JPS59144019A - Magnetic head substrate - Google Patents

Magnetic head substrate

Info

Publication number
JPS59144019A
JPS59144019A JP1929383A JP1929383A JPS59144019A JP S59144019 A JPS59144019 A JP S59144019A JP 1929383 A JP1929383 A JP 1929383A JP 1929383 A JP1929383 A JP 1929383A JP S59144019 A JPS59144019 A JP S59144019A
Authority
JP
Japan
Prior art keywords
substrate
thin film
magnetic
recording medium
magnetic head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1929383A
Other languages
Japanese (ja)
Other versions
JPH0370849B2 (en
Inventor
Nobuyuki Kishine
延幸 岸根
Tetsuya Imamura
哲也 今村
Michihide Yamauchi
山内 通秀
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kao Corp
Original Assignee
Kao Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kao Corp filed Critical Kao Corp
Priority to JP1929383A priority Critical patent/JPS59144019A/en
Priority to EP83110808A priority patent/EP0108355B1/en
Priority to DE8383110808T priority patent/DE3375435D1/en
Priority to US06/548,566 priority patent/US4642720A/en
Publication of JPS59144019A publication Critical patent/JPS59144019A/en
Publication of JPH0370849B2 publication Critical patent/JPH0370849B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3103Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
    • G11B5/3106Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination

Landscapes

  • Magnetic Heads (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Thin Magnetic Films (AREA)

Abstract

PURPOSE:To reduce the wear of a tape and a head without using a protecting film nor lubricant on the surface of a magnetic tape by using a plate made of an aggregate of a glassy carbon material having density higher than a specific level with high smoothness to a substrate for a thin film magnetic head. CONSTITUTION:An aggregate is molded by compressing or extruding only a glassy carbon material having >=1.40g/cm<3> density obtained by converting the thermosetting resin, etc. into carbon or giving the vapor phase pyrolysis to CH4, etc. Such an aggregate or a molded aggregate of a mixture of the above-mentioned carbon material and the thermosetting resin is cut in a prescribed size to obtain a substrate for a thin film magnetic head. In such a way, no hole of >=0.5mu diameter exist on the surface of the substrate with extremely high smoothness secured to the substrate surface. In addition, the surface of the substrate is not damaged and the wear is reduced between a magnetic head and a magnetic recording medium without using any lubricant on the surface of the recording medium.

Description

【発明の詳細な説明】 〔発明の属する技術分野〕 本発明は、磁気記録媒体に対して書込みおよび読取りを
行い、薄膜を有する磁気ヘッドに用いられる基板に関す
る。特に、高密度磁気記録を行うに適する薄膜磁気ヘッ
ドおよび垂直磁気記録方式の磁気ヘッドに用いられる基
板に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field to which the Invention Pertains] The present invention relates to a substrate that writes to and reads from a magnetic recording medium and is used in a magnetic head having a thin film. In particular, the present invention relates to a substrate used in a thin-film magnetic head suitable for performing high-density magnetic recording and a perpendicular magnetic recording type magnetic head.

〔従来技術の説明〕[Description of prior art]

近年、情報量の増加に伴い磁気記録の高記録密度化につ
いての要求が高まっている。この高記録密度化を達成さ
せるために、磁気記録に係わる磁気ヘッド等の諸部品の
改良、新規磁気記録方式の開発等に関する研究が活発化
している。
In recent years, as the amount of information has increased, there has been an increasing demand for higher recording densities in magnetic recording. In order to achieve this high recording density, research is being actively conducted to improve various parts related to magnetic recording, such as magnetic heads, and to develop new magnetic recording methods.

磁気ヘッドについてみると、フェライトコアを使用した
汎用のリング型磁気ヘッドは、高密度磁気記録において
限界があると考えられており、これに代わり高記録密度
化を可能にする磁気ヘッドとして特開昭55−8401
8に開示されるような薄膜磁気ヘッドが開発されている
Regarding magnetic heads, general-purpose ring-type magnetic heads that use ferrite cores are thought to have limitations in high-density magnetic recording, and as an alternative magnetic head that enables high-density recording, JP-A-Sho 55-8401
A thin film magnetic head as disclosed in No. 8 has been developed.

上記薄膜磁気ヘッドは、非磁性基板と、この非磁性基板
の一つの面の上に形成された書込みまたは読取り用変換
ギャップ層を含む複数の薄膜層で作られた書込みまたは
読取り変換器と、上記薄膜層を被覆する非磁性保護板と
を備えている。これらの薄膜層は、通常、非磁性基板上
にスパッタリングまたは蒸着により形成される。
The thin film magnetic head includes a non-magnetic substrate, a write or read transducer made of a plurality of thin film layers including a write or read transducing gap layer formed on one side of the non-magnetic substrate, and and a non-magnetic protective plate covering the thin film layer. These thin film layers are typically formed by sputtering or vapor deposition on non-magnetic substrates.

また、磁気記録方式についてみると、従来の長手磁気記
録方式も高記録密度化には限界があることが示され、こ
の記録方式に代わり、高記録密度化を可能にする記録方
式として垂直磁気記録方式が提案されている。この垂直
磁気記録に用いる磁気ヘッドを製作する場合も、通常、
非磁性基板上に軟磁性薄膜がスパッタリングまたは蒸着
により形成される。
Furthermore, regarding magnetic recording methods, it has been shown that the conventional longitudinal magnetic recording method has a limit in increasing the recording density. A method has been proposed. When manufacturing magnetic heads used for perpendicular magnetic recording,
A soft magnetic thin film is formed on a nonmagnetic substrate by sputtering or vapor deposition.

これらの磁気ヘッドに用いられる基板は、前述したよう
にその上に薄膜を形成させるため、十分な表面平滑性を
必要とし、通常、その表面は鏡面加工される。上記基板
内に直径の大きな空孔が存在したり、あるいは多くの空
孔が存在すると、鏡面加工を施したとしても、その基板
表面は十分な平滑度を得ることができず、この表面にス
パッタリングまたは蒸着により形成された薄膜に円孔が
存在することになり、そのためこの薄膜は良好な磁気特
性を持つことができない。また空孔内のガスが抜は難い
ために、スパッタリングまたは蒸着の際に必要とされる
真空度を得ることが困難となる。
The substrates used in these magnetic heads require sufficient surface smoothness because a thin film is formed thereon as described above, and the surfaces thereof are usually mirror-finished. If there are holes with a large diameter or a large number of holes in the substrate, even if mirror finishing is applied, the surface of the substrate will not have sufficient smoothness, and sputtering will occur on this surface. Alternatively, circular holes are present in the thin film formed by vapor deposition, and therefore, this thin film cannot have good magnetic properties. Furthermore, since it is difficult to remove gas from the pores, it is difficult to obtain the degree of vacuum required during sputtering or vapor deposition.

現在、これらの磁気ヘッド用基板としては、表面平滑性
が得られるアルミナ系セラミックスの集合体が一般に使
用されている。しかしこのアルミナ系セラミックスの材
料は硬度が高く、磁気記録媒体との摺動の際に記録媒体
の表面を傷付けやすい欠点を有する。
Currently, as substrates for these magnetic heads, aggregates of alumina-based ceramics that provide surface smoothness are generally used. However, this alumina-based ceramic material has high hardness and has the disadvantage that it easily scratches the surface of the recording medium when sliding with the magnetic recording medium.

