JP2691312B2 - Package for storing semiconductor elements - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to an improvement in a semiconductor device housing package for housing a semiconductor device.

(Prior Art) Conventionally, a package for accommodating a semiconductor element, particularly a package for accommodating a glass-encapsulated semiconductor element sealed by welding glass, includes an insulating base and a lid, and accommodates the semiconductor element inside. And an external lead terminal for electrically connecting a semiconductor element housed in the container to an external electric circuit,
A glass member for sealing is applied in advance on the opposing main surfaces of the insulating base and the lid, and external lead terminals are fixed on the main surface of the insulating base, and each electrode of the semiconductor element and the external lead terminal are wired. After the bond connection, the semiconductor element is hermetically sealed inside by fusing and integrating a sealing glass member attached to each of the insulating base and the lid.

(Problems to be Solved by the Invention) However, in the conventional glass-encapsulated semiconductor element housing package, the external lead terminal is usually a kovar (29 wt.
% Ni-16wt% Co-55wt% Fe alloy) or 42Alloy (42wt
% Ni-58 wt% Fe alloy), and Kovar, 42 Alloy, etc. have the following drawbacks because of their low electrical conductivity.

That is, Kovar and 42Alloy have a conductivity of 3.0 to 3.5% (IAC
S) and low. Therefore, when a signal is propagated to an external lead terminal made of Kovar or 42Alloy, the signal propagation speed becomes extremely slow, and semiconductor devices that perform high-speed driving cannot be accommodated. The number of electrodes of a semiconductor element has increased significantly with the progress of higher density and higher integration of semiconductor elements housed inside the semiconductor device, and wires of external lead terminals for connecting each electrode of the semiconductor element to an external electric circuit. The width has also become extremely narrow. Therefore, the external lead terminal has become extremely large in electrical resistance in conjunction with the low conductivity of Kovar and 42Alloy described above, and when a signal is propagated to the external lead terminal, the external lead terminal The signal is greatly attenuated due to the electric resistance, and the signal cannot be accurately input to the semiconductor element housed inside,
It has the drawback of causing malfunctions in semiconductor devices.

(Object of the Invention) The present invention has been devised in view of the above-mentioned drawbacks, and an object of the present invention is to minimize signal attenuation at an external lead terminal and to reliably input and output a signal to a semiconductor element housed therein. It is therefore an object of the present invention to provide a semiconductor element storage package that enables the semiconductor element to operate normally and stably for a long period of time.

Another object of the present invention is to provide a semiconductor element housing package capable of housing a semiconductor element which operates at high speed.

(Means for Solving the Problem) The present invention comprises an insulating container having an insulating base and a lid, and having a void space for housing a semiconductor element therein, and a semiconductor element housed in the container being electrically connected to an external electrical device. In a package for housing a semiconductor element, which comprises an external lead terminal for connecting to a circuit, the insulating substrate and the lid are made of a silicon carbide chamber sintered body, and the external lead terminal is provided on the upper and lower surfaces of a plate-shaped body made of an Invar alloy. It is characterized in that it is formed of a metal body in which a copper plate having a thickness of 10 to 20% of the thickness of the plate-like body is joined.

(Example) Next, the present invention will be described in detail with reference to the accompanying drawings.

1 and 2 show an embodiment of a package for accommodating a semiconductor element according to the present invention, wherein 1 is an insulating base and 2 is a lid. The insulating container 3 is constituted by the insulating base 1 and the lid 2.

The insulating base 1 and the lid 2 are each provided with a concave portion for forming a space for accommodating a semiconductor element at the center thereof, and the semiconductor element 4 is formed of resin, glass, brazing agent on the bottom surface of the concave portion of the insulating base 1. It is attached and fixed via an adhesive such as.

The insulating base 1 and the lid 2 are made of a silicon carbide sintered body, and silicon carbide (SiC) and beryllia are placed in a press die having a shape corresponding to the insulating base 1 and the lid 2 as shown in FIG. It is manufactured by filling a raw material powder such as (BeO) and then firing it at a temperature of about 2000 to 2200 ° C. while applying a constant pressure thereto.

