JP2861931B2 - Precision processing equipment from work reference plane - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a precision processing apparatus and, more particularly, to a precision processing apparatus which is preferably used for grinding a dielectric element or the like. The present invention relates to a grinding device capable of correcting a specified grinding amount and performing precise grinding.

[0002]

2. Description of the Related Art Conventionally, in processing a dielectric element or the like, a specified amount has been ground from a lower portion of a work from a reference surface of the work. In such processing, the work is lowered in the Z-axis direction to an arbitrary point on the processing surface of the grindstone, the reaction force applied at the time of contact is detected by a digital indicator, and the grindstone is rotated and oscillated from that point to thereby form the grindstone. Grinding was stopped when the specified dimensions were reached after grinding while extending the service life. After grinding, another unit was used to measure whether the dimensions were as specified, and to judge the quality.

FIG. 12 shows a configuration example of a conventional processing apparatus.
After measuring the height of the work using the table 9A and the digital indicator 5A, the work is processed in the processing apparatus. At this time, the workpiece reference surface clamped by the robot hand 2 is moved downward by the Z-axis mechanism 7 and is brought into contact with the grindstone 8-1 via the piston by the pressure supplied by the pump P. Grinding is performed. At this time, the grinding operation is started by supplying grinding water between the grindstone and the work 1 with the water nozzle 8-4 to remove grinding powder and extend the life of the grindstone (grinding accuracy). Perform processing. In this conventional apparatus, the zero point detecting unit 6 has a mechanism for sliding the work 1 in three directions to clamp the side surface thereof, clamping the work 1 and a mechanism for receiving a reaction force from the work reference plane 1-1. A digital indicator 5 for detecting fine movement of the piston 3 in the Z-axis direction, and a tracing stylus 5-1 are assembled into a cylinder 4 which has a piston 3 fastened to the robot hand 2 and is slidable vertically in the Z-axis direction.
And a digital indicator 5A for measuring the height at the table 9A and a digital indicator 5 provided for the zero point detection mechanism 6 and two measuring instruments.

Referring to FIG. 13, the control system of the conventional apparatus reads data from digital indicator 5A from the digital indicator for work height measurement and data from digital indicator 5 for zero point detection, and A reading controller 102, a Z-axis controller 103 for controlling the Z-axis motor, a rotation speed controller 104 for controlling the rotation speed of the spindle servomotor 8-3, an X-axis controller 105 for controlling the X-axis servomotor, It is composed of a CPU 101 for controlling.

[0005]

However, the above conventional method has the following problems.

The first problem is that the point of contact with the grindstone is arbitrary, and the finished dimensions vary with respect to the specified precision dimension, for example, of several μ units, resulting in defective products. .

The reason for this is that, in the conventional method, the difference in the surface accuracy of the grindstone is not taken into account in contact with the grindstone.
In addition, the pressure on the grindstone is constant irrespective of the shape of the contact surface of the work, and does not take into account the deflection of the work relative to the size.
This is because the finish size also varies because of the point detection method.

[0008] The second problem is that it takes time to measure the work.

[0009] The reason for this is that since the grinding and measurement of the work are separated, it takes a long time to carry the work.

Japanese Patent Application Laid-Open No. Sho 57-163553 has a means for storing a rough polishing program obtained by sliding a rough-polished work piece. A configuration has been proposed in which the upper finish polishing is performed according to a rough polishing program by inputting only the upper finish polishing dimension from the outside.

SUMMARY OF THE INVENTION Accordingly, the present invention has been made to solve the above problems, and an object of the present invention is to eliminate variations in finished dimensions with respect to work of a work with high accuracy, and to measure from work to measurement. Another object of the present invention is to provide a processing apparatus that can reduce the time required for the processing and can be automated.

