JP2759456B2 - Magnetic media recording device - Google Patents
Magnetic media recording deviceInfo
- Publication number
- JP2759456B2 JP2759456B2 JP63075775A JP7577588A JP2759456B2 JP 2759456 B2 JP2759456 B2 JP 2759456B2 JP 63075775 A JP63075775 A JP 63075775A JP 7577588 A JP7577588 A JP 7577588A JP 2759456 B2 JP2759456 B2 JP 2759456B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- fine particles
- parts
- head
- medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910021397 glassy carbon Inorganic materials 0.000 claims description 30
- 239000002131 composite material Substances 0.000 claims description 26
- 229910052751 metal Inorganic materials 0.000 claims description 23
- 239000002184 metal Substances 0.000 claims description 23
- 239000010419 fine particle Substances 0.000 claims description 22
- 150000002484 inorganic compounds Chemical class 0.000 claims description 11
- 229910010272 inorganic material Inorganic materials 0.000 claims description 11
- 229910044991 metal oxide Inorganic materials 0.000 claims description 6
- 150000004706 metal oxides Chemical class 0.000 claims description 6
- 150000004767 nitrides Chemical class 0.000 claims description 6
- XPFVYQJUAUNWIW-UHFFFAOYSA-N furfuryl alcohol Chemical compound OCC1=CC=CO1 XPFVYQJUAUNWIW-UHFFFAOYSA-N 0.000 description 24
- 239000000463 material Substances 0.000 description 23
- 239000003575 carbonaceous material Substances 0.000 description 18
- 238000012360 testing method Methods 0.000 description 16
- 229920005989 resin Polymers 0.000 description 14
- 239000011347 resin Substances 0.000 description 14
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 13
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 12
- JOXIMZWYDAKGHI-UHFFFAOYSA-N toluene-4-sulfonic acid Chemical compound CC1=CC=C(S(O)(=O)=O)C=C1 JOXIMZWYDAKGHI-UHFFFAOYSA-N 0.000 description 12
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 11
- 239000000203 mixture Substances 0.000 description 11
- 239000002245 particle Substances 0.000 description 9
- 239000010409 thin film Substances 0.000 description 9
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 6
- 229910052799 carbon Inorganic materials 0.000 description 6
- 239000000843 powder Substances 0.000 description 6
- 238000004544 sputter deposition Methods 0.000 description 6
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 5
- 238000003756 stirring Methods 0.000 description 5
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 4
- 239000007864 aqueous solution Substances 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000005011 phenolic resin Substances 0.000 description 4
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 4
- 229910010271 silicon carbide Inorganic materials 0.000 description 4
- 229920001187 thermosetting polymer Polymers 0.000 description 4
- 238000004804 winding Methods 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000007833 carbon precursor Substances 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 238000007667 floating Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000005461 lubrication Methods 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- YLQBMQCUIZJEEH-UHFFFAOYSA-N Furan Chemical compound C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 2
- 229930040373 Paraformaldehyde Natural products 0.000 description 2
- 239000012298 atmosphere Substances 0.000 description 2
- AOWKSNWVBZGMTJ-UHFFFAOYSA-N calcium titanate Chemical compound [Ca+2].[O-][Ti]([O-])=O AOWKSNWVBZGMTJ-UHFFFAOYSA-N 0.000 description 2
- 238000010000 carbonizing Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 239000000805 composite resin Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 238000006386 neutralization reaction Methods 0.000 description 2
- 229920002866 paraformaldehyde Polymers 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000004576 sand Substances 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 230000000087 stabilizing effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000011882 ultra-fine particle Substances 0.000 description 2
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 1
- 229920001342 Bakelite® Polymers 0.000 description 1
- 229910020630 Co Ni Inorganic materials 0.000 description 1
- 229910000684 Cobalt-chrome Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910002440 Co–Ni Inorganic materials 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- 241000537371 Fraxinus caroliniana Species 0.000 description 1
- 229910003962 NiZn Inorganic materials 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 229920000297 Rayon Polymers 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 235000021355 Stearic acid Nutrition 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 229920000180 alkyd Polymers 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000004637 bakelite Substances 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- 238000003763 carbonization Methods 0.000 description 1
- 239000010952 cobalt-chrome Substances 0.000 description 1
- 238000007334 copolymerization reaction Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- BXKDSDJJOVIHMX-UHFFFAOYSA-N edrophonium chloride Chemical compound [Cl-].CC[N+](C)(C)C1=CC=CC(O)=C1 BXKDSDJJOVIHMX-UHFFFAOYSA-N 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000007849 furan resin Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910021385 hard carbon Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 235000010299 hexamethylene tetramine Nutrition 0.000 description 1
- 239000004312 hexamethylene tetramine Substances 0.000 description 1
- VKYKSIONXSXAKP-UHFFFAOYSA-N hexamethylenetetramine Chemical compound C1N(C2)CN3CN1CN2C3 VKYKSIONXSXAKP-UHFFFAOYSA-N 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 238000005470 impregnation Methods 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 229920005610 lignin Polymers 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- ZLNQQNXFFQJAID-UHFFFAOYSA-L magnesium carbonate Chemical compound [Mg+2].[O-]C([O-])=O ZLNQQNXFFQJAID-UHFFFAOYSA-L 0.000 description 1
- 239000001095 magnesium carbonate Substances 0.000 description 1
- 229910000021 magnesium carbonate Inorganic materials 0.000 description 1
- 239000006247 magnetic powder Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 229920003986 novolac Polymers 0.000 description 1
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 1
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 229910002077 partially stabilized zirconia Inorganic materials 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 229920001495 poly(sodium acrylate) polymer Polymers 0.000 description 1
- 229920002239 polyacrylonitrile Polymers 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000011164 primary particle Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 239000002964 rayon Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- NNMHYFLPFNGQFZ-UHFFFAOYSA-M sodium polyacrylate Chemical compound [Na+].[O-]C(=O)C=C NNMHYFLPFNGQFZ-UHFFFAOYSA-M 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000008117 stearic acid Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 1
- 229920006305 unsaturated polyester Polymers 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B23/00—Record carriers not specific to the method of recording or reproducing; Accessories, e.g. containers, specially adapted for co-operation with the recording or reproducing apparatus ; Intermediate mediums; Apparatus or processes specially adapted for their manufacture
- G11B23/50—Reconditioning of record carriers; Cleaning of record carriers ; Carrying-off electrostatic charges
- G11B23/505—Reconditioning of record carriers; Cleaning of record carriers ; Carrying-off electrostatic charges of disk carriers
- G11B23/507—Reconditioning of record carriers; Cleaning of record carriers ; Carrying-off electrostatic charges of disk carriers combined with means for reducing influence of physical parameters, e.g. temperature change, moisture
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B17/00—Guiding record carriers not specifically of filamentary or web form, or of supports therefor
- G11B17/32—Maintaining desired spacing between record carrier and head, e.g. by fluid-dynamic spacing
Landscapes
- Carbon And Carbon Compounds (AREA)
- Physical Vapour Deposition (AREA)
- Lubricants (AREA)
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
- Ceramic Products (AREA)
- Magnetic Record Carriers (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、情報処理用の記録装置に利用する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention is used for a recording device for information processing.
本発明は、情報を記録およびまたは再生する記録媒体
の摺接部品を有する磁気媒体装置に関する。特に、テー
プ状、ディスク状あるいはシート状などの記録媒体と常
時または一時的に相対して摺接する部品を有する磁気媒
体記録装置に関する。The present invention relates to a magnetic medium device having a recording medium sliding part for recording and / or reproducing information. In particular, the present invention relates to a magnetic medium recording apparatus having a component that constantly or temporarily comes into sliding contact with a recording medium such as a tape, a disk, or a sheet.
