JP2787924B2 - Electron beam micro analyzer - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to an electron beam microanalyzer.

(Prior Art) An electron beam micro-analyzer is used for analyzing the qualitative analysis or concentration distribution data of an element by X-rays emitted from a sample excited by an electron beam, and for analyzing the concentration of X-rays emitted from an excited sample.
Sample surface shape data is obtained from secondary electrons, and these data are displayed on the CRT. Details on the secondary electron beam image or X-ray element mapping image are visually unique at X-rays. Conventionally, when performing analysis, as a method for displaying these two types of data, the shape information of the sample surface due to secondary electrons is displayed on a CRT as a scanning electron microscope image, and the X-ray data is represented by secondary electrons. Brightness modulation or Y-axis modulation is performed on a screen (CRT) different from the scanning electron microscope, and the X-ray intensity is represented by brightness or the height of a graph and displayed on a screen. Although they are displayed separately, observing both of these data separately makes it impossible to intuitively know the mutual positional relationship between the two data, and if the positional relationship between the two data becomes inaccurate, Problem, both data are 1
It is desirable to see them on the screen at the same time. Therefore, there is also a method of superimposing and displaying the secondary electron beam image and the element distribution image by X-rays on one CRT screen. However, when superimposed, both the secondary electron beam image and the X-ray image become unclear, There was a problem that it became difficult to observe.

(Problems to be Solved by the Invention) The present invention enables the simultaneous display of the shape of the sample surface or the entire image of the element distribution and the element concentration at a specified location on a single screen, and furthermore, the analysis result is clear at a glance. The purpose is to be able to grasp.

(Means for Solving the Problems) In an electron beam microanalyzer, means for displaying a secondary electron beam image on a screen, means for specifying an analysis element and an X-ray analysis location on the screen, and the above specification on a sample surface X-ray spectroscopy means for performing X-ray analysis on an element specified at a location,
Means for converting the line detection signal intensity into data of a vertical distance from an arbitrary base point on a display screen and superimposing the data on the secondary electron image with each point of the designated position of the secondary electron beam image as a base point; The X-ray detection signal intensity was displayed in the form of a bar graph.

(Function) The surface shape of the sample can be displayed by a secondary electron beam image emitted from the sample excited by the electron beam, and the element concentration of the sample is measured from characteristic X-rays emitted from the excited sample. be able to. According to the present invention, by simultaneously displaying both measurement data on the same screen, the shape and element distribution of the sample surface, the result of the detailed analysis on a specific point or a line, and the positional relationship can be grasped at a glance. At this time, the secondary electron image is an image of the sample surface, the X-ray data is a graph display, and since both data display modes are different, it is easy to visually distinguish the two images and to see clearly. Two types of images can be seen without loss, and the analysis result is displayed in a graph at the position where the analysis was performed on the entire image of the sample surface, so that the positional relationship of the display graph can be grasped accurately at a glance.

(Embodiment) FIG. 1 shows an embodiment of the present invention. In FIG.
S is a sample, 1 is an electron gun, 2 is a converging lens for converging electrons emitted from the electron gun 1, 3 is an aperture of an electron beam, 4 is a scanning coil, 5 is an objective lens, and 6 is a sample moving X, Y
A driving stage, 7 is a scanning signal generator, 8 is a scanning signal amplifier, 9 is a spectral crystal, 10 is an X-ray detector, 11 is a wave height analyzer,
12 is a secondary electron detector. 13 is a frame memory for storing X-ray data, and 14 is a frame memory for storing secondary electron beam data. 15 is a personal computer. Reference numeral 16 denotes a stage controller for controlling the X, Y drive stage 6, and reference numeral 17 denotes a keyboard for specifying a measurement element and a display method. 18 designates an analysis position with a mouse. 19 displays the measurement data on the CRT.

The measurement operation will be described. First, the measurement range of the sample S is scanned with an electron beam, secondary electrons are detected by the secondary electron detector 12, and the detection signal is stored in the frame memory 14. The stored secondary electron detection data is called up and a secondary electron beam image is displayed on the CRT 19. On the secondary electron beam image displayed on the CRT 19, an analysis position for performing X-ray analysis is designated using the mouse 18, and an analysis element to be measured at the analysis position is designated using a keyboard. Analysis position data is X, Y at the specified point on the screen
The value of the scanning signal is used as coordinate data, and is taken into the personal computer 15. However, a plurality of designated positions and analysis elements may be used. After the above specification, the X-ray analysis operation is started. The personal computer drives the stage controller 16 based on the coordinate data, positions the analysis position on the sample surface at the focal point of the X-ray spectrometer, spectrally detects the X-rays, and posts a column having a height corresponding to the detected signal intensity. And bar graph image data, and using the specified analysis position of the secondary electron image as the graph starting point, the image data is superimposed on the video signal, and as shown in FIG. The specified element concentration is displayed on the electron beam image. As shown in FIG. 4, a plurality of columns and bars may be displayed according to the number of designated elements. Further, as shown in FIG. 3, instead of a secondary electron beam image, the concentration of another element at a designated point may be displayed as a bar graph with an X-ray mapping image of a certain element as a background. In the example of FIG. 3, the mapping image is displayed as a perspective view by computer graphics. It is also possible to display the concentration by a number above the column or bar graph.

(Effects of the Invention) According to the present invention, the entire image of the shape or element distribution of the sample surface and the density display of the specified location can be simultaneously displayed on one screen, so that the positional relationship between the two data can be accurately determined at a glance. It became possible to grasp the analysis result accurately.

[Brief description of the drawings]

FIG. 1 is a block diagram of an embodiment of the present invention, and FIG.
CRT display example 1, FIG. 3 shows CRT display example 2 of the present invention, and FIG. 4 shows CRT display example 3 of the present invention. S ... Sample, 1 ... Electron gun, 2 ... Convergent lens, 3 ...
Aperture, 4 ... Scan coil, 5 ... Objective lens, 6 ... X,
Y drive stage, 7 scanning signal generator, 8 scanning signal amplifier, 9 spectral crystal, 10 X-ray detector, 11
Wave height analyzer, 12 secondary electron detector, 13, 14 frame memory, 15 personal computer, 16 stage controller, 17 keyboard, 18 mouse, 19 CRT.

Claims (1)

(57) [Claims] A means for displaying a secondary electron beam image on a screen; a means for specifying an analysis element and an X-ray analysis location on the screen; and an X-ray analysis for the element specified by the specified location on the sample surface. X-ray spectroscopy means for converting the intensity of the X-ray detection signal into data of a vertical distance from an arbitrary base point on the display screen, and using each point of the designated portion of the secondary electron beam image as a base point, An electron beam microanalyzer characterized in that the X-ray detection signal intensity is displayed in a bar graph form by providing means for superimposing and displaying the X-ray detection signal intensity.