この欠点を解消するため、従来、記録媒体が摺動する薄
膜磁気ヘッドの非磁性基体の表面には、潤滑剤が塗布さ
れたり、あるいは磁気記録媒体表面に保護膜が被覆され
たりしているが、潤滑剤を塗布しても揮散等により潤滑
作用を長時間持続させておくことは困難で、定期的に潤
滑剤を再塗布しなければならない欠点があり、記録媒体
に保護膜を設けることは保護膜を被覆するための工程が
増え、かつ薄膜磁気ヘッドと記録媒体との間隔を増大さ
せる欠点があった。
To overcome this drawback, conventionally, a lubricant is applied to the surface of the non-magnetic substrate of a thin-film magnetic head on which the recording medium slides, or a protective film is coated on the surface of the magnetic recording medium. Even if a lubricant is applied, it is difficult to maintain the lubricating effect for a long time due to volatilization, etc., and the lubricant has to be reapplied periodically.Therefore, it is difficult to provide a protective film on the recording medium. This method has disadvantages in that the number of steps required to coat the protective film increases and the distance between the thin film magnetic head and the recording medium increases.

〔発明の目的〕[Purpose of the invention]

本発明は、極めて高い表面平滑性を有し、鏡面加工した
面に、良好な磁気特性を持つ薄膜を形成させることを可
能にし、かつ磁気ヘッドの表面に潤滑剤を塗布すること
なく、また磁気記録媒体の表面に保護膜を形成すること
なく磁気記録媒体の表面を永久的に損傷させず、磁気記
録媒体との接触面の摩耗が少ない磁気ヘッド用基板を提
供することを目的とする。
The present invention makes it possible to form a thin film with excellent magnetic properties on a mirror-finished surface with extremely high surface smoothness, and without applying lubricant to the surface of the magnetic head. To provide a substrate for a magnetic head which does not permanently damage the surface of a magnetic recording medium without forming a protective film on the surface of the recording medium, and which causes less wear on the contact surface with the magnetic recording medium.

〔発明の特徴〕[Features of the invention]

第一発明の特徴は、薄膜の形成される面が極めて高い平
滑性を有し、密度が1.40 g/−以上のガラス状カ
ーボン材料集合体で構成された磁気ヘッド用基板である
点にあり、また第二発明の特徴は、薄膜の形成される面
が極めて高い平滑性を有し、密度が1.40 g/cI
A以上のガラス状カーボン材料および熱硬化性樹脂を含
む複合材料集合体で構成された磁気ヘッド用基板である
点にある。
The first invention is characterized in that it is a substrate for a magnetic head, which is composed of a glassy carbon material aggregate whose surface on which a thin film is formed has extremely high smoothness and whose density is 1.40 g/- or more. Also, the second invention is characterized in that the surface on which the thin film is formed has extremely high smoothness, and the density is 1.40 g/cI.
The present invention is a magnetic head substrate made of a composite material aggregate containing a glassy carbon material of grade A or higher and a thermosetting resin.

なお本明細書で「極めて高い平滑性」とは、薄膜が形成
される面に直径0.5μm以上の空孔が形成されていな
いことをいう。
In this specification, "extremely high smoothness" means that no pores with a diameter of 0.5 μm or more are formed on the surface on which the thin film is formed.

本発明の磁気ヘッド用基板は、薄膜が形成される面に直
径0.5μm以上の空孔が形成されていないために基板
表面に磁気特性の良い薄膜を形成させることができる。
Since the magnetic head substrate of the present invention does not have holes with a diameter of 0.5 μm or more on the surface on which the thin film is formed, a thin film with good magnetic properties can be formed on the substrate surface.

また基板の密度は、磁気特性の良好な薄膜の形成とは直
接には関係しないが、1.40g/ad未滴の低密度の
基板は、薄膜が形成される面に直径0.5μm以上の空
孔を持たない場合でも、薄膜形成面以外の面あるいは基
板内部に多数の空孔が形成されていて、この基板を用い
た場合は、スパッタリングまたは蒸着に必要とされる真
空度を得ることが困難となるか、または磁気記録媒体と
の接触の際に摩耗減量が大きくなり、本発明の目的を達
成することができない。なお、薄膜が形成される面に直
径0.1μm以上の空孔を持たなければ、この基板表面
に磁気特性のより良好な薄膜を形成させることができる
Although the density of the substrate is not directly related to the formation of a thin film with good magnetic properties, a substrate with a low density of 1.40 g/ad does not have a diameter of 0.5 μm or more on the surface on which the thin film is formed. Even if the substrate does not have pores, many pores are formed on the surface other than the surface on which the thin film is formed or inside the substrate, and when this substrate is used, it is difficult to obtain the degree of vacuum required for sputtering or vapor deposition. Otherwise, the abrasion loss during contact with the magnetic recording medium becomes large, and the object of the present invention cannot be achieved. Note that if the surface on which the thin film is formed does not have pores with a diameter of 0.1 μm or more, a thin film with better magnetic properties can be formed on the surface of the substrate.

以下、本発明を補足的に説明すると、本発明に係わるカ
ーボン材料は、熱硬化性樹脂を炭素化して得られるカー
ボン材料、共重合や共縮合などにより熱硬化するように
変性された樹脂を炭素化して得られるカーボン材料、硬
化あるいは炭素化の過程で化学処理により結晶化を著し
く妨げることにより得られるカーボン材料、メタン、エ
チレン、ベンゼン等の低分子量炭化水素類と気相で熱分
解して得られるカーボン材料等であり、具体的には、ポ
リアクリロニトリル系カーボン材料、レーヨン系カーボ
ン材料、ピンチ系カーホン材料、リグニン系カーボン材
料、フェノール系カーボン材料、フラン系カーボン材料
、アルキッド樹脂系カーボン材料、不飽和ポリエステル
系カーボン材料、キシレン樹脂系カーボン材料等が挙げ
られる。
To further explain the present invention, the carbon material according to the present invention includes a carbon material obtained by carbonizing a thermosetting resin, a carbon material obtained by carbonizing a thermosetting resin, and a carbon material obtained by carbonizing a thermosetting resin by copolymerization, cocondensation, etc. Carbon materials obtained by curing or by significantly inhibiting crystallization through chemical treatment during the hardening or carbonization process, and carbon materials obtained by thermal decomposition in the gas phase with low molecular weight hydrocarbons such as methane, ethylene, and benzene. Specific examples include polyacrylonitrile-based carbon materials, rayon-based carbon materials, pinch-based carbon materials, lignin-based carbon materials, phenolic-based carbon materials, furan-based carbon materials, alkyd resin-based carbon materials, and carbon materials. Examples include saturated polyester carbon materials, xylene resin carbon materials, and the like.

また本発明に用いられる熱硬化性樹脂としては、フェノ
ール樹脂、エポキシ樹脂、ポリエステル樹脂、フラン樹
脂、ユリ7樹脂、メラミン樹脂、アルキッド樹脂、キシ
レン樹脂等を挙げることができる。
Further, examples of the thermosetting resin used in the present invention include phenol resin, epoxy resin, polyester resin, furan resin, Lily 7 resin, melamine resin, alkyd resin, xylene resin, and the like.