本発明は磁気ヘッドおよびこの磁気ヘッドに対して磁
気記録媒体を移動させる手段を備えた磁気媒体記録装置
において、 ガラス状カーボンと、金属酸化物、金属窒化物、金属
炭化物および金属ホウ化物の微粒子のうちの一種以上の
無機化合物とを含む複合材料により構成された磁気記録
媒体に摺接する摺接部品を用いることにより、 装置の動作を安定させ、耐久性を向上させ、磁気ヘッ
ドと磁気記録媒体との間隔を狭くかつ安定に維持できる
ようにしたものである。The present invention relates to a magnetic medium recording apparatus provided with a magnetic head and a means for moving a magnetic recording medium with respect to the magnetic head, comprising a glassy carbon, a metal oxide, a metal nitride, a metal carbide and a metal boride fine particle. By using a sliding part that slides on a magnetic recording medium composed of a composite material containing one or more inorganic compounds, the operation of the device is stabilized, the durability is improved, and the magnetic head and the magnetic recording medium are Are kept narrow and stable.
現在、表面に磁性層を塗布したり、薄膜形成した磁性
層を有するフレキシブルディスクやハードディスクまた
磁気テープを用いて記録およびまたは再生を行うための
種々の磁気媒体装置が市販されており、さらに開発が進
められている。At present, various magnetic media devices for recording and / or reproducing using a flexible disk, a hard disk or a magnetic tape having a magnetic layer coated on the surface or a magnetic layer formed as a thin film are commercially available, and further development is underway. Is underway.
これらの記録再生装置は、記録媒体と常時または一時
的に相対して摺接する部品が数多く使用されている。こ
の種の部品を例示すれば、フレキシブルディスクのヘッ
ドおよびヘッドスライダ安定化板、ジャケットのライナ
があり、また磁気テープ用ヘッド、ヘッドスライダ、ガ
イドピン、ガイドローラ、シリンダ、カセット内のフリ
クションシート、ハードディスクの浮上型ヘッドスライ
ダなどがある。これらの摺接部品は、耐久性に優れ、か
つ相対的に摺接する記録媒体を損傷させないことが必要
である。These recording / reproducing apparatuses use a large number of components that are in constant or temporary sliding contact with the recording medium. Examples of such parts include a flexible disk head and a head slider stabilizing plate, a jacket liner, a magnetic tape head, a head slider, a guide pin, a guide roller, a cylinder, a friction sheet in a cassette, and a hard disk. Floating head slider. It is necessary that these sliding parts have excellent durability and do not damage the recording medium which relatively slides.
特に記録再生時に摺接して微妙な間隙(スペーシン
グ)を保つ必要があるため、磁気ヘッドおよびスライダ
の製作には十分な注意が施されており、その材質および
形状は精選されている。従来からこのヘッドスライダの
材料としてはチタン酸カルシウム、チタン酸バリウム、
硬質ガラス、アルミナ系セラミックス、カーボン系セラ
ミックスなどが開発されてきている。In particular, since it is necessary to maintain a delicate gap (spacing) by sliding contact during recording and reproduction, sufficient attention has been paid to the manufacture of the magnetic head and the slider, and the material and shape thereof have been carefully selected. Conventionally, the material of this head slider has been calcium titanate, barium titanate,
Hard glass, alumina ceramics, carbon ceramics and the like have been developed.
一方、フレキシブル磁気ディスクは昨今の高密度化の
要請から年々記録密度が高まり、さらに小型化へと進ん
できている。小型大容量化のために磁性層を連続金属薄
膜媒体化したり、ディスクの回転速度を300rpmから4000
rpmまで高めたり、あるいはトラッキングを高精度化す
るためにハード磁気ディスク装置にみられるサーボシス
テムが導入されている。さらに磁性層厚みも薄くなる傾
向にある。On the other hand, the recording density of flexible magnetic disks has been increasing year by year due to the recent demand for higher density, and the size of flexible magnetic disks has been further reduced. The magnetic layer is made into a continuous metal thin film medium to increase the size and capacity, and the disk rotation speed is increased from 300 rpm to 4000.
Servo systems found in hard magnetic disk drives have been introduced to increase the rpm or to increase the tracking accuracy. Further, the thickness of the magnetic layer tends to be reduced.
また、磁気テープにおいてもデジタル記録や、より高
密度な記録が行われるようになり、走行ずれや摺動に係
わる問題がより大きくなってきている。Also, digital recording and higher-density recording have been performed on magnetic tapes, and problems relating to running deviation and sliding have become more serious.
フレキシブル磁気ディスクではこのような高密度化、
高速度化に対応して生ずる問題として磁気ヘッドと媒体
間のスペーシング(間隙)の安定化があり、そのための
装置上の工夫が必要とされていた。これに対処するよう
に裏面から媒体を押し付ける方法が取られたが、この方
法では新規の金属媒体などを用いるシステムに対して十
分な耐摩耗性を有した材料がなく、また媒体に傷を発生
させないものとして十分なものがなかった。With flexible magnetic disks, such high density,
As a problem corresponding to the increase in speed, stabilization of the spacing (gap) between the magnetic head and the medium has been required, and contrivance on the apparatus has been required. In order to cope with this, the method of pressing the media from the back side has been adopted, but this method does not have sufficient abrasion resistant material for systems using new metal media etc. There wasn't enough to prevent it.
磁気テープではテープ媒体と摺動性が優れテープの走
行ずれ、テープの安定走行を保証するガイドピンなどの
材料において問題が生じてきている。Magnetic tapes have excellent sliding properties with tape media, and have caused problems in materials such as guide slippage and deviation of the running of the tape, which guarantees stable running of the tape.
またカセット内のテープの巻き、その走行に対しても
厳しい要求があり媒体を傷つけなく、またその材料自身
も媒体により傷つけられることがないような材料が要求
されている。Further, there is a strict demand for winding and running the tape in the cassette, and there is a demand for a material that does not damage the medium and that does not damage the medium itself.
ハードディスク装置においても高密度化における浮上
ヘッドの低浮上化のみならず、システムの小型化と高密
度対応のため、より厳しいヘッド・媒体タッチシステム
が要求されている。Hard disk devices are required to have a stricter head / medium touch system for not only lowering the flying height of the flying head in high density but also for miniaturizing the system and supporting high density.
本発明はこれらの諸問題を解決するもので、磁気テー
プや磁気ディスク装置の動作において、より安定にかつ
耐久性に優れたシステムを提供することを目的とする。An object of the present invention is to solve these problems and to provide a system that is more stable and more durable in operation of a magnetic tape or a magnetic disk drive.
本発明は、磁気ヘッドと、この磁気ヘッドに対して磁
気記録媒体を移動させる手段とを備えた磁気媒体記録装
置において、移動する上記磁気記録媒体に摺接する摺接
部品を備え、その一部または全部の摺接部品の少なくと
もその摺接面が、ガラス状カーボンと、金属酸化物微粒
子、金属窒化物微粒子、金属炭化物微粒子、金属ホウ化
物微粒子のうちから選ばれる一種以上の無機化合物とを
含む複合材料により構成されたことを特徴とする。The present invention provides a magnetic medium recording apparatus including a magnetic head and a unit for moving a magnetic recording medium with respect to the magnetic head, including a sliding contact part that slides on the moving magnetic recording medium, and a part of the sliding contact part. A composite in which at least the sliding contact surface of all the sliding contact parts contains glassy carbon and at least one inorganic compound selected from metal oxide fine particles, metal nitride fine particles, metal carbide fine particles, and metal boride fine particles. It is characterized by being composed of a material.
磁気媒体は、磁気ディスク、磁気テープ、磁気シート
のいずれかであることができる。The magnetic medium can be any of a magnetic disk, a magnetic tape, and a magnetic sheet.
また、フレキシブル磁気ディスクを回転させる手段
と、この磁気ディスクの表面に近接する磁気ヘッドとを
備えた磁気媒体記録装置において、この磁気媒体は磁気
ディスクであり、上記磁気ディスクの磁気ヘッドが近接
する部分の裏面に接触する摺接部品を備え、この摺接部
品は少なくともその接触部分がガラス状カーボンと、金
属酸化物微粒子、金属窒化物微粒子、金属炭化物微粒
子、金属ホウ化物微粒子のうちから選ばれる一種以上の
無機化合物とを含む複合材料で形成された構造であるこ
とを特徴とする。Further, in a magnetic medium recording apparatus provided with means for rotating a flexible magnetic disk and a magnetic head close to the surface of the magnetic disk, the magnetic medium is a magnetic disk, and a portion of the magnetic disk where the magnetic head is close to the magnetic disk. A sliding contact part in contact with the back surface of the sliding contact part, at least the contact part of which is a kind selected from glassy carbon, metal oxide fine particles, metal nitride fine particles, metal carbide fine particles, and metal boride fine particles. It is a structure formed of a composite material containing the above inorganic compound.
