JP2672306B2 - Fe-based amorphous alloy - Google Patents

Description

TECHNICAL FIELD The present invention relates to an Fe-based amorphous alloy suitable for various magnetic components such as supersaturated reactors, transformers, choke coils, etc., and particularly a magnetic core used at a high frequency of 20 kHz or more. The present invention relates to a Fe-based amorphous alloy suitable as a material. [Prior Art] Conventionally, ferrite has been mainly used as a magnetic core material for high frequency transformers, chokes, supersaturated reactors, etc. because of its advantages such as high resistance and little eddy current loss. However, since ferrite has a low saturation magnetic flux density and poor temperature characteristics, it is difficult to miniaturize the magnetic core. In recent years, an amorphous alloy having a high saturation magnetic flux density has been considered promising as a material that can face conventional magnetic core materials, and various compositions have been developed. Amorphous alloys are mainly divided into Fe-based alloys and Co-based alloys.Fe-based amorphous alloys have the advantage that the material cost is cheaper than Co-based alloys, but they generally have a larger core loss than Co-based amorphous alloys at high frequencies. There is a problem that magnetic susceptibility is also low. On the other hand, a Co-based amorphous alloy has a small high-frequency core loss and a high magnetic permeability, but has a large core loss and a large change over time in the magnetic permeability. Furthermore, since expensive Co is used as a main raw material, disadvantages in terms of price are inevitable. Under such circumstances, various proposals have been made for Fe-based amorphous magnetic alloys. JP-B-60-17019 discloses that 74 to 84 atomic% of Fe and 8 to 24
Atomic% B, 16 atomic% or less Si and 3 atomic% or less C
Crystalline particles of an alloy component having a composition consisting of at least one of, and having at least 85% of its structure in the form of an amorphous metal matrix, and being discontinuously distributed throughout the amorphous metal matrix. The crystalline particles have an average particle size of 0.05 to 1 μm and 1 to
It has an average interparticle distance of 10 μm and the particle group is
Disclosed is an iron-based boron-containing magnetic amorphous alloy characterized by occupying an average volume fraction of 0.01 to 0.3. The crystalline particle group of this alloy is said to be a discontinuous α- (Fe, Si) particle group that acts as a pinning point for the domain wall. The JP 60-52557 is _{Fe a Cu b B c Si d} ( provided that 75 ≦ a
≦ 85, 0 <b ≦ 1.5, 10 ≦ c ≦ 20, d ≦ 10 and c + d ≦ 3
0) is disclosed. This amorphous magnetic alloy is heat-treated below the crystallization temperature and above the Kyoly temperature. Further, JP-A-63-60303 discloses a high magnetic permeability amorphous alloy characterized by containing 1 to 50% of a crystal phase. Among them, it is said that an amorphous alloy having a composition of Fe ₄₀ Ni ₄₀ P ₁₄ B ₆ was heat-treated to form a crystal phase of 1 to 50% and an effective magnetic permeability of more than 1000 was obtained. [Problems to be solved by the invention] In the Fe-based soft magnetic alloy of Japanese Examined Patent Publication No. 60-17019, the core loss is reduced due to the presence of discontinuous crystalline particles, but the core loss is still large, and Permeability is not as good as that of Co-based amorphous alloys, and is not satisfactory as a core material for high frequency transformers and choke coils. On the other hand, the Fe-based amorphous alloy disclosed in JP-A-60-52557 is Cu.
However, the core loss is reduced due to the inclusion of Fe, but it is not satisfactory like the Fe-based amorphous alloy containing crystalline particles. Further, the Fe ₄₀ Ni ₄₀ P ₁₄ B ₆ amorphous alloy containing 1 to 50% of the crystal phase shown in the examples in JP-A-53-60303 is equivalent to a Co-based amorphous alloy exceeding 5000. High magnetic permeability cannot be obtained. As described above, although attempts have been made to improve the soft magnetic characteristics by precipitating a crystalline phase in the amorphous alloy, sufficient high magnetic permeability characteristics have not been obtained. Therefore, the object of the present invention is to obtain ultrafine bccFe solid solution crystal grains.
High frequency magnetic properties including less than 0%, especially Fe with high effective permeability
To provide a base amorphous alloy. [Means for Solving Problems] As a result of earnest research to achieve the above object, the present inventors have found that an alloy containing Fe and an amorphous forming element as a basic component.