これらの熱硬化性樹脂を前記ガラス状カーボン材料と複
合すれば、熱硬化性樹脂はガラス状カーボン材料同士を
固着するバインダとして作用し、衝突等の機械的破壊に
対して強度のある堅牢な非磁性基板を得ることができる
。しかし、熱硬化性樹脂をガラス状カーボン材料に対し
て多量に複合させると、摩耗の大きい非磁性基板となる
ため、複合材料中にはガラス状カーボン材料を40容量
%以上、好ましくは50容量%以上含ませることがよい
When these thermosetting resins are combined with the glassy carbon material, the thermosetting resin acts as a binder that binds the glassy carbon materials together, resulting in a durable non-woven material that is strong against mechanical damage such as collisions. A magnetic substrate can be obtained. However, if a large amount of thermosetting resin is composited with a glassy carbon material, a non-magnetic substrate will be formed which is subject to high wear. It is better to include more than

本発明の磁気ヘッド用基板は、上記カーボン材料の集合
体、あるいはカーボン材料と熱硬化性樹脂の複合物の集
合体で構成される。これらの集合体の製造方法としては
、注型、圧縮、押出し等の広く知られた各種成型法が採
られるが、直径0.5μm以上の空孔を持たず、かつ密
度が1.40 g/cJ以上の集合体を得るには、注型
法により場合は、例えばカーボン材料の前駆体(熱硬化
性樹脂を硬化剤あるいは熱で硬化させた状態のもの)を
得る段階において、硬化剤を均一に分散させ、あるいは
均一に加熱し、かつ硬化速度があまり速くならないよう
に調整することにより得られる。また圧縮あるいは押出
し成型法の場合は、例えばカーボン材料を熱硬化性樹脂
で濡らして空隙を極力減少させて成型することにより得
られる。
The magnetic head substrate of the present invention is composed of an aggregate of the above-mentioned carbon material or an aggregate of a composite of carbon material and thermosetting resin. Various widely known molding methods such as casting, compression, and extrusion are used to manufacture these aggregates, but the aggregates have no pores with a diameter of 0.5 μm or more and a density of 1.40 g/ In order to obtain an aggregate of cJ or more, when using the casting method, for example, at the stage of obtaining a carbon material precursor (thermosetting resin with a curing agent or a state in which it is cured by heat), the curing agent is uniformly applied. It can be obtained by dispersing the resin into a polyurethane resin or by heating it uniformly and adjusting the curing speed so that it does not become too fast. In the case of compression or extrusion molding, it can be obtained, for example, by wetting a carbon material with a thermosetting resin and molding it with as few voids as possible.

〔発明の効果〕〔Effect of the invention〕

以上述べたように、本発明の磁気ヘッド用基板は、この
基板上に薄膜を形成させるために要求される表面平滑性
を有し、鏡面加工により十分な平滑度を得ることができ
、しかも基板上に良好な磁気特性を持つ薄膜をスパッタ
リングあるいは蒸着により形成させることができる。ま
た磁気記録媒体との間で潤滑剤を用いることなく潤滑性
を長時間持続させることができ、磁気記録媒体の表面を
損傷させず、摩耗減量も少ない。さらにカーボン材料の
導電性により静電気が発生せず、基板および磁気記録媒
体に塵埃が付着しない効果もある。
As described above, the magnetic head substrate of the present invention has the surface smoothness required for forming a thin film on the substrate, and can obtain sufficient smoothness by mirror finishing. A thin film with good magnetic properties can be formed thereon by sputtering or vapor deposition. Moreover, the lubricity between the magnetic recording medium and the magnetic recording medium can be maintained for a long time without using a lubricant, the surface of the magnetic recording medium is not damaged, and the amount of loss due to abrasion is small. Furthermore, due to the conductivity of the carbon material, static electricity is not generated, and there is an effect that dust does not adhere to the substrate and the magnetic recording medium.

本発明に関する前述のカーボン材料集合体または複合材
料集合体を磁気記録媒体と接触する基板以外の部分、例
えば薄膜磁気ヘッドの保護板、垂直磁気記録用ヘッドの
軟磁性薄膜の支持体等に使用すると、磁気記録媒体間に
持続性のある潤滑性が付与されることになり、好ましい
といえる。
When the above-mentioned carbon material aggregate or composite material aggregate according to the present invention is used in a part other than a substrate that comes into contact with a magnetic recording medium, for example, a protective plate of a thin film magnetic head, a support of a soft magnetic thin film of a perpendicular magnetic recording head, etc. This can be said to be preferable because it provides sustainable lubricity between the magnetic recording media.

〔実施例による説明〕[Explanation based on examples]

思量本発明の磁気ヘッド用基板の具体的態様を示すため
に、本発明を実施例によりさらに詳細に説明するが、以
下に示す例はあくまでも一例であって、これにより本発
明の技術的範囲を限定するものではない。
In order to show specific embodiments of the magnetic head substrate of the present invention, the present invention will be explained in more detail with reference to examples. It is not limited.

(実施例■) 注型成型により製造された密度1.49 g/cd1シ
ョア硬度112、熱伝導率3 kcal/ m hr”
Cの特性を有するフラン系ガラス状カーボン材料集合体
を図に示される形状および寸法に切り出し、記録媒体と
の摺動面Aおよび薄膜を形成させる面Bを粗研0 磨から徐々に微細研磨して行き、最終的にエメリー紙#
 15000で鏡面仕上げを行ってモデル基板1を作製
した。鏡面仕上げされた面Bを走査型電子顕微鏡で観察
したところ、この表面には直径0.5μm以上の空孔は
見られず、直径0.01μm以下の空孔が見られるのみ
であった。
(Example ■) Manufactured by cast molding, density 1.49 g/cd1 Shore hardness 112, thermal conductivity 3 kcal/m hr”
A furan-based glassy carbon material aggregate having the characteristics of C is cut into the shape and dimensions shown in the figure, and the sliding surface A with the recording medium and the surface B on which the thin film is formed are coarsely polished to 0 to gradually finely polished. and finally emery paper #
15,000 to produce a model substrate 1. When the mirror-finished surface B was observed with a scanning electron microscope, no pores with a diameter of 0.5 μm or more were observed on this surface, and only pores with a diameter of 0.01 μm or less were observed.

このモデル基板1と磁気記録媒体との摩擦性を評価する
ために、基板1のA面と、CO−被着T−Fe203塗
布膜、Ni −Pメッキ薄膜およびCo−Crスパック
リング薄膜との動摩擦特性を摩擦試験装置により測定し
、基板1のA面および上記磁気記録媒体の表面の状態を
肉眼で観察した。この結果を第1表に示す。なお、測定
に使用した摩擦試験装置は特開昭55−128142に
記載される実際の使用状態に近い状態で動摩擦特性を測
定し得る装置である。
In order to evaluate the frictional properties between this model substrate 1 and the magnetic recording medium, the dynamic friction between the A side of the substrate 1 and the CO-adhered T-Fe203 coating film, the Ni-P plating thin film, and the Co-Cr spackle thin film The characteristics were measured using a friction tester, and the condition of the A side of the substrate 1 and the surface of the magnetic recording medium was observed with the naked eye. The results are shown in Table 1. The friction test device used in the measurements is a device that can measure dynamic friction characteristics under conditions close to actual usage conditions, as described in Japanese Patent Laid-Open No. 55-128142.

