JP2878899B2 - Method and apparatus for transporting and positioning a thin plate frame - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is used for transferring a lead frame having a resin-sealed semiconductor device from one process to another process, for example, in a semiconductor device manufacturing process. The present invention relates to a technique for transporting and positioning a thin plate frame.

[0002]

2. Description of the Related Art <Structure of Conventional Device> In a semiconductor device manufacturing process, there are a process of sealing a semiconductor chip mounted on a lead frame with a resin and a process of molding a subsequent lead frame. Between these two steps, it is necessary to transport the lead frame from the former step to the latter step, and at the same time, to position the lead frame at a predetermined position. FIG. 13 and FIG. 14 are a plan view and a front view, respectively, of a conventional thin plate transporting and positioning device used for this purpose.

[0003] In the figure, a lead frame 1 having a predetermined width and length is loaded on a lower rail 21 provided in a transport and positioning device 2 for a thin plate frame. The lead frame 1 incorporates a semiconductor device 1a that has been completed with resin sealing. A guide rod 21a is fixedly attached to the lower rail 21. A pair of upper rails 22a, 22b
Are slidably supported by the guide rod 21a and are movable in the lateral direction X of the lead frame 1, which is one horizontal direction.
On the lower rail 21, a pair of fixed upper rails 23a, 23
b is provided adjacent to the upper rails 22a and 22b. A guide space 24, which is a gap for guiding the lead frame 1, is formed between the pair of upper rails 22a, 22b and the lower rail 21 in a state of being closest to each other (closed state). A similar guide space 24 includes a pair of fixed upper rails 2.
It is also formed between 3a, 23b and the lower rail 21.

The apparatus 2 is provided with a pair of driving devices 25, each of which drives a pair of upper rails 22a, 22b in the lateral direction X and separates them from each other as necessary (see FIG. 1). (Open state) or closed state. The apparatus 2 further moves the lead frame 1 whose end is housed in the guide space 24 into the transport direction Y (the other one in the horizontal direction and the longitudinal direction of the lead frame 1) (see FIG. (A one-way arrow), a transport device 26 for transporting the transport device 26 at a predetermined distance, a driving device 27 for driving the transport device 26, a stopper 28 for locking the transported lead frame 1 at a predetermined position, and moving the stopper 28 upward and downward. Drive device 29 that drives in the direction
It has.

<Operation of Conventional Apparatus> The conventional apparatus 2 operates as follows. First, the drive device 25 is operated, and the pair of upper rails 22a and 22b are guided by the guide rods 21a and slide along the short direction X in a direction away from each other (opening direction) to open. Becomes Next, the lead frame 1 is loaded on the lower rail 21 from the air above the lower rail 21 by the operation of a supply device (not shown). Thereafter, the upper rails 22a and 22b slide in the direction (close direction) approaching each other along the short direction X, and are brought into the closed state.
At this time, the upper rails 22a and 22b together with the lower rail 21 form a guide space 24 in which the lead frame 1 is inserted.
Are held at both ends in the width direction.

Subsequently, the lead frame 1 is transported at a predetermined distance in the transport direction Y by the transport tool 26 driven by the driving device 27. The lead frame 1 is locked at a predetermined position by the stopper 28 positioned upward. At this time, the lead frame 1 is held in the guide space 24 which is also formed between the fixed upper rails 23a and 23b and the lower rail 21 so that both ends in the width direction thereof are held, so that the position in the short direction X is maintained. Is determined, and at the same time, the position in the longitudinal direction is determined by being locked by the stopper 28. After the lead frame 1 is positioned at a predetermined position in this way, the lead frame 1 is held by a transfer device (not shown), the stopper 28 is lowered by the operation of the driving device 29, and the locked state of the lead frame 1 Is canceled. After the lead frame 1 is transferred to the next manufacturing process by the transfer device, the stopper 28 rises and returns to the original upper position, and the transporter 26 also returns to the original position. By repeating the above steps, the transport and positioning of the plurality of lead frames 1 are executed.

[0007]

<Problems of the Conventional Apparatus> In the conventional apparatus 2, the lower rail 21 is fixed at a fixed position.
The moving distance in the direction is also constant. Therefore, when the lead frame 1 having various dimensions is transported and positioned, only one device 2 cannot cope with it, and it is necessary to prepare individual devices corresponding to the dimensions. That is, in the conventional apparatus 2, when a plurality of types of lead frames 1 are transported and positioned, there is a problem that workability and economic efficiency are impaired. This problem is particularly remarkable in a so-called multi-product small-lot production site where there are many types of lead frames 1 and a small number of lead frames 1 belonging to each type.

In the apparatus 2, the upper rails 22a, 22b
Slides in the transverse direction X, so that if the end of the lead frame 1 in the transverse direction X is so deformed that it cannot be accommodated in the guide space 24, the upper rail 22a,
When the sliding member 22b slides in the closing direction, the deformed portion interferes with the upper rails 22a and 22b, and the lead frame 1 is damaged.

<Object of the Invention> The present invention has been made to solve the above-mentioned problems, and firstly, a thin plate capable of transporting and positioning a thin plate frame such as a lead frame having a plurality of types of dimensions. An object of the present invention is to provide a technique for transporting and positioning a frame.

A second object of the present invention is to provide a transfer and positioning technique for a thin frame that can be transferred and positioned without damaging the thin frame even if the thin frame is deformed beyond the guide space. With the goal.

[0011]

According to a first aspect of the present invention, there is provided a method of transporting and positioning a thin plate frame, comprising: moving a substantially flat thin plate frame in a direction of a first axis in a main surface of the thin plate frame. A method for transporting and positioning a thin plate frame that is transported a predetermined distance and held at a predetermined position, wherein: (a) a guiding step of supporting the thin plate frame slidably in the direction of the first axis. And (b) supporting the thin frame in step (a) corresponding to a first width of the thin frame in a direction of a second axis perpendicular to the first axis and in a direction of the second axis in the main surface. A width determining step of adjusting a position in the direction of the second axis; and (c) displacing the sheet frame by a predetermined distance corresponding to a second width of the sheet frame in the direction of the first axis. A conveying step of conveying in the direction of the first axis ;
(D) a locking step of locking the thin plate frame at a predetermined position corresponding to the second width; and (e) a control step.
The control step (e) includes (e-1) the thin plate flexure.
In the step (a), based on the first width of the
Calculates the position to support the thin frame and responds to the result
(E-2) sending the first signal
The thin frame, based on the second width of the frame,
Is calculated in the direction of the first axis.
Sending a second signal corresponding to the result; (e-3)
Based on the second width of the sheet frame,
Calculate the position to lock the frame, and correspond to the result
Sending a third signal;
(B-1) responding to the first signal,
The position for supporting the thin plate frame in (a) is the second position.
Adjusting in the direction of the axis of step (c).
(C-1) a predetermined distance in response to the second signal
Transports the thin plate frame only in the direction of the first axis.
Wherein the step (d) comprises: (d-1) the third step.
The thin plate frame is engaged at a predetermined position in response to the
Stopping step .

