JP2862888B2 - Drip-proof exhaust system - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a drip-proof exhaust device used for exhausting an etching material loading port or the like of an etching machine. The present invention relates to a drip-proof exhaust device that is prevented from dropping.

[Conventional technology]

A shadow mask, which is a main component of a picture tube for a color television, is manufactured by fine processing using a photoetching method.

In the photoetching method, each step such as pretreatment, resist coating, exposure, development, etching, and film stripping is often sequentially performed on a continuous processing material.

Since the processing material is continuous, a carry-in port for carrying the processing material into an etching machine for performing an etching process and a carry-out port for carrying out the processing material after etching are open. Therefore, corrosive gas such as hydrochloric acid and mist of the etchant generated in the etching machine leak from the carry-in port and the carry-out port. Therefore, the leaked corrosive gas mist must be exhausted by an exhaust device.

FIG. 7 is a view showing a conventional example of an exhaust device provided in an etching machine.

As described above, the workpiece 3 is transported to the etching machine 2 by the transport conveyor section 23 and is loaded into the inside from the loading port 24.

The conventional exhaust device 4 is installed above the transport conveyor section 23 and away from the chamber 21.

[Problems to be solved by the invention]

In the above-described conventional exhaust device, in the exhaust duct, gas may be liquefied due to adiabatic expansion due to reduced pressure, or mist or the like may be condensed into droplets and fall on the surface of the workpiece. If droplets, mist, etc. adhere to the surface of the processed material, it causes partial unevenness, and the product yield is reduced.

Also, unless the exhaust capacity of the exhaust device is very large,
Sufficient exhaust effect cannot be obtained. For this reason, corrosive gas
The mist is scattered, the environment around the etching machine is deteriorated, and there is a problem in terms of occupational safety and health. In addition, there is a problem in that a failure of the device or the like occurs and the life is shortened.

An object of the present invention is to provide a drip-proof exhaust device that prevents a droplet from dropping into a drip-proof area and does not deteriorate the surrounding working environment.

[Means for solving the problem]

As a result of conducting various experiments, the present inventors have found that by providing a drip-proof plate in the exhaust device, it is possible to prevent the droplets from dropping into a drip-proof area where a workpiece or the like travels. I came to.

In other words, the invention of claim 1 is a drip-proof plate comprising a ceiling plate portion having no discontinuous surface at least above the drip-proof area and a side plate portion connected to the ceiling plate portion and hanging outside the drip-proof area. When,
A liquid reservoir provided at a lower end of a side plate of the drip-proof plate, a first exhaust hole provided outside a drip-proof area of a ceiling plate or a side plate of the drip-proof plate, An outer plate that covers the outside of the plate and forms an exhaust space between the plate and the drip-proof plate, and a second exhaust hole that is provided in the outer plate and communicates with an exhaust duct. And an exhaust unit that allows exhaust gas to pass therethrough to prevent droplets from condensing on the inside of the drip-proof plate.

〔Example〕

Hereinafter, the present invention will be described in detail with reference to the drawings and the like based on embodiments.

FIG. 1 is a view showing an embodiment of a drip-proof exhaust apparatus according to the present invention, FIG. 2 is a view showing a state where the apparatus is mounted on an etching machine, and FIG. 3 is a view showing the embodiment. It is a figure for explaining operation of an apparatus.

In each figure, 11 is a drip-proof plate, 12 is a first exhaust hole, 13 is an outer plate, 14 is a liquid reservoir, 15 is a drain, 16 is a second exhaust hole, and 17 is an exhaust duct.

The drip-proof plate 11 is composed of a ceiling plate 11a and a side plate 11b.Depending on the use environment, use vinyl chloride or the like when exposed to an acid gas, and use stainless steel or the like when exposed to an alkaline gas. It is manufactured using. All other structural materials described below also use corrosion-resistant materials.

