valve 2 8 on the 2 side of the open hydrogen storage device 12 is closed, and the other format of the paper is applicable to the national standard (CNS) A 4 specification (210 X 297 mm), 〇A6 A6 205572 B6_ V. Description of the invention (20) The valve 28 is opened, and the pressure control device 23 is connected to the heat treatment furnace 11. At this time, the control device 15 supplies the control signal to the pressure Control device 2 3, the hydrogen absorbed by the pressure control device 23 is sent to the heat treatment furnace 11, the internal pressure of the heat treatment furnace 11 is raised, and the gas gas sucked from the hydrogen storage device 12 is sent to the heat treatment furnace 11. At this time, the heat treatment The internal pressure of Lu 1 1 has been detected by the pressure sensor 13 and is fed back to the control device 15, so the opening degree of the on-off valve 28 is adjusted according to the feedback signal, or the operation amount of the pressure control device 23 is controlled, thereby the heat treatment furnace The hydrogen pressure in 11 is maintained at about latm. After the hydrogen supply is completed as described above, the control device 15 adjusts the temperature in the heat treatment furnace 11 to about 830C, and maintains the gold tantalum material at this temperature for about 3 hours, thereby absorbing hydrogen in the metal material W. Then, while maintaining the temperature in the heat treatment furnace 11 at 830, and maintaining the temperature of the hydrogen storage device 12 at 10, the control device 15 supplies a driving signal to the opening and closing valve 2 8 on the side of the heat treatment furnace 11, The on-off valve 28 is opened, and a control signal is supplied to the pressure control device 23 so that the pressure control device 23 sucks the gas in the heat treatment furnace 11. In this way, the pressure inside the heat treatment lube 11 can be reduced, the metal material can release the hydrogen it has absorbed, and the hydrogen can be absorbed into the pressure regulating device 23, thereby dehydrogenating the gold material W. At this time, the pressure in the heat treatment furnace 11 is controlled by the operation amount generated by the pressure control device 23 driven by the pressure sensor 13 and the control device 15 and operated, and is kept below lx lOMTorr. Then, the driving signal generated by the control device 15 makes the paper size on the side of the heat treatment furnace 11 applicable to the Chinese National Standard (CNS) A 4 specifications (210 X 297 mm) 9 Λ V Please read the precautions on the back before filling this page) .Installed and ordered _ Printed by the Ministry of Economic Affairs, Central Bureau of Standards, Employee Consumer Cooperative 205572 A6 B6 Printed by the Ministry of Economic Affairs, Central Bureau of Standards, Xinggong Consumer Co., Ltd. V. Description of the invention (2 1) The on-off valve 2 8 is closed, so that the hydrogen storage device 12 The on-off valve 28 is opened. Thereafter, due to the operation of the pressure control device 23, the hydrogen absorbed by the pressure control device 23 is sent to the pressure vessel 17 of the hydrogen storage device 12. At this time, the pressure of the hydrogen gas in the pressure vessel 17 increases with the above operation, so the fed hydrogen gas is absorbed and recovered by the hydrogen absorption alloy M. Therefore, after the above treatment, the Nd-Fe-B alloys of each composition are crushed to 400w m or less, and have a structure composed of recrystallized Nd2Fel4B of 0.2 ~ 0.4wm inside the powder, and have the required magnetic properties Ο As described above, in the heat treatment device 10 of this embodiment, the hydrogen used for the heat treatment of the gold material W is transferred between the hydrogen storage device 12 and the heat treatment furnace 11, and the hydrogen can be suppressed from being released outside the device. Significantly reduce the amount of hydrogen used, and do not require equipment for exhaust gas treatment, so it can avoid the large size of the device and prevent the increase in equipment costs. Since the hydrogen absorption alloy M used as the hydrogen storage device 12 has a hydrogen storage capacity of 3 to 4 times that of the conventional hydrogen mesh bottle with the same capacity, the device can be miniaturized. The left side in Table 2 indicates that in the heat treatment apparatus 11 of this embodiment, the initial hydrogen storage amount in the hydrogen storage device 12 is set to 35 Nm3, and the metal material W of each composition described above is treated 10 times, and then the hydrogen reduction is measured. Result. The right cabinet in Table 2 shows the amount of hydrogen reduction when the same metal materials W are heat-treated using conventional equipment for comparison. As can be seen from the results in the table, according to this embodiment, the paper standard of almost no gas reduction is applicable to the Chinese National Standard (CNS) A 4 specifications (210 X 297 mm) V. Please read the notes on the back before writing. Page) 丨 Install · 11.

-I I Printed 205572 A6 _B6_ by the Central Prospective Resident Employee Consumer Cooperative of the Ministry of Economy V. The invention description (2 2) is few, and its effect is great. [Experimental Example 5] 'Ti alloy was used as the gold alloy material W. First, under the conditions of a temperature of 750t !, 2000atm, and maintaining the above temperature and pressure for 3 hours, the Ti alloy powder with the composition shown in Table 3, 1, 2 and an average particle size of 120Wm is hot hydrostatically pressed to produce A metal member W of a specific shape. The metal material W is placed in the heat treatment furnace 11 with an internal heating type graphite heater, after the inside of the heat treatment furnace 11 is evacuated, the components of the heat treatment device 10 are driven by the control device 15 at 850t, which is the same as the above embodiment. Hydrogen is absorbed in the metal material W in the surrounding environment of latai, and then the dehydrogenation treatment of the gold material W is performed under the conditions of 850¾, lx 10-4 Torr. After this heat treatment, a Ti alloy with a coarse ct + / 3 phase is produced. The Ti alloy of this composition has excellent high cycle fatigue strength and resistance to change (c "eeP). At this time, the hydrogen used in the heat treatment is also transferred between the hydrogen storage device 12 and the heat treatment furnace 11, whereby The leakage of hydrogen to the outside of the device is suppressed. The left cabinet in Table 4 indicates the amount of hydrogen reduction measured after performing the above-mentioned treatment on each Ti alloy 20 times using the device of the present example with a hydrogen storage capacity of 35Nιη3. The right paste in Table 4 It shows the amount of hydrogen reduction when using conventional equipment to heat treat each Ti alloy of this embodiment for comparison. From the results in the table, it can be seen that there is no reduction of hydrogen in this embodiment, which is a significant improvement compared to conventional equipment. Figure 6 shows the third embodiment of other types of the second embodiment. In the following (please read the precautions on the back before filling this page)

