JP2821155B2 - Information recording medium - Google Patents

Information recording medium

Info

Publication number
JP2821155B2
JP2821155B2 JP63306049A JP30604988A JP2821155B2 JP 2821155 B2 JP2821155 B2 JP 2821155B2 JP 63306049 A JP63306049 A JP 63306049A JP 30604988 A JP30604988 A JP 30604988A JP 2821155 B2 JP2821155 B2 JP 2821155B2
Authority
JP
Japan
Prior art keywords
recording
recording medium
information recording
contact angle
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP63306049A
Other languages
Japanese (ja)
Other versions
JPH02152032A (en
Inventor
哲也 西田
真鯉 市川
信吉 堀篭
憲雄 太田
明 後藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi Maxell Energy Ltd
Original Assignee
Hitachi Ltd
Hitachi Maxell Energy Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Maxell Energy Ltd filed Critical Hitachi Ltd
Priority to JP63306049A priority Critical patent/JP2821155B2/en
Publication of JPH02152032A publication Critical patent/JPH02152032A/en
Application granted granted Critical
Publication of JP2821155B2 publication Critical patent/JP2821155B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明はレーザ光、電子線等の記録用エネルギービー
ムによつて、映像や音声などのアナログ信号をFM変調し
た信号や、電子計算機のデータやデイジタルオーデイオ
信号などのデイジタル情報をリアルタイムで記録するこ
とが可能な情報の記録媒体に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a signal obtained by FM-modulating an analog signal such as video or audio by a recording energy beam such as a laser beam or an electron beam, or data of an electronic computer. The present invention relates to an information recording medium capable of recording digital information such as digital signals and digital audio signals in real time.

〔従来の技術〕[Conventional technology]

レーザ光等のエネルギービームを情報記録用媒体に照
射し、記録膜に凹部または孔部を形成して情報の記録を
行う情報記録用媒体に関する従来技術として、例えば記
録膜組成については特開昭57−38189、下地膜組成につ
いては、特開昭58−44224などが知られている。
As a conventional technique relating to an information recording medium for irradiating an information recording medium with an energy beam such as a laser beam and forming a concave portion or a hole in a recording film to record information, for example, Japanese Patent Application Laid-Open No. Japanese Patent Application Laid-Open No. 58-44224 and the like are known for the composition of the base film.

〔発明が解決しようとする課題〕[Problems to be solved by the invention]

しかしながら、上記従来技術に示された情報記録用媒
体をはじめ、これまで知られている技術においては、記
録された孔の形状に関する配慮はなされていない。発明
者らの検討によると、リム内側での傾斜と底面とのなす
角度(接触角とよぶ)が大きく、リム幅の小さい場合に
は、高密度記録(ピツト間隔が1.5μm)を行う際にSN
比が小さく、クロストークが大きくなり、さらに、記録
光パワーマージンが小さい、という問題点を有してい
た。
However, in the arts known so far, including the information recording medium shown in the above-mentioned prior art, no consideration is given to the shape of the recorded hole. According to the studies by the inventors, when the angle between the inclination inside the rim and the bottom surface (referred to as the contact angle) is large and the rim width is small, high-density recording (pit interval 1.5 μm) is performed. SN
There is a problem that the ratio is small, the crosstalk is large, and the recording light power margin is small.

本発明の目的は、上記従来技術の欠点を無くし、記録
・再生特性が良好で、安定性の良い情報記録用薄膜を提
供することにある。
SUMMARY OF THE INVENTION An object of the present invention is to provide a thin film for information recording which eliminates the above-mentioned disadvantages of the prior art, has good recording and reproducing characteristics, and has good stability.

〔課題を解決するための手段〕[Means for solving the problem]

上記の目的を達成するために本発明の情報記録用媒体
においては、記録用エネルギービームの照射を受けて形
成した凹部または孔部のまわりに形成されるリムの内側
での下地膜とのなす角度(接触角)を7度以上40度以下
とする。ただし、接触角のより好ましい範囲は8度以上
35度以下、特に好ましい範囲は10度以上30度以下であ
る。
In order to achieve the above object, in the information recording medium of the present invention, the angle formed by the base film inside the rim formed around the concave portion or the hole formed by the irradiation of the recording energy beam. (Contact angle) is 7 degrees or more and 40 degrees or less. However, a more preferable range of the contact angle is 8 degrees or more.
35 degrees or less, a particularly preferable range is 10 degrees or more and 30 degrees or less.

