JP2593711B2 - Bonder tool holding mechanism - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a tool holding mechanism used for an inner lead bonder, an outer lead bonder, a bump transfer bonder, a pellet bonder, and the like.

[Related Art] A tool holding mechanism for a bonder includes a tool holder to which a tool is fixed, and an attachment body to which the tool holder is mounted and which is fixed to a tool holding portion of the bonder.

Incidentally, in the bonder, it is preferable that the entire lower surface of the tool uniformly hits the bonding surface of the sample.

As a conventional bonder tool holding mechanism, for example,
As disclosed in JP-A-63-169730 and JP-A-63-169731, there is known an apparatus provided with automatic copying means. In this structure, the tool holder and the mounting body are connected via a spring. Therefore, when the tool is pressed against the sample,
The spring bends and the lower surface of the tool follows the bonding surface of the sample.

[Problem to be Solved by the Invention] In the above-described conventional technology, a tool is press-bonded to a resilient sample lead via a spring. Due to the slip, the tool is crimped sideways without crimping the center of the lead, resulting in poor bonding accuracy and bondability, resulting in poor crimping.

An object of the present invention is to perform parallel alignment in a short time,
An object of the present invention is to provide a bonder tool holding mechanism capable of preventing poor crimping.

[Means for Solving the Problems] An object of the present invention is to provide a mounting plate fixed to a tool holding portion of a bonder, and a second rocking plate rotatably provided on the mounting plate and fixed to the mounting plate. A first rocker provided on the second rocker plate so as to be rotatable in a direction orthogonal to the rotation direction of the second rocker plate, fixed to the second rocker plate, and having a tool fixed thereto. Plate, X-direction adjusting means for rotating the first rocking plate,
Y-direction adjusting means for rotating the second rocking plate,
The first rocking plate and the second rocking plate are provided in a tool holding mechanism for a bonder that is rotatable around a tip portion of the tool, wherein the first rocking plate and the second rocking plate are One of the first projections is formed in an arc centered on the tip of the tool, and the other has a first groove in which the first projection is slidably fitted. One of the second swing plate and the mounting plate is formed in an arc, and a second one of an arc centered on the tip of the tool in a direction orthogonal to the rotation direction of the first swing plate is provided on one of the second swing plate and the mounting plate. A protrusion is formed,
The other is achieved by forming a second groove into which the second protrusion is slidably fitted in the same arc as the second protrusion.

[Operation] When the first rocking plate is rotated by the X-direction adjusting means, the first rocking plate to which the tool is fixed rotates around the tip of the tool. That is, since the tool rotates about the tip, the inclination of the lower surface of the tool in the X direction is corrected.

When the second rocking plate is rotated by the Y-direction adjusting means while the first rocking plate is fixed to the second rocking plate, the second rocking plate is rotated by the rotation of the first rocking plate. The tool rotates about the tip of the tool in a direction perpendicular to the direction. That is, since the first rocking plate is fixed to the second rocking plate and the tool is fixed to the first rocking plate, the inclination of the lower surface of the tool in the Y direction is corrected.

As described above, since only the X-direction and Y-direction adjustment means need be rotated, the adjustment can be performed quickly, in a short time, and with high accuracy. Further, since the tool is swung about the tip of the tool, the position of the tip of the tool does not change.

Example An example of the present invention will be described below with reference to the drawings. The tool 1 is pressed against the first rocking plate 2 by a tool receiving plate 3 and is fixed by screws 4. The first rocking plate 2 is fixed to the second rocking plate 5 with screws 6 from the front side, and the second rocking plate 5 is further fixed to the mounting plate 7 with screws 8 from the side. Here, the mounting plate 7 is fixed to a tool holder (not shown) of the bonder that is moved in the vertical direction.

On the back surface of the first rocking plate 2 (see FIG. 4), an arc-shaped projection 2a centered on the tip of the tool 1 is formed,
A groove 5a into which the protrusion 2a is slidably fitted is formed in the second swinging plate 5 (see FIG. 5) in the same arc as the protrusion 2a. The screw hole 2b of the first rocking plate 2 into which the screw 6 is inserted is also formed in a long groove of an arc centered on the tip of the tool 1.

A piece 10 is rotatably mounted on the first swinging plate 2, and a screw portion is formed on a side surface of the piece 10. An X-direction adjusting screw 11 is rotatably supported on the side plate portion 5b corresponding to the piece 10 on the second swinging plate 5, and the screw portion of the X-direction adjusting screw 11 is screwed to the threaded portion of the piece 10. The knob 12 is fixed to the outside of the X-direction adjusting screw 11. A spring 13 is applied to the first rocking plate 2 and the second rocking plate 5 so as to urge the first rocking plate 2 toward the knob 12.

On both side plate portions 5b and 5c of the second rocking plate 5, arc-shaped projections 5d and 5e centering on the tip of the tool 1 are formed,
Grooves 7c, 7d into which the projections 5d, 5e are slidably inserted are provided on the both side plate portions 7a, 7b of the mounting plate 7 (see FIG. 6).
It is formed of the same arc as d and 5e. The screw hole 7e of the mounting plate 7 into which the screw 8 is inserted is also formed in a long groove with an arc centered on the tip of the tool 1.