本発明に係るガラス状カーボン材料は、熱硬化性樹脂
を炭化して得られるガラス状カーボン材料、共重合や共
縮合などにより熱硬化するように変性された樹脂を炭素
化して得られるガラス状カーボン材料、硬化あるいは炭
素化の過程で化学処理により結晶化を著しく妨げること
により得られるガラス状カーボン材料、メタン、エチレ
ン、ベンゼン等の低分子量炭化水素類を気相で熱分解し
て得られるガラス状カーボン材料等であり、具体的に
は、ポリアクリロニトリル系ガラス状カーボン材料、レ
ーヨン系ガラス状カーボン材料、ピッチ系ガラス状カー
ボン材料、リグニン系ガラス状カーボン材料、フェノー
ル系ガラス状カーボン材料、フラン系ガラス状カーボン
材料、アルキッド樹脂系ガラス状カーボン材料、不飽和
ポリエステル系ガラス状カーボン材料、キシレン樹脂系
ガラス状カーボン材料等が挙げられる。上記ガラス状カ
ーボン材料は、記録媒体が摺動するときに、この記録媒
体の表面膜が損傷する前に、カーボン材料自体が先に摩
耗する適度の減摩性を有する材料であって、非晶状態の
ガラス状カーボン材料である。The glassy carbon material according to the present invention is a glassy carbon material obtained by carbonizing a thermosetting resin, or a glassy carbon material obtained by carbonizing a resin modified to be thermoset by copolymerization or cocondensation. Material, glassy carbon material obtained by significantly preventing crystallization by chemical treatment in the process of hardening or carbonization, glassy material obtained by pyrolyzing low molecular weight hydrocarbons such as methane, ethylene, benzene, etc. in the gas phase Carbon material, specifically, polyacrylonitrile-based glassy carbon material, rayon-based glassy carbon material, pitch-based glassy carbon material, lignin-based glassy carbon material, phenol-based glassy carbon material, furan-based glass Carbon material, alkyd resin glassy carbon material, unsaturated polyester glass Carbon materials, xylene resin glassy carbon material, and the like. The above-mentioned glassy carbon material is a material having a moderate lubricating property in which the carbon material itself wears first before the surface film of the recording medium is damaged when the recording medium slides, and is amorphous. It is a glassy carbon material in a state.
しかしながら、より高密度記録のシステムではガラス
状カーボン材料単独ではその減摩性のために問題になる
場合があり、鋭意検討の結果本発明にいたった。However, in a system of higher density recording, a glassy carbon material alone may cause a problem due to its lubricity, and as a result of intensive studies, the present invention was reached.
すなわち、本発明では媒体に対して極めて優れた摺動
特性を有する摺接部品を備えた装置を提供するものであ
り、ガラス状カーボンと無機化合物の複合材料をその摺
接部品とすることであって本発明でいうガラス状カーボ
ンと無機化合物との複合材料はその減摩性も更に改良し
たものである。その複合材料を例示すれば金属酸化物微
粒子、金属窒化物微粒子、金属炭化物微粒子、金属ホウ
化物微粒子から選ばれる無機化合物とガラス状カーボン
との複合材料である。特に無機化合物中のアルミナ、ジ
ルコニア酸化ケイ素、酸化チタン、炭化ケイ素、炭化チ
タン、窒化ケイ素、ホウ化ジルコニウムなどが望まし
い。That is, the present invention provides an apparatus provided with a sliding contact part having extremely excellent sliding characteristics with respect to a medium, and uses a composite material of glassy carbon and an inorganic compound as the sliding contact part. The composite material of the glassy carbon and the inorganic compound as referred to in the present invention has further improved lubrication. The composite material is, for example, a composite material of an inorganic compound selected from metal oxide fine particles, metal nitride fine particles, metal carbide fine particles, and metal boride fine particles and glassy carbon. Particularly, alumina, zirconia silicon oxide, titanium oxide, silicon carbide, titanium carbide, silicon nitride, zirconium boride and the like in the inorganic compound are desirable.
また、これらはガラス状カーボンの製造工程中に無機
化合物を分散混合する方法、無機化合物の焼結の際にガ
ラス状カーボンまたはガラス状カーボン前駆体を含浸、
混合させて得ることができる。特にこの場合は含浸法に
よる方法が望ましい。またこのような複合材料から物理
的な薄膜形成方法により摺接面のみに薄膜状に形成させ
てもよい。In addition, these are a method of dispersing and mixing an inorganic compound during a glassy carbon production process, impregnating glassy carbon or a glassy carbon precursor during sintering of an inorganic compound,
It can be obtained by mixing. In particular, in this case, a method using an impregnation method is desirable. Alternatively, the composite material may be formed into a thin film only on the sliding contact surface by a physical thin film forming method.
また、本発明でいう記録媒体と一時的または常時接触
しかつ相対的に摺動する接触部品を備える磁気媒体装置
とは、ディスクドライブ、テープドライブなどの磁気記
録に再生およびまたは記録を行う装置および磁気記録媒
体を収納するケースなどを含めた周辺のシステムに係わ
るものを含む。また、備えられる摺接部品とは磁気ディ
スク装置ではヘッドおよびヘッドスライダで、バルクヘ
ッド、薄膜ヘッドなどの記録再生素子およびその支持体
をいい、球面などの形状を問わない。Further, the magnetic medium device having a contact component that is in temporary or constant contact with the recording medium and relatively slides with the recording medium according to the present invention is a device that reproduces and / or records on magnetic recording such as a disk drive and a tape drive, and Includes those related to peripheral systems including the case for storing magnetic recording media. In the magnetic disk drive, the provided sliding contact parts are a head and a head slider, and refer to recording / reproducing elements such as a bulk head and a thin film head and a support thereof, and may have any shape such as a spherical surface.
安定化板とはスタビライザ、パッド、規制板とも呼称
されるものであり、主に媒体とヘッドとの相対的な安定
なスペーシングを与えるものである。またジャケット内
のライナである磁気テープ装置では、同様のヘッドおよ
びヘッドスライダをはじめ、ヘッドを支持するシリン
ダ、テープの走行を規制するガイドピン、ガイドロー
ラ、テープカセット内のテープの巻き特性や走行特性を
支配するフリクションシートやガイドピンなどである。
またハードディスクの浮上型ヘッドおよびヘッドスライ
ダをいう。さらにマルチトラックのヘッド基板が直接媒
体と接触する部分など、磁気記録媒体と一時的または常
時、直接摺動する可能性のある部品およびその接触する
部分をいう。The stabilizing plate is also called a stabilizer, a pad, or a regulating plate, and mainly provides a relatively stable spacing between the medium and the head. In a magnetic tape device that is a liner in a jacket, similar heads and head sliders, a cylinder that supports the head, guide pins and guide rollers that regulate the running of the tape, and winding and running characteristics of the tape in the tape cassette Such as friction sheets and guide pins.
It also refers to a floating head and a head slider of a hard disk. Further, it refers to a part that may slide directly or constantly with a magnetic recording medium, such as a part where a multitrack head substrate directly contacts a medium, and a part that contacts the part.
このような材料を用いた部品を磁気媒体と摺接する接
触部分に用いることにより、媒体との摺動特性を向上さ
せ、摩擦抵抗が少なく媒体を傷つけることなく長時間に
わたり安定した記録再生特性をもたせることができる。By using a component made of such a material in a contact portion that is in sliding contact with a magnetic medium, the sliding characteristics with the medium are improved, and the frictional resistance is low and stable recording / reproducing characteristics are provided for a long time without damaging the medium. be able to.
