JP2751902B2 - Method for manufacturing multilayer printed wiring board - Google Patents

Method for manufacturing multilayer printed wiring board

Info

Publication number
JP2751902B2
JP2751902B2 JP7341648A JP34164895A JP2751902B2 JP 2751902 B2 JP2751902 B2 JP 2751902B2 JP 7341648 A JP7341648 A JP 7341648A JP 34164895 A JP34164895 A JP 34164895A JP 2751902 B2 JP2751902 B2 JP 2751902B2
Authority
JP
Japan
Prior art keywords
forming
metal
copper foil
plate
end plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP7341648A
Other languages
Japanese (ja)
Other versions
JPH09186454A (en
Inventor
正宏 中井
圭子 伊川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP7341648A priority Critical patent/JP2751902B2/en
Publication of JPH09186454A publication Critical patent/JPH09186454A/en
Application granted granted Critical
Publication of JP2751902B2 publication Critical patent/JP2751902B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は多層印刷配線板の製
造方法に関し、特に表面実装部品を高密度に実装できる
サーフェイスビアホール上に実装パッドを有する、多層
印刷配線板の製造方法に関するものである。
The present invention relates to a method for manufacturing a multilayer printed wiring board, and more particularly to a method for manufacturing a multilayer printed wiring board having mounting pads on surface via holes on which surface-mounted components can be mounted at high density.

【0002】[0002]

【従来の技術】従来、多層印刷配線板において、各配線
層間の電気的接続は、表裏貫通穴をあけ銅めっきなどに
より電気的接続がされるようにして形成したスルーホー
ルにより行われている。一方表面実装方式のパッケージ
の小型化,多ピン化にともない、多層印刷配線板の高密
度化が要求されている。この様な要求に対応するために
表裏貫通のスルーホールではなく、最外層とその真下の
内層を電気的に接続するような非貫通スルーホールを用
いる例がある。また、表面実装の普及にともない非貫通
スルーホール上に表面実装用パッドを配置する例があ
る。
2. Description of the Related Art Conventionally, in a multi-layer printed wiring board, electrical connection between wiring layers is made by through holes formed by opening front and back through holes and making electrical connection by copper plating or the like. On the other hand, with the miniaturization of the surface mount type package and the increase in the number of pins, higher density of the multilayer printed wiring board is required. In order to meet such a demand, there is an example in which a non-through through hole for electrically connecting the outermost layer and an inner layer immediately below the outermost layer is used instead of the through hole penetrating the front and back. Further, there is an example in which a surface mounting pad is arranged on a non-through through hole with the spread of surface mounting.

