JP2718775B2 - Metal raw material supply device - Google Patents
Metal raw material supply deviceInfo
- Publication number
- JP2718775B2 JP2718775B2 JP1225618A JP22561889A JP2718775B2 JP 2718775 B2 JP2718775 B2 JP 2718775B2 JP 1225618 A JP1225618 A JP 1225618A JP 22561889 A JP22561889 A JP 22561889A JP 2718775 B2 JP2718775 B2 JP 2718775B2
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- crucible
- metal raw
- metal
- solid metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Manufacture And Refinement Of Metals (AREA)
Description
【発明の詳細な説明】 ［発明の目的］ （産業上の利用分野） 本発明は金属の真空溶解や蒸着に用いられる蒸発装置
のるつぼ内にペレット状の固体金属原料を供給する金属
原料供給装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial application field) The present invention relates to a metal raw material supply apparatus for supplying a solid metal raw material in a pellet form into a crucible of an evaporator used for vacuum melting and vapor deposition of metal. About.
（従来の技術） 金属の真空溶解や蒸着等で用いられる蒸発装置として
は、金属原料を収容するるつぼを真空雰囲気中に設置
し、例えば電子銃により加速された電子ビームを直流磁
場により偏向して金属原料に衝突させることにより、そ
のときのエネルギを加熱源として金属原料を溶解し、蒸
発させるようにしたものが知られている。(Prior Art) As an evaporator used for vacuum melting or vapor deposition of metal, a crucible containing a metal material is installed in a vacuum atmosphere, and an electron beam accelerated by an electron gun is deflected by a DC magnetic field, for example. It is known that the metal material is melted and evaporated by using the energy at that time as a heating source by colliding with the metal material.
ところで、かかる蒸発装置において、金属原料を溶解
し、蒸発が進行するにつれてるつぼ内の金属原料は徐々
に減少するため、金属原料の減量に対しては新たに固体
金属原料を供給する必要がある。By the way, in such an evaporator, the metal raw material is dissolved, and the metal raw material in the crucible gradually decreases as the evaporation progresses. Therefore, it is necessary to supply a new solid metal raw material for the reduction of the metal raw material.
従来、固体金属原料をるつぼ内に供給する場合、初期
装荷した金属原料が蒸発しきるまで蒸発装置を稼働し、
金属原料が蒸発しきると蒸発装置の運転を停止して新規
に固体金属原料をるつぼ内に再装荷するようにしてい
た。Conventionally, when supplying a solid metal raw material into a crucible, an evaporator is operated until the initially loaded metal raw material is completely evaporated,
When the metal raw material has completely evaporated, the operation of the evaporator is stopped, and a new solid metal raw material is reloaded into the crucible.
（発明が解決しようとする課題） しかし、このような固体金属原料の供給方式では、金
属原料の装荷から金属原料が蒸発しきるまでの時間しか
蒸発装置を運転することができないため、稼働効率が悪
いという問題があった。(Problems to be Solved by the Invention) However, in such a method of supplying a solid metal raw material, the operation efficiency is poor because the evaporator can be operated only for a period of time from the loading of the metal raw material to the complete evaporation of the metal raw material. There was a problem.
本発明はるつぼ内の金属原料の蒸発に伴う減量に対
し、蒸発装置を運転した状態でペレット状の固体金属原
料を順次供給することができ、もって蒸発装置の稼働効
率を向上させることができる金属原料供給装置を提供す
ることを目的とする。The present invention is capable of sequentially supplying a solid metal raw material in the form of pellets in a state where an evaporator is operated with respect to the weight loss due to the evaporation of the metal raw material in a crucible, thereby improving the operating efficiency of the evaporator. An object is to provide a raw material supply device.
