JPS63232968A - Grinding device - Google Patents

Abstract

PURPOSE:To automatically perform grinding of a workpiece, its shape measurement and correction grinding, by providing a grinding means, measuring means, means executing a program stored in an external memory unit and introducing grinding information, decision means, instruction means and a data processing device transmitting various instructions relating to the grinding. CONSTITUTION:Being based on the information of grinding stored in an external memory unit 12, a grinding machine 60 grinds a workpiece. A shape measuring machine 30 measures a shape of the workpiece after its grinding is finished. Being based on this measured result, a computer 11 decides by its decision means the workpiece for whether or not it is necessary for correction. From the result of decision by the decision means, when the workpiece is necessary for correction, a means, introducing the information relating to the correction grinding, of the computer 11 creates the information of grinding on the basis of the measurement result, while the information of grinding is stored in the memory unit 12. While an instruction means of the computer 11 instructs grinding of the workpiece to grinding means 40, 50. Consequently, a grinding device consistently performs grinding, shape measurement and correction grinding.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a grinding device, and particularly to a grinding device that grinds a workpiece by numerical control.

[Prior Art] In general, automation of grinding devices that grind workpieces has progressed, and grinding devices that use computers to grind workpieces into predetermined shapes have also been considered.

However, although it has become possible for this type of grinding equipment to automatically grind the workpiece, it has not reached the point where it can automate the process of measuring the shape of the workpiece and making partial corrections after grinding. Not yet.

[Problems to be Solved by the Invention] For this reason, when the grinding of the workpiece by the grinding device is completed, the operator removes the workpiece from the grinding device and reinstalls the workpiece in the shape measuring machine. .

When the result of shape measurement using a shape measuring machine indicates that a portion of the workpiece needs to be corrected, the corrected portion of the workpiece is ground using a grinder. However, in precision machining that performs grinding in units of millimeters to micrometers, there is a problem in that it is very difficult to match the processing position of the grinding device with the correction position of the workpiece.

Therefore, the object of the present invention is to solve these problems and provide a grinding device that can automatically perform grinding, shape measurement, and corrective grinding of a workpiece.

[Means for Solving the Problems] In order to achieve the above object, the present invention provides a storage means for storing ↑h information regarding the grinding of the workpiece, and a storage means for storing the information regarding the grinding stored in the storage means. A grinding means for grinding the workpiece based on the grinding means; a shape measuring means for measuring the shape of the workpiece ground by the grinding means; and a shape measuring means for measuring the shape of the workpiece ground by the grinding means. a determining means for determining whether or not the workpiece is present; and a means for deriving information regarding corrective grinding of the workpiece based on the measurement result when the determining means determines that the workpiece needs to be corrected; means for storing information regarding corrective grinding in a storage means;
The present invention is characterized by comprising means for instructing the grinding means to perform corrective grinding of the workpiece when the determination means determines that it is necessary to correct the workpiece.

[Operation] In the present invention, the grinding means grinds the workpiece based on the grinding information stored in the storage means. After the grinding of the workpiece is completed, the shape of the workpiece is measured by the shape measuring means. Based on this measurement result, the determining means determines whether or not it is necessary to modify the workpiece. When it is necessary to correct the workpiece as a result of the judgment by the judgment means, grinding information is created based on the measurement results by means for deriving information regarding corrective grinding, and the grinding information is recorded in the storage means.
It is urgent. Moreover, since the instruction means instructs the grinding means to grind the workpiece, a consistent process of grinding, shape measurement, and corrective grinding can be performed automatically.

[Embodiments] Hereinafter, embodiments of the wooden invention will be described in detail with reference to the drawings.

FIG. 1 shows an example of the configuration of this embodiment.

In FIG. 1, 30 is a shape measuring machine that measures the shape and roughness of a workpiece 100.

Various types of shape measuring machines 30 are known, and in this embodiment, an automatic focusing type shape measuring machine is used.

40 is a uniform polishing machine for uniformly polishing the workpiece 100.

50 is a correction polishing machine that partially corrects and polishes the workpiece 100. 60 is a grinding machine that grinds the workpiece 100.

The uniform polishing machine, the corrective polishing machine 50, and the grinding machine 60 can have substantially the same configuration, but the grinding tools used differ depending on the processing content of the workpiece 100.

70 is a holding device that holds the workpiece 100, and is installed on the rotating bag 20.

20 is a shape measuring machine 30. Uniform polishing machine 40. This is a turning device that turns and moves the holding device 70 to the working position of each of the regular polishing machine 50 and the grinding machine 60.