次に、本発明実施例磁気媒体記録装置について説明す
る。Next, a magnetic medium recording apparatus according to an embodiment of the present invention will be described.
(実施例1) 平均粒径0.3μmのアルミナ100重量部に焼成助剤とし
て、正炭酸マグネシウム0.05重量部、ポリアクリル酸ソ
ーダ0.2重量部、水を30重量部加え、スラリー状態と
し、50×50×10mmの形状に鋳込成形し、乾燥後、1300℃
×1時間空気中で、予備焼成したところ、収縮率7.8%
で、空隙率33%であった。(Example 1) 0.05 parts by weight of magnesium carbonate, 0.2 parts by weight of sodium polyacrylate, and 30 parts by weight of water were added to 100 parts by weight of alumina having an average particle diameter of 0.3 μm as a sintering aid, and a slurry was prepared. Cast into a shape of × 10mm, dried, 1300 ℃
× 1 hour pre-firing in air, shrinkage 7.8%
And the porosity was 33%.
本予備焼成体に、残炭率40%、灰分0.3%のフェノー
ル樹脂を60℃、加温、真空下で含浸させ、90℃で硬化処
理を行った後、N2雰囲気中、1700℃で4時間焼成した。To the pre-fired body, Zansumiritsu 40%, 60 ° C. ash 0.3% phenolic resin, heating, impregnated under vacuum, after the curing treatment at 90 ° C., in N 2 atmosphere at 1700 ° C. 4 Fired for hours.
得られた焼結体の嵩密度は3.57g/ccで、炭素が4.8%
複合されていた。The bulk density of the obtained sintered body is 3.57 g / cc and carbon is 4.8%
Had been compounded.
(実施例2) フルフリルアルコール(花王クエーカ(株)製)100
部に0.011N−HCl水溶液を5部添加し、96℃で6時間反
応させた後に減圧脱水して熱硬化性樹脂を得た。この熱
硬化性樹脂に、一次粒子の平均粒径が約20nmのアルミナ
超微粒子(日本アエロジェル(株)製アルミニウムオキ
サイドC)を2重量%加え、ボールミルで分散混合し
た。得られたフルフリルアルコール初期縮合物樹脂100
部に対して、70%パラトルエンスルホン酸水溶液1.5部
を添加して十分に攪拌した。これを、厚さ3mmの短冊状
の型に注入して減圧脱泡した。次に、50〜60℃で3時
間、さらに90℃で5日間加熱した。これにより得られた
短冊状の複合硬化樹脂を管状炉に入れ、窒素気流中にて
10℃/hrの昇温速度で1200℃まで昇温し、この温度で2
時間保持した後に冷却した。複合材料中のアルミナ含量
は4.1%であった。(Example 2) Furfuryl alcohol (manufactured by Kao Quaker Co., Ltd.) 100
5 parts of a 0.011N-HCl aqueous solution was added to the mixture, and the mixture was reacted at 96 ° C. for 6 hours, followed by dehydration under reduced pressure to obtain a thermosetting resin. To this thermosetting resin, 2% by weight of ultrafine alumina particles having an average primary particle size of about 20 nm (aluminum oxide C manufactured by Nippon Aerogel Co., Ltd.) was added and mixed by a ball mill. Obtained furfuryl alcohol initial condensate resin 100
To this part, 1.5 parts of a 70% aqueous solution of p-toluenesulfonic acid was added, followed by sufficient stirring. This was poured into a strip-shaped mold having a thickness of 3 mm and defoamed under reduced pressure. Next, it heated at 50-60 degreeC for 3 hours, and also 90 degreeC for 5 days. The resulting strip-shaped composite cured resin is placed in a tube furnace and placed in a nitrogen stream.
The temperature was raised to 1200 ° C at a rate of 10 ° C / hr,
After holding for a time, it was cooled. The alumina content in the composite was 4.1%.
(試験例1) 実施例1、2の複合材料をハードディスク用双胴型浮
上型ヘッドスライダの形状に切り出した。双方のスキー
部分の幅は0.420mmスキー部長さは4.070mmとした。スキ
ー部分の後端は0.340mmの長さで0.5゜のテーパを施し
た。ヘッド全体の幅は3.17mmで高さは0.87mmとした。こ
れらをジンバルスプリングに固定し市販のテスト機に搭
載した。カーボン保護膜が施されたCo−Ni系ハードディ
スク媒体に対しANSI(米国規格協会)規格に基づいてCS
Sテスト(Contact Start and Stop Test:スタート時お
よびストップ時には接触し、回転中は風圧により持ち上
るテストの形態)を行った。(Test Example 1) The composite materials of Examples 1 and 2 were cut out in the shape of a double-barreled floating head slider for a hard disk. The width of both ski portions was 0.420 mm and the length of the ski portion was 4.070 mm. The rear end of the ski part is 0.340mm long and 0.5mm tapered. The width of the entire head was 3.17 mm and the height was 0.87 mm. These were fixed to a gimbal spring and mounted on a commercially available test machine. CS-based Co-Ni hard disk media with a carbon protective film
The S test (Contact Start and Stop Test: a form of test that contacts at start and stop, and lifts by wind pressure during rotation) was performed.
CSS2万回後のディスクとヘッドの面を目視および顕微
鏡で観察した。実施例1、2の材料を用いた系ではヘッ
ド、ディスク摺接面に傷はつかなかった。比較例として
同形状のALTIC(アルミナ、TiC複合セラミックス)を同
様にテストしたところディスク面に走行傷が付いた。The surfaces of the disk and the head after 20,000 times of CSS were visually observed and observed with a microscope. In the systems using the materials of Examples 1 and 2, the head and the disk sliding contact surface were not damaged. As a comparative example, the same shape of ALTIC (alumina, TiC composite ceramics) was similarly tested.
(実施例3) 平均粒径0.1μmのイットリア部分安定化ジルコニア
粉末100重量部に、ポリビニルアルコールを0.2重量部、
ステアリン酸0.1重量部、水100重量部加え、混合し、ス
プレードライ粉末を得た。この粉末を金型プレス1000kg
/cm2の圧力で30×60×7mmの平板に成形した。この成形
体を1100℃×1時間空気中予備焼成した。得られた予備
焼成体は、収縮率2.1%で、空隙率56%であった。Example 3 0.2 parts by weight of polyvinyl alcohol was added to 100 parts by weight of yttria partially stabilized zirconia powder having an average particle size of 0.1 μm,
0.1 parts by weight of stearic acid and 100 parts by weight of water were added and mixed to obtain a spray-dried powder. 1000 kg of this powder
It was molded into a 30 × 60 × 7 mm flat plate at a pressure of / cm 2 . This compact was pre-fired in air at 1100 ° C. for 1 hour. The obtained prefired body had a shrinkage of 2.1% and a porosity of 56%.
本予備焼成体に、残炭率30%、灰分0.02%のフラン樹
脂を常温、真空下で含浸させ、80℃で硬化処理を行った
後、真空中1400℃で4時間焼成した。The prefired body was impregnated with a furan resin having a residual carbon ratio of 30% and an ash content of 0.02% at room temperature under vacuum, subjected to a hardening treatment at 80 ° C, and then fired at 1400 ° C in vacuum for 4 hours.
得られた焼結体の嵩密度は4.5g/ccで、炭素が11.2%
複合されていた。The bulk density of the obtained sintered body is 4.5 g / cc, and carbon is 11.2%.
Had been compounded.
(試験例2) 実施例2および3の材料について市販の3.5″フロッ
ピーディスク用ヘッドの外観形状に加工した。これをダ
ミーヘッドとしジンバルスプリングに装着後3.5″ドラ
イブにとり付けた。(Test Example 2) The materials of Examples 2 and 3 were processed into the appearance of a commercially available 3.5 ″ floppy disk head. The dummy head was mounted on a gimbal spring, and then mounted on a 3.5 ″ drive.
同一トラックにて300rpmで500万回各々回転摺動させ
た。用いたフロッピーディスクはCo−γFe2O3塗布型デ
ィスクであるが実施例2、3いずれの材料でも傷が付か
なかった。Each was rotated and slid 5 million times at 300 rpm on the same track. The floppy disk used was a Co-γFe 2 O 3 coated disk, but none of the materials of Examples 2 and 3 was damaged.
