JPH08171407A - Machining tool shift type machining device and its method - Google Patents

Abstract

PURPOSE: To perform the machining by a machining tool and with tracking secured to the rotational run-out by providing a sensor which detects the rotational position of a work held by a holding member provided on a rotary spindle and a sensor which detects the run-out value on the machining reference plane of the work. CONSTITUTION: The detection output of a rotational position sensor 9 is inputted to an arithmetic circuit 12 and an output circuit 13. The detection output of a run-out sensor 10 is inputted to the circuit 12 via a waveform shaping circuit 14. Then the output signal of the circuit 12 is inputted to the circuit 13, and a fine adjustment mechanism 15 gives a fine movement to a cutting tool 4 based on the output signal of the circuit 13. The circuit 14 approximates the detection output of the sensor 10 to the sine curve and can reduce the measurement error on the machining reference plane. Then the circuit 12 operates the correction value at every machining point and every rotational position of a work 3 based on the detection output of both sensors 9 and 10.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a machining tool moving machining for two-dimensionally moving an NC table equipped with a machining tool such as a cutting tool, a milling tool and a polishing tool to perform machining such as cutting, milling and polishing. The present invention relates to an apparatus and a processing method.

[0002]

2. Description of the Related Art In recent years, a cutting tool with an NC table has been widely used for cutting high-precision parts such as head cylinders for video tape recorders. The conventional cutting tool moving type cutting machine shown in FIG. 5 has a chuck 2 on the axis of a rotary spindle 1 that rotates in the direction of arrow A, and a workpiece 3 is gripped by the chuck 2. The workpiece 3 shown is a head cylinder for a video tape recorder,
There is a center hole 3a in the central shaft portion. On the other hand, the work piece 3
The NC table 5, which is equipped with the cutting tool 4 for cutting the outer peripheral surface, moves two-dimensionally in the directions indicated by arrows B and C based on a program incorporated in the control circuit 6.
As shown in FIG. 6, a shaft 7 different from the head cylinder is coupled to the center hole 3a of the head cylinder, which is the workpiece 3 after the cutting work, by a method such as shrink fitting or press fitting.

[0003]

The problem here is that no matter how highly accurate the outer peripheral surface of the workpiece 3 is cut, the shaft 7 connected to the center hole 3a is shown in FIG. That is, it is easy to tilt with respect to the outer peripheral surface of the workpiece 3. Even if the amount of rotational shake due to this inclination is on the order of a few microns, it is a major obstacle in the final product, a video tape recorder. Because
The magnetic tape runs on the basis of the outer peripheral surface of the head cylinder, while the magnetic head rotates on the basis of the shaft 7. Therefore, the magnetic head cannot trace the magnetic tape properly and the quality of the reproduced image is deteriorated. Is.

Such a problem can be solved by first connecting the shaft 7 to the center hole 3a and cutting the outer peripheral surface of the head cylinder with the shaft 7 as a reference. However, if this is attempted to be realized by using a conventional cutting device, fine adjustment is required when the work piece 3 is mounted on the chuck 2 so that the shaft 7 that is tilted and coupled is coaxial with the rotation main shaft 1. In fact, this adjustment is not suitable for mass production because it requires resorting to manual work.

This problem occurs not only in the cutting of the head cylinder. For example, as shown in FIG. 7, consider a case where the outer peripheral surface of the rod-shaped workpiece 8 is cut over the entire length.

In this case, one end 8a of the rod-shaped workpiece 8 is held by the chuck 2 and the other end 8b is cut. Next, the end portion 8b is gripped again by the chuck 2 and the end portion 8a is cut, but when the grip portion 2 is gripped again, the coaxiality between the rotary spindle 1 and the end portion 8b is lost. Then, rotational runout occurs at the end 8a.

Since the end portion 8a is machined with the center of rotation of the rotary spindle 1 as a reference, when the rotational runout occurs, the workpiece 8 cannot be cut with high accuracy over its entire length. Also in this case, similarly to the head cylinder described above, the end 8b is machined over a range that is sufficiently longer than the length of the end 8a gripped by the chuck 2, and the end 8b after the cutting is chucked by the chuck 2 It suffices to re-grip with, but in this case as well, it is not suitable for mass production because it requires manual labor.