【0003】図4(a)〜(e),図5(a)〜(c)
は従来のサーフェイスビアホールを有する多層印刷板の
製造方法の従来例1を説明する工程順に示した断面図で
ある。まず、図4(a)に示すように、絶縁基板の表面
に銅箔を張り合わせた銅張り積層板16に穴あけを施
し、内層貫通穴22を形成する。次に、図4(b)に示
すように、パネルめっき工法にて内層貫通穴22内を含
む全面に内層めっき7を施し非貫通スルーホール21を
形成する。次に、図4(c)に示すように、非貫通スル
ーホール21を形成した銅張り積層板16に積層後内層
となる層のみ通常フォト印刷回路形成法を用い内層回路
8を形成する。次に、図4(d)に示すように、内層回
路8を形成した銅張り積層板(以下、外層材と記す)3
をプリプレグ9をはさんで積層する。また、外層材3,
プリプレグ9,外層材3と組み合わせたものを複数同時
に積層を行う場合には、それぞれの外層材3との間に金
属鏡板と樹脂が金属鏡板につかないよう離型紙を挟み積
層を行う(図示せず)。この際、外層材3と積層治具1
5もしくは金属鏡板との間にプレプレグ9の樹脂粉等が
充填され、噴き出したプリプレグ23が非貫通スルーホ
ール21より噴き出す。次に、図5(a)に示すよう
に、非貫通スルーホール21より噴き出したプリプレグ
23を研磨により除去することによって多層シールド板
19を得る。次に、図5(b)に示すように、貫通穴を
あけ、貫通穴の壁面を含む全面に外層めっき10を施
し、部品実装用及び表裏導通用の貫通スルーホール11
を形成する。次に、図5(c)に示すように、非貫通ス
ルーホール21上に表面実装用パッド14を形成すると
共に外層回路13を形成することによって所望の印刷配
線板を得る。
FIGS. 4 (a) to 4 (e) and FIGS. 5 (a) to 5 (c)
FIG. 3 is a cross-sectional view showing a conventional example 1 of a method for manufacturing a multilayer printed board having a conventional surface via hole in a process order. First, as shown in FIG. 4A, a hole is made in a copper-clad laminate 16 in which a copper foil is laminated on the surface of an insulating substrate to form an inner layer through-hole 22. Next, as shown in FIG. 4B, the inner layer plating 7 is applied to the entire surface including the inside of the inner layer through hole 22 by a panel plating method to form a non-through hole 21. Next, as shown in FIG. 4C, the inner layer circuit 8 is formed on the copper-clad laminate 16 in which the non-through-holes 21 are formed by using a normal photo printed circuit forming method only for the layer that becomes the inner layer after lamination. Next, as shown in FIG. 4D, a copper-clad laminate (hereinafter referred to as an outer layer material) 3 on which the inner layer circuit 8 is formed is formed.
Are laminated with the prepreg 9 interposed therebetween. In addition, outer layer material 3,
When a plurality of combinations of the prepreg 9 and the outer layer material 3 are simultaneously laminated, a release paper is sandwiched between each of the outer layer materials 3 so that the metal end plate and the resin do not adhere to the metal end plate (not shown). ). At this time, the outer layer material 3 and the laminating jig 1
The resin powder or the like of the prepreg 9 is filled between the prepreg 5 and the metal end plate, and the prepreg 23 that has been blown out blows out from the non-through through hole 21. Next, as shown in FIG. 5A, the prepreg 23 ejected from the non-penetrating through holes 21 is removed by polishing to obtain the multilayer shield plate 19. Next, as shown in FIG. 5 (b), a through hole is made, an outer layer plating 10 is applied to the entire surface including the wall surface of the through hole, and a through through hole 11 for component mounting and front / back conduction is formed.
To form Next, as shown in FIG. 5C, a desired printed wiring board is obtained by forming the surface mounting pads 14 on the non-through-holes 21 and the outer layer circuit 13.

【0004】図6(a)〜(e)は従来のビルトアップ
工法によるサーフェイスビアホールを有する多層印刷配
線板の製造方法の従来例2を説明する工程順に示した断
面図である。まず、図6(a)に示すように、両面に銅
箔20のついた銅張り積層板16に図6(b)に示すよ
うに、通常のフォト印刷回路形成法を用い内層回路8の
形成を行う。次に、図6(c)に示すように、銅箔20
上に感光性樹脂を塗布し絶縁層4を形成し、マスクを用
いて露光を行い所望のパターンを感光性樹脂上に焼き付
け現像しビアホール用の内層非貫通穴5を形成する。次
に、図6(d)に示すように、部品実装用及び表裏導通
用の貫通穴を明け、外層めっき10を施して、導体層及
びフォトビア6及び貫通スルーホール11を形成する。
次に、図6(e)に示すように、導体層のエッチングを
行い外層回路13を形成することによって、ビルトアッ
プ工法によるサーフェイスビアホールを有する多層印刷
配線板を得る。
FIGS. 6 (a) to 6 (e) are sectional views showing process steps for explaining a second conventional example of a method for manufacturing a multilayer printed wiring board having surface via holes by a conventional build-up method. First, as shown in FIG. 6A, the inner layer circuit 8 is formed on a copper-clad laminate 16 having copper foils 20 on both sides by using a normal photo printed circuit forming method as shown in FIG. 6B. I do. Next, as shown in FIG.
An insulating layer 4 is formed by applying a photosensitive resin thereon, and is exposed using a mask, and a desired pattern is baked and developed on the photosensitive resin to form an inner layer non-through hole 5 for a via hole. Next, as shown in FIG. 6 (d), through holes for component mounting and front / back conduction are made, and outer layer plating 10 is applied to form conductor layers, photo vias 6, and through through holes 11.
Next, as shown in FIG. 6 (e), the conductor layer is etched to form the outer layer circuit 13, thereby obtaining a multilayer printed wiring board having surface via holes by a built-up method.