The ceiling plate 11a is configured so that there is no discontinuous surface at least above the drip-proof area α. Here, the drip-proof area α is
This is a region where droplets are not to be dropped. In this embodiment, it is a region between the outermost edges in the width direction of the traveling path of the workpiece. The ceiling plate portion 11a needs to have a shape in which droplets do not adhere or flow down along the wall surface so that the droplets do not fall from the position to the drip-proof area. The shape of the ceiling plate portion 11a is not particularly limited, but it is preferable that the curvature is small when the shape is a curved surface. The reason for this is that the smaller the curvature, the smaller the diameter of the droplet to be attached is empirically, so that the possibility of falling is reduced. In this embodiment, the ceiling plate 11a has an arched curved surface and is inclined toward the entrance.

The side plate portion 11b is a portion that is provided continuously to the ceiling plate portion 11a and hangs outside the drip-proof area α.

The first exhaust hole 12 is provided in the drip-proof plate 11, and has an opening outside the drip-proof area α so that the droplet does not fall into the drip-proof area α. In this embodiment, the first exhaust hole 12 is
A slot-shaped opening is provided at each of two places on both sides of a. Around the opening of the first exhaust hole 12, an upwardly protruding projection 12a is formed for stopping the liquid so that the droplet does not drop.

The outer plate 13 is provided so as to cover the outside of the drip-proof plate 11, and forms an exhaust space between the outer plate 13 and the drip-proof plate 11. Since the outer plate 13 covers the drip-proof plate 11 and allows the high temperature gas to pass through the outside of the drip-proof plate 11, the temperature difference between the upper surface and the lower surface of the drip-proof plate 11 is reduced, and the drip-proof plate 11 Droplets can be prevented from adhering to the lower surface.

The liquid reservoir 14 is formed at the lower end of the outer plate 13 so as to be folded inward. The liquid reservoir 14 is a portion for storing liquid drops that fall along the upper or lower surface of the drip-proof plate 11, and is provided with a drain 15 for discarding the collected liquid.
A hose or the like is connected to the drain 15 to guide the accumulated liquid to a drain pit (not shown).

The second exhaust hole 16 is provided substantially at the center of the outer plate 13,
It communicates with the exhaust duct 17.

The exhaust device 1 having the above structure is installed at the entrance and exit of the etching machine 2 as shown in FIG.

It is preferable that the exhaust device 1 be installed at a position as low as possible without damaging the surface of the workpiece. By doing so, the gap between the exhaust device 1 and the conveyor section 23 of the etching machine 2 becomes narrow, and the exhaust efficiency can be improved. However, it is desirable that there be a gap of about several tens of mm for the convenience of maintenance and inspection.

Further, the exhaust device 1 and the etching machine 2 are closely attached via packing or the like, and are installed so as to obtain high airtightness. By adopting such a closed structure, scattering of corrosive gas and mist is eliminated, and the exhaust efficiency is significantly improved, so that the surrounding working environment is not deteriorated.

Next, the operation of the embodiment of the drip-proof exhaust device according to the present invention will be described.

The corrosive gas mist (solid arrow) generated in the etching machine 2 flows out toward the carry-in port 24.

The corrosive gas mist is sucked upward by the suction force of the exhaust fan 18 provided in the duct 17 of the exhaust device 1. At this time, the exhaust device 1 and the conveyor
Fresh air having a high flow rate (dashed arrow) flowing from a narrow gap with the nozzle 23 joins the corrosive gas mist and is quickly led to the first exhaust holes 12 on the left and right.

Corrosive gas mist passing through the first exhaust hole 12
The gas passes through the exhaust space formed by the outer plate 11 and the outer plate 13 and is led to the second exhaust hole 16.

The corrosive gas mist passing through the second exhaust hole 16 is guided to an outdoor scrubber (not shown) by an exhaust duct 17. At this time, droplets condensed in the exhaust duct 17 and flowed from the second exhaust hole 16 fall on the upper surface of the drip-proof plate 11 and are stored in the liquid reservoir 14 along the inclination of the drip-proof plate 11. Is done.

Since the high-temperature corrosive gas / mist passes through the upper surface of the drip-proof plate 11, the temperature difference between the drip-proof plate 11 and the lower surface is small, and the droplets do not easily condense. In the unlikely event that droplets condense on the lower surface of the drip-proof plate 11, the liquid reservoir 1 along the arch surface or the inclined surface of the ceiling plate 11 a of the drip-proof plate 11.
4 or falls outside the drip-proof area α, so that it does not fall on the workpiece 3.

