JP2831775B2 - IC test handler device - Google Patents

Description

Description: Object of the Invention (Industrial application field) The present invention relates to a loader and an unloader mechanism used in an IC test process and an IC test handler device using the same, particularly before and after a test. It is used to transport ICs.

(Prior Art) Conventionally, an IC test handler device used in an IC test process has a configuration as shown in FIGS. 6 (a) to 6 (c). Here, (a) is a plan view of the IC test handler device, (b) is a side view of the IC test handler device, and (c) is a front view of the IC test handler device. ing. Also, 1 is an IC case, 2 is
IC supply unit, 3 is stocker, 4 is stock chute, 5
Is a measuring unit mechanism, 6 is a test head, 7 is an IC transport chute, 8 is an IC classification chute, 9 is an IC classification chute driving means, 10 is an IC storage unit, 11 is an escape mechanism, and 12 is an IC set position.

That is, in the stocker 3, an IC containing an unmeasured IC is stored.
Case 1 is arranged. Since the IC case 1 is attached to the IC supply unit 2, the attached IC case 1 itself becomes a loader of the IC test handler device. Further, since an IC case for storing the IC after the test is attached to the IC storage unit 10, the IC case serves as an unloader of the IC test handler device. Note that the IC supply unit 2 and
The IC case of the IC storage unit 10 is attached with an inclination so that the IC is discharged from the IC case of the IC supply unit 2 by its own weight and is stored in the IC case of the IC storage unit 10. . Furthermore, the tested ICs are stored in the IC
IC classification chute 8 and
IC classification chute driving means 9 is provided.

FIG. 7 shows the IC case described in FIG. 6 in detail. That is, a magazine such as plastic or aluminum is mainly used for the IC case 1. Further, the IC 1a in the IC case 1 is not fixed, and can move freely.

In a conventional apparatus using a vibrating feeder, a fixed chute is provided on the diaphragm.

Next, the operation of the conventional IC test handler apparatus will be briefly described with reference to FIG.

First, the IC case 1 in the stocker 3 is attached to the IC supply unit 2. Then, the IC in the IC case is dropped by its own weight.
It is discharged from the IC case and the IC
Move to set position 12. Thereafter, the IC at the IC set position 12 is tested for good / bad by the measuring unit mechanism 5 and the test head 6. Tested IC
Is further dropped by its own weight, and the IC
Move to classification chute 8. Further, the ICs transferred to the IC classification chute 8 are classified by the IC classification chute driving means 9 into non-defective ICs and defective ICs, and are stored in the IC storage unit 10.

However, such an IC test handler device has the following disadvantages because the IC case itself is used for the loader / unloader of the device.

First, the IC case 1 in the stocker 3 needs to be horizontally arranged in order to prevent the IC from spilling out of the IC case 1. Therefore, the IC case 1 is inclined from the horizontal state (the state where the IC case 1 is attached to the IC supply unit 2).
Therefore, a mechanism for shifting to the above is required, which requires an apparatus space and cost.

Second, in the loader area (stock chute 4 etc.), the IC
Move to set position 12. For this reason, an escape (separation) mechanism 11 for individually transferring these is required, which makes the apparatus complicated and increases the cost. In addition, this makes it easy for the mold to be caught by burrs and the like, which causes trouble.

Third, since a mechanism for shifting the IC case from a horizontal state to an inclined state and an escape mechanism 11 are required, a long IC transport means (stock) is required for a test contact (test socket) for performing an IC test. Shoot 4, IC
Transport chute 7 etc.) are required.

(Problems to be Solved by the Invention) As described above, in the conventional IC test handler device, the IC case itself is used for the loader / unloader of the device. For this reason, the IC case is inclined from the horizontal state to the inclined state. It required a mechanism to shift to, an escape mechanism, and a long IC transport means. For this reason, there have been drawbacks that the apparatus becomes complicated and the cost increases.

Therefore, the present invention provides a loader and an unloader mechanism that can use the IC case itself as a loader / unloader of the device, and can reduce the size, weight, and cost of the device, and an IC test handler using the same. It is intended to provide a device.

[Configuration of the Invention] (Means for Solving the Problems) In order to achieve the above object, a loader mechanism of the present invention includes:
A vibratory feeder having a diaphragm and an IC case in which an IC is housed on the diaphragm, and an IC in the IC case being transferred to an IC supply unit by vibrating the diaphragm; Control means.

Further, the unloader mechanism has a vibrating plate, and a vibratory feeder on which the IC case is directly fixed on the vibrating plate;
Control means for moving the IC in the IC storage section into the IC case by vibrating the diaphragm.