［発明の構成］ （課題を解決するための手段） 本発明は上記目的を達成するため、るつぼ内に収容さ
れた金属原料を溶融もしくは蒸発せしめる蒸発装置内に
設置され、前記るつぼ内の溶融金属が蒸発により減少す
るとペレット形状の固体金属原料を供給する金属原料供
給機構を備え、この金属原料供給機構は複数個のペレッ
ト状固体金属原料を収納したケースと、このケースより
前記るつぼへ前記固体金属原料を一個毎に順次把持して
回転落下させながら送出する金属原料送出機構と、この
金属原料送出機構より回転落下して送出される前記固体
金属原料を前記るつぼへガイドするガイド用樋とから構
成したものである。[Constitution of the invention] (Means for solving the problems) In order to achieve the above object, the present invention is provided in an evaporator for melting or evaporating a metal raw material contained in a crucible, and the molten metal in the crucible is provided. A metal material supply mechanism for supplying a solid metal material in the form of pellets when the solid metal material is reduced by evaporation. The metal material supply mechanism comprises a case containing a plurality of pellet-shaped solid metal materials, It comprises a metal raw material delivery mechanism that sequentially grips and feeds the raw materials one by one while rotating and dropping them, and a gutter for guiding the solid metal raw material that is rotated down from the metal raw material delivery mechanism and delivered to the crucible. It was done.
（作 用） 従って、このような金属原料供給装置にあっては、る
つぼ内の溶融金属が蒸発により減少すると金属原料送出
機構を作動させるだけでペレット状の固体金属原料が蒸
発装置を運転した状態で順次るつぼ内に供給できるの
で、蒸発装置の運転時間が金属原料の装荷ために制約さ
れることがなくなり、稼働効率を向上させることが可能
となる。(Operation) Therefore, in such a metal raw material supply device, when the molten metal in the crucible is reduced by evaporation, the pellet-shaped solid metal raw material is operated only by operating the metal raw material delivery mechanism. Can be sequentially supplied into the crucible, so that the operation time of the evaporator is not restricted by loading of the metal raw material, and the operation efficiency can be improved.
（実施例） 以下本発明の一実施例を図面を参照して説明する。Embodiment An embodiment of the present invention will be described below with reference to the drawings.
第１図および第２図は本発明による金属原料供給装置
の構成例を示す側面図および正面図である。第１図およ
び第２図において、１は金属原料２が収容されるるつぼ
で、このるつぼ１は図示しない電子銃から発射される電
子ビームを金属原料２に衝突させ、そのとき得られる熱
エネルギにより加熱して金属原料２を溶融し、金属蒸気
を発生させるものである。また、３はるつぼ１内の金属
原料２が蒸発等により減少すると、その減量分に相当す
るペレット状の固体金属原料４を供給する原料供給機構
である。この原料供給機構３は架台５上に支持されたケ
ース６内に複数個のペレット状固体金属原料４が順次送
出されるように蛇行配列して収納され、原料送出口近傍
に設けられた原料送出機構７より固体金属原料４が原料
送出口に取付けられたガイド用樋８を通してるつぼ１内
に供給できるように構成されている。1 and 2 are a side view and a front view showing a configuration example of a metal raw material supply device according to the present invention. In FIGS. 1 and 2, reference numeral 1 denotes a crucible in which a metal raw material 2 is accommodated. The crucible 1 collides an electron beam emitted from an electron gun (not shown) with the metal raw material 2, and uses thermal energy obtained at that time. This is to heat and melt the metal raw material 2 to generate metal vapor. Reference numeral 3 denotes a raw material supply mechanism that supplies a solid metal raw material 4 in the form of a pellet when the metal raw material 2 in the crucible 1 decreases due to evaporation or the like. The raw material supply mechanism 3 is housed in a case 6 supported on a gantry 5 in a meandering arrangement so that a plurality of pellet-like solid metal raw materials 4 are sequentially delivered, and a raw material delivery mechanism provided near a raw material delivery port is provided. The structure is such that the solid metal raw material 4 can be supplied from the mechanism 7 into the crucible 1 through the guide gutter 8 attached to the raw material sending port.
この場合、ガイド用樋８は固体金属原料４を回転落下
しながらるつぼ１内の溶融金属面2a中に供給されるよう
にするため、その勾配αを５度から45度の範囲で傾斜さ
せて配設される。In this case, in order to supply the solid metal raw material 4 to the molten metal surface 2a in the crucible 1 while rotating and dropping the solid metal raw material 4, the inclination α is inclined in a range of 5 degrees to 45 degrees. Will be arranged.