T. Packed, the size of the printed paper is in accordance with the Chinese National Standard (CNS) A 4 specifications (210 X 297 common patchouli) 22 A6 B6 205572 5. Description of the invention (23) In the description, the same parts as the second embodiment are the same Symbols are shown and their description is omitted. The heat treatment device 40 of the gold tantalum material in this embodiment includes: a heat treatment furnace 11; a hydrogen storage device 12 made of a hydrogen absorption alloy M; the hydrogen gas released from the heat treatment furnace 11 is sent to the exhaust path of the hydrogen storage device 12 41; supply hydrogen from the hydrogen storage device 12 to the supply path 42 of the heat treatment furnace 11; provided in the exhaust path 41 to suck the gas in the heat treatment furnace 11 and transport it to the vacuum exhaust device 43 of the hydrogen storage device 12; In the supply passage 42, a pressure adjusting device 44 for adjusting the pressure of the hydrogen gas supplied to the heat treatment furnace 11; a pressure sensor 13 and a temperature sensor 14 respectively provided in the heat treatment furnace 11 and the hydrogen storage device 12; and According to the detection signals of the sensors 1 3 and 14, the internal pressure or the internal temperature of the heat treatment furnace 11 and the hydrogen storage device 12 are adjusted, and the operation of the vacuum exhaust device 43 is adjusted to match the processing state of the heat treatment furnace 11 A control device 15 that controls the hydrogen gas supplied to the heat treatment furnace 11 and the hydrogen gas discharged from the heat treatment furnace 11. A vacuum pump can be used as the vacuum exhaust device 43, and opening and closing valves are provided at the front and rear, the suction part is connected to the heat treatment furnace 11, and the exhaust part is connected to the hydrogen storage device 12. The exhaust passage 41 formed therebetween maintains airtightness. The pressure unit 44 has an on-off valve and a pressure reducing valve. Normally, the supply passage 42 is closed by opening and closing the valve, and the communication state between the hydrogen storage device 12 and the heat treatment furnace 11 is cut off. When it is necessary to supply hydrogen gas to the heat treatment furnace 11, the pressure of the hydrogen gas supplied to the heat treatment flare 11 is kept below latm with a pressure reducing valve. In this embodiment, the supply cylinder 42 is used to connect the hydrogen cylinder 45 between the pressure regulator 44 and the hydrogen storage device 12 via the on-off valve 46. As the paper standard, the Chinese National Standard (CNS) A4 specification (210 X 297 Mm) (please read the precautions on the back before writing this page). Pack. Order. Printed by the Ministry of Economic Affairs Central Bureau of Labor and Employee's Consumer Cooperative Printed by the Central Ministry of Economics A6 B6. (2 4) It is used for hydrogen filling in the early stage of operation, or for supplementing when hydrogen is reduced due to leakage. The on-off valve 46 is connected to the vacuum exhaust device 43 and the pressure regulator 44 together with the control device 15; the control signal generated by the control device 15 controls its operation. The processing target gold tungsten material W in the heat treatment apparatus 40 of this embodiment is the same as the gold yoke material in the above embodiment. In this embodiment, the vacuum exhaust device 43 is used to pressurize the hydrogen storage device 12. As shown in FIG. 6, a pressurizing device 47 may be provided between the vacuum exhaust device 43 and the hydrogen storage device 12, and the pressure in the hydrogen storage device 12 may be further increased by the pressurizing device 47. This method is very effective in increasing the amount of hydrogen stored in the hydrogen storage device 12. The shape and structure of each member in the above embodiments, or processing conditions are only representative examples, and can be changed and implemented according to the composition of the metal material used, and design requirements. For example, in the above embodiments, hydrogen is used for heat treatment, but a mixed gas of hydrogen and inert gas can also be used. At this time, the partial pressure of hydrogen can be used as the control factor of pressure control. A specific example of the heat treatment apparatus 40 of this embodiment will be described below. [Experimental Example 6] In the heat treatment apparatus 40, after the metal material W was placed in the heat treatment furnace 11 and the apparatus was started, each temperature control device 22 controlled by the control device 15 caused the heaters 16, 20 to generate heat and sensed by each temperature The device 14 feeds back the temperature information in the heat treatment furnace 11 and the hydrogen storage device 12 to the control device 15, whereby the temperature guaranteed paper in the heat treatment furnace 11 and the hydrogen storage device 12 in the pressure vessel 17 can be applied to the Chinese National Standard (CNS) A 4 specifications (210 X 297 mm) 〇. &Lt; Please read the precautions on the back before writing this page)-Pack. Order. 205572 A6 _B6_ V. Description of invention (2 5) (Please read the precautions on the back first Please fill out this page again) Keep at a certain temperature. Therefore, the control device 15 opens the on-off valve of the pressure adjusting device 44, and the hydrogen gas is supplied from the control device 15 to the heat treatment furnace 11 in a state where the pressure of the hydrogen gas is maintained in the latra due to the action of the pressure reducing valve of the pressure yoke device 44 . Due to the above operation, the absorption process of absorbing hydrogen in the metal material W occurs in the heat treatment furnace 11. Absorb hydrogen in metallic materials! After the absorption process in ί is completed, the control device 15 closes the on-off valve of the pressure regulating device 44 to activate the vacuum exhaust device S 43, thereby absorbing the hydrogen in the heat treatment vessel 11 and sending it to the hydrogen storage device 12. In this way, the pressure in the heat treatment Lu 11 is decompressed and the pressure in the hydrogen storage device 12 is increased, and the phenomenon of hydrogen evolution occurs in the heat treatment furnace 11, and the hydrogen absorption phenomenon occurs in the hydrogen absorption alloy M of the hydrogen storage device 12. . As a result, the dehydrogenation treatment of the metal material W occurs in the heat treatment furnace 11, and the hydrogen gas discharged from the metal material W is recovered to the hydrogen absorption alloy M of the hydrogen storage device 12 through the exhaust passage 41. Printed by the Employee Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economy. If the heat treatment is repeated due to repeated heat treatment, or the amount of hydrogen is reduced by opening the device to the atmosphere during maintenance, etc., according to this embodiment, the opening and closing valve 46 will be required. The amount of hydrogen is replenished from the hydrogen pin bottle 45 into the device. The heat conditions and pressure conditions during the above heat treatment are substantially the same as those in the above-mentioned embodiment, and the characteristics of the gold-thorium material W after the heat treatment are also substantially the same as in the above-mentioned embodiment. In the heat treatment of this embodiment, the hydrogen used in the heat treatment is also hydrogen. The paper size is applicable to the Chinese National Standard (CNS) A 4 specifications (210 X 297 mm) 205572 A6 B6 Printed by Beigong Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs V. Description of the invention (26) The storage device 12 and the heat treatment furnace 11 are given and received, which can suppress the leakage to the outside of the device, so the amount of hydrogen used is very small. In addition, in this embodiment, since the hydrogen in the heat treatment furnace 11 is directly sent to the hydrogen storage device 12, the decompression in the heat treatment furnace 11, the pressurization in the hydrogen storage device 12, and the hydrogen can be sent simultaneously The operation in the hydrogen storage device 12 thereby simplifies its operation. Furthermore, since the pressure adjusting device 44 is provided in the supply path 42, the pressure of the hydrogen gas supplied from the hydrogen storage device 12 to the heat treatment furnace 11 can be controlled with high accuracy, and stable heat treatment can be performed. The heat treatment apparatus according to the fourth embodiment of the present invention will be described below with reference to FIG. In the meantime, 50 is the heat treatment device of the metal material W of this embodiment. The heat treatment device 50 includes: a plurality of seats (two seats in this embodiment) for performing hydrogen gas absorption treatment for absorbing hydrogen gas in the metal material W, and hydrogen gas release treatment for releasing hydrogen gas in the metal material W that absorbs hydrogen gas Heat treatment furnace ll (lla, lib); a hydrogen storage device 12 made of hydrogen absorbing alloy M that stores the hydrogen gas supplied to or discharged from the heat treatment furnace ll (lla, lib); connects each heat treatment The furnace 11 (lla, Ub) and the hydrogen storage device 12 form a plurality of communication paths 53 (53a, 53b) for a general closed loop of hydrogen flow therebetween; selectively connect one of these communication paths 53 (53a, 53b) The conversion device 54 in the gas storage device 12 is provided on the heat treatment furnace 11 and the hydrogen storage device 12 to detect the internal pressure and internal temperature of the pressure sensor 13 and the temperature sensor 14; according to each The detection signals of the sensors 1 3, 1 4 adjust the internal pressure or temperature of the heat treatment furnace 11 and the hydrogen storage device 12, thereby supplying hydrogen to the heat treatment furnace 11 or from the V (Notes to fill out this page)-installed. Order · Izumi. The paper size is in accordance with the Chinese National Standard (CNS) A 4 specifications (210 X 297 mm) 26 A6 B6 V. Description of invention (2 7) V 'Please read the notes on the back before filling this page ) A control device 15 for discharging hydrogen from the heat treatment furnace 11. The structure of each device is the same as that of the above-mentioned embodiment, so its description is omitted. A pressure control device 55 for controlling the pressure in the hydrogen gas storage device 12 and the heat treatment furnace 11 is provided in the middle of the communication pipe 53 connected to the pressure vessel 17. The pressure control device 55 is connected to the two communication paths 53 (53a, 53b) via the conversion device 54, and due to the function of the conversion device 54, selectively communicates with each heat treatment furnace 11 or via the communication path 53 (53a, 53b) The communication with each heat treatment furnace 11 is cut off; and the communication with the hydrogen storage device 12 is cut off through the on-off valve 56 provided in the communication path 53. The pressure control device 55 selectively communicates with each heat treatment furnace 11 (Ua, lib) and pressure vessel 17 via the control device 15; by enlarging the volume of the interconnected components, each heat treatment furnace 11 (lla, lib) or pressure The pressure in the container 17 is reduced to absorb the hydrogen inside, and the pressure in each heat treatment furnace 11b or the pressure container 17 is increased by reducing its volume, and the hydrogen is sent into it. Each heat treatment furnace 11 (lla, lib) is provided with the same temperature control device 22 (22a, 22b) as the hydrogen storage device 12. The temperature control devices 22 (22a, 22b) are connected to the control device 15, and according to the control signal generated by the control device 15, the electric power supplied to each heater 16, 20 is controlled and printed by the employee consumer cooperative of the Ministry of Economic Affairs flow. The following describes an example of a skeleton when heat treatment of the gold material W is performed in the heat treatment device 50 of the present embodiment having the above-mentioned structure. [Experimental Example 7] As in Experimental Example 4, a metal material W composed of an R-Fe-B alloy having the compositions shown in Tables 1 to 4 was produced. Put the metal material W in a hot place. The paper size is in accordance with the Chinese National Standard (CNS) A 4 specifications (210 X 297 mm) 27 205572 Printed instructions issued by the Employee Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs. Install the storage gas hydrogen and a 1X 11 furnace heat treatment after the heat starts to start a 1X 1X ember m: the management department drive 11 will be suspected 15 management 12 disposal disposal installed hot installation system will be stored and controlled, stored and guaranteed After holding the letter of approval, the letter about the temperature will start after the start of hydrogen. The valve is closed, and the temperature is set to the temperature to be set. The temperature of the valve is 56. The 7th of the valve is closed. The control 55 controls the installation pressure and the control 53 control circuit is connected to the connection and the connection is disconnected. 2 J 1 is set to be installed and stored. The storage and protection gas is turned on by the hydrogen 54, and the hydrogen is installed and replaced. The hydrogen is controlled by a low pressure drop. The pressure is controlled by the pressure. 12 devices are installed and stored. After storage, hydrogen will be supplied to the letter 33. 5 IX will be installed and the S control gold will be collected. After closing, the gas will be sucked in. 55 hydrogen will be installed. To store and collect hydrogen, get hydrogen out. Please read the precautions on the back before filling in this page.) Borrowed as c, an ^ 33 4 5 installation and conversion and juxtaposition installation control pressure and a 11X 1X heat treatment installation control pressure on the supply signal control will 5 1X installation control installation 11 Furnace control force pressure autoclave Bt heat treatment to the absorption of the outflowing hydrogen in the high-lift pressure part a a heat treatment area into the gas supply hydrogen absorption key 15 treatment location installed heating, time control so far The feedback will be used to install the 12th, and the hydrogen will be stored and stored in parallel. Pick up the 3 IX device to measure the pressure and control the pressure in the pressure control unit. The pressure control signal is fed back. This is based on the pressure of the pressure gas hydrogen. A 1A 1X furnace RE treatment heat will be able to use this amount to move tm. About 55 of la is placed to support the supply of gas and hydrogen to 83 after the installation is complete. This adjustment is as small as 15 when placed at the time of large installation. 1 and 1 belong to tiao sui-m: handle hot gold and gold Yu will receive, inhale P gas, 3 hydrogen, and use this system to ensure that the temperature is within the temperature of the material. This paper standard is applicable to the Chinese National Standard (CNS) A 4 specifications (210 X 297 public) 28 A6 B6 2055 ^ 2 V. Description of the invention (29) Then, while maintaining the temperature in the heat treatment furnace 11a at 830C and the temperature of the hydrogen storage device 12 at 1010, the control signal is supplied to the pressure control device 55 so that The pressure control device 55 attracts the gas in the heat treatment furnace 11a. In this way, the pressure in the heat treatment furnace 11a is reduced, whereby the hydrogen absorbed in the metal material W is released, and the hydrogen is absorbed into the pressure control device 55, thereby dehydrogenating the gold tantalum material W. At this time, the pressure in the heat treatment furnace 11a is controlled by the operation amount of the pressure control device 55 driven by the pressure sensor 13 and the control device 15 to be maintained at 1 X 10 µ Torr hL. Then, the drive signal generated by the control device 15 causes the conversion device 54 to operate, cuts off the communication between the pressure control device 55 and a heat treatment furnace Ua, and opens the on-off valve 56, and then, operates the pressure control device 55, thereby The pressure of the hydrogen that is attracted by the pressure control device 55 to the hydrogen storage device 12 (please read the precautions on the back and then fill out this page) 丨 Install, order _ 内 7 1Α Rong Gaosheng and follow the instructions on the gold pressure The hydrogen in the gas is absorbed by the combined gas, and the hydrogen 17 is pressed in by the gas capacity of the device. When sending it, it will be retracted and sucked. The vacuum is pumped into the inside.-The bed_ is the same as the 11 furnace. , The heat inside the lb set I installed diagram is not used f, the material is expected to be gold

