JP2664907B2 - Magnetic recording / reproducing device - Google Patents

Magnetic recording / reproducing device

Info

Publication number
JP2664907B2
JP2664907B2 JP62213289A JP21328987A JP2664907B2 JP 2664907 B2 JP2664907 B2 JP 2664907B2 JP 62213289 A JP62213289 A JP 62213289A JP 21328987 A JP21328987 A JP 21328987A JP 2664907 B2 JP2664907 B2 JP 2664907B2
Authority
JP
Japan
Prior art keywords
magnetic
recording
magnetic disk
magnetic recording
reproducing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62213289A
Other languages
Japanese (ja)
Other versions
JPS6455704A (en
Inventor
城一朗 江▲崎▼
一正 福田
正則 酒井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Priority to JP62213289A priority Critical patent/JP2664907B2/en
Publication of JPS6455704A publication Critical patent/JPS6455704A/en
Application granted granted Critical
Publication of JP2664907B2 publication Critical patent/JP2664907B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/74—Record carriers characterised by the form, e.g. sheet shaped to wrap around a drum
    • G11B5/82—Disk carriers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/488—Disposition of heads
    • G11B5/4886—Disposition of heads relative to rotating disc

Description

【発明の詳細な説明】 ＜産業上の利用分野＞ 本発明は、硬質の磁気ディスクを高速回転させなが
ら、磁気ディスク面の上に配置した磁気ヘッドにより記
録及び再生を行なう磁気記録再生装置に関する。 ＜従来の技術＞ この種の磁気記録再生装置は、周知のように、アルミ
ニュウムでなる剛性基体上に、磁性微粒子塗布法、メッ
キ法またはスパッタ法等の手段によって磁性薄膜を形成
した硬質の磁気ディスクを、高速回転させることによ
り、磁気ディスクと浮上型磁気ヘッドとの間に動圧を発
生させ、磁気ヘッドを、微小な空気ベアリングによる浮
上量を保って浮上させて、磁気記録．読み出しを行な
う。 ＜発明が解決しようとする問題点＞ ところで、この種の磁気記録再生装置において、高密
度磁気記録を達成するためには、磁気ヘッドの浮上量を
できるだけ小さくし、スペーシングロスを減少させる必
要がある。ところが、浮上量を低下させて、スペーシン
グロスを減少させようとすると、磁気ディスクの表面性
や高速回転時の振動等の影響を受けて、磁気ディスクの
表面に磁気ヘッドが衝突し、磁気ディスクの損傷及びヘ
ッドクラッシュ等の問題を生じ易くなり、耐久性が低下
する。この問題点を回避するため、従来は、磁気ヘッド
２の浮上量ｇを0.1μｍ〜0.3μｍに設定して耐久性を確
保するようにしてあった。このため、スペーシングロス
の低減化と、それによる高密度磁気記録化に限界を生じ
ていた。 浮上量減少による高密度磁気記録を狙った従来技術と
しては、例えば特開昭61−287002号公報に記載された技
