JP2803923B2 - Test head attachment / detachment device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a test head attaching / detaching device when a plurality of IC test handlers are arranged.

[0002]

2. Description of the Related Art FIG. 3 is a front view showing a conventional test head attaching / detaching apparatus in which a plurality of IC test handlers are arranged, and FIG. 4 is a side view of FIG. In the figure, 1
Is a handler, 2 is a test head for testing an IC, 3 is a test head support for holding the test head 2, 4 is a shaft provided on the test head support 3, 5 is fitted on the shaft 4, and is up, down, left and right. The arm is connected to the test head 2 at the end thereof and is positioned for connection with the contact portion of the handler 1.

Next, the operation will be described. In the above configuration, the test head 2 is lifted,
When the test is not performed, the test head 2 is held on the test head support 3 via the arm 5, while the test head 2
When the test is performed, that is, when the test of the IC is performed by connecting the test head 2 and the contact portion of the handler 1, the handler 1 always holds. Next, the connection between the test head 2 and the contact portion of the handler 1 at the time of the IC test is guided by a shaft 4 provided on the test head support table 3, and is adjusted by sliding up, down, left and right, and positioning is performed. , The test head 2 is lowered.
When raising the test head 2, the arm 5 connected to the test head 2 is guided by the shaft 4 and slides upward to raise the test head 2. Since the conventional apparatus performs the above operation, the handler 1 and the test head support 3 are paired.

[0004]

Since the conventional test head attaching / detaching device is configured as described above, the handler and the test head support must be paired.
When a plurality of handlers are used, there are problems that the space occupied by the test head support is large, and that the cost of the apparatus is increased.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and a test head attaching / detaching apparatus capable of reducing the space occupied by the entire apparatus when a plurality of handlers are used and reducing the apparatus cost. The purpose is to get.

[0006]

According to the present invention, there is provided a test head attaching / detaching apparatus in which a plurality of handlers for mounting and holding a test head itself are arranged, and are arranged in parallel with the arrangement direction of the handlers and extended according to the number of handlers. Possible rails, guided by these rails, can run, and hold the test head, move up and down, and can freely adjust in each direction the connection between the test head and the contact part of the handler during IC testing. It has a test head attaching / detaching part.

[0007]

The test head attaching / detaching apparatus according to the present invention comprises a plurality of handlers arranged side by side, a guide rail provided in parallel, and a test head holder provided at a common test head attaching / detaching portion running along the guide rail. By using it to hold and raise the test head, and by freely adjusting the test head attachment / detachment part in each direction,
Performs positioning for connection between the test head and the contact part of the handler during IC testing.

[0008]

[Embodiment 1] FIG. 1 shows an embodiment of the present invention.
This will be described with reference to FIG. FIG. 1 is a front view of the test head attaching / detaching device, and FIG. 2 is a view taken in the direction of arrow A in FIG. In the figure, 1
Is a handler arranged in a plurality of rows, 2 is a test head mounted on each handler, 6 is an attachment / detachment of the test head 2 and a connection between the test head 2 and a contact portion of the handler 1 during an IC test. This is a common test head attachment / detachment part that can perform positioning in any direction and can be freely adjusted in each direction.
Is a test head holder which is provided in the test head attaching / detaching section 6 and holds the test head 2 and moves up and down. 8 connects a rail 9 running upward in parallel with the arrangement direction of the handlers 1 and the test head attaching / detaching section 6, Suspension devices 10 that move on the rails 9 are rail supports that support the rails 9.

Next, the operation will be described. In the test head attaching / detaching apparatus configured as described above, when the test head 2 is placed on the handler 1 and held at all times, and the test head 2 is removed from any one of the handlers from a state in which a plurality of the handlers 1 are arranged. Then, the test head attaching / detaching portion 6, which can be freely adjusted in each direction, is run under the guidance of the rail 9, and is moved to the position of the handler from which the test head 2 is to be removed, and the test head attaching / detaching portion 6 is lowered. Then, the test head 2 is held by the test head holder 7 and lifted to remove it from the contact portion of the handler. When the test head 2 is connected, the test head attaching / detaching portion 6 is freely adjusted in each direction on the rail 9 of the handler to which the test head 2 is connected. I do. Regarding the attachment / detachment of the test head 2 of another handler, the test head attachment / detachment section 6 may be guided by the guide on the rail 9 and run to the target handler position to attach / detach the test head.

Embodiment 1 In the above embodiment, the test head is mounted on the upper part of the handler to test the IC. However, the present invention is also applicable to a test head connected to the side or lower part of the handler.

Embodiment 3 FIG. The rail 9 shown in the above embodiment may be extended as the number of handlers increases.

[0012]

Since the present invention is constructed as described above, it is possible to cope with the mounting and dismounting of the test heads of a plurality of handlers in the space of one set of rail supports, and to reduce the space and cost. In addition, even if the number of handlers is increased, there is an effect that the rails can be easily extended by extending the rails.

[Brief description of the drawings]

FIG. 1 is a front view showing a test head attaching / detaching device of a handler according to an embodiment of the present invention.

FIG. 2 is a view taken in the direction of arrow A in FIG. 1;

FIG. 3 is a front view showing a conventional test head attachment / detachment device for a handler.

FIG. 4 is a side view of FIG. 3;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Handler 2 Test head 6 Test head attachment / detachment part 7 Test head holder 8 Hanging tool 9 Rail 10 Rail support

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-4-186856 (JP, A) JP-A-3-57940 (JP, A) JP-A-4-26539 (JP, A) 114978 (JP, U) Hira 3-57940 (JP, U) (58) Fields investigated (Int. Cl. ⁶ , DB name) H01L 21/66 G01R 31/26

Claims (1)

(57) [Claims] 1. An IC test handler for testing ICs, wherein a plurality of IC test handlers are arranged, and a tester test head attaching / detaching device connected to each of the IC test handlers is arranged in parallel with the arrangement direction of the handlers and supported above the same.
Guide rail, and the rail attached to this rail
And a suspension that travels as a guide
Equipped with a test head holder that can be attached and lifted
And a test head attaching / detaching portion .