Therefore, the applicant of the present invention has proposed a bite moving type cutting device capable of cutting with high accuracy even if the machining reference surface of the workpiece causes rotational runout due to the rotation of the rotating main shaft (Japanese Patent Application No. Hei 10 (1999)). 4-323925). However, since the proposed cutting device is premised on that the machining reference plane is measured under ideal conditions, an error occurs in the deflection measurement of the machining reference plane depending on the measurement conditions. There are the following two causes of this error. One of them is an error due to the low precision of the machining reference plane. Since the cutting tool moves following the rotational runout of the machining reference surface, if the machining reference surface has scratches or stains, or if the roundness or flatness is low, a measurement error occurs and the machining accuracy deteriorates. The other is an error related to the rotational runout measuring method of the machining reference plane. Contact type and capacitance type distance sensors and laser displacement meters cause measurement errors due to cutting oil and dust adhering to the machining reference surface. Further, in the eddy current type gap sensor, a measurement error occurs due to residual magnetism.

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a machining tool moving type machining apparatus and a machining method capable of detecting a rotational runout of a workpiece with high accuracy and capable of working with a working tool following the rotational runout.

[0010]

According to a first invention of the present application, in order to achieve the above-mentioned object, a rotational position detection for detecting a rotational position of a workpiece held by a holding member provided on a rotary spindle. A sensor, a shake detection sensor that detects the amount of shake of the machining reference surface of the workpiece, a waveform shaping unit that shapes the output signal waveform of the shake detection sensor into a waveform that approximates a sine curve, and an output signal of the waveform shaping unit. Calculating means for calculating the position correction amount of the processing tool at the processing point of the work piece in synchronization with the rotation of the rotating spindle, and the position correction amount for the rotation position and the processing point based on the output signal of the calculating means. Each of the output means, a fine movement adjusting mechanism for finely moving the processing tool based on the output signal of the output means, and a fine movement adjusting mechanism are mounted to move two-dimensionally. Machining tool moving type machining apparatus characterized by comprising a table is provided.

According to the second invention of the present application, in order to achieve the above object, the workpiece is rotated, the rotational position of the workpiece is detected, and the deflection amount of the machining reference plane of the workpiece is determined. Detect, shape the signal of the shake amount into a waveform approximate to a sine curve, and synchronize the position correction amount of the processing tool at the processing point of the workpiece based on the signal of the approximated waveform with the rotation of the rotating spindle. Calculated, the position correction amount is output for each of the rotational position and the processing point based on the position correction amount signal, and the processing tool is finely moved based on the output position correction amount signal by the fine adjustment mechanism. There is provided a machining tool moving machining method characterized in that a fine movement adjusting mechanism is two-dimensionally moved to machine the workpiece.

Since the present invention is configured as described above, it is possible to calculate the necessary correction amount for the entire working surface of the workpiece before processing. In particular, the rotational shake amount of the machining reference surface of the workpiece held by the holding member is detected in correspondence with the rotational position of the workpiece, while the signal waveform of the detected rotational shake amount is a theoretical curve. Since it is approximated to a sine curve, it is possible to obtain a correction amount with a reduced measurement error by calculation.

During machining, the output circuit outputs a correction amount corresponding to the machining point of the workpiece (contact point between the machining tool and the workpiece) and the rotational position of the workpiece. The fine movement adjusting mechanism driven based on the above finely moves the machining tool, so that the machining tool and the machining reference surface are maintained in a relatively steady state. Therefore, when machining is performed with a machining tool that moves in synchronization with the rotation of the rotary spindle, the machining surface becomes a surface that does not have rotational runout with respect to the machining reference plane, and the machining reference plane is a workpiece that causes rotational runout. In addition, it is possible to perform the processing in a state where there is apparently no rotational shake.

Furthermore, since the measurement result of the rotational runout amount of the machining reference surface is close to a sine curve, it is possible to reduce the error relating to the surface precision of the machining reference surface and the measuring method, and as a result, the machining of the workpiece. The accuracy can be improved.

[0015]

BEST MODE FOR CARRYING OUT THE INVENTION Next, an embodiment of the present invention will be described with reference to the drawings. The cutting tool moving type cutting machine shown in FIG. 1 has a chuck 2, a cutting tool 4, an NC table 5, a control circuit 6 and the like provided on a rotary spindle 1, and a workpiece 3 is held by the chuck 2.

