JP2696692B2 - Fluid modulation type gas analyzer - Google Patents
Fluid modulation type gas analyzerInfo
- Publication number
- JP2696692B2 JP2696692B2 JP4089696A JP8969692A JP2696692B2 JP 2696692 B2 JP2696692 B2 JP 2696692B2 JP 4089696 A JP4089696 A JP 4089696A JP 8969692 A JP8969692 A JP 8969692A JP 2696692 B2 JP2696692 B2 JP 2696692B2
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- Japan
- Prior art keywords
- gas
- humidity
- measurement
- concentration
- modulation type
- Prior art date
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Description
【０００１】[0001]
【産業上の利用分野】本発明は、分析部のセルに比較ガ
スと測定ガスとを一定の周期で交互に供給して、測定ガ
ス中の被測定対象ガスの濃度を分析するようにした流体
変調式のガス分析装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fluid for analyzing a concentration of a gas to be measured in a measurement gas by alternately supplying a comparison gas and a measurement gas to a cell of an analysis section at a constant cycle. The present invention relates to a modulation type gas analyzer.
【０００２】[0002]
【従来の技術】例えば大気に含まれるＣＯ２ガスの濃度
分析に際して、大気中のＣＯ２ガスの濃度は多少変動す
るものの３５０ｐｐｍ前後であることから、大気中のＣ
Ｏ２ガスの濃度にほゞ近似するＣＯ２ガスを含む比較ガ
ス、例えば３５０ｐｐｍのＣＯ２ガスを含む比較ガスを
セルに供給させることによって、大気中のＣＯ２ガスの
僅かな濃度変化を高精度で分析することができる。 2. Description of the Related Art For example, when analyzing the concentration of CO 2 gas contained in the atmosphere, the concentration of the CO 2 gas in the atmosphere is about 350 ppm although it fluctuates somewhat, so that the C
By supplying the cell with a comparative gas containing CO 2 gas that is approximately similar to the concentration of O 2 gas, for example, a comparative gas containing 350 ppm of CO 2 gas, a slight change in the concentration of CO 2 gas in the atmosphere can be accurately detected. Can be analyzed.
【０００３】[0003]
【発明が解決しようとする課題】ところで、前記ボンベ
に充填された比較ガスの湿度は極めて低く、一方、測定
ガスである大気は高湿度である上に湿度変化が大きく
て、この湿度の変化すなわち水分分圧の変化がＣＯ２ガ
スの濃度変化に繋がることから従来では、大気を一旦マ
イナス５０℃以下に冷却させて除湿し、比較ガスと同じ
ような超低湿度の条件下に置くようにしている。しか
し、大気をマイナス５０℃以下に冷却させための大掛か
りな装置が必要で、コスト面はもとよりメンテナンス性
の面などで問題があった。[SUMMARY OF THE INVENTION Incidentally, the humidity of the reference gas filled in the cylinder is very low, whereas, measured
The atmosphere, which is a gas, has a high humidity and a large change in humidity. This change in humidity, that is, a change in the partial pressure of water leads to a change in the concentration of CO 2 gas. Then, the sample is dehumidified and placed under the same ultra-low humidity condition as the comparative gas. However, a large-scale apparatus for cooling the atmosphere to minus 50 ° C. or less is required, and there are problems in terms of cost as well as maintenance.
【０００４】本発明は、かゝる実情に鑑みて成されたも
のであって、測定ガス中の被測定対象ガスの僅かな濃度
変化を高精度で分析できるようにした上で、測定ガスと
比較ガスとの湿度調整がローコストで達成される流体変
調式のガス分析装置を提供することを目的としている。SUMMARY OF THE INVENTION The present invention has been made in view of such circumstances, and is intended to analyze a small change in the concentration of a gas to be measured in a measurement gas with high accuracy. An object of the present invention is to provide a fluid modulation type gas analyzer in which humidity adjustment with a comparative gas can be achieved at low cost.
【０００５】[0005]
【課題を解決するための手段】上述の目的を達成するた
めに本発明は、被測定対象ガスと同じ成分で且つ濃度が
ほゞ近似するようゼロガスにより希釈された希釈ガスを
比較ガスとして用い、分析部のセルに前記比較ガスと測
定ガスとを一定の周期で交互に供給して、測定ガス中の
被測定対象ガスの濃度を分析するようにした流体変調式
のガス分析装置であって、前記比較ガスの供給路に前記
比較ガスの供給手段を接続すると共に、前記比較ガスと
前記測定ガスを各別に且つほゞ同じ湿度に加湿させる加
湿手段と、加湿後において両ガスを各別に且つ同じ湿度
に除湿させる除湿手段とを設けた点に特徴がある。SUMMARY OF THE INVENTION In order to achieve the above-mentioned object, the present invention provides a gas having the same composition and concentration as a gas to be measured.
Dilute gas diluted with zero gas to approximate
Used as reference gas, the said comparison gas cell analyzer and measuring gas is supplied alternately in a constant cycle, gas analysis of a fluid modulation type which is adapted to analyze the concentration of the measurement target gas in the measurement gas an apparatus, as well as connecting the supply means of the <br/> comparison gas supply path of the reference gas, a humidifying means for humidifying the reference gas and the measuring gas and Ho Isuzu same humidity separately, humidification It is characterized in that a dehumidifying means for separately dehumidifying both gases to the same humidity later is provided.
【作用】上記の特徴構成によれば、比較ガスと測定ガス
を一旦加湿させて後に除湿させることによって、両ガス
が同じ低湿度の条件下に置かれることになり、加湿によ
る湿度影響を回避させた状態でガス分析が好適に行われ
る。According to the above feature, by humidifying the comparison gas and the measurement gas once and then dehumidifying them, both gases are placed under the same low humidity condition, thereby avoiding the influence of humidity caused by humidification. In this state, gas analysis is suitably performed.
【０００６】[0006]
【実施例】以下、本発明の実施例を図面に基づいて説明
する。図１は流体変調式のガス分析装置の原理図を示
し、１は試料ガスそのものの赤外線吸収によって生じる
変調効果を利用した流体変調式のガス分析計で、当該流
体変調式のガス分析計１の分析部のセルには、測定ガス
（例えば大気）の供給路２と比較ガスの供給路３とが接
続され、前記比較ガスと測定ガスが分析部のセルに一定
の周期で交互に供給されて、前記測定ガス中の被測定対
象ガス（例えばＣＯ２ガス）の濃度を分析するように構
成されている。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a principle diagram of a fluid modulation type gas analyzer, and 1 is a fluid modulation type gas analyzer utilizing a modulation effect caused by infrared absorption of a sample gas itself. A supply path 2 for a measurement gas (for example, the atmosphere) and a supply path 3 for a comparison gas are connected to the cell of the analysis unit, and the comparison gas and the measurement gas are alternately supplied to the cell of the analysis unit at a constant cycle. The apparatus is configured to analyze the concentration of the gas to be measured (for example, CO 2 gas) in the measurement gas.
【０００７】一方の測定ガスの供給路２には、測定ガス
の取入口４と、フイルタ５と、電磁式の三方弁６と、加
湿器７と、圧送ポンプ８と、調圧器９と、キャピラリ１
０とが、その順に介装され、かつ、前記三方弁６には、
測定ガスと同じ成分の高精度の標準ガスを各別に供給す
るためのガス供給手段１１，１２が電磁弁１３を介して
接続されている。この標準ガスはガス分析計２の校正用
に用いられる。他方の比較ガスの供給路３には、ガス希
釈手段１４と、加湿手段１５と、調圧器１６と、キャピ
ラリ１７とが、その順に介装され、かつ、この比較ガス
の供給路３と前記測定ガスの供給路２は、それぞれ除湿
手段１８に接続されていて、除湿直後のガスが分析計１
の分析部に導入されるようになっている。On the other hand, the measurement gas supply path 2, a filter 5, an electromagnetic three-way valve 6, a humidifier 7, a pressure pump 8, a pressure regulator 9, a capillary 1
0 are interposed in that order, and the three-way valve 6 has:
Gas supply means 11 and 12 for separately supplying a high-precision standard gas having the same component as the measurement gas are connected via an electromagnetic valve 13. This standard gas is used for calibration of the gas analyzer 2. A gas diluting unit 14, a humidifying unit 15, a pressure regulator 16, and a capillary 17 are interposed in this order in the supply path 3 for the comparison gas, and the supply path 3 for the comparison gas and the measurement The gas supply paths 2 are connected to the dehumidifying means 18 respectively, and the gas immediately after the dehumidification is supplied to the analyzer 1.
Is introduced into the analysis department.
【０００８】そして、前記ガス希釈手段１４には、ゼロ
ガスを精製して供給するゼロガス精製手段１９と、前記
測定ガス中の被測定対象ガスと同じ成分の高濃度の基準
ガスを供給するガス供給手段２０とが接続されており、
更に前記ガス希釈手段１４には、前記高濃度の基準ガス
に対するゼロガスの希釈比を変更設定する制御手段２１
が備えられていて、希釈された基準ガスの濃度が被測定
対象ガスの濃度に近似する範囲内で比較ガスを供給路３
に供給できるようになっている。The gas diluting means 14 includes a zero gas purifying means 19 for purifying and supplying a zero gas, and a gas supplying means for supplying a high-concentration reference gas having the same component as the gas to be measured in the measurement gas. 20 is connected,
Further, the gas dilution means 14 includes a control means 21 for changing and setting a dilution ratio of the zero gas with respect to the high concentration reference gas.
And supply the comparison gas within a range in which the concentration of the diluted reference gas is close to the concentration of the gas to be measured.
Can be supplied.
【０００９】前記比較ガス用の加湿手段１５は、後段の
除湿にとって有利なように、乾燥ガスである比較ガスを
測定ガスの湿度に近似させるために設けるものである
が、比較ガスの湿度を測定ガスの湿度変化に対応させる
制御は非常に困難である。このことから測定ガスの供給
路２にも加湿手段７を設けて、測定ガスの湿度を安定さ
せた上で、この測定ガスの湿度に比較ガスの湿度を近似
させるように、両供給路２，３に加湿手段７，１５を設
けているのであるが、加湿手段７，１５の何れにおいて
もガスを過飽和に加湿させるようにすれば、湿度制御の
簡略化を図ることができて好ましい。The humidifying means 15 for the comparative gas is provided for approximating the humidity of the comparative gas, which is a dry gas, so as to be advantageous for the subsequent dehumidification. It is very difficult to perform control in response to changes in the humidity of the gas. For this reason, the humidifying means 7 is also provided in the supply path 2 for the measurement gas to stabilize the humidity of the measurement gas, and the two supply paths 2 and 2 are made to approximate the humidity of the comparison gas to the humidity of the measurement gas. Although the humidifying means 7 and 15 are provided in 3, it is preferable to humidify the gas to supersaturation in any of the humidifying means 7 and 15, because it is possible to simplify the humidity control.
【００１０】前記除湿手段１８は、測定ガスならびに比
較ガスをほゞ同じ低湿度の条件下に置いて、加湿による
湿度影響を回避させた状態でガス分析を行わせるために
設けられるもので、測定ガスと比較ガスが前段の工程で
ほゞ同じ湿度に制御され且つ分析部のセルに一定の周期
で交互に供給されるのでガス流量もほゞ同じであって、
両ガスに対する除湿条件が同じであることから、除湿装
置を共通にする機能的に同じ二つの除湿室２２，２３を
一つの除湿槽２４に備えさせると共に、各除湿室２２，
２３にドレン流路２５，２６を接続させて除湿手段１８
を構成している。The dehumidifying means 18 is provided for performing a gas analysis in a state in which the measurement gas and the comparative gas are placed under almost the same low humidity conditions to avoid the influence of humidity due to humidification. Since the gas and the comparative gas are controlled to have substantially the same humidity in the previous step and are alternately supplied to the cell of the analysis section at a constant cycle, the gas flow rates are also substantially the same,
Since the dehumidifying conditions for both gases are the same, two functionally identical dehumidifying chambers 22 and 23 having a common dehumidifying device are provided in one dehumidifying tank 24, and each dehumidifying chamber 22,
The drain passages 25 and 26 are connected to the dehumidifier 18.
Is composed.
【００１１】上記の構成によれば、測定ガス中の被測定
対象ガスの濃度に近似させた比較ガスをセルに供給させ
るようにしたことで、被測定対象ガスの僅かな濃度変化
を高精度で分析することができる。一方、高精度の標準
ガスについても、これを測定ガス供給路２における加湿
手段７の上流側に供給させるようにしているので、当該
標準ガスの湿度も測定ガスと同じ湿度条件下に置かれて
ガス分析計２に導入されることになり、校正が精度よく
行われるのである。[0011] According to the above configuration, the comparative gas approximating the concentration of the gas to be measured in the measurement gas is supplied to the cell, so that a slight change in the concentration of the gas to be measured can be performed with high accuracy. Can be analyzed. On the other hand, the high-precision standard gas is also supplied to the upstream side of the humidifying means 7 in the measurement gas supply path 2, so that the humidity of the standard gas is also set under the same humidity condition as the measurement gas. This is introduced into the gas analyzer 2, and the calibration is performed with high accuracy.
【００１２】そして、基準ガスのゼロガスによる希釈ガ
スを比較ガスとして用いるので、比較ガスの消費量が大
であってもガス分析を経済的に行うことができる上に、
例えばボンベに充填されている基準ガスを用いる場合の
当該ボンベの交換頻度が、ゼロガスによる高濃度基準ガ
スの希釈比に反比例して低くなる。しかも、測定ガスを
乾燥ガスである比較ガスと同じような超低湿度の条件下
に置くのではなく、測定ガスと比較ガスを一旦加湿させ
て後に除湿させて、両ガスを同じ低湿度の条件下に置く
ことによって、実質的に測定ガスの湿度を比較ガスの湿
度に合わせる超低湿度化と変わりのない制御で、測定ガ
スの湿度変化すなわち水分分圧の変化が濃度変化に繋が
る事態を回避さつつ、加湿による湿度影響を回避させた
状態でガス分析が好適に行われる。[0012] Since the reference gas is a diluent gas with zero gas as the reference gas, gas analysis can be performed economically even if the consumption of the reference gas is large.
For example, when the reference gas filled in the cylinder is used, the replacement frequency of the cylinder decreases in inverse proportion to the dilution ratio of the high-concentration reference gas with zero gas. In addition, instead of placing the measurement gas under the same ultra-low humidity conditions as the comparative gas that is a dry gas, the measurement gas and the comparison gas are once humidified and then dehumidified, and both gases are subjected to the same low-humidity condition. By placing it underneath, it is possible to avoid a situation in which a change in the humidity of the measurement gas, that is, a change in the partial pressure of water, leads to a change in the concentration, with the same control as the ultra-low humidity that substantially matches the humidity of the measurement gas with the humidity of the comparison gas On the other hand, gas analysis is suitably performed in a state where the influence of humidity due to humidification is avoided.
【００１３】[0013]
【発明の効果】以上説明したように本発明は、測定ガス
中の被測定対象ガスと同じ成分で且つ被測定対象ガスの
濃度に近似させた比較ガスをセルに流して、被測定対象
ガスの僅かな濃度変化を高精度で分析させるようにし、
かつ、前記測定ガスと比較ガスとを交互にセルに流すに
際して、測定ガスを乾燥ガスである比較ガスと同じよう
な超低湿度の条件下に置くのではなく、測定ガスと比較
ガスを一旦加湿させて後に除湿させて、両ガスを同じ低
湿度の条件下に置くことによって、実質的に測定ガスの
湿度を比較ガスの湿度に合わせる超低湿度化と変わりの
ない制御で、測定ガスの湿度変化すなわち水分分圧の変
化が濃度変化に繋がる事態を回避させつつ、加湿による
湿度影響を回避させた状態でガス分析が好適に行われ
る。 As described above, according to the present invention, a reference gas having the same component as the gas to be measured and approximating the concentration of the gas to be measured flows through the cell, Analyze small concentration changes with high accuracy,
In addition, when the measurement gas and the comparison gas are alternately flowed through the cell, the measurement gas and the comparison gas are temporarily humidified instead of being placed under the same ultra-low humidity condition as the comparison gas that is a dry gas. Then, after dehumidifying and placing both gases under the same low-humidity condition, the humidity of the measurement gas can be controlled substantially the same as the ultra-low humidity that matches the humidity of the measurement gas with the humidity of the comparison gas. The gas analysis is preferably performed in a state in which the change, that is, the change in the water partial pressure leads to the concentration change, while avoiding the influence of humidity due to humidification.
You.
【００１４】また、上記したように、測定ガスを乾燥ガ
スである比較ガスと同じような超低湿度の条件下に置く
のではなく、単に両ガスを加湿させて後に低湿度に除湿
させるだけであるから、被測定対象ガスの僅かな濃度変
化を高精度で分析できる装置の測定ガスと比較ガスとの
湿度調整がローコストで達成される。 Further, as described above, the measurement gas rather than to conditions of similar ultra-low humidity and reference gas is a dry gas, simply let dehumidification in low humidity after by humidifying both gas some because, Ru is achieved by a humidity adjusting the reference gas and the measuring gas apparatus capable of analyzing a slight change in concentration of the measurement target gas with high accuracy low cost.
【００１５】[0015]
しかも、ゼロガスにより希釈された希釈ガIn addition, the dilution gas diluted with zero gas
スを比較ガスとして用いるので、比較ガスの消費量が大Gas is used as the comparison gas, the consumption of the comparison gas is large.
であってもガス分析を経済的に行うことができる上に、Even though gas analysis can be performed economically,
例えばボンベに充填されている基準ガスを用いる場合のFor example, when using the reference gas filled in the cylinder
当該ボンベの交換頻度を、ゼロガスによる高濃度基準ガThe frequency of replacement of the cylinder should be
スの希釈比に反比例して低くできる。Can be reduced in inverse proportion to the dilution ratio.
【図１】流体変調式のガス分析装置の原理図である。FIG. 1 is a principle diagram of a fluid modulation type gas analyzer.
３…比較ガスの供給路、１４，１９，２０…比較ガス供
給手段（ガス希釈手段，ゼロガス精製手段，基準ガス供
給手段）、７，１５…加湿手段、１８…除湿手段。3. Reference gas supply path, 14, 19, 20 Reference gas supply means (gas diluting means, zero gas purification means, reference gas supply means), 7, 15 ... Humidifying means, 18 ... Dehumidifying means.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 熊崎 脩 愛知県名古屋市天白区島田２丁目301号 (72)発明者 石本 秀一 京都府京都市南区吉祥院宮の東町２番地 株式会社堀場製作所内 (72)発明者 三笠 元 京都府京都市南区吉祥院宮の東町２番地 株式会社堀場製作所内 (72)発明者 嘉田 教夫 京都府京都市南区吉祥院宮の東町２番地 株式会社堀場製作所内 (72)発明者 山田 毅 京都府京都市南区吉祥院宮の東町２番地 株式会社堀場製作所内 (56)参考文献 特開 昭64−35348（ＪＰ，Ａ) 特開 平３−242530（ＪＰ，Ａ) 特開 平１−174945（ＪＰ，Ａ) 特公 昭60−38655（ＪＰ，Ｂ２) 特公 平６−103263（ＪＰ，Ｂ２) 実公 昭60−9715（ＪＰ，Ｙ２) ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Osamu Kumazaki 2-301 Shimada, Tempaku-ku, Nagoya City, Aichi Prefecture 72) Inventor Mikasa Gen, 2nd Higashi-cho, Kichijoin-gu, Minami-ku, Kyoto, Kyoto, Japan Inside the Horiba Seisakusho Co., Ltd. Inventor Takeshi Yamada 2 Higashi-cho, Kichijoin-gu, Minami-ku, Kyoto, Kyoto Inside Horiba, Ltd. (56) References JP-A 64-35348 (JP, A) JP-A-3-242530 (JP, A) Hei 1-174945 (JP, A) JP 60-38655 (JP, B2) JP 6-103263 (JP, B2)
Claims (2)
ほゞ近似するようゼロガスにより希釈された希釈ガスを
比較ガスとして用い、分析部のセルに前記比較ガスと測
定ガスとを一定の周期で交互に供給して、測定ガス中の
被測定対象ガスの濃度を分析するようにした流体変調式
のガス分析装置であって、前記比較ガスの供給路に前記
比較ガスの供給手段を接続すると共に、前記比較ガスと
前記測定ガスを各別に且つほゞ同じ湿度に加湿させる加
湿手段と、加湿後において両ガスを各別に且つ同じ湿度
に除湿させる除湿手段とを設けてあることを特徴とする
流体変調式のガス分析装置。(1) The same component as the gas to be measured and the concentration is
Dilute gas diluted with zero gas to approximate
Used as reference gas, the said comparison gas cell analyzer and measuring gas is supplied alternately in a constant cycle, gas analysis of a fluid modulation type which is adapted to analyze the concentration of the measurement target gas in the measurement gas an apparatus, as well as connecting the supply means of the <br/> comparison gas supply path of the reference gas, a humidifying means for humidifying the reference gas and the measuring gas and Ho Isuzu same humidity separately, humidification A dehumidifying means for dehumidifying both gases separately and to the same humidity later, wherein a fluid modulation type gas analyzer is provided.
手段の上流側に校正用の標準ガスの供給手段が接続され
ていることを特徴とする請求項１に記載された流体変調
式のガス分析装置。2. The fluid modulation type of claim 1, wherein a supply means of a standard gas for calibration is connected to an upstream side of the humidification means provided in the supply path of the measurement gas. Gas analyzer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4089696A JP2696692B2 (en) | 1992-03-13 | 1992-03-13 | Fluid modulation type gas analyzer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4089696A JP2696692B2 (en) | 1992-03-13 | 1992-03-13 | Fluid modulation type gas analyzer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05256777A JPH05256777A (en) | 1993-10-05 |
| JP2696692B2 true JP2696692B2 (en) | 1998-01-14 |
Family
ID=13977935
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4089696A Expired - Fee Related JP2696692B2 (en) | 1992-03-13 | 1992-03-13 | Fluid modulation type gas analyzer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2696692B2 (en) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07113605B2 (en) * | 1987-07-31 | 1995-12-06 | 株式会社島津製作所 | Gas analyzer |
| JPH06103264B2 (en) * | 1987-12-29 | 1994-12-14 | 株式会社堀場製作所 | Gas analyzer |
-
1992
- 1992-03-13 JP JP4089696A patent/JP2696692B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH05256777A (en) | 1993-10-05 |
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