According to a second aspect of the present invention, there is provided a method of transporting and positioning a thin plate frame according to the first aspect, wherein the guiding step (a) comprises:
(A-1) guiding a first main surface of the thin plate frame at or near an end of the thin plate frame existing in the direction of the second axis in the direction of the first axis ; (A-2) guiding the second main surface of the thin plate frame at or near the end in the direction of the first axis; and (a-3) guiding the thin plate frame at the end. Guiding an edge surface in the direction of the first axis ;
It is provided with.

According to a third aspect of the present invention, there is provided a method of transporting and positioning a thin plate frame, wherein the step (a-1) comprises:
(A-1-1) The following means (a-1-1-1) and (a-1-1)
(A-1-2) a step of preparing (a-1-2) the means (a-1-1-1) from a direction substantially opposed to the first main surface; a-1-3) a step of using the means (a-1-1-1) to guide the first main surface of the thin plate frame in the direction of the first axis ;
(A-1-4) Using the means (a-1-1-2),
Guiding the first main surface of the thin plate frame in the direction of the first axis . Here, the means (a-1-1-1) and (a-1-1-2) correspond to (a
-1-1-1) first means for guiding the first main surface of the thin plate frame at or near the end in the direction of the first axis , and (a-1-1-) 2) The first main surface of the thin plate frame is provided adjacent to the means (a-1-1-1) in the direction of the first axis and at the end or near the end. second means for guiding towards <br/> direction of said first axis, a.

According to a fourth aspect of the present invention, there is provided a method for transporting and positioning a thin plate frame according to the third aspect, wherein the step (a) is performed prior to the step (a-1). (A-5) The step (a-
Guiding the thin plate frame to a position for performing 2).

According to a fifth aspect of the present invention, there is provided a thin plate transport and positioning device , comprising:
In a direction of a first axis in a main surface of the thin plate frame, a predetermined
Transports a distance and holds it in place.
A transport and positioning device for the arm, wherein (a) the first
The thin plate frame is slidably supported in the axis direction of
Guiding means; (b) perpendicular to said first axis and within said main surface;
Corresponds to the first width of the sheet frame in the direction of the second axis
A position where the means (a) supports the thin plate frame.
A width determining means for adjusting the width in the direction of the second axis;
(C) a second of said thin plate frames in the direction of said first axis;
According to the width, the thin plate frame is
Conveying means for conveying in the direction of the first axis;
Locks the thin plate frame at a predetermined position corresponding to the width of
(E) control means, wherein the control means
The means (e) includes (e-1) the first frame of the thin plate frame.
The means (a) move the thin plate frame based on the width of
Calculate the position to be supported, and a first signal corresponding to the result
(E-2) the thin plate frame
The thin plate frame is connected to the first shaft based on a second width.
Calculate the transport distance in the direction of
(E-3) the thin plate frame.
Locking the thin plate frame based on the second width of the
And a third signal corresponding to the result is transmitted.
Means (b), wherein the means (b) comprises:
In response to the first signal, the means (a)
Adjust the position to support the frame in the direction of the second axis
Means (c) wherein (c-1)
In response to the second signal, the sheet frame is moved a predetermined distance.
Means for transporting the camera in the direction of the first axis,
Means (d), (d-1) responsive to said third signal,
Means for locking the thin plate frame at a predetermined position .

According to the sixth and eighth aspects of the present invention, there is provided a thin frame transporting and positioning apparatus having a structure suitable for performing the thin frame transporting and positioning method according to the second to fourth aspects, respectively. It is a thing.

According to a ninth aspect of the present invention, there is provided the thin-frame transporting and positioning apparatus according to the seventh aspect , wherein the means (a-1-2) is provided.
However, (a-1-2-1) means for holding the thin plate frame in a stationary state by applying a frictional force to the thin frame.

[0018] The transport of the thin plate frame according to claim 10
The positioning device uses a substantially flat thin-plate frame.
Transport and positioning of thin frame for transport and positioning
A positioning device for supporting said thin plate frame
Guide means, which are opposed to each other.
And a pair of lower guide rails for supporting the thin plate frame
And mounted on the pair of lower guide rails,
Between a pair of lower guide rails, between a pair of opposing
A pair of upper guide rails facing each other to define a gap
And the thin plate frame comprises a pair of lower guide rails.
When supported on the rails,
A pair of ends facing each other are accommodated in the pair of gaps.
In the device, the pair of ends may be accommodated in the pair of gaps.
The thin film sandwiched between the pair of gaps
Conveying means for conveying the plate frame in the direction of the first axis;
Transported in the direction of the first axis by the transport means
Locking means for locking the thin plate frame.
The pair of upper guide rails face each other and
Rotatably on the lower guide rail so that it can be opened and closed
With a movable upper guide rail attached
The moving guide rail is located above the pair of lower guide rails.
Provide the thin plate frame on the pair of lower guide rails.
So that it can be opened,
Together with a pair of lower guide rails, the pair of gaps are defined.
Can be occluded, even when heading for occlusion
The thin plate placed on the pair of lower guide rails
Approach the main surface of the frame from almost above the main surface
It turns. The apparatus for conveying and positioning a thin plate frame according to claim 11, wherein the thin plate has a substantially flat plate shape.
Of thin frame for transporting and positioning the frame
A transport and positioning device for supporting said thin plate frame.
Guide means for carrying the guide means,
A pair of drafts supporting the thin plate frame facing each other
Mounted on the inner rail and the pair of lower guide rails.
And opposed to each other between the pair of lower guide rails.
On a pair of opposing sides to define a pair of gaps
A guide rail; and
When supported on the lower guide rail,
The pair of opposing ends of the system are inside the pair of gaps.
The device is housed in the pair of gaps.
Sandwiched between the pair of gaps by Rukoto end is accommodated
Transporting the thin plate frame in the direction of the first axis.
Means and transport means in the direction of said first axis by said transport means.
Locking means for locking the fed thin plate frame.
The pair of upper guide rails face each other,
Openably and closably mounted on the pair of lower guide rails
With a movable upper guide rail.
From above the pair of lower guide rails.
The thin plate frame can be supplied on the lower guide rail.
As described above, it can be opened and
Closed together with inner rail to define the pair of gaps
And when heading for occlusion,
Of the thin plate frame placed on a pair of lower guide rails
Approaching the main surface from substantially above the main surface;
By moving the pair of lower guide rails,
Width determining means to adjust the interval between the pair of lower guide rails,
The width determining means further comprises a pair of lower guide rails.
The distance is adjusted by being sandwiched between
It is provided with a rotatable cam for adjusting .