次いでこのモデル基板1を図の1線C−C’に沿って切
断し、−・方の切断片のB面に厚さ1μlのCo−Zr
−Nbの合金薄膜をスパッタリングにより形成させ、も
う一方の切断片のB面に厚さ0.3μm1 のCo−Zr−Nbの合金薄膜を同じくスパッタリング
により形成させた。回転磁界中でこれらの薄膜き熱処理
を行った後、軟磁性薄膜用の振動型磁気記録測定装置を
用いて各薄膜の保磁力Hcを測定した。その結果を第2
表に示す。
Next, this model substrate 1 was cut along line 1 C-C' in the figure, and Co-Zr with a thickness of 1 μl was placed on the B side of the cut piece.
A -Nb alloy thin film was formed by sputtering, and a Co--Zr--Nb alloy thin film having a thickness of 0.3 μm1 was formed on the B side of the other cut piece by sputtering. After these thin films were heat-treated in a rotating magnetic field, the coercive force Hc of each thin film was measured using a vibrating magnetic recording measuring device for soft magnetic thin films. The result is the second
Shown in the table.

(実施例■) 注型成型により製造された密度1.47 g/cd、シ
ョア硬度ioo、熱伝導率7 kcal/ m hr”
Cの特性を有するフラン系ガラス状カーボン材料集合体
を実施例Iと同様の方法で処理して図示するようなモデ
ル基板1を作製し、面Bを走査型電子顕微鏡で観察した
ところ、この表面には直径0.5μm以上の空孔は見ら
れず、直径0.05μm以下の空孔が見られるのみであ
った。
(Example ■) Manufactured by cast molding, density 1.47 g/cd, Shore hardness IOO, thermal conductivity 7 kcal/m hr”
A model substrate 1 as shown in the figure was prepared by processing a furan-based glassy carbon material aggregate having characteristics of C in the same manner as in Example I, and when surface B was observed with a scanning electron microscope, this surface No pores with a diameter of 0.5 μm or more were observed, and only pores with a diameter of 0.05 μm or less were observed.

以下実施例■と同様にモデル基板1と磁気記録媒体との
摩擦性および薄膜の保磁力を測定した。
Thereafter, the friction between the model substrate 1 and the magnetic recording medium and the coercive force of the thin film were measured in the same manner as in Example (2).

なお薄膜は実施例■と同一の方法で作られたものである
。これらの結果を第1表および第2表に示す。
Note that the thin film was made by the same method as in Example (2). These results are shown in Tables 1 and 2.

2 (実施例■) 注型成型により製造された密度1 、45 g/ cd
t、ショア硬度78、熱伝導率15 kcal/ m 
hr’cの特性を有するフェノール系ガラス状カーボン
材料集合体を実施例Iと同様の方法で処理して図示する
ようなモデル基板1を作製し、面Bを走査型電子顕微鏡
で観察したところ、この表面には直径0.5μm以上の
空孔は見られず、直径0.2μl程度の空孔が見られる
のみであった。
2 (Example ■) Density 1, 45 g/cd manufactured by cast molding
t, Shore hardness 78, thermal conductivity 15 kcal/m
A model substrate 1 as shown in the figure was prepared by processing a phenolic glassy carbon material aggregate having the characteristics of hr'c in the same manner as in Example I, and when surface B was observed with a scanning electron microscope, No pores with a diameter of 0.5 μm or more were observed on this surface, and only pores with a diameter of about 0.2 μl were observed.

以下実施例■と同様にモデル基板1と磁気記録媒体との
摩擦性および薄膜の保磁力を測定した。
Thereafter, the friction between the model substrate 1 and the magnetic recording medium and the coercive force of the thin film were measured in the same manner as in Example (2).

なお薄膜は実施例Iと同一の方法で作られたものである
。これらの結果を第1表および第2表に示す。
Note that the thin film was made by the same method as in Example I. These results are shown in Tables 1 and 2.

(実施例■) フェノール系ガラス状炭素繊維(日本カイノール■製、
登録商標名カイノール)70容量%と積層用汎用レゾー
ル樹脂30容量%とにより構成され、圧縮成型で成型さ
れた密度1.46 g/cJの複合ガラス状カーボン材
料集合体を実施例Iと同様の方法3 で処理して図示するようなモデル基板1を作製し、面B
を走査型電子顕微鏡で観察したところ、この表面には直
径0.5μm以上の空孔は見られず、直径0.4μm以
下の空孔が見られるのみであった。
(Example ■) Phenolic glassy carbon fiber (manufactured by Nippon Kynor■,
A composite vitreous carbon material aggregate having a density of 1.46 g/cJ, which was formed by compression molding and was composed of 70% by volume (registered trademark Kynol) and 30% by volume of a general-purpose resol resin for lamination, was prepared in the same manner as in Example I. A model substrate 1 as shown in the figure is prepared by processing method 3, and surface B is
When observed under a scanning electron microscope, no pores with a diameter of 0.5 μm or more were observed on the surface, and only pores with a diameter of 0.4 μm or less were observed.

以下実施例■と同様にモデル基板1と磁気記録媒体との
摩擦性および薄膜の保磁力を測定した。
Thereafter, the friction between the model substrate 1 and the magnetic recording medium and the coercive force of the thin film were measured in the same manner as in Example (2).

なお薄膜は実施例■と同一の方法で作られたものである
。これらの結果を第1表および第2表に示す。
Note that the thin film was made by the same method as in Example (2). These results are shown in Tables 1 and 2.

(比較例I) 注型成型により製造された密度1.37g/a(、ショ
ア硬度80、熱伝導率10 kcal/ m hr”C
の特性を有するフラン系ガラス状カーボン材料集合体を
実施例Iと同様の方法で処理して図示するようなモデル
基板lを作製し、面Bを金属顕微鏡で観察したところ、
この表面には直径0.5μm未満の空孔も見られたが、
その他にも直径0.6〜0.7μmの空孔も見られた。
(Comparative Example I) Density 1.37 g/a (Shore hardness 80, thermal conductivity 10 kcal/m hr"C) manufactured by cast molding
A model substrate l as shown in the figure was prepared by processing a furan-based glassy carbon material aggregate having the characteristics in the same manner as in Example I, and when surface B was observed with a metallurgical microscope,
Although pores with a diameter of less than 0.5 μm were also observed on this surface,
In addition, pores with a diameter of 0.6 to 0.7 μm were also observed.

以下実施例Iと同様にモデル基板1と磁気記録媒体の薄
膜の保磁力を測定した。なお薄膜は実施4 例■と同一の方法で作られたものである。この結果を第
2表に示す。
The coercive forces of the model substrate 1 and the thin film of the magnetic recording medium were then measured in the same manner as in Example I. The thin film was made in the same manner as in Example 4 (Example 2). The results are shown in Table 2.

(比較例■) 注型成型により製造された密度1.35 g/ cra
、ショア硬度70、熱伝導率13 kcal/ m h
r’cの特性を有するフェノール系ガラス状カーボン材
料集合体を実施例■と同様の方法で処理して図示するよ
うなモデル基板lを作製し、面Bを金属顕微鏡で観察し
たところ、この表面には直径0.5μm未満の空孔も見
られたが、その他にも直径0.9〜1.1μmの空孔も
見られた。
(Comparative example ■) Density 1.35 g/cra manufactured by cast molding
, Shore hardness 70, thermal conductivity 13 kcal/m h
A model substrate l as shown in the figure was prepared by treating a phenolic glassy carbon material aggregate having the characteristics of r'c in the same manner as in example Although some pores with a diameter of less than 0.5 μm were observed, other pores with a diameter of 0.9 to 1.1 μm were also observed.

