JPH09285943A - Precision work machine from workpiece reference face - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve precision so as to eliminate dispersion in a finishing dimension by carrying out measurement of a workpiece height and detection of a contact point with a grinding wheel on the basis of an inputted machining condition, unifying and correcting dispersion in initial grinding finishing dimension, and feeding back this corrected dimension to the following process. SOLUTION: A contact time is measured by means of a zero point detecting means 6 for a workpiece 1 interlockingly with a robot hand 2. A Z-axis mechanism unit 7, which moves the robot hand 2 and the zero point detecting means 6 in the Z-axis direction when working feeding and measurement are carried out, is provided. A table 9 for measuring a height of the workpiece 1 and an X-axis mechanism unit 10, in which a working member machining the workpiece from the reference face is installed, are provided. On the basis of the inputted machining condition, height measurement of the workpiece 1 and detection of a contact point with a grinding wheel are carried out by means of a single measuring means through a Z-axis controller controlling the Z-axis mechanism unit 7, a controller controlling the X-axis mechanism unit 10, and a rotation controller controlling the rotation of the working member. In this way, dispersion in finishing dimension is corrected uniformly so as to be fed back to the following process.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a precision machining apparatus, and more particularly to an apparatus suitable for use in grinding a dielectric element or the like, which automatically measures the existing height of the element and determines its value. The present invention relates to a grinding device capable of correcting a specified grinding amount and performing precise grinding.

[0002]

2. Description of the Related Art Conventionally, in the processing of dielectric elements and the like, a specified amount has been ground from the lower part of a work from a reference surface of the work. In such processing, the work is lowered in the Z-axis direction at an arbitrary point on the processing surface of the grindstone, the reaction force applied at the time of contact is detected by a digital indicator, and the grindstone is rotated and rocked from that point to move the grindstone. Grinding while extending the service life, the grinding was stopped when the size reached the specified size, and after grinding, another unit was used to measure whether or not the size was the specified size and to select the quality.

FIG. 12 shows a configuration example of a conventional processing apparatus.
After the height of the work is measured by the table 9A and the digital indicator 5A, the work is processed by the processing device. At that time, the workpiece reference surface clamped by the robot hand 2 is moved downward by the Z-axis mechanism portion 7 and is brought into contact with the grindstone 8-1 via the piston by the pressure supplied by the pump P, and by the rotation of the grindstone. Grinding is done. At that time, the water nozzle 8-4 supplies the grinding water between the grindstone and the work 1 to remove the grinding powder, and the rocking motion is started to extend the life (grinding accuracy) of the grindstone. Perform processing. In this conventional apparatus, the zero-point detection unit 6 includes a mechanism that slides from three directions for clamping the side surface of the work 1 and clamps the work 1, and a mechanism that receives a reaction force from the work reference surface 1-1. A piston 3 is fastened to the robot hand 2 and is incorporated in a cylinder 4 which is slidable in the direction perpendicular to the Z-axis, and a digital indicator 5 for detecting a fine movement of the piston 3 in the Z-axis direction, a probe 5-1.
And a digital indicator 5A for measuring the height on the table 9A, a digital indicator 5 provided in the zero point detection mechanism section 6, and two measuring instruments are required.

Further, referring to FIG. 13, the control system of the conventional apparatus reads the data from the digital indicator 5A from the digital indicator for measuring the work height and the digital indicator 5 for detecting the zero point, and reads the data. The reading controller 102, the Z-axis controller 103 that controls the Z-axis motor, the rotation speed controller 104 that controls the rotation speed of the spindle servo motor 8-3, the X-axis controller 105 that controls the X-axis servo motor, and these. It is composed of a CPU 101 which controls the control.

[0005]

However, the above-mentioned conventional method has the following problems.

The first problem is that the point of contact with the grindstone is arbitrary, and the finished dimension varies with respect to the specified precision dimension of, for example, several μ units, resulting in defective products. .