比較例として同一形状に加工したチタン酸カルシウム
について同様のテストを行ったところ若干の走行跡が目
視により確認された。As a comparative example, a similar test was performed on calcium titanate processed into the same shape, and a slight running trace was visually confirmed.
(実施例4) フルフリルアルコール500部と92%パラホルムアルデ
ヒド420部を80℃で攪拌溶解させ、攪拌下、フェノール5
20部、水酸化ナトリウム8.8部、水45部の液状混合物を
滴下した。滴下終了後、80℃で3時間反応させ、その後
フェノール80部、水酸化ナトリウム8.8部、水45部の混
合液をさらに滴下し、80℃、3.5時間反応させた。30℃
まで冷却後、70%パラトルエンスルホン酸で中和し、次
に減圧下で中和物を脱水して150部の水を除去した後、5
00部のフルフリルアルコールを添加した。得られた樹脂
は25℃で150cpsの粘度を有し水分は7%であった。この
樹脂100部に対し粒径0.01μmのAl2O3超微粒子(日本ア
エロジェル社製)2部を添加し、均一になるまでミリン
グした。このAl2O3複合樹脂100部に対しパラトルエンス
ルホン酸70部、水20部、グリコール10部より調製した溶
液3.5部を添加し、十分攪拌後、減圧脱泡し厚さ3mmの型
に注入した。次に、50〜60℃で3時間、さらに80℃で2
日間加熱した。得られた硬化樹脂を管状炉に入れ、窒素
気流中、10℃/hrの昇温速度で1200℃まで昇温し、2時
間保持後冷却してガラス状カーボン複合材料を得た。Example 4 500 parts of furfuryl alcohol and 420 parts of 92% paraformaldehyde were stirred and dissolved at 80 ° C., and phenol 5 was stirred under stirring.
A liquid mixture of 20 parts, 8.8 parts of sodium hydroxide and 45 parts of water was added dropwise. After the completion of the dropwise addition, the mixture was reacted at 80 ° C. for 3 hours. Thereafter, a mixed solution of 80 parts of phenol, 8.8 parts of sodium hydroxide, and 45 parts of water was further added dropwise and reacted at 80 ° C. for 3.5 hours. 30 ℃
After cooling, neutralized with 70% paratoluenesulfonic acid, and then dehydrated the neutralized product under reduced pressure to remove 150 parts of water.
00 parts of furfuryl alcohol were added. The resin obtained had a viscosity of 150 cps at 25 ° C. and a water content of 7%. To 100 parts of this resin, 2 parts of Al 2 O 3 ultrafine particles (manufactured by Nippon Aerogel Co., Ltd.) having a particle size of 0.01 μm were added and milled until uniform. To 100 parts of this Al 2 O 3 composite resin was added 3.5 parts of a solution prepared from 70 parts of paratoluenesulfonic acid, 20 parts of water, and 10 parts of glycol, and after sufficient stirring, degassed under reduced pressure and poured into a mold having a thickness of 3 mm. did. Next, at 50-60 ° C for 3 hours, then at 80 ° C for 2 hours.
Heated for days. The resulting cured resin was placed in a tubular furnace, heated to 1200 ° C. at a rate of 10 ° C./hr in a nitrogen stream, kept for 2 hours, and cooled to obtain a glassy carbon composite material.
(試験例3) 実施例3、4で作成した材料を2mm×2mm×20mmの角棒
に切り出し2mm×2mmの面を精密旋盤および球面研磨機を
用いて先端球面加工(R20mm)を施した。これを長さ3mm
に切断した。2″メタル塗布型媒体(ソニー(株)製)
に対し2″フレキシブル磁気ディスク装置のヘッド部分
を上記材料に置き換え、ヘッド突出量60μmとし周速7.
5m/secでメディアを回転させた。1000万回パス後も目視
でフレキシブル磁気ディスクの損傷はなかった。(Test Example 3) The material prepared in Examples 3 and 4 was cut out into a square bar of 2 mm x 2 mm x 20 mm, and a 2 mm x 2 mm surface was subjected to spherical processing (R20 mm) using a precision lathe and a spherical polishing machine. This is 3mm long
Cut into pieces. 2 "metal coated media (manufactured by Sony Corporation)
On the other hand, the head portion of the 2 ″ flexible magnetic disk drive was replaced with the above-mentioned material, the head protrusion amount was 60 μm, and the peripheral speed was 7.
The media was rotated at 5 m / sec. After 10 million passes, there was no visible damage to the flexible magnetic disk.
(実施例5) 実施例4で得られた複合材料を厚さ2mmの円盤状に加
工し、無酸素銅のスパッタリング用パッキングプレート
にメタルボンディングを施し、装置の陰極に取り付けタ
ーゲットとした。対極には被膜を施す材料としてNiZnフ
ェライトを試験例3の形状に加工し極板上に固定した。
この対極を冷水下予めスパッタエッチング処理した後、
スパッタリングによりアルミナ薄膜を形成した後カーボ
ン複合薄膜を400Å形成した。スパッタリング装置とし
て日電アネルバ製SPF430Hを用い、通常のスパッタリン
グと同様に背景圧力として10-7Torrの真空にした後、放
電ガスとしてアルゴンガスを5×10-3Torrまで導入し40
0Wの高周波電力を印加して高周波スパッタリングを行っ
た。得られた複合材薄膜が形成されたダミーの球面ヘッ
ドを試験例3と同様にテストした。同様に1000万回パス
後も目視でフレキシブル磁気ディスクの損傷はなかっ
た。(Example 5) The composite material obtained in Example 4 was processed into a disk shape having a thickness of 2 mm, metal-bonded to a packing plate for sputtering oxygen-free copper, and attached to the cathode of the apparatus to serve as a target. On the counter electrode, NiZn ferrite as a material to be coated was processed into the shape of Test Example 3 and fixed on an electrode plate.
After pre-sputtering this counter electrode under cold water,
After forming an alumina thin film by sputtering, a carbon composite thin film was formed to a thickness of 400 mm. Using NICHIDEN manufactured by ANELVA SPF430H as a sputtering apparatus, introduced after the vacuum of 10 -7 Torr as the background pressure as with ordinary sputtering, the argon gas to 5 × 10 -3 Torr as a discharge gas 40
High frequency power of 0 W was applied to perform high frequency sputtering. The dummy spherical head on which the obtained composite material thin film was formed was tested in the same manner as in Test Example 3. Similarly, there was no visible damage to the flexible magnetic disk after 10 million passes.
(実施例6) ジルコニア粉末(平均粒径4μm)とガラス状カーボ
ン前駆体であるフェノール樹脂1重量%を混合硬化後に
温度1400℃で焼結した。Example 6 Zirconia powder (average particle size: 4 μm) and 1% by weight of a phenol resin as a glassy carbon precursor were mixed and cured, and then sintered at a temperature of 1400 ° C.
(実施例7) フルフリルアルコール100部に対しパラトルエンスル
ホン酸0.2部を混合し、90℃の温度条件下で攪拌した後
に反応させ初期縮合物(粘度20℃で650cpsB型粘度計使
用)を得た。中和後これにアルミナ超微粒子(日本アエ
ロジェル社(株)製、アルミニウムオキサイドC)を2V
ol%を加えサンドミルで十分攪拌、パラトルエンスルホ
ン酸30%水溶液を加え80℃で2日間硬化させた。この硬
化複合材を厚み3mmに切り出し温度を1600℃まで毎時10
℃で上昇させ、高温下のAr雰囲気中で熱処理した。複合
材料中のアルミナ含量8.3重量%であった。Example 7 0.2 parts of paratoluenesulfonic acid was mixed with 100 parts of furfuryl alcohol, and the mixture was stirred at a temperature of 90 ° C. and reacted to obtain an initial condensate (using a 650 cps B type viscometer at a viscosity of 20 ° C.). Was. After neutralization, ultrafine alumina particles (aluminum oxide C, manufactured by Nippon Aerogel Co., Ltd.)
ol%, and the mixture was sufficiently stirred with a sand mill, and a 30% aqueous solution of p-toluenesulfonic acid was added, followed by curing at 80 ° C. for 2 days. Cut the cured composite to a thickness of 3 mm and raise the temperature to 1600 ° C
C. and heat-treated in a high-temperature Ar atmosphere. The alumina content in the composite material was 8.3% by weight.
