JP2854711B2 - Fe-Ni alloy - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to an Fe—Ni alloy having a small coefficient of thermal expansion.

BACKGROUND ART For example, 42wt% Ni-Fe and 29wt% Ni-17wt% Co-Fe
An Fe-Ni alloy is known as a low thermal expansion alloy having a small coefficient of thermal expansion. These Fe-Ni alloys are used for applications requiring low thermal expansion, such as lead frame materials used for manufacturing IC packages and the like, cathode ray tube component materials for cathode ray tubes, electron tube component materials, sealing materials, and the like. ing.

For example, as an example of a cathode ray tube component material,
A plurality of electrodes for converging or deflecting the electron beam emitted from the cathode are arranged in the cathode ray tube. It is essential that the constituent materials of these electrodes have a small coefficient of thermal expansion so that thermal expansion during operation of the cathode ray tube does not cause disturbance in the flight of the electron beam. Therefore,
The above-mentioned Fe-Ni alloy is used. Also,
Even in shadow masks and the like arranged in a cathode ray tube,
For the same reason, an Fe-Ni alloy is used.

However, although the conventional Fe-Ni-based alloy was satisfactory in terms of the coefficient of thermal expansion, it had the following drawbacks, and it was strongly desired to solve them.

For example, a conventional Fe-Ni alloy has a disadvantage that burrs generated during press punching are large. If a material having a large burr at the punched portion is used as a component material for a cathode ray tube, a problem occurs that the electron beam characteristics are adversely affected. This problem is the same when used as a component material for electron tubes. In addition, when used as a lead frame material, if the generated burrs are large, problems such as a reduction in the number of times of bending of the lead and a shortening of the life of the press die are caused. Even in the sealing material, if the burrs are located at the sealing portion with the glass, cracks are easily generated therefrom, which adversely affects the component characteristics.

On the other hand, in recent years, thinner lead frames and more pins have been promoted as semiconductor devices become more highly integrated. Under such circumstances, a lead frame material made of a conventional Fe-Ni alloy cannot form a fine pattern with good reproducibility, and has insufficient mechanical strength and heat resistance. Such problems are not limited to lead frame materials.For example, in the case of cathode ray tube component materials, if their mechanical strength and heat resistance are insufficient, they are significantly softened by heat treatment before assembling the components, resulting in poor handling and reduced assembling. This leads to problems such as easy deformation.

In addition, since conventional Fe-Ni alloys generally have a large amount of dissolved gas, when used as a cathode ray tube component material or an electron tube component material, the amount of gas released in a vacuum increases, and the cathode ray tube or the electron tube , The degree of vacuum was lowered, and the characteristics of the product itself were lowered.

The present invention has been made to address such problems, and has improved mechanical strength, heat resistance, and the like, and is excellent in workability such as punching properties, and further, glass discharge in vacuum. An object is to provide an Fe-Ni-based alloy having a small amount.

DISCLOSURE OF THE INVENTION The Fe-Ni alloy of the present invention contains 25% by weight to 55% by weight of Ni,
0.001% by weight to 0.1% by weight of C, and 0.01% by weight of at least one element selected from group IVa elements and group Va elements.
6% by weight, with the balance being substantially Fe, excluding unavoidable impurities
An alloy consisting of, in this alloy structure, dispersed particles having a size of 20 μm or less containing carbides are 1000 particles / cm ^{2 to} 100000 particles / c.
It is characterized by being present in the range of m ² .

The reasons for limiting the composition of the Fe—Ni alloy of the present invention are as follows.

Nickel is an element that lowers the coefficient of thermal expansion. Even if it is less than 25% by weight or exceeds 55% by weight, the coefficient of thermal expansion increases, and the effect as a low thermal expansion alloy is impaired. A more preferred content of Ni is in the range of 36-50% by weight.

The carbon is one selected from the group IVa element and the group Va element.
It is a component that finely and uniformly disperses at least a part of the seed elements as carbides in the alloy structure, and as a result, improves mechanical strength and heat resistance and imparts appropriate punching properties. In addition, it functions as a deoxidizer at the time of melting. That is, the feature of the present invention resides in that carbon is intentionally added. The content of such carbon is in the range of 0.001% by weight to 0.1% by weight. When the content of carbon is less than 0.001% by weight, the effect of improving strength and heat resistance cannot be sufficiently obtained, and deoxidation during melting becomes insufficient. On the other hand, if it exceeds 0.1% by weight, the workability is reduced and the mechanical strength is too high, so that the pressability to various component shapes is significantly deteriorated. A more preferred content of carbon ranges from 0.01% to 0.05% by weight.