The reason for this is that the conventional method does not consider the difference in surface accuracy of the grindstone when contacting the grindstone.
In addition, the pressure applied to the grindstone is constant regardless of the shape of the contact surface of the work, and the deflection with respect to the size of the work is not considered.
This is because the point size detection method changes the finished size.

The second problem is that it takes time to measure the work.

The reason for this is that since the grinding and measurement of the work are separated, it takes time to convey the work.

In Japanese Patent Laid-Open Publication No. 57-163053, a means for storing a rough polishing program obtained by sliding a rough-polished workpiece is provided, and in the case of performing top-finish polishing, A configuration has been proposed in which only the top-finishing polishing dimension is input from the outside to perform the top-finishing polishing according to the rough polishing program.

Therefore, the present invention has been made in order to solve the above-mentioned problems, and its purpose is to accurately measure the machining of a work, eliminate variations in finished dimensions, and measure from the machining. The purpose of the present invention is to provide a processing device that can reduce the time required for automation and can be automated.

[0012]

In order to achieve the above object, the present invention provides a robot hand for gripping a work and a zero point detecting means which is interlocked with the robot hand to detect and measure the contact time of the work. A Z-axis mechanism unit that moves the robot hand and the zero-point detecting means in the Z-axis direction during processing feed and measurement; a table for measuring the height of the work; and a processing for processing from a reference plane. An X-axis mechanism part having a machining member attached thereto, and a Z-axis controller for controlling the Z-axis mechanism part based on the inputted machining conditions, a controller for controlling the X-axis mechanism part, and the machining member. The height of the workpiece and the detection of the contact point with the grindstone are measured by one measuring means via a rotation controller for controlling the rotation, and the variation in the finish dimension of the initial grinding is made constant to correct it. It is fed back to the processing of later, to provide a precision machining apparatus of the workpiece reference surface, characterized in that.

Based on the above-mentioned structure, the present invention controls the rotation start and end positions of the grindstone, so that 0 is always inspected and processed at the same point.
That is, the mechanical error is kept constant, and the difference between the actual measured value after machining and the specified value is calculated and fed back as the correction data for the next machining of the workpiece for accurate machining, as well as the machining process and measurement process. It is characterized in that the processing and measurement units can be omitted by incorporating the above into one device.

According to the present invention, since the contact point with the grindstone is always fixed at a predetermined position, the mechanical error is always kept constant, so that the variation width is small and the mechanical error is designated by the designated grinding amount. Can be corrected and the work can be processed accurately.

Further, according to the present invention, the height of the work and
Since the detection at the time of contact with the grindstone can be processed by one digital indicator, the device configuration can be simplified at a low cost in the process of measurement → processing → measurement.

[0016]

Next, embodiments of the present invention will be described in detail with reference to the drawings.

FIG. 1 is a diagram for explaining an example of a work 1 which is a workpiece to which the embodiment of the present invention is applied, and FIGS. 1A and 1B respectively show the same. FIG. 1C shows a side view before and after processing, and FIG. 1C shows a bottom view of a work reference plane.

Referring to FIG. 1, the work 1 is machined by machining a work reference surface 1-opposing a mounting member 1-3 to a unit.
The specified amount 1-2 is ground from 1.

The mechanical system of the processing apparatus according to the embodiment of the present invention will be described below with reference to FIGS. 2 and 3.

Referring to FIG. 2, the zero-point detector 6 slides from three directions for clamping the side surface of the work 1 and clamps the work 1 with a pawl 2-1 (see FIG. 3A). A robot hand 2 composed of a stopper 2-2 that receives a reaction force from the work reference surface 1-1 and a piston 3 are fastened to the robot hand 2 without any play.
A cylinder 4, which is slidable vertically in the Z-axis direction, is precision-processed and incorporated, and an indicator 5 and a probe 5-1 for detecting fine movement of the piston 3 in the Z-axis direction are provided on the side opposite to the robot hand 2. The cylinder 4 is provided and configured.

The Z-axis mechanism section 7 is connected to the 0-point detection section 6 via a Z-axis table 7-11, and moves in the Z-axis direction by driving the Z-axis motor 7-2.

