JP2852786B2 - Electrical connection member and method of manufacturing the same - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to an electrical connection member for electrically connecting electrical circuit components to each other and a method for manufacturing the same.

(Prior art)

As a method of electrically connecting electric circuit components to each other,
Wire bonding method, TAB (Tape Automated Bondin)
g) The method is known. However, in these methods, since the minimum pitch for preventing the adjacent connecting portions from contacting each other is relatively large, it is not possible to cope with a case where a small pitch between the connecting portions is required. There was a point.

In order to solve such a problem, the electric circuit components are electrically connected to each other by using an electric connection member having a configuration in which a plurality of conductive members are mutually insulated and held in an insulating holder. (JP-A-63-2222437, JP-A-63-224235, etc.).

FIG. 5 is a schematic diagram showing an electrical connection between electrical circuit components using such an electrical connection member, where 31 is an electrical connection member, and 32 and 33 are electrical circuit components to be connected. Show.
The electrical connection member 31 holds a plurality of rod-shaped conductive members 34 made of a metal or an alloy in a thin plate-shaped holder 35 made of an electrically insulating material by electrically insulating the respective conductive members 34 from each other. The conductive member 34 has bumps 38 at both ends.
And 39 project toward the electric circuit components 32 and 33 (FIG. 5 (a)). Then, the connection portion 36 of the one electric circuit component 32 and the bump 38 of the conductive member 34, and the connection portion 37 of the other electric circuit component 33 and the bump 39 of the conductive member 34 are respectively bonded by, for example, a thermocompression bonding method. The electric circuit components 32 and 33 are electrically connected to each other by alloying by a sonic heating method or the like (FIG. 5 (b)).

Meanwhile, one of the present applicants has proposed a method shown in FIG. 6 as a method of manufacturing the electrical connection member 31 (Japanese Patent Application No. 63-133401). First, a photosensitive resin 35a to be the holder 35 is applied onto a base 40 made of a conductive material (FIG. 6 (a)). Next, by exposing and developing a predetermined position in which the conductive member 34 is embedded in a later step, a hole 35b is formed in the photosensitive resin 35a to expose the base 40, and then the temperature is increased to remove the photosensitive resin 35a. It is cured (FIG. 6 (b)). Then, the base 40 in the vicinity of the hole 35b is etched to form a recess 41 below the hole 35b (FIG. 6 (c)).

Thereafter, the base 40 is plated with gold or the like, so that the conductive member 34 is filled in the concave portion 41 and the hole 35b, and the bump 39 is formed in the concave portion 41, and the photosensitive resin 35a is formed.
A bump 38 is formed on the upper surface (FIG. 6D). Thereafter, the electrical connection member 31 is completed by removing the base 40 by metal etching (FIG. 6 (e)).

[Problems to be solved by the invention]

By the way, the holding body 35 of the electrical connection member 31 as described above generally uses a photosensitive resin such as a polyimide resin, and its thickness is usually about 2 μm to 1 mm. Because of this,
When transporting and handling the electrical connection member 31,
When an excessive force is applied to 35, there is a problem that damage such as breakage is caused, and the conductive member 34 falls off due to a stress generated in the holder 35.

Further, during the production, the photosensitive resin 35a applied on the substrate 40 may shrink due to scattering of the solvent contained in the precure, especially the liquid resin, or may cause shrinkage of the resin and the resin.
Since there is a difference in the thermal expansion coefficient from 40, internal stress acts. For this reason, if the substrate 40 supporting the photosensitive resin 35a is removed from the state shown in FIG. 6D, the photosensitive resin 35a alone can withstand its own stress, and when an external force is applied. This may cause cracks or breakage, which may cause the conductive member 34 to fall off.

The present invention has been made in view of such circumstances, is easy to transport and handle, alleviates internal stresses generated in the holder during manufacturing, and prevents the conductive member from dropping from the holder and an electrical connection member. It is intended to provide a manufacturing method thereof.

[Means for solving the problem]

Electrical connection member according to the present invention, in a predetermined region set in the surface of the sheet-shaped holding member made of an electrical insulating material,
In an electrical connection member including a plurality of conductive members that are insulated from each other by the holder and that have both ends exposed on both surfaces of the holder, a portion of one surface of the holder that is not included in the predetermined region is It is characterized by having a substrate formed by lamination. Further, the method for manufacturing an electrical connection member according to the present invention includes the step of: After forming a plurality of holes extending from the surface of the body to the inside of the base, and filling each of these holes with a conductive member so that one end of the holes is exposed from the surface, the base is removed to remove the base. In a method of manufacturing an electrical connection member for exposing the other end of the conductive member from a back surface, the base is removed while leaving a portion not included in the predetermined region.

[Action]

The electrical connection member according to the present invention has a structure in which a base is laminated on one surface of a sheet-shaped holding body that is not included in a predetermined region set to equip a conductive member in the plane, and this laminated portion is Conveyance and handling are carried out using.