Swivel device 20. Shape measuring machine 30. Uniform polishing machine 40. A correction polishing machine and a grinding machine 60 are arranged on a pedestal 101,
It is integrally formed as a grinding device.

Next, the configuration of each device of this embodiment described above will be briefly explained.

The holding device 70 includes a workpiece holding member (not shown) 9 an indexing shaft motor 24 . The encoder 259 is integrally formed with the position detection sensor 21 and slides on the R slide guide of the turning device 20 in the direction of the arrow. As means for sliding the holding device 70, mechanisms using a motor or a piezoelectric element are known, so a detailed explanation thereof will not be given.

The turning device 20 is mainly an R slide 211 guide.

Scale 212. 2 turning guides 3. Encoder 23'
and a swing motor 23 (see FIG. 3).

The R slide guide 211 is driven to rotate by the rotation motor 24 and rotates in the direction of arrow J along the rotation guide 213.

The guide scale 212 is provided with marks indicating the position at predetermined intervals, and the position detection sensor 21 detects the marks to detect the position of the character device 70.

Next, the shape measuring device 30 will be explained with reference to FIG. 2.

In FIG. 2, the shape measuring device 30 is a focus state pressure detector 3.
1. Fine slide position detector 32. Fine movement slide motor 33. Inclination angle measuring device 34. Coarse slide position detector 35
and a coarse slide motor 36.

The focus state detector 31 is moved in the direction of arrow A by a coarse slide motor 36 and a fine slide motor 33. The light emitted by the focus state detector 31 is transmitted to the workpiece 10.
reflected by 0. This reflected light is detected by the focus state detector 31
Since the focus is determined by the optical system of
Detected by 5. Therefore, the distance between the workpiece 100 and the focus state detector 31 is determined from this focus position.

The tilt angle measuring device 34 is formed integrally with the focusing state measuring device 31 and measures the tilt angle of the workpiece 100.

Workpiece io detected by the focus state detector 31.

The distance to the workpiece 100 is used to detect the shape of the workpiece 100, and the inclination angle of the workpiece 100 detected by the inclination angle measuring device 34 is used to detect the roughness of the workpiece 100.

Next, the uniform polishing machine 40 will be explained with reference to FIG.

41 is a main shaft motor that rotates the polishing tool 49.

The main shaft motor 41 is fixed on a rotation stage 41'. The rotation stage 41' has a swing shaft motor 42 (not shown).
rotates in the direction of arrow C. 43 is a rotating stage 41
' is a preload mechanism that slides in the direction of the arrow. Therefore, the position where the polishing tool 49 and the workpiece 100 come into contact is determined by the rotation angle of the rotary stage 41' and the sliding position of the rotary stage 41'.

Similarly, the correction polishing machine 50 and the grinding machine 60 also use the polishing tool 5.
9, 59, main shaft motor 51, 61. and polishing tool 5
It has a mechanism 52.53.62 for determining the position of 9.69.

FIG. 4 shows an example of the circuit configuration of this embodiment.

Note that in FIG. 4, the same parts as in FIGS. 1 to 3 are given the same reference numerals. In FIG. 4, a block 10 indicated by a dashed dotted line is a main control device that controls the main control of each device in this embodiment.

The main controller 10 includes a data processing computer 11. External storage device 12. Printer 13. It is composed of a plotter 14 and a keyboard (not shown).

The data processing device II executes a program stored in the external storage device 12, and functions as a means 1 determining means and an instruction means for guiding grinding information. Further, the data processing computer 11 transmits various commands related to grinding to each of the above-mentioned devices. The external storage device 10 stores programs executed by the data processing computer 11 and information regarding the program operations.

Further, information sent from each of the devices 20 to 60 is output to the printer 13 and plotter 14.

Each of the above devices 20 to 60 has a control computer 2.
6, 37, 44, 54 and 63 are provided.

These control computers control the operating time, speed 1 operating order, etc. of the component devices based on processing instructions sent from the data processing computer +1.

In this embodiment, the steps of grinding the workpiece 100, measuring the shape of the workpiece +00, and modifying the workpiece are automatically performed in such a configuration.

FIG. 5 shows an example of the main control procedure of this embodiment.

In FIG. 5, when the workpiece 100 is set at the grinding position of the grinding machine 60, the data processing computer 11 instructs the grinding machine 60 to perform the grinding process shown in FIG. 6 (step 51).
0).

When the receiver receives a signal from the grinder 60 indicating that grinding has been completed,
The data processing computer 11 instructs the rotation device 20 to move to the shape measuring machine 30. Next, the turning device 20
When the control computer 26 receives the turning command,
The turning angle from the grinding machine 60 to the shape measuring machine 30, that is, the amount of rotation of the turning motor 23 is calculated, and furthermore, the turning motor 23 is drive-controlled based on this amount of rotation (step 520).