The grinding mechanism section 8 includes a grindstone 8-1 and a grindstone 8-.
And a spindle motor 8-3 for rotating and driving the motor 1 and are arranged perpendicularly to the Z-axis mechanism portion 7.

The X-axis mechanism section 10 connects the grinding mechanism section 8 and the height measuring table 9 with the X-axis table 10-1, and moves in the X-axis direction by driving the X-axis motor 10-2.

The pressure adjusting unit 11 is a pump 11-1 for pressing the work 1 via the cylinder 4 of the zero point detecting unit 6.
And an electric regulator 11-2 that controls the pressure of the pump 11-1 so as to apply a constant surface pressure corresponding to the shape of the work reference surface 1-1, and is attached after the work 1 is processed. The workpiece 1 and the height measuring table 9 are provided with a dust nozzle 11-4 for removing dust and a valve 11-3 for supplying the pressure of the pump 11-1.

FIG. 3A shows the pawl 2 of the robot hand 2.
It is a figure which shows a mode when the workpiece side surface by -1 is clamped. Further, FIG. 3B is a plan view showing the arrangement of the work on the work height measuring table 9 and the grindstone 8-1.

Next, in order to describe the embodiment of the present invention in more detail, an example of the control system will be described below. FIG. 4 shows the configuration of a control system according to an embodiment of the present invention.

Referring to FIG. 4, a data reading controller 102 for reading the data of the digital indicator 5 for detecting the movement amount of the piston 3 which is slightly moved by the reaction force applied to the robot hand 2 via the work reference surface 1-1. Work 1
The rotation position controller 106 that controls the position where the wheel abuts the grindstone 8-1 to a constant position via the spindle motor 8-3, and the rotation of the grindstone 8-1 when grinding the workpiece 1 via the spindle motor 8-3. And the rotation speed controller 104, and these rotation controllers 104, 1
Switching device 115 for switching 06 and work height measuring position 8
-6, a workpiece grinding area 8-2, a rotation and swing origin position 8-5, an X-axis controller 105 that numerically controls the X-axis motor 10-2, and an electric type that controls the pressure to the workpiece 1. Regulator 11-2,
Valve 11-3 that controls the ON / OFF of air to clean the dust adhered to the work 1 and the measurement surface
The CPU 101 is responsible for these controls.

Next, the details of the operation steps of the embodiment of the present invention will be described in detail with reference to FIG. 1 and FIGS. 5 to 8 and FIGS.

Referring to FIG. 5, processing conditions are input to the CPU 101 in step S1. As the predetermined processing conditions, as shown in FIG.
Is clamped by the pawl 2-1 of the 0-point detector 6, and the height data for moving to the center of the height measuring table 9 and the stopper 2-2 are applied to the abutting portion 1-4 of the work 1. The height correction value (H ₁ ) when touching, the pressing value corresponding to the shape of the work 1, the processing speed, the specified processing amount ( _HL ), etc. are input, and the data is processed based on the input data, and the process Proceed.

Next, in step S2, step S
Based on the data input in 1, the electric regulator 11
-2 controls the pressure of the pump 11-1 and supplies it to the cylinder 4 so that the pressure at which the work 1 abuts the height measurement table 9 is made constant and deformation of the work 1 (breaking or cracking) is prevented. To do.

Next, in step S3, absolute value detection processing, that is, 0-point detection processing is performed. This is A in FIG.
In steps 1 and A2, the absolute position of the height measurement table 9 is detected and the position is calculated.

The absolute position detection method in step S3 is a common process, and is called as a subroutine in the flow chart shown in FIG.
Is shown as a flow chart.

Referring to FIG. 8, the Z-axis is lowered (step S81), and the pawl 2-1 of the robot hand 2 moves to the work 1.
In the state where the workpiece is clamped, the digital indicator 5 detects a slight movement that pushes up the piston 3 in response to a reaction force in the process of abutting against the abutted portion of the workpiece reference surface 1-1 via the probe 5-1. (Step S82), the value is input to the CPU 101 via the data reading controller 102, the value is received, and the lowering of the Z axis is stopped.