(実施例8) フルフリルアルコール500部と92%パラホルムアルデ
ヒド420部を80℃で攪拌溶解させ、攪拌下、フェノール5
20部、水酸化ナトリウム8.8部、水45部の液状混合物を
滴下した。滴下終了後、80℃で3時間反応させ、その後
フェノール80部、水酸化ナトリウム8.8部、水45部の混
合液をさらに滴下し、80℃、7.5時間反応させた。30℃
まで冷却後、70%パラトルエンスルホン酸で中和し、次
に減圧下で中和物を脱水して200部の水を除去した後、5
00部のフルフリルアルコールを添加した。得られた樹脂
は25℃で1500cpsの粘度を有し水分は7%であった。こ
の樹脂100部に対し粒径0.06μmのSiC粉(白水化学
(株)製)5部、ポリエチレングリコール2部を添加
し、均一になるまでミリングした。このSiC複合樹脂100
部に対しパラトルエンスルホン酸70部、水20部、グリコ
ール10部より調製した溶液3.5部を添加し、十分攪拌
後、減圧脱泡し厚さ3mmの型に注入した。次に、50〜60
℃で3時間、さらに80℃で2日間加熱した。得られた硬
化樹脂を管状炉に入れ、窒素気流中、10℃/hrの昇温速
度で1400℃まで昇温し、2時間保持後冷却してガラス状
カーボン複合材料を得た。複合材料中のSiC含量は10.5
%であった。Example 8 500 parts of furfuryl alcohol and 420 parts of 92% paraformaldehyde were stirred and dissolved at 80 ° C., and phenol 5 was stirred under stirring.
A liquid mixture of 20 parts, 8.8 parts of sodium hydroxide and 45 parts of water was added dropwise. After the completion of the dropwise addition, the mixture was reacted at 80 ° C. for 3 hours. Thereafter, a mixed liquid of 80 parts of phenol, 8.8 parts of sodium hydroxide, and 45 parts of water was further added dropwise and reacted at 80 ° C. for 7.5 hours. 30 ℃
After cooling, neutralized with 70% paratoluenesulfonic acid, and then dehydrated the neutralized product under reduced pressure to remove 200 parts of water.
00 parts of furfuryl alcohol were added. The resin obtained had a viscosity of 1500 cps at 25 ° C. and a water content of 7%. To 100 parts of this resin, 5 parts of SiC powder having a particle size of 0.06 μm (manufactured by Shimizu Chemical Co., Ltd.) and 2 parts of polyethylene glycol were added and milled until uniform. This SiC composite resin 100
3.5 parts of a solution prepared from 70 parts of paratoluenesulfonic acid, 20 parts of water and 10 parts of glycol were added to the parts, and after sufficient stirring, defoamed under reduced pressure and poured into a mold having a thickness of 3 mm. Then, 50-60
C. for 3 hours and at 80.degree. C. for 2 days. The resulting cured resin was placed in a tubular furnace, heated to 1400 ° C. in a nitrogen stream at a rate of 10 ° C./hr, kept for 2 hours, and cooled to obtain a glassy carbon composite material. The SiC content in the composite is 10.5
%Met.
(試験例5) 実施例6、7、8の材料について第2図に示す形状に
切り出し加工した。この摺接部品を第1図のように装着
したフレキシブル磁気ディスク装置のパッド1上に、2
インチメタル塗布ビデオフロッピー(ソニー(株)製)
2をセットし、耐久試験を行った。周速7.54mm(ディス
ク回転数3600rpm、ヘッド位置のR20mm)で、磁気ヘッド
3の突出量60μmとした。また、磁気ヘッドとしては2
インチビデオフロッピー用のものを使用した。その結
果、1000万回パス後も目視でフレキシブル磁気ディスク
の損傷はなく安定した出力特性を得た。複合材料摺接部
分も顕微鏡観察により実質上摩耗のないことが確認さ
れ、また走行安定性も大変良好であった。(Test Example 5) The materials of Examples 6, 7, and 8 were cut out into the shapes shown in FIG. On the pad 1 of the flexible magnetic disk drive having the sliding contact parts mounted as shown in FIG.
Inch metal coated video floppy (Sony Corporation)
2 was set and a durability test was performed. The peripheral speed was 7.54 mm (disk rotation speed 3600 rpm, head position R20 mm), and the protrusion amount of the magnetic head 3 was 60 μm. In addition, as a magnetic head, 2
The one for inch video floppy was used. As a result, a stable output characteristic was obtained without any damage to the flexible magnetic disk visually after 10 million passes. Microscopic observation confirmed that there was substantially no wear on the sliding portion of the composite material, and the running stability was also very good.
第1図において、押し込みの形状は説明をわかりやす
くするため実際の形状より誇張されて描かれている。In FIG. 1, the shape of the indentation is exaggerated from the actual shape for easy understanding of the description.
(実施例9) 実施例5で用いた方法で対極に第2図に示された形状
をもつアルミの成形体に同様にして400Åの複合材薄膜
を形成させた。これを試験例5と同様に2″フレキシブ
ル磁気ディスクドライブに装着し1000万回パスのテスト
を行った。ディスクの損傷はなく安定した出力特性を得
た。また摺接部も摩耗のないことが確認された。Example 9 In the same manner as in Example 5, a 400 ° composite thin film was formed on the aluminum compact having the shape shown in FIG. This was mounted on a 2 ″ flexible magnetic disk drive and tested 10 million times in the same manner as in Test Example 5. Stable output characteristics were obtained without damage to the disk. confirmed.
(試験例6) 実施例8と同様にして0.5mm厚の複合材料の薄い板状
物を形成し表面を最終♯10,000の研磨砥粒(アルミナ)
を用い鏡面に仕上げた。この材料の磁気テープ原反に対
する摩擦係数を測定するために、平坦な定盤の上に磁気
テープを接着テープで固定し材料を治具に固定し磁気テ
ープ面と面接触させテンシロンで引っぱった。磁気テー
プに対する相対速度は200mm/minで行い、本材料の重量
対張力比で摩擦係数を求めた。(Test Example 6) A thin plate of a composite material having a thickness of 0.5 mm was formed in the same manner as in Example 8, and the surface was polished abrasive grains (alumina) of final $ 10,000.
And finished to a mirror surface. In order to measure the coefficient of friction of this material against the raw magnetic tape, a magnetic tape was fixed on a flat surface plate with an adhesive tape, the material was fixed on a jig, brought into surface contact with the surface of the magnetic tape, and pulled with a tensilon. The relative speed with respect to the magnetic tape was set at 200 mm / min, and the friction coefficient was determined from the weight-to-tension ratio of the material.
またカセットテープとカセットの内壁に本材料の成形
体を磁気テープエッジと摺接するように挿入しオーディ
オカセットを組み立て巻きとりトルクを測定した。市販
の黒鉛質フィラーを樹脂で固めたものに対し摩擦係数は
8割以下の0.10〜0.13であった。また巻きとりトルクも
約7割の値で1.5〜8.5gcmであった。この材料の特性は
カセット内のすべりシートのみならず磁気テープ装置の
ガイドピンやシリンダにも応用可能な特性といえる。Also, a molded body of the present material was inserted into the cassette tape and the inner wall of the cassette so as to be in sliding contact with the edge of the magnetic tape, an audio cassette was assembled, and the winding torque was measured. The friction coefficient was 0.10 to 0.13, which was 80% or less of a commercially available graphite filler solidified with a resin. The winding torque was 1.5 to 8.5 gcm at a value of about 70%. The characteristics of this material can be said to be applicable not only to the slide sheet in the cassette but also to the guide pins and cylinders of the magnetic tape device.
