JPH03231316A - Magnetic bearing controller - Google Patents
Magnetic bearing controllerInfo
- Publication number
- JPH03231316A JPH03231316A JP2750590A JP2750590A JPH03231316A JP H03231316 A JPH03231316 A JP H03231316A JP 2750590 A JP2750590 A JP 2750590A JP 2750590 A JP2750590 A JP 2750590A JP H03231316 A JPH03231316 A JP H03231316A
- Authority
- JP
- Japan
- Prior art keywords
- axis
- error signal
- output
- detection sensor
- magnetic bearing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005259 measurement Methods 0.000 claims abstract description 16
- 238000001514 detection method Methods 0.000 claims description 25
- 238000010586 diagram Methods 0.000 description 7
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
Landscapes
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Control Of Position Or Direction (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、5自由度制御型磁気軸受の制御装置に関する
ものである。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a control device for a five-degree-of-freedom control type magnetic bearing.
従来の技術
近年、5自由度制御型磁気軸受を用いて敵方rpmある
いはそれ以上の高速回転を行わせる工作機械主軸が実用
化されている。これらの主軸に使用される5自由度制御
型磁気軸受は、2個のラジアル磁気軸受と1個のスラス
ト磁気軸受により構成される。第7図に示すようにラジ
アル磁気軸受は、一般に、主軸1の軸線に直角なXY平
面のX軸周およびY軸用の2組みの電磁石2a、2b、
3a。BACKGROUND OF THE INVENTION In recent years, machine tool main spindles that use five-degree-of-freedom controlled magnetic bearings to rotate at high speeds of RPM or higher have been put into practical use. The five-degree-of-freedom control type magnetic bearing used for these main shafts is composed of two radial magnetic bearings and one thrust magnetic bearing. As shown in FIG. 7, a radial magnetic bearing generally includes two sets of electromagnets 2a, 2b for the X-axis circumference and the Y-axis on an XY plane perpendicular to the axis of the main shaft 1.
3a.
3bとX軸位置センサおよびY軸位置センサ4Cとから
なる。これらの各位置センサ4a、4b。3b, an X-axis position sensor, and a Y-axis position sensor 4C. Each of these position sensors 4a, 4b.
4CでX軸方向およびY軸方向における主軸の変位を検
出し、一定の位置指令信号との偏差を増幅し、信号処理
を行った後電力増幅することによりX軸周およびY軸用
電磁石の電磁力を制御するようになっている。スラスト
磁気軸受は、主軸の軸線をZ軸とすると、Z軸周の2個
の電磁石2c。4C detects the displacement of the main shaft in the X-axis direction and Y-axis direction, amplifies the deviation from a constant position command signal, performs signal processing, and then amplifies the power to control the electromagnets of the X-axis circumferential and Y-axis electromagnets. It is designed to control power. The thrust magnetic bearing has two electromagnets 2c around the Z-axis, assuming that the axis of the main shaft is the Z-axis.
3cとZ軸位置センサとからなる。位置センサでZ軸方
向における主軸の変位を検出し、一定の位置指令信号と
の偏差を増幅し、信号処理をした後電力増幅することに
よりZ軸用電磁石の電磁力を制御するようになっている
。3c and a Z-axis position sensor. The position sensor detects the displacement of the main shaft in the Z-axis direction, amplifies the deviation from a fixed position command signal, processes the signal, and then amplifies the power to control the electromagnetic force of the Z-axis electromagnet. There is.
発明が解決しようとする課題
上記のような5自由度制御型磁気軸受においては、主軸
の位置決め精度は、位置検出センサの精度及び分解能の
良さにかかってくる。高い加工精度を要求される工作機
械主軸においてはこの問題は重要であり、高精度な位置
決めを行うにはそれに見合う高精度・高分解能なセンサ
が必要となる。磁気軸受の位置検出センサとしては、軸
の可動範囲をカバーする広い測定レンジのセンサが必要
であるが、一般、に測定レンジの広いセンサはど分解能
が低く、高精度な位置決めが困難になるという課題を有
していた。Problems to be Solved by the Invention In the five-degree-of-freedom control type magnetic bearing as described above, the positioning accuracy of the main shaft depends on the accuracy and resolution of the position detection sensor. This problem is important for machine tool spindles that require high machining accuracy, and high-precision and high-resolution sensors are required to perform high-precision positioning. Position detection sensors for magnetic bearings require a sensor with a wide measurement range that covers the range of motion of the shaft, but sensors with a wide measurement range generally have low resolution, making it difficult to perform highly accurate positioning. I had an issue.
そこで本発明は、上記のような疎開を解決するための磁
気軸受の制御装置を提供するものである。Therefore, the present invention provides a magnetic bearing control device for solving the above-mentioned evacuation problem.