The numerical data of the Z-axis controller 103 at that time and the value of the above-mentioned digital indicator 5 are calculated, and the measured value (zero height point position = H ₀ ) is held as an absolute position. That is, in the subroutine read processing of step S3, the position of the height 0 point is measured value (= Z-axis stop position +
The value of the digital indicator) is returned.

Referring again to FIG. 5, steps S4 to S6
Is a process for indexing the pre-machining height of the work 1, in which the work 1 is centered by the clamp operation of the pawl 2-1 of the robot hand 2 in steps A3 to A5 of FIG. That is, the 0-point detection mechanism 6 is raised in step S4, the work 1 is set on the height measurement table 9 in step S5, and in step S6, A of FIG.
As shown in FIG. 5, the workpiece 1 on the height measurement table 9
Centering processing is performed (see FIG. 3B).

Next, in step S7, the absolute value detecting process shown in FIG. 8 is called, and the height measuring process of the work 1 is performed. That is, the Z-axis is lowered similarly to the process of step S3, and in the state of A6 in FIG. 10, the stopper 2-2 hits the abutting portion 1-3 of the work 1 centered on the height measuring table 9. Upon contact, the value of the digital indicator 5 changes. At that time, the Z axis is stopped, and the work height position (H ₂ ) is calculated and held by the value of the digital indicator 5 and the numerical data when the Z axis controller 13, that is, the Z axis servo motor 7-2 is stopped. .

Next, in step S8, step S
The workpiece height position (H ₂ ) of _No. 7, the zero point position (H ₀ ) at step S3 and the height correction value (H ₁ ) at step S1 are processed by the following formula (1). It is the previous work height (H).

Work height (H) = H ₂ −H ₀ + H ₁ (1)

In step S9, when the work 1 is processed, the work clamping process A7 in FIG.
8 is moved up in the Z-axis direction, the grindstone 8-1 on the X-axis is moved to the X-axis workpiece machining origin 8-7 (see FIG. 3B).

Referring to FIG. 6, in step S10, the switch 15 is switched to the rotational position controller 14-2 side, and as shown in FIG.
-2, it is moved to the rotation origin 8-6 via the spindle servo motor 8-3, and the origin is set in the rotation axis direction.

By the processing of step S9 and step S10, the workpiece 1 clamped by the Z-axis robot hand 2 can be always positioned at the same position with respect to the machining, whereby the unevenness of the surface accuracy of the grindstone 8-1 can be obtained. It is possible to process in consideration of the height difference.

In step S11, in the same manner as in step S2, the electric regulator 11-2 is provided in order to make a mechanical error such as a deflection on the work side constant when the reference surface 1-1 of the work 1 comes into contact with the grindstone. Is controlled to a predetermined setting, and the pressure at the time of contact is set.

In step S12, the Z-axis is lowered to bring the workpiece 1 into contact with the grindstone 8-1 as shown in FIG. 1, and the digital indicator fluctuates due to the reaction force as in the operation of step S3. Upon receiving the data of 5, the Z axis is stopped. The contact position (H ₃ ) of the grindstone 8-1 at that time is held.

The step S13 is the same as the step S12.
Processing specified amounts to the contact position of the grinding wheel 8-1 (H ₃₎ to (H _L) was added, and calculates the processing designated position (H ₄₎ as in the following equation (2).

H ₄ = H ₃ + H _L (2)

In step S14, the Z-axis is raised and the work 1 is once released from the grindstone 8-1.

Then, in steps S16 to S21,
The switching device 15 is switched to the rotation speed controller side, and the rotation speed controller 14-1 rotates the magnet 8-1 via the spindle servo motor 8-3 (step S16) to bring the Z-axis into contact with the machining speed pre-input. (Step S18), the water nozzle 8-4 supplies the grinding water between the grindstone and the work 1 to remove the grinding powder, and starts the swinging motion to extend the life of the grindstone (grinding accuracy). Then, the work 1 is processed (step S20).