[0019]

According to the transfer and positioning technique of the thin frame of the present invention, the position at which the thin frame is slidably supported can be adjusted, and furthermore, the distance at which the thin frame is transported and the position at which the thin frame is locked are adjusted. Therefore, the thin plate frames having various widths can be arbitrarily conveyed and positioned (claims 1 to 9 and 1).
1).

In the transport and positioning technique of the thin plate frame according to the present invention, the end of the thin plate frame or the vicinity thereof is supported and guided during transport. Therefore, even if the thin plate frame is, for example, a lead frame and has a semiconductor device or the like which is resin-sealed near the center thereof, the thin plate frame can be guided.
6, 10, 11 ).

In the transport and positioning technique of the thin plate frame according to the present invention, the means for guiding the first main surface of the thin plate frame first approaches the first main surface after approaching from the direction opposing the first main surface. I will guide you. Therefore, even if the thin plate frame is deformed so as not to fit in the guide space, the thin plate frame can be transported and positioned without being damaged (claims 3, 7, 10 , and 1) .
1 ).

In the thin frame transport and positioning technique according to the present invention, the thin frame is guided to a predetermined position of the guide means when the thin frame is set at a predetermined position for guiding the second main surface. For this reason, the thin plate frame is correctly installed at a predetermined position (claim 3 , claim 8 ).

In the transport and positioning technique of the thin frame according to the present invention, a position for supporting the thin frame, a transport distance, and a locking position are calculated according to the width of the thin frame, and the thin frame is supported based on the calculated positions. Then transport and lock. For this reason, the thin plate frames having various widths and lengths can be transported and positioned more appropriately (claims 1 and 5 ).

In the technique for transporting and positioning a thin plate frame according to the present invention, since the thin plate frame is transported, the stationary state is maintained by the frictional force, so that the transport means can be returned to the original state immediately after the transport. Therefore, it is possible to carry out the conveyance of the next new thin plate frame while leaving the thin frame after the conveyance in the guide means.
9 ).

[0025]

【Example】

Example 1 <Overall Configuration of Apparatus 100 and System 800> FIG. 1 is an overall perspective view of an apparatus 100 for transporting and positioning a thin plate frame according to an embodiment of the present invention. Apparatus 10
0 is base 200, guide rail 300, guide rail 30
0 (guide means), a width determining device 400 (width determining means) for locking the lead frame 1 at an arbitrary position, and a locking device 500 (locking means) for locking the lead frame 1 at an arbitrary position; And a transport device 600 ( transporting means ) for transporting by means of . Control device 700 with device 100 as the main part
Is provided, the thin-plate frame transport and positioning system 800 is configured.

<Structure of Guide Rail 300> FIG. 2 is a partial front view of the apparatus 100, and particularly illustrates the structures of the guide rail 300 and the width determining apparatus 400. FIG. 3 is an exploded perspective view of a main part of the guide rail 300. Hereinafter, the configuration of the guide rail 300 will be described with reference to FIGS. 1 to 3.

The guide rail 300 includes a pair of lower guide rails 301a and 301b for loading and guiding the lead frame 1 incorporating the semiconductor device 1a on its upper surface. The lead frame 1 is substantially rectangular and has a main surface 1b.
It has a flat plate shape having a (first main surface) and a main surface 1c (second main surface). The lower guide rails 301a and 301b are arranged such that, on the upper surface thereof, the short direction X (second
The main surface 1c near the end 1d (in the direction of the axis) is slidably guided. These lower guide rails 301a, 301b
, Two pairs of holders 302a and 302b are fixedly connected to each other. The holders 302a and 302b are mounted on the base 20.
The guide rail 303 is slidably supported in one horizontal direction X by a guide rail 303 fixed to the upper surface of the reference numeral 0. Lower guide rail 30
On the upper surface of 1a, 301b, there are two pairs of inclined projections 304 in which the distance between each pair 1 is larger at the upper part.
a and 304b are provided. Inclined projection 304a,
304b moves the lead frame 1 to the lower guide rails 301a, 301 in the process of supplying the lead frame 1.
Guide to the predetermined position of b.

The guide rail 300 further includes a pair of upper guide rails 310a and 310b. Upper guide rail 3
10a and 310b are rotatably supported by lower guide rails 301a and 301b via rotation fulcrums 311a and 311b. 1 is provided on the upper surfaces of the holders 302a and 302b.
A pair of driving devices 312a and 312b are fixedly attached. The driving devices 312a and 312b drive the transmission tools 313a and 313b having grooves in the short direction X. The upper guide rail 310 is provided in the groove of the transmission tools 313a and 313b.
Rollers 314a and 314b rotatably mounted near the lower ends of the a and 310b are inserted with a slight gap therebetween. When the transmission devices 313a and 313b are driven in the short direction X by the driving devices 312a and 312b, the upper guide rails 310a and 310b are rotated about the rotation fulcrum 311.
a and 311b as a fulcrum.

The upper guide rails 310a, 310b are closed (closed state), that is, the upper guide rails 310a, 310 are closed.
0b are attached to the lower guide rail 30.
1a, 301b, the leading end portions 310c, 310d and the lower guide rails 301a, 301
A guide space 30 is formed between the guide space 30 and the upper end of 1b. At this time, the upper guide rails 310a and 310b slidably guide the edge surface 1e at the end 1d of the lead frame 1 and the main surface 1b near the end 1d. The guide space 30 stores the end 1d of the lead frame 1 with a certain gap left. Therefore, the lead frame 1 is supported at a predetermined position in the short direction X, and the lower guide rail 301
a, 301b and the upper guide rails 310a, 310b can slide in the transport direction Y, which is the longitudinal direction of the lead frame 1 (the direction of the first axis).