Further, the IC test handler device directly vibrates the first IC case, so that the
A loader mechanism for transferring the IC to the IC supply unit; an unloader mechanism for transferring the IC in the IC storage unit into the second IC case by directly vibrating the second IC case;
IC transport means for transporting ICs from the IC supply unit to the IC storage unit.

(Operation) According to such a configuration, the IC case containing the IC before the test is directly fixed on the diaphragm of the vibrating feeder,
The IC in the IC case is supplied to the IC supply unit by vibration. In addition, on the diaphragm of the vibratory feeder,
Directly fix the IC case that houses the IC, and into the IC case
The IC is housed by vibration. As a result, the IC case itself can be used as a loader / unloader of the device, and various mechanisms can be reduced. Also, since there is no occurrence of biting due to mold burrs, etc., the size, weight and cost of the device can be reduced. Can be achieved.

(Example) Hereinafter, an example of the present invention will be described in detail with reference to the drawings.

FIG. 1 shows a configuration of an IC test handler device having a loader and an unloader mechanism according to an embodiment of the present invention. Here, 101 is a loader mechanism, 102 is an unloader mechanism, and 103 is IC transport means.

The loader mechanism 101 includes a first vibrating feeder 21 having a vibrating plate, a control unit 22 for controlling the vibration of the vibrating plate of the first vibrating feeder 21, and an IC for supplying the IC to the IC transporting unit 103. And a supply unit 23. An IC case (containing an unmeasured IC) 24 can be directly fixed on the diaphragm of the first vibrating feeder 21.

The unloader mechanism 102 includes a second vibrating feeder 25 having a vibrating plate, control means 26 for controlling the vibration of the vibrating plate of the second vibrating feeder 25, and a housing for accommodating the IC in the IC case. And an IC storage section 27. And
On the diaphragm of the second vibratory feeder 25, an IC case (for accommodating the IC after the test) 28 can be directly fixed.

The IC transport means 103 receives the IC from the IC supply unit 23 of the loader mechanism 101.
After performing a test or the like on the IC, the IC is transported to the IC storage section 27 of the unloader mechanism 102.

FIG. 2 specifically shows an IC test handler device having a loader and an unloader mechanism according to an embodiment of the present invention. FIG. 3 schematically shows the loader mechanism of FIG. Here, 21 is the first vibratory feeder, 21a is the first vibratory feeder 2
1 is a diaphragm, 23 is an IC supply unit, 24 is an IC case (containing an unmeasured IC), 25 is a second vibratory feeder, 25a
Is a diaphragm of the second vibratory feeder 25, 28 is an IC case (for storing the IC after the test), 29 is an IC case fixing member, 103 is an IC transport means, 104 is an IC test contact section,
Reference numeral 105 denotes a test head, and reference numeral 106 denotes a work table. Also, Ann
The loader mechanism has the same configuration as the loader mechanism shown in FIG.

The IC case 24 containing the IC before the test is placed directly on the diaphragm 21a of the first vibratory feeder 21, and the IC case 24
It is fixed by a case fixing member 29. The IC case 24 is disposed horizontally on the diaphragm 21a. Also,
The IC case 28 for storing the IC after the test is directly disposed on the diaphragm 25a of the second vibrating feeder 25 and is fixed by an IC case fixing member. Note that IC case 28
Are horizontally arranged on the diaphragm 25a. Fixed I
At the tip of the C case 24, an IC supply unit (for example, a transport chute with an open top) 23 for supplying IC to IC transport means (for example, an air transport hand) 103 is provided. Similarly, at the tip of the fixed IC case 28,
An IC storage unit (for example, a transport chute with an open top) is provided to receive the IC transported from 3.

4 (a) to 4 (c) show how the IC in the IC case 24 is transferred to the IC supply unit 23 by the vibration of the diaphragm 21a. FIGS. 5 (a) to 5 (c) show how the IC in the IC housing 27 is transferred into the IC case 28 by the vibration of the diaphragm 25a. Hereinafter, a series of operations of the loader and unloader mechanism according to the present invention and the IC test handler apparatus having the same will be described in detail with reference to FIGS. 2 to 5.

First, the operator takes out the IC case 24 containing the IC before the test from a stocker (not shown), and arranges the IC case 24 horizontally on the diaphragm 21a of the vibrating feeder 21. The IC case fixing member 29 allows the IC case 24
Is fixed to the diaphragm 21a. On the other hand, the IC case 28 for storing the IC after the test is taken out, and the IC case 28 is horizontally arranged on the diaphragm 25a of the vibrating feeder 25. Further, the IC case 28 is fixed to the diaphragm 25a by an IC case fixing member (see FIGS. 2 and 3). At this time, as shown in FIG. 4 (a), the IC is stored in the IC case 24.