The thermal expansion coefficient of the silicon carbide sintered body forming the insulating base 1 and the lid 2 is about 37 × 10 ⁻⁷ / ° C., and the relationship with the thermal expansion coefficient of the sealing glass member described later. In, there is no large difference in thermal expansion between the insulating substrate 1 and the lid body 2 and the sealing glass member.

Further, a glass member 6 for sealing is previously formed on the opposing main surfaces of the insulating base 1 and the lid 2.
The semiconductor element 4 in the insulating container 3 is hermetically sealed by heating and melting the sealing glass member 6 attached to each of the insulating base 1 and the lid 2 to be integrated.

The sealing glass member 6 adhered to the opposing main surfaces of the insulating substrate 1 and the lid 2 is made of, for example, lead borosilicate glass to which a filler is added, and lead oxide (PbO) as a raw material powder is used. ) 70.0-90.0wt%, boron oxide (B ₂ O ₃ ) 1
2.0 to 13.0 wt%, silica (SiO ₂ ) 0.5 to 3.0 wt% and alumina (Al ₂ O ₃ ) 0.5 to 3.0 wt% lead titanate (PbTiO ₃ ) as a filler, β-eucryptite (Li ₂ Al ₂ Si
₂ O ₈ ), cordierite (Mg ₂ Al ₄ Si ₅ O ₁₈ ), zircon (ZrS
iO ₄ ), tin oxide (SnO ₂ ), uremite (Zn ₂ SiO ₄ ) and the like are added and mixed in an amount of 30 to 50 vol%, and the mixed powder is added to 950 to
It is manufactured by heating and melting at a temperature of 1100 ° C. This lead borosilicate glass has a coefficient of thermal expansion of 40
It is ~ 60 x 10 ^-7 / ° C.

The sealing glass member 6 has a thermal expansion coefficient of 40 to 60 ×.
10 ⁻⁷ / ° C., which is close to the thermal expansion coefficient of each of the insulating base 1 and the lid 2, so that the sealing glass member 6 attached to each of the insulating base 1 and the lid 2 is heated and melted. When the semiconductor element 4 in the insulating container 3 is hermetically sealed by being integrated with each other, due to the difference in thermal expansion coefficient between the insulating substrate 1 and the lid 2 and the sealing glass member 6. Almost no thermal stress is generated, and the insulating base body 1 and the lid body 2 can be firmly bonded to each other through the sealing glass member 6.

The sealing glass member 6 is made of a glass paste obtained by adding a suitable organic solvent and a solvent to a powder of lead borosilicate glass to which a filler has been added by employing a conventionally well-known thick film method. 1 and the cover 2 are attached to the opposing main surfaces.

The sealing glass member 6 is not limited to lead borosilicate glass to which a filler is added, and any glass having a coefficient of thermal expansion of 40 to 60 × 10 ⁻⁷ / ° C. can be used. Can be used.

An external lead terminal 5 made of a conductive material is disposed between the insulating base 1 and the lid 2. The external lead terminal 5 is electrically connected to each electrode of the semiconductor element 4 via a wire 7. By connecting the external lead terminal 5 to an external electric circuit, the semiconductor element 4 is connected to the external electric circuit.

The external lead terminals 5 are formed by melting and integrating a sealing glass member 6 attached to the opposing main surfaces of the insulating base 1 and the lid 2, and simultaneously sealing the insulating container 3 with the insulating base 1.
And the cover 2.

The external lead terminals 5 are made of a metal body in which a copper plate having a thickness of 10 to 20% of the thickness of the plate-like body is joined to the upper and lower surfaces of the plate-like body made of Invar alloy, and the conductivity thereof is 21.7%.
(IACS), coefficient of thermal expansion is about 40 × 10 ^-7 / ° C.

The external lead terminal 5 is made of Invar alloy (36.5 wt%
It is formed by press-contacting copper (Cu) plates on the upper and lower surfaces of a plate-shaped body made of Ni-63.5 wt% Fe alloy), and then rolling this.

If the thicknesses of the plate-shaped body and the copper plate of the external lead terminal 5 deviate from the above-mentioned ranges, the electrical conductivity of the external lead terminal 5 does not reach a desired large value, and the thermal expansion coefficient of the insulating base body and the lid body is also increased. It does not match the coefficient. Therefore, the external lead terminals 5 are limited to those formed of a metal body in which a copper plate having a thickness of 10 to 20% of the thickness of the plate-like body is joined to the upper and lower surfaces of the plate-like body made of Invar alloy.