When Cu and at least one element selected from Nb, Ta, W, Zr, Hf, Ti, V, Cr, Mn and Mo are added in combination, heat treatment of an amorphous alloy of the above composition produces an ultrafine bccFe solid solution. It is found that grains are easily formed in the amorphous matrix and that the crystal grains are precipitated ultrafinely, so that an Fe-based amorphous alloy having excellent soft magnetic characteristics, particularly high-frequency magnetic characteristics, can be obtained, and the present invention is conceived. did. The Fe-based amorphous alloy of the present invention is one or two of Cu: 0.1 to 3 atomic%, Si: 30 atomic% or less and B25 atomic% or less,
0.1 to 20 atomic% of M '(M' is Nb, Ta, W, Zr, Hf, Ti, V, Cr, M
At least one element selected from the group consisting of n and Mo, the sum of Si, B and M'is 14 to 35 atom%, and the balance is Fe, and less than 50% of the structure has a grain size of 1000Å It is characterized in that it consists of bccFe solid solution crystal grains having the following average grain size, and that the crystal grains are distributed in the amorphous matrix with an average interparticle distance of 1 μm or less. In the present invention, Cu is an essential element, and its content is in the range of 0.1 to 3 atom%. If less than 0.1 atomic%
The effect of increasing the magnetic permeability due to the addition of Cu is small and crystal grains are likely to form unevenly. On the other hand, if it exceeds 3 atomic%, the magnetic permeability tends to decrease. If Cu is not added, a compound phase will be easily formed. In the present invention, the particularly preferable Cu content is 0.5 to 2 atomic%, and in this range, the magnetic permeability is particularly high and the fine bccF is fine.
e Solid solution crystal grains are easily generated. The reason for the Cu permeability increasing bccFe solid solution crystal grain refining action is considered as follows. Since the interaction parameter between Cu and Fe is positive and the solid solubility is low and tends to separate, heating the amorphous alloy causes Fe atoms or Cu atoms or Cu atoms to gather and form clusters. Composition fluctuation occurs. For this reason, a large number of regions that are likely to be partially crystallized are formed, and fine crystal grains having the nuclei as the nuclei are generated. This crystal has Fe as a main component. Due to the large number of crystal nuclei created by Cu addition and the fact that crystal grains do not grow easily, fine crystal grains that are almost uniformly distributed are formed by heat treatment.This action is caused by Nb, Ta, W, Zr, Hf, Ti, M
It is thought that the existence of such things as o will remarkably strengthen it. That is N
At least one element selected from the group consisting of b, Ta, W, Zr, Hf, Ti, V, Cr, Mn and Mo (hereinafter referred to as element M ′) is a crystal grain precipitated by complex addition with Cu. It has the effect of suppressing the growth and refining the crystal grains. M'has the effect of increasing the crystallization temperature of the alloy, but has the effect of forming clusters and lowering the crystallization temperature, and suppresses the growth of the crystal grains, resulting in the refinement of the precipitated crystal grains. it is conceivable that. The content of M'is preferably in the range of 0.1 to 20 atomic%. If it is less than 0.1 atom%, the magnetic permeability is insufficient and
This is because if it exceeds atomic%, the saturation magnetic flux density will be significantly reduced. A particularly desirable range is 1 to 10 atomic%, and excellent soft magnetism can be obtained in this range. When M'is absent, the crystal grains are not so finely refined that even if the crystal grains are generated, the magnetic permeability is not rapidly improved. In addition, since a fine crystalline phase containing Fe as a main component is generated in this alloy, the magnetostriction is smaller than that of a completely amorphous alloy, and the magnetic anisotropy due to internal stress-strain is also small, and the soft magnetic characteristics are improved. This is considered to be one of the reasons why When Cu is not added, ultrafine crystal grains are hard to form and the distribution is non-uniform, and since the compound phase is easily formed, the magnetic permeability is not so improved even if the crystal phase is formed. Si and B are elements useful for forming an amorphous.