The upper guide rails 310a and 310b have distal ends 310c and 310d having lower guide rails 301a and 301d, respectively.
b between the open state at the position farthest from b and the closed state.

On the upper surfaces of the lower guide rails 301a and 301b, upper fixed guide rails 315a and 315b are provided adjacent to the upper guide rails 310a and 310b. FIG.
FIG. 4 is a front sectional view of a lower guide rail 301a and an upper fixed guide rail 315a installed on the upper surface thereof. Between the upper fixed guide rail 315a and the lower guide rail 301a, the upper guide rails 310a, 310b and the lower guide rail 301a,
A guide space 30a having the same shape as the guide space 30 formed between the spaces 301b is formed. Upper fixed guide rail 315b
The same is true between the lower guide rail 301b and the lower guide rail 301b. For this reason, the lead frame 1 in which the end 1d is housed in the guide space 30 has the same shape as the guide space 30 during the transportation process.
Move smoothly into a. Due to the guide space 30a, the lead frame 1 can slide in the transport direction Y along the lower guide rails 301a, 301b and the upper fixed guide rails 315a, 315b while maintaining a predetermined position in the short direction X direction. It is.

The lower guide rails 301a and 301b, the upper guide rails 310a and 310b, and the upper fixed guide rail 31
5a and 315b support the end 1d of the lead frame 1 as described above. Therefore, the guide rail 300 can support the lead frame 1 even when the semiconductor device 1a is incorporated near the center of the lead frame 1.

On the upper surface of the base 200, a pair of rail driving devices is provided.
Units 316a and 316b are provided. These rail driving devices 316a, 316b are connected to the lower guide rail 301.
a and 301b are moved in the short direction X.

<Structure of Width Determination Device 400> FIG. 5 is a perspective view of the width determination device 400. Hereinafter, the configuration of the width determining device 400 will be described with reference to FIGS. 1, 2, and 5. The width determining device 400 adjusts the width of the guide rail 300, that is, the space between the pair of opposed lower guide rails 301a and 301b, according to the width (first width) of the lead frame 1 in the short direction X. Device. The width of the guide rail 300 is
The guide rail 300 corresponds to a position where the lead frame 1 is supported.

The width determining device 400 includes cams (polyhedral blocks) 401a and 401b. Cam 401a,
Reference numeral 401b denotes two types of pillars having a two-dimensional figure having a point symmetry around the symmetry axis as a bottom surface and fixedly superimposed in two stages so that the symmetry axes coincide with each other. Each pillar has a plurality of diameters that differ depending on the direction.

The width determining device 400 further includes a motor 402. The rotation of the motor 402 is controlled by the coupling 40.
3 and to the cam 401a via the drive shaft 404. The drive shaft 404 is attached and fixed to the cam 401a along the axis of symmetry of the cam 401a. On the other hand, cam 401b
, A driven shaft 405 is fixedly mounted along the axis of symmetry. The drive shaft 404 is rotatably and vertically fixedly supported by the holder 406, whereby the vertical position of the cam 401a is kept constant. Similarly, the driven shaft 405 is rotatably and vertically fixedly supported by the holder 407, so that the vertical position of the cam 401b is kept constant. Pulleys 408a and 408b are fixedly attached to the drive shaft 404 and the driven shaft 405, respectively. Pulleys 408a, 408b
A transmission belt 409 is stretched over the. Motor 40
2 is also transmitted to the cam 401b via the drive shaft 404, the pulley 408a, the transmission belt 409, the pulley 408b, and the driven shaft 405 in this order, so that the two cams 401a and 401b maintain the same posture. It rotates while synchronizing.

By changing the rotation position and the vertical position of the cams 401a and 401b,
A pair of lower guide rails 301 sandwiching 1a and 401b therebetween
The distance between a and 301b can be variously set.

On the drive shaft 404, a detection body 410 having a disk shape and marked near its outer edge is fixedly mounted, while a rotation detector 411 such as a rotary encoder is mounted on the holder 406. Have been.
The rotation detector 411 detects the position of the cam 401a, 401b in the rotation direction by reading the marking on the detection body 410.

The block 412 attached to the bottom surface of the base 200 is provided with a driving device 413 for driving the holder 406 in the vertical direction and a position detector 413a for detecting the position of the holder 406 in the vertical direction. I have. As the position detector 413a, for example, a reed switch is used. The vertical movement of the holder 406 is fixedly attached to the bottom surface of the base 200, and slidably supports the holder 406.
Guided by individual guides 414.

<Structure of Locking Device 500> FIG. 6 is a perspective view of the locking device 500. Hereinafter, the configuration of the locking device 500 will be described with reference to FIGS. 1 and 6. The locking device 500 is a device that locks the lead frame 1 at a predetermined position in the transport direction Y according to the width (second width) of the lead frame 1 in the longitudinal direction.

The locking device 500 includes a stopper 501 for locking the lead frame 1 by touching the edge surface of the lead frame 1 in the transport direction Y. Stopper 5
01 is fixedly attached to one end of the mounting arm 502, and a roller 5 is attached to the other end of the mounting arm 502.
02a is rotatably mounted. Guide rod 5
Numeral 03 supports the mounting arm 502 slidably in the transport direction Y and the reverse direction Ya, and at the same time, fixedly supports the mounting arm 502 in the rotation direction around the axis of the shaft 503. That is, the mounting arm 502 rotates integrally with the shaft 503 as the shaft 503 rotates, and slides freely in the axial direction of the shaft 503. With the rotation of the mounting arm 502, the stopper 501 moves up or down.

A moving block 504 having a groove into which the roller 502a is inserted with a small gap is screwed and supported on a screw shaft 505 having a male screw. Move in the reverse direction Ya. With the movement of the moving block 504, the mounting arm 502 similarly moves while being guided by the shaft 503. Due to the slight gap existing between the roller 502 a and the moving block 504, the roller 502 a rolls on the surface of the groove of the moving block 504 when the mounting arm 502 rotates. Does not hinder rotation. The rotation of the motor 508 is transmitted to the screw shaft 505 via the pulleys 506a and 506b and the transmission belt 507.

An arm 509 is fixedly provided at one end of the shaft 503, and a roller 509a is rotatably attached to a tip of the arm 509. A transmission block 510 having a groove for inserting the roller 509a with a small gap is provided by a driving device 511 via a rod 510a.
, And moves in the lateral direction X by the operation of the driving device 511. The rod 510a is a guide block 510b
, And the movement of the transmission block 510 in the lateral direction X is guided.

The substrate 512 is a support for the entire locking device 500 and is fixedly installed on the upper surface of the base 200. On the substrate 512, plate-like support plates 512a and 512b are provided vertically and fixedly, and the shaft 503 and the screw shaft 5 are provided.
05 is rotatably supported by these support plates 512a and 512b. The motor 508 is fixedly installed on the support plate 512a. The driving device 511 and the guide block 510b are fixedly supported on the upper surface of the substrate 512.

<Structure of Transfer Apparatus 600> FIG.
0 is a partial front view. Hereinafter, the configuration of the transport device 600 will be described with reference to FIGS. 1 and 7. Transfer device 600
Is a device for transporting the lead frame 1 held in the guide spaces 30 and 30a of the guide rail 300 in the transport direction Y at a predetermined distance corresponding to the second width.

The transfer device 600 includes a transfer tool 601 for pushing the lead frame 1 in the transfer direction Y. The transfer tool 601 has a moving block 601a screwed to a screw shaft 602 having a male screw, and an arm 601b fixedly connected to the moving block 601a, and a leading end of which contacts the lead frame 1 and pushes the lead frame 1. ing. Screw shaft 60
2 is rotatably supported by a support plate 602a and a support plate 602b that are erected on the base 200. Support plate 602a
And 602b, a guide shaft 603 parallel to the screw shaft 602.
The moving block 601a is slidably supported by the guide shaft 603. Therefore, when the screw shaft 602 rotates, the transport tool 601 moves in the transport direction Y or the reverse direction Ya while maintaining a constant posture without rotating. A driven pulley 604a is attached to one end of the screw shaft 602, and the rotation of the transport drive motor 605 installed on the base 200 is controlled by the drive pulley 604a.
b, the belt 606, and the driven pulley 604a, and transmitted to the screw shaft 602.

FIG. 1 shows a screw shaft 602 and a guide shaft 603.
Is cut away for the sake of convenience.

<Operation of Apparatus 100 and System 800> The apparatus 100 and the system 800 operate according to the following steps. The control device 700 is configured by a circuit including a microcomputer and a storage circuit, and stores information (production information) on a predecessor object.
Information about the width of the lead frame 1 in the longitudinal direction and the lateral direction is included.

<< First Step >> First, the control device 700 first controls the rail driving devices 316 a and 316.
A predetermined control signal is sent to 6b. Rail drive 31
6a and 316b operate based on this signal to move the pair of lower guide rails 301a and 301b in a direction of retreating from each other, and sufficiently widen the distance between them.

{Second Step} Next, the controller 700 calculates the distance between the pair of upper guide rails 310a and 310b corresponding to the width of the lead frame 1 in the short direction X, and corresponds to the calculated value. A control signal is sent to the motor 402 and the driving device 413. The motor 402 and the driving device 413 operate in response to this signal, and the cams 401a,
A vertical position and a rotational direction position of 401b are set. Whether it is set to the predetermined position is detected by the rotation detector 411 and the position detector 413a,
The detection signal is fed back to the control device 700. The control device 700 controls the motor 402 and the driving device 413 so that the detection signal matches the signal corresponding to the predetermined position.
To send a control signal.

<Third Step> Next, the control device 700 controls the rail driving devices 316a,
A predetermined control signal is sent to 16b. Rail drive device 3
16a and 316b operate in response to move the pair of lower guide rails 301a and 301b in a direction approaching each other, and move these mutually opposing vertical surfaces to the cam 401.
a, 401b. This allows
The distance between the pair of lower guide rails 301a and 301b is set to a size corresponding to the width of the lead frame 1 in the lateral direction. FIG. 8 is a partial front view of the guide rail 300, and schematically illustrates, as an example, a state in which the vertical surface of the lower guide rail 301b is pressed against the outer peripheral surface of the upper stage of the cams 401a and 401b.

{Fourth Step} Next, the control device 700 uses the information on the longitudinal width of the lead frame 1 based on the information.
The transport distance is calculated, and the corresponding locking position of the lead frame 1 is calculated. A control signal corresponding to the calculated locking position is sent to the motor 508. The motor 508 rotates in a predetermined rotation direction and a predetermined rotation amount in response to the control signal. With this rotation, the moving block 504
Is moved by a predetermined distance, the stopper 501 is set to the locking position. The vertical position of the stopper 501 is held at the raised position.

{Fifth Step} Next, the control device 700 sends a predetermined signal to the driving devices 312a and 312b. The driving devices 312a and 312b push the transmission tools 313a and 313b based on the control signal. As a result, the upper guide rails 310a, 310b move to the rotation fulcrums 311a, 31
It turns around 1b as a fulcrum and becomes an open state.

{Sixth Step} When the apparatus 100 is in this state, the lead frame 1 can be connected to the lower guide rails 301a, 301a by using a supply apparatus SP such as a robot prepared outside the apparatus 100.
01b and fall from the space above while maintaining a substantially horizontal posture,
It is mounted on the upper surface of the lower guide rails 301a, 301b.
The lead frame 1 holds the inclined projections 304 during the process of dropping.
a, 304b , the lower guide rail 3
01a, 301b fits in a predetermined position on the upper surface.

{Seventh Step} Next, the control device 700 sends a predetermined signal to the driving devices 312a and 312b. The driving devices 312a and 312b retract the transmission tools 313a and 313b based on the control signal. As a result, the upper guide rails 310a, 310b move to the rotation fulcrums 311a, 31
It turns around 1b and becomes a closed state. Therefore, the lead frame 1 is held at a predetermined position in the short direction X, and can slide along the lower guide rails 301a, 301b and the upper guide rails 310a, 310b.

{Eighth Step} Next, the control device 700 sends a control signal corresponding to the previously calculated transport distance to the transport drive motor 605. The transport drive motor 605 rotates in a predetermined rotation direction and a predetermined rotation amount in response to the control signal. With this rotation, the transport tool 601 moves by a predetermined distance in the transport direction Y. At this time, the guide space 30 and the adjacent guide space 30
a, while being pushed out by the tip of the arm 601b while being guided by the
At a predetermined distance. The conveyance ends at a position where the edge surface of the lead frame 1 in the conveyance direction Y substantially contacts the stopper 501. At this time, both ends 1d of the lead frame 1 in the short direction X are housed in the adjacent guide space 30a apart from the guide space 30. In this state, the lead frame 1 is restrained with a predetermined gap in the short direction by the upper fixed guide rails 315a and 315b, and is vertically fixed by the lower guide rails 301a and 301b and the upper fixed guide rails 315a and 315b. , And in the longitudinal direction, by a stopper 501 and a carrier 601. As a result, the lead frame 1 is held in a state where it is positioned at a predetermined position.

FIG. 9 shows the lead frame 1 in this state and the upper fixed guide rails 315a and 315 supporting the lead frame.
It is a partial top view of 5b. Upper fixed guide rail 315a,
315b is provided with slits 317a and 317b having a certain length from the end in the transport direction Y. Holes 1f are provided at predetermined intervals near both edges of the lead frame 1 in the short direction X direction. Near the end of the lead frame 1 in the transport direction Y, a part of the hole 1f is formed by the upper fixed guide rail 315 by slits 317a and 317b.
a, 315b.

{Ninth Step} Subsequently, lead frame 1
The transfer device (not shown) of the device for performing the molding step moves to a predetermined position, and the projection (not shown) provided on the transfer device engages with the exposed hole 1b.

{Tenth Step} After that, the control device 700 sends a predetermined control signal to the drive device 511. When the driving device 511 rotates in a predetermined direction in response to the control signal, the stopper 50
1 is lowered, and the lead frame 1 is released from the locked state by the stopper 501. Next, when the above-described transfer device moves in the transfer direction Y, the lead frame 1 leaves the guide rail 300 and is transferred to the subsequent molding step.

{Eleventh Step} When the lead frame 1 is carried out of the guide rail 300, the control device 700 sends a predetermined control signal to the drive device 511. Drive device 5
11 rotates in a predetermined direction in response to this control signal, so that the stopper 501 rises and returns to a position where a new lead frame 1 can be locked.

{Twelfth Step} Subsequently, the control device 700
Sends a predetermined control signal to the transport drive motor 605.
The transport drive motor 605 rotates in a predetermined direction by a predetermined amount in response to the control signal. Thereby, the carrier 60
1 returns to a predetermined position before carrying.

[Thirteenth Step] If the lead frame 1 supplied subsequently is of the same type as the lead frame 1 transported and positioned last time, the following steps from the above step 4 are repeated. Lead frame 1 supplied
However, if the lead frame 1 is of another type having a different size from the previously transported and positioned lead frame 1, the following steps from the above step 1 are repeated.

<Advantages of Apparatus 100 and System 800> In the apparatus 100 and system 800 of this embodiment, the distance between the pair of lower guide rails 301a and 301b is variable. For this reason, it is possible to handle various lead frames 1 having different widths in the short direction. Further, the position of the stopper 501 and the distance of the conveyance by the conveyance tool 601 are variable. For this reason, various lead frames 1 having different widths in the longitudinal direction.
Can be handled. That is, when the apparatus of this embodiment is used, processing can be performed corresponding to various lead frames 1 having generally different dimensions in both the short direction and the long direction.

The guide rail 300 is provided with a mechanism for opening and closing the upper guide rails 310a and 310b. The upper guide rails 310a and 310b are substantially attached to the surface of the lead frame 1 when holding the end 1d of the lead frame 1. Approach along a vertical direction. For this reason, even if the lead frame 1 is deformed so as not to fit in the guide space 30, the end 1d of the lead frame 1 can be stored in the guide space 30 without damaging the lead frame 1.

Embodiment 2 ] An upper fixing guide rail 315 is used to press the holding member for holding the lead frame 1 with an appropriate pressure.
a, 315b. FIG. 10 is a partial side sectional view of the device of the second embodiment, and FIG. 11 is a partial front sectional view. The holding member 90 is attached to the upper fixed guide rails 315a and 315b by screws 91.
The presser 90 is obtained by bending a plate of, for example, phosphor bronze having excellent elasticity. Upper fixed guide rail 315
a, 315b are provided with holes 92,
Penetrates the hole 92, and the upper guide rails 310a, 31
Ob is in contact with the upper surface of Ob while applying a moderately strong pressure. For this reason, when the lead frame 1 is conveyed below the upper fixed guide rails 315a, 315b, the lead frame 1 becomes under the presser 90 (FIG. 1).
0). As a result, the presser 90 applies an appropriate pressure to the lead frame 1 to generate an appropriate frictional force, so that the lead frame 1 stably holds its position even when the restraining means such as the carrier 601 is released.

Therefore, in the apparatus of the second embodiment, the twelfth step can be executed immediately after the end of the eighth step. Therefore, the twelfth step to the seventh step after the repetition can be executed simultaneously with the ninth step to the eleventh step. As a result, the apparatus according to this embodiment can execute processing with higher working efficiency than the conventional apparatus.

Embodiment 3 The cams 401a and 401b have a single-stage structure instead of the polyhedron stacked in two stages as shown in FIG. 5, or the guide rail 3 shown in FIG.
As shown in a partial front view of 00, a structure in which three or more layers are stacked may be used. One of these may be selected according to the needs in the manufacturing process.

Embodiment 4 In the apparatus of the above embodiment,
The upper guide rails 310a and 310b are pivoted 311a,
It was configured to rotate around 311b. The upper guide rails 310a and 310b may have other configurations as long as they are mechanisms that descend from substantially vertically above the lead frame 1 and hold the edges of the lead frame 1. For example, a mechanism that approaches the edge of the lead frame 1 from a vertical direction or an oblique direction close to the vertical direction may be used. Even in such a configuration, similarly to the first embodiment, even if the lead frame 1 has a deformation that cannot be accommodated in the guide space 30, the edge of the lead frame 1 can be moved without damaging the lead frame 1. 30.

[0069]

According to the technique for transporting and positioning a thin frame according to the present invention, the position at which the thin frame is slidably supported can be adjusted, and the distance at which the thin frame is transported and the position at which the thin frame is locked. Can be adjusted, so that the thin plate frames having various widths can be arbitrarily conveyed and positioned (claims 1 to 9, 10).

