JP2893373B2 - Thermoelectric element - Google Patents

Thermoelectric element

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Publication number
JP2893373B2
JP2893373B2 JP6122873A JP12287394A JP2893373B2 JP 2893373 B2 JP2893373 B2 JP 2893373B2 JP 6122873 A JP6122873 A JP 6122873A JP 12287394 A JP12287394 A JP 12287394A JP 2893373 B2 JP2893373 B2 JP 2893373B2
Authority
JP
Japan
Prior art keywords
semiconductor material
module
electrode
electrodes
thermoelectric semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP6122873A
Other languages
Japanese (ja)
Other versions
JPH07335946A (en
Inventor
松雄 岸
龍明 安宅
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP6122873A priority Critical patent/JP2893373B2/en
Priority to US08/445,168 priority patent/US5824561A/en
Priority to DE69535235T priority patent/DE69535235T2/en
Priority to EP01202362A priority patent/EP1152474B1/en
Priority to DE69535276T priority patent/DE69535276T2/en
Priority to EP95303464A priority patent/EP0687020B1/en
Priority to DE69529019T priority patent/DE69529019T2/en
Priority to EP01202364A priority patent/EP1154495B1/en
Priority to TW087117354A priority patent/TW393788B/en
Publication of JPH07335946A publication Critical patent/JPH07335946A/en
Application granted granted Critical
Publication of JP2893373B2 publication Critical patent/JP2893373B2/en
Priority to US09/404,938 priority patent/US6222243B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は温度差による発電、ある
いは電流を流すことにより冷却・発熱を行うことができ
る熱電素子に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thermoelectric element capable of performing cooling or heat generation by generating power by means of a temperature difference or flowing an electric current.

【0002】[0002]

【従来の技術】熱電素子は金属電極を介してP型熱電半
導体材料とN型熱電半導体材料を接合することによりP
N接合素子対を形成することにより作製される。この熱
電素子は接合対間に温度差を与えることによりゼーベッ
ク効果に基づく起電力を発生することから発電装置とし
て、また、接合部に電流を流すことにより接合部の一方
で冷却、他方で発熱が起こるいわゆるペルチェ効果を利
用した冷却装置や精密温度制御装置などとしての用途が
ある。
2. Description of the Related Art A thermoelectric element is formed by joining a P-type thermoelectric semiconductor material and an N-type thermoelectric semiconductor material via a metal electrode.
It is manufactured by forming an N junction element pair. This thermoelectric element generates an electromotive force based on the Seebeck effect by giving a temperature difference between the junction pair, and as a power generation device, and by flowing a current to the junction, cooling is performed on one side of the junction and heat is generated on the other side. There is a use as a cooling device or a precision temperature control device utilizing the so-called Peltier effect that occurs.

【0003】一般に、熱電素子は複数個の素子が直列に
繋がれた熱電モジュールとして用いられる。この熱電モ
ジュールの構造は一辺が数百μmから数mmのP型及び
N型熱電半導体材料が二枚のアルミナや窒化アルミニウ
ムなどの電気絶縁性の基板で挟み込まれており、P型熱
電半導体材料とN型熱電半導体材料が基板上で金属等の
電気導電性の物質により接合されると同時に、複数個の
接合が二枚の基板で直列に繋がれている。熱電モジュー
ルの性能は、それを構成している材料や熱設計に加え、
モジュールを形成している熱電素子の数が重要な要素と
なっている。とくに温度差を利用した発電では発生する
起電圧は素子数に比例するため、高い電圧を取り出すこ
とを目的とするモジュールでは直列に並べる素子数を多
くすることが望まれている。また、冷却素子や温度制御
用の素子として熱電モジュールを用いる場合において
も、直流に並べた素子の数が少ないと素子に流す電流が
大きくなり、配線を太くしたり、電源を大きくする必要
があった。このため、直列に素子を多く並べることが冷
却素子として使う場合にも望まれていた。
In general, a thermoelectric element is used as a thermoelectric module in which a plurality of elements are connected in series. The structure of this thermoelectric module is such that P-type and N-type thermoelectric semiconductor materials having a side of several hundred μm to several mm are sandwiched between two electrically insulating substrates such as alumina and aluminum nitride. At the same time as the N-type thermoelectric semiconductor material is joined on a substrate by an electrically conductive substance such as a metal, a plurality of joints are connected in series by two substrates. The performance of a thermoelectric module depends on the materials and thermal design that make it up,
The number of thermoelectric elements forming the module is an important factor. In particular, in power generation using a temperature difference, an electromotive voltage generated is proportional to the number of elements. Therefore, it is desired to increase the number of elements arranged in series in a module for extracting a high voltage. Also, in the case where a thermoelectric module is used as a cooling element or a temperature control element, if the number of elements arranged in direct current is small, the current flowing through the elements increases, so that it is necessary to make the wiring thicker and increase the power supply. Was. For this reason, arranging many elements in series has been desired even when used as a cooling element.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、熱電素
子を直列に多く並べる場合、配線あるいは熱電半導体材
料の一カ所でも断線するとモジュールとしての機能を損
なってしまう。この問題は製造における歩留まりの低下
をきたし、同時にコスト面でも大きな課題ともなってい
た。
However, when a large number of thermoelectric elements are arranged in series, the function as a module is impaired if any one of the wires or the thermoelectric semiconductor material is disconnected. This problem has led to a reduction in the yield in manufacturing, and at the same time has been a major problem in terms of cost.