4 to 6 show another embodiment of the drip-proof exhaust device according to the present invention.

In the embodiments described below, portions that perform the same functions as those in the above-described embodiments will be described with the same reference numerals.

In the embodiment of FIG. 4, only the drip-proof plate 11 is extracted and shown. In this example, the end of the drip-proof plate 11 on the etching machine side is a curved portion 11c. Therefore, the curved portion 11c
Is also exhausted to the outer plate 13 side.

The embodiment of FIG. 5 shows an example in which the ceiling plate portion 11a of the drip-proof plate 11 is flat and inclined to one side. Further, the first exhaust hole 12 is formed in the side plate portion 11b. In this way, since the drip-proof plate 11 has no curved surface portion, it is easy to process, and the droplet does not fall on the workpiece 3.

The embodiment shown in FIG. 6 shows an example of an exhaust device for attaching to a vertical etching machine. In this case, a large number of first exhaust holes 12 are provided in the side plate portion 11b of the drip-proof plate 11, and second exhaust holes 16 are provided on both sides, and suction is performed by two ducts 17.

Various modifications can be made without being limited to the embodiment described above.

The lower surface of the drip-proof plate 11 may be coated with a resin for reducing surface tension.

When the second exhaust holes 16 are provided on both sides, a heat insulating material may be inserted above the ceiling plate 11a of the drip-proof plate 11. Further, the outside of the outer plate 13 may be covered with a heat insulating material.

The device for mounting the exhaust device according to the present invention is not limited to the etching machine, and is suitable for exhausting high-temperature and high-humidity gas.

〔The invention's effect〕

As described above in detail, according to the present invention, since the drip-proof plate having no discontinuous surface is provided in the drip-proof area, the droplet does not fall into the drip-proof area. Therefore, if the apparatus is attached to an etching machine or the like, corrosive droplets drop onto the processing material, and unevenness after processing is completed, and stains on the processing surface are eliminated, thereby greatly improving the non-defective product rate.

Further, if the exhaust device according to the present invention is installed in close contact with the exhaust object, there is an effect that the corrosive gas / mist is not scattered and the surrounding working environment is remarkably improved.

[Brief description of the drawings]

FIG. 1 is a view showing an embodiment of a drip-proof exhaust apparatus according to the present invention, FIG. 2 is a view showing a state where the apparatus is mounted on an etching machine, and FIG. 3 is a view showing the embodiment. It is a figure for explaining operation of an apparatus. 4 to 6 show another embodiment of the drip-proof exhaust device according to the present invention. FIG. 7 is a view showing a conventional example of an exhaust device provided in an etching machine. DESCRIPTION OF SYMBOLS 1 ... Exhaust device 11 ... Drip-proof plate, 12 ... 1st exhaust hole 13 ... Outer plate, 14 ... Liquid reservoir 15 ... Drain, 16 ... 2nd exhaust hole 17 ... Exhaust duct 2 ... ... Etching machine 21 ... Chamber, 22 ... Inspection window 23 ... Transport conveyor section, 24 ... Transport port 3 ... Work material

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁶ , DB name) C23F 1/08 F24F 7/06 H01J 9/14

Claims (1)

(57) [Claims] 1. A drip-proof plate comprising at least a ceiling plate having no discontinuity above the drip-proof area and a side plate connected to the ceiling plate and hanging outside the drip-proof area; A liquid reservoir provided at the lower end of the side plate of the drip plate; a first exhaust hole provided outside the drip-proof area of the ceiling plate or the side plate of the drip-proof plate; An outer plate that covers the outside and forms an exhaust space between the drip-proof plate and the outer plate,
An exhaust portion provided on the outer plate and communicating with an exhaust duct, the exhaust portion configured to allow exhaust gas to pass outside the drip-proof plate and prevent condensation of droplets inside the drip-proof plate; Drip-proof exhaust system including