以下実施例Iと同様にモデル基板1と磁気記録媒体の薄
膜の保磁力を測定した。なお薄膜は実施例Iと同一の方
法で作られたものである。この結果を第2表に示す。
The coercive forces of the model substrate 1 and the thin film of the magnetic recording medium were then measured in the same manner as in Example I. Note that the thin film was made by the same method as in Example I. The results are shown in Table 2.

(比較例■) アルミナ系セラミックス(日本電気硝子■製、商品名ネ
オセラム)を実施例Iと同様の方法で処理して図示する
ようなモデル基板1を作製し、面Bを走査型電子顕微鏡
で観察したところ、この表5 面には直径0.5μm以上の空孔も見られず、直径0.
01μm以下の空孔が見られるのみであった。
(Comparative Example ■) A model substrate 1 as shown in the figure was prepared by treating alumina ceramics (manufactured by Nippon Electric Glass ■, trade name: Neoceram) in the same manner as in Example I, and surface B was examined using a scanning electron microscope. Upon observation, no pores with a diameter of 0.5 μm or more were found on this Table 5 surface.
Only pores of 0.01 μm or less were observed.

以下実施例1と同様にモデル基板1と磁気記録媒体との
摩擦性を測定した。この結果を第1表に示す。
Thereafter, the friction between the model substrate 1 and the magnetic recording medium was measured in the same manner as in Example 1. The results are shown in Table 1.

(試験結果) 第1表および第2表で明らかなように、本発明の磁気ヘ
ッド用基板は、磁気記録媒体との潤滑性に優れ、かつヘ
ッド摺動面および記録媒体を損傷させず、さらに保磁力
が小さく磁気特性にも優れていることが判る。    
  (以下本頁余白)6 第1表 7 第2表
(Test Results) As is clear from Tables 1 and 2, the magnetic head substrate of the present invention has excellent lubricity with the magnetic recording medium, does not damage the head sliding surface and the recording medium, and It can be seen that the coercive force is small and the magnetic properties are excellent.
(Hereinafter referred to as the margin of this page) 6 Table 1 7 Table 2

【図面の簡単な説明】[Brief explanation of the drawing]

