JP2715615B2 - Magnetic bearing control device - Google Patents

Magnetic bearing control device

Info

Publication number
JP2715615B2
JP2715615B2 JP2750590A JP2750590A JP2715615B2 JP 2715615 B2 JP2715615 B2 JP 2715615B2 JP 2750590 A JP2750590 A JP 2750590A JP 2750590 A JP2750590 A JP 2750590A JP 2715615 B2 JP2715615 B2 JP 2715615B2
Authority
JP
Japan
Prior art keywords
detection sensor
error signal
axis
sensor
magnetic bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2750590A
Other languages
Japanese (ja)
Other versions
JPH03231316A (en
Inventor
正和 中島
享 中川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP2750590A priority Critical patent/JP2715615B2/en
Publication of JPH03231316A publication Critical patent/JPH03231316A/en
Application granted granted Critical
Publication of JP2715615B2 publication Critical patent/JP2715615B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、5自由度制制御型磁気軸受の制御装置に関
するものである。
Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a control device for a five-degree-of-freedom control type magnetic bearing.

従来の技術 近年、5自由度制御型磁気軸受を用いて数万rpmある
いはそれ以上の高速回転を行わせる工作機械主軸が実用
化されている。これらの主軸に使用される5自由度制御
型磁気軸受は、2個のラジアル磁気軸受と1個のスラス
ト磁気軸受により構成される。第7図に示すようにラジ
アル磁気軸受は、一般に、主軸1の軸線に直角なXY平面
のX軸用およびY軸用の2組みの電磁石2a,2b,3a,3bと
X軸位置センサおよびY軸位置センサ4Cとからなる。こ
れらの各位置センサ4a,4b,4cでX軸方向およびY軸方向
における主軸の変位を検出し、一定の位置指令信号との
偏差を増幅し、信号処理を行った後電力増幅することに
よりX軸用およびY軸用電磁石の電磁力を制御するよう
になっている。スラスト磁気軸受は、主軸の軸線をZ軸
とすると、Z軸用の2個の電磁石2c,3cとZ軸位置セン
サとからなる。位置センサでZ軸方向における主軸の変
位を検出し、一定の位置指令信号との偏差を増幅し、信
号処理をした後電力増幅することによりZ軸用電磁石の
電磁力を制御するようになっている。
2. Description of the Related Art In recent years, a machine tool spindle that uses a 5-degree-of-freedom control type magnetic bearing to rotate at a high speed of tens of thousands of rpm or more has been put to practical use. The five-degree-of-freedom control type magnetic bearing used for these spindles is composed of two radial magnetic bearings and one thrust magnetic bearing. As shown in FIG. 7, the radial magnetic bearing generally comprises two sets of electromagnets 2a, 2b, 3a, 3b for the X-axis and the Y-axis in the XY plane perpendicular to the axis of the main shaft 1, an X-axis position sensor, and a Y-axis. It comprises an axis position sensor 4C. These position sensors 4a, 4b, 4c detect the displacement of the main shaft in the X-axis direction and the Y-axis direction, amplify a deviation from a fixed position command signal, perform signal processing, and then amplify the power. The electromagnetic force of the shaft and Y-axis electromagnets is controlled. The thrust magnetic bearing includes two Z-axis electromagnets 2c and 3c and a Z-axis position sensor, where the axis of the main shaft is the Z-axis. The position sensor detects the displacement of the main shaft in the Z-axis direction, amplifies the deviation from a fixed position command signal, performs signal processing, and then amplifies power to control the electromagnetic force of the Z-axis electromagnet. I have.

発明が解決しようとする課題 上記のような5自由度制御型磁気軸受においては、主
軸の位置決め精度は、位置検出センサの精度及び分解能
の良さにかかってくる。高い加工精度を要求される工作
機械主軸においてはこの問題は重要であり、高精度な位
置決めを行うにはそれに見合う高精度・高分解能なセン
サが必要となる。磁気軸受の位置検出センサとしては、
軸の可動範囲をカバーする広い測定レンジのセンサが必
要であるが、一般に測定レンジの広いセンサほど分解能
が低く、高精度な位置決めが困難になるという課題を有
していた。
Problems to be Solved by the Invention In the five-degree-of-freedom control type magnetic bearing as described above, the positioning accuracy of the main shaft depends on the accuracy and resolution of the position detection sensor. This problem is important in a machine tool spindle that requires high machining accuracy, and high-precision positioning requires a high-precision and high-resolution sensor corresponding to the problem. As a position detection sensor for magnetic bearings,
Although a sensor with a wide measurement range that covers the movable range of the shaft is required, a sensor with a wider measurement range generally has a problem that the resolution is lower and high-precision positioning becomes difficult.