In step S22, the value of the digital indicator 5 is detected as to whether the Z-axis has reached the machining dimension of the work 1 and the work 1 can be machined normally.
If so, end.

Referring to FIG. 7, steps S23 to S24
Is to check whether or not the swing reciprocating operation is completed and stop moving to the swing origin position. As processing after the normal feeding operation, machining that occurs due to the height difference of the unevenness of the surface accuracy of the grindstone 8-1. In order to keep the error constant, the grindstone effective area 8-2 is brought into contact with the tool to correct the variation between the designated value and the actual machining value. The difference between the designated value and the actual machining value generated by this operation is used as the post-processing correction.

In steps S25 to S31, the difference between the designated value and the actual machining value produced in the machining process is calculated.
In the process of measuring the post-machining height position (H ₅ ) of the work 1 after machining, dust such as grinding powder to the work 1 after machining is turned on by the valve 11-3 to turn on air from the dust removing nozzle 11-4. Blow away to eliminate measurement error. That is, the workpiece 1 that has been ground is raised in the Z-axis direction (step S25), the rotation of the grindstone 8-1 is stopped (step S26), and the workpiece 1 that has been ground is X-processed.
Move to the axis height measurement table 9 (step S27),
The Z-axis is lowered (step S28), the Z-axis height position is stopped (step S29), and the air is removed by the dust removal nozzle 11
-4 is blown away and removed (step S30), and the work height is measured (step S31). The height of the work after processing at this time is H ₅ .

In step S32, the dimension after machining and the designated amount of machining are compared to calculate a correction value, and the work height position (H ₅ ) after machining is calculated from the work height 0 point position (H ₀ ). Subtract and calculate the work height (H ') after machining (see the following formula (3)), subtract the work height (H') after machining from the work height (H) before machining, and calculate the actual machining amount. (H _L ') is calculated (see equation (4)), the processing specified amount (H _L) and the actual processing amount (H _L' calculates a difference), as the correction value (H ₆₎ (following formula ( 5)), and in the determination in step S15, after the first time,
By correcting the correction value (H ₆ ) to the designated processing amount ( _HL ) (see step S15A in FIG. 6), the work 1 can be accurately measured.
Can be processed.

Work height after processing H ′ = H ₀ −H ₅ (3)

Actual machining amount _HL '= H-H' (4)

Correction value H ₆ = _{HL- HL} '(5)

[0055]

As described above, according to the present invention,
By providing the function of always holding the processing conditions constant, there is an effect that a mechanical error can be made constant during processing. The work can be machined with high accuracy by correcting a fixed value to the specified machining amount.

Further, according to the present invention, the digital indicator (measuring instrument) of the measuring section is omitted. As a result, the device configuration can be simplified and the device can be provided at low cost.

The reason is that the work measurement and the work contact detection can be processed by one digital indicator (measuring instrument).

[Brief description of drawings]

FIG. 1 is a diagram for explaining an embodiment of the present invention, and is a plan view and a bottom view showing a shape of a work.

FIG. 2 is a diagram showing a configuration of a precision processing device according to an embodiment of the present invention.

FIG. 3 is a diagram showing a configuration of a precision processing device according to an embodiment of the present invention.

FIG. 4 is a block diagram of a control system of the precision machining device according to the embodiment of the present invention.

FIG. 5 is a flowchart for explaining a processing operation according to the embodiment of the present invention.

FIG. 6 is a flowchart for explaining a processing operation according to the embodiment of the present invention.

FIG. 7 is a flowchart illustrating a processing operation according to the embodiment of this invention.

FIG. 8 is a flowchart illustrating a processing operation (absolute value detection processing) according to the embodiment of this invention.

FIG. 9 is a diagram when the robot hand of the precision processing device according to the embodiment of the present invention clamps a work.

FIG. 10 is a diagram schematically showing the processing operation according to the embodiment of the present invention in the order of steps.

FIG. 11 is a diagram showing movement of a grindstone to a rotation origin in a processing step in the embodiment of the present invention.

FIG. 12 is a diagram showing a configuration of a conventional processing device from a reference plane.

FIG. 13 is a diagram showing a conventional control system of a processing apparatus from a reference plane.

[Explanation of symbols]

 1 Work 1-1 Reference surface 1-2 Work mounting member 2 Robot hand 2-1 Pawl 2-2 Stopper 3 Piston 4 Cylinder 5 Digital indicator 5-1 Measuring element 6 0 point detection mechanism section 7 Z axis mechanism section 7-1 Z-axis table 7-2 Z-axis servo motor 8 Grinding mechanism section 8-1 Grindstone 8-2 Grindstone effective area 8-3 Spindle servomotor 8-4 Water nozzle 8-5 X-axis height measurement position 8-6 Rotation origin 8 -7 X-axis workpiece machining origin 9 Height measurement table 10 X-axis mechanism section 10-1 X-axis table 10-2 X-axis servo motor 11 Pressure adjustment section 11-1 Pump 11-2 Electric regulator 11-3 Valve 11- 4 Dust removal nozzle 101 CPU 102 Data reading controller 103 Z-axis controller 104 Rotation speed controller 106 Rotation position Controller 105 X-axis controller 115 switcher 18 manual regulator 19 Height digital indicator 1-3 abutment portion

Continuation of front page (51) Int.Cl. ⁶ Identification number Office reference number FI technical display location G05B 19/18 G05B 19/18 A

Claims (5)

[Claims] 1. A robot hand for gripping a work, a zero point detecting means which is interlocked with the robot hand to detect and measure the contact time of the work, and the robot hand and the zero point detecting means are fed and measured. A Z-axis mechanism section for moving in the Z-axis direction at any time, a table for measuring the height of the work, and an X-axis mechanism section equipped with a machining member for machining from the reference plane are input. Based on the machining conditions, the height of the workpiece is measured through a Z-axis controller that controls the Z-axis mechanism unit, a controller that controls the X-axis mechanism unit, and a rotation controller that controls the rotation of the machining member. The contact point to the grindstone is detected by one measuring means, and the variation of the finish dimension of the initial grinding is made constant and corrected,
A precision machining device from the workpiece reference surface, which feeds back to subsequent machining. 2. A robot hand having a stopper for receiving a reaction force from a work reference surface and a pawl for clamping a side surface of the work, a piston having one end connected to the robot hand, and the piston. The precision machining apparatus according to claim 1, further comprising: a guiding cylinder, and a digital indicator that detects a fine movement of the piston. 3. The X-axis mechanism section supplies a processing member for grinding the workpiece, a grinding mechanism section which is coupled to the processing member and rotationally driven, and a grinding water for avoiding clogging of the processing member. 2. The precision machining according to claim 1, further comprising: means for setting a workpiece at a fixed position and a measuring table for holding the fixed position, and driving these in a horizontal direction with respect to a reference plane of the workpiece. apparatus. 4. A pump for applying pressure to the work to the X-axis mechanism through the cylinder of the zero point detecting means, and a constant surface pressure corresponding to the shape of the work through a reference surface thereof. The precision machining apparatus according to claim 1, further comprising: a pressure drive unit including an electric regulator. 5. A data reading controller for controlling the position of the Z-axis drive unit and reading data of a digital indicator for detecting a movement amount of a piston which is slightly moved by a reaction force applied to the robot hand via a work reference surface. , A rotary position controller for controlling a constant contact position of a workpiece with a processing member, a rotary speed controller for controlling a rotary speed of a workpiece during grinding, a switching means for switching between them, and a predetermined position of the X axis. It has an X-axis controller, a valve that removes the dust adhering to the work and the measurement table after machining the work, and a CPU that controls the overall operation of the work. The CPU automatically controls the work after setting the work. The current height position of the work is indexed by and the dust is removed after rough cutting by inputting the specified grinding amount. The measurement poured, and calculates the measured value to the specified value after roughing, and correcting the finishing amount based on these calculation data, precision machining apparatus of the reference plane according to claim 1, wherein.