When the Si content exceeds 30 atomic%, the saturation magnetic flux density is lowered. If the B content exceeds 25 atomic%, the saturation magnetic flux density is significantly reduced. Particularly preferably, the Si content range is 6 to
The range of 25 atomic% and B content is 2 to 25 atomic%, and the combined range of Si content and B content is 14 to 30 atomic%. The present alloy may contain 20 atomic% or less of at least one element selected from the group consisting of G, Ge, P, Ga, Sb, In, Be and As (hereinafter, element X). If it exceeds 20 atom%, the saturation magnetic flux density is remarkably lowered, which is not preferable. The sum of Si, B, M'and X is 14 to 35 atom%. If it is less than 14 atom%, it is difficult to amorphize, and if it exceeds 35 atom%, the saturation magnetic flux density is remarkably lowered, which is not preferable. This alloy contains 10 atomic% or more of at least one element selected from the group consisting of white metal elements, Al, Sc, Y, rare earth elements, Au, Zn, Sn and Re (hereinafter element M ″). M ″ has the effect of improving the corrosion resistance and adjusting the magnetostriction. When the content of M ″ exceeds 10 atomic%, the saturation magnetic flux density is remarkably reduced. This alloy is not suitable for Li, Mg, Ca, Sr, Ba, Ag, Cd, Pb, Bi, N, O, S, Se and T
At least one element selected from the group consisting of e may be contained in an amount of 2 atomic% or less. If it exceeds 2 atomic%, the magnetic properties are likely to deteriorate, which is not preferable. The balance is substantially Fe-excluding impurities, but Fe
Less than 50 at% may be replaced by Co and / or Ni.
If 50 atom% or more is substituted, high magnetic permeability cannot be obtained.
A particularly desirable substitution amount is less than 30 atomic%, and a particularly high magnetic permeability is obtained in this range. The Fe-based amorphous alloy of the present invention comprises less than 50% of the composition of bccFe solid solution crystal grains having an average grain size of 1000Å or less, and the crystal grains have an average interparticle distance of 1 μm or less. It has a texture distributed in the phases. In the alloy of the present invention, the bccFe solid solution crystal grains are 500Å
When the average particle size is below and the average interparticle distance is 5000 Å or less, high magnetic permeability is likely to occur,
Particularly high magnetic permeability can be obtained when the solid solution crystal grains have an average particle size of 20 to 200Å. When the ratio of the bccFe solid solution particles is 50% or more, more excellent characteristics can be obtained, but the crystalline phase becomes the main component, which falls outside the category of amorphous alloys. The Fe-based amorphous alloy of the present invention is usually produced as follows. First, from the molten metal of the above-mentioned predetermined composition, a ribbon-shaped almost 100% by known liquid quenching method such as single roll method, twin roll method, etc.
Amorphous alloy ribbons of amorphous phase are manufactured, or almost all are produced by vapor phase quenching method such as sputtering method or vapor method.
An amorphous alloy film with 100% amorphous phase is prepared. Next, this amorphous alloy is heated to deposit fine bccFe solid solution particles of 1000 Å or less in the amorphous phase. The heat treatment is usually performed at a temperature slightly lower than or equal to the crystallization temperature measured by DSC, but the heat treatment can be performed in a wider temperature range by changing the heat treatment time. The heat treatment is usually carried out in an inert gas atmosphere, but it may be carried out in vacuum or in the air. Further, it is possible to impart magnetic anisotropy or improve magnetic characteristics by performing heat treatment in a magnetic field or under stress. [Examples] Hereinafter, the present invention will be described in more detail with reference to Examples, but the present invention is not limited thereto. Example 1 Cu at 0.6 atomic%, Nb at 3.2 atomic%, Si at 13.7 atomic%,
A molten alloy having a composition of B9.2 atomic% and the balance Fe was rapidly cooled by a single roll method to obtain an alloy ribbon having a thickness of 20 μm and a width of 5 mm. As a result of X-ray diffraction, this alloy showed a halo pattern peculiar to amorphous, and no crystal peak was observed. Next, this alloy ribbon was wound in a toroidal shape with an outer diameter of 25 mm and an inner diameter of 20 mm and heat-treated at 450 ° C. for 1 hour and 500 ° C. for 1 hour. When heat treatment was performed at 450 ° C. for 1 hour, it was confirmed by X-ray diffraction and transmission electron microscope observation that it was in an amorphous single-phase state. On the other hand, when the heat treatment was carried out at 500 ° C. for 1 hour, it was confirmed that the particles were composed of bccFe solid solution particles which were distributed almost uniformly, as can be seen from the schematic view of the structure observed by the transmission electron microscope shown in FIG. A crystal peak was also recognized in the result of X-ray diffraction. The crystal grain size was about 100 to 200Å, and the average distance between crystal grains was 1000 Å or less. The proportion of crystal grains was less than 50%. Effective permeability at 100kHz μe _100K is 6800 in the amorphous state after heat treatment at 450 ℃ for 1 hour, and bccFe solid solution crystal grains after heat treatment at 500 ℃ for 1 hour 1
It was 4000. Example 2 An amorphous alloy having a composition shown in Table 1 and a plate thickness of 15 μm and a width of 5 mm was prepared by a single roll method, and the outer diameter was 13 mm and the inner diameter was 10 mm.