Furnace j Handle the heat and move it W The Ministry of Economic Affairs, Central Standards Bureau, Employee Consumer Cooperative Printed a 55DR Hydrogen Heater, install it, make the control] 4 force 5 pressure, change the temperature during installation and change the temperature must be special, good for gas Hold the hydrogen retention to absorb JI 2 temperature 1 The built-in furnace will be taken as the suction gas 1 After the furnace m: Dispose and collect the suction hydrogen in the pass i- around the supply hydrogen It will be 33 start 5 5 Install the system control pressure pressurizing furnace to absorb the hydrogen gas at the place where the heat is the same as the other phase b ix

In: Dealing with the description and 11 xi into the b 1A i-A LuITT: Dealing with the heat should be in accordance with the Chinese National Standard (CNS) A 4 specifications (210 X 297 mm) 29 A6 e &amp; ^ ia-^-V. Description of the invention (3 q) {Please read the precautions on the back before filling in this page) During the hydrogen absorption treatment in another heat treatment furnace lib, the heat treatment in the heat treatment furnace 11a is being completed The operation of cooling the metal material W, moving it out, or moving it in a new metal material W. By repeatedly performing the above operations, the heat treatment of the gold tantalum material W can be alternately performed in each heat treatment furnace Ua, lib. After the above treatment, the Na-Fe-B alloy of the above composition is crushed to 400 / im or less, and has a structure composed of recrystallized particles of Nd2Fel4B of 0.2 ~ 0.4wm inside the powder, and has the Required magnetic properties. As described above, in the heat treatment device 50 of the present embodiment, the hydrogen gas used in the heat treatment of the gold tantalum material W is transferred between the hydrogen storage device 12 and each heat treatment material (lla, lib), thereby suppressing release from the device The external hydrogen can greatly reduce the amount of hydrogen used, and does not require exhaust treatment equipment, so it can prevent the device from becoming large in size and increasing the equipment cost. Because the two heat treatment furnaces 11 can be staggered in their treatment cycles, thereby using one of the required argon gas alternately in each heat treatment furnace 11, therefore, the addition of the heat treatment furnace 11 will not increase the use of hydrogen Quantity, and can prevent the device from becoming large. Printed by Beigong Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economy. In addition, because the argon absorption alloy M used as the hydrogen storage device 12 has a hydrogen storage capacity of 3 to 4 times compared with the conventional hydrogen dysprosium bottle of the same capacity, so The device can also be miniaturized. The left column in Table 5 shows that in the heat treatment device 50 of this embodiment, the initial hydrogen storage amount of the hydrogen storage device 12 is set to 35 Nra3, and the metal materials W having the above-mentioned compositions are subjected to 10-large treatments respectively, and then the hydrogen is measured. Minus &quot; This paper scale is applicable to the Chinese National Standard (CNS) A 4 specifications (210 X 297 mm) ^ 205572 A6 B6_ V. Invention description (3 Μ V'Please read the precautions on the back before filling this page) A small amount result. The right cabinet in Table 5 shows the results of the reduction in hydrogen when the same Jinjin materials w are heat-treated using conventional equipment for comparison. From the table, it can be seen that according to this embodiment, there is almost no reduction in hydrogen, and the effect is extremely great . [Experimental Example 8] The same Ti alloy as Experimental Example 5 was used as the metal material W, and the dehydrogenation treatment of the gold-solarium material W was performed under the same conditions as in Experimental Example 7. As a result of this treatment, a Ti alloy with a coarse phase is produced. The Ti alloy of this composition has excellent high cycle fatigue strength and creep resistance. At this time, the hydrogen used in the heat treatment is also transferred between the hydrogen storage device 12 and the heat treatment furnace 11, thereby preventing the hydrogen from leaking out of the device. The left-hand name in Table 6 shows the results of measuring the amount of hydrogen reduction after various treatments of Ti alloys were carried out 20 times with the apparatus of the present embodiment in which the hydrogen storage amount in the initial state was 35 Nm3. The right cabinet in Table 6 shows the amount of hydrogen reduction when various Ti alloys of this example were heat-treated using conventional equipment for comparison. As can be seen from the table, there is no reduction of hydrogen in this example, which is a significant improvement compared to conventional devices. Printed by Beigong Consumer Cooperation, Central Bureau of Standards, Ministry of Economic Affairs The following describes a heat treatment apparatus according to a modified embodiment of the fifth embodiment of the present invention with reference to FIG. 8. In the following description, the same components as in the fourth embodiment are denoted by the same symbols, and their descriptions are omitted. The heat treatment device 60 of the Jinjin material of this embodiment includes: a hydrogen absorption process for absorbing hydrogen in the metal material W, and the Chinese national standard (CNS) A4 specifications (210 X 297 Mm) A6 B6 2055 ^ 2 5. Description of the invention (3 2) Many heat treatment furnaces ll (lla, lib) for releasing hydrogen from the metal material of the gas; used to store and supply the heat treatment furnace'll (lla, Ub) and hydrogen storage device 12 composed of hydrogen absorption alloy M of hydrogen discharged from the heat treatment; connect each heat treatment furnace 11 (lla, lib) and hydrogen storage device 12, and release each heat treatment furnace (11a, 11b) Argon gas is fed into the exhaust passage 61 (61a, 61b) in the hydrogen storage device 12; the hydrogen is supplied from the hydrogen storage device 12 to the supply passage 62 (62a, 62b) in each heat treatment furnace 11 (lla, lib); The exhaust passage 61 (61a, 61b) re-absorbs the gas in each heat treatment furnace 11 (11a, lib) and sends it to the vacuum exhaust device 63 of the hydrogen storage device 12; connected to the supply passage 62 (62a, 62b) and adjust the hydrogen pressure supplied to each heat treatment furnace 11 (lla, 11b) Pressure regulator 64; one of the many exhaust passages 61 (61a, 61b) and supply passages 62 (62a, 62b) is selectively connected to the conversion device 65 of the hydrogen storage device 12; respectively provided in each heat treatment furnace lib) And hydrogen storage device 12, a pressure sensor 1 3 and a temperature sensor 1 4 for detecting its internal pressure and internal temperature; each heat treatment furnace is adjusted according to the detection signal generated by each sensor 1 3, 15 (lla, lib) and the temperature of the hydrogen storage device 12 and the operation of the vacuum exhaust device 63, thereby supplying hydrogen to each heat treatment Lull (lla, lib) and Control device 15 discharged from each heat treatment furnace. For each vacuum exhaust device 63 (63a, 63b), for example, a vacuum pump can be used, and opening and closing valves are provided at the front and back. In this embodiment, each heat treatment furnace ll (lla, lib) is provided with a vacuum exhaust device, each suction part is connected to each heat treatment Mll (lla, lib), and the exhaust part is connected to hydrogen through a conversion device 65 The size of the reserve paper is in accordance with the Chinese National Standard (CNS) Grade A (210 X 297 mm). C Please read the precautions on the back before writing this page) 丨 Installed. Ordered. Printed by the Employee Consumer Cooperative of the Central Bureau of Samples of the Ministry of Economic Affairs System 32 Α6 Β6? 05δ7: V. Description of the invention (3 3) Storage device 12. The exhaust passage 61 formed therebetween maintains airtightness. In this embodiment, each heat treatment furnace 11 (lla / llb) is provided with a pressure adjusting device 64 (64a, 64b), and is provided with an on-off valve and a pressure reducing valve, respectively. Normally, the supply path 62 is closed by an on-off valve to cut off the communication between the hydrogen storage device 12 and each heat treatment furnace 11 (lla, lib). If it is necessary to supply hydrogen to each heat treatment furnace 11 (lla, lib), Meng uses a pressure relief valve to keep the pressure of hydrogen supplied to each heat treatment furnace 11 (lla, lib) below latm. In FIG. 8, P is an additional pressure control device for compensating the pressure in the hydrogen storage device 12. The vacuum exhaust device 63 and the pressure adjusting device 64 do not need to be provided for each heat treatment furnace 11, and can be used for many heat treatment furnaces 11 by adding a conversion device 65. The switching device 65 includes: flow path switching valves 65a, 65b connected to a vacuum exhaust device 63a (63b) and a pressure regulating device 64a (64b) provided in each heat treatment furnace 11a, lib; and connected to these flow path switches The valves 65a, 65b are selectively connected to the flow path switching valve 65c of the hydrogen storage device 12, and the combination of the operating positions of these flow path switching valves 6 5 a, 6 5 b, 6 5 c The following 4 hydrogen flow paths are formed: Printed by the Consumer Labor Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs (i) Hydrogen storage device 124 flow path switching valve 65c4 flow path switching valve 65a — pressure regulator 64a4 heat treatment furnace 11a (ii ) Heat treatment Lu vacuum exhaust device 63a ~> flow path switching valve 65a-flow path switching valve 65c-hydrogen storage device 12 (iii) hydrogen storage device 12-flow path switching valve 65c-flow path switching valve 65b-pressure regulating device 64b4 Heat Treatment Furnace lib This paper scale is in accordance with the Chinese National Standard (CNS) A 4 specifications (210 X 297 mm) 33 A6 B6 Printed by the Employee Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs V. Invention Instructions (34) (iv) Heat Treatment Furnace llb ~ &gt; 63b4 flow path conversion of vacuum exhaust device 65 Flow path switching valve 65c4 Hydrogen storage device 12 In this embodiment, a hydrogen pin bottle 66 is installed between the flow path switching valve 65c and the hydrogen storage device 12 via an on-off valve 67, so as to fill the hydrogen at the initial stage of the lotus transfer, or due to leakage It is used to supplement hydrogen when reducing argon. The on-off valve 67 is connected to the control device 15 together with the vacuum exhaust device 63 and the pressure adjusting device 64, and its operation