課題を解決するための手段
磁気軸受の制御装置において、2種類の疑似的な位置誤
差信号を生成し、軸位置が位置検出センサに対して目標
位置よりも近いか遠いかを判断してどちらか一方の信号
を出力する疑似誤差信号発生器を設け、軸位置が位置検
出センサの測定範囲外にあるときには位置誤差信号とし
て前記疑似誤差信号発生器の出力を用い、軸位置が位置
検出センサの測定範囲内にあるときには位置誤差信号と
して位置指令信号と位置検出センサの信号の差分を用い
ることにより位置検出センサの測定範囲内で位置決めを
行うように構成したものである。Means for Solving the Problem In a control device for a magnetic bearing, two types of pseudo position error signals are generated, and a determination is made as to whether the shaft position is closer or farther than the target position relative to the position detection sensor. A pseudo error signal generator is provided to output one of the signals, and when the shaft position is outside the measurement range of the position detection sensor, the output of the pseudo error signal generator is used as a position error signal, and the shaft position is measured by the position detection sensor. When within the range, positioning is performed within the measurement range of the position detection sensor by using the difference between the position command signal and the signal of the position detection sensor as a position error signal.
作 用
本発明によれば、軸位置が位置検出センサの測定範囲外
にあるとき、疑似誤差信号発生器は、軸位置が位置検出
センサに対して目標位置よりも近いか遠いかを判断して
2種類の疑似誤差信号のどちらか一方を出力する。軸位
置が位置検出センサの測定範囲外にあるので、この疑似
誤差信号発生器の出力が位置誤差信号となり、軸は目標
位置の方向へ移動する。軸位置が位置検出センサの測定
範囲内にはいれば、位置誤差信号は位置指令信号とセン
サ信号の差分に切り換えられるので、通常の位置制御が
行われる。従って軸受の可動範囲全体をカバーするよう
な広い測定レンジの位置検出センサは必要無く、必要最
小限の測定レンジを持った高分解能なセンサを用いるこ
とができる。According to the present invention, when the shaft position is outside the measurement range of the position detection sensor, the pseudo error signal generator determines whether the shaft position is closer or farther than the target position with respect to the position detection sensor. Either one of two types of pseudo error signals is output. Since the shaft position is outside the measurement range of the position detection sensor, the output of this pseudo error signal generator becomes a position error signal, and the shaft moves in the direction of the target position. If the shaft position is within the measurement range of the position detection sensor, the position error signal is switched to the difference between the position command signal and the sensor signal, so that normal position control is performed. Therefore, there is no need for a position detection sensor with a wide measurement range that covers the entire range of motion of the bearing, and a high-resolution sensor with the minimum necessary measurement range can be used.
実 施 例
本発明の実施例について以下図面を参照しながら説明す
る。Embodiments Examples of the present invention will be described below with reference to the drawings.
M1図は本発明の実施例における5自由度制御型磁気軸
受の制御装置である。1は主軸、2a。FIG. M1 shows a control device for a five-degree-of-freedom control type magnetic bearing in an embodiment of the present invention. 1 is the main axis, 2a.
2b、3a、3bはラジアル磁気軸受用電磁石、2c、
3cはスラスト磁気軸受用電磁石、4a。2b, 3a, 3b are electromagnets for radial magnetic bearings, 2c,
3c is an electromagnet for thrust magnetic bearing; 4a;
4b、4cは位置センサ、5は電力増幅回路、6は信号
処理回路、7は比較器、8はウィンドウコンパレータで
、位置検出センサの出力VがvくV<V、の範囲にある
かどうかを判別する信号を出力する。9は切り換えスイ
ッチで、ウィンドウコンパレータ8の出力によりa−C
間またはb−c間のどちらかが導通状態となる。10は
疑似誤差信号発生器で、第2図に示すような構成を有す
る。Aは位置検出センサの出力、Bはウィンドウコンパ
レータ8の出力である。疑似誤差信号発生器では、CR
回路の充放電により第3図、第4図のような2種類の信
号が生成され、位置センサの出力値を11のコンパレー
タで判別することによりどちらか一方が出力される。第
5図は位置検出センサ21.22と軸15の位置関係を
示す図、第6図は位置検出センサの出力と軸位置の関係
を表すグラフである。軸位置が位置検出センサの測定範
囲外にある場合で、位置検出センサに対して目標位置よ
りも離れているとき(X>Xf)には、9の切り換えス
イッチはb−c間が導通し似誤差信号発生器側がONと
なる。疑似誤差信号発生器においては、12.13の切
り換えスイッチはそれぞれe−f間、h−i間が導通し
第3図、第4図のような信号が生成される。14の切り
換えスイッチはj−3間が導通するので結局第3図のよ
うな疑似誤差信号が出力され、軸はXが小さ(なる方向
へ移動する。逆に軸位置が目標位置よりも近いとき(X
<Xn)には14の切り換えスイッチはに−e間が導通
するので第4図のような疑似誤差信号が出力され、軸は
Xが大きくなるような方向へ移動する。軸が移動してセ
ンサの測定範囲(X <X<X、)に入れば9の切り
換えスイッチはa−c間が導通して通常の磁気軸受の制
御が行われる。4b and 4c are position sensors, 5 is a power amplifier circuit, 6 is a signal processing circuit, 7 is a comparator, and 8 is a window comparator, which detects whether the output V of the position detection sensor is in the range of V<V. Outputs a signal for discrimination. 9 is a changeover switch, and the output from window comparator 8 allows a-C to be changed.