Next, as shown in FIG. 4B, by vibrating the first vibrating feeder 21, the IC in the IC case 24 fixed to the diaphragm 21a is moved in the direction of the IC supply unit 23 (X direction). Move to Specifically, a vibration having a component in the direction of the IC supply unit 23 is given to the IC in the IC case 24 while being controlled by the control unit 22. In addition, as shown in FIG.
When the IC supply unit 23 reaches the home position, the sensor detects this and the vibration of the vibratory feeder 21 stops.

Thereafter, the IC transport means 103 grasps the IC of the IC supply unit 23 and transports the IC to the IC test contact unit 104.
When the test in the IC test / contact section 104 is completed, the IC is further transported to the IC storage section 27, and the IC is released there. At this time, as shown in FIG.
Is in a state where ICs are arranged.

Next, as shown in FIG. 5 (b), by vibrating the second vibrating feeder 25, the IC in the IC storage section 27 is moved (in the X direction) into the IC case 28 fixed to the diaphragm 25a. Migrate. Specifically, a vibration having a component in the direction of the IC case 28 is given to the IC in the IC storage section 27 while being controlled by the control means 26. As shown in FIG. 5 (c), when the IC comes to the fixed position of the IC case 28, the sensor detects this and the vibration of the vibrating feeder 25 stops.

According to such a configuration, the IC cases 24 and 28 are
It is arranged horizontally on 1a and 25a. Therefore, a mechanism for shifting the IC cases 24 and 28 from the horizontal state to the inclined state as in the related art is not required, and the space and cost of the device can be reduced.

In addition, since the IC is transferred into the IC supply unit 23 or the IC case 28 by the vibration, the IC can be transferred individually, and a conventional IC escape mechanism is not required.
As a result, downsizing and simplification of the device can be achieved, and high reliability (high operation rate) can be obtained.

Further, since the supply or storage of the IC by the vibration is realized, the IC transfer area becomes shorter than the test contact portion 104 for testing the IC. This eliminates the occurrence of biting due to mold burrs and the like.

[Effects of the Invention] As described above, according to the loader and unloader mechanisms of the present invention and the IC test handler device using them, the following effects can be obtained.

The IC case containing the IC before the test is directly fixed on the diaphragm of the vibrating feeder, and the IC in the IC case is supplied by vibration. Also, directly fix the IC case that houses the IC after the test on the diaphragm of the vibrating feeder,
The IC is housed in the IC case by vibration. As a result, the IC case itself can be used as a loader / unloader of the device, and the size, weight, and cost of the device can be reduced.

[Brief description of the drawings]

FIG. 1 is a block diagram showing the configuration of an IC test handler device having a loader and an unloader mechanism according to one embodiment of the present invention, and FIG. 2 is a diagram showing a loader and unloader mechanism according to one embodiment of the present invention. FIG. 3 is an external view specifically showing an IC test handler device having the same, FIG. 3 is a schematic diagram showing in detail a loader mechanism part of FIG. 2, and FIGS. 4 (a) to 4 (c).
FIGS. 5A to 5C are schematic diagrams showing that the IC in the IC case 24 is transferred to the IC supply unit 23 by the vibration of the diaphragm 21a. FIGS. Part 27 IC
FIG. 6 (a) is a schematic view showing a state in which ICs move into the IC case 28, and FIG.
Figure (b) is a side view of a conventional IC test handler device,
FIG. 6 (c) is a front view of a conventional IC test handler device, and FIG. 7 is a diagram showing the IC case described in FIG. 6 in detail.

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁶ , DB name) H01L 21/66 G01R 31/26

Claims (1)

(57) [Claims] 1. A cylindrical first IC in which a plurality of ICs before a test are housed, and an IC supply unit having an open top at one end is arranged.
A first vibratory feeder for horizontally disposing and fixing the case on the first diaphragm, and an IC housing section in which a plurality of ICs after the test are housed and an upper part is opened at one end side A second vibratory feeder for horizontally arranging and fixing a cylindrical second IC case on which a second IC case is disposed on a second diaphragm; And an IC transfer means for transferring the test component from the test section to the IC storage section, and transmitting a vibration having a component in the direction of the IC supply section from the first diaphragm to the plurality of ICs in the first IC case. Given to the IC
When the IC comes to the fixed position of the IC supply unit, the vibration of the first diaphragm is stopped, and the vibration having the component in the opposite direction to the IC storage unit is applied from the second diaphragm to the IC of the IC storage unit. Control means for stopping the vibration of the second diaphragm when the IC in the IC storage unit comes to a fixed position in the second IC case.