At least one element selected from Group IVa and Group Va elements is precipitated or crystallized as a simple substance, a compound such as carbide or nitride, an intermetallic compound with Fe, or the like, and dispersed in the alloy structure as dispersed particles. Exists. Thereby, while improving mechanical strength and heat resistance, an appropriate punching property is provided. Further, the dissolved gas component is fixed as carbide, nitride, or the like, and the amount of gas released in a vacuum is reduced. IV a
Group elements and Group Va elements are elements that are particularly likely to precipitate as carbides and nitrides. In addition, it is preferable to use at least one element selected from Nb and Ta as the above-mentioned elements, since the above-mentioned effects can be remarkably obtained.

The content of these IVa group elements and Va group elements is 0.01
% By weight to 6% by weight. The content of these elements
If the content is less than 0.01% by weight, these additional elements form a solid solution in the matrix, and the amount of dispersed particles composed of carbides becomes insufficient, so that the effect of improving strength and heat resistance cannot be sufficiently obtained.
In addition, the amount of outgassing increases. On the other hand, if the content exceeds 6% by weight, the workability is reduced and the mechanical strength is too high, so that the pressability to various component shapes is significantly deteriorated. A more preferred content of Group IVa and Group Va elements is in the range of 0.1% to 3% by weight. The above-mentioned IVa group element and Va group element may be used in combination of plural kinds of elements, or may be used alone. The content when a plurality of types of elements are used in combination is within the above range in total.

In the Fe-Ni alloy of the present invention, the content of S as an impurity is preferably less than 0.05% by weight. This is because when the S content is 0.05% by weight or more, the amount of gas released in vacuum increases. Mn added as a deoxidizing agent
In a range of about 2% by weight or less and other impurities such as P and Si in a range of about 0.1% by weight or less, do not impair the effects of the present invention.

As described above, the Fe—Ni-based alloy of the present invention is one in which dispersed particles containing carbides of a Group IVa element and a Group Va element are present in the alloy structure. Carbides are finely and uniformly dispersed in the alloy structure, so that the mechanical strength of the Fe-Ni alloy,
Effectively improves heat resistance, punching properties, etc. That is, the fine dispersion particles of the carbide are uniformly present in the alloy structure, whereby the effect of dispersion strengthening is further improved,
The mechanical strength is improved. In addition, the movement of dislocations during high heat is suppressed, and heat resistance such as softening is improved. further,
Due to the fine crystal structure of the dispersed particles, punchability is improved, and burrs can be reduced.

The dispersed particles preferably have a size of 20 μm or less, and the number of dispersed particles having such a size is 1000 / cm ² to
It is preferred to be present in the range of 100000 / cm ² . A more preferred number of the dispersed particles is in the range of 5000 / cm ^{2 to} 100000 / cm ² . If the size of the dispersed particles exceeds 20 μm, the effect of improving the strength and heat resistance cannot be sufficiently obtained, and the punching property is reduced, and the burrs around the punched holes (hereinafter, referred to as hole burrs) tend to increase. Become. Here, the size of the dispersed particles means the diameter of the smallest circle containing the dispersed particles. In addition, the number of dispersed particles is 1000 / cm ²
Even if less than, the effect of improving strength and heat resistance is not sufficiently obtained, and the punching property is reduced, the hole burr is large,
And the crack angle is likely to be small. Conversely, the number of dispersed particles
If it exceeds 100000 pieces / cm ² , workability such as rolling will be reduced.

The Fe—Ni alloy of the present invention is manufactured, for example, as follows.

That is, after melting and casting an alloy component satisfying the above alloy composition at a temperature of 1400 ° C. to 1600 ° C., about 1000 ° C.
Perform hot forging and / or hot rolling in a temperature range of ~ 1200 ° C, and then work at 30% ~ 80%
, And annealing at about 800 ° C. to 1100 ° C. for 5 minutes to 1 hour to obtain a desired Fe—Ni alloy material.