【0005】[0005]

【発明が解決しようとする課題】この従来例1の製造方
法では、再三のめっき加工により、最外層のめっき厚が
厚くなり微細回路配線の形成が困難であった。また、積
層の際に最外層にきずやだこんが発生し配線不良の原因
となっていた。更に、積層時にサーフェイスビアホール
から吹き出した樹脂を除去するため研磨を行っていた
が、これによりサーフェイスビアホールとサーフェイス
ビアホール内に充填された樹脂に剥離が生じハローの原
因となっていた。また、従来の重ね合わせ積層を行う製
造方法では積層時に各製品の間に鏡板と離型紙を重ね合
わせなければならず、積層組立工程が複雑化していた。
また、従来例2の製造方法では、サーフェイスビアホー
ル上の銅箔の表面平滑性に問題があるため、サーフェイ
スビアホール上に実装パッドを形成した場合、実装時に
問題となった。更に、ビルトアップ方式では各層を順々
に生成していくため層数が多くなるほど製造に時間がか
かった。
In the manufacturing method of the conventional example 1, the plating thickness of the outermost layer is increased by repeated plating, and it is difficult to form fine circuit wiring. Further, at the time of lamination, flaws and dust occurred in the outermost layer, which caused wiring failure. Furthermore, polishing was performed to remove the resin blown out from the surface via hole during lamination, but this caused peeling between the surface via hole and the resin filled in the surface via hole, causing a halo. Further, in the conventional manufacturing method for performing the lamination, the end plate and the release paper must be laminated between the products at the time of lamination, and the lamination assembly process has become complicated.
Further, in the manufacturing method of Conventional Example 2, since there is a problem in the surface smoothness of the copper foil on the surface via hole, when a mounting pad is formed on the surface via hole, there is a problem during mounting. Further, in the built-up system, since each layer is generated sequentially, the more the number of layers, the longer the manufacturing time.

【0006】本発明の目的は、微細回路配線の形成が容
易で最外層にきずやだこんの発生による配線不良やハロ
ーの発生がなく、積層組立て工程が単純化でき実装上の
問題がなく、製造時間を短縮できる多層印刷配線板の製
造方法を提供することにある。
SUMMARY OF THE INVENTION It is an object of the present invention to easily form a fine circuit wiring, to prevent a wiring defect and a halo from being generated in the outermost layer due to generation of a flaw or dust, to simplify a laminating and assembling process and to eliminate a mounting problem. An object of the present invention is to provide a method for manufacturing a multilayer printed wiring board that can reduce the manufacturing time.

【0007】[0007]

【課題を解決するための手段】第1の発明の多層印刷配
線板の製造方法は、金属鏡板の片面にめっきにより銅箔
を形成する工程と、この銅箔付き金属鏡板を前記銅箔を
外側にして2枚を張り合わせる工程と、この張り合わせ
金属鏡板の両側に感光性樹脂からなる絶縁層と導体層
を交互に形成していくビドアップ工法にてフォトビア
と内層回路のパターン形成を行う工程と、前記張り合わ
た前記金属鏡板を分離し各々の前記金属鏡板を外側と
形成した外層材プリプレグを介して加熱加成型
し積層を行う工程と、前記金属鏡板を銅箔から剥離して
多層シールド板を形成する工程と、この多層シールド板
に穴あけを行いめっきを施し貫通スルーホールと外層
路形成を行う工程とを含むことを特徴とする。
According to a first aspect of the present invention, there is provided a method for manufacturing a multilayer printed wiring board, comprising the steps of: forming a copper foil on one side of a metal mirror plate by plating; And the process of bonding two pieces together
And photo-vias in buildings windup method to continue to form alternating insulating layers and conductor layers composed of a photosensitive resin on both sides of the metal end plate
Through and a step of forming a pattern of the inner layer circuit, the Hariawa <br/> prepreg and the separated outer layer material formed by <br/> the metal end plate of each outer front Symbol metal end plate which has and performing heating and pressing molding stacked, said forming a multilayer shield plate metal end plate is peeled off from the copper foil, through hole and the outer layer once plated perform drilling this multilayer shield plate <br / > Forming a road.