Further, the method for manufacturing an electrical connection member according to the present invention is characterized in that, when the base is removed after forming a hole provided with a conductive member in a predetermined area of the holder laminated on the base, the predetermined area is removed. Leave the part not included. Then, the internal stress acting on the holder is supported by the remaining base, and the internal stress generated in the holder is reduced.

〔Example〕

Hereinafter, the present invention will be described in detail with reference to the drawings showing the embodiments.

FIG. 1 shows a first embodiment of the electrical connection member according to the first invention of the present application.
FIG. 2 (f) is a cross-sectional view taken along the line II-II. FIG. 1 is a diagram viewed from the lower side of FIG. 2 (f). Substrate laminated with sheet-like holder 2a
1a, a plurality of conductive members 5a, 5a,.
Hole 6 with an opening corresponding to the rectangular area provided with
Are formed. That is, the base 1a is a sheet-like holding body.
In the area not included in the area set to include the conductive members 5a, 5a,... In the plane of 2a, it is laminated on one surface of the holder 2a. Further, a plurality of circular holes 7 are formed in the base 1a on both sides of the hole 6 in a state of being arranged in a row. I do.

In the electrical connection member configured as described above, the connection with the electric circuit component is performed by the holding member exposed from the hole 6 of the base 1a.
This is performed using the conductive member 5a provided in 2a. And
When the electrical connection member is transported or handled, a layered portion of the surrounding base 1a and the holder 2a is gripped, and the conductive member 5a of the holder 2a is provided as in the related art. An excessive force is not applied to the portion to be cut, and the holder 2b is not damaged and the conductive member 5b is not dropped. In addition, the provision of the hole 7 allows the electric connection member to be reliably held without slipping down. Further, it is easy to form a through hole in the holder 2a by communicating with the hole 7, and the transport and handling properties can be further improved.

In addition, the hole 7 is used for improving the transport and handling properties.
This is one example, and it is possible to leave the base in an appropriate shape other than the hole for achieving this purpose.

FIG. 2 is a schematic sectional view showing a manufacturing process according to the second invention of the present application for manufacturing the electrical connection member according to the first invention as described above, and as described above, the line II-II in FIG. 2 shows a manufacturing process of a cross section.

2 (a) to 2 (d) are the same as the above-mentioned conventional method. For example, a copper foil is used as the base 1a, and a negative polyimide resin is used as the insulating layer 2 serving as the holder 2a on the base 1. Is applied and prebaked to prepare a base material (FIG. 2 (a)). Next, the insulating layer 2 is irradiated with light (exposure) through a photomask on which the arrangement pattern of the conductive members is formed, and development is performed. In the present embodiment, the polyimide resin remains after development in the portion irradiated with light, and the polyimide resin is removed by development in the portion not irradiated with light to form a plurality of holes 3 (FIG. 2 (b)). )). Thereafter, the temperature is increased to cure the polyimide resin, and the insulating layer 2 is cured.

Next, the substrate 1 exposed by the hole 3 is etched to form a concave portion 4 communicating with the hole 3 in the substrate 1 (FIG. 2 (c)).

Next, by plating the base 1 with gold or the like, the recesses 4 and the holes 3 are filled with the conductive member 5a, the bumps 51a are formed in the recesses 4, and the bumps 5a are formed on the upper surface of the insulating layer 2.
Form 2a.

Next, a masking tape 8 is applied to a portion of the insulating layer 2 laminated on the base 1a which does not include a region provided with the conductive member 5a as a predetermined portion to leave the base 1a in the next step (second step). Figure (e).

Finally, the masking tape 8 is peeled off by etching the base 1 using an etching solution that does not etch the insulating layer 2 and the conductive member 5a (FIG. 2 (f)). As a result, the insulating layer 2 is configured as a holder 2a provided with the conductive member 5a, and the base 1a existing in the region of the holder 2a provided with the conductive member 5a is removed to form the hole 6, thereby forming the base 1a. The side where the conductive member 5a of the holder 2a is mounted is exposed on the side. Further, around the hole 6, the base 1 a remains in a laminated state with the holder 2 a by the masking tape 8, and the hole 7 is formed in the tape non-sticking area in that portion, and the manufacture of the electrical connection member is completed. .

Thus, the base 1a is not completely removed, and the base 1a and the holder are not removed.
By leaving the laminated portion with 2a, the laminated portion is used as a conveying means, so that even if an external excessive force is applied, the holder 2a is not damaged, and furthermore, the conductive member
Even if 5a does not fall off and no external force is applied, shrinkage due to curing of the photosensitive polyimide resin used for the insulating layer 2 or the contact between the polyimide resin and the copper foil used for the substrate 1 The internal stress generated in the insulating layer 2 due to the difference in the coefficient of thermal expansion is reduced.

