JP2736923B2 - Bonda - Google Patents
BondaInfo
- Publication number
- JP2736923B2 JP2736923B2 JP1165252A JP16525289A JP2736923B2 JP 2736923 B2 JP2736923 B2 JP 2736923B2 JP 1165252 A JP1165252 A JP 1165252A JP 16525289 A JP16525289 A JP 16525289A JP 2736923 B2 JP2736923 B2 JP 2736923B2
- Authority
- JP
- Japan
- Prior art keywords
- tool
- tool holder
- holder
- mounting body
- spherical portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Die Bonding (AREA)
- Wire Bonding (AREA)
Description
【発明の詳細な説明】 ［産業上の利用分野］ 本発明はインナーリードボンダ、アウターリードボン
ダ、バンプ転写ボンダ、ペレットボンダ等に係り、特に
ツール保持機構に関する。The present invention relates to an inner lead bonder, an outer lead bonder, a bump transfer bonder, a pellet bonder, and the like, and particularly to a tool holding mechanism.
［従来の技術］ ボンダ用ツール保持機構は、ツールが固定されたツー
ルホルダと、このツールホルダが取付けられボンダのツ
ール保持部に固定される取付体とを備えている。[Related Art] A tool holding mechanism for a bonder includes a tool holder to which a tool is fixed, and an attachment body to which the tool holder is mounted and which is fixed to a tool holding portion of the bonder.
ところで、ボンダにおいては、ツールの下面全体が試
料のボンデイング面に均一に当ることが好ましい。Incidentally, in the bonder, it is preferable that the entire lower surface of the tool uniformly hits the bonding surface of the sample.
従来のボンダ用ツール保持機構として、例えば特開昭
63−169730号公報及び特開昭63−169731号公報のように
自動倣い手段を設けたもの（以下、公知例２という）が
知られている。この構造は、ツールホルダと取付体とを
スプリングを介して結合している。従って、試料にツー
ルを圧接させた場合、スプリングがたわんで試料のボン
デイング面にツールの下面が倣う。As a conventional bonder tool holding mechanism, for example,
Japanese Patent Application Laid-Open No. 63-169730 and Japanese Patent Application Laid-Open No. 63-169731 are known in which automatic copying means is provided (hereinafter referred to as known example 2). In this structure, the tool holder and the mounting body are connected via a spring. Therefore, when the tool is pressed against the sample, the spring bends and the lower surface of the tool follows the bonding surface of the sample.
［発明が解決しようとする課題］ 上記従来技術は、弾性を有する試料のリードに、ツー
ルをスプリングを介して圧着するので、圧着時にスベリ
が発生することがあり、ボンデイング精度及びボンダビ
リテイが悪くなるという問題があった。[Problems to be Solved by the Invention] In the above-mentioned conventional technology, since a tool is press-bonded to a sample lead having elasticity via a spring, slippage may occur at the time of press-bonding, and the bonding accuracy and bondability are deteriorated. There was a problem.
本発明の目的は、短時間に平行出しが行えると共に、
圧着不良が防止できるボンダ用ツール保持機構を備えた
ボンダを提供することにある。An object of the present invention is to perform parallel alignment in a short time,
An object of the present invention is to provide a bonder provided with a bonder tool holding mechanism capable of preventing poor crimping.
［課題を解決するための手段］ 上記目的は、ツールが固定されたツールホルダと、こ
のツールホルダが取付けられボンダのツール保持部に固
定される取付体と、前記ツールホルダを前記取付体に首
振り可能に取付ける首振り手段と、前記ツールの下面を
ボンドステージに接触させた状態で前記取付体を介して
前記ツールホルダに荷重を加えることにより、ツールが
ボンドステージに接触した状態を保って前記ツールホル
ダと前記取付体とを固定させる固定手段とを備えた構成
により達成される。Means for Solving the Problems The object of the present invention is to provide a tool holder to which a tool is fixed, a mounting body to which the tool holder is mounted and which is fixed to a tool holding portion of a bonder, and the tool holder having a neck attached to the mounting body. A swing means for swingably mounting, and applying a load to the tool holder via the mounting body in a state where the lower surface of the tool is in contact with the bond stage, thereby maintaining a state in which the tool is in contact with the bond stage. This is achieved by a configuration including a fixing means for fixing the tool holder and the mounting body.
［作用］ ツールホルダは取付体に首振り手段によつて首振り可
能に設けられているので、ツールの下面を任意の方向に
傾けることができる。そこで、取付体に荷重を加えてツ
ールをボンドステージ面上に圧接させると、ツール下面
はボンドステージ面に倣うので、その状態で固定手段に
よってツールホルダを取付体に固定する。[Operation] Since the tool holder is provided on the attachment body so as to be able to swing by the swing means, the lower surface of the tool can be inclined in any direction. Therefore, when a load is applied to the attachment body to press the tool onto the bond stage surface, the lower surface of the tool follows the bond stage surface, and in this state, the tool holder is fixed to the attachment body by fixing means.