図は本発明実施例磁気ヘッドに用いられる材料により形
成されたモデル基板の外観斜視図。 1・・・モデル基板。 8 手続?tlr iE書 昭和58年3月4日 1、事件の表示 昭和58年特許願第019293号 2、発明の名称 磁気ヘッド用基板 3、補正をする者 事件との関係  特許出願人 住 所  東京都中央区日本橋茅場町−丁目14番10
号名 称  (091)花王石鹸株式会社代表者 丸田
芳部 4、代理人 住 所  東京都練馬区関町北二丁目26番、!8(i
I?=−1゜氏名 弁理士(7823)井出直家゛胃5
、補正命令の日付 (自発補正) 6、補正により増加する発明の数  なし7、補正の対
象 明細書の「発明の詳細な説明」の欄 8、補正の内容 ill  明細書第4頁第19行目〜同頁第20行目[
−従来、記録媒体が摺動する薄膜磁気ヘッドの非磁性基
体の表面には、」を 「−従来、薄膜磁気ヘッドが摺動する磁気記録媒体の表
面には、」と補正する。 (2)明細書第5頁第12行目 「−1かつ磁気ヘッドの表面に」を 「−1かつ磁気記録媒体の表面に」と補正する。 (3)  明細書第12頁第2行目〜同頁第4行目[−
これらの薄膜き熱処理を行った後、軟磁性薄膜用の振動
型磁気記録測定装置を用いて−」を「−これらの薄膜を
熱処理を行った後、軟磁性薄膜用の振動型磁気測定装置
を用いて−」と補正する。 手続補正書 昭和58年3月15日 特許庁長官 若 杉 和 夫 殿 1、事件の表示 昭和58年特許願第019293号 2、発明の名称 磁気ヘッド用基板 3、補正をする者 事件との関係  特許出願人 住 所  東京都中央区日本橋茅場町−丁目14番10
号名 称  (091)花王石鹸株式会社代表者 丸田
芳部 4、代理人 住 所  東京都練馬区関町北二丁目26番18号氏名
 弁理士(7823)井出直孝 )5、補正命令の日付
 (自発補正) 6、補正により増加する発明の数  なし7、補正の対
象 8、補正の内容 (1)明細書の発明の名称を1Ti11気へ・ノド用基
体」と補正する。 (2)明細書の特許請求の範囲を別紙1の通り補正する
。 (3)明m書第2頁第4行目から第10頁第14行目ま
でを別紙2の通り補正する。 〔別紙l〕 2、特許請求の範囲 (11磁気記録媒体に対して書込みまたは読取りを行う
書込み・読取り変換器を構成する薄膜が一つの面に形成
される磁気ヘッド用基本において、上記薄膜が形成され
る面は極めて高い平滑性を有し、 密度が1.40 g/cJ以上のガラス状カーボン材料
集合体で構成された ことを特徴とする磁気ヘッド用基本。 (2)  磁気記録媒体に対して書込みまたは読取りを
行う書込み・読取り変換器を構成する薄膜が一つの面に
形成される磁気ヘッド用基住ヨにおいて、上記薄膜が形
成される面は極めて高い平滑性を有し、 密度が1.40g/cd以上のガラス状カーボン材料お
よび熱硬化性樹脂を含む複合材料集合体で構成された ことを特徴とする磁気ヘッド用基住ヨ。 〔別紙2〕 3、発明の詳細な説明 〔発明の属する技術分野〕 本発明は、磁気記録媒体に対して書込みおよび読取りを
行い、薄膜を有する磁気ヘッドに用いられる基体に関す
る。特に、高密度磁気記録を行うに適する薄膜磁気ヘッ
ドおよび垂直磁気記録方式の磁気ヘッドに用いられる基
体に関するものである。 〔従来技術の説明〕 近年、情報量の増加に伴い磁気記録の高記録密度化につ
いての要求が高まっている。この高記録密度化を達成さ
せるために、磁気記録に係わる磁気ヘッド等の諸部品の
改良、新規磁気記録方式の開発等に関する研究が活発化
している。 磁気ヘッドについてみると、フェライトコアを使用した
汎用のリング型磁気ヘッドは、高密度磁気記録において
限界があると考えられており、これに代わり高記録密度
化を可能にする磁気ヘッドとして特開昭55−8401
8に開示されるような薄膜磁気ヘッドが開発されている
。 上記薄膜磁気ヘッドは、非磁性基体と、この非磁性基体
の一つの面の上に形成された書込みまたは読取り用変換
ギャップ層を含む複数の薄膜層で作られた書込みまたは
読取り変換器と、上記薄膜層を被覆する非磁性保護板と
を備えている。これらの薄膜層は、通常、非磁性基体上
にスパツタリングまたは蒸着により形成される。 また、磁気記録方式についてみると、従来の長手磁気記
録方式も高記録密度化には限界があることが示され、こ
の記録方式に代わり、高記録密度化を可能にする記録方
式として垂直磁気記録方式が提案されている。この垂直
磁気記録に用いる磁気ヘッドを製作する場合も、通常、
非磁性基体上に軟磁性薄膜がスパツタリングまたは蒸着
により形成−される。 これらの磁気ヘッドに用いられる基体は、前述したよう
にその上に薄膜を形成させるため、十分゛な表面平滑性
を必要とし、通常、その表面は鏡面加工される。上記基
体内に直径の大きな空孔が存在したり、あるいは多くの
空孔が存在すると、鏡面加工を施したとしても、その基
体表面は十分な平滑度を得ることができず、この表面に
スパッタリングまたは蒸着により形成された薄膜に円孔
が存在することになり、そのためこの薄膜は良好な磁気
特性を持つことができない。また空孔内のガスが抜は難
いために、スパッタリングまたは蒸着の際に必要とされ
る真空度を得ることが困難となる。 現在、これらの磁気ヘッド用基体としては、表面平滑性
が得られるアルミナ系セラミックスの集合体が一般に使
用されている。しかしこのアルミナ系セラミックスの材
料は硬度が高く、磁気記録媒体との摺動の際に記録媒体
の表面を傷付けやすい欠点を有する。 この欠点を解消するため、従来、薄膜磁気ヘッドが摺動
する磁気記録媒体の表面には、潤滑剤が塗布されたり、
あるいは磁気記録媒体表面に保護膜が被覆されたりして
いるが、潤滑剤を塗布しても揮散等により潤滑作用を長
時間持続させておくことは困難で、定期的に潤滑剤を再
塗布しなければならない欠点があり、記録媒体に保護膜
を設けることは保護膜を被覆するための工程が増え、か
つ薄膜磁気ヘッドと記録媒体との間隔を増大させる欠点
があった。 (発明の目的〕 本発明は、極めて高い表面平滑性を有し、鏡面加工した
面に、良好な磁気特性を持つ薄膜を形成させることを可
能にし、かつ磁気記録媒体の表面に潤滑剤を塗布するこ
となく、また磁気記録媒体の表面に保護膜を形成するこ
となく磁気記録媒体の表面を永久的に損傷させず、磁気
記録媒体との接触面の摩耗が少ない磁気ヘッド用基体を
提供することを目的とする。 〔発明の特徴〕 第一発明の特徴は、薄膜の形成される面が極めて高い平
滑性を有し、密度が1.40g/c+&以上のガラス状
カーボン材料集合体で構成された磁気ヘッド用基体であ
る点にあり、また第二発明の特徴は、薄膜の形成される
面が極めて高い平滑性を有し、密度が1.40g/cJ
以上のガラス状カーボン材料および熱硬化性樹脂を含む
複合材料集合体で構成された磁気ヘッド用基体である点
にある。 なお本明細書で「極めて高い平滑性」とは、薄膜が形成
される面に直径0.5P以上の空孔が形成されていない
ことをいう。 本発明の磁気ヘッド用基体は、薄膜が形成される面に直
径が0.5μm以上の空孔が形成されていないために基
体表面に磁気特性の良い薄膜を形成させることができる
。また基体の密度は、磁気特性の良好な薄膜の形成とは
直接には関係しないが、1 、40 g/ c+I1未
満の低密度の基体は、薄膜が形成される面に直径0.5
μm以上の空孔を持たない場合でも、薄膜形成面以外の
面あるいは基体内部に多数の空孔が形成されていて、こ
の基体を用いた場合は、スパッタリングまたは蒸着に必
要とされる真空度を得ることが困難となるか、または磁
気記録媒体との接触の際に摩耗減量が大きくなり、本発
明の目的を達成することができない。なお、薄膜が形成
される面に直径0.IP以上の空孔を持たなければ、こ
の基体表面に磁気特性のより良好な薄膜を形成させるこ
とができる。 以下、本発明を補足的に説明すると、本発明に係わるカ
ーボン材料は、熱硬化性樹脂を炭素化して得られるカー
ボン材料、共重合や共縮合などにより熱硬化するように
変性された樹脂を炭素化して得られるカーボン材料、硬
化あるいは炭素化の過程で化学処理により結晶化を著し
く妨げることにより得られるカーボン材料、メタン、エ
チレン、ベンゼン等の低分子量炭化水素類を気相で熱分
解して得られるカーボン材料等であり、具体的には、ポ
リアクリロニトリル系カーボン材料、レーヨン系カーボ
ン材料、ピンチ系カーボン材料、リグニン系カーボン材
料、フェノール系カーボン材料、フラン系カーボン材料
、アルキッド樹脂系カーボン材料、不飽和ポリエステル
系カーボン材料、キシレン樹脂系カーボン材料等が挙げ
られる。 また本発明に用いられる熱硬化性樹脂としては、フェノ
ール樹脂、エポキシ樹脂、ポリエステル樹脂、フラン樹
脂、ユリア樹脂、メラミン樹脂、アルキソド樹脂、キシ
レン樹脂等を挙げることができる。 これらの熱硬化性樹脂を前記ガラス状カーボン材料と複
合すれば、熱硬化性樹脂はガラス状カーボン材料同士を
固着するバインダとして作用し、衝突等の機械的破壊に
対して強度のある堅牢な非磁性基体を得ることができる
。しかし、熱硬化性樹脂をガラス状カーボン材料に対し
て多量に複合させると、摩耗の大きい非磁性基体となる
ため、複合材料中にはガラス状カーボン材料を40容量
%以上、好ましくは50容量%以」二含ませることがよ
い。 本発明の磁気ヘッド用基体は、上記カーボン材料の集合
体、あるいはカーボン材料と熱硬化性樹脂の複合物の集
合体で構成される。これらの集合体の製造方法としては
、注型、圧縮、押出し等の広く知られた各種成型法が採
られるが、直径0.5μi11以上の空孔を持たず、か
つ密度が1.40 g/−以上の集合体を得るには、注
型法による場合は、例えばカーボン材料の前駆体(熱硬
化性樹脂を硬化剤あるいは熱で硬化させた状態のもの)
を得る段階において、硬化剤を均一に分散させ、あるい
は均一に加熱し、かつ硬化速度があまり速くならないよ
うに調整することにより得られる。また圧縮あるいは押
出し成型法の場合は、例えばカーボン材料を熱硬化性樹
脂で濡らして空隙を極力減少させて成型することにより
得られる。 〔発明の効果〕 以上述べたように、本発明の磁気ヘッド用基体は、この
基体上に薄膜を形成させるために要求される表面平滑性
を有し、鏡面加工により十分な平滑度を得ることができ
、しかも基体上に良好な磁気特性を持つ薄膜をスパッタ
リングあるいは蒸着により形成させることができる。ま
た磁気記録媒体との間で潤滑剤を用いることなく潤滑性
を長時間持続させることができ、磁気記録媒体の表面を
損傷させず、摩耗減量も少ない。さらにカーボン材料の
導電性により静電気が発生せず、基体および磁気記録媒
体に塵埃が付着しない効果もある。 本発明に関する前述のカーボン材料集合体または複合材
料集合体を磁気記録媒体と接触する基体以外の部分、例
えば薄膜磁気ヘッドの保護板、垂直磁気記録用ヘッドの
軟磁性薄膜の支持体等に使用すると、磁気記録媒体間に
持続性のある潤滑性が付与されることになり、好ましい
といえる。 〔実施例による説明〕 以下本発明の磁気ヘッド用基体の具体的態様を示すため
に、本発明を実施例によりさらに詳細に説明するが、以
下に示す例はあくまでも一例であって、これにより本発
明の技術的範囲を限定するものではない。
The figure is an external perspective view of a model board made of a material used in a magnetic head according to an embodiment of the present invention. 1...Model board. 8 Procedure? tlr iE book March 4, 1980 1, Display of the case 1988 Patent Application No. 019293 2, Name of the invention Magnetic head substrate 3, Person making the amendment Relationship to the case Patent applicant address Chuo, Tokyo Ward Nihonbashi Kayabacho-chome 14-10
Name (091) Kao Soap Co., Ltd. Representative: Yoshibe Maruta 4, Agent Address: 26-26 Kita-2-chome, Sekimachi, Nerima-ku, Tokyo! 8(i
I? =-1゜Name Patent attorney (7823) Naoie Ide゛Stomach 5
, Date of amendment order (voluntary amendment) 6. Number of inventions increased by amendment None 7. Column 8 of "Detailed description of the invention" of the specification subject to amendment, Contents of amendment ill Page 4, line 19 of the specification 20th line of the same page [
- Conventionally, on the surface of a non-magnetic substrate of a thin-film magnetic head on which a recording medium slides," is corrected to "-Conventionally, on the surface of a magnetic recording medium on which a thin-film magnetic head slides." (2) On page 5, line 12 of the specification, "-1 and on the surface of the magnetic head" is corrected to "-1 and on the surface of the magnetic recording medium." (3) Specification page 12, line 2 to page 4, line [-
After heat-treating these thin films, use a vibrating magnetic recording and measuring device for soft magnetic thin films. Correct it with “Use-”. Procedural amendment March 15, 1980 Director of the Patent Office Kazuo Wakasugi 1. Indication of the case 1988 Patent Application No. 019293 2. Name of the invention Substrate for magnetic head 3. Person making the amendment Relationship to the case Patent applicant address: 14-10, Kayabacho-chome, Nihonbashi, Chuo-ku, Tokyo
Name Title (091) Kao Soap Co., Ltd. Representative Yoshibe Maruta 4, Agent Address 26-18 Kita-2-chome, Sekimachi, Nerima-ku, Tokyo Name Patent Attorney (7823) Naotaka Ide) 5 Date of Amendment Order (Spontaneous) (Amendment) 6. Number of inventions increased by the amendment None 7. Subject of amendment 8. Contents of amendment (1) The name of the invention in the specification is amended to 1Ti11 Substrate for air and throat. (2) Amend the claims of the specification as shown in Attachment 1. (3) Correct the information from the 4th line on page 2 of the Memorandum to the 14th line on page 10 as shown in Attachment 2. [Attachment l] 2. Claims (11) In the basics for a magnetic head in which a thin film constituting a write/read converter for writing to or reading from a magnetic recording medium is formed on one surface, Basics for a magnetic head characterized by having extremely high smoothness on the surface and being composed of a glassy carbon material aggregate with a density of 1.40 g/cJ or more. (2) For magnetic recording media In a magnetic head base in which a thin film constituting a write/read converter for writing or reading data is formed on one surface, the surface on which the thin film is formed has extremely high smoothness and has a density of 1. .40 g/cd or more of a composite material assembly containing a glassy carbon material and a thermosetting resin. [Attachment 2] 3. Detailed description of the invention [Invention TECHNICAL FIELD The present invention relates to a substrate for writing to and reading from a magnetic recording medium and used in a magnetic head having a thin film.In particular, the present invention relates to a thin film magnetic head suitable for high-density magnetic recording and a perpendicular magnetic recording system. The present invention relates to a substrate used in a magnetic head. [Description of Prior Art] In recent years, with the increase in the amount of information, there has been an increasing demand for higher recording densities in magnetic recording. In order to achieve this higher recording density, In recent years, research has become active in improving various parts related to magnetic recording, such as magnetic heads, and developing new magnetic recording methods. Looking at magnetic heads, general-purpose ring-shaped magnetic heads using ferrite cores are It is believed that there is a limit to density magnetic recording, and instead of this, JP-A-55-8401 was developed as a magnetic head that enables higher recording density.