そこで本発明は、上記のような課題を解決するための
磁気軸受の制御装置を提供するものである。
Therefore, the present invention provides a magnetic bearing control device for solving the above-described problems.

課題を解決するための手段 磁気軸受の制御装置において、2種類の疑似的な位置
誤差信号を生成し、軸位置が位置検出センサに対して目
標位置よりも近いか遠いかを判断してどちらか一方の信
号を出力する疑似誤差信号発生器を設け、軸位置が位置
検出センサの測定範囲外にあるときには位置誤差信号と
して前記疑似誤差信号発生器の出力を用い、軸位置が位
置検出センサの測定範囲内にあるときには位置誤差信号
として位置指令信号と位置検出センサの信号の差分を用
いることにより位置検出センサの測定範囲内で位置決め
を行うように構成したものである。
Means for Solving the Problems In a magnetic bearing control device, two types of pseudo position error signals are generated, and it is determined whether the shaft position is closer or farther than a target position with respect to a position detection sensor. A pseudo error signal generator for outputting one signal is provided, and when the axis position is out of the measurement range of the position detection sensor, the output of the pseudo error signal generator is used as a position error signal, and the axis position is measured by the position detection sensor. When the position is within the range, positioning is performed within the measurement range of the position detection sensor by using the difference between the position command signal and the signal of the position detection sensor as the position error signal.

作用 本発明によれば、軸位置が位置検出センサの測定範囲
外にあるとき、疑似誤差信号発生器は、軸位置が位置検
出センサに対して目標位置よりも近いか遠いかを判断し
て2種類の疑似誤差信号のどちらか一方を出力する。軸
位置が位置検出センサの測定範囲外にあるので、この疑
似誤差信号発生器の出力が位置誤差信号となり、軸は目
標位置の方向へ移動する。軸位置が位置検出センサの測
定範囲内にはいれば、位置誤差信号は位置指令信号とセ
ンサ信号の差分に切り換えられるので、通常の位置制御
が行われる。従って軸受の可動範囲全体をカバーするよ
うな広い測定レンジの位置検出センサは必要無く、必要
最小限の測定レンジを持った高分解能なセンサを用いる
ことができる。
According to the present invention, when the axis position is out of the measurement range of the position detection sensor, the pseudo error signal generator determines whether the axis position is closer or farther than the target position with respect to the position detection sensor. Either type of pseudo error signal is output. Since the axis position is outside the measurement range of the position detection sensor, the output of the pseudo error signal generator becomes a position error signal, and the axis moves in the direction of the target position. If the axis position is within the measurement range of the position detection sensor, the position error signal is switched to the difference between the position command signal and the sensor signal, so that normal position control is performed. Therefore, there is no need for a position detection sensor having a wide measurement range that covers the entire movable range of the bearing, and a high-resolution sensor having a minimum necessary measurement range can be used.

実 施 例 本発明の実施例について以下図面を参照しながら説明
する。
Embodiments Embodiments of the present invention will be described below with reference to the drawings.