The effective magnetic permeability at 100kHz μe _100K was obtained by applying a heat treatment to keep the amorphous single phase as a toroidal magnetic core wound around and a heat treatment to contain less than 50% of bccFe solid solution crystal grains.
Was measured. Table 1 shows the effective permeability at 100kHz of amorphous single-phase core μe _a , bccFe ratio of effective permeability μe _b at 100kHz of solid core particles containing less than 50% μe _b / μe
shows the _a. Example 3 An amorphous alloy having a composition shown in Table 2 and a plate pressure of 18 μm and a width of 10 mm was produced by a single roll method, and the outer diameter was 22 mm and the inner diameter was 18 mm.
The core is wound around to form a toroidal core, and the following core is heat treated to partially precipitate the crystal phase and the effective permeability at 100 kHz μe
_100K was measured. Table 2 shows the obtained results. In the present invention, the crystal grains are smaller and μe _100K is higher. Example 4 A molten alloy consisting of 1.0 atomic% Cu, 3.0 atomic% Nb, 18.2 atomic% Si, B5.1 atomic% and the balance Fe was rapidly cooled by a single roll method to obtain an alloy thin film having a width of 5 mm and a thickness of 18 μm. A band was made. Next, this alloy was wound around an outer diameter of 18 mm and an inner diameter of 12 mm to form a toroidal magnetic core, which was heat treated under the conditions shown in Table 3 to measure the effective permeability at 100 kHz μe _100K and the saturation magnetostriction λ _S. The alloy structure of each magnetic core was observed with a transmission electron microscope to determine the proportion of crystal phase. Table 3 shows the obtained results. Example 5 An amorphous alloy film having a composition shown in Table 4 and a thickness of 3 μm was produced using a magnetron sputtering apparatus. Next, this alloy film was heat-treated to deposit bccFe crystal grains. As a result of observation with a transmission electron microscope, the alloy produced by the liquid quenching method had a structure similar to that in the case of heat treatment. Table 4 shows the average particle size and the proportion of the crystal phase. [Effects of the Invention] According to the present invention, it is possible to obtain an Fe-based amorphous alloy that is superior in high-frequency magnetic characteristics, particularly in magnetic permeability, to the conventional Fe-based amorphous alloy, so that the effect is remarkable.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a diagram showing an example of a structure of a Fe-based amorphous alloy according to the present invention observed by a transmission electron microscope.

Claims (1)

(57) [Claims] Cu is 0.1 to 3 atomic%, Si is 30 atomic% or less and B25 atomic% or less is one or two, and M ′ is 0.1 to 20 atomic% (M ′ is Nb, T
a, W, Zr, Hf, Ti, V, Cr, Mn, and at least one element selected from the group consisting of Mo, the total of Si, B, and M'is 14 to 35 atomic%), and the balance is Fe. Less than 50% of the structure is composed of bccFe solid solution crystal grains having an average grain size of 1000Å or less, and the grains are distributed in the amorphous matrix with an average interparticle distance of 1 μm or less. Fe-based amorphous alloy characterized by 2. Cu is 0.1 to 3 atomic%, Si is 30 atomic% or less and B25 atomic% or less is one or two, and M ′ is 0.1 to 20 atomic% (M ′ is Nb, T
at least one element selected from the group consisting of a, W, Zr, Hf, Ti, V, Cr, Mn and Mo, the sum of Si, B and M'is 14 to 35 atomic%) and Y is 2 atoms % Or less (Y is Li, Mg, Ca, Sr, Ba, Ag, C
d, Pb, Bi, N, O, S, Se and Te and at least one element selected from the group consisting of) and the balance Fe,
Less than 50% consists of bccFe solid solution crystal grains having an average grain size of 1000 Å or less, and the crystal grains are distributed in an amorphous matrix with an average interparticle distance of 1 μm or less. Fe based amorphous alloy. 3. Cu is 0.1 to 3 atomic%, Si is 30 atomic% or less and B25 atomic% or less is one or two, and M ′ is 0.1 to 20 atomic% (M ′ is Nb, T
a, W, Zr, Hf, Ti, V, Cr, Mn and at least one element selected from the group consisting of Mo), X is 20 atomic% or less (X is C, Ge,