A thin film magnetic head as disclosed in No. 8 has been developed. The thin film magnetic head includes a non-magnetic substrate, a write or read transducer made of a plurality of thin film layers including a write or read transducing gap layer formed on one side of the non-magnetic substrate, and and a non-magnetic protective plate covering the thin film layer. These thin film layers are typically formed by sputtering or vapor deposition on non-magnetic substrates. Furthermore, regarding magnetic recording methods, it has been shown that the conventional longitudinal magnetic recording method has a limit in increasing the recording density. A method has been proposed. When manufacturing magnetic heads used for perpendicular magnetic recording,
A soft magnetic thin film is formed on a nonmagnetic substrate by sputtering or vapor deposition. The substrate used in these magnetic heads requires sufficient surface smoothness because a thin film is formed thereon as described above, and the surface is usually mirror-finished. If there are pores with a large diameter or a large number of pores in the above-mentioned substrate, even if mirror finishing is applied, the surface of the substrate will not have sufficient smoothness, and sputtering will occur on this surface. Alternatively, circular holes are present in the thin film formed by vapor deposition, and therefore, this thin film cannot have good magnetic properties. Furthermore, since it is difficult to remove gas from the pores, it is difficult to obtain the degree of vacuum required during sputtering or vapor deposition. Currently, aggregates of alumina-based ceramics that provide surface smoothness are generally used as substrates for these magnetic heads. However, this alumina-based ceramic material has high hardness and has the disadvantage that it easily scratches the surface of the recording medium when sliding with the magnetic recording medium. In order to eliminate this drawback, conventionally, lubricant is applied to the surface of the magnetic recording medium on which the thin-film magnetic head slides.
Alternatively, the surface of the magnetic recording medium is coated with a protective film, but even if lubricant is applied, it is difficult to maintain the lubricating effect for a long time due to volatilization, etc., so it is necessary to reapply the lubricant periodically. However, providing a protective film on the recording medium increases the number of steps required to cover the protective film, and increases the distance between the thin film magnetic head and the recording medium. (Objective of the Invention) The present invention has extremely high surface smoothness, makes it possible to form a thin film with good magnetic properties on a mirror-finished surface, and applies a lubricant to the surface of a magnetic recording medium. To provide a base for a magnetic head that does not permanently damage the surface of a magnetic recording medium without damaging the surface of the magnetic recording medium, without forming a protective film on the surface of the magnetic recording medium, and with less wear on the contact surface with the magnetic recording medium. [Features of the Invention] The first feature of the invention is that the surface on which the thin film is formed has extremely high smoothness and is composed of a glassy carbon material aggregate having a density of 1.40 g/c+& or more. The second invention is characterized in that the surface on which the thin film is formed has extremely high smoothness and has a density of 1.40 g/cJ.
The present invention is a magnetic head base made of a composite material aggregate containing the above-mentioned glassy carbon material and thermosetting resin. In this specification, "extremely high smoothness" means that no pores with a diameter of 0.5P or more are formed on the surface on which the thin film is formed. Since the substrate for a magnetic head of the present invention does not have holes with a diameter of 0.5 μm or more formed on the surface on which the thin film is formed, a thin film with good magnetic properties can be formed on the surface of the substrate. Although the density of the substrate is not directly related to the formation of a thin film with good magnetic properties, a substrate with a low density of less than 1.40 g/c+I1 has a diameter of 0.5 mm on the surface on which the thin film is formed.
Even if there are no pores larger than μm, many pores are formed on the surface other than the thin film forming surface or inside the substrate, and when this substrate is used, the degree of vacuum required for sputtering or vapor deposition may be reduced. Otherwise, the object of the present invention cannot be achieved because it becomes difficult to obtain or the wear loss becomes large upon contact with a magnetic recording medium. Note that the surface on which the thin film is formed has a diameter of 0. If the substrate does not have pores larger than IP, a thin film with better magnetic properties can be formed on the surface of the substrate. To further explain the present invention, the carbon material according to the present invention includes a carbon material obtained by carbonizing a thermosetting resin, a carbon material obtained by carbonizing a thermosetting resin, and a carbon material obtained by carbonizing a thermosetting resin by copolymerization, cocondensation, etc. Carbon materials obtained by curing or by significantly inhibiting crystallization through chemical treatment during the hardening or carbonization process, and carbon materials obtained by thermally decomposing low molecular weight hydrocarbons such as methane, ethylene, and benzene in the gas phase. Specific examples include polyacrylonitrile-based carbon materials, rayon-based carbon materials, pinch-based carbon materials, lignin-based carbon materials, phenolic-based carbon materials, furan-based carbon materials, alkyd resin-based carbon materials, and non-carbon materials. Examples include saturated polyester carbon materials, xylene resin carbon materials, and the like. Further, examples of the thermosetting resin used in the present invention include phenol resin, epoxy resin, polyester resin, furan resin, urea resin, melamine resin, alkyl resin, xylene resin, and the like. When these thermosetting resins are combined with the glassy carbon material, the thermosetting resin acts as a binder that binds the glassy carbon materials together, resulting in a durable non-woven material that is strong against mechanical damage such as collisions. A magnetic substrate can be obtained. However, if a large amount of thermosetting resin is composited with a glassy carbon material, it becomes a non-magnetic substrate that is subject to high wear. It is recommended to include the following. The magnetic head substrate of the present invention is composed of an aggregate of the above-mentioned carbon material or an aggregate of a composite of carbon material and thermosetting resin. Various well-known molding methods such as casting, compression, and extrusion are used to manufacture these aggregates, but the aggregates have no pores with a diameter of 0.5μi11 or more and a density of 1.40 g/ - In order to obtain the above aggregate, when using the casting method, for example, a precursor of a carbon material (a thermosetting resin cured with a curing agent or heat) is used.
In the step of obtaining the curing agent, the curing agent is uniformly dispersed or heated uniformly, and the curing speed is adjusted so as not to become too fast. In the case of compression or extrusion molding, it can be obtained, for example, by wetting a carbon material with a thermosetting resin and molding it with as few voids as possible. [Effects of the Invention] As described above, the magnetic head substrate of the present invention has the surface smoothness required for forming a thin film on the substrate, and sufficient smoothness can be obtained by mirror finishing. Furthermore, a thin film with good magnetic properties can be formed on the substrate by sputtering or vapor deposition. Moreover, the lubricity between the magnetic recording medium and the magnetic recording medium can be maintained for a long time without using a lubricant, the surface of the magnetic recording medium is not damaged, and the amount of loss due to abrasion is small. Furthermore, due to the conductivity of the carbon material, static electricity is not generated, and there is an effect that dust does not adhere to the substrate and the magnetic recording medium. When the above-mentioned carbon material aggregate or composite material aggregate according to the present invention is used in a part other than the base that comes into contact with a magnetic recording medium, for example, a protective plate of a thin film magnetic head, a support of a soft magnetic thin film of a perpendicular magnetic recording head, etc. This can be said to be preferable because it provides sustainable lubricity between the magnetic recording media. [Explanation based on Examples] Hereinafter, the present invention will be explained in more detail using Examples in order to show specific embodiments of the magnetic head substrate of the present invention. It does not limit the technical scope of the invention.

