JP2834096B2 - Spraying device for LCD panel spacers - Google Patents

Spraying device for LCD panel spacers

Info

Publication number
JP2834096B2
JP2834096B2 JP23037496A JP23037496A JP2834096B2 JP 2834096 B2 JP2834096 B2 JP 2834096B2 JP 23037496 A JP23037496 A JP 23037496A JP 23037496 A JP23037496 A JP 23037496A JP 2834096 B2 JP2834096 B2 JP 2834096B2
Authority
JP
Japan
Prior art keywords
substrate
flat plate
spacer
unit
transport
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP23037496A
Other languages
Japanese (ja)
Other versions
JPH1073826A (en
Inventor
正博 中野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KAGOSHIMA NIPPON DENKI KK
Original Assignee
KAGOSHIMA NIPPON DENKI KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KAGOSHIMA NIPPON DENKI KK filed Critical KAGOSHIMA NIPPON DENKI KK
Priority to JP23037496A priority Critical patent/JP2834096B2/en
Publication of JPH1073826A publication Critical patent/JPH1073826A/en
Application granted granted Critical
Publication of JP2834096B2 publication Critical patent/JP2834096B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Liquid Crystal (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は液晶パネル用スペー
サの散布装置に関し、特に自動清掃を可能とした液晶パ
ネル用スペーサの散布装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for spraying a spacer for a liquid crystal panel, and more particularly to a device for spraying a spacer for a liquid crystal panel which enables automatic cleaning.

【0002】[0002]

【従来の技術】液晶表示パネルにおいて、液晶を入れる
空間確保のために2枚の基板間に一定のすき間を確保す
る必要があり、その方法としてスペーサが散布されてい
る。このようなスペーサとしては例えば微細な真球ビー
ズ(硬質プラスチックボール)からなるギャップ材が使
用される。このようなギャップ材を一方の基板表面上に
散布した後に、他方の基板を重ね合わせることで、これ
らの間に一定の間隙を確保している。ここで、ギャップ
材を液晶表示パネルのパネル基板表面上に散布する方法
は例えば、特開昭64−88430公報に、圧縮ガスを
ノズルから噴出させ、その時に発生する負圧を利用し
て、スペーサを吸引し、スペーサを噴出口より基板上に
散布する方法が開示されている。また、この時に基板を
受ける構造としては特開平4−223443号公報(図
4)に示された散布室42内に固定された導電性の平板
15とか、特開平3−293326号公報に示された液
晶基板載置台(ガードリング付きでかつ接地電極された
平板)などが開示されている。
2. Description of the Related Art In a liquid crystal display panel, it is necessary to secure a certain gap between two substrates in order to secure a space for accommodating liquid crystal. As a method, spacers are dispersed. As such a spacer, for example, a gap material made of fine true spherical beads (hard plastic balls) is used. After dispersing such a gap material on the surface of one of the substrates, the other substrate is overlaid to ensure a constant gap between them. Here, a method of spraying the gap material on the panel substrate surface of the liquid crystal display panel is disclosed in, for example, JP-A-64-88430, in which a compressed gas is ejected from a nozzle, and a negative pressure generated at that time is used. Is disclosed, and a spacer is sprayed on a substrate from a jet port. Further, as the structure for receiving the substrate at this time, a conductive flat plate 15 fixed in a spray chamber 42 shown in JP-A-4-223443 (FIG. 4) or JP-A-3-293326 is disclosed. (For example, a flat plate with a guard ring and a ground electrode).

【0003】[0003]

【発明が解決しようとする課題】第1の問題点は、散布
室内に固定された平板は、散布作業を継続すると平板上
にスペーサが蓄積され、基板の裏面に付着して次工程の
基板重ね合わせ時ギャップ不均一をまねく。その理由
は、基板と平板のすき間からスペーサが入りこむために
平板上に不均一にスペーサが蓄積されるので基板裏面に
不均一に付着されるためである。
The first problem is that, when the spraying operation is continued, the flat plate fixed in the spraying chamber accumulates spacers on the flat plate and adheres to the back surface of the substrate, and the substrate is stacked in the next step. This leads to uneven gaps during alignment. The reason is that the spacers enter the gaps between the substrate and the flat plate, so that the spacers are unevenly accumulated on the flat plate and thus are unevenly attached to the back surface of the substrate.

