JP2831449B2 - プラズマ源によりレントゲンビームを発生する装置 - Google Patents

プラズマ源によりレントゲンビームを発生する装置

Info

Publication number
JP2831449B2
JP2831449B2 JP2215963A JP21596390A JP2831449B2 JP 2831449 B2 JP2831449 B2 JP 2831449B2 JP 2215963 A JP2215963 A JP 2215963A JP 21596390 A JP21596390 A JP 21596390A JP 2831449 B2 JP2831449 B2 JP 2831449B2
Authority
JP
Japan
Prior art keywords
gas
discharge
plasma
inner electrode
discharge chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2215963A
Other languages
English (en)
Japanese (ja)
Other versions
JPH03129700A (ja
Inventor
ウイリ・ネフ
ライモント・ホルツ
ライナー・レーベルト
フランツ・リヒター
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KAARU TSUAISU SUCHIFUTSUNGU
Original Assignee
KAARU TSUAISU SUCHIFUTSUNGU
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KAARU TSUAISU SUCHIFUTSUNGU filed Critical KAARU TSUAISU SUCHIFUTSUNGU
Publication of JPH03129700A publication Critical patent/JPH03129700A/ja
Application granted granted Critical
Publication of JP2831449B2 publication Critical patent/JP2831449B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—Production of X-ray radiation generated from plasma
    • H05G2/002—Supply of the plasma generating material
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70033—Production of exposure light, i.e. light sources by plasma extreme ultraviolet [EUV] sources
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/52—Generating plasma using exploding wires or spark gaps

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • X-Ray Techniques (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Plasma Technology (AREA)
JP2215963A 1989-08-17 1990-08-17 プラズマ源によりレントゲンビームを発生する装置 Expired - Fee Related JP2831449B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3927089A DE3927089C1 (enExample) 1989-08-17 1989-08-17
DE3927089.0 1989-08-17

Publications (2)

Publication Number Publication Date
JPH03129700A JPH03129700A (ja) 1991-06-03
JP2831449B2 true JP2831449B2 (ja) 1998-12-02

Family

ID=6387248

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2215963A Expired - Fee Related JP2831449B2 (ja) 1989-08-17 1990-08-17 プラズマ源によりレントゲンビームを発生する装置

Country Status (5)

Country Link
US (1) US5023897A (enExample)
EP (1) EP0413276B1 (enExample)
JP (1) JP2831449B2 (enExample)
CA (1) CA2023410C (enExample)
DE (2) DE3927089C1 (enExample)

