JP2708460B2 - Chip sticking device - Google Patents

Description

The present invention relates to an apparatus for assembling a video head for a VTR,
In particular, the present invention relates to a chip sticking apparatus suitable for sticking a large number of head chips on one base.

[Conventional technology]

Japanese Unexamined Patent Publication No. Sho 62-31007 discloses an assembly in which two head chips are attached to one base close to each other so that the distance between the gaps is sufficiently short to form a so-called double azimuth head. An apparatus is disclosed.
In this method, a base and a head chip to which one head chip is attached in advance are respectively held by a holding unit, and the relative position between the base and the head chip is measured by an optical measurement unit to adjust the relative position. Later, the head chip is attached to the base with an instant adhesive.

[Problems to be solved by the invention]

By the way, in the above-mentioned conventional technology, the optical measuring unit is 1
Using two microscopes, the tips (head gaps) of the two head chips are captured in the same field of view of the microscope, and the projection step X ₁ , gap interval Y ₁ , track step Z _1, etc. of these head chips are determined by the head chip. Coarse and fine movement is performed by the holding unit, and is adjusted to a reference line preset in the field of view of the microscope. Thereafter, an adhesive is supplied by a dispenser to attach the head chip to the base.

On the other hand, in a digital VTR for digitizing and recording and reproducing a video signal, each channel is stored and reproduced in relation to a required signal amount. Therefore, as many head chips as the number of channels equal one base chip. Is arranged in close proximity. Even in such a case, when attaching these head chips to one base,
It is necessary to adjust these protruding steps X ₁ , gap intervals Y ₁ , and track steps Z ₁ , and furthermore, an angular interval between head chips with respect to a rotation center when attached to a rotary cylinder (hereinafter referred to as a posture). adjustment of θ ₁ is also required.

By the way, when assembling a video head for such a digital VTR, if the above-mentioned conventional technology is used, the total magnification of the microscope is set to 400 to 1000 times in order to check the gap between the head chips. Cannot be captured in the same field of view.

Further, in order to confirm the attached posture theta ₁ of each head chip, there is a method to capture the entire plane of the head chips in one plane of the head chip from the bottom or from the top of another microscopic field, the head chip Due to the necessity of confirming the attaching operation, it is necessary to increase the total magnification of this microscope to 50 to 100 times. However, according to this, the fit and bonding wire of the head chip to a reference line provided on the microscope only magnification is low, since this can not be obtained sufficient accuracy for posture theta _1.

Incidentally, the posture theta ₁ of each head chip, the touch of the relationship between the head chip and the tape, but normal of the center of rotation of the cylinder in the VTR is required as a reference line, in the state of the sticking apparatus is two since the paste the head chip in parallel, the positioning of the posture theta ₁ of each head chip is very like flame Kashii problem.

SUMMARY OF THE INVENTION An object of the present invention is to provide a chip adhering device which can solve such a problem and can adhere a multiple head chip to one base with high accuracy.

[Means for solving the problem]

In order to achieve the above object, the present invention provides a rotary table on which a base having a plurality of chip attaching positions is mounted, a rotary indexer for detecting rotation of the rotary table, and the base mounted on the rotary table. A first microscope including a tip portion of the chip attaching position in a field of view, a first stage for moving the first microscope in horizontal and vertical directions, and a base mounted on the rotary table. 1
A second microscope including the upper surface of the two chip attaching positions in the field of view, a second stage for moving the second microscope in the horizontal and vertical directions, a chip holder for holding a head chip, and the head chip. A third stage displaced and rotated in the horizontal and vertical directions, a counter for setting a rotation position of the rotary table based on an output of the rotary indexer and a horizontal and vertical position of the first microscope; Make up with it.

In addition, a master gauge is provided on the rotary table, and the master gauge enables initial setting of the first and second microscopes.

Further, the first microscope is integrated with the camera, a scale plate or a slit plate having a reference line is provided on the first microscope, and a luminance sampler is provided between the camera and the monitor.