【0008】第2の発明の多層印刷配線板の製造方法
は、金属鏡板の片面にめっきにより銅箔を形成する工程
と、この銅箔付き金属鏡板を前記銅箔を外側にして2枚
を張り合わせる工程と、この張り合わせた金属鏡板の両
側に感光性樹脂からなる絶縁層と導体層を交互に形成し
ていくビルドアップ工法にてフォトビアと内層回路の
ターン形成を行う工程と、前記パターン形成した前記金
属鏡板の両側にこの金属鏡板を分離し各々の金属鏡板を
外側として形成した外層材をプリプレグを介して加熱加
圧成型し積層する工程と、各々の層の前記金属鏡板を前
記銅箔より剥離して多層シールド板を形成する工程と、
前記多層シールド板に穴あけを行いめっきを施し貫通
ルーホールと外層回路形成を行う工程とを含むことを特
徴とする。
According to a second aspect of the present invention, there is provided a method of manufacturing a multilayer printed wiring board, comprising the steps of: forming a copper foil on one side of a metal mirror plate by plating; Forming a photo via and an inner layer circuit by a build-up method in which an insulating layer and a conductive layer made of a photosensitive resin are alternately formed on both sides of the bonded metal end plate. The patterned gold
Separate this metal head plate on both sides of the metal head plate and attach each metal head plate
The outer layer material formed as the outside is heated and heated through the prepreg.
Pressing and laminating, and forming a multilayer shield plate by peeling the metal mirror plate of each layer from the copper foil,
A step of forming a through hole and forming an outer layer circuit by drilling and plating the multilayer shield plate.

【0009】[0009]

【発明の実施の形態】次に本発明の実施の形態について
図面を参照して説明する。
Embodiments of the present invention will now be described with reference to the drawings.

【0010】図1(a)〜(e),図2(a),(b)
は本発明の第1の実施の形態の多層印刷配線板の製造方
法を説明する工程順に示した断面図である。本発明の第
1の実施の形態の多層印刷配線板の製造方法は、まず、
図1(a)に示すように、片面に厚さ約9μmの銅箔2
のついた、厚さ約0.2mmの金属鏡板(以下、SUS
板と記す)1を、銅箔2が外側になるように耐熱テープ
で2枚張り合わせる。次に、図1(b)に示すように、
銅箔2上にエポキシ樹脂を主成分とした感光性樹脂を銅
箔2上で約50μmの厚さになるように塗布し、仮乾燥
させ絶縁層4を形成し、マスクを用いて露光を行い所望
のパターンを感光性樹脂上に焼き付ける。焼き付けた絶
縁層4を現像液により現像し、導体パターン第一層と第
二層接続用ビアホール用非貫通穴5(径200μm程
度)を形成する。次に、図1(c)に示すように、無電
解めっき及び電解めっき(厚さ20μm)を施して、内
層めっき7及び導体パターン第一層と第二層接続用フォ
トビア6を形成し、内層めっき7上にドライフィルムを
用いてマスクパターンを形成して塩化第二銅のエッチン
グ液によりエッチングを行い内層回路8を形成する。次
に、図1(d)に示すように、張り合わせた2枚のSU
S板1を耐熱テープを切断して分離し、それぞれを外層
材3として、例えば厚み約100μmのエポキシ樹脂浸
透ガラスクロスよりなるプリプレグ9を介して約170
℃に加熱、約30kg/cm2 に加圧して接着する。ま
た、この際に任意の内層材を外層材3の間に組み込み、
5層以上とすることも可能である。この際、外層材3と
SUS板1とは接着されているため、間にプリプレグ9
の粉等が入らず、だこんの発生はない。次に、図1
(e)に示すように、SUS板1を銅箔2より剥離し、
多層シールド板19を得る。次に、図2(a)に示すよ
うに、ドリリングにより貫通穴を明け、無電解めっき及
び電解銅めっきにより厚み25μmの外層めっき層10
及び部品実装用及び表裏銅通用の貫通穴貫通スルーホー
ル11を形成する。次に、図2(b)に示すように、外
層めっき層10上にドライフィルムを用いてマスクパタ
ーンを形成し塩化第二銅のエッチング液によりエッチン
グすることにより、外層回路13及び実装用パッド14
を有する多層印刷配線板を得る。
FIGS. 1 (a) to 1 (e), 2 (a) and 2 (b)
3A to 3C are cross-sectional views illustrating a method of manufacturing the multilayer printed wiring board according to the first embodiment of the present invention in the order of steps for explaining the method. The method for manufacturing a multilayer printed wiring board according to the first embodiment of the present invention comprises:
As shown in FIG. 1A, a copper foil 2 having a thickness of about 9 μm
Approximately 0.2 mm thick metal head plate (hereinafter referred to as SUS
2) are bonded together with a heat-resistant tape such that the copper foil 2 is on the outside. Next, as shown in FIG.
A photosensitive resin containing an epoxy resin as a main component is applied on the copper foil 2 so as to have a thickness of about 50 μm on the copper foil 2, temporarily dried to form an insulating layer 4, and exposed using a mask. A desired pattern is printed on the photosensitive resin. The baked insulating layer 4 is developed with a developing solution to form a non-through hole 5 (about 200 μm in diameter) for a via hole for connecting the first conductive pattern and the second conductive pattern. Next, as shown in FIG. 1 (c), electroless plating and electrolytic plating (thickness: 20 μm) are performed to form an inner layer plating 7 and a photovia 6 for connecting the first and second layers of the conductor pattern. A mask pattern is formed on the plating 7 using a dry film, and etching is performed using an etching solution of cupric chloride to form an inner layer circuit 8. Next, as shown in FIG.
The S-plate 1 is separated by cutting a heat-resistant tape, and each is separated as an outer layer material 3 through a prepreg 9 made of, for example, an epoxy resin infiltrated glass cloth having a thickness of about 100 μm.
Heat to ℃ and press to about 30 kg / cm 2 for adhesion. At this time, an arbitrary inner layer material is incorporated between the outer layer materials 3,
It is also possible to have five or more layers. At this time, since the outer layer material 3 and the SUS plate 1 are bonded, the prepreg 9 is interposed therebetween.
No powder, etc., and no octopus. Next, FIG.
As shown in (e), the SUS plate 1 is peeled from the copper foil 2,
A multilayer shield plate 19 is obtained. Next, as shown in FIG. 2A, a through-hole is formed by drilling, and the outer plating layer 10 having a thickness of 25 μm is formed by electroless plating and electrolytic copper plating.
In addition, a through-hole 11 for through-holes for mounting components and for passing copper through is formed. Next, as shown in FIG. 2B, a mask pattern is formed on the outer layer plating layer 10 using a dry film, and the outer layer circuit 13 and the mounting pads 14 are etched by an etching solution of cupric chloride.
Is obtained.