FIG. 3 is a plan view showing a second embodiment of the electric connection member. When the electric connection member shown in FIG. 1 is used as one unit, a plurality of units are placed on one holding body 2b. The conductive member 5b of the holding body 2b forming each unit.
Each of the bases 1b is formed in an annular shape around the area provided with.

With such a configuration, an excessive force is not applied to the holder 2b in each unit at the time of transportation and handling, and there is no possibility of breakage and falling off of the conductive member 5b. Further, even during the production, the internal stress that has conventionally occurred in the holder 2b when the entire substrate 1b has been removed is alleviated by the remaining substrate 1b, and the same effect is obtained.

FIG. 4 is a plan view showing a third embodiment of the electrical connection member, which is an aggregate of a plurality of electrical connection members as in the second embodiment. When the part to be equipped is one unit, the base 1c is left between these units, and a slit-like hole 9 is formed in the center part.

In the case of such a configuration, the internal stress generated in the holder 2c between the units can be reduced by the holes 9.

In the present embodiment, the portion where the base is left is configured to leave the entire periphery of the region where the conductive member of the holder is provided. However, the present invention is not limited to this, and may be left partially.

Although a masking tape is stuck to leave the substrate, a resist or the like may be used instead, and an appropriate means for forming an unetched region may be used.

Further, the masking such as a masking tape may be left without being removed.

〔effect〕

As described above, in the electrical connection member of the first invention according to the present application, since the base is laminated on a portion of one surface of the holding member except for the region provided with the conductive member, the laminated portion is gripped. Transport and handling can be performed without applying excessive force to break the holder or drop the conductive member.

Further, in the method for manufacturing an electrical connection member according to the second aspect of the present invention, the holding member is provided in a predetermined region set in a plane of a sheet-like base material obtained by laminating the holding member on the base. After each of the formed holes is filled with the conductive member, the base is removed while leaving a portion not included in the predetermined region. Therefore, the internal stress generated during the manufacturing process on the holder made of a photosensitive resin or the like is generated. Can be alleviated, so that the holder does not crack or break, and the conductive member does not fall off.

Therefore, it is possible to connect electric circuit components with an extremely small failure rate without requiring a significant improvement or a large increase in the number of manufacturing processes, and as a result, a highly reliable electric circuit device can be provided. The present invention has excellent effects such as being obtainable at low cost.

[Brief description of the drawings]

FIG. 1 is a plan view showing a first embodiment of an electrical connection member according to the present invention, FIG. 2 is a schematic sectional view showing a manufacturing process of the electrical connection member according to the present invention, FIG. FIG. 4 is a plan view showing the second and third embodiments of the electric connection member, FIG. 5 is a schematic view showing the connection state of the electric connection member, and FIG. 6 shows a conventional manufacturing process of the electric connection member. It is a typical sectional view shown. 1a, 1b, 1c ... base, 2 ... insulating layer, 2a, 2b, 2c ... holder, 3 ... hole, 4 ... recess, 5a, 5b, 5c ... conductive member, 6,
7,9 ... hole

──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Hiroshi Kondo 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. (72) Inventor Takashi Sakaki 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Incorporated (72) Inventor Yoshimi Terayama 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. (72) Inventor Yoichi Tamura 1-3-1, Otemachi, Chiyoda-ku, Tokyo Sumitomo Metal Industries, Ltd. (72) Inventor Takahiro Okabayashi 1-3-1 Otemachi, Chiyoda-ku, Tokyo Sumitomo Metal Industries, Ltd. (72) Inventor Kazuo Kondo 1-3-1, Otemachi, Chiyoda-ku, Tokyo Sumitomo Metal Industries, Ltd. (72) Inventor Yasuo Nakatsuka 1-3-1 Otemachi, Chiyoda-ku, Tokyo Sumitomo Metal Industries, Ltd. (72) Inventor Yuichi Ikegami Osaka, Osaka 4-5-33 Kitahama, Chuo-ku Sumitomo Metal Industries, Ltd. (56) References JP-A-3-11568 (JP, A) JP-A-2-49385 (JP, A) (58) Fields studied (Int .Cl. ⁶ , DB name) H01R 43/00 H01R 11/01 H01B 13/00 501 H01L 21/302 H01L 21/306

Claims (2)

(57) [Claims] 1. A sheet-like holding member made of an electrically insulating material is insulated from each other by a predetermined region set in a plane of the holding member, and both ends are exposed to both surfaces of the holding member. An electrical connection member comprising a plurality of conductive members, comprising: a base laminated on a portion of one surface of the holding body that is not included in the predetermined region. 2. A method according to claim 1, wherein a predetermined area set in a plane of a sheet-like base material formed by laminating a base and a holder made of an electrically insulating material extends from the surface of the holder to the inside of the base. After forming a plurality of holes and filling each of these holes with a conductive member so that one end thereof is exposed from the surface, the base is removed and the other end of the conductive member is exposed from the back surface of the holding body. A method of manufacturing an electrical connection member, comprising: removing the base while leaving a portion not included in the predetermined region.