In the transport and positioning technique of the thin plate frame according to the present invention, the end of the thin plate frame or the vicinity thereof is supported to guide during transport. Therefore, even if the thin plate frame is, for example, a lead frame and has a semiconductor device or the like which is resin-sealed near the center thereof, the thin plate frame can be guided.
6, 10, 11 ).

In the transport and positioning technique of the thin plate frame according to the present invention, the means for guiding the first main surface of the thin plate frame first approaches the first main surface after approaching from the direction facing the first main surface. I will guide you. Therefore, even if the thin plate frame is deformed so as not to fit in the guide space, the thin plate frame can be transported and positioned without being damaged (claims 3, 7, 10 , and 1) .
1 ).

In the transport and positioning technique of the thin plate frame according to the present invention, the thin frame is guided to a predetermined position of the guiding means when the thin frame is set at a predetermined position for guiding the second main surface. For this reason, the thin plate frame is correctly installed at a predetermined position (claims 3 and 9).

In the transport and positioning technique of the thin plate frame according to the present invention, the position for supporting the thin frame, the distance to be transported, and the position to be locked are calculated according to the width of the thin frame, and based on this, the thin frame is supported. Then transport and lock. For this reason, the thin plate frames having various widths and lengths can be transported and positioned more appropriately (claims 1 and 5 ).

In the transport and positioning technique of the thin plate frame according to the present invention, after the thin plate frame is transported, the stationary state is maintained by the frictional force, so that the transport means can be returned to the original state immediately after the transport. For this reason, the next new thin plate frame can be transported while the transported thin frame remains in the guide means, so that efficient transport and positioning can be performed (claim 9 ).

[Brief description of the drawings]

FIG. 1 is an overall perspective view of an apparatus for transporting and positioning a thin plate frame according to an embodiment of the present invention.

FIG. 2 is a partial front view of a device for transporting and positioning a thin plate frame according to an embodiment of the present invention.

FIG. 3 is an exploded perspective view of a main part of a guide rail according to one embodiment of the present invention.

FIG. 4 shows an upper guide rail according to an embodiment of the present invention;
It is front sectional drawing of an upper fixed guide rail.

FIG. 5 is a perspective view of a width determining device according to an embodiment of the present invention.

FIG. 6 is a perspective view of a locking device according to an embodiment of the present invention.

FIG. 7 is a partial front view of an apparatus for transporting and positioning a thin plate frame according to an embodiment of the present invention.

FIG. 8 is a partial front view of a guide rail according to one embodiment of the present invention.

FIG. 9 is a partial plan view of the lead frame and the upper fixed guide rail in one embodiment of the present invention.

FIG. 10 is a partial side cross-sectional view of a transporting and positioning device for a thin plate frame according to a second embodiment of the present invention.

FIG. 11 is a partial front cross-sectional view of a sheet frame conveying and positioning device according to a second embodiment of the present invention.

FIG. 12 is a partial front view of a guide rail according to a third embodiment of the present invention.

FIG. 13 is a plan view of a conventional thin plate conveyance and positioning device.

FIG. 14 is a front view of a conventional thin plate frame transporting and positioning device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Thin-plate frame 1b Main surface (1st main surface) 1c Main surface (2nd main surface) 1d End 1e Edge surface X Short direction (direction of 2nd axis) Y Transport direction (1st axis) Direction) 100 Device (transfer and positioning device for thin plate frame) 300 Guide rail (guide device) 301a, 301b Lower guide rail 304a, 304b Inclined protrusion 310a, 310b Upper guide rail 400 Width determining device (width determining device) 401a, 401b Cam (polyhedral block) 500 Locking device (locking means) 501 Stopper 600 Transporting device (transporting device) 601 Transporting tool

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-59-98529 (JP, A) (58) Fields investigated (Int. Cl. ⁶ , DB name) H01L 21/50

Claims (11)