The external lead terminal 5 has a conductivity of 21.7% (IACS).
Since the electric current can easily flow, the signal propagation speed of the external lead terminal 5 can be made extremely fast, and even if the semiconductor element 4 housed in the insulating container 3 is driven at high speed, The input and output of signals to and from the circuit can always be stable and reliable.

Further, since the electrical conductivity of the external lead terminal 5 is high, the electrical resistance of the external lead terminal 5 can be kept low even if the line width of the external lead terminal 5 is reduced, and as a result, signal attenuation at the external lead terminal 5 is achieved. The electric signal supplied from the external electric circuit can be accurately input to the semiconductor element 4 housed therein with the minimum value.

Further, the coefficient of thermal expansion of the external lead terminal 5 is about 40 ×.
Since it is 10 ⁻⁷ / ° C., which is close to the thermal expansion coefficient of the sealing glass member 6, the external lead terminal 5 is connected to the insulating base 1 and the lid 2.
When fixing using the sealing glass member 6 between them, no thermal stress is generated between the external lead terminal 5 and the sealing glass member 6 due to the difference in the coefficient of thermal expansion between them. ,
The external lead terminal 5 can also be firmly fixed by the sealing glass member 6.

Thus, according to the package for accommodating the semiconductor element, the semiconductor element 4 is attached and fixed to the bottom surface of the concave portion of the insulating base 1 and each electrode of the semiconductor element 4 is connected to the bonding wire 7.
After that, the sealing glass member 6 in which the insulating substrate 1 and the lid 2 are previously adhered to the opposing main surfaces of the insulating substrate 1 and the lid 2 is removed. The semiconductor device as a final product is completed by joining by melting and integrating.

(Effects of the Invention) According to the package for accommodating a semiconductor element of the present invention, the insulating substrate and the lid constituting the insulating container for accommodating the semiconductor element are made of a silicon carbide sintered body, and the external lead terminals are made of an Invar alloy. A copper plate having a thickness of 10 to 20% is bonded to the upper and lower surfaces of a plate-shaped body made of a conductive material having a conductivity of 21.7%.
(IACS), the coefficient of thermal expansion is about 40 × 10 ^-7 / ° C. Because it is made of a metal body, the signal propagation speed of the external lead terminal can be extremely fast, and the semiconductor element housed in the insulating container can be Even when driven at high speed, it is possible to always stably and surely input and output signals between the semiconductor element and the external electric circuit.

Also, even if the line width of the external lead terminal is reduced, the electric resistance of the external lead terminal can be kept low. The supplied electric signal can be input accurately.

Further, the thermal expansion coefficient of the external lead terminal is close to the thermal expansion coefficient of each of the insulating base, the lid and the sealing glass member,
Even when the external lead terminals are sandwiched between the insulating base and the lid, and each of them is attached and bonded by the sealing glass member, the external lead terminals and the sealing are provided between the insulating base and the lid and the sealing glass member. No thermal stress due to the difference in the coefficient of thermal expansion is generated between the glass member and the glass member, and it is possible to firmly attach and bond all of them.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view showing one embodiment of a package for housing a semiconductor element according to the present invention, and FIG. 2 is a plan view of the package shown in FIG. DESCRIPTION OF SYMBOLS 1 ... Insulating base 2 ... Lid 3 ... Insulating container 5 ... External lead terminal 6 ... Glass member for sealing

Claims (1)

(57) [Claims] 1. An insulating container comprising an insulating base and a lid, and having a space for housing a semiconductor element therein, and an external container for connecting the semiconductor element housed in the container to an external electric circuit. In a package for accommodating a semiconductor element comprising lead terminals, the insulating substrate and the lid are made of a silicon carbide sintered body, and the external lead terminals are provided on the upper and lower surfaces of a plate-shaped body made of an Invar alloy and have a thickness of the plate-shaped body. A package for housing a semiconductor element, which is formed of a metal body in which copper plates having a thickness of 10 to 20% are joined.