JP2829008B2 - Superconducting magnet. Semiconductor single crystal pulling equipment. Nuclear magnetic resonance apparatus and method of manufacturing superconducting magnet - Google Patents

Description

The present invention relates to a superconducting magnet and a semiconductor single crystal pulling apparatus used in a high magnetic field generator, a nuclear magnetic resonance apparatus NMR, a single crystal pulling apparatus, an electron beam transfer apparatus, and the like. The present invention relates to an apparatus and a method for manufacturing a nuclear magnetic resonance and a superconducting magnet.

(Prior art) NbTi superconducting coils used for industrial, medical, etc.
In order to efficiently generate a magnetic field in a wide space, a NbTi wire having a relatively small copper ratio is usually wound tightly and used. If a quench occurs in which the superconducting properties of the superconducting coil are broken while using these devices, a large amount of liquid helium is released to the atmosphere, which is dangerous, and it costs a lot of time and money to start up again. .

Therefore, designers of these superconducting coils usually take a margin of 30 to 50% in consideration of the safety of the load factor of the superconducting wire.

In the case of a non-impregnated superconducting coil, the cause of the quench that deteriorates the superconducting properties is 10 [μm]
Frictional heat generated by a movement of 100 [μm] is given. As a method of preventing this, a method of increasing the winding tension to increase the radial stress of the winding portion and reducing the movement of the superconducting conductor with a strong frictional force can be considered. In this method, it is possible to increase the quench current to some extent, but it is impossible to stop the movement itself.

Also, the superconducting coil manufactured with strong winding tension, because the winding part is strongly pressed against the winding frame even when energized,
Due to the axial contraction of the winding by the electromagnetic force, the shearing force is concentrated at the boundary between the winding at the end of the superconducting coil and the bobbin, and often does not reach the critical current value even by training.

As a method of suppressing the movement of the superconducting conductor, there is a method of impregnating the entire superconducting coil with epoxy or the like. However, the superconducting coil integrated with and impregnated with the metal bobbin causes a concentration of shear force generated between the bobbin and the bobbin, causing cracks and peeling from the bobbin to deteriorate the superconducting characteristics. In general, it was difficult to operate the superconducting coil at a high load factor.

Operating a superconducting coil at a high load factor immediately
Although reducing the amount of Ti leads to cost reduction, the merit is very large because it leads to high efficiency of magnetic field generation, reduction of the amount of liquid helium, and downsizing of the whole system,
For the reasons described above, it has been difficult to manufacture a stable superconducting magnet that can be used at a high load factor.

(Problems to be Solved by the Invention) Accordingly, the present invention has been made in view of the above-described conventional problems, and has no quench, has a high magnetic field generation efficiency,
It is an object of the present invention to provide a superconducting magnet capable of operating stably at a high load factor, a semiconductor single crystal pulling apparatus and a nuclear magnetic resonance apparatus using the same, and a method of manufacturing a superconducting magnet.

(Means for Solving the Problems) The superconducting magnet of the present invention comprises a superconducting coil impregnated with a resin, a flange made of a reinforced resin impregnated with an end face of the superconducting coil, and And a support member that supports and absorbs a radially acting force.

Next, the semiconductor single crystal pulling apparatus of the present invention includes a superconducting coil formed by impregnating a superconducting wire and a superconducting wire with a resin, a flange made of a reinforced resin impregnated with an end face of the superconducting coil, and the flange. And a support member that supports and absorbs a force acting in the radial direction of the superconducting coil through the superconducting magnet.

Next, the nuclear magnetic resonance apparatus of the present invention includes a superconducting coil formed by impregnating a space between a superconducting wire and a superconducting wire with a resin, a flange made of a reinforced resin impregnated together with an end face of the superconducting coil, and And a support member for supporting and absorbing the force acting in the radial direction of the superconducting coil.

Next, the method for manufacturing a superconducting magnet of the present invention includes a first step of winding a superconducting coil around a bobbin, and a step of contacting a flange with an end face of the superconducting coil wound in the first step, A second step of impregnating the frame, the superconducting coil, and the flange, a third step of removing the winding frame from the superconducting coil after the second step, and a support member for supporting the superconducting coil, And a fourth step of providing the flange via a fixture.