[0012]

In order to achieve the above object, the present invention provides a robot hand for gripping a work, and a zero point detecting means for detecting and measuring the contact time of the work in conjunction with the robot hand. And a Z-axis mechanism for moving the robot hand and the zero-point detecting means in the Z-axis direction during processing feed and measurement, a table for measuring the height of the work, and grinding from a work reference plane. For grinding
The stone is mounted, a grinding mechanism for grinding giving rotation to the whetstone
And the grinding mechanism unit and the table by an X-axis table
An X-axis mechanism unit that moves in the X-axis direction by combining the Z-axis controller unit that controls the Z-axis mechanism unit based on input grinding processing conditions; and an X-axis table of the X-axis mechanism unit.
X-axis controller for straight control, the rotational speed controller for controlling the rotation of the grinding wheel <br/> of the grinding mechanism, and a work
Position control to keep the contact position of the wheel against the grinding wheel constant
Controls over La, the tape height before and after grinding of the workpiece
And O point position abutting the table, O point contact to the grindstone
The position and the position are detected using measuring means, and the position is measured based on the detected value.
Provided is a precision machining apparatus from a workpiece reference plane , wherein an error value of an actual grinding value with respect to a designated cutting amount is calculated, and correction feedback is performed on a subsequent designated grinding value .

Under the above configuration, the present invention controls the rotation start and end positions of the grindstone so that zero inspection is always performed at the same point and machining is performed, so that variation is reduced.
That is, the mechanical error is fixed, the difference between the actual measured value of the work after processing and the specified value is calculated, and the difference is fed back as correction data for the next work of the work, and the work is accurately performed. By incorporating the device into a single device, a processing and measurement unit can be omitted.

According to the present invention, the point of contact with the grindstone is always fixed at a predetermined position, so that the mechanical error is always kept constant, the variation width is small, and the mechanical error is reduced to the specified grinding amount. And the workpiece can be processed with high accuracy.

According to the present invention, the height of the workpiece and
Since the detection at the time of contact with the grindstone can be processed by one digital indicator, the process of measurement → processing → measurement can be performed inexpensively and the apparatus configuration can be simplified.

[0016]

Next, embodiments of the present invention will be described in detail with reference to the drawings.

FIG. 1 is a view for explaining an example of a work 1 which is a workpiece to which an embodiment of the present invention is applied, and FIGS. 1A and 1B respectively show FIGS. 1C shows a side view before and after processing, and FIG. 1C shows a bottom view of a work reference plane.

Referring to FIG. 1, the work 1 is processed by a work reference surface 1- 1 opposed to a mounting member 1-3 attached to a unit.
It grinds the designated amount 1-2 from 1.

Referring to FIG. 2 and FIG. 3, a mechanical system of a processing apparatus according to an embodiment of the present invention will be described below.

Referring to FIG. 2, the zero point detection unit 6 slides in three directions to clamp the side surface of the work 1 and a pawl 2-1 (see FIG. 3A) of a mechanism for clamping the work 1; A robot hand 2 composed of a stopper 2-2 for receiving a reaction force from the workpiece reference surface 1-1, and fastened to the robot hand 2 by a piston 3 without looseness;
The indicator 5 and the tracing stylus 5-1 that detect fine movement of the piston 3 in the Z-axis direction are precision-machined and assembled into a cylinder 4 that is slidable vertically in the Z-axis direction. The cylinder is provided on the cylinder 4.

The Z-axis mechanism 7 is coupled to the zero point detector 6 via a Z-axis table 7-11, and moves in the Z-axis direction by driving a Z-axis motor 7-2.

The grinding mechanism 8 includes a grindstone 8-1 and a grindstone 8-
And a spindle motor 8-3 for rotating and driving the motor 1.

The X-axis mechanism section 10 connects the grinding mechanism section 8 and the height measuring table 9 with an X-axis table 10-1, and moves in the X-axis direction by driving an X-axis motor 10-2.

The pressure adjusting unit 11 includes a pump 11-1 for pressing the work 1 through the cylinder 4 of the zero point detecting unit 6.
And an electric regulator 11-2 for controlling the pressure of the pump 11-1 so as to apply a constant surface pressure corresponding to the shape of the work reference surface 1-1. A dust nozzle 11-4 for removing dust from the work 1 and the height measuring table 9 and a valve 11-3 for supplying pressure of a pump 11-1 are provided.