[Action]

Since the first and second microscopes have a field of view that includes only one head chip, the depth of focus can be reduced by increasing the magnification very much. Can be set with high accuracy. Projecting step X ₁ of the head chip can be set by the focus of the first microscope, the third stage can be carried out while watching the monitor. When focusing on the monitor, check the focus of the head gap at the tip of the head chip,
In the case of using the luminance sampler, the luminance line appears on the monitor as a notch proportional to the contrast, thereby enabling quantitative focusing.

Further, since the amount of rotation of the turntable by rotation indexer can be detected from the value of this counter, the rotation angle of the rotary table can be obtained with high accuracy, therefore, the gap distance Y ₁ can be set with high precision . The track level difference Z _1, the first stage is set by displacing the first microscope in accordance with the value set in the counter in the vertical direction.

The orientation theta ₁ of the head chip, it can be determined with high accuracy by the setting of the above gap distance Y _1,
Further, a bright and dark line is generated on the monitor by the slit plate provided in the first microscope and the tip of the head chip, and the contrast of the bright and dark line is symmetrical with respect to the image of the head gap, thereby achieving high precision. Can be set.

〔Example〕

First, referring to FIGS. 4 and 5, a four-chip bonding head in which four head chips are bonded to a base will be described. FIG. 4 is a plan view of the head, and FIG.
The figure is a side view of this head, 1 is a base, 2 is a head chip, 3 is an adhesive, 4 is a tip, 5 is a head gap, 6 is a plan view, and 7 is a chip joining of two core halves. Line.

4 and 5, head chips 2 are attached to the tips of four protruding portions of the base 1, respectively. The accuracy of sticking these head chips 2 is such that the head gap 5 of each head chip 2 is positioned at the same radius R from the rotation center O of the rotary cylinder.
Of the projection step X ₁ , the gap interval Y ₁ of each head chip 2, the track step Z _1, and the angle between the rotation center O and the gap interval Y ₁ , that is, the attitude θ ₁ , are within the error range on the order of μm and minute. Must be positioned.

Hereinafter, an embodiment of the present invention for attaching each head chip 2 to the base in this manner will be described with reference to the drawings.

FIG. 1 is a plan view showing one embodiment of a chip sticking apparatus according to the present invention, FIG. 2 is a side view seen from arrow A side, FIG. 3 is a side view seen from arrow B side, and 1 is a base; 2 is a head chip, 8 is a frame, 9 is a master gauge, 10 is a chip alignment table, 11 is a rotary table, 12 is a rotary magnescale, 13
Is a counter, 14 is a sensor, 15 is a micro head, 16 is X
Stage, 17 is a linear sensor, 18 is a rotary knob, 19 is a Z stage, 20 is a brightness sampler, 21 is a monitor, 22 is a camera,
23 is a microscope, 24 is a portal, 25 is a monitor, 26 is a camera, 27 is a microscope, 28 is a nozzle, 29 is a Z stage, 30 is a light source, 31 is a relay lens, 32 is a slit plate, 33 is a half prism,
34 is an objective lens, 35 and 35 'are reference lines, 36 is a scale plate, 37 is an eyepiece, 38 is an image sensor, 39 is a chip holder, and 40 is XY
A stage, 41 is a Z stage, 42 is a suction block, 43 is a parallel leaf spring, 44 is a θ stage, and 45 and 45 'are cutout lines.

1 to 3, a rotary magnescale 12 and a rotary table 11 are provided on the frame 8. The turntable 11 is provided with a master gauge 9, a base 1, and a chip alignment table 10. A sensor 14 is provided facing the rotating magnescale 12, and the sensor 14 is connected to a counter 13. The rotary magnescale 12 and the sensor 14 are used for indexing the rotation of the rotary table 11.

