JP2891570B2 - Ultrasonic processing head - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic machining head used for ultrasonic grinding of ceramics, compression of powder particles, bonding of films, rolling of metal sheets, and the like.

[0002]

2. Description of the Related Art In recent years, in the drilling and surface grinding of hard and brittle materials such as ceramics, a method of processing while ultrasonically oscillating a tool has been well known. Various processing heads have been proposed. For example, there is one disclosed in JP-A-63-200953.

FIG. 4 shows a main part of a conventional ultrasonic machining head disclosed in Japanese Patent Application Laid-Open No. 63-200953.
As shown in FIG. 4, 101 is an ultrasonic oscillator (electrostrictive element)
, And is fastened to the transmission horn 104 with the holding plate 103 sandwiched by bolts 102. Ultrasonic oscillator 1
When ultrasonic power is supplied by cables 105 and 106 from an ultrasonic power supply (not shown) via a slip ring or the like at 01, the ultrasonic oscillator 101 vibrates and is amplified by the transmission horn 104 while the transmission horn 104 amplifies it. It is transmitted to the tool 107 which is detachably attached to one end, and the tool 107 vibrates with high amplitude by ultrasonic vibration.

The ultrasonic vibration system is supported by nodes of axial vibration (node position) indicated by line XX and nodes of radial vibration (loop position) indicated by line RR. And outer cylinders 110 and 1 through thin disks 108 and 109, respectively.
11 is fastened with bolts 112 and 113. At the other end of the outer cylinder 110, a taper shank 114 is provided so as to be detachable from the main shaft of the machine tool, and a pull stud 115 is attached to the tip thereof.

[0005] High-pressure grinding fluid is supplied from a hole 116 provided in the outer cylinder 111 through a rotary joint (not shown) from a position indicated by an arrow M, and is supplied to a hole 11 provided in the transmission horn 104.
7, and is ejected from a hole 118 provided in the tool 107.

[0006]

Generally, in an ultrasonic machining head, the rigidity of support of an ultrasonic vibration system is low and heavy grinding cannot be performed, so that sufficient grinding ability cannot be obtained, or the rotational accuracy of the vibration system cannot be improved. However, there has been a problem in that high-speed rotation cannot be performed due to poor performance, and that when a tool to be used is changed, the change in mass tends to be insufficient.

Therefore, in the conventional ultrasonic machining head, as described above, the support rigidity of the ultrasonic vibration system is improved. However, the support of the two places by the disks 108 and 109 inevitably prevents the vibrations from being transmitted to the outer cylinder 110 and the transmission horn 111.
Must be thin, and the radial vibration node (loop position) indicated by the line RR is the position where the amplitude of the axial vibration is the largest, and the disk 109 inhibits the axial vibration. It becomes a factor.

Further, since the disk 109 is located near the tool 107, there is a problem that the working range of the tool 107 is obstructed.

On the other hand, in the ultrasonic grinding, if the grinding is performed while jetting a high-pressure grinding fluid from the inside of the tool, the thermal effect on the abrasive grains due to the cooling of the tool and the improvement in lubricity, and the friction are reduced. It has been conventionally known that the resulting increase in processing efficiency can be obtained.

However, as described above, in the conventional ultrasonic processing head, a method of supplying a high-pressure grinding fluid from the side to the ultrasonic vibration system from the outside via a rotary joint is generally used. For this reason, there are problems that rotation accuracy is affected and high-speed rotation cannot be performed, and the ultrasonic processing head cannot be automatically replaced.

An object of the present invention is to solve such a problem, and an object of the present invention is to provide an ultrasonic machining head having improved grinding ability.

[0012]

An ultrasonic machining head according to the present invention for achieving the above object is an ultrasonic machining head which performs machining by applying ultrasonic vibration to a tool. A transmission horn for transmitting an ultrasonic vibration generated while supporting the ultrasonic vibrator, a tool detachably attached to a tip portion of the transmission horn, and an outer cylinder supporting the transmission horn; An outwardly protruding flange is provided on the outer diameter side of the shaft vibration node portion of the horn, and a support shaft is provided at the shaft center of the shaft vibration node portion of the transmission horn. The shaft is pressed and supported by the outer cylinder.

In the ultrasonic machining head according to the present invention, a first tapered portion is formed on a flange of the transmission horn toward a distal end of the transmission horn, and a second tapered portion is formed on a distal end of the support shaft. A third facing the first tapered portion;
A fastening ring having a tapered portion is attached to the outer cylinder, and a fourth tapered portion facing the second tapered portion is formed at an axial center of the outer cylinder.