Note that the fact that the workpiece 100 has reached the shape measuring machine 30 can be detected by the rotational speed of the swing motor 23 measured by the encoder 23'.
The rotation speed is monitored, and when the work 100 reaches the shape measuring machine 30, the rotor 23 is stopped.

Next, when a signal indicating that the workpiece 100 has reached the measurement base wall position of the shape measuring machine 30 is sent from the rotation device 20 to the data processing computer 11, the data processing computer l!
Step 530) instructs the shape measuring machine 30 to measure the roughness of the workpiece 100.

When the roughness of the workpiece 100 is measured by the shape measuring machine 30, the data processing computer 11
The measurement results are received from and compared with predetermined set values (step 540).

When the roughness measurement result is not within the allowable range, the data processing computer 11 determines that corrective processing is necessary, outputs the measurement result to the printer 13, and moves the workpiece 100 to a predetermined reference position (steps S41 to 542). ). After this, the present control procedure is finished, a polishing machine suitable for the corrective polishing is selected, and the corrective polishing is performed again.

If the roughness measurement result is within the allowable range, the data processing computer 11 instructs the shape measuring machine 30 to measure the shape (step 360).

Then, when the shape measurement result is sent to the data processing computer 11 by the shape measuring machine 30, the data processing computer 11 compares the shape measurement result with a predetermined setting value (step 570).

If the shape measurement result is within the allowable range, workpiece 10
0, the data processing computer 11 outputs the shape measurement result to the printer 13, and also swings the swinging device 20 to the reference position to end this control procedure (steps 371 to 572).

If the shape measurement result is not within the allowable range, the data processing computer 1
Calculate the corrected position and corrected grinding amount of 00. and,
After instructing the workpiece 100 to be moved to the grinding machine 60, the data processing computer 11 sends information regarding the corrected position and corrected grinding amount to the grinding machine 60, and orders corrective grinding (step 580).

When the correction grinding by the grinding machine 60 is completed, step S2
0 and repeat the roughness and shape measurement steps described above. By repeating the above steps, the process of grinding the workpiece 100, measuring the shape, and correcting the grinding can be completed. Furthermore, depending on the roughness measurement results, it is also possible to automatically perform a corrective polishing process using the uniform polisher 40 and the corrective polisher 50.

FIG. 6 shows an example of the control procedure for the grinding process according to the embodiment of the present invention.

This control procedure mainly involves the control computer 63 of the grinding machine 60.
Executed by In FIG. 6, when a workpiece 100 is placed at a processing position of a grinding machine 60 by the data processing computer 11, the control computer 63 instructs the main shaft motor 61 to rotate at a set speed. Further, the rotation of the workpiece 100 is instructed to the indexing shaft motor 24 (steps S10-2 to S1O-3).

- The stage positioning device 62 is controlled so as to come into contact with a predetermined position on the stage 100 (step S1O-4).

Next, the control computer 63 starts a timer (not shown) for measuring machining time, and controls movement to a predetermined grinding position based on the sterogram (step S to -7).

When the timer measures the machining time, the control computer 63 stops each mechanism and motor and ends this control procedure (steps S10-8 to S510-10).

FIG. 7 shows an example of a control procedure for roughness measurement processing in this embodiment.

This control procedure is mainly processed by the control computer 37 of the shape measuring device 30. In FIG. 7, a workpiece 100 is placed at the initial measurement position of the shape measuring device 30 according to instructions from the data processing computer 11. Next, the control computer 37 drives the fine movement slide motor 33 and the coarse movement slide motor 36 to control the inclination angle measuring device 3.
4 in the direction of arrow A shown in the first figure, and tilt angle measuring device 34
Detect the in-focus position of the optical system (steps 520-1 to 520-1).
520-4).

Next, the control computer 37 switches the drive control of the fine movement slide motor 33 from low-speed drive control to focus control. Under this focus control condition, the fine movement slide motor 33
is driven (step 520-5).

Next, the control computer 37 instructs the swing motor 23 to slightly move the workpiece 100 to the measurement start position. When the workpiece 100 reaches the measurement start position, the swing motor is driven at a constant speed, and the tilt angle of the machined surface of the workpiece 100 is measured by the tilt angle measuring device 34 at every fixed swing angle.

The fine movement distance of the tilt angle measuring device 34 and the focus error amount of the optical system at the time of tilt angle sampling are also stored in the control computer 37 by the fine movement slide position detector 32 (steps 520-6 to 52o). −
a).