Either the terminal or b and c becomes conductive. Reference numeral 10 denotes a pseudo error signal generator, which has a configuration as shown in FIG. A is the output of the position detection sensor, and B is the output of the window comparator 8. In the pseudo error signal generator, CR
Two types of signals as shown in FIGS. 3 and 4 are generated by charging and discharging the circuit, and one of the signals is output by discriminating the output value of the position sensor using 11 comparators. FIG. 5 is a diagram showing the positional relationship between the position detection sensors 21, 22 and the shaft 15, and FIG. 6 is a graph showing the relationship between the output of the position detection sensor and the shaft position. When the axis position is outside the measurement range of the position detection sensor and is further away from the position detection sensor than the target position (X>Xf), the changeover switch 9 conducts between b and c, making it similar to The error signal generator side is turned on. In the pseudo error signal generator, the changeover switches 12 and 13 conduct between e and f and h and i, respectively, to generate signals as shown in FIGS. 3 and 4. Since the changeover switch 14 conducts between j and 3, a pseudo error signal as shown in Fig. 3 is output, and the axis moves in the direction where X is small.On the other hand, when the axis position is closer to the target position (X
<Xn), the terminals -e of the 14 changeover switches become conductive, so a pseudo error signal as shown in FIG. 4 is output, and the axis moves in the direction in which X becomes larger. When the shaft moves and enters the measurement range of the sensor (X <
発明の効果
本発明によれば、疑似誤差信号発生器の出力と位置指令
信号とセンサで検出された位置信号の差分をとってつく
られる位置誤差信号が軸位置に応じて切り換えられるの
で、必要最小限の測定レンジを持った高制度・高分解能
なセンサを用いることができる。その結果、軸の位置決
め精度を向上させることができる。Effects of the Invention According to the present invention, the position error signal created by taking the difference between the output of the pseudo error signal generator, the position command signal, and the position signal detected by the sensor is switched according to the shaft position. It is possible to use a high-accuracy, high-resolution sensor with a limited measurement range. As a result, the positioning accuracy of the shaft can be improved.
第1図は本発明の実施例における5自由度制御型磁気軸
受の制御装置の構成図、第2図は疑似誤差信号発生器の
構成図、第3図、第4図は疑似誤差信号特性図、第5図
は位置検出センサと軸の位置関係を表す図、第6図は位
置検出センサの出力と軸位置の関係を表す図、第7図は
従来の5自由度制御型磁気軸受の制御装置の構成図であ
る。
1・・・・・・主軸、2a、2b、3a、3b・・・・
・・ラジアル磁気軸受用電磁石、2c、3c・・・・・
・・イラスト磁気軸受用電磁石、4a、4b、4c・・
・・・・位置センサ、5・・・・・・電力増幅回路、6
・・・・・・信号処理回路、7・・・・・・比較器、8
・・・・・・ウィンドウコンパレータ、9.12.13
.14・・・・・・切り換えスイッチ、10・・・・・
・疑似誤差信号発生器、11・・・・・・コンパレータ
。Fig. 1 is a block diagram of a control device for a 5-degree-of-freedom control type magnetic bearing in an embodiment of the present invention, Fig. 2 is a block diagram of a pseudo error signal generator, and Figs. 3 and 4 are pseudo error signal characteristic diagrams. , Fig. 5 is a diagram showing the positional relationship between the position detection sensor and the shaft, Fig. 6 is a diagram showing the relationship between the output of the position detection sensor and the shaft position, and Fig. 7 is the control of the conventional 5 degrees of freedom control type magnetic bearing. It is a block diagram of a device. 1...Main shaft, 2a, 2b, 3a, 3b...
...Radial magnetic bearing electromagnet, 2c, 3c...
・・Illustrated electromagnet for magnetic bearings, 4a, 4b, 4c・・
...Position sensor, 5...Power amplification circuit, 6
... Signal processing circuit, 7 ... Comparator, 8
...Window comparator, 9.12.13
.. 14... Changeover switch, 10...
- Pseudo error signal generator, 11... Comparator.