【0005】[0005]

【課題を解決するための手段】かかる課題を解決するた
めに、モジュール内で熱電半導体材料を直列に繋ぐため
に熱電半導体材料を挟んでいる基板に形成されている金
属等の配線のうち全部あるいは一部に熱電半導体材料を
接合するだけでなく外部との接続やモジュール内の他の
電極と接続するための電極を設けるようにする。
In order to solve the above-mentioned problems, all or all of the wiring such as metal formed on the substrate sandwiching the thermoelectric semiconductor material in order to connect the thermoelectric semiconductor materials in series in the module is provided. In addition to joining a thermoelectric semiconductor material partially, an electrode for connecting to the outside or connecting to another electrode in the module is provided.

【0006】[0006]

【作用】基板配線に電極を設けることにより、モジュー
ルの組立時あるいは組立後、モジュール内の熱電半導体
材料あるいは基板上の配線に断線等の欠陥があった場
合、欠陥のある部分を避けるように、電極間を電気的に
接続することにより、全体としての性能は機能的に削除
した分だけ低下するが、モジュールとして機能させるこ
とができるのである。また、これらの電極を検査用の電
極として用いることにより、モジュール内の断線等の欠
陥の存在とその位置を知ることができる。さらに本発明
の電極は、入出力電極として用いることもできる。
By providing electrodes on the substrate wiring, if there is a defect such as disconnection in the thermoelectric semiconductor material in the module or the wiring on the substrate during or after assembly of the module, the defective portion is avoided. By electrically connecting the electrodes, the performance as a whole is reduced by the amount of the functionally deleted portion, but the device can be made to function as a module. Further, by using these electrodes as inspection electrodes, it is possible to know the presence and location of a defect such as a disconnection in the module. Further, the electrode of the present invention can be used as an input / output electrode.

【0007】[0007]

【実施例】以下、本発明を図面を参考に実施例に基づき
説明する。図1はP型熱電半導体材料とN型熱電半導体
材料を金属を介してPN接合を形成し二枚のアルミナ基
板に挟むことにより作製した熱電モジュールを一枚の基
板上方より金属配線部のみを表した図である。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described based on embodiments with reference to the drawings. FIG. 1 shows a thermoelectric module manufactured by forming a PN junction between a P-type thermoelectric semiconductor material and an N-type thermoelectric semiconductor material via a metal and sandwiching the same between two alumina substrates. FIG.

【0008】図1で、実線部1は上部基板上に設けられ
たPN接合用配線・電極である上部基板配線を表し、破
線2は下部基板上にもうけられたPN接合用配線・電極
である下部基板配線を表している。P型熱電半導体材料
3及びN型熱電半導体材料4はこれらの実線と破線が交
わっている円形部に交互に挟み込まれており、二つの入
出力用電極5の間(以下、二つの電極の間のことを電極
間と称す)で直列に繋がれている。電極6は本発明であ
るモジュール補修および検査用電極として下部基板上の
配線のうち外周部に設けたものである。電極6を複数個
設けることにより電極間に検査用の探針電極を接触させ
ることにより電極6間(例えば、図1の電極6−aと6
−bの間)に存在する断線等の欠陥の存在を調べること
ができる。また、電極6間に欠陥が存在した場合、電極
間を電気的に接続することにより、欠陥部を電気的に孤
立させ、無欠陥部だけでモジュールを形成することがで
きる。例えば、図1のA点で断線があった場合、電極6
−aと電極6−bとを電気的に短絡させることによりモ
ジュールとして機能させることが出来るのである。
In FIG. 1, a solid line portion 1 represents an upper substrate wiring which is a PN junction wiring / electrode provided on the upper substrate, and a broken line 2 represents a PN junction wiring / electrode formed on the lower substrate. The lower substrate wiring is shown. The P-type thermoelectric semiconductor material 3 and the N-type thermoelectric semiconductor material 4 are alternately sandwiched between the circular portions where the solid line and the broken line intersect, and are between two input / output electrodes 5 (hereinafter, between two electrodes). Is referred to as between the electrodes). The electrode 6 is provided on the outer peripheral portion of the wiring on the lower substrate as a module repair and inspection electrode according to the present invention. By providing a plurality of electrodes 6, a probe electrode for inspection is brought into contact between the electrodes 6, so that the electrodes 6 (for example, electrodes 6-a and 6-
The presence of a defect such as a disconnection existing during -b) can be checked. Further, when a defect exists between the electrodes 6, by electrically connecting the electrodes, the defective portion is electrically isolated, and the module can be formed only by the non-defective portion. For example, if there is a disconnection at point A in FIG.
By electrically shorting -a and the electrode 6-b, the module can function as a module.

【0009】図1では熱電半導体材料が挟まれている箇
所は数十箇所であるが、この図は説明を簡略化するため
のものであり、発明者は図1のX方向に50列、Y方向
に10列からなる温度差発電用モジュールについて実験
を行ったが断線1箇所についてX方向に2列(素子数で
10対)を配線から削除することになるが、発電性能は
削除された素子数の割合であった。性能の低下はモジュ
ールの使用目的により異なるが、素子数を多くした温度
差発電、冷却を目的としたモジュールでは数%から10
%程度の素子数の減少は大きな問題とはならない場合が
多いが、あらかじめ不良となる素子数を見込んでおき、
その分素子数を多くしておくことによって解決できる。
また、図1の配線構造を有するようなモジュールの場
合、図中のY方向の素子数を極力減らし、X方向の素子
数を多くするような配線構造にすることにより、断線等
の不良が生じ電極6−aと電極6−bを接続するにして
も全体の素子数に対する動作しない素子数の割合を小さ
くすることができる。
In FIG. 1, there are several tens of places where the thermoelectric semiconductor material is sandwiched. However, this figure is for the sake of simplicity, and the inventor of the present invention has 50 rows in the X direction of FIG. An experiment was performed on a temperature difference power generation module having 10 rows in the direction. Two rows (10 pairs in number of elements) in the X direction were deleted from the wiring for one disconnection, but the power generation performance was deleted. It was a percentage of numbers. The decrease in performance varies depending on the purpose of use of the module.
In many cases, a decrease in the number of elements of about% does not become a major problem, but in advance, the number of defective elements is estimated,
This can be solved by increasing the number of elements accordingly.
Further, in the case of a module having the wiring structure shown in FIG. 1, a failure such as disconnection occurs due to a wiring structure in which the number of elements in the Y direction in the figure is reduced as much as possible and the number of elements in the X direction is increased. Even when the electrodes 6-a and the electrodes 6-b are connected, the ratio of the number of inactive elements to the total number of elements can be reduced.

【0010】[0010]

【発明の効果】本発明による電極を熱電モジュールの基
板上の配線に形成することにより、熱電モジュールの検
査を行うことができ、断線、接続不良等の欠陥を調べる
ことができると同時に欠陥が存在した場合、欠陥部分を
避けるように、電極を接続することにより熱電モジュー
ルとしての機能を発揮することができるようにすること
ができる。これにより、モジュールの製造上の歩留まり
を格段に高めることができ、コストにおいてもその低減
が図れる。
By forming the electrodes according to the present invention on the wiring on the substrate of the thermoelectric module, the thermoelectric module can be inspected, and defects such as disconnection and poor connection can be examined, and at the same time defects exist. In this case, the function as the thermoelectric module can be exhibited by connecting the electrodes so as to avoid the defective portion. As a result, the production yield of the module can be significantly increased, and the cost can be reduced.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の熱電素子をモジュール化したものを基
板上面より透視し、上部基板および下部基板上の配線お
よび電極のみを表した概念図である。
FIG. 1 is a conceptual diagram showing a module of a thermoelectric element of the present invention as seen through from the upper surface of a substrate, and showing only wiring and electrodes on an upper substrate and a lower substrate.

【符号の説明】[Explanation of symbols]

1 上部基板配線 2 下部基板配線 3 P型熱電半導体材料 4 N型熱電願導体材料 5 入出力用電極 6 本発明に関わる電極 REFERENCE SIGNS LIST 1 upper substrate wiring 2 lower substrate wiring 3 P-type thermoelectric semiconductor material 4 N-type thermoelectric conductor material 5 input / output electrode 6 electrode according to the present invention

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 互いに対向する2枚の基板と、 前記基板間に設けられたP型熱電半導体材料及びN型熱
電半導体材料と、 前記P型熱電半導体材料と前記N型熱電半導体材料を直
列に接合するために前記基板上に設けられた複数の配線
からなる配線群と、前記配線群のうち一対の配線と一体的に形成された入出
力用電極と、 前記配線群のうち外周部に位置する複数の配線とそれぞ
れ一体的に形成され、外部と電気的に接続可能な複数の
検査用電極と、を 備える熱電素子であって、前記検査用電極で検出された熱電素子の欠陥部を避ける
ように検査用電極を短絡させることにより、前記欠陥部
を補修することが可能になることを特徴とする 熱電素
子。
1. A semiconductor device comprising: two substrates facing each other; a P-type thermoelectric semiconductor material and an N-type thermoelectric semiconductor material provided between the substrates; and a serial connection of the P-type thermoelectric semiconductor material and the N-type thermoelectric semiconductor material. a plurality of wires provided on the front SL on the substrate to join
A wiring group composed of a pair of wires are integrally formed with and out of the wiring group
A force electrode, a plurality of wires located at the outer periphery of the wire group, and
Are integrally formed and electrically connectable to the outside.
A test electrode, and avoiding a defective portion of the thermoelectric element detected by the test electrode.
Short-circuiting the inspection electrode so that the defective portion
A thermoelectric element characterized by being able to repair a thermoelectric element.
JP6122873A 1994-05-23 1994-06-03 Thermoelectric element Expired - Lifetime JP2893373B2 (en)

Priority Applications (10)

Application Number Priority Date Filing Date Title
JP6122873A JP2893373B2 (en) 1994-06-03 1994-06-03 Thermoelectric element
US08/445,168 US5824561A (en) 1994-05-23 1995-05-19 Thermoelectric device and a method of manufacturing thereof
EP01202362A EP1152474B1 (en) 1994-05-23 1995-05-23 Thermoelectric device
DE69535276T DE69535276T2 (en) 1994-05-23 1995-05-23 Manufacturing method for a thermoelectric device
EP95303464A EP0687020B1 (en) 1994-05-23 1995-05-23 Thermoelectric device and a method of manufacturing thereof
DE69529019T DE69529019T2 (en) 1994-05-23 1995-05-23 Thermoelectric arrangement and manufacturing process therefor
DE69535235T DE69535235T2 (en) 1994-05-23 1995-05-23 Thermoelectric device
EP01202364A EP1154495B1 (en) 1994-05-23 1995-05-23 Method of manufacturing a thermoelectric device
TW087117354A TW393788B (en) 1994-05-23 1995-06-05 Method of manufacturing thermoelectric device
US09/404,938 US6222243B1 (en) 1994-05-23 1999-09-23 Thermoelectric device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6122873A JP2893373B2 (en) 1994-06-03 1994-06-03 Thermoelectric element

Publications (2)

Publication Number Publication Date
JPH07335946A JPH07335946A (en) 1995-12-22
JP2893373B2 true JP2893373B2 (en) 1999-05-17

Family

ID=14846744

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6122873A Expired - Lifetime JP2893373B2 (en) 1994-05-23 1994-06-03 Thermoelectric element

Country Status (1)

Country Link
JP (1) JP2893373B2 (en)

Also Published As

Publication number Publication date
JPH07335946A (en) 1995-12-22

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