題1図は本発明の実施例における5自由度制御型磁気
軸受の制御装置である。1は主軸、2a,2b,3a,3bはラジ
アル磁気軸受用電磁石、2c,3cはスラスト磁気軸受用電
磁石、4a,4b,4cは位置センサ、5は電力増幅回路、6は
信号処理回路、7は比較器、8はウィンドウコンパレー
タで、位置検出センサの出力VがVn<V<Vfの範囲にあ
るかどうかを判別する信号を出力する。9は切り換えス
イッチで、ウィンドウコンパレータ8の出力によりa−
c間またはb−c間のどちらかが導通状態となる。10は
疑似誤差信号発生器で、第2図に示すような構成を有す
る。Aは位置検出センサの出力、Bはウィンドウコンパ
レータ8の出力である。疑似誤差信号発生器では、CR回
路の充放電により第3図,第4図のような2種類の信号
が生成され、位置センサの出力値を11のコンパレータで
判別することによりどちらか一方が出力される。第5図
は位置検出センサ21,22と軸15の位置関係を示す図、第
6図は位置検出センサの出力と軸位置の関係を表すグラ
フである。軸位置が位置検出センサの測定範囲外にある
場合で、位置検出センサに対して目標位置よりも離れて
いるとき(X>Xf)には、9の切り換えスイッチはb−
c間が導通し似誤差信号発生器側がONとなる。疑似誤差
信号発生器においては、12,13の切り換えスイッチはそ
れぞれe−f間、h−i間が導通し第3図,第4図のよ
うな信号が生成される。14の切り換えスイッチはj−l
間が導通するので結局第3図のような疑似誤差信号が出
力され、軸はxが小さくなる方向へ移動する。逆に軸位
置が目標位置よりも近いとき(x<xn)には14の切り換
えスイッチはk−l間が導通するので第4図のような疑
似誤差信号が出力され、軸はxが大きくなるような方向
へ移動する。軸が移動してセンサの測定範囲(xn<x<
xf)に入れば9の切り換えスイッチはa−c間が導通し
て通常の磁気軸受の制御が行われる。
FIG. 1 shows a control device for a five-degree-of-freedom control type magnetic bearing according to an embodiment of the present invention. 1 is a main shaft, 2a, 2b, 3a, 3b are electromagnets for radial magnetic bearings, 2c, 3c are electromagnets for thrust magnetic bearings, 4a, 4b, 4c are position sensors, 5 is a power amplifier circuit, 6 is a signal processing circuit, 7 the comparator 8 is at the window comparator outputs a signal output V of the position detection sensor to determine whether the range of V n <V <V f. Reference numeral 9 denotes a changeover switch.
Either between c or between bc is in a conductive state. Reference numeral 10 denotes a pseudo error signal generator having a configuration as shown in FIG. A is the output of the position detection sensor, and B is the output of the window comparator 8. In the pseudo error signal generator, two types of signals as shown in FIGS. 3 and 4 are generated by charging and discharging of the CR circuit, and one of the outputs is determined by determining the output value of the position sensor by the 11 comparators. Is done. FIG. 5 is a diagram showing the positional relationship between the position detection sensors 21 and 22 and the shaft 15, and FIG. 6 is a graph showing the relationship between the output of the position detection sensor and the shaft position. When the axis position is out of the measurement range of the position detection sensor and the position detection sensor is farther from the target position than the target position (X> Xf ), the changeover switch 9 is set to b−
c and the similar error signal generator side is turned ON. In the pseudo error signal generator, the changeover switches 12 and 13 conduct between ef and hi, respectively, so that signals as shown in FIGS. 3 and 4 are generated. 14 changeover switches are j-l
As a result, the pseudo error signal shown in FIG. 3 is output, and the axis moves in the direction in which x becomes smaller. Conversely, when the shaft position is closer to the target position (x < xn ), the 14 changeover switches conduct between k and l, so that a pseudo error signal is output as shown in FIG. Move in such a direction. The axis moves and the measurement range of the sensor (x n <x <
If xf ) is entered, the changeover switch 9 conducts between a and c, and the normal control of the magnetic bearing is performed.

発明の効果 本発明によれば、疑似誤差信号発生器の出力と位置指
令信号とセンサで検出された位置信号の差分をとってつ
くられる位置誤差信号が軸位置に応じて切り換えられる
ので、必要最小限の測定レンジを持った高制度・高分解
能なセンサを用いることができる。その結果、軸の位置
決め精度を向上させることができる。
According to the present invention, since the position error signal generated by taking the difference between the output of the pseudo error signal generator, the position command signal, and the position signal detected by the sensor is switched according to the shaft position, the necessary minimum High precision and high resolution sensors with a limited measurement range can be used. As a result, the positioning accuracy of the shaft can be improved.