［実施例］ 以下、本発明の一実施例を第１図乃至第５図により説
明する。図示しない平面駆動手段で平面上のXY方向に移
動させられる移動体１には、図示しない上下駆動手段で
上下動させられる上下ブロック２が軸受３を介して上下
動可能に設けられており、上下ブロック２には絶縁板４
を介して取付体５が固定されている。取付体５には、下
方が開放した円筒状の盲穴5aが形成され、この盲穴5aの
下端側にはねじ部5bが形成されている。取付体５の盲穴
5a内の上部には受座６がねじ７で固定されており、受座
６の下面には中心点８を中心とした半径とする凹状の球
面部6aが形成されている。受座６の球面部6aには、回転
支点座９が設けられており、回転支点座９には前記球面
部6aに対応した面に該球面部6aと同一の中心点８を中心
とした半径よりなる凸状の球面部9aが形成されている。Embodiment One embodiment of the present invention will be described below with reference to FIGS. 1 to 5. A moving body 1 which is moved in the XY direction on a plane by a plane driving means (not shown) is provided with an upper and lower block 2 which is vertically moved by a vertically driving means (not shown) via a bearing 3 so as to be vertically movable. Block 2 has insulating plate 4
The mounting body 5 is fixed via the. The mounting body 5 is formed with a cylindrical blind hole 5a that is open at the bottom, and a screw portion 5b is formed at the lower end side of the blind hole 5a. Blind hole of mounting body 5
A receiving seat 6 is fixed to an upper portion of the receiving seat 5 with screws 7, and a concave spherical portion 6 a having a radius centered on the center point 8 is formed on a lower surface of the receiving seat 6. A rotation fulcrum seat 9 is provided on the spherical portion 6a of the receiving seat 6, and the rotation fulcrum seat 9 has a radius centered on the same center point 8 as the spherical portion 6a on a surface corresponding to the spherical portion 6a. A convex spherical portion 9a is formed.
回転支点座９はツールホルダ10に挿入され、また回転
支点座９とツールホルダ10間にはスラスト軸受11が介在
されている。ツールホルダ10は上部につば部10aを有
し、このつば部10aの一部はカットされて平面部10bが形
成されている。この平面部10bには取付体５に螺合され
た２本のθ調整用ねじ12の先端が当接しており、θ調整
用ねじ12にはロックねじ13が螺合されている。またツー
ルホルダ10の下端にはツール14が挿入されるツール挿入
穴10cが形成され、このツール挿入穴10cの部分は弾性を
有するように割り溝10dが形成されていると共に、外周
は下方が先細りのテーパ部10eとなっており、更にテー
パ部10eの上部にはねじ部10fが形成されている。The rotation fulcrum seat 9 is inserted into the tool holder 10, and a thrust bearing 11 is interposed between the rotation fulcrum seat 9 and the tool holder 10. The tool holder 10 has a collar portion 10a at an upper portion, and a part of the collar portion 10a is cut to form a flat portion 10b. The ends of two θ adjustment screws 12 screwed to the mounting body 5 are in contact with the flat portion 10b, and a lock screw 13 is screwed to the θ adjustment screw 12. A tool insertion hole 10c into which the tool 14 is inserted is formed at a lower end of the tool holder 10, and a portion of the tool insertion hole 10c is formed with a split groove 10d so as to have elasticity. The tapered portion 10e has a threaded portion 10f formed above the tapered portion 10e.
ツールホルダ10にはあおり用球座15がつば部10aに当
接するように挿入されており、あおり用球座15の下端側
には前記中心点８を中心とした半径の凸状の球面部15a
が形成され、あおり用球座15の上端側は一部が弾性を有
するように縦溝15bと横溝15cとが形成されている。あお
り用球座15の縦溝15bに対応した部分には固定ねじ16が
螺合されている。従って、固定ねじ16を締付けると、あ
おり用球座15はツールホルダ10に固定される。A tilting ball seat 15 is inserted into the tool holder 10 so as to be in contact with the collar portion 10a, and a convex spherical portion 15a having a radius centered on the center point 8 is provided at a lower end side of the tilting ball seat 15.
A vertical groove 15b and a horizontal groove 15c are formed on the upper end side of the tilting ball seat 15 so that a part thereof has elasticity. A fixing screw 16 is screwed into a portion corresponding to the vertical groove 15b of the tilting ball seat 15. Therefore, when the fixing screw 16 is tightened, the tilting ball seat 15 is fixed to the tool holder 10.