The work piece 3 is a head cylinder for a video tape recorder, and a shaft 7 is preliminarily joined to its center hole 3a by a method such as shrink fitting or press fitting.
The shaft 7 serves as a machining reference surface of the workpiece 3. The shaft 7 causes a slight rotational runout as the rotary main shaft 1 rotates, and therefore is shown by intentionally inclining it.

The following points are different from the conventional cutting device. That is, the rotation position detection sensor 9 for detecting the rotation position of the workpiece 3 is provided on the rotating spindle 1. Further, a shake detection sensor 10 for detecting a rotational shake generated on the shaft 7 as the workpiece 3 rotates is fixed to the NC table 5 by a metal fitting 11.

The detection output of the rotational position detection sensor 9 is input to the arithmetic circuit 12 and the output circuit 13, and the detection output of the shake detection sensor 10 is input to the arithmetic circuit 12 through the waveform shaping circuit 14. Then, the output signal of the arithmetic circuit 12 is input to the output circuit 13, and the fine movement adjusting mechanism 15 finely moves the bite 4 based on the output signal of the output circuit 13.

The waveform shaping circuit 14 includes a shake detection sensor 10
Since the detection output of is approximated to a sine curve, it is possible to reduce the measurement error of the processing reference plane. Further, the arithmetic circuit 12 calculates a correction amount at each machining point of the workpiece 3 for each rotational position of the workpiece 3 based on the detection outputs of the rotational position detection sensor 9 and the shake detection sensor 10.

The output circuit 13 transmits the correction amount for each processing point to the fine movement adjusting mechanism 15 in synchronization with the rotational position of the workpiece 3. The fine adjustment mechanism 15 having the bite 4 mounted thereon is fixed on the NC table 5.

As shown in FIG. 2, the fine movement adjusting mechanism 15 has a movable base 16 on which the bite 4 is fixed with screws or the like. The movable base 16 is attached to the mounting base 17 by a pair of spring portions 16a, 16a.
It is fixed to. The piezoelectric element 18 is provided between the movable table 16 and the mounting table 17. Mount 17 is N
It is fixed to the C table 5.

In the cutting tool moving tool constructed as described above, the work piece 3 rotates in the direction of arrow A with the rotation of the rotary spindle 1, and the shaft 7 serving as a machining reference surface thereof.
Rotates while swinging. Before cutting, the rotational position detection sensor 9 detects the rotational position of the workpiece 3, and the shake detection sensor 10 detects the amount of rotational shake of the shaft 7. On the other hand, the arithmetic circuit 12 calculates a necessary correction amount for the machined surface of the workpiece 3 based on the detection outputs of both the sensors 9 and 10 in association with the rotational position.

The details will be described with reference to FIGS. 3 (a) and 3 (b). Here, the position of the byte 4 is 4a, 4b.
Then, the measurement positions of the shake detection sensor 10 are 10a, 10b.
Then, the center of rotation of the rotary spindle 1 is 1a, the position of the shaft 7 is 7a, 7b, and the processed workpiece is 19
a and 19b respectively. 3A shows a state in which the shaft 7a is closest to the shake detection sensor 10, and FIG. 3B shows a state in which the rotation main shaft is rotated 180 degrees from the state shown in FIG. 7b shows a state in which it is away from the shake detection sensor 10.
The two states shown in (a) and (b) can be easily specified from the maximum position and the minimum position of the distance by using, for example, a capacitance type distance sensor as the shake detection sensor 10.
On the other hand, the rotational position of the workpiece 3 can be detected by the rotational position detection sensor 9 provided on the rotary spindle 1.

[0024] The distance between the shaft 7a and the cutting tool 4a is equal to the distance between the shaft 7b and the cutting tool 4b.
From the detected rotation runout data, the rotation center 1a of the rotation spindle
The position of the shaft 7 with respect to is calculated. Then, when the surface parallel to the shaft 7a is machined, the bite 4 slightly moves in synchronization with the shake of the shaft 7 at the processing point, so that a relatively steady state is realized.

The outer peripheral surface of the work piece 3 is machined while the bite 4 is kept in a state in which there is no runout relative to the shaft 7, which is the machining reference surface, because the machined outer peripheral surface is based on the shaft 7. Means being processed. The calculation and the saving of the calculation result can be easily realized by using a general commercially available personal computer.

