JP2853925B2 - IC test equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an IC tester for testing electrical contents of an IC.

[0002]

2. Description of the Related Art FIG. 5 is a schematic diagram of a conventional IC test apparatus of this kind. In the figure, reference numeral 1 denotes a tester main body for electrically testing an IC, and reference numeral 2 denotes a test head electrically connected to the tester main body 1 through a cable 3. 4 is a handler body to which the test head 2 is connected,
Reference numeral 5 denotes a loader unit for supplying the IC-containing pallets before the test to the handler body 4, and reference numeral 6 denotes an unloader unit for storing the IC-containing pallets after the test discharged from the handler body 4.

Next, the operation will be described. I before test
The pallet is supplied to the handler body 4 from the loader unit 5 into which the pallet containing C is loaded. Here, the IC in the pallet is electrically connected to the test head 2 and the cable 3
The electrical content is tested by the tester main body 1 through. Then, the pallet with the IC after the test is discharged from the handler body 4 and stored in the unloader section 6. Here, FIG. 5 shows a case where four test heads and handlers are provided for each tester main body.

[0004]

Since the conventional IC test apparatus is configured as described above, a handler main body connected to the test head of the tester main body and an IC mounted on the handler main body are connected to the test head. A loader section for supplying the loaded pallets and an unloader section for accommodating the pallets discharged from the handler main body were required, which required a large space.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and is intended to improve the space efficiency.
The purpose is to obtain a C test device .

[0006]

According to the IC test apparatus of the present invention, a pallet containing ICs is supplied from one loader unit to a pallet transfer unit, and a plurality of handler bodies provided from the pallet transfer unit are provided. Each pallet is supplied, and after testing, the pallets with ICs discharged from the respective handler bodies to the pallet transport section are discharged to one unloader section.

[0007]

According to the present invention, the pallet with the pre-test IC supplied to one loader unit is supplied to a plurality of handler bodies via a pallet transport unit, and the IC is tested. Then, the pallets with ICs after the test are discharged from the respective handler main bodies and stored in one unloader section via the pallet transport section.

[0008]

[Embodiment 1] An embodiment of the present invention will be described below with reference to the drawings. FIG.
In the figure, reference numeral 1 denotes a tester main body for electrically testing an IC, 2 denotes a test head electrically connected to the tester main body 1 through a cable 3, and 7 denotes a plurality of test heads 2 connected in parallel. Handler body,
8 is a loader section for loading a pallet with an IC before the test, 9
Is a common pallet transport section for transporting the pallets supplied from the loader section 8 to the respective handler bodies 7, and is configured in a straight line. Reference numeral 10 denotes an unloader unit that stores the pallets containing ICs after the test, which are discharged from the respective handler bodies 7 and sent by the pallet transport unit 9. Here, FIG. 1 shows a case where four test heads and a handler main body are provided for one tester main body.

Next, the operation will be described. I before test
The pallet is supplied to the pallet transporting unit 9 from the loader unit 8 into which the pallet containing C is loaded. The pallet transport unit 9
The pallets are supplied to the respective handler bodies 7. In each handler body 7, the IC in the pallet is electrically connected to the test head 2, and the electrical contents are tested by the tester body 1 through the cable 3.
After the test, the pallet with the IC is discharged from the handler body 7 to the pallet transport section 9 and is unloaded into the unloader section 10.
Sent to and stored.

Embodiment 2 FIG. FIG. 2 shows another embodiment, in which a loader and an unloader section 11 are installed at the same place.
The pallet transport unit supplies pallets from the unloader unit 11 to the respective handler bodies 7 and sends pallets discharged from the respective handler bodies 7 to the loader / unloader unit 11.

Next, the operation will be described. The pre-test IC-containing pallets loaded into the loader section in the loader / unloader section 11 are supplied to the pallet transport section 12 and supplied to the respective handler bodies 7. The pallets with ICs, which have been discharged from the handler bodies 7 after the test, are stored in the loader / unloader unit by the pallet transport unit 12.

Embodiment 3 FIG. FIG. 3 also shows another embodiment, in which a pallet supplied from a loader unit 8 and a pallet transport unit 13 for feeding the pallets to the respective handler bodies 7 and a pallet discharged from the respective handler bodies 7 are unloaded by an unloader unit 10. The pallet transport section 14 for discharging to the pallet is installed on both sides of the handler body 7.

Embodiment 4 FIG. FIG. 4 shows the tester body and the electric device in the embodiment of FIG.
When adding test heads that are
The corresponding handler body and the corresponding pallet transport unit
An example of a case of adding a, 9a are two handlers body 7a which is added a pallet carrying unit provided corresponding to 7b.

Embodiment 5 FIG. Also, FIG. 2, also in the embodiment of FIG. 3, handler body 7 installing additional, and it is of course possible to install the pallet carrying unit corresponding to an expansion has been handler body.

[0015]

As described above, according to the present invention, the pallets containing ICs before the test are supplied from one loader to the plurality of handler bodies arranged via the common pallet transporter, and the ICs after the test are provided. Since the loaded pallets are stored in one unloader section from each handler body via a common pallet transport section, a space-saving IC test apparatus can be obtained.

A tester electrically connected to the tester body.
When adding a strike head, the handler according to the number of strike heads
ー Easy expansion of main body and corresponding pallet transport section
The test head and handler body design changes even if the number of simultaneous testers increases.
There is no need to make any further changes and quick responses are possible.

[Brief description of the drawings]

FIG. 1 is a plan view of an IC test apparatus according to an embodiment of the present invention.

FIG. 2 is a plan view of an IC test apparatus showing another embodiment of the present invention.

FIG. 3 is a plan view of an IC test apparatus showing another embodiment of the present invention.

FIG. 4 is a plan view of an IC test apparatus showing an embodiment when the number of simultaneously measured testers in the embodiment of FIG. 1 is increased.

FIG. 5 is a plan view showing a conventional IC test apparatus.

[Explanation of symbols]

1 tester main body, 2 test head, 7 handler main body, 8 loader section, 9 pallet transport section, 10 unloader section.

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁶ , DB name) G01R 31/26 H01L 21/66 G01R 31/28-31/3193

Claims (4)

(57) [Claims] 1. A pallet which is connected to a test head electrically connected to a tester main body, a plurality of handler main bodies for testing an IC are arranged in parallel , and communicates with each handler main body to store an IC before the test. Supply,
It is equipped with a linear pallet transport unit that discharges the IC-containing pallets after the test from the respective handler bodies. An IC test apparatus, comprising: an unloader section for storing a pallet containing an IC after the test. 2. A pallet supply and discharge transport unit is arranged on one side of a plurality of handler bodies arranged in parallel.
The IC test apparatus according to claim 1 , wherein a loader section is disposed at one end of the transport section, and an unloader section is disposed at the other end . 3. A pallet supply and discharge transport unit is disposed on one side of a plurality of handler bodies arranged in parallel,
2. The IC test apparatus according to claim 1, wherein a common loader / unloader unit is provided for only one of them. 4. The pallet supply / transport unit and a pallet unload / transport unit separately provided on both sides of a plurality of handler bodies arranged in parallel, and a loader unit and an unloader unit are provided at one end of each transport unit. IC test equipment.