【0004】本発明の目的は、基板のスペーサ散布面の
反対側の面に付着する場合が多かったスペーサがほとん
ど付着しなくなる。従って信頼性、操作性、生産性、保
守性の向上がはかれることにある。
An object of the present invention is to hardly attach the spacer, which often adheres to the surface of the substrate opposite to the surface on which the spacers are dispersed. Therefore, reliability, operability, productivity, and maintainability can be improved.

【0005】[0005]

【課題を解決するための手段】本発明の液晶パネル用ス
ペーサの塗布装置は、スペーサを散布する基板の搬送方
向にこの基板を搬送する基板搬送ラインと、この基板搬
送ラインに搬送される搬送用平板と、この搬送用平板に
前記基板を積載する基板積載ユニットと、この基板積載
ユニットに前記スペーサを散布するスペーサ散布ユニッ
トと、前記搬送用平板から前記基板を取りはずす基板離
脱ユニットと、この基板が離脱された前記搬送用平板の
スペーサを清掃する平板清掃ユニットとを有し、前記基
板離脱ユニットから前記平板清掃ユニットを通り前記基
板積載ユニットに戻る搬送経路を備えたことを特徴とす
る。
According to the present invention, there is provided an apparatus for applying a spacer for a liquid crystal panel, comprising: a substrate transport line for transporting the substrate in a transport direction of the substrate on which the spacer is to be scattered; A flat plate, a substrate loading unit for loading the substrate on the transport flat plate, a spacer dispersing unit for scattering the spacer on the substrate loading unit, a substrate detaching unit for removing the substrate from the transport flat plate, A flat cleaning unit that cleans the separated spacers of the transport flat plate, and a transport path that returns from the substrate release unit to the substrate stacking unit through the flat plate cleaning unit.

【0006】または、前記搬送用平板がスペーサ散布ユ
ニットに固定され、このスペーサ散布ユニットの側部に
平板清掃用ユニットが配置され、前記搬送用平板に積載
された基板にスペーサを塗布する散布ノズルと、前記ス
ペーサ散布ユニットの側部に配置され前記基板に前記ス
ペーサを塗布した後、前記基板が取りはずされた前記搬
送用平板を前記平板清掃用ユニットにて清掃することを
特徴とする。
Alternatively, the transfer flat plate is fixed to a spacer spreading unit, a flat plate cleaning unit is arranged on a side portion of the spacer spread unit, and a spray nozzle for applying a spacer to a substrate loaded on the transfer flat plate. After applying the spacer to the substrate disposed on the side of the spacer dispersing unit, the transport flat plate from which the substrate has been removed is cleaned by the flat plate cleaning unit.

【0007】本発明によれば、毎回散布するたびに平板
上のスペーサを除去するために平板からの基板裏面への
スペーサの付着を防ぐことが可能となり、次工程の重ね
合わせ工程でのギャップ不均一の原因を取り除くことが
できる。
According to the present invention, the spacers on the flat plate are removed each time spraying is performed, so that it is possible to prevent the spacers from adhering from the flat plate to the back surface of the substrate. Uniform causes can be eliminated.

【0008】[0008]

【発明の実施の形態】次に本発明の実施の形態について
図面を参照して説明する。
Embodiments of the present invention will now be described with reference to the drawings.