An X stage 16 is provided on the frame 8 and moves in the direction of the arrow X by operating the micro head 15. The micro head 15 is connected to the counter 13. On the X stage 16, there is provided a Z stage 19 which is moved in the direction of arrow Z by a rotary knob 18, and the movement in the Z direction is detected by a straight-ahead sensor 17 connected to the counter 13. Z
A camera 22 and a microscope 23 are integrally mounted on the stage 19 in the horizontal direction (X direction), and the camera 22 is connected to a monitor 21 via a luminance sampler 20.

Further, on the X stage 16, a gate post 24 is further mounted with a microscope 23 interposed therebetween. A camera 26 and a microscope 27 are mounted on a Z stage 29 projecting in the horizontal direction (X direction) from the gate post 24. The Z stage 29 is integrally mounted in the vertical direction (Z direction), and a nozzle 28 for applying the adhesive is mounted on the tip of the Z stage 29.

Here, the microscope 23 includes a light source 30, a relay lens 31, a slit plate 32, a half prism 33, an objective lens 34, a scale plate 36, and an eyepiece 37. When the head chip 2 is arranged at the tip of the base 1 attached to the turntable 11,
The light from the light source 30 is imaged by a relay lens 31 on a slit plate 32 on which light and darkness is arranged, and further reflected by a half prism 33, and then imaged on the tip of the head chip 2 by an objective lens. The light reflected by the head chip 2 passes through the objective lens 34 and the half prism 33, forms an image on a scale plate 36 provided with a reference line, and forms an image with an eyepiece 37 on an image sensor 38 of the camera 22. I do. This scale plate 36
Is displayed as the reference line 35 on the monitor 21.

The microscope 27 has a similar configuration, but the slit plate is omitted. The reference line on the scale is displayed on the monitor 25 as a reference line 35 '.

An XY stage 40 is provided on the frame 8. A Z stage 41 is mounted on the XY stage 40, and a θ stage 44 is mounted on a side of the Z stage 41. The θ stage 44 is provided with a chip holder 39 including a suction block 42 for the head chip 2 and a parallel leaf spring 43 for holding the suction block 42. The XY stage 40 is for positioning the head chip 2 in the XY direction, and the Z stage 41 is for moving the head chip 2 in the vertical direction (Z
Direction). The θ stage 44 is for adjusting the attitude θ of the head chip.

 Next, the operation of this embodiment will be described.

First, the turntable 11 is rotated counterclockwise from the state shown in FIG. The rotation amount θ is detected by the sensor 14 and the rotating magnescale 12. When the rotation amount θ is rotated by the rotation amount θ set in advance in the counter 13, the rotation table 11 stops. At this time, the notch line 45 provided at the tip of the master gauge 9 enters the field of view of the microscope 23, and the notch line 45 'provided at the upper surface of the master gauge 9 enters the field of view of the microscope 27.
Therefore, as shown in FIG.
The notch line 45 of the master gauge 9 is displayed together with the reference line 35 of the scale plate 36 in FIG. 7, and the monitor 25 displays the reference line 35 'of the scale plate (not shown) in the microscope 27 as shown in FIG.
At the same time, a notch line 45 'of the master gauge 9 is displayed.

Next, the rotary table 11 is slightly moved so that the micro head 1
5. Operate the rotary knob 18 to adjust the position of the microscope 23 in the X and Z directions so that the notch line 45 matches the reference line 35 on the monitor 21. Similarly, the reference line 35 'is displayed on the monitor 25. Notch line
The position of the microscope 27 is adjusted so that 45 'coincides, and the origin of the optical system is determined. In this state, the counter 13 is reset, and the X value, the Z value, and the θ value are each set to zero.

Next, the rotary table 11 is rotated clockwise in FIG. 1 while sequentially writing the output of the sensor 14 to the counter 13 so that one head chip 2 on the chip alignment table 10 is directly below the microscope 27. Then, the chip holder 39 is lowered by the Z stage 41, and the head chip 2 is vacuum-sucked by the suction block. The suction block 42 rises when the head chip 2 is sucked, and the turntable 11
Rotating counterclockwise while reading the θ value of 13, it stops at a position where one of the sticking portions of the base 1 comes directly below the microscope 27.

After that, the tip holder 39 is lowered by the Z stage 40, and the head chip 2 is placed on the attaching portion of the base 1 by a parallel leaf spring.
Set to be pressed or slightly floated by 43. In this state, as shown in FIG. 8, on the monitor 25, if the reference line 35 'coincides with the distal end portion 4 and the joining line 7 of the head chip 2, the tip holder for the posture θ, the positions X and Y Coarse movement by 39 ends. To further improve the sticking accuracy, as shown in FIG. 9, the monitor 21 on is matched with the gap 5 of the reference line 35 and the head chip 2, for positioning about the gap distance Y _1. These operations are performed by the θ stage 44 and the XY stage 40.

The adjustment of the projecting step X ₁ is, as is focused gap 5 on the monitor 21, carried out by the fine movement of the XY stage 40. At this time, the luminance signal is detected by the luminance sampler 20 by crossing the center of the monitor 21 horizontally, and the brightness is determined by the monitor 21.
Is displayed as a luminance line 46 in the lower part of. When focus is achieved, the bright and dark lines 47 of the slit plate 32 are clearly imaged, and the notch height 48 of the luminance line 46 is maximized, so that the luminance for focusing can be increased.

The posture θ ₁ is such that the posture of the tip 4 of the head chip 2 is Δθ
_{If a} mistake is made by one, the notch height 48 of the light / dark line 47 of each part on the luminance line 46 on the left and right with the head gap 5 of the head chip 2 as the boundary is not symmetrical. Therefore, by fine movement of the theta stage 44, since each part of the notch height 48 of the dark line 47 is symmetrical to the boundary of the gap 5 can be intended to adjust the attitude theta ₁ of the head chip 2 with high accuracy.

When the above adjustment work is completed, the head chip 2 is pressed against the base 1 again by the Z stage 41, and the nozzle is dispensed from the dispenser.
The adhesive is applied to the base chip 28 and the head chip 2 is adhered to the base 1 while visually observing the monitor 25 shown in FIG. After bonding, the chip holder 39 is moved by the Z stage 41.
To rise.

As described above, while visually checking the counter 13 and the monitors 21 and 25, while roughly moving the tip holder 39,
The head chip 2 can be positioned and attached on the base 1 attached to the base 11.

When the first head chip 2 is attached to the base 1 in this manner, the second, third, and fourth head chips 2 are attached to the base 1 in the same manner. However,
Since the positions where the respective head chips 2 are adhered on the base 1 are different, the rotary table 11 is rotated so that the respective positions are directly below the microscope 27, and the chip holder 39 moves the respective head chips 2 from the chip alignment table 10 to the respective positions. The chip alignment table 10 is positioned for each head chip 2 so as to be attracted. Further, the attaching position of the head chips 2 on the base 1, the base 1 there is a track stepped Z ₁ together with the step of attaching position in it, the microscope by operating the rotation knob 18 while watching the Z value of the counter 13 23 was displaced in the Z-direction, setting the field of view of the track stepped Z _1.

As described above, the quad tip attaching head is assembled.

As described above, in this embodiment, the protrusion step X ₁ , the gap interval Y ₁ , and the attitude θ of the head chip can be set with high accuracy.
In addition, since the handling and bonding of the head chip and the base can be captured in the field of view of the microscope 27, a work defect can be found in the middle of the work. Although in the field of view of the microscope 23 is only included head chip only one rotational magnetic scale provided on the rotary table 11, sensor 14, by rotating indexer by the counter 13 to the gap distance Y ₁ is a high-precision and it can be easily secured, it is possible to be sufficiently higher magnification of the microscope 23 also enhances the accuracy of the projecting step X ₁ of the head chip 2.