Further, in the ultrasonic machining head of the present invention, the outer cylinder, the support shaft, the transmission horn, and the tool are formed with through-holes penetrating in the axial direction, and the respective through-holes communicate with each other to supply the cooling medium. A passage is formed.

The ultrasonic machining head according to the present invention is characterized in that a cavity having a diameter equal to or larger than the outer diameter of the support shaft is provided inside the transmission horn in one axial direction of the support shaft. Is what you do.

In the ultrasonic machining head according to the present invention, a taper shank is provided at one end of the outer cylinder in the axial direction so as to be detachable from the rotary spindle of the machine tool, and power is supplied to the taper shank from the power supply portion of the rotary spindle. And a socket terminal for supplying power to the ultrasonic vibrator.

[0017]

[Function] The center of the axis of the ultrasonic machining head is the outer cylinder and the support shaft,
The support shaft is connected to the transmission horn, and the transmission horn is connected to the tool by the tool.For the machining reaction force received by the tool, the thrust force is transmitted directly from the tool via the transmission horn and the support shaft to the outer cylinder body. A large thrust force does not act on the flange. On the other hand, the radial force is received by the outer cylinder via the flange of the transmission horn and the support shaft, so that the rigidity is higher than in the conventional case.

Further, a first tapered portion is formed on an outer diameter side flange portion of a node of a shaft vibration of the transmission horn, and a second tapered portion is formed on a distal end portion of the support shaft, and faces the first tapered portion. When the tightening flange having the third taper portion is tightened to the outer cylinder, the second taper portion at the distal end of the support shaft is fitted to the fourth taper portion provided at the shaft center of the outer cylinder, and the shaft center of the transmission horn is adjusted. The transmission horn is supported on the outer cylinder with high accuracy and high rigidity while being self-aligned to coincide with the axial center of the outer cylinder.

Further, through holes are provided in the outer cylinder, the support shaft, the transmission horn, and the center of the shaft of the tool to form supply passages for the continuous cooling medium. Even if it rotates, it is a part where the action of the centrifugal force is small, and by making this part a passage for high-pressure grinding fluid or the like, it becomes possible to maintain a good rotational balance.

By providing a cavity having a diameter equal to or greater than the diameter of the support shaft inside the transmission horn, ultrasonic vibration of the tool is prevented from being directly transmitted to the support shaft through the transmission horn. Ultrasonic vibrations can be minimized from being transmitted to the outside.

Also, a taper shank is provided at one end in the axial direction of the outer cylinder, which is detachable from a rotating main shaft of a machine tool or the like, and a socket portion for receiving power from a power supply portion is provided here to supply power to the ultrasonic oscillator. The supply and supply of the grinding fluid from the rotating spindle of the machine tool or the like become possible, and the automatic replacement of the ultrasonic processing head, which has not been realized so far, becomes possible.

[0022]

Embodiments of the present invention will be described below in detail with reference to the drawings.

FIG. 1 shows an ultrasonic machining head according to a first embodiment of the present invention. As shown in FIG. 1, reference numeral 11 denotes an ultrasonic oscillator (electrostrictive element), which is formed of four perforated discs in this embodiment, and The transmission horn 14 is fastened to the transmission horn 14 by a screw 13 of the transmission horn 14 by a jig 13. A tapered shank 17 is formed at one end of the outer cylinder 16 in the axial direction, and ultrasonic power receiving socket terminals 18 and 19 are provided at the shank portion. These socket terminals 18 and 19 are connected to the power cables 20 and
It is connected to the ultrasonic oscillator 11 via 21. The taper shank 17 is detachably attached to a rotating spindle of a machine tool or the like (not shown). At this time, the socket terminals 18 and 19 are also attached to and detached from a power supply unit provided on the rotating spindle of the machine tool or the like (not shown). It is inserted freely.

The ultrasonic vibration system is supported by a flange 22 provided on the outer diameter side of the transmission horn 14 at an axial vibration node (node position) indicated by line XX, and a shaft center portion of the transmission horn 14. Is supported by being pressed against the outer cylinder 16 by bolts 25 by a fastening flange 24. This support structure forms a first downward tapered portion 26 on the flange 24 and a second upward tapered portion 27 at the distal end of the support shaft 23, while forming the first tapered portion 26 on the flange 24. The outer cylinder 16 is fastened to the outer cylinder 16 with the bolt 25 by the fastening flange 24 having the third tapered portion 28 fitted thereto. At this time, the second tapered portion 27 at the tip of the support shaft 23 is connected to the fourth
The transmission horn 1 is fitted to the outer cylinder 16 with high accuracy and high rigidity while being fitted to the tapered portion 29 and being self-aligned so that the axis of the transmission horn 14 coincides with the axis of the outer cylinder 16.
4 is supported.

Further, a through hole 30 is provided at the center of the shaft of the outer cylinder 16.
The pull stud 31 is attached to the tapered shank portion 17, and the pull stud 31 is also provided with a through hole 32. The second taper portion 30 of the support shaft 23 is provided with a seal 33 such as a grinding fluid by an O-ring, and through holes 35, 36, 37, and 38 are also provided at the center of the support shaft 23, the transmission horn 14, and the tool 34. Are provided, and these are continuous holes, and constitute a supply passage for the grinding fluid or the like.

When ultrasonic power is supplied to the ultrasonic oscillator 11 from the socket terminals 18 and 19 through the power cables 20 and 21, the ultrasonic oscillator 11 vibrates and is amplified by the transmission horn 14. The power is transmitted to a tool 34 which is detachably attached to the other end of the transmission horn 14, and the tool 34 is ultrasonically vibrated at a high amplitude.

At this time, the center of the axis of the ultrasonic machining head is a portion where the action of centrifugal force is small even when the ultrasonic machining head rotates at high speed, and this portion is used as a supply passage for high-pressure grinding fluid or the like. , It is possible to maintain a good rotation balance. The center of the axis of the ultrasonic machining head is the outer cylinder 1
6. The support shaft 23, the transmission horn 14, and the tool 34 are connected to each other. The processing reaction force received by the tool 34 is directly received by the outer cylinder 16 from the tool 34 via the transmission horn 14 and the support shaft 23 for the thrust force. Therefore, no large thrust force acts on the flange 22 of the transmission horn 14. On the other hand, with respect to the radial force, the outer cylinder 16 receives the radial force through the flange 22 and the support shaft 23 of the transmission horn 14,
From these, it is possible to support with higher rigidity than before. In the grinding experiment, heavy grinding with a thrust force of 150 kg or more could be easily performed, and no problem occurred even at a high speed rotation of 4,000 rpm. In the future, it is considered that there will be a demand for an ultrasonic processing head applicable to high-speed rotation of 10,000 rpm or more in small-diameter drilling of ceramics and the like, but the ultrasonic processing head of the present invention can sufficiently satisfy expectations. It is estimated to be.

The transmission horn 14 indicated by 37 in FIG.
The internal cavity of the transmission horn 1
4 to prevent direct transmission to the support shaft 23, and the diameter of the cavity indicated by D in FIG. 1 is desirably equal to or greater than the diameter of the support shaft 23. This minimizes the transmission of ultrasonic vibrations to the outside,
An efficient and stable transmission horn support structure can be formed.

FIG. 2 shows an ultrasonic machining head according to a second embodiment of the present invention. Note that members having the same functions as those in the above-described embodiment are denoted by the same reference numerals, and redundant description will be omitted. In the ultrasonic processing head of this embodiment, the transmission horn and the support shaft are separate.

As shown in FIG. 2, a transmission horn 41 and a shaft 42 supporting the central portion of the transmission horn 41 at a node (node position) of the vibration in the axial direction indicated by a line XX form a contact portion 43 of the transmission horn 41. , And a seal 44 such as a grinding fluid with an O-ring is inserted. A through hole 45 serving as a passage for a grinding fluid or the like is provided at the center of the support shaft 42, and a first tapered portion 47 is formed at the tip. The ultrasonic oscillator 11 is fastened to the transmission horn 41 by holding bolts 47 with the holding plate 12 interposed therebetween. The holding bolt 47 has a large hole in the center of the shaft, into which the support shaft 42 is mounted.

The transmission horn 41 has a first tapered portion 4
8 is formed, and the through hole 4 is formed.
5, through holes 50, 51, and 52 are formed.

Thus, according to the ultrasonic processing head of the present embodiment, the processing of the transmission horn 41 becomes easy. However, since the rigidity is lower than that of the above-described embodiment with respect to the radial force, it is desirable to apply the present invention to an ultrasonic machining head mainly composed of a thrust force such as drilling of ceramics.

FIG. 3 shows an ultrasonic machining head according to a third embodiment of the present invention. The ultrasonic processing head of the present embodiment is applied to a compression processing head utilizing ultrasonic vibration such as ultrasonic compression processing of powders and particles, ultrasonic bonding of a film, and the like.

As shown in FIG. 3, the transmission horn 61 is integrally formed with a support shaft 62 and a flange 63, and has a cavity 64 and a through hole 65 formed therein. This transmission horn 6
1 is fixed to the outer cylinder 66 by the fastening flange 24, and the outer cylinder 66 is bolted to the non-rotating housing 67.
It is attached by. A compression tool 69 is mounted on the lower end of the transmission horn 61.

In this embodiment, a supply passage for the grinding fluid or the like is not provided. However, if necessary, the supply passage may be attached to the rotating spindle, or a continuous hole may be formed in the center of the shaft.
It may be a passage for processing fluid, cooling water, or the like.

As described above, in this embodiment, the present invention can be applied to a wide range of applications such as an ultrasonic vibrating system which can be used as an ultrasonic vibration source of an ultrasonic rolling roll for various uses as a highly rigid supporting device for an ultrasonic vibration system. You can do it.

[0037]

As has been described in detail with reference to the embodiments, according to the ultrasonic machining head of the present invention, the rigidity can be further improved without inhibiting the axial vibration and the machining range. The support of the ultrasonic vibration system can be obtained,
Accurate incorporation into the outer cylinder became possible.

By supplying a cooling medium or the like from a supply passage formed at the center of the shaft, heavy grinding and high-speed rotation are possible.
Moreover, it can be made compact and automatic replacement is also possible. As a result, the grinding ability can be improved.

[Brief description of the drawings]

FIG. 1 is a sectional view of an ultrasonic machining head according to a first embodiment of the present invention.

FIG. 2 is a sectional view of a main part of an ultrasonic machining head according to a second embodiment of the present invention.

FIG. 3 is a sectional view of an essential part of an ultrasonic machining head according to a third embodiment of the present invention.

FIG. 4 is a sectional view of a conventional ultrasonic processing head.

[Explanation of symbols]

11 Ultrasonic vibrator 14, 41, 61 Transmission horn 16, 66 Outer cylinder 17 Taper shank 18, 19 Socket terminal 22, 49, 63 Flange 23, 42, 62 Support shaft 24 Tightening flange 26-29, 46, 48 Tapered portion 30, 32, 35 to 38, 45, 50 to 52, 64, 6
5 Through holes (supply passages) 34, 69 Tools

Continuing from the front page (72) Katsumi Nakamura, Inventor Katsumi Nakamura 1 Tatsumimachi, Uzumasa-machi, Ukyo-ku, Kyoto-shi, Japan Mitsui Heavy Industries, Ltd. Kyoto Seiki Seisakusho Co., Ltd. (58) Field surveyed (Int. Cl. ⁶ , DB name) B24B 1/04

Claims (5)

(57) [Claims] An ultrasonic processing head for performing processing by applying ultrasonic vibration to a tool, comprising: an ultrasonic vibrator; a transmission horn for transmitting ultrasonic vibration generated by supporting the ultrasonic vibrator; The transmission horn includes a tool detachably attached to a tip end thereof, and an outer cylinder that supports the transmission horn, and has a flange that protrudes outward on an outer diameter side of a portion of the transmission horn at a node of an axial vibration. An ultrasonic machining head, wherein a support shaft is provided at an axial center of a portion of the transmission horn at a node of axial vibration, and the transmission horn is pressed and supported by the outer cylinder by the flange and the support shaft. 2. The ultrasonic machining head according to claim 1, wherein a first tapered portion is formed on a flange of the transmission horn toward a distal end of the transmission horn, and a second tapered portion is formed on a distal end of the support shaft. On the other hand, a fastening ring having a third tapered portion facing the first tapered portion is mounted on the outer cylinder, and a fourth tapered portion facing the second tapered portion is formed at the center of the axis of the outer cylinder. An ultrasonic machining head characterized in that: 3. The ultrasonic machining head according to claim 1, wherein each of the outer cylinder, the support shaft, the transmission horn, and the tool is formed with a through hole penetrating in the axial direction, and the cooling medium is communicated with each of the through holes. An ultrasonic machining head, wherein a supply passage is formed. 4. The ultrasonic machining head according to claim 1, wherein a cavity having a diameter equal to or larger than the outer diameter of the support shaft is provided inside the transmission horn in one axial direction of the support shaft. Ultrasonic processing head. 5. An ultrasonic machining head according to claim 1, wherein a tapered shank is provided at one end of the outer cylinder in the axial direction so as to be detachable from a rotating spindle of the machine tool, and power is supplied to the tapered shank from a feeder of the rotating spindle. And a socket terminal for supplying power to the ultrasonic vibrator.