is controlled by the control signal generated by the control device 15. The metal material W to be processed in the heat treatment apparatus 60 of this embodiment is the same as that described in the above embodiment. In the heat treatment device S0 of this embodiment, after the metal material W is stored in the heat treatment furnace 11a and the device is started, each temperature control device 24 controlled by the control device 15 causes the heaters 16 and 20 to generate heat, and each temperature The sensor 14 feeds back the temperature information in each heat treatment furnace 11 and hydrogen storage device 12 to the control device 15, thereby maintaining the temperature in the pressure vessel 17 of the heat treatment furnace 11 and hydrogen storage device 12 at a specific temperature. Therefore, each of the flow path switching valves 65a, 65b, 65c is driven and operated by the control device to form the hydrogen flow path described in (i), and maintains the pressure of the hydrogen at la by the pressure reducing valve of the pressure adjusting device 64a In a state of tm or less, the hydrogen storage device 12 is supplied to the heat treatment lure 11a. Due to the above operations, the absorption process of absorbing hydrogen gas in the metal material W is performed in the heat treatment furnace 11a. After the absorption process of absorbing hydrogen in the gold material is completed, the control device 15 actuates the flow path switching valve 65a to form the flow path described in item (ii), 71 / please read the precautions on the back before filling this page) • Binding. Binding. Line. This paper scale is in accordance with the Chinese National Standard (CNS) A 4 specifications (210 X 297 gong). The Ministry of Economic Affairs, Central Standards Bureau, Beigong Consumer Cooperative Printed 2055 Bamboo Five, Invention Instructions (3 5) Furthermore, the on-off valve of the pressure regulator 64 is closed, and the vacuum exhaust device 63a is operated, so that the hydrogen in the heat treatment furnace 11a is absorbed and sent to the krypton gas storage device 12. Therefore, the pressure in the heat treatment furnace 11a is lowered, and the hydrogen storage device 12 is pressurized. Hydrogen evolution occurs in the heat treatment furnace 11, and a hydrogen absorption phenomenon occurs in the hydrogen absorption alloy M of the gas storage device 12. As a result, the dehydrogenation treatment of the metal material W is performed in the heat treatment furnace 11a, and the hydrogen gas released from the metal material W is recovered into the hydrogen absorption alloy M of the hydrogen gas storage device 12 through the discharge path 61a. The above operations are carried out alternately in the two heat treatment furnaces 11a, lib, and in the same way as the above embodiment, the argon gas stored in the single hydrogen storage device 12 is used alternately in each heat treatment Lu 11a, lib. If the heat treatment is repeated, or the device is opened to the atmosphere due to maintenance or the like to reduce the amount of hydrogen, in this embodiment, the on-off valve 67 is operated to supplement the required amount of radon gas from the hydrogen pin 66. The heat conditions and pressure conditions at the time of heat treatment in this embodiment are almost the same as those in the above-mentioned embodiment, and the hospitality of the gold tantalum material W after the heat treatment is also almost the same as in the above-mentioned embodiment. In the heat treatment of this embodiment, the radon gas used in the heat treatment is also conferred between the hydrogen storage device 12 and each heat treatment furnace 11 (lla, lib) to suppress leakage to the outside of the device, so the amount of hydrogen used is small, and the A single argon gas storage device 12 supplies the amount of hydrogen required for one heat treatment device to make two heat treatment devices (lla, lib) turn, thus preventing the device from becoming large. In this embodiment, because the hydrogen in the heat treatment furnace ll (lla, lib) is based on the paper standard of China National Standard (CNS) A 4 specifications (210 X 297 mm) Τΰ (please read the precautions on the back before writing This page) -Installation- Ordering. 20 Cheng 2 A6 B6 Printed by the Employee Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economy 5. Description of the invention (3 6) Directly sent to the hydrogen storage device 12, so the heat treatment can be reduced within 11 The pressure, the pressurization in the hydrogen storage device 12, and the action of sending hydrogen into the hydrogen storage device 12, can simplify the operating system. In addition, since the pressure adjusting device 64 is provided in the supply path 62, the pressure of the hydrogen gas supplied from the hydrogen storage device 12 into the heat treatment furnace 11 can be controlled very accurately, and stable heat treatment can be performed. In the above embodiment, the vacuum exhaust device 63 pressurizes the hydrogen storage device 12. However, a pressurizing device may be provided between the vacuum exhaust device 63 and the hydrogen storage device 12, and the E force in the hydrogen storage device 12 may be increased by the pressurizing device. This method is very effective in increasing the amount of hydrogen stored in the hydrogen storage device 12. The above description describes an example in which two heat treatment furnaces 11 are provided. The present invention is not limited thereto, as long as the process cycles of the heat treatment furnace 11 do not overlap, more than three heat treatment furnaces 11 may be provided. Fig. 9 shows a heat treatment apparatus 70 according to a sixth embodiment of the present invention. This embodiment differs from the third embodiment shown in FIG. 6 only in that a hydrogen refining device 76 is disposed on the exhaust passage 41 further downstream than the vacuum exhaust device 43 to refine hydrogen flowing in the exhaust passage 41 . Therefore, the same parts as those in the embodiment of Fig. 6 are denoted by the same symbols and their explanations are omitted. The function of the heat treatment device 70 is substantially the same as that shown in FIG. 6, but with the action of the vacuum exhaust device 43, the hydrogen gas released from the heat treatment device 11 is sent to the pressure vessel 17 of the hydrogen storage device 12 through the hydrogen purification device 76 Inside. Therefore, impurities that are mixed into the hydrogen gas or the hydrogen-containing gas are removed while passing through the hydrogen purification device 76. According to this embodiment, the Chinese National Standard (CNS) A4 specifications (210 X 297 mm) are applicable to the hydrogen paper standard; please read the precautions on the back before filling out this page) 丨 Install. * 1., 1 line . A6 Printed by the Beigong Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs. B. V. Description of the invention (3 7) Recovered in the recovery stage of the hydrogen storage device, refined by the hydrogen refining device, so it can prevent metal materials from being used again. Undesirable shadow honey occurs during the heat treatment of the material tf. The numeral 10 shows a heat treatment apparatus 80 according to the seventh embodiment of the present invention. This embodiment differs from the fifth embodiment shown in plaque 8 only in that the exhaust path 61 (61a, 6 1 b) is provided on the downstream side of the vacuum exhaust device 6 3 for refining the flow in the exhaust path Hydrogen refining device for hydrogen in 61 8 6 (8 6 a, 86b). Therefore, in this example, the same parts as those in the embodiment shown in FIG. 8 are indicated by the same symbols, and the description is omitted. In this device, as in the above embodiment, with the action of the vacuum exhaust device 43, the hydrogen gas discharged from the heat treatment furnace 11 is sent to the pressure vessel 17 of the hydrogen storage device 12 through the hydrogen refining device 86. During the period of the refining device 86, impurities contained in hydrogen gas or gas skeletons containing hydrogen gas are removed. Fig. 11 shows an eighth embodiment of the present invention using heat-treated ash as a hydrogen recovery device. The metal material heat treatment device 210 in this embodiment includes: a plurality of seats for performing hydrogen absorption processing for absorbing hydrogen in the metal material W, and hydrogen release processing for releasing hydrogen from the hydrogen-absorbing metal material W (this embodiment In the example, two) heat treatment furnaces A and B; a communication path 211 connecting the heat treatment furnaces A and B to form a general closed loop of hydrogen flow between each heat treatment A and B; provided in the middle of the communication path 211, in the heat treatment Lu A (B) A pressure control device 212 that raises the internal pressure of the hydrogen absorption process and supplies hydrogen, and reduces the internal pressure of the heat treatment furnaces A and B during the hydrogen release process and discharges the hydrogen. In this embodiment, each heat treatment furnace includes: Before performing the gold material W (please read the precautions on the back before filling out this page) Binding-Order: 4- This paper size is applicable to China National Standard (CNS) A4 specifications ( 210 X 297 mm) 37 A6 B6 2055 * ^ 2 5. Description of the invention (3 8) The preheating chamber 213 which is heated before heat treatment; connected to the preheating 213 for the hydrogen absorption treatment of metal material 1 / And hydrogen treatment chamber 214 for releasing hydrogen gas; and a cooling chamber 215 connected to the heat treatment chamber 214 so as to cool the heat-treated gold material W sent from the heat treatment chamber 214. The preheating chamber 213, the heat treatment chamber 214, and the cooling chamber 215 can communicate with each other and can be shielded. As in the above embodiments, each heat treatment furnace can use an internal heat treatment furnace with a heater made of graphite, tungsten or molybdenum in the vacuum container, or a heater such as Kanthal or high-purity sulfonated silicon outside the vacuum container Outside the heat treatment furnace. The communication path 211 connects the heat treatment chambers 214 of the heat treatment furnaces A and B, and a pressure control device 212 is provided in the middle of the two heat treatment chambers 214 to provide airtight communication between the two heat treatment chambers 214 and form a hydrogen gas isolated from the atmosphere Closed loop (please read the precautions on the back before filling in this page) * ΤΓ- The volume of the structure can be reduced by 2 2 installation control pressure and can be constructed as usual. The external device can be equipped with κϋ $ CONTROL PRESSURE IX 1Α 2 way through. 1 Winding on the side divided by ο equal cylinder steam use two, 1 line. 6 IX 2 0 ao 3a open