術が公知である。この公知技術では、剛性基体上にコバ
ルト系合金膜からなる垂直磁気記録層を形成した磁気デ
ィスクと磁気ヘッドとを、実質的に接触させながら相対
的に高速移動させて記録再生を行なうものである。 しかし、この従来技術においては、硬度の低い金属膜
または合金膜として形成した垂直磁気記録層の表面に、
磁気ヘッドを実質的に接触させて記録再生を行なうの
で、磁気ディスクの損傷及びヘッドクラッシュ等を発生
し易いという問題を抱えており、耐久性に不安があっ
た。 ＜問題点を解決するための手段＞ 上述する従来の問題点を解決するため、本発明は、剛
性基体上に磁気記録層を設けたほぼ同一厚みを有する磁
気ディスクを高速回転させ、前記磁気ディスクと、前記
磁気ディスク面の上に配置された磁気ヘッドとの間に、
前記高速回転による動圧を発生させ、前記磁気ディスク
と前記磁気ヘッドとの間で、記録及び再生を行なう磁気
記録再生装置において、前記剛性基体を、ガラス、化学
強化されたソーダアルミノ珪酸ガラスまたはセラミック
の何れかを主成分とするものによって構成し、前記磁気
記録層の少なくとも表面層を酸化物層、窒化物層または
酸化皮膜とし、前記磁気ヘッドは、薄膜素子でなる読み
書き素子を備えており、少なくとも前記磁気ディスクの
最外周シリンダでは前記磁気ヘッドを前記磁気ディスク
面から浮上させ、前記磁気ディスクの少なくとも最内周
シリンダで、前記磁気ヘッドを前記磁気ディスク面に実
質的に接触させながら、記録及び再生を行なうことを特
徴とする。 ＜作用＞ 本発明においては、少なくとも最内周シリンダで、磁
気ヘッドを磁気ディスク面に実質的に接触させながら少
記録再生を行なうので、スペーシングロスが減少し、優
れた記録再生特性及び記録密度特性が得られる。 しかも、少なくとも磁気ディスクの最外周シリンダで
は磁気ヘッドを磁気ディスク面から浮上させるので、磁
気ヘッドが接触した場合のダメージが大きくなる外周側
において、磁気ディスクと磁気ヘッドとの接触がおきに
くくなる。このため、耐久性が向上する。 また、磁気記録層の少なくとも表面層を、硬度の高い
酸化物層、窒化物層または酸化皮膜で構成するため、磁
気ディスクと磁気ヘッドとの接触によるダメージが小さ
くなり、耐久性が向上する。 剛性基体は、ガラス、化学強化されたソーダアルミノ
珪酸ガラスまたはセラミックの何れかを主成分とするも
のによって構成する。このような剛性基体を用いること
により、表面粗さＲMAXが100Å以下の磁気ディスクを得
ることができる。表面粗さＲMAXが100Å以下、特に50Å
以下の範囲では、磁気ディスクと磁気ヘッドとを実質的
に接触させて記録再生しても、ヘッド．クラッシュ等の
事故を回避し、耐久性を向上させると共に、スペーシン
グロスを減少させ、高密度記録を達成できる。 磁気ヘッドは、薄膜素子でなる読み書き素子を備えて
おり、従って、薄膜磁気ヘッドを備える磁気記録再生装
置を実現できる。これにより、高密度記録及び高速デー
タ転送にてきした磁気記録再生装置が実現される。 ＜実施例＞ 第１図は本発明に係る磁気記録再生装置の正面図、第
２図は同じくその平面図である。図において、１は磁気
ディスク、２は磁気ヘッド、３はジンバル系支持装置、
４はヘッド位置決め装置である。磁気ディスク１は図示
しない回転駆動機構により、矢印ａの方向に回転駆動さ
れる。磁気ヘッド２はジンバル系支持装置３によって支
持され、位置決め装置４により、回転直径O1上で、矢印
b1またはb2の方向に駆動されて位置決めされ、それによ
って所定のシリンダT1〜Tnにおいて、磁気記録．再生が
行なわれる。 ここで、少なくとも最内周シリンダT1で、磁気ヘッド
２を磁気ディスク１の面に実質的に接触させながら、記
録再生を行なう。かかる構成によると、スペーシングロ
スが減少し、優れた記録再生特性及び記録密度特性が得
られる。 また、磁気ディスク１は、後で詳説するように、磁気
記録層の少なくとも表面層を、硬度の高い酸化物層、窒
化物層または酸化皮膜で構成する。こうすることによ
り、磁気ディスク１と磁気ヘッド２との接触によるダメ
ージが小さくなり、耐久性が向上する。磁気ディスク１
の外周側シリンダでは、磁気ヘッド２は磁気ディスク１
の面から浮上させる。 磁気ディスク１は表面粗さＲMAXが100Å以下、望まし
くは50Å以下の表面性の良好な媒体とする。磁気ディス