When used as a lead frame, for example, a plate having a desired thickness is formed by hot working or cold working, and then punched into a desired shape to finish the lead frame. The same applies to the case where it is used as a cathode ray tube component material or the like.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a view for explaining an evaluation method of a punching test, FIG. 2 is a plan view showing a shape of an embodiment in which an Fe-Ni alloy of the present invention is applied to a lead frame, FIG. 3 is a plan view showing the shape of an embodiment in which the Fe—Ni alloy of the present invention is applied to a cathode ray tube component material.

BEST MODE FOR CARRYING OUT THE INVENTION Next, the present invention will be described in more detail with reference to examples.

First, specific examples of the Fe—Ni-based alloy of the present invention and evaluation results thereof will be described.

Examples 1 to 23 Each alloy component having the composition shown in Table 1 was melted at about 1500 ° C. to cast an ingot, and then forged at a temperature of 1000 ° C. to 1200 ° C. to obtain a billet of 150 mm × 600 mm × L. Produced.

Next, each of the above billets is 1000 ° C. to 1200 mm to a thickness of 3.5 mm.
Hot rolling at a temperature of ℃, then cold working and about 950 ℃
× By repeating annealing for about 30 minutes, the thickness is reduced to 0.
A 3 mm plate was obtained. Furthermore, after performing cold working to 0.15 mm, annealing was performed at a temperature of about 950 ° C. for about 30 minutes to obtain a plate-shaped alloy sample.

The size and number of the dispersed particles in each of the plate-like alloy samples obtained as described above were measured in several visual fields from a 400-fold metallographic photograph. Table 2 shows the results.
The size of the dispersed particles is indicated by an average value. In addition, the following characteristics were evaluated using each of the plate-shaped alloy samples. Table 2 shows the results.

 Coefficient of thermal expansion Indicates the coefficient of thermal expansion at 30 ° C to 300 ° C.

Hardness Change Due to Heat Treatment Each plate sample was subjected to a heat treatment at 1050 ° C. for 10 minutes, and the hardness was measured before and after the heat treatment.

Punching property Each plate-shaped sample was subjected to a punching process by a press, and the hole burr height and crack angle were measured from the cross-sectional shape.

Outgassing For each plate sample, the amount of outgassing in a vacuum of 10 ^-7 Torr was measured.

Gas release rate The gas release rate of each plate sample in a vacuum of 10 ^-7 Torr was measured.

The evaluation in the punching test described above was based on the first
As shown in the figure, the angle θ between the fractured surface 1 and the punched surface 2 at the punched portion was measured as a crack angle, and the height h of the burr 3 at the end of the fractured surface 1 was measured as a hole burr height. here,
If the crack angle θ is small, the height of the burr 3 increases, and the burr 3 tends to fall to the hole side, causing various problems.

On the other hand, for comparison with the present invention, plate-like samples were similarly prepared using Fe-Ni-based alloys having compositions shown in Table 1 and out of the range of the present invention (Comparative Examples 1 to 6). The same evaluation as in the example was performed. The results are also shown in Table 2.

As is clear from the results in Table 2, the Fe
-Ni-based alloys have a low coefficient of thermal expansion, high hardness,
Moreover, it can be seen that the hardness does not decrease much even after the heat treatment at 1050 ° C. Further, the crack angle at the time of press punching is large, and the burr is small. That is, the punching property is excellent. Further, the amount of gas released in a vacuum is small.

From the above, lead frame materials, cathode ray tube component materials, electron tube component materials, sealing materials and other materials that require low thermal expansion, for example, when used as a lead frame material, when thinned In addition, mechanical strength, heat resistance, and the like can be satisfied, and furthermore, the reproducibility of the shape and the number of lead bending times can be improved.
In addition, when used as a cathode ray tube component material, it is possible to prevent adverse effects on electron beam characteristics, improve assemblability, etc., and reduce the amount of outgassing. Improvement can be achieved.

Next, an example in which the Fe—Ni-based alloy of the present invention is applied to a lead frame will be described.

First, using the above-described Fe-Ni alloy of Example 2, cold rolling and annealing at about 950 ° C. for about 30 minutes were repeated to obtain a 0.25 mm-thick plate. After this,
The plate-shaped Fe-Ni-based alloy was punched into a lead frame shape shown in FIG. 2 to obtain a desired lead frame 11.