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DE19540195C2 (de) * 1995-10-30 2000-01-20 Fraunhofer Ges Forschung Verfahren der Röntgenfluoreszenzmikroskopie
DE29517080U1 (de) * 1995-10-30 1997-03-06 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 80636 München Vorrichtung für die Röntgenfluoreszenzmikroskopie
US6586757B2 (en) * 1997-05-12 2003-07-01 Cymer, Inc. Plasma focus light source with active and buffer gas control
US6541786B1 (en) 1997-05-12 2003-04-01 Cymer, Inc. Plasma pinch high energy with debris collector
US6566668B2 (en) * 1997-05-12 2003-05-20 Cymer, Inc. Plasma focus light source with tandem ellipsoidal mirror units
US6744060B2 (en) 1997-05-12 2004-06-01 Cymer, Inc. Pulse power system for extreme ultraviolet and x-ray sources
US6815700B2 (en) 1997-05-12 2004-11-09 Cymer, Inc. Plasma focus light source with improved pulse power system
US6566667B1 (en) 1997-05-12 2003-05-20 Cymer, Inc. Plasma focus light source with improved pulse power system
US5763930A (en) * 1997-05-12 1998-06-09 Cymer, Inc. Plasma focus high energy photon source
US6452199B1 (en) 1997-05-12 2002-09-17 Cymer, Inc. Plasma focus high energy photon source with blast shield
RU2159520C1 (ru) * 1999-04-30 2000-11-20 Камский политехнический институт Плазмотрон с жидкими электродами (варианты)
DE19962160C2 (de) 1999-06-29 2003-11-13 Fraunhofer Ges Forschung Vorrichtungen zur Erzeugung von Extrem-Ultraviolett- und weicher Röntgenstrahlung aus einer Gasentladung
US7215697B2 (en) * 1999-08-27 2007-05-08 Hill Alan E Matched impedance controlled avalanche driver
US6826222B2 (en) * 1999-08-27 2004-11-30 Alan E. Hill Electric oxygen iodine laser
RU2153781C1 (ru) * 1999-09-07 2000-07-27 КОССЫЙ Игорь Антонович Микроволновый плазматрон
US6972421B2 (en) * 2000-06-09 2005-12-06 Cymer, Inc. Extreme ultraviolet light source
US7180081B2 (en) * 2000-06-09 2007-02-20 Cymer, Inc. Discharge produced plasma EUV light source
RU2206186C2 (ru) * 2000-07-04 2003-06-10 Государственный научный центр Российской Федерации Троицкий институт инновационных и термоядерных исследований Способ получения коротковолнового излучения из газоразрядной плазмы и устройство для его реализации
US7346093B2 (en) * 2000-11-17 2008-03-18 Cymer, Inc. DUV light source optical element improvements
US6614505B2 (en) 2001-01-10 2003-09-02 Asml Netherlands B.V. Lithographic projection apparatus, device manufacturing method, and device manufactured thereby
US6765987B2 (en) 2001-03-15 2004-07-20 Safe Food Technologies, Inc. Resonant plasma x-ray source
US6804327B2 (en) * 2001-04-03 2004-10-12 Lambda Physik Ag Method and apparatus for generating high output power gas discharge based source of extreme ultraviolet radiation and/or soft x-rays
TW589924B (en) * 2001-04-06 2004-06-01 Fraunhofer Ges Forschung Process and device for producing extreme ultraviolet ray/weak x-ray
US7405416B2 (en) * 2005-02-25 2008-07-29 Cymer, Inc. Method and apparatus for EUV plasma source target delivery
US7598509B2 (en) * 2004-11-01 2009-10-06 Cymer, Inc. Laser produced plasma EUV light source
US7465946B2 (en) * 2004-03-10 2008-12-16 Cymer, Inc. Alternative fuels for EUV light source
US7378673B2 (en) * 2005-02-25 2008-05-27 Cymer, Inc. Source material dispenser for EUV light source
US7372056B2 (en) * 2005-06-29 2008-05-13 Cymer, Inc. LPP EUV plasma source material target delivery system
US7439530B2 (en) 2005-06-29 2008-10-21 Cymer, Inc. LPP EUV light source drive laser system
US7088758B2 (en) 2001-07-27 2006-08-08 Cymer, Inc. Relax gas discharge laser lithography light source
DE10238096B3 (de) * 2002-08-21 2004-02-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Gasentladungslampe
DE10251435B3 (de) * 2002-10-30 2004-05-27 Xtreme Technologies Gmbh Strahlungsquelle zur Erzeugung von extrem ultravioletter Strahlung
US7217940B2 (en) * 2003-04-08 2007-05-15 Cymer, Inc. Collector for EUV light source