FIG. 3A shows the pawl 2 of the robot hand 2.
FIG. 3 is a diagram showing a state when a work side surface is clamped by -1. FIG. 3B is a plan view showing the arrangement of the work on the work height measurement table 9 and the grindstone 8-1.

Next, in order to explain the embodiment of the present invention in more detail, an example of a control system will be described below. FIG. 4 shows a configuration of a control system according to one embodiment of the present invention.

Referring to FIG. 4, a data reading controller 102 for reading data of a digital indicator 5 for detecting a movement amount of a piston 3 which receives a reaction force from a robot hand 2 via a workpiece reference surface 1-1 and moves slightly; Work 1
The rotation position controller 106 controls the position of the abutment on the grinding wheel 8-1 at a fixed position via the spindle motor 8-3, and the rotation of the grinding wheel 8-1 during the grinding of the work 1 is controlled via the spindle motor 8-3. Rotational speed controller 104 for controlling the
06, and a work height measuring position 8
X-axis controller 105 for numerically controlling -6 and work grinding area 8-2, rotation and swing origin position 8-5 via X-axis motor 10-2, and electric type for controlling pressure on work 1 A regulator 11-2;
A valve 11-3 for controlling ON / OFF of air for cleaning dust and measurement surface adhered to the work 1.
The CPU 101 controls these controls.

Next, the details of the operation steps of the embodiment of the present invention will be described in detail with reference to FIGS. 1 and 5 to 8, 9 and 10.

Referring to FIG. 5, processing conditions are input to CPU 101 in step S1. The predetermined processing conditions include, as shown in FIG.
Is clamped by the pawl 2-1 of the zero point detection unit 6, so that the height data for moving to the center of the height measurement table 9 and the stopper 2-2 are applied to the abutment unit 1-4 of the work 1. The height correction value (H ₁ ) at the time of contact, the pressing value corresponding to the shape of the work 1, the processing speed, the specified processing amount (H _L ), etc. are input, and the data is processed based on the input data. Advance.

Next, in step S2, step S
Based on the data input in step 1, the electric regulator 11
By controlling the pressure of the pump 11-1 by the control of -2 and supplying it to the cylinder 4, the pressure at which the work 1 contacts the height measurement table 9 is kept constant, and deformation (break, crack) of the work 1 is prevented. I do.

Next, in step S3, absolute value detection processing, that is, zero point detection processing is performed. This is shown in FIG.
In step 1, A2, the absolute position of the height measurement table 9 is detected, and the position is determined.

The method of detecting the absolute position in step S3 is a common process, and is called as a subroutine in the flowchart shown in FIG.
Is shown as a flow chart.

Referring to FIG. 8, the Z-axis is lowered (step S81), and the pawl 2-1 of the robot hand 2 moves the work 1
Is clamped, the digital indicator 5 detects a slight movement which pushes up the piston 3 by receiving a reaction force in the process of contacting the contacted portion of the workpiece reference surface 1-1 via the tracing stylus 5-1. (Step S82) The data is input to the CPU 101 via the data reading controller 102, and the value is received, and the lowering of the Z axis is stopped.

At this time, the numerical data of the Z-axis controller 103 and the value of the above-mentioned digital indicator 5 are calculated, and the actually measured value (zero height position = H ₀ ) is held as the absolute position. That is, in the subroutine readout processing of step S3, the position at the zero point height is measured (= Z axis stop position +
Digital indicator value) is returned.

Referring again to FIG. 5, steps S4 to S6
As a pre-process of a process for determining the pre-machining height of the work 1, the work 1 is centered by the clamping operation of the claw 2-1 of the robot hand 2 in the steps A3 to A5 in FIG. That is, the zero point detection mechanism 6 is raised in step S4, the work 1 is set on the height measurement table 9 in step S5, and A in FIG.
As shown in FIG. 5, the work 1 on the height measurement table 9
(See FIG. 3B).