B Α of the room management department, the heat of the furnace management department, and so on. The two are selected by the big dragons who are all in succession. The heat and gas will accumulate in the heat, and the heat pressure will be reduced within the room. 14 small parts ~ shrink it and accumulate it will be absorbed gas 0 hydrogen; will be part of the inside, which is higher than the suction pressure IX 2 Room m: handle the thermal pressure diagram, not controlled by the control of counterfeit control The operation in the press section and the temperature of 17 degrees 2 temperature δ The order of travel in the section 21 and the setting of the pressure and temperature are pre-charged according to the installation control 21 and the valve is installed in the brain and the electrical control is closed. And this paper scale is applicable to the Chinese National Standard (CNS) A 4 specifications (210 X 297 mm) 38 A6 B6 2055 ^ 2 V. Description of the invention (39) 0 The following description is based on the heat treatment in the "real-life" embodiment with the above structure As a specific example of the heat treatment of the gold-bearing material w in the device 210, two kinds of experimental examples were carried out on the gold-bearing material having the above two compositions. [Experimental Example 9] The R-Fe-B alloy having the composition shown in Table 1 to Table 4 was used as the metal material W used in the heat treatment to produce the same material as Experimental Example 1. After this kind of gold tantalum material W is pre-heated in the preheating chamber 213 of the heat treatment Supper A with an externally heated Kanthal wire heater under vacuum, and after entering the heat treatment chamber 214 under vacuum, it can be The preheating chamber 213 and the heat treatment chamber 214 are hermetically shielded, and heating of the inside of the heat treatment chamber 214 is started. The internal temperature of the heat treatment chamber 214 is detected by its temperature sensor and fed back to the control device, and the internal temperature of the heat treatment chamber 214 is maintained at a specific temperature (about 300t :) based on the feedback signal. In the early stage of the lotus turn, a specific amount of hydrogen gas is fed into the heat treatment chamber 214 of the heat treatment furnace A at a specific pressure (approximately latm) from a separately provided hydrogen storage device (not shown). At this time, the internal pressure in the heat treatment chamber A of the heat treatment furnace A is detected by the pressure sensor and fed back to the control device, and is maintained at the above-mentioned pressure value according to the feedback signal. After the hydrogen supply is completed in this way, the temperature in the heat treatment furnace A of the control device is raised to about 830, and the metal material W is maintained at this temperature for about 3 hours, thus absorbing hydrogen in the metal material W. Then, with the temperature in the heat treatment furnace A kept at 830Ό, this paper scale is applicable to the Chinese National Standard (CNS) A 4 specifications (210 X 297: PCT). ○ {Please read the precautions on the back before filling this page )-丨 installation- Ordered by the Ministry of Economic Affairs, Central Standards Bureau, Negative Work Consumer Cooperative to print A6 B6 Ministry of Economic Affairs, Central Standards Bureau, Beigong Consumer Cooperative Printed 5. Description of invention (4〇), the control device supplies the driving signal to the opening and closing valve 216, The heat treatment chamber 214 of the heat treatment furnace A is communicated, and the driving signal is supplied to the pressure control device 212 to attract the gas in the heat treatment ember A. In this way, the pressure in the heat treatment furnace A can be reduced and the hydrogen inside can be absorbed to the pressure The control device 212 releases the hydrogen absorbed by the gold tungsten material W in the heat treatment furnace A to dehydrogenate the metal material W, and after the dehydrogenation treatment, the opening and closing valve 216 is widely closed to cut off the heat treatment furnace A The connection between the heat treatment chamber 214 and the pressure control device 212. At this time, the pressure in the heat treatment ember A is detected by the pressure sensor, and based on the detection signal, the control device The operation amount of the pressure control device 212 to be controlled is kept below lxl〇-iTorr. After the above-mentioned treatment, the Na-Fe-B alloy with the above composition is crushed into 400 «m or less, and within the powder has from 0.2 to 0.4 The structure composed of recrystallized grains of Hd2Fel4B of wm, and has the required magnetism. While the hydrogen treatment of the metal material W is being performed in the heat treatment furnace A, the new gold material W will be given in the heat treatment ash B After the pre-heat treatment, it is sent to the heat treatment chamber 214 and heated to a fixed temperature in the heat treatment chamber 214 to become a state where hydrogen absorption treatment can be performed. Therefore, when the control device opens the on-off valve 217, the pressure control device 212 operates Then, the hydrogen absorbed by the pressure control device 212 is sent to the heat treatment chamber 214 of the heat treatment furnace B under the above-mentioned predetermined pressure, and hydrogen absorption treatment is performed in the heat treatment S. After the hydrogen absorption treatment is completed, the pressure control device 212 Carry out the action in the opposite direction, and apply the Chinese National Standard (CNS) # 4 specifications (210 X 297 mm) to each paper size fed into the heat treatment Lu B ; Please read the precautions on the back before filling in this page). Installation. .1T. -Line. A6 · 〇5 ^ 2 _Β6_ Fifth, the invention description (4i hydrogen absorption and hydrogen release treatment in the heat treatment furnace B. When heat treatment After the furnace B finishes the heat treatment of the metal material W, the other on-off valve 217 is closed to cut off the communication between the heat treatment furnace B and the pressure control device 212 to complete the heat treatment of the metal material W in the heat treatment Lu B. As described above, in this embodiment In the heat treatment device 210 of the example, the hydrogen used in the heat treatment of the gold tungsten material tf is given and received between the heat treatment furnaces A and B through the pressure adjustment device 212, which suppresses the release of hydrogen from the device, so the use of hydrogen can be greatly reduced It does not require exhaust gas treatment equipment, so it can avoid the enlargement of the shape of the device and the increase in equipment costs, and the amount of hydrogen used in the first heat treatment furnace filled at the initial stage of the lotus turn can be used for the operation of two heat treatment furnaces A and B. Therefore, it can also prevent the device from becoming larger. When the metal material W is fed into or out of each heat treatment furnace A, B, for example, when being fed into or out of the preheating chamber 213 and between the cooling chamber 215 and the heat treatment chamber 214, or when performing the vacuum exhaust treatment of the heat treatment chamber 214, Hydrogen used during heat treatment may leak to the outside, and the amount of hydrogen in the device may decrease as a result of repeated heat treatment. However, the amount of reduction is extremely small. Even if the amount of reduction becomes less than the amount required for heat treatment, it is only necessary to supplement the amount of reduction, so the capacity of the hydrogen storage device does not need to be too large. In the heat treatment apparatus 210 of this embodiment, the initial hydrogen filling amount was set to 35Hin3, and the gold-deposited material W of each composition described above was treated 10 times respectively, and then the hydrogen reduction amount was measured. The result was the same as in Experimental Example 4. From this result, it can be seen that according to this experimental example, there is almost no reduction in hydrogen gas, and the effect is extremely large. [Experimental example 10] This paper scale is applicable to the Chinese National Standard (CNS) A4 specifications (210 X 297 mm)... Please read the precautions on the back and then fill out this page.)-Binding-Order λ. Ministry of Economic Affairs Printed by the Central Bureau of Standards, S Industry and Consumer Cooperatives 5. Description of the invention (4 2) Examples of verification and use of materials, rfv w A The materials and furnace materials belong to the gold heat for the gold metal heat and T1 ink stone The same type of phase heat 13 contains the deposit and release of gold, which will be described in the upper collection and inhalation of this gas to borrow hydrogen, and the surroundings of the lower part of the ring are 10 weeks and 2 times. M &lt; Install at 0C '-treatment' heat The case of moving 8 drives with the same system phase control is verified by verification