【0009】図1は本発明の第1の実施の形態の液晶パ
ネル用スペーサの散布装置の平面図、図2(a),
(b)は図1の搬送用平板の側面図及びその平面図であ
る。本発明の第1の実施の形態の液晶パネル用スペーサ
の散布装置は、図1に示すように前工程より搬送された
基板18は、基板積載ユニット13において、図2
(a)に示すように基板18は搬送用平板15に重ねら
れる。続いて、スペーサ散布ユニット11で基板18に
スペーサを散布し、引き続き、基板離脱ユニット14へ
送られる。この基板離脱ユニット14において、基板1
8と搬送用平板15に分離され、基板18は次工程へ、
搬送用平板15は、平板清掃ユニット16へ送られる。
搬送用平板15は、平板清掃ユニット16でスペーサ散
布ユニット11で付着されたスペーサが除去され、再び
基板積載ユニット13へ送られ、次の基板18を待つと
いうサイクルを繰り返す。この時、平板清掃ユニット1
6は、USクリーナー、もしくは回転ブラシによりスペ
ーサを除去する。また、搬送用平板15は図2(b)に
示す構成になっており、基板ずれ防止ピン23は、基板
18と搬送用平板15がずれないように各4辺に1ない
し2本ついており、高さは基板18の厚さ程度が好まし
い。また、基板搬送用平板分離用切り欠き24は、図1
に示した基板積載ユニット13、基板離脱ユニット14
において、基板18と搬送用平板15の分離の際、基板
18をつかむためのものである。
FIG. 1 is a plan view of a liquid crystal panel spacer dispersing apparatus according to a first embodiment of the present invention.
(B) is the side view of the flat plate for conveyance of FIG. 1, and its top view. In the liquid crystal panel spacer dispersing apparatus according to the first embodiment of the present invention, as shown in FIG.
As shown in (a), the substrate 18 is overlaid on the transport flat plate 15. Subsequently, the spacers are sprayed on the substrate 18 by the spacer spraying unit 11, and subsequently, are sent to the substrate detaching unit 14. In the substrate detaching unit 14, the substrate 1
8 and the transfer flat plate 15, and the substrate 18 is moved to the next step.
The transport flat plate 15 is sent to the flat plate cleaning unit 16.
The transport flat plate 15 repeats a cycle in which the spacer attached by the spacer spreading unit 11 is removed by the flat plate cleaning unit 16, sent to the substrate stacking unit 13 again, and waits for the next substrate 18. At this time, the flat plate cleaning unit 1
6 removes the spacer with a US cleaner or a rotating brush. The transfer flat plate 15 has the configuration shown in FIG. 2 (b), and one or two board shift prevention pins 23 are provided on each of four sides so that the board 18 and the transfer flat plate 15 do not shift. The height is preferably about the thickness of the substrate 18. In addition, the notch 24 for separating the flat plate for transporting the substrate is provided as shown in FIG.
Substrate loading unit 13 and substrate release unit 14 shown in FIG.
In the above, when the substrate 18 and the transfer flat plate 15 are separated, the substrate 18 is grasped.

【0010】図3は本発明の第2の実施の形態の液晶パ
ネル用スペーサの散布装置のスペーサ散布ユニットの側
面図である。本発明の第2の実施の形態の液晶パネル用
スペーサの散布装置では、図3に示すように、搬送用平
板15はスペーサ散布ユニット内に固定され、平板清掃
ユニット34をスペーサ散布ユニット内に設け、搬送用
平板15の上面を移動させる以外は、第1の実施の形態
の液晶パネル用スペーサの散布装置と同じである。
FIG. 3 is a side view of a spacer distribution unit of a liquid crystal panel spacer distribution apparatus according to a second embodiment of the present invention. In the liquid crystal panel spacer spraying apparatus according to the second embodiment of the present invention, as shown in FIG. 3, the transport flat plate 15 is fixed in the spacer spraying unit, and the flat plate cleaning unit 34 is provided in the spacer spraying unit. The configuration is the same as that of the liquid crystal panel spacer spraying apparatus of the first embodiment except that the upper surface of the transport flat plate 15 is moved.