In addition, the brightness sampler 20 allows the head chip 2 to be focused on the monitor 21 quantitatively,
It increases projecting step X ₁ in the accuracy of the head chip 2, further, by providing the slit plate 32 in the microscope, utilizing the symmetry of the notch height 48 of the dark line 46 on monitor 21,
The attitude theta ₁ of the head chip 2 can be set in the configuration.

Further, the calibration of the optical system can be performed promptly and easily by the master gauge 9, so that the work efficiency can be improved and the quality can be stabilized.

In the above embodiment, four head chips are attached at the same pace.
It goes without saying that more than two head chips can be applied.

〔The invention's effect〕

As described above, according to the present invention, since a plurality of head chips can be attached to the same base using a high-power microscope, the step height, gap interval, and posture of the head chips can be accurately and accurately determined. Can be set easily.

[Brief description of the drawings]

1 to 3 show an embodiment of a chip sticking apparatus according to the present invention. FIG. 1 is a plan view, FIGS. 2 and 3 are side views, respectively, and FIG. FIG. 5 is a side view of the head, and FIGS.
It is a figure which shows the example of the display screen of the monitor shown in the figure. 1 Base 2 Head chip 3 Adhesive 5
... head gap, 9 ... master gauge, 10 ... chip alignment table, 11 ... rotating table, 12 ... rotating magnescale, 13 ... counter, 14 ... sensor, 16 ... X stage, 19 ... Z stage, 20: Brightness sampler, 21: Monitor, 22: Camera, 23: Microscope, 24: Gate, 25 ...
... Monitor, 26 ... Camera, 27 ... Microscope, 28 ... Nozzle, 29 ... Z stage, 30 ... Light source, 32 ... Slit plate, 33 ... Half prism, 34 ... Objective lens, 35,3
5 ': Reference line, 36: Scale plate, 37: Eyepiece, 38
…… Image sensor, 39… Chip holder, 40… XY stage, 41… Z stage, 42… Suction block, 43… Parallel leaf spring, 44… θ stage, 45, 45 ' .

Claims (4)

(57) [Claims] 1. A rotary table on which a base and a chip aligning table having n (where n is an integer of 2 or more) chip attaching positions are mounted, a rotary indexer for detecting a rotation angle of the rotary table, A first microscope in which one tip of the chip attaching position is included in the field of view, a first stage for moving the first microscope in the horizontal and vertical directions, and one upper surface of the chip attaching position A second microscope in which a part is included in the field of view, a second stage for moving the second microscope in the horizontal and vertical directions, a chip holder for holding a head chip, and a horizontal and a vertical for the chip holder. A third stage for displacing and rotating in the direction, a counter for setting the rotational position of the rotary table based on the output of the rotary indexer and the horizontal and vertical positions of the first and second microscopes Consisting of The first and second stages allow the first and second stages to monitor the head chip during the attaching operation in the visual fields of the first and second microscopes according to the value of the counter for each of the chip attaching positions. The horizontal and vertical positions of the second microscope are set, and the position and attitude of the head chip are adjusted by the third stage while monitoring the positions of the head chip with the first and second microscopes. A chip sticking apparatus characterized in that a head chip can be stuck at each sticking position. 2. The chip sticking device according to claim 1,
A master gauge is provided on the rotary table, and the master gauge is positioned in the field of view of the first and second microscopes, and the first and second stages can be initialized by the first and second microscopes. A chip sticking apparatus characterized in that: 3. The chip sticking apparatus according to claim 1, wherein a scale plate having a reference line is provided on each of the first and second microscopes, and the first and second microscopes are integrated with a camera. A tip sticking apparatus, wherein the reference line and the tip of a head chip to be attached to the base can be simultaneously monitored. 4. The apparatus according to claim 3, wherein a slit plate is provided on the first microscope, a brightness sampler is provided between the camera and the monitor, and a bright / dark line is formed on the monitor by a gap between the slit plate and a head chip. A tip sticking apparatus characterized in that the amount of projection and the attitude of the head chip can be quantitatively confirmed by displaying the information.