The result of the measurement by the shake detection sensor 10 is
It is greatly affected by the accuracy of the machining reference plane. Therefore, if the correction amount for the cutting tool 4 is calculated while leaving the scratches on the machining reference surface and the electrical noise of the sensor as they are, the accuracy such as the roundness and flatness of the machining surface is lowered. In order to prevent this, the correction amount of the position of the cutting tool 4 is calculated by shaping into a waveform approximate to a sine curve that matches a theoretical formula. The reason for approximating to the sine curve will be described with reference to FIG.

FIG. 4A shows a relative relationship among the cutting tool 4, the workpiece 3, the shaft 7, the rotational position detecting sensor 9 and the shake detecting sensor 10. The trajectory of the shaft 7 when the rotary spindle 1 of the lathe is rotated is a biconical curved surface or a curved surface of a part thereof, which is a curved surface 20, and a plane perpendicular to the rotation center 1a of the rotary spindle 1 is a flat surface. 21. In addition, the measurement positions 10a, 10 of the shake detection sensor 10
The planes perpendicular to the rotation center 1a at the positions of b and the cutting tool 4 are planes 21a, 21b and 21c, respectively. The line of intersection between the curved surface 20 and the flat surface 21 is a circle. These circles are referred to as circles 22a, 22b, 22c, respectively. Therefore, the shaft 7 viewed from the measurement positions 10a and 10b of the shake detection sensor 10 turns in a circular orbit, and when this is measured, the measured waveform becomes a sine curve.

Next, the approximation method will be described. When the rotation position detection sensor 9 measures the time of one rotation and the shake detection sensor 10 measures the shake, the waveform thereof corresponds to one cycle of the sine curve. 4B and 4C show measurement waveforms at the measurement positions 10a and 10b of the shake detection sensor 10. As shown in these figures, the measurement waveform does not always draw an ideal sine curve, but includes the roundness of the shaft 7 that is the processing reference plane and the error due to the measurement method of the shake detection sensor 10. Therefore, when the correction amount at each position of the bite 4 is calculated by the calculation circuit 12 based on the signal of the measured waveform, a waveform as shown in (d) of FIG. 4 is obtained. Then, if the cutting tool 4 is slightly moved based on such a waveform signal, the processing accuracy is adversely affected.

Therefore, the measured waveforms shown in (b) and (c) of FIG. 4 are applied with the least squares method in the waveform shaping circuit 14 to obtain the amplitude and phase, and a signal having a waveform approximate to a sine curve is obtained. . The approximated waveforms after shaping are shown in (e) and (f) of FIG. When the correction amount at each position of the cutting tool 4 is calculated by the calculation circuit 12 based on the signal of this approximate waveform, (g) of FIG.
become that way. By slightly moving the cutting tool 4 based on this waveform, it is possible to suppress a decrease in processing accuracy due to a measurement error of the shaft 7, which is a processing reference surface. It should be noted that it is desirable that the measurement data of the rotational shake be recorded not only for one rotation but for an arbitrary number of rotations and used for the calculation of the approximate waveform.

When actually cutting the workpiece 3 with the cutting tool 4, the output circuit 13 synchronizes the calculation result corresponding to the axial position of the shaft 7 of the cutting tool 4 in synchronization with the rotation position of the rotary spindle 1. Output to the piezoelectric element 18. Therefore, the position of the cutting tool 4 in the axial direction of the shaft 7 may be input from the control circuit 6 as the position of the NC table 5 to which the fine adjustment mechanism 15 having the cutting tool 4 is fixed. The rotational position of the workpiece 3 may be the rotational position of the rotational position detection sensor 9 provided on the rotary spindle 1. If the above is clarified, it is possible to easily output the calculation results for these two signals in synchronization with a well-known control technique. That is, the rotation angle of the rotary spindle 1 is constantly detected by the rotary position detection sensor 9, and whenever the rotary spindle 1 rotates a fixed angle, the NC table 5 moves and the machining point changes, and the correction amount of the position of the cutting tool 4 is calculated. It is calculated and output to the fine movement adjusting mechanism 15.