Further, as a comparison with the present invention, the Fe of Comparative Example 1 described above was used.
A lead frame was similarly manufactured using a Ni-based alloy.

The hardness and the punching die life (total number of punches) of each of the lead frames thus obtained were measured. The lead frame according to Comparative Example 1 had a hardness (Hv) of 203 and a total number of punches of 850 × 10 ³ . In contrast, the lead frame according to Example 2 had a hardness (Hv) of 240 and a total number of punches of 1300 × 10 ³ , and it was confirmed that both the mechanical strength and the punching property were improved.

Next, an example in which the Fe—Ni alloy of the present invention is applied to a cathode ray tube component material will be described.

First, using the above-described Fe-Ni alloy of Example 1, cold rolling and annealing under the conditions of about 950 ° C. for about 30 minutes were repeated to complete a 0.175 mm thick plate. Thereafter, the plate-like Fe-Ni-based alloy was punched into a cathode ray tube component shape shown in FIG. 3 to obtain a desired cathode ray tube component 12.

Further, as a comparison with the present invention, the Fe of Comparative Example 2 described above was used.
Similarly, a cathode ray tube component was manufactured using a Ni-based alloy.

The cathode ray tube was assembled using each of the cathode ray tube components thus obtained, and the component deformation defect rate was measured. The defect ratio of the cathode ray tube component according to Comparative Example 2 was about 0.6.
%, Whereas the component for a cathode ray tube according to Example 1 was about 0.04%, confirming that the defect rate due to component deformation was greatly improved.

INDUSTRIAL APPLICABILITY As described above, the Fe-Ni-based alloy of the present invention satisfies a low coefficient of thermal expansion, has high hardness, has heat resistance, has excellent punching properties, and has a gas Low release. Therefore, for example, it is possible to provide an alloy material suitable for a lead frame material or a cathode ray tube component material.

──────────────────────────────────────────────────続 き Continuation of the front page (51) Int.Cl. ⁶ Identification symbol FI H01L 23/50 H01L 23/50 V (56) References JP-A-2-213450 (JP, A) JP-A-63-14842 ( JP, A) JP-A-57-207154 (JP, A) JP-A-60-255953 (JP, A) (58) Fields investigated (Int. Cl. ⁶ , DB name) C22C 19/00-19/05 C22C 38/00-38/60 H01L 23/488-23/50 H01J 29/07

Claims (6)

(57) [Claims] (1) Ni is 25% to 55% by weight, C is 0.001% to 0.1% by weight, and at least one element selected from group IVa and group Va is 0.01% to 6% by weight. % Included
The remainder is an alloy substantially composed of Fe excluding unavoidable impurities, and in this alloy structure, dispersed particles having a size of 20 μm or less containing carbides are present in a range of 1000 particles / cm ^{2 to} 100000 particles / cm ^2. An Fe-Ni-based alloy characterized in that: 2. The Fe—Ni-based alloy according to claim 1, wherein said group IVa element and Va
An Fe-Ni-based alloy comprising a carbide of at least one element selected from group elements. 3. The Fe—Ni-based alloy according to claim 1, wherein the element selected from the group IVa element and the group Va element is N
An Fe-Ni-based alloy, which is at least one element selected from b and Ta. 4. The Fe—Ni alloy according to claim 1, wherein the Fe—Ni alloy is a lead frame material or a cathode ray tube component material. 5. Ni is 25% by weight to 55% by weight, C is 0.001% by weight to 0.1% by weight, and at least one element selected from group IVa and group Va is 0.01% to 6% by weight. % Included
The remainder is an alloy substantially composed of Fe excluding unavoidable impurities, and in this alloy structure, dispersed particles having a size of 20 μm or less containing carbides are present in a range of 1000 particles / cm ^{2 to} 100000 particles / cm ^2. A lead frame using a Fe-Ni alloy. 6. Ni is 25% to 55% by weight, C is 0.001% to 0.1% by weight, and at least one element selected from group IVa and group Va is 0.01% to 6% by weight. % Included
The remainder is an alloy substantially composed of Fe excluding unavoidable impurities, and in this alloy structure, dispersed particles having a size of 20 μm or less containing carbides are present in a range of 1000 particles / cm ^{2 to} 100000 particles / cm ^2. A component for a cathode ray tube, characterized by using an Fe-Ni-based alloy as described above.