Claims (1)
疑似的な位置誤差信号を生成し、軸位置が位置検出セン
サに対して目標位置よりも近いか遠いかを判断してどち
らか一方の信号を出力する疑似誤差信号発生器を設け、
軸位置が位置検出センサの測定範囲外にあるときには位
置誤差信号として前記疑似誤差信号発生器の出力を用い
、軸位置が位置検出センサの測定範囲内にあるときには
位置誤差信号として位置指令信号と位置検出センサの信
号の差分を用いることにより、位置検出センサの測定範
囲内で軸の位置決めを行う構成としたことを特徴とする
磁気軸受の制御装置。In a control device for a 5-degree-of-freedom control type magnetic bearing, two types of pseudo position error signals are generated, and it is determined whether the shaft position is closer or farther than the target position with respect to the position detection sensor. A pseudo error signal generator is provided to output a signal,
When the shaft position is outside the measurement range of the position detection sensor, the output of the pseudo error signal generator is used as the position error signal, and when the shaft position is within the measurement range of the position detection sensor, the position command signal and the position are used as the position error signal. 1. A control device for a magnetic bearing, characterized in that the shaft is positioned within a measurement range of a position detection sensor by using a difference between signals of the detection sensor.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2750590A JP2715615B2 (en) | 1990-02-07 | 1990-02-07 | Magnetic bearing control device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2750590A JP2715615B2 (en) | 1990-02-07 | 1990-02-07 | Magnetic bearing control device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH03231316A true JPH03231316A (en) | 1991-10-15 |
JP2715615B2 JP2715615B2 (en) | 1998-02-18 |
Family
ID=12222998
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2750590A Expired - Fee Related JP2715615B2 (en) | 1990-02-07 | 1990-02-07 | Magnetic bearing control device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2715615B2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5148300A (en) * | 1988-06-01 | 1992-09-15 | Sharp Kabushiki Kaisha | Liquid crystal display device |
JP2006214529A (en) * | 2005-02-04 | 2006-08-17 | Jtekt Corp | Radial displacement detection device for magnetic bearing device |
CN107448476A (en) * | 2017-09-18 | 2017-12-08 | 华中科技大学 | A kind of opposite power electronic controller of electric current for multiaxis magnetic suspension bearing |
JP2019209399A (en) * | 2018-05-31 | 2019-12-12 | 国立大学法人 鹿児島大学 | Main spindle system of machine tool |
-
1990
- 1990-02-07 JP JP2750590A patent/JP2715615B2/en not_active Expired - Fee Related
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5148300A (en) * | 1988-06-01 | 1992-09-15 | Sharp Kabushiki Kaisha | Liquid crystal display device |
JP2006214529A (en) * | 2005-02-04 | 2006-08-17 | Jtekt Corp | Radial displacement detection device for magnetic bearing device |
CN107448476A (en) * | 2017-09-18 | 2017-12-08 | 华中科技大学 | A kind of opposite power electronic controller of electric current for multiaxis magnetic suspension bearing |
CN107448476B (en) * | 2017-09-18 | 2018-12-28 | 华中科技大学 | A kind of opposite power electronic controller of electric current for multiaxis magnetic suspension bearing |
JP2019209399A (en) * | 2018-05-31 | 2019-12-12 | 国立大学法人 鹿児島大学 | Main spindle system of machine tool |
Also Published As
Publication number | Publication date |
---|---|
JP2715615B2 (en) | 1998-02-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0620376B1 (en) | Magnetic bearing apparatus | |
JPH0263011A (en) | Rotation detecting mechanism for laser scanner | |
JPH03231316A (en) | Magnetic bearing controller | |
CN116576147A (en) | Method and device for determining magnetic suspension protection boundary and centrifugal compressor | |
JP3418997B2 (en) | Magnetic bearing device | |
JP2000205259A (en) | Revolving speed detecting device for magnetic levitation rotor | |
JPH0464405B2 (en) | ||
JPH07260425A (en) | Apparatus for measuring run out of rotor | |
JPS58201001A (en) | Touch sensor | |
JP2000283702A (en) | Distance sensor and distance measuring device | |
JP3136621B2 (en) | Magnetic bearing device | |
JPH0495613A (en) | Shaft position detector for radial magnetic bearing | |
JPH01169308A (en) | Non-contact displacement detecting apparatus | |
JP2606256Y2 (en) | Magnetic bearing device | |
JPS6038658A (en) | Speed detecting apparatus | |
JPS63274810A (en) | Position detector for rotary body | |
JPH06206144A (en) | Machining device | |
JP2863689B2 (en) | Processing machine | |
JPH047379Y2 (en) | ||
JPS61193022A (en) | Home position device for encoder with z phase | |
JPH0586487B2 (en) | ||
JPH1044032A (en) | Rotational processing control method | |
JPS61230841A (en) | Tool locus adjustment in numerically controlled machine tool | |
JPH0726649B2 (en) | Magnetic bearing device | |
JP2004038426A (en) | Positioning device |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |