JP2680935B2 - Sheet enlarger - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sheet expanding machine for stretching a sheet having a semiconductor wafer attached thereto in a semiconductor device assembling process.

[0002]

2. Description of the Related Art A conventional sheet expanding machine is divided into individual pellets on a vinyl sheet 8 stretched over a stainless steel ring 9 as shown in the sectional view of FIG. 4 and the plan view of FIG. The wafer 7 is attached, and the stainless ring 9 is fixed by the clamp 6, and then, as shown in FIG.
As shown in the cross-sectional view of FIG. 7 and the plan view of FIG. 7, the disk-shaped heater plate 1a is pushed up by the shaft 5 and the sheet 8 is stretched, and the wafer 7 on the sheet 8 is expanded into individual pellets 10. To separate. Conventionally, FIG.
As shown in the cross-sectional view of FIG. 3, an internal heater 3a of the heater plate 1a is provided, and by heating the heater 3a, the upper surface temperature of the heater plate 1a rises, and the shaft 5 fixed to the heater plate 1a is raised to raise the seat. 8 has a mechanism for heating and stretching.

[0003]

In the mechanism of the conventional sheet enlarging machine, since the temperature of the surface of the heater plate 1a is uniform, when the heater plate 1a rises, the sheet 8 starts to spread from the outer peripheral portion and the stretching is completed. At this time, there is a problem that the distance between adjacent pellets 10 is different between the outer peripheral portion and the central portion of the wafer 7.
As a result, there is a problem that a position shift occurs when the pellets are adsorbed in the next step, and the pellets are damaged or chipped.

[0004]

In the sheet expanding machine of the present invention, a heater plate is divided into an outer peripheral portion and a central portion, and a heater is incorporated in each of them, and the surface temperature of the heater plate is set to the outer peripheral portion and the central portion. It has a structure that can be changed depending on the department. As a result, when the sheet is stretched, the sheet elongation rate changes depending on the temperature difference between the central portion and the outer peripheral portion, and the pellets are arranged uniformly.

[0005]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described with reference to the drawings.

FIG. 1 is a plan view of an embodiment of the present invention, and FIG. 2 is a sectional view taken along the line AA. The heater plate is concentrically divided into heater plates 1 and 2, and heaters 3 and 4 are attached to them, respectively. By heating the heaters 3 and 4, the surface temperature of the heater plates 1 and 2 rises. According to the present invention, if the heater 3 is set to 50 ° C. and the heater 4 is set to 60 ° C., the heater plate 1 becomes 50 ° C., the heater plate 2 becomes 60 ° C. Since the central part of the above is higher than the outer peripheral part by 10 ° C., when the sheet is expanded, the central part or the outer peripheral part starts to spread evenly, and the intervals between the adjacent pellets 10 become equal in the central part and the outer peripheral part.

In this embodiment, the intervals between the adjacent pellets 10 can be adjusted by changing the set temperatures of the heater 3 and the heater 4 shown in FIGS.

[0008]

As described above, according to the present invention, since two heaters are incorporated in a heater plate and a temperature difference is given to a sheet in contact with the heater plate, the outer peripheral portion does not spread quickly, so that the interval between pellets is reduced. It is possible to make adjustments, prevent damage and chipping of pellets in the next step, and improve workability.

[Brief description of the drawings]

FIG. 1 is a plan view of an embodiment of the present invention.

FIG. 2 is a sectional view taken along line AA of FIG.

FIG. 3 is a cross-sectional view of a conventional heater plate.

FIG. 4 is a sectional view showing an example of a sheet enlarging mechanism.

FIG. 5 is a plan view of FIG.

FIG. 6 is a cross-sectional view showing a state where a sheet is enlarged.

FIG. 7 is a plan view of FIG. 6;

[Explanation of symbols]

 1a, 1, 2 heater plate 3a, 3, 4 heater 5 axis 6 clamp 7 wafer 8 sheet 9 stainless steel ring 10 pellet

Claims (1)

(57) [Claims] 1. A method for assembling a semiconductor device, wherein a semiconductor wafer cut into individual pellets is attached to a sheet,
Stretching pushes up the sheet by a heater plate, the sheet expansion machine for separating the pellets individually, the bonded
A sheet enlarging machine, characterized in that the heater plate is divided into an outer peripheral portion and a central portion within a range of the attached semiconductor wafer, and a heater is provided for each of the outer peripheral portion and the central portion.