前記取付体５のねじ部5bには球座用固定ホルダ20が螺
合されており、球座用固定ホルダ20には、あおり用球座
15の球面部15aに対応した部分に該球面部15aと同一半径
の凹状の球面部20aが形成されている。従って、球座用
固定ホルダ20を締付けると、あおり用球座15、ツールホ
ルダ10を介して回転支点座９は受座６に圧接させられ、
ツールホルダ10は取付体５に一体に固定される。A ball-fixing holder 20 is screwed into the screw portion 5b of the mounting body 5, and the ball-fixing holder 20 is
A concave spherical portion 20a having the same radius as the spherical portion 15a is formed in a portion corresponding to the spherical portion 15a. Therefore, when the fixed holder 20 for the ball seat is tightened, the rotation fulcrum seat 9 is pressed against the seat 6 via the ball seat 15 for the tilt and the tool holder 10,
The tool holder 10 is integrally fixed to the mounting body 5.
前記ツールホルダ10のねじ部10fにはツール固定ホル
ダ21が螺合されており、ツール固定ホルダ21には前記テ
ーパ部10eを押圧するテーパ部21aが形成されている。従
って、ツール14をツールホルダ10のツール挿入穴10cに
挿入し、ツール固定ホルダ21を締付けると、ツールホル
ダ10のテーパ部10eは内側に押圧され、ツール14はツー
ルホルダ10に固定される。A tool fixing holder 21 is screwed into a screw portion 10f of the tool holder 10, and a taper portion 21a for pressing the taper portion 10e is formed in the tool fixing holder 21. Therefore, when the tool 14 is inserted into the tool insertion hole 10c of the tool holder 10 and the tool fixing holder 21 is tightened, the tapered portion 10e of the tool holder 10 is pressed inward, and the tool 14 is fixed to the tool holder 10.
次にツール14の下面の平行出し調整方法について説明
する。球座用固定ホルダ20を緩めた状態で取付体５を下
降させ、ツール14の下面をボンドステージ22に当接させ
る。これにより、ツール14の下面がボンドステージ22に
自動的に倣うように回転支点座９の球面部9aが受座６の
球面部6aに沿って動き、XY方向が自動的に調整される。
そこで、球座用固定ホルダ20を締付けると、球座用固定
ホルダ20の球面部20aがあおり用球座15の球面部15aを締
上げ、ツールホルダ10、即ちツール14は前記のように平
行出しされた状態で固定される。Next, a method of adjusting the parallelism of the lower surface of the tool 14 will be described. The mounting body 5 is lowered with the fixed holder 20 for the ball seat loosened, and the lower surface of the tool 14 is brought into contact with the bond stage 22. Thereby, the spherical portion 9a of the rotation fulcrum seat 9 moves along the spherical portion 6a of the receiving seat 6 so that the lower surface of the tool 14 automatically follows the bond stage 22, and the XY direction is automatically adjusted.
Therefore, when the fixed holder 20 for the ball seat is tightened, the spherical portion 20a of the fixed holder 20 for the ball seat is tightened up the spherical portion 15a of the ball seat 15 for the tilt, and the tool holder 10, that is, the tool 14 is parallelized as described above. It is fixed in the state where it was done.
即ち、ツールホルダ10は取付体５に対して首振りする
首振り機構によって取付けられているので、ツール14の
下面は任意の方向に動かすことができる。従って、前記
のようにツール14に初期荷重を加えてボンドステージ22
に圧接させ、その後に球座用固定ホルダ20を締付けるの
みでツール14の平行出し調整が行えるので、その作業は
容易で、かつ短時間に行える。That is, since the tool holder 10 is mounted on the mounting body 5 by the swing mechanism that swings, the lower surface of the tool 14 can be moved in any direction. Therefore, as described above, an initial load is applied to the tool 14 to
The tool 14 can be parallel-adjusted only by pressing the ball holder fixed holder 20 after that, so that the work can be performed easily and in a short time.
なお、上記実施例は、取付体５と受座６とは別体より
なるが、一体部品で構成してもよい。また回転支点座
９、ツールホルダ10、あおり用球座15も一体部品でもよ
い。また球面部6a、8a、15a、20aの半径中心点８は、球
面部6aと15a間の位置に設けたが、球面部6aの上方位置
又は球面部15aの下方位置に設けてもよい。中心点８を
球面部6aの上方位置に設けた場合には、球面部6aは凸状
となり、球面部9aは凹状となる。また中心点８を球面部
15aの下方位置に設けた場合には、球面部15aは凹状とな
り、球面部20aは凸状となる。In the above embodiment, the mounting body 5 and the receiving seat 6 are formed separately, but may be formed as an integral part. Further, the rotation fulcrum seat 9, the tool holder 10, and the swing ball seat 15 may be an integral part. The radial center point 8 of each of the spherical portions 6a, 8a, 15a, and 20a is provided at a position between the spherical portions 6a and 15a, but may be provided at a position above the spherical portion 6a or below the spherical portion 15a. When the center point 8 is provided above the spherical portion 6a, the spherical portion 6a has a convex shape and the spherical portion 9a has a concave shape. Also, center point 8 is a spherical part
When provided below the position 15a, the spherical portion 15a has a concave shape and the spherical portion 20a has a convex shape.