Next, in step S7, the absolute value detection processing shown in FIG. 8 is called, and the height measurement processing of the work 1 is performed. That is, the Z-axis is lowered in the same manner as in step S3, and the stopper 2-2 is applied to the abutment portion 1-3 of the work 1 centered on the height measurement table 9 in the state of A6 in FIG. When touched, the value of the digital indicator 5 fluctuates. At that time, the Z-axis is stopped, and the work height position (H ₂ ) is calculated and held by the value of the digital indicator 5 and the numerical data when the Z-axis controller 13, that is, the Z-axis servomotor 7-2 is stopped. .

Next, in step S8, step S
The work height position (H ₂ ), the zero-point position (H ₀ ) in step S3, and the height correction value (H ₁ ) in step S1 are processed by the following formula (1). The previous work height (H) is used.

Work height (H) = H ₂ −H ₀ + H ₁ (1)

In step S9, when the work 1 is processed, the work is clamped at A7 in FIG.
After the ascending movement 8 in the Z-axis direction, the grindstone 8-1 on the X-axis is moved to the X-axis work machining origin 8-7 (see FIG. 3B).

Referring to FIG. 6, in step S10, switch 15 is switched to rotational position controller 14-2, and as shown in FIG.
With -2, the axis is moved to the rotation origin 8-6 via the spindle servomotor 8-3 to find the origin in the direction of the rotation axis.

By the processes of steps S9 and S10, the workpiece 1 clamped by the Z-axis robot hand 2 can always be positioned at the same position with respect to the machining of the workpiece 1. As a result, the unevenness of the surface accuracy of the grindstone 8-1 is obtained. Can be processed in consideration of the height difference.

In step S11, similarly to step S2, the electric regulator 11-2 is used to keep the mechanical error such as the deflection on the work side when the reference surface 1-1 of the work 1 comes into contact with the grindstone. Is set to a predetermined setting, and the pressing at the time of contact is set.

In step S12, similarly to the operation in step S3, the Z-axis is lowered, and as shown in FIG. 1, the work 1 is brought into contact with the grindstone 8-1, and the digital indicator which fluctuates due to the reaction force. In response to the data of No. 5, the Z axis is stopped. The contact position (H ₃ ) of the grindstone 8-1 at that time is held.

Step S13 is the same as step S12.
The processing specified amount (H _L ) is added to the contact position (H ₃ ) of the grindstone 8-1, and the processing specified position (H ₄ ) is calculated as in the following equation (2).

H ₄ = H ₃ + H _L (2)

In step S14, the Z-axis is raised, and the work 1 is once released from the grindstone 8-1.

Then, in steps S16 to S21,
The switching unit 15 is switched to the rotation speed controller side, and the rotation speed controller 14-1 rotates the magnet 8-1 via the spindle servomotor 8-3 (step S16), and the Z-axis abuts at the previously input machining speed. (Step S18), the grinding water is supplied between the grindstone and the work 1 by the water nozzle 8-4 to remove the grinding powder, and the rocking operation is started to extend the life of the grindstone (grinding precision). Then, the work 1 is processed (step S20).

In step S22, the value of the digital indicator 5 is detected to determine whether the Z-axis has reached the processing dimension of the work 1 and the work 1 has been processed normally, and the value is set to 0.
If so, the process ends.

Referring to FIG. 7, steps S23 to S24
Is to check whether or not the swing reciprocating operation is completed, and to stop the movement to the swing origin position. As a process after the normal feeding operation, a process caused by a height difference of unevenness of the surface accuracy of the grindstone 8-1. In order to make the error constant, the effective area 8-2 of the grindstone is brought into contact, and the variation between the designated value and the actual machining value is corrected. The difference between the designated value and the actual processing value generated by this operation is used as a post-processing correction.

In steps S25 to S31, the difference between the designated value generated in the above-mentioned processing and the actual processing value is obtained.
In the process of measuring the post-machining height position of the workpiece 1 after machining (H _5), the dust from grinding dust into the work 1 after processing air and the valve 11-3 is turned ON from the dust removal nozzle 11-4 Eliminates measurement errors by blowing away. That is, it rises in the Z-axis direction (step S25), stops the rotation of the grindstone 8-1 (step S26), and moves the ground work 1 to X
Move to the axis height measurement table 9 (step S27),
The Z-axis is lowered (Step S28), the height position of the Z-axis is stopped (Step S29), and the air is removed from the dust removal nozzle 11 (Step S29).
Then, the workpiece height is measured (step S31), and the workpiece height is measured (step S31). The height after processing at this time of the work to H _5.