(57) [Claims] 1. A transport of a thin-plate frame which transports a substantially flat-shaped thin-plate frame by a predetermined distance in a direction of a first axis in a main surface of the thin-plate frame and holds the thin-plate frame at a predetermined position. And (a) a guide step of supporting the thin plate frame so as to be slidable in the direction of the first axis; and (b) a guide step perpendicular to the first axis in the main surface. In accordance with the first width of the thin plate frame in the direction of the second axis , the position for supporting the thin plate frame in the step (a) is set to the second width.
Of a width determined step to adjust the direction of the axis, the second corresponds to the width, the predetermined distance the sheet frame the first only the axis of the thin frame direction (c) said first axis a conveying step of conveying direction, corresponding in (d) of the second width, with a locking step for locking the sheet frame in position, (e) controlling the process, the city, the control step (E) is based on (e-1) the first width of the thin plate frame.
And a position for supporting the thin plate frame in the step (a).
And sends a first signal corresponding to the result.
And (e-2) based on the second width of the thin plate frame.
Conveys the thin plate frame in the direction of the first axis
Calculate the distance and send a second signal corresponding to the result
And that step, based on said second width (e-3) the thin frame
To calculate the position at which the thin plate frame is locked,
Transmitting a third signal corresponding to the first signal, wherein the step (b) comprises: (b-1) responding to the first signal;
The position for supporting the thin plate frame in the second axis
Adjusting in a direction , wherein the step (c) comprises: (c-1) a predetermined distance in response to the second signal.
Conveying the thin plate frame in the direction of the first axis
Degree, wherein the step (d), in response to (d-1) the third signal, before a predetermined position
A method for transporting and positioning a thin plate frame , comprising: a step of locking the thin plate frame. 2. The guiding step (a) includes the steps of: (a-1) removing an end portion of the thin plate frame present in a direction of the second axis or a first main surface of the thin plate frame near the end portion; a step of guiding the direction of the first axis, the step of guiding the second main surface of the thin frame in (a-2) said end portion to the vicinity of the end portion in the direction of the first axis, The method according to claim 1, further comprising: (a-3) guiding an edge surface of the thin plate frame at the end portion in a direction of the first axis . 3. The method according to claim 1, wherein the step (a-1) comprises the steps of (a-1-1) and the following means (a-1-1-1):
(A-1-2) preparing the means (a-1-1-1) in the first step;
(A-1-3) using the above means (a-1-1-1)
Guiding the first main surface of the thin plate frame in the direction of the first axis; and (a-1-4) using the means (a-1-1-2). ,
The method according to claim 2, further comprising: guiding the first main surface of the thin plate frame in the direction of the first axis . Here, means (a-1-1-1) and (a-
1-1-1): (a-1-1-1) guiding the first main surface of the thin plate frame at or near the end in the direction of the first axis. And (a-1-1-2) provided adjacent to the means (a-1-1-1) in the direction of the first axis, and the end or the end The first main surface of the thin plate frame in the vicinity of the portion to the first axis
Second means for guiding the direction of a. 4. The step (a) further includes: (a-5) prior to the step (a-1), guiding the thin plate frame to a position where the step (a-2) is performed. The method for transporting and positioning a thin plate frame according to claim 3. 5. The transport of a thin-plate frame which transports a substantially flat-shaped thin-plate frame in a direction of a first axis in a main surface of the thin-plate frame by a predetermined distance and holds the thin-plate frame at a predetermined position. (A) guide means for supporting the thin plate frame slidably in the direction of the first axis; and (b) a guide means perpendicular to the first axis and in the main surface. Corresponding to a first width of the sheet frame in the direction of the second axis , the position at which the means (a) supports the sheet frame is defined by the second width.
Of a width determined means for adjusting the direction of the axis, the second corresponds to the width, the predetermined distance the sheet frame the first only the axis of the thin frame direction (c) said first axis comprising conveying means for conveying the direction, corresponding in (d) of the second width, and locking means for locking said sheet frame in position, and a (e) control means, said control means (E) is based on (e-1) the first width of the thin plate frame.
A position where the means (a) supports the thin plate frame.
And transmitting a first signal corresponding to the result.
And (e-2) based on the second width of the thin plate frame.
Conveys the thin plate frame in the direction of the first axis
Calculate the distance and send a second signal corresponding to the result
Means that, based on said second width (e-3) the thin frame
To calculate the position at which the thin plate frame is locked,
Means for sending a third signal corresponding to the result , wherein said means (b) comprises: (b-1) said means (a) in response to said first signal.
Moves the position supporting the thin plate frame to the position of the second shaft.
Means for adjusting in a direction , wherein said means (c) comprises: (c-1) a predetermined distance in response to said second signal.
Hand for transporting the thin plate frame in the direction of the first axis
Stage, wherein the means (d), in response to (d-1) the third signal, before a predetermined position
A device for transporting and positioning a thin plate frame , comprising: means for locking the thin plate frame. 6. The guide means (a) is configured to: (a-1) move an end of the thin plate frame present in the direction of the second axis or a first main surface of the thin plate frame in the vicinity of the end. Means for guiding in the direction of the first axis ; (a-2) means for guiding the second principal surface of the thin plate frame at or near the end in the direction of the first axis ; (A-3) means for guiding an edge surface of the thin plate frame at the end portion in the direction of the first axis, the transporting and positioning device for the thin plate frame according to claim 5 , further comprising: 7. The means (a-1): (a-1-1) guiding the first main surface of the thin plate frame at or near the end in the direction of the first axis. (A-1-2) provided adjacent to the means (a-1-1) in the direction of the first axis, and provided at the end portion or in the vicinity of the end portion. Second means for guiding the first main surface of the thin plate frame in the direction of the first axis ; (a-1-3) applying the means (a-1-1) to the first main surface; conveying and positioning device of the thin plate frame according to claim 6 to obtain Bei means for approximating a substantially opposite direction. Wherein said means (a) is, (a-5) conveying and positioning device of the sheet frame according to the thin frame in claim 7 in which means further comprises guiding said means to (a-2). 9. The means (a-1-2) comprises: (a-1-2-1) means for holding the thin plate frame in a stationary state by applying a frictional force to the thin plate frame. The thin plate frame conveying and positioning device according to claim 7 . 10. A thin plate frame having a substantially flat plate shape.
Transport and position of thin plate frame for feeding and positioning
And a guide device for supporting the thin plate frame.
The guide means comprises a pair of drafts opposing each other and supporting the thin plate frame.
An inner rail , mounted on the pair of lower guide rails;
Between the lower guide rail and a pair of opposing gaps
A pair of upper guide rails facing each other as prescribed
And wherein the thin plate frame is supported on the pair of lower guide rails.
A pair of opposed thin-plate frames
Are housed in the pair of gaps, and the device is configured such that the pair of ends are housed in the pair of gaps.
The thin plate frame sandwiched between the pair of gaps
Conveying means for conveying in the direction of the first axis, is conveyed in the direction of said first axis by said conveying means
Locking means for locking the thin plate frame.
The pair of upper guide rails face each other and can be opened and closed on the pair of lower guide rails.
Movable upper guide rail that is mounted so that it can rotate freely
And the pair of movable upper guide rails are provided with the pair of lower guide rails.
From above the pair of lower guide rails.
When it can be opened so that the frame can be supplied
Both, between the pair of lower guide rails and the pair of lower guide rails
Can be closed to define a gap,
When heading to, place it on the pair of lower guide rails
On the main surface of the thin plate frame from above,
A transport and positioning device for a thin plate frame that rotates to approach . 11. A thin plate frame having a substantially flat shape is carried.
Transport and position of thin plate frame for feeding and positioning
And a guide device for supporting the thin plate frame.
The guide means comprises a pair of drafts opposing each other and supporting the thin plate frame.
An inner rail , mounted on the pair of lower guide rails;
Between the lower guide rail and a pair of opposing gaps
A pair of upper guide rails facing each other as prescribed
And wherein the thin plate frame is supported on the pair of lower guide rails.
A pair of opposed thin-plate frames
Are housed in the pair of gaps, and the device is configured such that the pair of ends are housed in the pair of gaps.
The thin plate frame sandwiched between the pair of gaps
Conveying means for conveying in the direction of the first axis, is conveyed in the direction of said first axis by said conveying means
Locking means for locking the thin plate frame.
The pair of upper guide rails face each other and can be opened and closed on the pair of lower guide rails.
A pair of movable upper guide rails attached to the pair of lower guide rails.
From above the pair of lower guide rails.
When it can be opened so that the frame can be supplied
Both, between the pair of lower guide rails and the pair of lower guide rails
Can be closed to define a gap,
When heading to, place it on the pair of lower guide rails
On the main surface of the thin plate frame from above,
Approaching, the device moves the pair of lower guide rails, thereby
Width determining means for adjusting the distance between a pair of lower guide rails
The width determining means is sandwiched between the pair of lower guide rails and rotates.
Therefore, a thin plate conveyance and positioning device including a rotatable cam for adjusting the interval .