Claims (1)

【特許請求の範囲】 (11磁気記録媒体に対して書込みまたは読取りを行う
書込み・読取り変換器を構成する薄膜が一つの面に形成
される磁気ヘッド用基板において、上記薄膜が形成され
る面は極めて高い平滑性を有し、 密度が1.40 g/era以上のガラス状カーボン材
料集合体で構成された ことを特徴とする磁気ヘッド用基板。 (2)磁気記録媒体に対して書込みまたは読取りを行う
書込み・読取り変換器を構成する薄膜が一つの面に形成
される磁気ヘッド用基板において、上記薄膜が形成され
る面は極めて高い平滑性を有し、 密度が1.40g/cJ以上のガラス状カーボン材料お
よび熱硬化性樹脂を含む複合材料集合体で構成された ことを特徴とする磁気ヘッド用基板。
[Claims] (11) In a magnetic head substrate in which a thin film constituting a write/read converter for writing to or reading from a magnetic recording medium is formed on one surface, the surface on which the thin film is formed is A substrate for a magnetic head characterized by being composed of a glassy carbon material aggregate having extremely high smoothness and a density of 1.40 g/era or more. (2) Writing or reading on a magnetic recording medium. In a magnetic head substrate on which a thin film constituting a write/read converter is formed on one surface, the surface on which the thin film is formed has extremely high smoothness and a density of 1.40 g/cJ or more. A magnetic head substrate comprising a composite material aggregate containing a glassy carbon material and a thermosetting resin.
JP1929383A 1982-11-04 1983-02-08 Magnetic head substrate Granted JPS59144019A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP1929383A JPS59144019A (en) 1983-02-08 1983-02-08 Magnetic head substrate
EP83110808A EP0108355B1 (en) 1982-11-04 1983-10-28 Magnetic head
DE8383110808T DE3375435D1 (en) 1982-11-04 1983-10-28 Magnetic head
US06/548,566 US4642720A (en) 1982-11-04 1983-11-03 Magnetic head comprised of an improved base substance for high density magnetic recording

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1929383A JPS59144019A (en) 1983-02-08 1983-02-08 Magnetic head substrate

Publications (2)

Publication Number Publication Date
JPS59144019A true JPS59144019A (en) 1984-08-17
JPH0370849B2 JPH0370849B2 (en) 1991-11-11

Family

ID=11995378

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1929383A Granted JPS59144019A (en) 1982-11-04 1983-02-08 Magnetic head substrate

Country Status (1)

Country Link
JP (1) JPS59144019A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60214407A (en) * 1984-04-10 1985-10-26 Tokai Carbon Co Ltd Base material for magnetic head
US4774140A (en) * 1985-08-06 1988-09-27 Kao Corporation Glass-like carbon material, method for manufacturing the same, and slider part for use with a recording medium

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60214407A (en) * 1984-04-10 1985-10-26 Tokai Carbon Co Ltd Base material for magnetic head
US4774140A (en) * 1985-08-06 1988-09-27 Kao Corporation Glass-like carbon material, method for manufacturing the same, and slider part for use with a recording medium

Also Published As

Publication number Publication date
JPH0370849B2 (en) 1991-11-11

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