【0011】[0011]

【発明の効果】第1の効果は、基板裏面へのスペーサ付
着を防げることである。これにより、基板裏面へのスペ
ーサ付着によるギャップ不均一を防止することができ
る。その理由は、毎回散布するたびに平板を自動的に清
掃するために、平板表面から基板裏面に付着するスペー
サを防ぐことができるからである。
The first effect is to prevent the spacer from adhering to the back surface of the substrate. As a result, it is possible to prevent gap nonuniformity due to the attachment of the spacer to the back surface of the substrate. The reason is that, since the flat plate is automatically cleaned each time it is sprayed, it is possible to prevent a spacer from adhering from the front surface of the flat plate to the back surface of the substrate.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の第1の実施の形態の液晶パネル用スペ
ーサの散布装置の平面図である。
FIG. 1 is a plan view of a liquid crystal panel spacer spraying apparatus according to a first embodiment of the present invention.

【図2】(a),(b)は図1の搬送用平板の側面図及
びその平面図である。
2 (a) and 2 (b) are a side view and a plan view of the transport flat plate of FIG.

【図3】本発明の第2の実施の形態の液晶パネル用スペ
ーサの散布装置のスペーサ散布ユニットの側面図であ
る。
FIG. 3 is a side view of a spacer distribution unit of a liquid crystal panel spacer distribution apparatus according to a second embodiment of the present invention.

【図4】従来の液晶パネル用スペーサ散布装置の一例の
断面図である。
FIG. 4 is a cross-sectional view of an example of a conventional liquid crystal panel spacer distribution device.

【符号の説明】[Explanation of symbols]

11 スペーサ散布ユニット 12 基板搬送ライン 13 基板積載ユニット 14 基板離脱ユニット 15 搬送用平板 16,34 平板清掃ユニット 17 平板搬送ライン 18 基板 23 基板ずれ防止ピン 24 基板搬送用平板分離用切り欠き 31 散布ノズル 42 散布室 43 グリッド DESCRIPTION OF SYMBOLS 11 Spacer dispersion unit 12 Substrate transfer line 13 Substrate loading unit 14 Substrate removal unit 15 Transfer flat plate 16 and 34 Flat plate cleaning unit 17 Flat plate transfer line 18 Substrate 23 Substrate shift prevention pin 24 Substrate transfer flat plate separation notch 31 Spray nozzle 42 Scattering room 43 grid

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 スペーサを散布する基板の搬送方向にこ
の基板を搬送する基板搬送ラインと、この基板搬送ライ
ンに搬送される搬送用平板と、この搬送用平板に前記基
板を積層する基板積載ユニットと、この基板積載ユニッ
トに前記スペーサを散布するスペーサ散布ユニットと、
前記搬送用平板から前記基板を取りはずす基板離脱ユニ
ットと、この基板が離脱された前記搬送用平板のスペー
サを清掃する平板清掃ユニットとを有し、前記基板離脱
ユニットから前記平板清掃ユニットを通り前記基板積載
ユニットに戻る搬送経路を備えたことを特徴とする液晶
パネル用スペーサの塗布装置。
1. A substrate transport line for transporting a substrate in a transport direction of a substrate on which spacers are scattered, a transport flat plate transported to the substrate transport line, and a substrate loading unit for laminating the substrate on the transport flat plate. And a spacer spraying unit for spraying the spacer on the substrate loading unit;
A substrate detaching unit for removing the substrate from the transfer flat plate, and a flat plate cleaning unit for cleaning a spacer of the transfer flat plate from which the substrate has been separated; and A coating device for a spacer for a liquid crystal panel, comprising a transport path returning to a loading unit.
【請求項2】 前記搬送用平板がスペーサ散布ユニット
に固定され、このスペーサ散布ユニットの側部に平板清
掃ユニットが配置され、前記搬送用平板に積層された基
板にスペーサを塗布する散布ノズルと、前記スペーサ散
布ユニットの側部に配置され前記基板に前記スペーサを
散布した後、前記基板が取りはずされた前記搬送用平板
を前記平板清掃ユニットにて清掃することを特徴とする
請求項1記載の液晶パネル用スペーサの塗布装置。
2. A spray nozzle for fixing the transfer flat plate to a spacer spreading unit, a flat plate cleaning unit disposed on a side portion of the spacer spread unit, and applying a spacer to a substrate stacked on the transfer flat plate. 2. The flat plate cleaning unit according to claim 1, wherein after disposing the spacer on the substrate disposed on a side portion of the spacer spreading unit, the transfer flat plate from which the substrate is removed is cleaned by the flat plate cleaning unit. 3. Liquid crystal panel spacer coating device.
JP23037496A 1996-08-30 1996-08-30 Spraying device for LCD panel spacers Expired - Fee Related JP2834096B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23037496A JP2834096B2 (en) 1996-08-30 1996-08-30 Spraying device for LCD panel spacers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23037496A JP2834096B2 (en) 1996-08-30 1996-08-30 Spraying device for LCD panel spacers