【0011】図3(a),(b)は本発明の第2の実施
の形態の多層印刷配線板の製造方法を説明する工程順に
示した断面図である。本発明の第2の実施の形態の多層
印刷配線板の製造方法は、図1(c)の後、図3(a)
に示すように、張り合わせたSUS板1を分離せずに、
任意の枚数を重ね合わせ、最外層にSUS板1どうしを
分離した外層材3を組み合わせて、それぞれの間にプリ
プレグ9をはさみ、積層を行う。この工程では各外層材
3の間にSUS板や離型紙等を必要としない。次に、図
3(b)の様に、それぞれのSUS板1を銅箔2より剥
離して、多層シールド板19を任意の枚数、1度の積層
によって得る。この後、第1の実施の形態の図1
(e),図2(a),(b)の工程を行うことによっ
て、所望の多層印刷配線板を得る。
FIGS. 3A and 3B are cross-sectional views illustrating a method of manufacturing a multilayer printed wiring board according to a second embodiment of the present invention in the order of steps. In the method for manufacturing a multilayer printed wiring board according to the second embodiment of the present invention, after FIG.
As shown in, without separating the bonded SUS plate 1,
An arbitrary number of sheets are overlapped, the outer layer material 3 in which the SUS plates 1 are separated from each other is combined with the outermost layer, and the prepreg 9 is sandwiched between the layers to perform lamination. In this step, no SUS plate or release paper is required between the outer layer materials 3. Next, as shown in FIG. 3B, the respective SUS plates 1 are peeled off from the copper foil 2, and an arbitrary number of multilayer shield plates 19 are obtained by one-time lamination. Thereafter, FIG. 1 of the first embodiment
By performing the steps of (e) and FIGS. 2 (a) and (b), a desired multilayer printed wiring board is obtained.

【0012】[0012]

【発明の効果】以上説明したように本発明によれば、め
っき回数が少ないことにより最外層銅箔厚が薄く平滑で
あるため、微細回路配線の形成が可能で、内層回路形成
時から積層後まで最外層銅箔とSUS板とを密着させて
いるため、積層の際のきずやだこんが無く、また、SU
S板面にビルトアップ工法によりビアホールを形成し、
回路形成面を向かい合わせ積層を行うことによって、サ
ーフェイスビアホール上に平滑な実装用パッドを形成す
ることができる。また重ね積層を行う場合に、多層シー
ルド板の間にSUS板を挟む必要がないため、工程が従
来より簡略化できる。
As described above, according to the present invention, since the thickness of the outermost copper foil is small and smooth due to the small number of times of plating, fine circuit wiring can be formed. Since the outermost copper foil and the SUS plate are in close contact with each other, there is no
Form a via hole on the S plate surface by the built-up method,
By performing the lamination with the circuit forming surfaces facing each other, a smooth mounting pad can be formed on the surface via hole. Further, in the case of performing the lamination, it is not necessary to sandwich the SUS plate between the multilayer shield plates, so that the process can be simplified as compared with the related art.