Step S32 compares the dimension after machining with the designated machining amount and calculates a correction value. The work height position (H ₅ ) after machining is calculated from the zero point position (H ₀ ) of the work height. The work height after processing (H ') is calculated (see the following equation (3)), and the work height after processing (H') is subtracted from the work height before processing (H) to obtain the actual processing amount. (H _L ′) is calculated (see the following equation (4)), and the difference between the designated machining amount (H _L ) and the actual machining amount (H _L ′) is calculated as a correction value (H ₆ ) (the following equation (H ₆ )). 5)), and after the initial determination in step S15,
By correcting the correction value (H ₆ ) to the designated processing amount (H _L ) (see step S15A in FIG. 6), the work 1 can be accurately performed.
Can be processed.

Work height after processing H ′ = H ₀ −H ₅ (3)

Actual processing amount H _L ′ = H−H ′ (4)

Correction value H ₆ = H _L −H _L ′ (5)

[0055]

As described above, according to the present invention,
By providing the function of constantly maintaining the processing conditions, there is an effect that a mechanical error can be made constant during processing. By correcting a predetermined value to the processing specified amount, the processing of the work can be performed with high accuracy.

Further, according to the present invention, the digital indicator (measuring device) of the measuring section is omitted. Thereby, the device configuration can be simplified, and the device can be provided at low cost.

The reason is that the measurement of the work and the detection of the contact of the work can be processed by one digital indicator (measuring device).

[Brief description of the drawings]

FIG. 1 is a diagram for explaining an embodiment of the present invention, and is a plan view and a bottom view showing a workpiece shape.

FIG. 2 is a diagram showing a configuration of a precision processing device according to an embodiment of the present invention.

FIG. 3 is a diagram showing a configuration of a precision processing device according to an embodiment of the present invention.

FIG. 4 is a control system block diagram of the precision machining apparatus according to the embodiment of the present invention.

FIG. 5 is a flowchart illustrating a processing operation according to the embodiment of the present invention.

FIG. 6 is a flowchart illustrating a processing operation according to the embodiment of the present invention.

FIG. 7 is a flowchart illustrating a processing operation according to the embodiment of the present invention.

FIG. 8 is a flowchart illustrating a processing operation (absolute value detection processing) according to the embodiment of the present invention.

FIG. 9 is a view when a robot hand of the precision processing apparatus according to the embodiment of the present invention clamps a workpiece.

FIG. 10 is a diagram schematically showing the processing operation of the embodiment of the present invention in the order of steps.

FIG. 11 is a diagram showing movement of a grindstone to a rotation origin in a processing step according to the embodiment of the present invention.

FIG. 12 is a diagram showing a configuration of a conventional processing apparatus from a reference plane.

FIG. 13 is a diagram showing a conventional control system of a processing apparatus from a reference plane.

[Explanation of symbols]

 Reference Signs List 1 Work 1-1 Reference surface 1-2 Work mounting member 2 Robot hand 2-1 Pawl 2-2 Stopper 3 Piston 4 Cylinder 5 Digital indicator 5-1 Probe 6 Zero point detection mechanism 7 Z-axis mechanism 7-1 Z-axis table 7-2 Z-axis servo motor 8 Grinding mechanism 8-1 Grinding wheel 8-2 Grinding wheel effective area 8-3 Spindle servo motor 8-4 Water nozzle 8-5 X-axis height measurement position 8-6 Rotation origin 8 -7 X-axis work machining origin 9 Height measurement table 10 X-axis mechanism 10-1 X-axis table 10-2 X-axis servo motor 11 Pressure adjustment unit 11-1 Pump 11-2 Electric regulator 11-3 Valve 11- 4 Dust removal nozzle 101 CPU 102 Data reading controller 103 Z-axis controller 104 Rotation speed controller 106 Rotation position Controller 105 X-axis controller 115 switcher 18 manual regulator 19 Height digital indicator 1-3 abutment portion