また、原料送出機構７は回転体９の一部に１個のペレ
ット状固体金属原料４を把持する切欠溝9aが設けられ、
この回転体９をシャフト10を介して接続された回転駆動
機構11により回転可能になっている。Further, the raw material delivery mechanism 7 is provided with a cutout groove 9a for gripping one pellet-shaped solid metal raw material 4 in a part of the rotating body 9,
The rotating body 9 is rotatable by a rotation drive mechanism 11 connected via a shaft 10.
このような構成の金属原料供給装置において、るつぼ
１内の金属原料２が電子ビームの照射により溶解もしく
は蒸発すると、徐々に金属原料２が減少してくる。そこ
で、この金属原料２が所定量減少するごとに回転駆動機
構11によりシャフト10を介して回転体９を図示矢印方向
に１回転させると、この回転体９の切欠溝9aに把持され
たペレット状固体金属原料４が原料送出口からガイド用
樋８を回転しながら落下し、るつぼ１内の溶融金属面2a
中に供給される。In the metal material supply device having such a configuration, when the metal material 2 in the crucible 1 is dissolved or evaporated by the irradiation of the electron beam, the metal material 2 gradually decreases. Therefore, every time the metal raw material 2 is reduced by a predetermined amount, the rotating body 9 is rotated once by the rotation driving mechanism 11 via the shaft 10 in the direction of the arrow shown in FIG. The solid metal material 4 falls from the material feed port while rotating the guide gutter 8, and the molten metal surface 2 a in the crucible 1 is formed.
Supplied inside.
このように本実施例においては、ケース６内に収納さ
れた複数個のペレット状固体金属原料４を原料送出口近
傍に設けられた原料送出機構７を作動させる毎に順次ガ
イド用樋８を通して回転落下させ、るつぼ１内に供給す
るようにしたので、金属原料の蒸発に伴う減量に対し、
蒸発装置を稼働した状態でペレット状固体金属原料を供
給することができる。従って、従来のように金属原料が
蒸発しきると蒸発装置の運転を停止して新規に固体金属
原料をるつぼ内に再装荷する場合に比べて大幅に稼働効
率を向上させることができる。しかも、原料供給機構３
としては回転体９を回転駆動機構11で回転させるだけで
ペレット状固体金属原料４を順次るつぼ１内に供給でき
るので、その構造も非常に簡単で、かつ安価なものとな
し得る。As described above, in this embodiment, the plurality of pellet-shaped solid metal raw materials 4 housed in the case 6 are sequentially rotated through the guide gutter 8 each time the raw material delivery mechanism 7 provided near the raw material delivery port is operated. Since it was dropped and supplied into the crucible 1, the weight loss due to evaporation of the metal raw material was reduced.
The pellet-shaped solid metal raw material can be supplied while the evaporator is operated. Therefore, the operation efficiency can be greatly improved as compared with the conventional case where the operation of the evaporator is stopped and the solid metal material is newly reloaded into the crucible when the metal material is completely evaporated. Moreover, the raw material supply mechanism 3
By simply rotating the rotating body 9 by the rotation drive mechanism 11, the pellet-shaped solid metal raw materials 4 can be sequentially supplied into the crucible 1, so that the structure can be made very simple and inexpensive.
［発明の効果］ 以上のべたように本発明によれば、るつぼ内の金属原
料の蒸発に伴う減量に対し、蒸発装置を運転した状態で
ペレット状固体金属原料を回転落下させながら順次供給
することができ、もって蒸発装置の稼働効率を向上させ
ることができる金属原料供給装置を提供できる。[Effects of the Invention] As described above, according to the present invention, a pellet-shaped solid metal raw material is sequentially supplied while rotating and falling while operating an evaporator, with respect to the weight loss due to the evaporation of the metal raw material in the crucible. Thus, it is possible to provide a metal raw material supply device capable of improving the operation efficiency of the evaporator.