US7217941B2 (en) * 2003-04-08 2007-05-15 Cymer, Inc. Systems and methods for deflecting plasma-generated ions to prevent the ions from reaching an internal component of an EUV light source
DE10336273A1 (de) * 2003-08-07 2005-03-10 Fraunhofer Ges Forschung Vorrichtung zur Erzeugung von EUV- und weicher Röntgenstrahlung
DE10342239B4 (de) * 2003-09-11 2018-06-07 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zum Erzeugen von Extrem-Ultraviolettstrahlung oder weicher Röntgenstrahlung
US7193228B2 (en) 2004-03-10 2007-03-20 Cymer, Inc. EUV light source optical elements
US20060146906A1 (en) * 2004-02-18 2006-07-06 Cymer, Inc. LLP EUV drive laser
US7087914B2 (en) * 2004-03-17 2006-08-08 Cymer, Inc High repetition rate laser produced plasma EUV light source
US8075732B2 (en) * 2004-11-01 2011-12-13 Cymer, Inc. EUV collector debris management
US7196342B2 (en) * 2004-03-10 2007-03-27 Cymer, Inc. Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source
US7164144B2 (en) * 2004-03-10 2007-01-16 Cymer Inc. EUV light source
US7355191B2 (en) * 2004-11-01 2008-04-08 Cymer, Inc. Systems and methods for cleaning a chamber window of an EUV light source
US7109503B1 (en) * 2005-02-25 2006-09-19 Cymer, Inc. Systems for protecting internal components of an EUV light source from plasma-generated debris
US7145132B2 (en) 2004-12-27 2006-12-05 Asml Netherlands B.V. Lithographic apparatus, illumination system and debris trapping system
SG123770A1 (en) 2004-12-28 2006-07-26 Asml Netherlands Bv Lithographic apparatus, radiation system and filt er system
SG123767A1 (en) * 2004-12-28 2006-07-26 Asml Netherlands Bv Lithographic apparatus, illumination system and filter system
US7193229B2 (en) * 2004-12-28 2007-03-20 Asml Netherlands B.V. Lithographic apparatus, illumination system and method for mitigating debris particles
JP4366358B2 (ja) * 2004-12-29 2009-11-18 エーエスエムエル ネザーランズ ビー．ブイ． リソグラフィ装置、照明システム、フィルタ・システム、およびそのようなフィルタ・システムのサポートを冷却するための方法
US7449703B2 (en) * 2005-02-25 2008-11-11 Cymer, Inc. Method and apparatus for EUV plasma source target delivery target material handling
US7482609B2 (en) * 2005-02-28 2009-01-27 Cymer, Inc. LPP EUV light source drive laser system
US7141806B1 (en) 2005-06-27 2006-11-28 Cymer, Inc. EUV light source collector erosion mitigation
US7180083B2 (en) * 2005-06-27 2007-02-20 Cymer, Inc. EUV light source collector erosion mitigation
US7365349B2 (en) * 2005-06-27 2008-04-29 Cymer, Inc. EUV light source collector lifetime improvements
US7402825B2 (en) * 2005-06-28 2008-07-22 Cymer, Inc. LPP EUV drive laser input system
US7394083B2 (en) 2005-07-08 2008-07-01 Cymer, Inc. Systems and methods for EUV light source metrology
US7453077B2 (en) * 2005-11-05 2008-11-18 Cymer, Inc. EUV light source
US7307237B2 (en) * 2005-12-29 2007-12-11 Honeywell International, Inc. Hand-held laser welding wand nozzle assembly including laser and feeder extension tips
CN100525552C (zh) * 2006-03-10 2009-08-05 哈尔滨工业大学 用于等离子体电弧加热器的可在强电磁干扰环境下工作的气体工作介质转换装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3332711A1 (de) * 1983-09-10 1985-03-28 Fa. Carl Zeiss, 7920 Heidenheim Vorrichtung zur erzeugung einer plasmaquelle mit hoher strahlungsintensitaet im roentgenbereich
US4627086A (en) * 1984-09-07 1986-12-02 Hitachi, Ltd. Plasma X-ray source
US4792725A (en) * 1985-12-10 1988-12-20 The United States Of America As Represented By The Department Of Energy Instantaneous and efficient surface wave excitation of a low pressure gas or gases
JPH0687408B2 (ja) * 1986-03-07 1994-11-02 株式会社日立製作所 プラズマｘ線発生装置
US4912731A (en) * 1987-04-13 1990-03-27 Vittorio Nardi Plasma focus apparatus with field distortion elements

Also Published As

Publication number Publication date
EP0413276A3 (en) 1992-04-08
DE59009056D1 (de) 1995-06-14
JPH03129700A (ja) 1991-06-03
DE3927089C1 (enExample) 1991-04-25
US5023897A (en) 1991-06-11
CA2023410A1 (en) 1991-02-18
EP0413276A2 (de) 1991-02-20
EP0413276B1 (de) 1995-05-10
CA2023410C (en) 2002-02-19

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