At least one element selected from the group consisting of P, Ga, Sb, In, Be and As, the sum of Si, B, M'and X is 14 to 35 atomic%, and the balance is Fe. , Less than 50% of the structure consists of bccFe solid solution crystal grains having an average grain size of 1000Å or less, and the grains are distributed in the amorphous matrix with an average interparticle distance of 1 μm or less. Fe-based amorphous alloy. 4. Cu is 0.1 to 3 atomic%, Si is 30 atomic% or less and B25 atomic% or less is one or two, and M ′ is 0.1 to 20 atomic% (M ′ is Nb, T
a, W, Zr, Hf, Ti, V, Cr, Mn and at least one element selected from the group consisting of Mo), X is 20 atomic% or less (X is C, Ge,
At least one element selected from the group consisting of P, Ga, Sb, In, Be and As, the total sum of Si, B, M'and X is 14 to 35 atomic%, and Y is 2 atomic% or less (Y Is Li, Mg, Ca, Sr, Ba, Ag, Cd, P
b, Bi, N, O, S, Se and Te), and at least one element selected from the group consisting of
% Is composed of bccFe solid solution crystal grains having an average grain size of 1000 Å or less, and the grains are distributed in an amorphous matrix with an average interparticle distance of 1 μm or less. Fe-based amorphous alloy. 5. Cu is 0.1 to 3 atomic%, Si is 30 atomic% or less and B25 atomic% or less is one or two, and M ′ is 0.1 to 20 atomic% (M ′ is Nb, T
at least one element selected from the group consisting of a, W, Zr, Hf, Ti, V, Cr, Mn and Mo, the sum of Si, B and M'is 14 to 35 atomic%), and M "is 10 Atomic% or less (M ″ is a white metal element, Al,
Sc, Y, a rare earth element, at least one element selected from the group consisting of Au, Zn, Sn and Re), and the balance Fe, and less than 50% of the structure has an average grain size of 1000Å or less An Fe-based amorphous alloy comprising bccFe solid solution crystal grains having a diameter, and the crystal grains having an average interparticle distance of 1 μm or less and distributed in an amorphous matrix. 6. Cu is 0.1 to 3 atomic%, Si is 30 atomic% or less and B25 atomic% or less is one or two, and M ′ is 0.1 to 20 atomic% (M ′ is Nb, T
at least one element selected from the group consisting of a, W, Zr, Hf, Ti, V, Cr, Mn and Mo, the sum of Si, B and M'is 14 to 35 atomic%), and M "is 10 Atomic% or less (M ″ is a white metal element, Al, S
c, Y, at least one element selected from the group consisting of rare earth elements, Au, Zn, Sn, and Re), Y at 2 atomic% or less (Y is L
i, Mg, Ca, Sr, Ba, Ag, Cd, Pb, Bi, N, O, S, Se and Te and at least one element selected from the group consisting of), and a composition comprising the balance Fe, Less than 50% of the structure consists of bccFe solid solution crystal grains having an average grain size of 1000 Å or less, and the grains are distributed in the amorphous matrix with an average interparticle distance of 1 μm or less. Characteristic Fe-based amorphous alloy. 7. Cu is 0.1 to 3 atomic%, Si is 30 atomic% or less and B25 atomic% or less is one or two, and M ′ is 0.1 to 20 atomic% (M ′ is Nb, T
a, W, Zr, Hf, Ti, V, Cr, Mn and at least one element selected from the group consisting of Mo), M ″ is 10 atomic% or less (M ″ is a white metal element, Al, Sc, Y, rare earth element, at least one element selected from the group consisting of Au, Zn, Sn and Re), X is 20 atomic% or less (X is C, Ge, P, Ga, Sb, In, Be and As) At least one element selected from the group consisting of Si, B, M'and X is 14 to 35 atomic%, and the balance is Fe, and less than 50% of the structure has a grain size of 1000Å or less. BccFe with an average particle size of
A Fe-based amorphous alloy comprising solid solution crystal grains, wherein the crystal grains are distributed in an amorphous matrix with an average inter-particle distance of 1 μm or less. 8. Cu is 0.1 to 3 atomic%, Si is 30 atomic% or less and B25 atomic% or less is one or two, and M ′ is 0.1 to 20 atomic% (M ′ is Nb, T
a, W, Zr, Hf, Ti, V, Cr, Mn and at least one element selected from the group consisting of Mo), M ″ is 10 atomic% or less (M ″ is a white metal element, Al, Sc, Y, rare earth element, at least one element selected from the group consisting of Au, Zn, Sn and Re), X is 20 atomic% or less (X is C, Ge, P, Ga, Sb, In, Be and As) The total sum of at least one element selected from the group consisting of Si, B, M'and X is 14 to 35 atomic%, and Y is 2 atomic% or less (Y is Li, Mg, C).