上記の条件を満足していれば、基板材料としては、ア
クリル樹脂,ポリスチレン,ポリカーボネート,エポキ
シ樹脂,ポリイミド,ポリアミド,ポリスチレン,ポリ
エチレン,ポリオレンフィン,紫外線硬化樹脂等の有機
物でもよく、ガラス,石英,アルミニウム等の無機物で
もよい。
As long as the above conditions are satisfied, the substrate material may be an organic material such as acrylic resin, polystyrene, polycarbonate, epoxy resin, polyimide, polyamide, polystyrene, polyethylene, polyolene fin, ultraviolet curable resin, glass, quartz, An inorganic substance such as aluminum may be used.

また、下地膜としては、蒸着,スパツタリング,プラ
ズマ重合,回転塗布等により薄膜を形成できれば、フツ
素樹脂,ポリイミド,ポリアミド,グアニン,フタロシ
アニン,アセチルセルロース,ニトロセルロース等の有
機物でも、SiO2,ZrO2,Y2O3、などの酸化物、Si3N4,AlN
などの窒化物等の無機物でもよい。さらに、記録膜とし
ては、色素等の有機物でも、Te−Se系,Te−C系,等の
無機物でもよい。
As a base film, if a thin film can be formed by vapor deposition, sputtering, plasma polymerization, spin coating, or the like, organic materials such as fluororesin, polyimide, polyamide, guanine, phthalocyanine, acetylcellulose, and nitrocellulose can be used as SiO 2 , ZrO 2. , Y 2 O 3 , etc., oxides, Si 3 N 4 , AlN
And inorganic materials such as nitrides. Further, the recording film may be an organic substance such as a dye or an inorganic substance such as a Te-Se type or a Te-C type.

本発明の情報記録用媒体は、デイスク状としてばかり
でなく、テープ状,カード状などの他の形態でも使用可
能である。
The information recording medium of the present invention can be used not only in a disk shape but also in other forms such as a tape shape and a card shape.

〔作用〕[Action]

本発明の情報記録用媒体は記録用エネルギービーム照
射時に形成される孔のまわりに形成されるリムの内側の
接触角が小さいので、孔の内径が小さい。これによつ
て、高密度記録を行う場合でも、SN比が大きく、クロス
トークが小さく、記録光パワーマージンが大きい記録媒
体とすることができる。
In the information recording medium of the present invention, since the contact angle inside the rim formed around the hole formed when the recording energy beam is irradiated is small, the inside diameter of the hole is small. Thus, even when performing high-density recording, a recording medium having a large SN ratio, small crosstalk, and a large recording light power margin can be obtained.

〔実施例〕〔Example〕

実施例1 第2図に示したように、1.6μmピツチのトラツキン
グ用の案内溝とアドレスを示すプリピツトを表面に形成
したポリカーボネート基板2を用い、まず、下地膜とし
て、上記ポリカーボネート基板1上にマグネトロンスパ
ツタリング(スパツタガスはAr100%)によつてフツ素
樹脂(ポリ四フツ化エチレン、PTFE)層3を約400Åの
厚さに、形成した。次に、上記下地膜3の上、Pb5Te80S
e15の組成の記録膜4を約200Åの膜厚に、マグネトロン
スパツタリング(スパツタガスはAr100%)によつて形
成した。
Example 1 As shown in FIG. 2, a polycarbonate substrate 2 having a 1.6 μm pitch tracking guide groove and a pre-pit indicating an address formed on the surface thereof was used. First, a magnetron was formed on the polycarbonate substrate 1 as a base film. A fluorine resin (polytetrafluoroethylene, PTFE) layer 3 was formed to a thickness of about 400 mm by spattering (sputter gas was Ar 100%). Next, Pb 5 Te 80 S
the film thickness of the recording film 4 of about 200Å composition of e 15, magnetron spa ivy ring (Supatsutagasu the Ar 100%) have been conducted under formed.