【図面の簡単な説明】[Brief description of the drawings]

【図1】(a)〜(e)は本発明の第1の実施の形態の
多層印刷配線板の製造方法を説明する工程順に示した断
面図である。
FIGS. 1A to 1E are cross-sectional views showing a method of manufacturing a multilayer printed wiring board according to a first embodiment of the present invention in the order of steps.

【図2】(a),(b)は本発明の第1の実施の形態の
多層印刷配線板の製造方法を説明する工程順に示した断
面図である。
FIGS. 2A and 2B are cross-sectional views illustrating a method of manufacturing a multilayer printed wiring board according to the first embodiment of the present invention in the order of steps.

【図3】(a),(b)は本発明の第2の実施の形態の
多層印刷配線板の製造方法を説明する工程順に示した断
面図である。
FIGS. 3A and 3B are cross-sectional views illustrating a method of manufacturing a multilayer printed wiring board according to a second embodiment of the present invention in the order of steps.

【図4】(a)〜(e)は従来のサーフェイスビアホー
ルを有する多層印刷配線板の製造方法の従来例1を説明
する工程順に示した断面図である。
FIGS. 4A to 4E are cross-sectional views illustrating a conventional method 1 for manufacturing a multilayer printed wiring board having a surface via hole in the order of steps for explaining Conventional Example 1;

【図5】(a)〜(c)は従来のサーフィイスビアホー
ルを有する多層印刷配線板の製造方法の従来例1を説明
する工程順に示した断面図である。
5 (a) to 5 (c) are cross-sectional views showing a conventional example 1 of a method for manufacturing a multilayer printed wiring board having surface via holes according to the related art in the order of steps.

【図6】(a)〜(e)は従来のビルドアップ工法によ
るサーフェイスビアホールを有する多層印刷配線板の製
造方法の従来例2を説明する工程順に示した断面図であ
る。
6 (a) to 6 (e) are cross-sectional views illustrating a conventional method 2 for manufacturing a multilayer printed wiring board having surface via holes by a conventional build-up method, in the order of steps illustrating the method.

【符号の説明】[Explanation of symbols]

1 SUS板 2 銅箔 3 外層材 4 絶縁層 5 非貫通穴 6 フォトビア 7 内層めっき層 8 内層回路 9 プリプレグ 10 外層めっき層 11 貫通スルーホール 13 外層回路 14 実装用パッド 15 積層治具 16 銅張り積層板 19 多層シールド板 20 銅箔 21 非貫通スルーホール 22 内層貫通穴 23 噴き出したプリプレグ REFERENCE SIGNS LIST 1 SUS plate 2 copper foil 3 outer layer material 4 insulating layer 5 non-through hole 6 photo via 7 inner layer plating layer 8 inner layer circuit 9 prepreg 10 outer layer plating layer 11 through through hole 13 outer layer circuit 14 mounting pad 15 laminating jig 16 copper clad lamination Plate 19 Multilayer shield plate 20 Copper foil 21 Non-through through hole 22 Inner layer through hole 23 Pre-preg spouted

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.6,DB名) H05K 3/46──────────────────────────────────────────────────続 き Continued on front page (58) Field surveyed (Int.Cl. 6 , DB name) H05K 3/46

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 金属鏡板の片面にめっきにより銅箔を形
成する工程と、この銅箔付き金属鏡板を前記銅箔を外側
にして2枚を張り合わせる工程と、この張り合わせた
属鏡板の両側に感光性樹脂からなる絶縁層と導体層を交
互に形成していくビドアップ工法にてフォトビアと内
層回路のパターン形成を行う工程と、前記張り合わせ
記金属鏡板を分離し各々の前記金属鏡板を外側とし
形成した外層材プリプレグを介して加熱加成型し積
層を行う工程と、前記金属鏡板を銅箔から剥離して多層
シールド板を形成する工程と、この多層シールド板に穴
あけを行いめっきを施し貫通スルーホールと外層回路形
成を行う工程とを含むことを特徴とする多層印刷配線板
の製造方法。
1. A step of forming a copper foil on one side of a metal mirror plate by plating, a step of bonding two metal mirror plates with the copper foil with the copper foil outside, and a step of bonding the bonded metal foil. belonging to opposite sides of the end plate made of a photosensitive resin insulating layer and the conductor layer photo via an inner and at buildings windup method to continue to form alternately
A step of forming a pattern layer circuits, said bonded
And performing pre-Symbol the outer layer material to the metal end plate and by an outer <br/> formation of each separating metal end plate heated pressure molding via a prepreg laminate, and peeling the metal end plate of a copper foil Forming a multi-layered shielded board by drilling and plating the multi-layered shielded board to form through -holes and an outer layer circuit.
【請求項2】 金属鏡板の片面にめっきにより銅箔を形
成する工程と、この銅箔付き金属鏡板を前記銅箔を外側
にして2枚を張り合わせる工程と、この張り合わせた
属鏡板の両側に感光性樹脂からなる絶縁層と導体層を交
互に形成していくビルドアップ工法にてフォトビアと内
層回路のパターン形成を行う工程と、前記パターン形成
した前記金属鏡板の両側にこの金属鏡板を分離し各々の
金属鏡板を外側として形成した外層材をプリプレグを介
して加熱加圧成型し積層する工程と、各々の層の前記金
属鏡板を前記銅箔より剥離して多層シールド板を形成す
る工程と、前記多層シールド板に穴あけを行いめっきを
施し貫通スルーホールと外層回路形成を行う工程とを含
むことを特徴とする多層印刷配線板の製造方法。
2. A step of forming a copper foil on one side of a metal mirror plate by plating, a step of bonding two metal mirror plates with the copper foil with the copper foil outside, and a step of bonding the bonded metal plates. The photo- via and the inside are built-up by alternately forming insulating layers and conductive layers made of photosensitive resin on both sides of the metal end plate .
Forming a pattern of a layer circuit, and forming the pattern
This metal head plate was separated on both sides of the metal head plate
The outer layer material formed with the metal end plate on the outside
A step of then by hot pressing multilayer, forming a multi-layer shielding plate said metal end plate of each layer is peeled off from the copper foil, through hole plating is performed drilling the multilayer shield plate And a step of forming an outer layer circuit.
JP7341648A 1995-12-27 1995-12-27 Method for manufacturing multilayer printed wiring board Expired - Fee Related JP2751902B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7341648A JP2751902B2 (en) 1995-12-27 1995-12-27 Method for manufacturing multilayer printed wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7341648A JP2751902B2 (en) 1995-12-27 1995-12-27 Method for manufacturing multilayer printed wiring board

Publications (2)

Publication Number Publication Date
JPH09186454A JPH09186454A (en) 1997-07-15
JP2751902B2 true JP2751902B2 (en) 1998-05-18

Family

ID=18347722

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7341648A Expired - Fee Related JP2751902B2 (en) 1995-12-27 1995-12-27 Method for manufacturing multilayer printed wiring board

Country Status (1)

Country Link
JP (1) JP2751902B2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001267747A (en) 2000-03-22 2001-09-28 Nitto Denko Corp Manufacturing method for multi-layered circuit board
US6772515B2 (en) * 2000-09-27 2004-08-10 Hitachi, Ltd. Method of producing multilayer printed wiring board
JP4549695B2 (en) * 2003-08-08 2010-09-22 日本特殊陶業株式会社 Wiring board manufacturing method
JP4549694B2 (en) * 2004-02-27 2010-09-22 日本特殊陶業株式会社 Wiring substrate manufacturing method and multi-cavity substrate
KR100882607B1 (en) * 2007-08-10 2009-02-12 삼성전기주식회사 Manufacturing method of multilayered printed circuit board
KR100920824B1 (en) * 2007-09-14 2009-10-08 삼성전기주식회사 Manufacturing method of printed circuit board and electromagnetic bandgap structure

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2510747B2 (en) * 1990-02-26 1996-06-26 株式会社日立製作所 Mounting board
JP2921223B2 (en) * 1991-11-21 1999-07-19 日本電気株式会社 Manufacturing method of polyimide multilayer wiring board
JPH06318783A (en) * 1993-05-10 1994-11-15 Meikoo:Kk Manufacturing method of multilayered circuit substrate

Also Published As

Publication number Publication date
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