The fine movement adjusting mechanism 15 finely moves the cutting tool 4 by a predetermined amount in the direction D in FIG. 2 based on the signal output from the output circuit 13. Therefore, the piezoelectric element 18 is used as a drive source for generating displacement in response to the signal from the output circuit 13.
To use. Since one end of this piezoelectric element 18 is fixed to the mount 17 having sufficient rigidity and the other end is fixed to the movable base 16 having the spring portion 16a, the signal of the output circuit 13 is input to the piezoelectric element 18. Then, the piezoelectric element 18 expands and contracts to deform the spring portion 16a, so that the movable table 16 slightly moves. The drive voltage of the piezoelectric element 18 is generally several hundred volts and has a hysteresis characteristic. Therefore, the signal of the output circuit 13 is amplified by an amplifier circuit, and the displacement amount of the movable table 16 is measured by a displacement gauge while the predetermined displacement amount is measured. It is better to perform feedback control so that

In the embodiment described above, the workpiece 3
The case where the outer peripheral surface of the shaft is cut with the shaft 7 as a reference has been described, but basically, the shake amount of the shaft 7 and the center of the shake correspond to the rotation position of the rotary spindle 1 and Since the calculation can be performed, the correction amount of the workpiece 3 in any direction can also be calculated. Therefore, if the correction amount of the end surface of the workpiece 3 is calculated in the same manner and the fine movement adjusting mechanism capable of finely moving in this direction and the cutting tool 4 are provided on the NC table 5, the axis reference processing of this surface is also possible. Needless to say. On the contrary, even if the machining reference plane is not the shaft 7 of the work piece, if the rotating spindle 1 of the lathe is rotated and the machining reference plane is measured by a shake sensor (not shown), the waveform is ideally a sine curve. In this case, it is possible to improve the processing accuracy by approximating the sine curve of the measured waveform. Further, it is clear that it can be easily applied to the case of processing the rod-shaped workpiece shown in FIG. 7 used in the description of the conventional example.

The shake detection sensor 10 used in this embodiment is a non-contact type electrostatic capacitance type distance sensor, but a contact type sensor may be used. In addition, the rotary spindle 1
Although the rotational position detection sensor 9 is provided in the above, if the NC cutting device itself has a built-in rotational position detection sensor for the rotary spindle 1, this may also be used. Alternatively, the rotational positions of the work piece 3 and the shaft 7 may be directly measured. Furthermore, in the present embodiment, the calculation result is once recorded and then the necessary correction amount is output in synchronization. However, the correction amount is instantly calculated based on the position of the cutting tool 4 and the position of the rotary spindle 1. And output it.

The second embodiment of the present invention will be described below.

In the second embodiment of the present invention, the amount of change in the axis center of the rotary main shaft is detected, and the amount of change is excluded from the runout amount to make the work piece 3 more accurate by the cutting tool 4. I am trying to process it.

That is, in general, the shake detection sensor 1
There is a difference in response speed between 0 and the fine movement adjusting mechanism 15. Therefore, the rotational speed of the rotary spindle 1 at the time of detection is different from the rotational speed at the time of processing. Then, as shown in FIG. 8, the axis center of the rotary spindle 1 physically changes in a normal lathe depending on the number of rotations of the rotary spindle 1. 1000 rpm, 2000r
It is clear from FIG. 8 that the axis center changes in the XY coordinates depending on the rotation speed of pm and 3000 rpm. This means that the reference processing surface of the workpiece 3 during processing is different from the reference processing surface during processing. Therefore, the rotary spindle 1
The greater the change in the axis center of, the worse the machining accuracy.

In order to prevent such deterioration of machining accuracy, as shown in FIG. 9B, a change in the axis center of the rotary spindle 1 is detected by the shake detecting sensor 10 in advance before the detection and machining operations. 9B is used as an offset for each detection of the reference machining surface, and the arithmetic circuit 12 is operated from the deflection amount of the reference machining surface detected by the shake detection sensor 10 in FIG. 9A. Then, the correction amount is calculated more accurately as shown in FIG. Therefore, the processing accuracy can be improved in response to the change in the axis center of the rotary spindle 1. Unless the balance of the rotary spindle 1 is corrected, it is not necessary to remeasure the change of the axis center.

Although the shake detection sensor 10 is composed of a single sensor in the above-mentioned embodiment, the two shake detection sensors 10, 10 can be moved without moving the single sensor 10 to different detection positions 10a, 10b. The measurement position 1
It can also be arranged at 0a and 10b.

[0039]

As described above, according to the present invention, even if the machining reference plane has a runout, it is possible to perform machining while synchronizing with this, the machining tool is finely moved. Further, even when the shape accuracy of the machining reference surface is low or an error occurs due to the measurement method, it is possible to obtain a machining tool moving type cutting device and a machining method with high machining accuracy.