次に本発明磁気媒体記録装置の請求項2に示す実施例
を図面に基づいて詳しく説明する。以下に示す例はあく
までも一例であって、これにより本発明の技術範囲を限
定するものではない。Next, a magnetic medium recording apparatus according to a second embodiment of the present invention will be described in detail with reference to the drawings. The following examples are merely examples, and do not limit the technical scope of the present invention.
第3図は請求項3に示す本発明実施例磁気媒体記録装
置の摺動部品の形状を示す斜視図、第2図はその磁気媒
体記録装置の構造図である。FIG. 3 is a perspective view showing the shape of a sliding part of the magnetic medium recording apparatus according to the third embodiment of the present invention, and FIG. 2 is a structural view of the magnetic medium recording apparatus.
この実施例磁気媒体記録装置は、フレキシブル磁気デ
ィスク21を回転させるスピンドル22と、この磁気ディス
ク21の表面に近接する図外の手段に備えられたヘッドア
ーム23と、このヘッドアーム23に固定され、フレキシブ
ル磁気ディスク21の表面に近接する磁気ヘッド24を有す
るヘッドジンバルスプリング25とを備える。ここで本発
明はフレキシブル磁気ディスク21の磁気ヘッド24が近接
する裏面の位置に接触する摺接部品11を備えることを特
徴とする。The magnetic medium recording apparatus according to the embodiment includes a spindle 22 for rotating a flexible magnetic disk 21, a head arm 23 provided in a unit (not shown) close to the surface of the magnetic disk 21, and fixed to the head arm 23. A head gimbal spring 25 having a magnetic head 24 close to the surface of the flexible magnetic disk 21; Here, the present invention is characterized in that the magnetic head 24 of the flexible magnetic disk 21 is provided with the sliding contact part 11 which comes into contact with a position on the back surface thereof.
以下この摺接部品11のいくつかの実施例について述べ
る。これらはいずれも第3図に示す形状に形成され、第
4図に示す装置にてテストされたものである。Hereinafter, several embodiments of the sliding contact part 11 will be described. Each of these was formed into the shape shown in FIG. 3 and tested with the apparatus shown in FIG.
(実施例10) ガラス状カーボン(花王(株)製グラハードR)を切
り出し厚み2.1mmになるまで粗研磨により表面出しを行
い第3図に示すようにR面およびC面とりを行った。こ
のフレキシブル磁気媒体記録装置を用い5.25インチγ−
Fe2O3系の磁性粉を塗布した磁気ディスクに対し耐久性
を調べるためおよび磁気ディスクと磁気ヘッドとの安定
走行を調べるために出力特性をとった。すなわち、磁気
ディスク21の1つのトラックに断続するパルスパターン
の情報を記録し、次いでこの情報を繰り返し読み取り記
録したパルスパターンと比較した。その結果14万回回転
させても、1回も誤りは検出されなかった。またトルク
測定から長時間安定した潤滑性を持つことが判明した。(Example 10) A glassy carbon (Gurahard R manufactured by Kao Corporation) was cut out, surface-roughened by rough polishing until a thickness of 2.1 mm was obtained, and R and C surfaces were chamfered as shown in FIG. 5.25 inch γ-
The output characteristics were measured to examine the durability of the magnetic disk coated with the Fe 2 O 3 magnetic powder and to determine the stable running between the magnetic disk and the magnetic head. That is, the information of the intermittent pulse pattern was recorded on one track of the magnetic disk 21, and then this information was repeatedly read and compared with the pulse pattern recorded. As a result, no error was detected even after rotating 140,000 times. Also, it was found from the torque measurement that it had stable lubrication for a long time.
(実施例11) フルフリルアルコール100部に対しパラトルエンスル
ホン酸0.2部を混合し、90℃の温度条件下で攪拌した後
に反応させ初期縮合物(粘度20℃で650cpsB型粘度計使
用)を得た。中和後これにアルミナ超微粒子(日本アエ
ロジェル社(株)製、アルミニウムオキサイドC)を2v
ol%を加えサンドミルで十分攪拌、パラトルエンスルホ
ン酸30%水溶液を加え80℃で2日間硬化させた。この硬
化複合材を厚み3mmに切り出し温度を1600℃まで毎時10
℃で上昇させ、高温下のAr雰囲気中で熱処理した。これ
を第3図に示す形状に切り出し摺接部品11とした。(Example 11) 0.2 parts of paratoluenesulfonic acid was mixed with 100 parts of furfuryl alcohol, and the mixture was stirred at a temperature of 90 ° C and reacted to obtain an initial condensate (using a 650 cps B type viscometer at a viscosity of 20 ° C). Was. After neutralization, alumina ultra-fine particles (aluminum oxide C, manufactured by Nippon Aerogel Co., Ltd.)
ol%, and the mixture was sufficiently stirred with a sand mill, and a 30% aqueous solution of p-toluenesulfonic acid was added, followed by curing at 80 ° C. for 2 days. Cut the cured composite to a thickness of 3 mm and raise the temperature to 1600 ° C
C. and heat-treated in a high-temperature Ar atmosphere. This was cut into the shape shown in FIG.
(実施例12) 花王製グラハードRをジェットミルで粉砕し、平均粒
径20μmのガラス状カーボン微粒子を得た。これをフェ
ノール樹脂(住友ベークライト製ノボラックおよびヘキ
サミン)で圧縮熱成形し第3図に示す形状に切り出し
た。(Example 12) Glass hard carbon fine particles having an average particle diameter of 20 µm were obtained by pulverizing Kao's Grahard R by a jet mill. This was compression-molded with a phenol resin (Novolak and Hexamine, manufactured by Sumitomo Bakelite) and cut into the shape shown in FIG.
(実施例13) ジルコニア粉末(平均粒径4μm)とガラス状カーボ
ン前駆体であるフェノール樹脂1重量%を混合硬化後に
温度1400℃で焼結した。これを第3図に示す形状に切り
出した。Example 13 A mixture of zirconia powder (average particle size: 4 μm) and 1% by weight of a phenol resin as a glassy carbon precursor was sintered at a temperature of 1400 ° C. after mixing and curing. This was cut into the shape shown in FIG.
実施例11〜13で得られた摺接部品についても第4図に
示すテストを行った結果、同様の出力安定性低トルクが
実現できた。また金属連続メディア、例えばCoCrのディ
スクを用いた場合に1500rpmの高速回転を行った場合も
同様の安定性が得られた。The sliding contact parts obtained in Examples 11 to 13 were also tested as shown in FIG. 4, and as a result, the same output stability and low torque could be realized. Similar stability was obtained when a high-speed rotation of 1500 rpm was performed using a metal continuous medium, for example, a CoCr disk.
以上述べたように本発明によれば、装置の動作をより
安定させ、耐久性を向上させることができる。また、片
面記録のフレキシブル磁気媒体と磁気ヘッドとの間隙を
安定に維持させることができ、磁気ヘッドがスプリング
により支持される場合にはさらに、磁気媒体と磁気ヘッ
ドの接触圧が安定化する。両面記録のフレキシブル磁気
媒体に対しても磁性層を損傷させることがなく、また、
フレキシブル磁気媒体に保護潤滑層を施すことができ、
摺接部品に潤滑剤を塗布する必要がなくなる。さらに
は、使用する材料の導電性により静電気が発生せず、記
録媒体と接触する部分や記録媒体に塵埃が付着しにくい
などの優れた効果がある。As described above, according to the present invention, the operation of the device can be further stabilized, and the durability can be improved. Further, the gap between the single-sided recording flexible magnetic medium and the magnetic head can be stably maintained, and when the magnetic head is supported by a spring, the contact pressure between the magnetic medium and the magnetic head is further stabilized. It does not damage the magnetic layer even for flexible magnetic media of double-sided recording,
Flexible magnetic media can be provided with a protective lubrication layer,
There is no need to apply a lubricant to the sliding parts. Further, there is an excellent effect that static electricity is not generated due to the conductivity of the material to be used, and dust does not easily adhere to a portion that comes into contact with the recording medium or the recording medium.