a, Sr, Ba, Ag, Cd, Pb, Bi, N, O, S, Se and Te, and at least one element selected from the group consisting of Fe) and the balance Fe, and having a composition of 50%. Less than bccFe solid solution crystal grains having an average grain size of 1000Å or less, and the crystal grains are 1
An Fe-based amorphous alloy characterized by having an average interparticle distance of not more than μm and being distributed in an amorphous matrix. 9. Cu is 0.1 to 3 atomic%, Si is 30 atomic% or less and B25 atomic% or less is one or two, and M ′ is 0.1 to 20 atomic% (M ′ is Nb, T
a, W, Zr, Hf, Ti, V, Cr, Mn, and at least one element selected from the group consisting of Mo, the total of Si, B, and M'is 14 to 35 atom%, and the balance is 50 atom. Less than% is M (M is Co and / or N
i) has a composition consisting of Fe, and less than 50% of the structure consists of bccFe solid solution crystal grains having an average grain size of 1000 Å or less, and the crystal grains have an average interparticle distance of 1 μm or less. An Fe-based amorphous alloy characterized by having and distributed in an amorphous matrix. 10. Cu of 0.1 to 3 atomic%, Si of 30 atomic% or less and B25 atomic% or less of one or two, M ′ of 0.1 to 20 atomic% (M ′ is Nb,
The sum of at least one element selected from the group consisting of Ta, W, Zr, Hf, Ti, V, Cr, Mn and Mo, Si, B and M'is 14 to 35.
Atomic%), Y is 2 atomic% or less (Y is Li, Mg, Ca, Sr, Ba, Ag,
At least one element selected from the group consisting of Cd, Pb, Bi, N, O, S, Se and Te), the balance being less than 50 atomic% M (M is Co
BccF having a composition consisting of Fe substituted by Ni and / or Ni, and less than 50% of the structure has an average grain size of less than 1000Å
An Fe-based amorphous alloy comprising e-solid solution crystal grains, wherein the crystal grains are distributed in an amorphous matrix with an average interparticle distance of 1 μm or less. 11. Cu of 0.1 to 3 atomic%, Si of 30 atomic% or less and B25 atomic% or less of one or two, M ′ of 0.1 to 20 atomic% (M ′ is Nb,
At least one element selected from the group consisting of Ta, W, Zr, Hf, Ti, V, Cr, Mn and Mo), X is 20 atomic% or less (X is C, G
The sum of at least one element selected from the group consisting of e, P, Ga, Sb, In, Be and As, Si, B, M'and X is 14 to 35 atomic%, and the balance is less than 50 atomic%. Is M (M is Co and / or Ni)
With a composition of Fe replaced by less than 50% of the structure is composed of bccFe solid solution crystal grains having an average grain size of 1000Å or less, and the grains have an average interparticle distance of 1 μm or less. Fe-based amorphous alloy characterized by being distributed in the amorphous matrix. 12. Cu of 0.1 to 3 atomic%, Si of 30 atomic% or less and B25 atomic% or less of one or two, M ′ of 0.1 to 20 atomic% (M ′ is Nb,
At least one element selected from the group consisting of Ta, W, Zr, Hf, Ti, V, Cr, Mn and Mo), X is 20 atomic% or less (X is C, G
e, P, Ga, Sb, In, Be and As, at least one element selected from the group consisting of Si, B, M'and X is 14 to 35 atomic%, and Y is 2 atomic% or less. (Y is Li, Mg, Ca, Sr, Ba, Ag, Cd, P
b, Bi, N, O, S, Se and Te), the balance being Fe replaced by less than 50 atomic% with M (M is Co and / or Ni). Has a composition of
Less than 50% consists of bccFe solid solution crystal grains having an average grain size of 1000 Å or less, and the crystal grains are distributed in an amorphous matrix with an average interparticle distance of 1 μm or less. Fe based amorphous alloy. 13. Cu of 0.1 to 3 atomic%, Si of 30 atomic% or less and B25 atomic% or less of one or two, M ′ of 0.1 to 20 atomic% (M ′ is Nb,
The sum of at least one element selected from the group consisting of Ta, W, Zr, Hf, Ti, V, Cr, Mn and Mo, Si, B and M'is 14 to 35.