【図面の簡単な説明】[Brief description of the drawings]

第1図は本発明の実施例における5自由度制御型磁気軸
受の制御装置の構成図、第2図は疑似誤差信号発生器の
構成図、第3図,第4図は疑似誤差信号特性図、第5図
は位置検出センサと軸の位置関係を表す図、第6図は位
置検出センサの出力と軸位置の関係を表す図、第7図は
従来の5自由度制御型磁気軸受の制御装置の構成図であ
る。 1……主軸、2a,2b,3a,3b……ラジアル磁気軸受用電磁
石、2c,3c……・イラスト磁気軸受用電磁石、4a,4b,4c
……位置センサ、5……電力増幅回路、6……信号処理
回路、7……比較器、8……ウィンドウコンパレータ、
9,12,13,14……切り換えスイッチ、10……疑似誤差信号
発生器、11……コンパレータ。
FIG. 1 is a block diagram of a control device for a five-degree-of-freedom control type magnetic bearing in an embodiment of the present invention, FIG. 2 is a block diagram of a pseudo error signal generator, and FIGS. 3 and 4 are pseudo error signal characteristic diagrams. FIG. 5 is a diagram showing a positional relationship between the position detection sensor and the shaft, FIG. 6 is a diagram showing a relationship between the output of the position detection sensor and the shaft position, and FIG. 7 is a control of a conventional five-degree-of-freedom control type magnetic bearing. It is a block diagram of an apparatus. 1 ... Spindle, 2a, 2b, 3a, 3b ... Electromagnet for radial magnetic bearing, 2c, 3c ... Illustration electromagnet for magnetic bearing, 4a, 4b, 4c
... Position sensor, 5 ... Power amplifier circuit, 6 ... Signal processing circuit, 7 ... Comparator, 8 ... Window comparator,
9, 12, 13, 14 ... switch, 10 ... pseudo error signal generator, 11 ... comparator.

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】5自由度制御型磁気軸受の制御装置におい
て、2種類の疑似的な位置誤差信号を生成し、軸位置が
位置検出センサに対して目標位置よりも近いか遠いかを
判断してどちらか一方の信号を出力する疑似誤差信号発
生器を設け、軸位置が位置検出センサの測定範囲外にあ
るときには位置誤差信号として前記疑似誤差信号発生器
の出力を用い、軸位置が位置検出センサの測定範囲内に
あるときには位置誤差信号として位置指令信号と位置検
出センサの信号の差分を用いることにより、位置検出セ
ンサの測定範囲内で軸の位置決めを行う構成としたこと
を特徴とする磁気軸受の制御装置。
1. A controller for a five-degree-of-freedom control type magnetic bearing, which generates two types of pseudo position error signals and determines whether the shaft position is closer or farther from a position detection sensor than a target position. A pseudo error signal generator that outputs one of the signals, and when the axis position is outside the measurement range of the position detection sensor, the output of the pseudo error signal generator is used as a position error signal, and the axis position is detected. When the sensor is within the measurement range of the sensor, the difference between the position command signal and the signal of the position detection sensor is used as a position error signal, thereby positioning the shaft within the measurement range of the position detection sensor. Bearing control device.
JP2750590A 1990-02-07 1990-02-07 Magnetic bearing control device Expired - Fee Related JP2715615B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2750590A JP2715615B2 (en) 1990-02-07 1990-02-07 Magnetic bearing control device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2750590A JP2715615B2 (en) 1990-02-07 1990-02-07 Magnetic bearing control device

Publications (2)

Publication Number Publication Date
JPH03231316A JPH03231316A (en) 1991-10-15
JP2715615B2 true JP2715615B2 (en) 1998-02-18

Family

ID=12222998

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2750590A Expired - Fee Related JP2715615B2 (en) 1990-02-07 1990-02-07 Magnetic bearing control device

Country Status (1)

Country Link
JP (1) JP2715615B2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0731326B2 (en) * 1988-06-01 1995-04-10 シャープ株式会社 Liquid crystal display
JP2006214529A (en) * 2005-02-04 2006-08-17 Jtekt Corp Radial displacement detection device for magnetic bearing device
CN107448476B (en) * 2017-09-18 2018-12-28 华中科技大学 A kind of opposite power electronic controller of electric current for multiaxis magnetic suspension bearing
JP2019209399A (en) * 2018-05-31 2019-12-12 国立大学法人 鹿児島大学 Main spindle system of machine tool

Also Published As

Publication number Publication date
JPH03231316A (en) 1991-10-15

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