V Medium-sized materials

W Jin-7 into the next article of Γ Γ ο T 4-ο ii X 1 V ο 5 8 in the subsequent treatment of hydrogen demetallization • 1 T phase θ + polarity to be changed creep resistance and α degree Powerful labor, exhaustion, fatigue, discipline, and discipline will lead him to a higher level, and Jin Houhe 9Π * 1 will be described in the previous group. There are different advantages. Furnace m: heat treatment is used for hydrogen gas. The heat treatment is installed at the 21st place, and the pressure is controlled by the time between the

, Please read the precautions on the back before filling in this page X. Installation. It is granted to be installed until the leakage gas hydrogen is suppressed. Therefore, it is the example of the installation at the beginning of the state where a fixed amount of gas hydrogen is filled. LT Xizhi each installs the usage test, and the reasons for this can be described later. The same as above, the second time. The result is 2. The result is: 5. The scores are better than those of the installation use case. The amount of hydrogen can be reduced and the actual amount of hydrogen applied is reduced, and the scope of the determination is very specific. The Central Standards Bureau of the Ministry of Economic Affairs prints and installs the fn: the example of handling heat. Show. Table 12: Example of the first picture modification IK ·-Example of B A furnace processing hot seat 2

The C is configured in the middle of the example, the furnace is processed, and the road is used to implement more than 1X of the hot seat. The room is 2 2 m: the CA of the heat is processed, and the heat of the furnace is connected in series. The implementation of the same-phase example of installation control and pressure control is the same as that of the valve in the process of opening and closing and the paper size is applicable to the Chinese National Standard (CNS) A 4 specifications (210 X 297 mm) A6 205572 B6_ V. Description of the invention (43) 216c), 217 (217a, 217b, 217c). In the heat treatment device 220 thus constituted, by sequentially controlling the pressure control devices 212a, 212b, 212c, and the opening and closing valves 216 (216a, 216b, 216c), The action of 217 (217a, 217b, 217c) sends hydrogen from the heat treatment furnace A to the heat treatment furnace B, then from the heat treatment B to the heat treatment furnace C, and then from the heat treatment ember B to the heat treatment furnace C, so In the heat treatment furnaces A, B, and C, the hydrogen absorption process for absorbing hydrogen to the metal material W and the hydrogen release process for releasing hydrogen are performed in turn. In the heat treatment device 220, the hydrogen used in the heat treatment is only circulated between the heat treatment Lu A, B, C and rarely leaks out of the device, so the amount of hydrogen used can be greatly reduced, and if each heat treatment furnace A, The processing cycles of B and C (loading processing, preheating treatment, hydrogen absorption processing, hydrogen release processing, cooling processing, and removal processing) do not overlap in time, and the amount of hydrogen required for one heat treatment furnace can be used to supply 3 The heat treatment furnaces A, B, and C operate, so the device can be miniaturized compared with the three heat treatment furnaces A, B, and C in parallel with independent lotus rotation. Fig. 13 shows a tenth embodiment of the present invention. The heat treatment device 2 3 0 in this embodiment is connected to the heat treatment chamber 214 of each of the heat treatment furnaces A and B like the communication path 2 3 1, 23 2 of the system, connecting the middle of each communication path 231, 232 to the The vacuum exhaust device 233 of the pressure control device 212 shown in the first embodiment, and in each of the communication paths 231 and 232, on-off valves 2 3 4 and 2 3 5 are provided on the suction side of the vacuum exhaust device 233. In the heat treatment device 230 of this embodiment having the above structure, the heat treatment of each of the heat treatment furnaces A and B is the same as that of the eighth embodiment, and there are only two hot spots. Please read the precautions on the back and then fill out this page)-installed , TΓ · The paper standard printed by Beigong Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs is in accordance with the Chinese National Standard (CNS) A 4 specifications (210 X 297 mm) 43 20¾512 V. Description of invention (44) between furnace A and B The hydrogen circulation method is different. J case 2, the state of the situation is to change the retreat to Hou Li 23. Dispose, pack, and suck. The gas and hydrogen are exhausted, and the heat is completed in the i place. When the valve is closed, the heat is closed and the other is sent. Receive 23 suction smells 1 ^ DM ΒβΒ Between the closed gas and the open Α furnace and furnace management, open the gas and evacuate