Next, the superconducting magnet of the present invention supports a superconducting coil impregnated with resin, a flange made of reinforced resin impregnated with the end face of the superconducting coil, and a force acting in a radial direction of the superconducting coil through the flange. A superconducting coil configured to generate a magnetic field higher than the magnetic field generated by the superconducting coil is disposed in a bore of the superconducting coil including the supporting material to be absorbed.

(Operation) The present invention is based on a superconducting coil impregnated with a resin such as epoxy or the like, whereby the movement of the superconductor inside the superconducting coil can be suppressed. Since the winding frame (winding jig) is configured to be removed after impregnation, the metal cylinder in the bore portion is eliminated, and the shear stress between the winding frame and the winding portion can be minimized. Accordingly, it is possible to prevent the resin such as epoxy from cracking or peeling off.

Since the superconducting coil is supported by bolts from the bottom of the FRP flange, no tensile force is applied between the flange and the winding part, and cracks can be prevented at this part . Further, by making the length of the bolt to be somewhat long, it is possible to absorb the deformation of the superconducting coil in the radial direction due to the electromagnetic force or the like, and to prevent an undesirable stress from being applied from the support structure.

(Example) Hereinafter, description will be made with reference to the drawings.

FIG. 1 is a sectional view of an embodiment of the superconducting magnet of the present invention.

The superconducting coil 10 has FRP flanges 2 above and below the winding part 1,
2 'and the bore 9 has no reel. The superconducting coil 10 is supported by a large number of thin bolts 11 from below the lower FRP flange 2 'and does not hang from above. Bolts 11 provided on flange 2 'can absorb radial deformation of superconducting coil 10 due to electromagnetic force or the like. The weight of the superconducting coil 10 is received by a support member 3 made of metal or FRP, which is pressed by a plurality of studs with a plurality of spring washers 5 so that no tensile force is applied between the upper metal or FRP support member 4. And at the same time the spring washer 5
Thereby, the superconducting coil 10 is prevented from laterally oscillating. The superconducting magnet is provided with the superconducting coil 10 configured as described above.

Using such a superconducting magnet, a semiconductor single crystal pulling apparatus or a nuclear magnetic resonance apparatus can be configured.

Also, a new superconducting coil in which a superconducting coil that generates a magnetic field higher than the magnetic field generated by the superconducting coil is arranged in the bore of the nuclear superconducting coil can be configured. A nuclear magnetic resonance apparatus can be configured using the superconducting coil.

FIG. 2 is a cross-sectional view of a superconducting magnet manufactured by the method for manufacturing a superconducting magnet of the present invention.

First, the superconducting wire is wound around the metal cylinder 6 and the metal wire winding frame 7,
Wound around superconducting coil winding part 1 surrounded by 7 '(winding frame) (first step). The winding frame cylinder 6 can be divided into four or more, and is fixed to the upper and lower winding winding frames 7, 7 'by screws 8, 8'.

Next, the FRP flanges 2, 2 '(flanges) are brought into contact with the end surfaces of the superconducting coils 10 on which the superconducting wires are wound in the first step, and the metal wire winding frames 7, 7' and the superconducting coils 10
And the FRP flanges 2 and 2 'are simultaneously impregnated with resin (second step). Here, the upper and lower FRP flanges 2 and 2 'are fixed to the winding frames 7, 7' in advance. Also, the inner diameter of the superconducting coil winding portion 1 and the portion to be removed after the resin impregnation is subjected to processing such as stretching a Teflon sheet or coating the metal surface with telluron so that the superconducting coil winding portion 1 can be easily removed after the resin impregnation. . And the superconducting coil 10 is wound, and the outer diameter is thickly and densely covered with a glass sheet,
Impregnated with epoxy and heat cured.

Thereafter, the metal wire winding frames 7, 7 'are removed from the superconducting coil 10 (third step). The metal winding winding frames 7, 7 'can be easily removed by the action of the Teflon adhered to the metal surface by the thermosetting treatment in the second step.

Then, supporting members 4 and 3 (in FIG. 1) are provided on the FRP flanges 2 and 2 'as members for supporting the superconducting coil 10 via bolts 11 (fixing tools) in FIG. 1 (fourth step).