第１図および第２図は本発明による金属原料供給装置の
一実施例をそれぞれ示す側面図および正面図である。 １……るつぼ、２……金属原料、2a……溶融金属面、３
……原料供給機構、４……ペレット状固体金属原料、５
……架台、６……ケース、７……原料送出機構、８……
ガイド用樋、９……回転体、10……シャフト、11……回
転駆動機構。1 and 2 are a side view and a front view, respectively, showing an embodiment of a metal raw material supply device according to the present invention. 1 ... crucible, 2 ... metal raw material, 2a ... molten metal surface, 3
... Raw material supply mechanism, 4... Pelleted solid metal raw material, 5
... Stand, 6 ... Case, 7 ... Feeding mechanism, 8 ...
Guide gutter, 9: rotating body, 10: shaft, 11: rotary drive mechanism.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭63−76863（ＪＰ，Ａ) 実開 昭62−55556（ＪＰ，Ｕ) 実開 昭63−30348（ＪＰ，Ｕ) 特公 昭36−14465（ＪＰ，Ｂ１) 特公 昭60−30739（ＪＰ，Ｂ２) ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-63-76863 (JP, A) JP-A 62-55556 (JP, U) JP-A 63-30348 (JP, U) 14465 (JP, B1) JP-B-60-30739 (JP, B2)
Claims (1)
くは蒸発せしめる蒸発装置内に設置され、前記るつぼ内
の溶融金属が蒸発により減少するとペレット形状の固体
金属原料を供給する金属原料供給機構を備え、この金属
原料供給機構は複数個のペレット状固体金属原料を収納
したケースと、このケースより前記るつぼへ前記固体金
属原料を一個毎に順次把持して回転落下させながら送出
する金属原料送出機構と、この金属原料送出機構より回
転落下して送出される前記固体金属原料を前記るつぼへ
ガイドするガイド用樋とから構成したことを特徴とする
金属原料供給装置。1. A metal material supply mechanism installed in an evaporator for melting or evaporating a metal material contained in a crucible, and supplying a pellet-shaped solid metal material when the molten metal in the crucible is reduced by evaporation. The metal material supply mechanism includes a case containing a plurality of pellet-shaped solid metal materials, and a metal material delivery mechanism for sequentially gripping the solid metal materials one by one from the case to the crucible and sending the solid metal materials while rotating and falling. And a guide gutter for guiding the solid metal material, which is rotated and dropped from the metal material delivery mechanism and delivered to the crucible, to the crucible.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1225618A JP2718775B2 (en) | 1989-08-31 | 1989-08-31 | Metal raw material supply device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1225618A JP2718775B2 (en) | 1989-08-31 | 1989-08-31 | Metal raw material supply device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0390565A JPH0390565A (en) | 1991-04-16 |
| JP2718775B2 true JP2718775B2 (en) | 1998-02-25 |
Family
ID=16832140
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1225618A Expired - Lifetime JP2718775B2 (en) | 1989-08-31 | 1989-08-31 | Metal raw material supply device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2718775B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10184169B2 (en) | 2012-10-19 | 2019-01-22 | Mitsubishi Heavy Industries, Ltd. | Method for supplying deposition material, method for producing substrate, control device and deposition device |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6030739A (en) * | 1983-07-30 | 1985-02-16 | 松下電工株式会社 | Cleaning mechanism of puvic washing apparatus |
| JPS6255556U (en) * | 1985-09-27 | 1987-04-06 | ||
| JPS6330348U (en) * | 1986-08-08 | 1988-02-27 | ||
| JPS6376863A (en) * | 1986-09-18 | 1988-04-07 | Ishikawajima Harima Heavy Ind Co Ltd | Pellet supplying device |
-
1989
- 1989-08-31 JP JP1225618A patent/JP2718775B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10184169B2 (en) | 2012-10-19 | 2019-01-22 | Mitsubishi Heavy Industries, Ltd. | Method for supplying deposition material, method for producing substrate, control device and deposition device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0390565A (en) | 1991-04-16 |
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