光デイスクドライブ(記録・再生装置)における記録
は次のようにして行なつた。デイスクを1800rpmで回転
させ、半導体レーザ(波長820nm)の光を記録が行なわ
れないレベル(約1mW)に保つて、記録ヘツド中のレン
ズで集光して基板を通して一方の記録膜に照射し、反射
光を検出することによつて、トラツキング用の溝上に光
スポツトの中心が常に一致するようにヘツドを駆動し
た。このようにトラツキングを行ないながら、さらに記
録膜上に焦点が来るように自動焦点合わせを行ない、記
録を行なう部分では、第3図に示したように、情報信号
に従つて強めたり、元のレベルに戻してレーザパワーを
変調した。記録を行なう部分を通り過ぎたときは、レー
ザパワーを1mWに下げてトラツキングおよび自動焦点合
わせを継続する。読み出しは、デイスクを1800rpmで回
転させ、記録時と同じようにトラツキングと自動焦点合
わせを行ないながら、記録膜に変化をおこさない1mWの
低パワーのレーザ光で反射光の強弱を検出し、情報を再
生した。
Recording in an optical disk drive (recording / reproducing apparatus) was performed as follows. The disk is rotated at 1800 rpm, and the light of the semiconductor laser (wavelength 820 nm) is kept at a level (about 1 mW) at which recording is not performed. By detecting the reflected light, the head was driven so that the center of the light spot always coincided with the tracking groove. In this way, while performing tracking, automatic focusing is performed so that the focal point is further focused on the recording film, and in the portion where recording is performed, as shown in FIG. And the laser power was modulated. After passing the part to be recorded, reduce the laser power to 1 mW and continue tracking and autofocus. For reading, the disk is rotated at 1800 rpm, tracking and automatic focusing are performed in the same way as during recording, while the intensity of the reflected light is detected with a low power laser beam of 1 mW that does not change the recording film, and the information is read. Replayed.

上記の構成の情報記録媒体において、半径30mmの場所
で記録パルス幅1T(T=90ms)、ピツト間隔1.5T(高密
度記録)として記録を行なつた場合の再生信号出力の記
録パワー依存性を第4図(a)に示す。参考例として、
下地PTFE膜の膜厚が2000Åの場合を第4図(b)に重ね
て示す。
In the information recording medium having the above-described configuration, the recording power dependence of the reproduction signal output when recording is performed at a place having a radius of 30 mm with a recording pulse width of 1T (T = 90 ms) and a pitch interval of 1.5T (high-density recording). It is shown in FIG. As a reference example,
FIG. 4 (b) shows a case where the thickness of the base PTFE film is 2000 °.

上述の実験で、記録パワーが5.5mWの場合の孔の形状
を走査型トンネル顕微鏡(STM)または表面形態解析走
査電子顕微鏡(ESA)で測定した孔の断面形状(直径方
向での表面形状)を第1図に示す。
In the experiment described above, the cross-sectional shape (surface shape in the diameter direction) of the hole measured with a scanning tunneling microscope (STM) or surface morphology analysis scanning electron microscope (ESA) when the recording power was 5.5 mW was measured. As shown in FIG.

下地PTFE膜の膜厚が400Åのものでは接触角1が20度
であり、ピツト間隔1.5T高パワー(8mW)で記録時でも
再生信号出力は0.17Vとスライスレベル(0.14V)、より
も高いのに対し、下地PTFE膜の膜厚が2000Åのもので
は、接触角が45度であり、ピツト間隔1.5T、高パワー
(8mW)記録時では再生信号出力は0.13Vとスライスレベ
ルよりも低い。
When the thickness of the underlayer PTFE film is 400 °, the contact angle 1 is 20 degrees, and the reproduction signal output is 0.17V, which is higher than the slice level (0.14V) even during recording with a pit interval of 1.5T high power (8mW). On the other hand, when the thickness of the base PTFE film is 2000 °, the contact angle is 45 degrees, the pit interval is 1.5 T, and at the time of high power (8 mW) recording, the reproduced signal output is 0.13 V, which is lower than the slice level.

実施例2 Arガスでスパツタリングした下地PTFE膜の膜厚を100
Åから2200Åまで変化させた時、高パワー(8mW)で記
録したピツトの接触角を測定した結果を第5図に示す。
図示のように、下地PTFE膜の膜厚が大きいほど接触角は
大きい。
Example 2 When the thickness of the base PTFE film sputtered with Ar gas was 100
FIG. 5 shows the results of measuring the contact angle of the pit recorded at a high power (8 mW) when the angle was changed from Å to 2200 °.
As shown in the figure, the larger the thickness of the underlying PTFE film, the larger the contact angle.