Inside A operation furnace 3 I 3 Rvi heat

The B heat will heat the gas. If the heat rises less, the heat will come out, and the heat will come out. Put the B heat furnace in the room and place it in the room ¾ Li ½ X 理 23 # place ® room 33U gas management Ϊ2ΜΜ I set it ί The application of the hot air inlet of the hot U furnace at the middle row B Α The empty U suspected of the heat furnace is true W The reason {I at the low deceleration pressure within the pressure of the gas delivery part of the hydrogen 4 out 1 ΓΝ.1 Put mi At the center of the furnace m: the heat of the furnace treatment heat is measured into the inspection station, the pressure and the pressure are measured during the measurement ^ 0 by 4 wounds in the root 2, the beta of the gas heat at the room pressure 2. The value of the data set is the same as the phase of the air, and the actual implementation of the actual control system is controlled by the number control system. Instead, the valve with the effective amount of sh ^ is closed. The state will be followed

The state is sealed in the furnace B where the heat is kept, and the heat is turned off, and then the closed intake is closed 34. The required intake hydrogen is passed through the installation gas th-empty to make 21 and the room is treated, at 35 hot 32 The valve β closes the furnace and opens the other place. The heat absorbs the furnace. The reason is that the heat is fed into the general 33 and the gas is hydrogen.

A ----------------------- Installed -------- TΓ ^ 泉 (Please read the note on the back first and then fill in this page) Printed by the Ministry of Economy, Central Bureau of Standards, Employee and Consumer Cooperatives 3t1 Treatment Unit 21 out of the room Releasing gas department Hydrogen heating line BE processing department Β Suction furnace gas processing hydrogen processing line in the beginning of the image A] &lt; Limuli. The heat is described in the following and the root is used for the operation of the feed material. The material is reversed. Βφκ Introduce the replacement of the delivery of the teaching only by the time, the amount of heat used in the treatment place to reduce the value of the two hydrogen can only reduce the hydrogen can also be used for this hydrogen. The paper size is compatible with the Chinese National Standard (CNS) A 4 specifications (210 X 297 mm) 2〇 Lecture 2 V. Description of the invention (4 5) For the use of hydrogen gas to heat the furnace The large Taibei Furnace ignores and measures the heat capacity as well.

In A and. ， Transformation of the lotus furnace at the place where the heat is installed to avoid heat-the gas can be released in the next state, and the hydrogen will be combined with the furnace m: mt *-place concubine 'collection from &amp; 3 suction 23 gas and set hydrogen into the gas supply and exhaust of the empty system really strong gas, which makes the β furnace Π Ε heat treatment is strong and at the same time can be 0 liters of pressure In the department, the furnace of 0 Ε processing pressure rise m: the processing heat and the pressure range of ΠΕ processing »Ι-Ell shift between the gas and hydrogen and m: the speed of the processing of the processing and the actual speed of this As shown in the first issue, the table 4 ΊΑ is set to fill the gas and evacuate it.

Jan placed the pressure on the side of the hot gas at the place where the arrangement of the hot air was originally set and implemented. Actually, the construction is based on the construction of Yu Shi. Actually, the 10th formula is taken as the 12th. Set up the control system and control the pressure control as a masterpiece] 0 3 1 ^ Press 33 mesh into 2 ί — Set example configuration 1 Pack 24 gas actual row 10 Pack empty section true and installed gas F th as S empty The actual production system is controlled by Shi Jiushi, this example is the 0th phase of the same phase, and the implementation of gas and hydrogen is regulated. The furnace for nsu m: handle the state under the heat -1, Huiben sucks i, but the gas is hydrogen} The knot is adjusted to the pressure, and the action is also advanced (4 1 14 force 2 2 The pressure chamber is placed for the management of the heat regulation of the section. To use Yiliu V, please read the precautions on the back and then fill out this page) 丨 Installed. Order _ The printing and jointing office of the Beigong Consumer Cooperative of the Ministry of Economy's Central Standards Bureau releases the gas and hydrogen to become fine. The normal gas is non-hydrogen pressure-reducing, and the hydrogen power supplying and supplying the regulating gas will be available, and the supply should be treated like this. Make sure that it can be used independently as a furnace for pressure reduction m: Treatment 〇 The thermal stability of the steady state diagram The first table of the figure shows that the table is more accurate than the bb example. Rationale 11 Λ /-An example of heat Shi Shilu Tongzhi applies the Chinese National Standard (CNS) A 4 specifications (210 X 297 mm) to the drawings and papers. 45 A6 B6 V. Invention description (46 ) Let 313 be its difference. The plaque 16 shows the heat treatment device of the thirteenth embodiment of the present invention. Compared with the tenth embodiment, the only difference is that the hydrogen purification device 313 is provided on the communication path 211. Fig. 17 is a heat treatment device 330 of the fourteenth embodiment. In this embodiment, a hydrogen gas refining device 313 is added to the eleventh embodiment of Fig. 14. The functions and effects of the argon gas refining apparatus in the above embodiments are the same as those in the sixth and seventh embodiments, and their explanations are omitted. , Please read the precautions on the back before filling in this page) Printed Form 1 (at%) \ Nd Co B Si A1 Zr Ga Fe 1 13.5 11.6 6.0 0.4---The rest 2 15.0 17.5 7.0-0.5--The rest 3 12.5 17.5 6.5--0.1 0.5 The rest 4 12.0 11.6 6.0---1.0 The rest 丨 Binding-Order., ^-This paper scale is applicable to China National Standard (CNS) A 4 specifications (210 X 297 ) 46 2t- 5 ύ ο 2 6 6 AB i V. Description of the invention (47) Table 2 (Νπι3) Examples Comparative Examples Before Treatment After Treatment After Treatment Before Treatment 1 35.0 34.9 35.0 27.4 2 35.0 34.9 35.0 26.3 3 35.0 35.0 35.0 28.5 4 35.0 35.0 35.0 29.1 (Please read the precautions on the back and then write this page) 丨 Installed ... ΤΓ.. 线. List printed by Employee Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs 3 (wt%)

The paper size is applicable to China National Standard (CNS) A4 specifications (210 X 297 mm) 2 S520

A Printed by the Central Bureau of Standards of the Ministry of Economic Affairs of the Negative Work Consumer Cooperative V. Description of the invention (48) Table 4 (N m 3) \ Example Comparative Example Before Treatment After Treatment After Treatment Before Treatment 1 35.0 35.0 35.0 28.4 2 35.0 35.0 35.0 26.6 Table 5 (Nm3) \ Examples Comparative Examples Pre-treatment post-treatment post-treatment pre-treatment 1 35.0 35.0 35.0 27.4 2 35.0 34.9 35.0 26.3 3 35.0 35.0 35.0 28.5 4 35.0 35.0 35.0 29.1 Packing. Order. Please read the precautions on the back before (Fill in this page) The size of this paper is in accordance with the Chinese National Standard (CNS) A 4 specifications (210 X 297 mm) 48 5. Description of the invention (49): Please read the precautions on the back before filling out this page) Table 6 (N m 3) \ Comparative examples of the embodiment pre-treatment post-treatment post-treatment pre-treatment 1 35.0 35.0 35.0 28.4 2 35.0 34.9 35.0 26.6 drawing 1 is a schematic diagram showing a conventional metal material heat treatment device; FIG. 2 is a schematic description of the invention FIG. 3 is a block diagram of a heat treatment device for a gold-thorium material according to the first embodiment of the present invention; FIG. 3 is a block diagram of a modified example of a heat treatment device for a plaque 2; FIG. 4 is a block diagram of a heat treatment device according to a second embodiment of the present invention; printed by the Employee Consumer Cooperative of the Central Standards Bureau of the Ministry of Economy and Economics. FIG. 5 is a partially cut-away perspective view showing the hydrogen storage device of the heat treatment device in No. 4; FIG. 6 FIG. 7 is a block diagram of a heat treatment apparatus according to a fourth embodiment of the invention; FIG. 7 is a block diagram of a heat treatment apparatus according to a fourth embodiment of the invention; FIG. 8 is a block diagram of a heat treatment apparatus according to a fifth embodiment of the invention; Block 6 of the heat treatment apparatus of the sixth embodiment of the invention; FIG. 10 is the heat treatment of the seventh embodiment with the fifth embodiment of FIG. 8 changed. The paper scale is applicable to the Chinese National Standard (CNS) A 4 specification (210 X 297 mm) 49