Publications (2)

Publication Number Publication Date
JPH1073826A JPH1073826A (en) 1998-03-17
JP2834096B2 true JP2834096B2 (en) 1998-12-09

Family

ID=16906872

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23037496A Expired - Fee Related JP2834096B2 (en) 1996-08-30 1996-08-30 Spraying device for LCD panel spacers

Country Status (1)

Country Link
JP (1) JP2834096B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100777693B1 (en) * 2001-02-13 2007-11-21 삼성전자주식회사 Device for scattering spacer
KR100777707B1 (en) * 2007-09-05 2007-11-21 삼성전자주식회사 Spacer system for a liquid crystal display

Also Published As

Publication number Publication date
JPH1073826A (en) 1998-03-17

Similar Documents

Publication Publication Date Title
TWI570875B (en) Sputtering method for emi shielding of semiconductor packages using liquid adhesives and sputtering apparatus therefor
JP2002313898A5 (en)
JP2002151539A (en) Method and system for forming bump
JP3070511B2 (en) Substrate drying equipment
JP3404444B2 (en) Method for dispersing spacer particles on liquid crystal display element substrate, jig plate for dispersing, and dispersing device
JP2834096B2 (en) Spraying device for LCD panel spacers
CN109107846A (en) A kind of AF film plating process
JP2001021899A (en) Method and device for removing spacer from substrate for liquid crystal display panel and manufacture of liquid crystal display panel
KR20190011890A (en) Air knife and dust cleaning apparatus having the same
JP2925534B1 (en) Metal ball arrangement method and arrangement device
JPH02157763A (en) Resist removing device
JPH08114796A (en) Polarizing plate sticking device
JP2000006072A (en) Substrate handling method
JP3149078B2 (en) Spacer spraying device and spraying method
JP4175783B2 (en) Spacer spraying device and liquid crystal display device production system
JPH06320099A (en) Washing nozzle and substrate washing device using the same
JP2002355596A (en) Large scale coating apparatus with cleaning apparatus
JP2002113430A (en) Substrate treatment device
KR100297367B1 (en) Polarizer Attachment Equipment for LCD
JP2006167554A (en) Cleaning apparatus and cleaning method of substrate
KR20150104936A (en) The slurry injection nozzle and a substrate processing apparatus using the nozzle
KR102160293B1 (en) Automatic cleaning device for semiconductor substrate
JP7237670B2 (en) SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
TWM539151U (en) Wafer conveying system for semiconductor wafer thinning fabrication zone
JP3020801B2 (en) Liquid crystal removal device

Legal Events

Date Code Title Description
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 19980825

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313113

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20081002

Year of fee payment: 10

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091002

Year of fee payment: 11

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091002

Year of fee payment: 11

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20101002

Year of fee payment: 12

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20111002

Year of fee payment: 13

LAPS Cancellation because of no payment of annual fees