[Brief description of drawings]

FIG. 1 is a schematic plan view of a cutting tool moving type cutting apparatus according to an embodiment of the present invention.

FIG. 2 is a schematic side view of a fine movement adjustment mechanism according to the embodiment of the present invention.

FIG. 3 is an explanatory diagram of byte synchronous driving according to the embodiment of the present invention.

FIG. 4 is an operation explanatory diagram of the waveform shaping circuit according to the embodiment of the present invention.

FIG. 5 is a schematic plan view of a conventional cutting tool moving type cutting device.

FIG. 6 is a completed view of a head cylinder that is a workpiece.

FIG. 7 is a plan view of a rod-shaped body that is a workpiece.

FIG. 8 is a graph showing changes in the axis center of the rotating spindle according to the number of rotations of the rotating spindle.

9A, 9B, and 9C are shakes of a reference machining surface of a workpiece detected by a shake detection sensor, changes in the axis center of a rotary spindle, and shake amounts of FIG. 9A. 10 is a graph showing waveforms showing the shake after removing the amount of change in the axis center of FIG. 9B from FIG.

[Explanation of symbols]

 1 Rotating Spindle 2 Chuck (Holding Member) 3 Workpiece 4 Bit (Processing Tool) 5 NC Table 9 Rotation Position Detection Sensor 10 Shake Detection Sensor 12 Arithmetic Circuit 13 Output Circuit 14 Waveform Shaping Circuit 15 Fine Motion Adjustment Mechanism

Claims (9)

[Claims] 1. A rotation position detection sensor for detecting a rotation position of a workpiece held by a holding member provided on a rotary spindle, and a shake detection sensor for detecting a shake amount of a machining reference surface of the workpiece. , A waveform shaping means for shaping the output signal waveform of the shake detection sensor into a waveform similar to a sine curve, and a position correction amount of the machining tool at the machining point of the workpiece based on the output signal of the waveform shaping means is rotated. Calculating means in synchronism with the output means, output means for outputting the position correction amount for each of the rotational position and the machining point based on an output signal of the calculating means, and a fine movement for finely moving the machining tool based on the output signal of the output means A machining tool moving type machining apparatus comprising: an adjusting mechanism; and an NC table that is equipped with a fine movement adjusting mechanism and moves two-dimensionally to machine the workpiece. 2. The machining tool moving type machining apparatus according to claim 1, wherein the waveform shaping means is a waveform shaping circuit, the computing means is a computing circuit, and the output means is an output circuit. 3. The machining tool moving type machining apparatus according to claim 1, wherein the shake detection sensor moves between different detection positions and is fixed at the position. 4. The machining tool moving type according to claim 1, further comprising a shake detecting sensor having the same function as that of the shake detecting sensor, wherein the two shake detecting sensors are arranged at different detection positions. Processing equipment. 5. The machining tool is a binder.
The machining tool moving machining apparatus according to any one of 4 above. 6. The shake detection sensor detects the amount of change in the axis center of the rotating main shaft, and the amount of change is calculated by the computing means before the fine adjustment mechanism is finely moved. The machining tool moving machining apparatus according to any one of claims 1 to 6, wherein the machining tool is movable. 7. A waveform in which a workpiece is rotated, a rotational position of the workpiece is detected, a deflection amount of a machining reference surface of the workpiece is detected, and a signal of the deflection amount is approximated to a sine curve. The position correction amount of the machining tool at the machining point of the workpiece based on the signal of the approximated waveform is calculated in synchronization with the rotation of the rotary spindle, and the position correction amount is calculated based on the signal of the position correction amount. The amount is output for each of the rotational position and the machining point, the machining tool is finely moved based on the signal of the position correction amount output by the fine movement adjustment mechanism, and the fine movement adjustment mechanism is two-dimensionally moved to move the workpiece. Machining tool moving type machining method characterized by performing the machining of. 8. The machining tool moving machining method according to claim 7, wherein the machining tool is a cutting tool. 9. The amount of change in the shaft center of the rotating main shaft held by the holding member by the workpiece is detected, and the amount of change is finely moved before finely moving the fine adjustment mechanism.
The machining tool moving machining method according to claim 7, wherein the machining amount is excluded from the shake amount.