A6 B6_ V. Description of the invention (5Q) Block diagram of the processing device; FIG. 11 is a block diagram of the heat treatment device of the eighth embodiment of the invention; FIG. 12 is a block diagram of the heat treatment device of the ninth embodiment of the invention; Block diagram of the heat treatment apparatus of the tenth embodiment of the present invention; Drawing 14 is a block diagram of the heat treatment apparatus of the eleventh embodiment of the present invention; FIG. 15 is the heat treatment of the twelfth embodiment of the present invention, which changes the eighth embodiment of FIG. 11 Block diagram of the device; FIG. 16 is a block diagram of the heat treatment device of the thirteenth embodiment of the present invention modified from the tenth embodiment of FIG. 13; FIG. 17 is a fourteenth embodiment of the present invention modified from the eleventh embodiment of FIG. 14 The square of the heat treatment device. ί Please read the precautions on the back before writing this page). Ordered. Printed by the Employee Consumer Cooperative of the China Bureau of Standards and Economics of the Ministry of Economic Affairs. This paper scale is applicable to China National Standard (CNS) Grade 4 (210 X 297 mm)

Claims (1)

A7 B7 2〇55 ^ __ D7___ Sixth, the scope of patent application 1. A method of heat treatment of gold tantalum materials, its special emblem includes: the hydrogen absorption process of absorbing hydrogen in the metal material, and from the absorption of the gas The process of releasing hydrogen from the metal material; and recovering the hydrogen released from the Jinge material, and supplying the recovered hydrogen to the hydrogen recovery process in the hydrogen absorption and release process. 2. The method as claimed in item 1 of the patent scope, in which the hydrogen recovery process is a process of storing hydrogen in a hydrogen absorption alloy and releasing the stored hydrogen. 3. The method as described in item 1 of the patent application scope, in which the hydrogen recovery process is a hydrogen absorption process in which hydrogen is absorbed in a metal material repeatedly, and a hydrogen absorption release process in which hydrogen is released from the hydrogen-absorbent metal material. (Please read "Notes on the back" first and then fill in this page) Enter the suction part to use it from the heat-and the 0C:, the package is released for the absorption of argon and its hydrogen. The gas is placed in the hydrogen charge, and the material is placed in the middle heat gold material. The material is the material. The gold hydrogen gas species that absorbs gold and gas is the reason for the hydrogen in the row. The heat in the furnace is the heat from the place. For supply and use, re-furnace «The hydrogen management department will be hot and there, and the furnace with gas and hydrogen will be released» The Central Standard Bureau of the Ministry of Economic Affairs and Industry Consumer Cooperation Co., Ltd. Du Yin made the equipment to recover the gas and hydrogen. Items of installation 4 No. 0 Fan set, easy to install | Special «: j JI Ming 0 ~ Φ Gas S 5 Set the place to collect and suck. The gas is stored in hydrogen and hydrogen, and the material gas is stored in the storage. The material of the hydrogen is in the structure of the project. 4 The gold absorption gas and the hydrogen collection model will absorb the profit of the gas. The application system is the gas from which hydrogen gas is released from the 6th place in Yumeng. The hydrogen gas is released from the material Hurricane gas. The hydrogen absorption is from the first m:, the furnace m: the heat is processed. The paper size is applicable to the Chinese national standard (CNS ) A 4 specifications (210 X 297 mm) 5 1 The Ministry of Economic Affairs, Central Ministry of Housing and Urban Welfare Consumer Cooperation Du Yin R Six, the scope of patent application 7. Such as the application of the patent scope item 5, which also has a separate heat treatment On the furnace and hydrogen storage device, a sensor for detecting and measuring its internal pressure and internal temperature, and adjusting the internal pressure or temperature of the heat treatment device and hydrogen storage device according to the detection signal generated by the sensor, thereby cooperating with the heat treatment The processing state of the furnace is the control device that supplies hydrogen to the heat treatment furnace or is discharged from the heat treatment furnace. 8. The device as claimed in item 7 of the patent scope, which also includes: sending the hydrogen from the hot spot to the exhaust path of the hydrogen storage device; storing hydrogen from the hydrogen The device is supplied to the supply path in the heat treatment furnace; the vacuum exhaust device is provided on the exhaust path to absorb the gas in the heat treatment furnace and send it to the hydrogen storage device; and is provided on the supply path to adjust the supply to the heat treatment A pressure regulating device for the hydrogen pressure of the furnace. This control device can regulate not only the internal pressure or internal temperature, but also the action of the vacuum exhaust device, thereby controlling the hydrogen gas supplied to and discharged from the heat treatment furnace. 9. The device as claimed in item 7 of the patent scope, which also includes: a number of heat treatment furnaces with these sensors respectively; many heat treatment furnaces and hydrogen storage devices are connected, and there are many connections for forming a general closed loop of hydrogen flow between them Channel; and a conversion device that selectively connects one of the many communication paths to the hydrogen storage device. 10. The device as claimed in item 9 of the patent scope, which also includes: connecting each heat treatment furnace with a hydrogen storage device, and sending the hydrogen released from each heat treatment furnace into the exhaust path of the hydrogen storage device; storing hydrogen from the hydrogen The device is supplied to the supply channel in each heat treatment furnace; it is connected to (please read the precautions on the back before filling in this page). 丨 The size of the bound paper is applicable to the Chinese National Standard (CNS) A 4 specifications (210 X 297 mm) 5 2. Sixth, apply for a patent Fan Garden A7 B7 C7 D7. The central standard home of the Ministry of Economy and Economics. The β-consumer cooperative prints hydrogen. It saves temperature and heat. 'Empty hydrogen equipment and multi-gas are the most, and the lifting device is placed in various ways. The difference is that the hydrogen is put on the furnace and the force is put on the assembly and the delivery force is placed on the inside to separate the reason and the pressure control of the circuit-fj the pressure is installed to the road: the local road: the local power control Control the supply and supply of energy, including the return of heat and the internal pressure of the heat; the pressure of the closed gas bag of the gas storage bag is at its inlet pressure. It is assumed that the gas will be absorbed in the gas and the hydrogen will be in Optional communication in a timely manner in the body of the furnace and hydrogen, and this hydrogen which its pass; flow thereof selected from clay, which sort processing thereof &gt;.. Gas, by the furnace. , Flow, Furnace Gas One, Discharge Everywhere,, Place in the middle, put the place where the hydrogen is placed to collect heat and set the interior. Furnace place as a row of hardcover into the middle of the heat and even absorb each Furnace items that are presumed to be irritating, and that the heat from the heat path is arranged to be low are arranged in the section of the furnace, and the furnace is opened between the items. Item No. 1 hydrogen is placed in the air-conditioning system at the drop item. 11 Duoqi 6 and return and force 1313 hot Zhen each installation place on the first side of the first installation in the multi-furnishing furnace closed, press the first. The first one is to install the gas and heat the surroundings, and the Xuchang Governance is used in the gas surroundings. Control the air from the advantages of the precise measurement and installation of the positive heat flow to give it the advantage of the gas and the road, and the special gas is stored; the special gas is provided for the purpose of storing and adjusting the special exhaust gas, and the furnace is equipped with hydrogen Please wait for the storage road to install 1 hydrogen heat and please empty the gas storage to set up, and apply for the gas and store the gas separately. Shen Zhenshen's exhaust gas is installed at a place such as exhaust gas, if there is hydrogen and even storage is like a high place; it is like a false one! I ίII ----------- called -------- install ------. 玎 ----- Θ Spring (please read the precautions on the back before filling in this page) This paper scale is applicable to China National Standard (CNS) A 4 specifications (210 X 297 mm) 53 A7 B7 C7 D7 6. The patent application group injury consists of a vacuum exhaust device and a pressure unit installed on its exhaust side. Note 16. If the device under item 13 of the patent application scope includes a hydrogen refining device installed in the middle of the communication path. 17. For example, the device of patent application reading item 16, wherein the pressure control device is a vacuum exhaust device. 18. The device as claimed in item 16 of the patent scope, wherein the pressure control device is composed of a vacuum exhaust device and a pressure regulating device provided on the exhaust side thereof. Installation 19. The device as claimed in item 18 of the patent application, in which the hydrogen refining device is installed between the vacuum exhaust device and the pressure unit. Printed by the Central Engineering Bureau of the Ministry of Economic Affairs. Printed by the Engong Consumer Cooperative Society. This paper scale is applicable to the National Standard (CNS) A4 specification (210 X 297 mm)