さらに、スパツタガスとして、ArにO2を加えて下地PT
FE膜を400Å形成した場合、O2分圧を0%から45%まで
変化させて、高パワー(8mW)で記録したピツトの接触
角を測定した結果を第6図に示す。O2分圧が大きいほど
接触角は大きい。
In addition, O 2 is added to Ar
FIG. 6 shows the result of measuring the contact angle of a pit recorded at a high power (8 mW) while changing the O 2 partial pressure from 0% to 45% when the FE film was formed at 400 °. The greater the O 2 partial pressure, the greater the contact angle.

次に、上記の結果をもとに、ピツト間隔1.5T高パワー
(8mW)記録時の再生信号出力の接触角依存性をまとめ
ると、第7図に示すようになつた。
Next, based on the above results, the contact angle dependence of the reproduction signal output at the time of high power (8 mW) recording at a pitch of 1.5T is summarized as shown in FIG.

接触角が、7度以上40度以下の場合、スライスレベル
A(0.14V、装置にとつてきつい条件)以上の再生信号
出力が得られ、接触角が8度以上35度以下の場合、スラ
イスレベルB(0.15V、装置にとつて一般的な条件)以
上の再生信号出力が得られ、接触角が10度以上30度以下
の場合、スライスレベルC(0.16V、装置にとつてゆる
い条件)以上の再生信号強度が得られた。
When the contact angle is 7 degrees or more and 40 degrees or less, a reproduction signal output higher than the slice level A (0.14 V, which is a condition suitable for the apparatus) is obtained. When the contact angle is 8 degrees or more and 35 degrees or less, the slice level is obtained. B (0.15 V, general condition for the device) or higher, and when the contact angle is 10 degrees or more and 30 degrees or less, the slice level is C (0.16 V, a loose condition for the device) or higher. The reproduction signal strength of was obtained.

基板材料として、上記ポリカーボネーイトの代わり
に、アクリル樹脂,ポリスチレン,エポキシ樹脂,ポリ
イミド,ポリアミド,ポリエチレン,ポリオレフィン,
紫外線硬化樹脂,ガラス,石英,アルミニウム等を用い
ても同様な結果が得られた。
As the substrate material, acrylic resin, polystyrene, epoxy resin, polyimide, polyamide, polyethylene, polyolefin,
Similar results were obtained by using UV curable resin, glass, quartz, aluminum and the like.

下地膜として、下地PTFEの代わりに、PTFE以外のフッ
素樹脂,ポリイミド,ポリアミド,グアニン,フタロシ
アニン,アセチルセルロース,ニトロセルロース等を用
いても、同様な結果が得られた。
Similar results were obtained by using a fluororesin other than PTFE, polyimide, polyamide, guanine, phthalocyanine, acetylcellulose, nitrocellulose, etc. instead of PTFE as the base film.

記録膜として、上記Pb−Te−Se系の代わりに、Te−C
系,Te−Sb系などの他のカルコゲナイド系記録膜また
は、色素等の有機物記録膜を用いても同様な結果が得ら
れた。
As the recording film, instead of the above-mentioned Pb-Te-Se system, Te-C
Similar results were obtained using other chalcogenide-based recording films such as a recording system, Te-Sb system, or organic recording films such as dyes.

〔発明の効果〕 以上説明したように、本発明による情報記録用媒体を
用いれば、記録した孔のリム内側の接触角が小さいの
で、高密度記録を行つた場合でも大きい再生信号出力が
得られ、クロストークも小さく記録パワーマージンも大
きいという効果がある。
[Effects of the Invention] As described above, the use of the information recording medium according to the present invention makes it possible to obtain a large reproduction signal output even when performing high-density recording because the contact angle of the recorded hole inside the rim is small. This has the effect that the crosstalk is small and the recording power margin is large.