When the measurement of the inclination angle is completed, each of the motors is stopped, and the roughness of the workpiece 100 is calculated based on the sampling data (steps S20-9 to S520-12). Note that this control procedure ends when measuring another workpiece cross section (steps S20-13 to S520-16).

FIG. 8 shows an example of a control procedure for shape measurement processing in this embodiment.

Note that in FIG. 8, the workpiece movement control procedure for shape measurement (steps 580-1 to 380-13) is the same as the workpiece movement control procedure for inclination angle measurement shown in FIG. 7, so the explanation will be omitted. .

After the distance to the workpiece 100, the inclination angle, etc. are measured by the processing procedure of steps S80-1 to 580-13, the control computer 37 calculates the surface shape map, smoothness, etc. of the workpiece 100 based on the measurement information. and calculate the amount of eccentricity.

Further, the control computer 37 calculates the difference between the shape data and the reference shape data, calculates shape error data, and ends this control procedure (steps 580-14 to 580-1).
8). Note that, as described above, the roughness measurement control procedure and the shape measurement procedure are almost the same, so when moving the workpiece 100,
Roughness and shape measurements may be taken and the measurement results stored in the control computer 37.

FIG. 9 shows another control procedure for shape measurement in this embodiment. In this control procedure, the sampling position of the work 100 is set on a concentric circle of the work 100.

For this reason, the control procedure (step S 8
0-7 to 580-13), the workpiece 100 is rotated by the rotation motor 23, whereas in this control procedure (steps S85-7 to 585-131), the workpiece 100 is rotated by the indexing motor 24. Rotate and move.

In this embodiment, an example was shown in which the steps of grinding -> shape measurement - corrective grinding are automatically processed, but depending on the shape measurement result of the workpiece 100, partial corrective polishing or uniform polishing may be necessary. At this time, for example, the correction polishing machine 50 and the shape measuring machine 3
0 and execute the control procedures illustrated in FIGS. 5 to 9. As a result, automatic processing of corrective polishing, shape measurement, and recorrective polishing becomes possible. Therefore, it goes without saying that this embodiment can be applied to both grinding machines and polishing machines.

Further, if a grinding machine having means that allows the grinding tool of the grinding machine 60 in this embodiment to be replaced with a tool for uniform polishing and a tool for corrective polishing is used, there is no need to provide a uniform polishing machine or a corrective polishing machine.

Alternatively, various grinding machines may be arranged in a straight line and the workpiece 100 may be moved in a straight line.

Furthermore, if a plurality of shape measuring machines 30 and grinding machines 60 are arranged at equal intervals around the turning device 20, and the same number of work holding devices 70 are also provided in the turning device 20, a plurality of workpieces can be held at the same time. It is also possible to carry out 100 grinding and shape measurement processes.

[Effects of the Invention] As explained above, according to the present invention, grinding processing, shape measurement processing, and correction grinding processing, which were conventionally performed individually, can be performed automatically, thereby shortening the processing time. Moreover, since there is no need to remove the workpiece from the holding device, it is possible to obtain the effect that correction processing becomes easy.

[Brief explanation of drawings]

1 is a plan view showing an example of the configuration of an embodiment of the present invention; FIGS. 2 and 3 are sectional views of FIG. 1; FIG. 4 is a block diagram showing an example of the circuit configuration of the embodiment of the present invention; 5 to 9 are flowcharts showing the control procedure of the embodiment of the present invention. IO... Main control device, 20... Swivel device, 30... Shape measuring machine, 40... Equal polishing machine, 50... Correction polishing machine, 60... Grinding machine. Figure 6

Claims (1)

[Scope of Claims] 1) A storage means for storing information regarding the grinding of the workpiece; a grinding means for grinding the workpiece based on the information regarding the grinding stored in the storage means; a shape measuring means for measuring the shape of the workpiece ground by the grinding means; a determining means for determining whether or not it is necessary to modify the workpiece based on the measurement result by the shape measuring means; When the determining means determines that the workpiece needs to be corrected, means for deriving information regarding corrective grinding of the workpiece based on the measurement results; and means for instructing the grinding means to perform correction grinding of the workpiece when the determination means determines that the workpiece needs to be corrected. Characteristic grinding equipment. 2) In the grinding apparatus according to claim 1, when the grinding by the grinding means is completed, the workpiece is moved from the grinding means to the shape measuring means, and the workpiece is measured by the determining means. A grinding apparatus characterized in that when it is determined that the workpiece needs to be corrected, the workpiece is moved from the shape measuring means to the grinding means.