A piece 20 is rotatably mounted on the second rocking plate 5 (see FIG. 3), and a screw portion is formed on the front face of the piece 20. An angle 21 is fixed to the mounting plate 7 at a portion corresponding to the piece 20, and a Y-direction adjusting screw 22 is rotatably supported on the angle 21. The Y-direction adjusting screw 22 has a screw portion screwed into the piece 20 and a knob on the outer portion.
23 are fixed. A spring 24 is applied to the second swing plate 5 and the mounting plate 7 so as to bias the second swing plate 5 toward the knob 23.

Next, the operation will be described. Loosen screw 6 and turn knob 12
Is rotated, the protrusion 2a of the first rocking plate 2 slides along the groove 5a of the second rocking plate 5 in the direction of arrow A about the lower end of the tool 1 via the piece 10, The inclination of the lower surface of the tool 1 in the X direction can be corrected. After correcting the inclination in the X direction, the first rocking plate 2 is fixed to the second rocking plate 5 by tightening the screw 6.

When the screw 8 is loosened and the knob 23 is turned, the protrusions 5e and 5f of the second swinging plate 5 are moved through the pieces 20 to the grooves 7c and 7d of the mounting plate 7.
Therefore, the inclination of the lower surface of the tool 1 in the Y direction can be corrected. After correcting the inclination in the Y direction, the screw 8
To fix the second swinging plate 5 to the mounting plate 7.

When the first rocking plate 2 is rotated by the X-direction adjusting screw 11 in this manner, the first rocking plate 2 to which the tool 1 is fixed rotates around the tip of the tool 1. That is, since the tool 1 rotates around the tip, the inclination of the lower surface of the tool 1 in the X direction is corrected.

In a state where the first rocking plate 2 is fixed to the second rocking plate 5,
When the second swing plate 5 is rotated by the Y-direction adjusting screw 22,
The oscillating plate 5 rotates around the tip of the tool 1 in a direction perpendicular to the direction of rotation of the first oscillating plate. That is, the second
The first oscillating plate 2 is fixed to the oscillating plate 5 and the tool 1 is fixed to the first oscillating plate 2.
The directional tilt is corrected.

Thus, since only the X and Y direction adjustment screws 11 and 22 need to be rotated, the adjustment can be performed quickly, in a short time, and with high accuracy. In addition, since the tool 1 is swung about the tip of the tool 1, the position of the tool tip does not change.

In the above embodiment, the first rocking plate 2 has the protrusion 2a.
And the groove 5a is provided on the second rocking plate 5. However, since this is a male-female relationship, the groove 5a is provided on the first rocking plate 2,
The swing plate 5 may be provided with a projection 2a. Similarly, the second swing plate 5 may be provided with grooves 7c and 7d, and the mounting plate 7 may be provided with protrusions 5d and 5e.

[Effects of the Invention] As is clear from the above description, according to the present invention, X
Since it is only necessary to rotate the direction and Y direction adjusting means,
Tool inclination can be adjusted quickly, quickly and with high precision. In addition, since the tool is swung about the tip of the tool, the position of the tip of the tool does not change.

[Brief description of the drawings]

FIG. 1 is a front view showing an embodiment of the present invention, and FIG.
FIG. 3 is a cross-sectional view taken along line CC of FIG. 1, FIG.
The figure shows a first swing plate to which a tool is fixed, (a) is a front view, (b) is a side view, and FIG. 5 shows a second swing plate.
(A) is a front view, (b) is a right side view, (c) is a left side view, FIG. 6 shows a mounting plate, (a) is a front view, (b) is a right side view, (c) Is a left side view. 1: tool, 2: first rocking plate, 2a: protrusion, 5: second rocking plate, 5a:
Groove, 5d, 5e: protrusion, 7: mounting plate, 7c, 7d: groove, 11: X direction adjustment screw, 22: Y direction adjustment screw.

Continued on the front page (72) Inventor Michio Okamoto 5-20-1, Josuihonmachi, Kodaira-shi, Tokyo Inside Musashi Factory, Hitachi, Ltd. (72) Inventor Masaki Nakanishi 5-2-1, Josuihoncho, Kodaira-shi, Tokyo No. 56 Inside the Musashi Plant of Hitachi, Ltd. (56) References JP-A-3-32037 (JP, A) JP-A-3-32038 (JP, A) JP-A-3-32039 (JP, A) JP-A-63 -200541 (JP, A) JP-A-63-196048 (JP, A) JP-A-63-177433 (JP, A) JP-A-2-137241 (JP, A)

Claims (1)

(57) [Claims] An attachment plate fixed to a tool holding portion of a bonder, a second swing plate rotatably provided on the attachment plate and fixed to the attachment plate, and a second swing plate fixed to the attachment plate. The second swinging plate is rotatably provided in a direction orthogonal to a rotating direction of the second swinging plate.
A first rocking plate fixed to the rocking plate and having a tool fixed thereto, an X-direction adjusting means for rotating the first rocking plate, and a Y-direction adjusting means for rotating the second rocking plate Wherein the first rocking plate and the second rocking plate are provided so as to be rotatable around a tip of the tool. One of the rocking plates is formed with a first protrusion having an arc centered on the tip of the tool, and the other is provided with a first groove into which the first protrusion is slidably fitted. It is formed in the same arc as the projection, and one of the second rocking plate and the mounting plate is centered on the tip of the tool in a direction orthogonal to the rotation direction of the first rocking plate. A second protrusion of an arc is formed,
A bonder tool holding mechanism, wherein a second groove into which the second protrusion is slidably fitted is formed in the same arc as the second protrusion.