Superconducting magnets manufactured by such a process
The critical current value of the superconducting wire can be reached with three very small trainings. For this reason, a load factor of 80 to 100 [%] can be adopted, and a common sense load factor of the superconducting magnet which has been used up to now, which is not impregnated or is integrally impregnated with the metal winding frames 7, 7 '. Compared with 40 to 70 [%], the amount of the superconducting conductor can be greatly reduced.

Further, since the winding frames 7, 7 'are removed after the impregnation, the effective winding thickness can be extremely thin, for example, about 0.2 to 1 [mm] or less, and 5 to 10 [m] of ordinary stainless steel or the like.
m], the amount of superconducting conductor can be saved.

Further, since the inner diameter of the winding of the superconducting coil can be made smaller than the required room temperature space, there is an advantage that the generation rate of the magnetic field is improved, and the number of ampere turns of the superconducting conductor can be reduced.

Further, since the ratio of the inner diameter to the length of the superconducting coil is reduced, the uniformity of the magnetic field in the required space is improved, and it is very effective for the magnetic field requiring uniformity used in NMR and the like.

〔The invention's effect〕

In the present invention having such a configuration, the occurrence of quench is suppressed, the efficiency of magnetic field generation is high, and stable operation can be performed at a high load factor.

[Brief description of the drawings]

FIG. 1 is a sectional view of an embodiment of the superconducting magnet of the present invention. FIG. 2 is a sectional view showing one embodiment of a superconducting magnet manufactured by the method of manufacturing a superconducting magnet of the present invention. 1 ... superconducting coil winding 2 ... FRP flange 3 ...
... Lower support, 4 Upper support, 5 Spring washer, 6
…… Split-type winding metal cylinder, 7, 7 ′ …… Metal winding winding
8, 8 ': Metal winding frame fixing bolt, 9: Bore, 10
...... Superconducting coil.

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-64-2304 (JP, A) JP-A-63-196017 (JP, A) JP-A-59-199597 (JP, A) JP-A 63-19697 261807 (JP, A) JP-A-63-157411 (JP, A) JP-A-59-176113 (JP, U) JP-A-63-55509 (JP, U) (58) Fields investigated (Int. ⁶ , DB name) H01F 6/00

Claims (6)

(57) [Claims] 1. A superconducting coil impregnated with a resin, a flange made of a reinforced resin impregnated with an end face of the superconducting coil, and a force connected to the flange and acting in a radial direction of the superconducting coil via the flange. A superconducting magnet, comprising: a support material that supports and absorbs. 2. A superconducting coil formed by impregnating a space between a superconducting wire and a superconducting wire, a flange made of a reinforced resin impregnated with an end face of the superconducting coil, and a radius of the superconducting coil via the flange. An apparatus for pulling a semiconductor single crystal, comprising a superconducting magnet composed of a support material for supporting and absorbing a force acting in a direction. 3. A superconducting coil formed by impregnating a space between a superconducting wire and a superconducting wire with a resin, a flange made of a reinforced resin impregnated with an end face of the superconducting coil, and a radius of the superconducting coil via the flange. A nuclear magnetic resonance apparatus using a superconducting magnet comprising: a support member for supporting and absorbing a force acting in a direction. 4. A superconducting coil impregnated with a resin, a flange made of a reinforced resin impregnated with an end face of the superconducting coil, and a support member for supporting and absorbing a force acting in a radial direction of the superconducting coil via the flange. A superconducting magnet, wherein a superconducting coil that generates a magnetic field higher than a magnetic field generated by the superconducting coil is disposed in a bore of the superconducting coil configured by: 5. A superconducting coil formed by impregnating a gap between a superconducting wire and a superconducting wire, a flange made of a reinforced resin impregnated with an end face of the superconducting coil, and a radius of the superconducting coil via the flange. A superconducting magnet characterized in that a superconducting coil that generates a magnetic field higher than the magnetic field generated by the superconducting coil is disposed in the bore of the superconducting coil composed of a supporting material that supports and absorbs the force acting in the direction. A nuclear magnetic resonance apparatus characterized by the above-mentioned. 6. A first step of winding a superconducting coil around a bobbin, and contacting a flange with an end face of the superconducting coil wound in the first step, wherein the bobbin, the superconducting coil and the flange A second step of impregnating the superconducting coil after the second step; and a third step of removing the bobbin from the superconducting coil; and a supporting member supporting the superconducting coil on the flange via a fixture. A method for manufacturing a superconducting magnet, comprising: providing a fourth step.