JPS6330348U - - Google Patents
Info
- Publication number
- JPS6330348U JPS6330348U JP12199286U JP12199286U JPS6330348U JP S6330348 U JPS6330348 U JP S6330348U JP 12199286 U JP12199286 U JP 12199286U JP 12199286 U JP12199286 U JP 12199286U JP S6330348 U JPS6330348 U JP S6330348U
- Authority
- JP
- Japan
- Prior art keywords
- plate
- evaporation material
- crucible
- discharge port
- shaped evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001704 evaporation Methods 0.000 claims description 10
- 230000008020 evaporation Effects 0.000 claims description 9
- 241000276425 Xiphophorus maculatus Species 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図および第２図はこの考案の板状蒸発材料
供給装置の一実施例にかかり、第１図は縦断面図
、第２図は排出バー部分の平面図である。
１……密閉容器、２……るつぼ、１０……板状
蒸発材料供給装置、１１……板状蒸発材、１２…
…収納ガイド、１６……排出バー、１９……装入
シユート。
FIGS. 1 and 2 show an embodiment of the plate-shaped evaporation material supplying device of this invention, with FIG. 1 being a longitudinal sectional view and FIG. 2 being a plan view of the discharge bar portion. DESCRIPTION OF SYMBOLS 1... Airtight container, 2... Crucible, 10... Plate-shaped evaporation material supply device, 11... Plate-shaped evaporation material, 12...
...Storage guide, 16...Ejection bar, 19...Charging chute.
Claims (1)
蒸発材を積層状態で収納するとともに下端側部に
板状蒸発材の排出口が形成された収納ガイドを設
け、この排出口の背部に貫通させて板状蒸発材を
押し出す往復可能な排出バーを設け、この排出口
の前方とるつぼとの間に押し出された板状蒸発材
をるつぼに装入供給する装入シユートを設けたこ
とを特徴とする板状蒸発材料供給装置。 Platy evaporation materials are stored in a stacked state above a crucible for heating and evaporating evaporation materials, and a storage guide is provided in which a discharge port for the plate-shaped evaporation material is formed at the lower end side, and a storage guide is provided that is passed through the back of this discharge port. A reciprocating discharge bar for pushing out the plate-shaped evaporation material is provided, and a charging chute is provided between the front of the discharge port and the crucible for charging and supplying the extruded plate-shaped evaporation material into the crucible. Plate-shaped evaporation material supply device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12199286U JPS6330348U (en) | 1986-08-08 | 1986-08-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12199286U JPS6330348U (en) | 1986-08-08 | 1986-08-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6330348U true JPS6330348U (en) | 1988-02-27 |
Family
ID=31011774
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12199286U Pending JPS6330348U (en) | 1986-08-08 | 1986-08-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6330348U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0390565A (en) * | 1989-08-31 | 1991-04-16 | Laser Noushiyuku Gijutsu Kenkyu Kumiai | Metallic raw material supplying device |
-
1986
- 1986-08-08 JP JP12199286U patent/JPS6330348U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0390565A (en) * | 1989-08-31 | 1991-04-16 | Laser Noushiyuku Gijutsu Kenkyu Kumiai | Metallic raw material supplying device |