第1図は本発明実施例における試験の一例を示す図。 第2図は本発明実施例における試験片の一例を示す図。 第3図は本発明実施例磁気ディスク装置の摺接部品の形
状を示す斜視図。 第4図は本発明実施例磁気ディスク装置の構成図。 1……パッド、2、24……フレキシブル磁気ディスク、
3、23……磁気ヘッド、11……摺接部品、21……ヘッド
アーム、22……ヘッドジンバルスプリング、25……スピ
ンドル。FIG. 1 is a diagram showing an example of a test in an embodiment of the present invention. FIG. 2 is a view showing an example of a test piece according to the embodiment of the present invention. FIG. 3 is a perspective view showing the shape of a sliding contact part of the magnetic disk drive of the embodiment of the present invention. FIG. 4 is a configuration diagram of a magnetic disk drive according to an embodiment of the present invention. 1 ... pad, 2, 24 ... flexible magnetic disk,
3, 23: magnetic head, 11: sliding parts, 21: head arm, 22: head gimbal spring, 25: spindle.
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 FI F16N 15/00 F16N 15/00 G11B 5/10 G11B 5/10 A 5/187 5/187 F 15/60 15/60 B 15/61 15/61 A 17/04 301 17/04 301E 23/087 510 23/087 510C //(C10M 111/00 103:02 103:06 ) C10N 40:02 40:18 50:08 (56)参考文献 特開 昭59−195365(JP,A) 特開 昭62−42363(JP,A) 特開 昭62−6460(JP,A) 特開 昭62−202413(JP,A) 特開 昭62−33888(JP,A) 特開 昭62−42362(JP,A) 実開 昭62−15155(JP,U) 実開 昭60−40021(JP,U) 実開 昭60−173160(JP,U) 「化学大辞典」2,共立出版,昭和56 年10月15日発行 (58)調査した分野(Int.Cl.6,DB名) G11B 17/34 G11B 5/60──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. 6 Identification code FI F16N 15/00 F16N 15/00 G11B 5/10 G11B 5/10 A 5/187 5/187 F 15/60 15/60 B 15 / 61 15/61 A 17/04 301 17/04 301E 23/087 510 23/087 510C // (C10M 111/00 103: 02 103: 06) C10N 40:02 40:18 50:08 (56) Reference Document JP-A-59-195365 (JP, A) JP-A-62-42363 (JP, A) JP-A-62-6460 (JP, A) JP-A-62-202413 (JP, A) 33888 (JP, A) JP-A-62-42362 (JP, A) JP-A 62-15155 (JP, U) JP-A 60-40021 (JP, U) JP-A 60-173160 (JP, U) "Chemical Dictionary," 2, Kyoritsu Shuppan, published October 15, 1981 (58) Fields investigated (Int.Cl. 6 , DB name) G11B 17/34 G11B 5/60
Claims (3)
気記録媒体を移動させる手段と を備えた磁気媒体記録装置において、 移動する上記磁気記録媒体に摺接する摺接部品を備え、 その一部または全部の摺接部品の少なくともその摺接面
が、ガラス状カーボンと、金属酸化物微粒子、金属窒化
物微粒子、金属炭化物微粒子、金属ホウ化物微粒子のう
ちから選ばれる一種以上の無機化合物とを含む複合材料
により構成された ことを特徴とする磁気媒体記録装置。1. A magnetic medium recording apparatus comprising: a magnetic head; and means for moving a magnetic recording medium with respect to the magnetic head, comprising: a sliding contact part for slidingly contacting the moving magnetic recording medium; Or at least the sliding contact surface of all the sliding contact parts contains glassy carbon and one or more inorganic compounds selected from metal oxide fine particles, metal nitride fine particles, metal carbide fine particles, and metal boride fine particles. A magnetic medium recording device comprising a composite material.
磁気シートのいずれかである請求項1記載の磁気媒体記
録装置。2. The magnetic medium includes a magnetic disk, a magnetic tape,
2. The magnetic medium recording device according to claim 1, wherein the recording device is any one of a magnetic sheet.
段と、 この磁気ディスクの表面に近接する磁気ヘッドと を備えた磁気媒体記録装置において、 この磁気媒体は磁気ディスクであり、 上記磁気ディスクの磁気ヘッドが近接する部分の裏面に
接触する摺接部品を備え、 この摺接部品は少なくともその接触部分が、ガラス状カ
ーボンと、金属酸化物微粒子、金属窒化物微粒子、金属
炭化物微粒子、金属ホウ化物微粒子のうちから選ばれる
一種以上の無機化合物とを含む複合材料により形成され
た構造である ことを特徴とする磁気媒体記録装置。3. A magnetic medium recording apparatus comprising: means for rotating a flexible magnetic disk; and a magnetic head close to the surface of the magnetic disk, wherein the magnetic medium is a magnetic disk, and the magnetic head of the magnetic disk is A sliding contact part that comes into contact with the back surface of an adjacent part is provided. At least the contact part of the sliding contact part is made of glassy carbon, metal oxide fine particles, metal nitride fine particles, metal carbide fine particles, and metal boride fine particles. A magnetic medium recording device having a structure formed of a composite material containing at least one inorganic compound selected from the group consisting of:
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63075775A JP2759456B2 (en) | 1987-03-30 | 1988-03-29 | Magnetic media recording device |
PCT/JP1988/001140 WO1990005363A1 (en) | 1988-03-29 | 1988-11-11 | Magnetic recording apparatus |
US07/536,543 US5162962A (en) | 1988-03-29 | 1988-11-11 | Magnetic recording apparatus having reduced friction sliding parts |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62-76869 | 1987-03-30 | ||
JP63075775A JP2759456B2 (en) | 1987-03-30 | 1988-03-29 | Magnetic media recording device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6452603A JPS6452603A (en) | 1989-02-28 |
JP2759456B2 true JP2759456B2 (en) | 1998-05-28 |
Family
ID=13585922
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63075775A Expired - Lifetime JP2759456B2 (en) | 1987-03-30 | 1988-03-29 | Magnetic media recording device |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP2759456B2 (en) |
WO (1) | WO1990005363A1 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH073726B2 (en) * | 1989-12-22 | 1995-01-18 | 株式会社小田原機器 | Magnetic card writing or reading device |
JPH03264200A (en) * | 1990-03-14 | 1991-11-25 | Kootaki Kk | Pressing apparatus |
JPH07108988B2 (en) * | 1990-04-11 | 1995-11-22 | 株式会社島津製作所 | Manufacturing method of micromechanics |
JPH07276100A (en) * | 1994-04-11 | 1995-10-24 | Kootaki Seiki Kk | Press device |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5817522A (en) * | 1981-07-22 | 1983-02-01 | Matsushita Electric Ind Co Ltd | Magnetic head and its manufacture |
JPS59195365A (en) * | 1983-04-19 | 1984-11-06 | Kao Corp | Sliding contact parts of recording medium |
JPS60223013A (en) * | 1984-04-20 | 1985-11-07 | Canon Electronics Inc | Magnetic head |
JPS6215155U (en) * | 1985-07-11 | 1987-01-29 | ||
JPS6242362A (en) * | 1985-08-20 | 1987-02-24 | Sanyo Electric Co Ltd | Magnetic disk device |
JPS62202413A (en) * | 1986-02-28 | 1987-09-07 | 日鉱金属株式会社 | Filler for composite material and conducting composite usingthe same |
JPH071531B2 (en) * | 1986-04-04 | 1995-01-11 | 株式会社日立製作所 | Thin film magnetic head slider and method of manufacturing the same |
-
1988
- 1988-03-29 JP JP63075775A patent/JP2759456B2/en not_active Expired - Lifetime
- 1988-11-11 WO PCT/JP1988/001140 patent/WO1990005363A1/en unknown
Non-Patent Citations (1)
Title |
---|
「化学大辞典」2,共立出版,昭和56年10月15日発行 |
Also Published As
Publication number | Publication date |
---|---|
JPS6452603A (en) | 1989-02-28 |
WO1990005363A1 (en) | 1990-05-17 |
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