［発明の効果］ 以上の説明から明らかなように、本発明によれば、ツ
ールの下面をボンドステージに接触させた状態で取付体
を介してツールホルダに荷重を加え、この状態で固定手
段によりツールホルダとを取付体とを固定させるのみで
ツールの平行出しが行えるので、その作業は容易で、か
つ短時間に行える。また圧着時にスベリが発生しないの
で、圧着不良が生じない。[Effects of the Invention] As is clear from the above description, according to the present invention, a load is applied to the tool holder via the attachment body in a state where the lower surface of the tool is in contact with the bond stage, and the fixing means is used in this state. Since the tool can be parallelized only by fixing the tool holder and the mounting body, the operation can be performed easily and in a short time. In addition, no slippage occurs during crimping, so that no crimping failure occurs.
【図面の簡単な説明】 第１図は本発明の一実施例を示す正面図、第２図は第１
図のＡ−Ａ線断面図、第３図は第２図のＢ−Ｂ線断面
図、第４図は第２図のＣ−Ｃ線断面図、第５図は分解斜
視説明図である。 5:取付体、6:受座、 6a:球面部、8:中心点、 9:回転支点座、9a:球面部、 10:ツールホルダ、14:ツール、 15:あおり用球座、15a:球面部、 20:球座用固定ホルダ、20a:球面部、 21:ツール固定ホルダ、22:ボンドステージ。BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a front view showing an embodiment of the present invention, and FIG.
FIG. 3 is a sectional view taken along line AA of FIG. 3, FIG. 3 is a sectional view taken along line BB of FIG. 2, FIG. 4 is a sectional view taken along line CC of FIG. 2, and FIG. 5: Attachment body, 6: Receiver, 6a: Spherical part, 8: Center point, 9: Rotating fulcrum seat, 9a: Spherical part, 10: Tool holder, 14: Tool, 15: Ball holder for tilting, 15a: Spherical Part, 20: Fixing holder for ball seat, 20a: Spherical part, 21: Tool fixing holder, 22: Bond stage.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭63−200541（ＪＰ，Ａ) 特開 平２−137241（ＪＰ，Ａ) 特開 平２−90544（ＪＰ，Ａ) 実開 平３−10539（ＪＰ，Ｕ) ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-63-200541 (JP, A) JP-A-2-137241 (JP, A) JP-A-2-90544 (JP, A) 10539 (JP, U)
Claims (2)
ツールホルダが取付けられボンダのツール保持部に固定
される取付体と、前記ツールホルダを前記取付体に首振
り可能に取付ける首振り手段と、前記ツールの下面をボ
ンドステージに接触させた状態で前記取付体を介して前
記ツールホルダに荷重を加えることにより、ツールがボ
ンドステージに接触した状態を保って前記ツールホルダ
と前記取付体とを固定させる固定手段とを備えたボン
ダ。1. A tool holder to which a tool is fixed, a mounting body to which the tool holder is mounted and which is fixed to a tool holder of a bonder, and a swing means for swingably mounting the tool holder to the mounting body. By applying a load to the tool holder via the mounting body in a state where the lower surface of the tool is in contact with the bond stage, the tool holder and the mounting body are maintained while the tool is in contact with the bond stage. And a fixing means for fixing.
前記取付体の一方を凸状の球面部とし、他方を前記凸状
の球面部に接触する凹状の球面部より構成してなること
を特徴とする請求項１記載のボンダ。2. The swinging means according to claim 1, wherein one of the tool holder and the mounting body is a convex spherical portion, and the other is a concave spherical portion which is in contact with the convex spherical portion. The bonder according to claim 1, wherein:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1165252A JP2736923B2 (en) | 1989-06-29 | 1989-06-29 | Bonda |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1165252A JP2736923B2 (en) | 1989-06-29 | 1989-06-29 | Bonda |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0332038A JPH0332038A (en) | 1991-02-12 |
| JP2736923B2 true JP2736923B2 (en) | 1998-04-08 |
Family
ID=15808779
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1165252A Expired - Fee Related JP2736923B2 (en) | 1989-06-29 | 1989-06-29 | Bonda |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2736923B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2864883B2 (en) * | 1992-07-24 | 1999-03-08 | 松下電器産業株式会社 | Bonding head device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3010539U (en) * | 1994-10-24 | 1995-05-02 | 写真電気工業株式会社 | Reflector for shooting lighting |
-
1989
- 1989-06-29 JP JP1165252A patent/JP2736923B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0332038A (en) | 1991-02-12 |
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