【図面の簡単な説明】[Brief description of the drawings]

第1図は本発明の実施例において、レーザ光照射により
形成された孔の断面図、第2図は本発明の情報記録用媒
体の構造を示す断面図、第3図は本発明の実施例におけ
る記録レーザパワーの波形図、第4図は本発明の実施例
における再生信号出力の記録パワー依存性の測定図、第
5図は本発明の実施例における接触角のPTFE膜の膜厚依
存性を示す測定図、第6図は本発明の実施例におけるPT
FE膜形成時のスパツタリングガス中のO2分圧とピツトの
接触角との関係を示す測定図、第7図は本発明中の実施
例におけるレーザパワー8mWで記録した時の再生信号出
力と接触角との関係を示す測定図である。 1……接触角、2……ポリカーボネート基板、3……下
地膜、4……記録膜。
FIG. 1 is a sectional view of a hole formed by laser beam irradiation in an embodiment of the present invention, FIG. 2 is a sectional view showing the structure of an information recording medium of the present invention, and FIG. 3 is an embodiment of the present invention. FIG. 4 is a measurement diagram of the recording power dependence of a reproduction signal output in the embodiment of the present invention, and FIG. 5 is a dependence of the contact angle on the thickness of the PTFE film in the embodiment of the present invention. FIG. 6 shows the PT in the embodiment of the present invention.
FIG. 7 is a measurement diagram showing the relationship between the partial pressure of O 2 in the sputtering gas and the contact angle of the pit during the formation of the FE film. FIG. 7 shows the reproduction signal output when recording with a laser power of 8 mW in the embodiment of the present invention. FIG. 6 is a measurement diagram showing a relationship between the contact angle and the contact angle. 1 ... contact angle, 2 ... polycarbonate substrate, 3 ... base film, 4 ... recording film.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 堀篭 信吉 東京都国分寺市東恋ケ窪1丁目280番地 株式会社日立製作所中央研究所内 (72)発明者 太田 憲雄 東京都国分寺市東恋ケ窪1丁目280番地 株式会社日立製作所中央研究所内 (72)発明者 後藤 明 大阪府茨木市丑寅1丁目1番88号 日立 マクセル株式会社内 (56)参考文献 特開 昭55−101143(JP,A) (58)調査した分野(Int.Cl.6,DB名) G11B 7/24 563 G11B 7/24 561──────────────────────────────────────────────────続 き Continuing from the front page (72) Inventor Noriyoshi Horigome 1-280 Higashi Koikekubo, Kokubunji-shi, Tokyo Inside the Central Research Laboratory, Hitachi, Ltd. Central Research Laboratory (72) Inventor Akira Goto 1-188 Ushitora, Ibaraki-shi, Osaka Hitachi Maxell, Ltd. (56) References JP-A-55-101143 (JP, A) (58) Fields investigated .Cl. 6 , DB name) G11B 7/24 563 G11B 7/24 561

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】記録用エネルギービームの照射を受けて記
録膜に凹部または孔部が形成される情報記録用媒体にお
いて、上記情報記録用媒体の基板と上記記録膜との間に
フッ素樹脂層を有し、上記凹部または孔部のまわりに形
成されるリムの内側の傾斜と上記凹部または孔部の底面
とのなす角度が7度以上40度以下となるよう上記フッ素
樹脂層の厚さが設定されていることを特徴とする情報記
録用媒体。
An information recording medium in which a concave portion or a hole is formed in a recording film upon irradiation of a recording energy beam, a fluororesin layer is provided between the substrate of the information recording medium and the recording film. The thickness of the fluororesin layer is set so that the angle formed between the inner slope of the rim formed around the concave portion or the hole and the bottom surface of the concave portion or the hole is not less than 7 degrees and not more than 40 degrees. An information recording medium characterized by being recorded.
JP63306049A 1988-12-05 1988-12-05 Information recording medium Expired - Fee Related JP2821155B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63306049A JP2821155B2 (en) 1988-12-05 1988-12-05 Information recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63306049A JP2821155B2 (en) 1988-12-05 1988-12-05 Information recording medium

Publications (2)

Publication Number Publication Date
JPH02152032A JPH02152032A (en) 1990-06-12
JP2821155B2 true JP2821155B2 (en) 1998-11-05

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP63306049A Expired - Fee Related JP2821155B2 (en) 1988-12-05 1988-12-05 Information recording medium

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JP (1) JP2821155B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55101143A (en) * 1979-01-29 1980-08-01 Teac Co Optical reproducing disc

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JPH02152032A (en) 1990-06-12

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