Continuation of the front page (51) Int.Cl. ⁶ identification code FI G05B 19/18 G05B 19/18 A (58) Field surveyed (Int.Cl. ⁶ , DB name) B23Q 15/04 B23Q 17/22 B24B 49 / 02 B25J 13/00 G01B 5/20 G05B 19/18

Claims (5)

(57) [Claims] 1. A robot hand for gripping a work, zero point detecting means for detecting and measuring the contact of the work in conjunction with the robot hand, and processing and feeding the robot hand and the zero point detecting means At this time, a Z-axis mechanism for moving in the Z-axis direction, a table for measuring the height of the work , and a grindstone for grinding from a work reference surface are mounted .
A grinding mechanism that rotates and grinds the grindstone, and the grinding mechanism and the table are connected by an X-axis table
Includes a X-axis mechanism unit for moving the X-axis direction, and based on the inputted grinding condition, the Z-axis controller that controls the Z-axis mechanism unit, straight X-axis table of the X-axis mechanism unit X-axis controller for controlling , grinding of the grinding mechanism
Rotational speed controller for controlling the rotation of the stone, and, Wah
Position control to keep the contact position of the
Controls roller, the tape height before and after grinding of the workpiece
And O point position abutting the Buru, O abutting to year grindstone
The point position is detected using measuring means, and based on the detected value,
A precision machining apparatus from a workpiece reference plane , wherein an error value of an actual grinding value with respect to a designated grinding amount is determined, and correction feedback is performed on a subsequent designated grinding value . 2. A robot hand having a stopper for receiving a reaction force from a workpiece reference surface and a pawl for clamping a side surface of the workpiece, a piston having one end coupled to the robot hand, The precision machining apparatus according to claim 1, comprising: a guiding cylinder; and a digital indicator for detecting fine movement of the piston. Wherein the X-axis mechanism unit, a grindstone for grinding the workpiece, and the grinding mechanism for rotating attached to the grindstone, a means for supplying grinding water to avoid clogging of the grinding wheel 2. The precision machining apparatus according to claim 1, further comprising: a measuring table for setting the work at a fixed position and holding the fixed position, and driving these in a horizontal direction with respect to a reference plane of the work. 4. A pump for applying a pressure to the work via the cylinder of the zero point detection means to the X-axis mechanism, and applying a constant surface pressure via a reference surface corresponding to the shape of the work. The precision processing apparatus according to claim 1, further comprising: a pressure driving unit including an electric regulator. 5. A data read controller for controlling the position of the Z-axis mechanism , and reading data of a digital indicator for detecting a movement amount of a piston which receives a reaction force from the robot hand via a work reference plane and moves finely. A rotation position controller for controlling the contact position of the workpiece to the grinding wheel to be constant; a rotation speed controller for controlling the rotation speed at the time of grinding the workpiece; switching means for switching between these; and controlling a predetermined position of the X axis. An X-axis controller that performs the operation, a valve that removes the work and the dust on the measuring table adhered to the work after processing the work, and a CPU that controls the whole of the work. Calculate the current height position of the work with, input the specified grinding amount to remove dust after rough cutting, and set the work in the robot equipped with the Z-axis mechanism. Hand
Release the work once in the Z-axis direction while handling
The table is moved to the Z-axis position by driving the X-axis mechanism.
And then driven by the Z-axis mechanism to
Do not lower the workpiece handled by the robot hand.
The fine movement of the piston connected to the work is
The table to the table depending on the position of the
Detected that the workpiece reference surface touched, and stopped the Z-axis at the same time.
The Z-axis movement position at that time and the digital input
The absolute value calculated by the displacement position of the indicator and the
2. A precision machining apparatus from a reference surface according to claim 1, wherein a value is calculated as an actual measurement value, a difference from the specified value is calculated, and a finishing amount is corrected based on the calculated data. .