Atomic%), M "10 atomic% or less (M" is a white metal element, A
l, Sc, Y, rare earth element, at least one element selected from the group consisting of Au, Zn, Sn and Re), the balance being less than 50 atomic% M
(M is Co and / or Ni) -substituted Fe, and less than 50% of the structure is composed of bccFe solid solution crystal grains having an average grain size of 1000Å or less, and the crystal grains are 1
An Fe-based amorphous alloy characterized by having an average interparticle distance of not more than μm and being distributed in an amorphous matrix. 14． Cu of 0.1 to 3 atomic%, Si of 30 atomic% or less and B25 atomic% or less of one or two, M ′ of 0.1 to 20 atomic% (M ′ is Nb,
The sum of at least one element selected from the group consisting of Ta, W, Zr, Hf, Ti, V, Cr, Mn and Mo, Si, B and M'is 14 to 35.
Atomic%), M "10 atomic% or less (M" is a white metal element, A
l, Sc, Y, at least one element selected from the group consisting of rare earth elements, Au, Zn, Sn and Re), and Y is 2 atomic% or less (Y is
Li, Mg, Ca, Sr, Ba, Ag, Cd, Pb, Bi, N, O, S, Se, and Te), and the balance is less than 50 atomic% M ( M has a composition consisting of Fe substituted with Co and / or Ni), less than 50% of the structure consists of bccFe solid solution crystal grains having an average grain size of 1000Å or less, and said grain size is 1 μm or less Fe-based amorphous alloy characterized by having an average interparticle distance of and distributed in an amorphous matrix. 15. Cu of 0.1 to 3 atomic%, Si of 30 atomic% or less and B25 atomic% or less of one or two, M ′ of 0.1 to 20 atomic% (M ′ is Nb,
Ta, W, Zr, Hf, Ti, V, Cr, Mn and at least one element selected from the group consisting of Mo), M ″ is 10 atomic% or less (M ″ is a white metal element, Al, Sc, Y, rare earth element, at least one element selected from the group consisting of Au, Zn, Sn and Re), X is 20 atomic% or less (X is C, Ge, P, Ga, Sb, In, Be and As) The total of at least one element selected from the group consisting of Si, B, M'and X is 14 to 35 atomic%, and the balance is less than 50 atomic% M (M is
Having a composition consisting of Fe substituted with Co and / or Ni),
Less than 50% of the tissues have an average grain size less than 1000Å grain bc
An Fe-based amorphous alloy comprising cFe solid solution crystal grains, wherein the crystal grains are distributed in an amorphous matrix with an average interparticle distance of 1 μm or less. 16. Cu of 0.1 to 3 atomic%, Si of 30 atomic% or less and B25 atomic% or less of one or two, M ′ of 0.1 to 20 atomic% (M ′ is Nb,
Ta, W, Zr, Hf, Ti, V, Cr, Mn and at least one element selected from the group consisting of Mo), M ″ is 10 atomic% or less (M ″ is a white metal element, Al, Sc, Y, rare earth element, at least one element selected from the group consisting of Au, Zn, Sn and Re), X is 20 atomic% or less (X is C, Ge, P, Ga, Sb, In, Be and As) The total sum of at least one element selected from the group consisting of Si, B, M ′ and X is 14 to 35 atomic%, and Y is 2 atomic% or less (Y is Li, Mg,
At least one element selected from the group consisting of Ca, Sr, Ba, Ag, Cd, Pb, Bi, N, O, S, Se and Te), the balance being less than 50 atomic% M (M is Co and Co And / or Ni) -substituted Fe, and less than 50% of the structure consists of bccFe solid solution crystal grains having an average grain size of 1000 Å or less, and the crystal grains are 1 μm or less between average grains. An Fe-based amorphous alloy characterized by being distributed in an amorphous matrix with a distance.