ク１は、第３図に示すように、剛性基体101の表面に真
空成膜法によって磁気記録層102を形成してある。真空
成膜法によって形成される磁気記録層102の膜厚は0.5μ
ｍ程度以下であるので、剛性基体101の表面性がそのま
ま記録層102の表面性として反映される。従って、剛性
基体101としては、表面粗さＲMAXが100Å以下のものを
使用する。そのような剛性基体の具体例としては、ガラ
ス、化学強化されたソーダアルミノ珪酸ガラスまたはセ
ラミックを主成分とする剛性基体が適している。表面粗
さＲMAXが100Å以下、特に50Å以下の範囲では、磁気デ
ィスク１と磁気ヘッド２とを実質的に接触させて記録再
生しても、ヘッド．クラッシュ等の事故を回避し、耐久
性を向上させると共に、スペーシングロスを減少させ、
高密度記録を達成できる。 磁気記録層102は、硬度の高いγ−Fe2O3等の磁性酸化
物や磁性窒化物で構成することができる。また、磁気記
録層102の磁性層を金属や合金で構成した場合には、第
３図に示すように、表面に酸化物層、窒化物層102aを設
けるか、または第４図に示すように、表面を酸化皮膜10
2bとする。こうすることにより、磁気記録層102の表面
の硬度が増し、耐久性が向上し、磁気ヘッド２を実質的
に接触させて記録再生する場合にも、磁気ディスク１の
損傷を防止できる。酸化物層及び窒化物層102aは、反応
性スパッタ、反応性蒸着等によって形成できる。また、
酸化皮膜102bは、Co−CrまたはCo−Ni等のように、鉄、
コバルト、ニッケルのうち、少なくとも一種を含む金属
または合金でなる磁気記録層102の表面を、反応性プラ
ズマ処理等により、意図的に酸化して形成できる。磁気
ディスク１は、磁気記録層102の記録残留磁化が膜面に
対して垂直方向の成分を主成分とする垂直記録、膜面内
成分を主成分とする面内記録のいずれであってもよい。
図示は省略したが、磁気記録層102の表面に潤滑剤を塗
布してもよい。 第５図及び第６図は磁気ヘッド２とジンバル系支持装
置３の組立構造を示す図である。磁気ヘッド２は、セラ
ミック構造体でなるスライダ21の空気流出端部側に読み
書き素子22を付着させ、位置決め装置４によって駆動さ
れるジンバル系支持装置３により、浮上面23とは反対側
の面24に荷重を加えてピッチ運動及びロール運動を許容
するように支持する。読み書き素子22はIC製造テクノロ
ジと同様のプロセスにしたがって形成された薄膜素子で
ある。 支持装置３は位置決め装置４に取付けられる剛性アー
ム部31に、弾性金属薄板でなる支持体32の一端を、結合
具311、312によって取付け固定すると共に、支持体32の
長手方向の一端にある自由端に、同じく金属薄板でなる
可撓体33を取付け、この可撓体33の下面に、磁気ヘッド
２を取付けた構造となっている（第１図及び第２図参
照）。支持体32は剛性アーム部31に取付けられる部分が
弾性バネ部321となっていて、この弾性バネ部321に連続
して剛性ビーム部322を形成してある。剛性ビーム部322
は両側に折曲げ形成したフランジ322a、322bを有してい
る。可撓体33は支持体32の長手方向軸線と略平行して伸
びる２つの外側可撓性枠部331、332と、支持体32から離
れた端において外側可撓性枠部331、332を連結する横枠
333と、横枠333の略中央部から外側可撓性枠部331、332
に略平行するように伸びていて先端を自由端とした中央
舌状部334とを有して構成され、横枠333のある方向とは
反対側の一端を、支持体32の自由端付近に溶接等の手段
によって取付けてある。 可撓体33の中央舌状部334の上面には、例えば半球状
等の荷重用突起335が設けられていて、この荷重用突起3
35により、支持体32の自由端から中央舌状部334へ荷重
を伝えるようにしてある。中央舌状部334の下面には磁
気ヘッド２の面24を接着等の手段によって固着してあ
る。 上述の磁気ヘッド２の形状、支持装置３の剛性やバネ
圧等は、磁気ディスク１の回転数を勘案して、少なくと
も最内周シリンダT1で磁気ヘッド２を磁気ディスク１の
面に実質的に接触させるように定められる。 ＜発明の効果＞ 以上述べたように、本発明によれば、磁気ディスク及
び磁気ヘッドの耐久性を向上させると共に、スペーシン
グロスを減少させ、高密度記録及び高速データ転送に適
した磁気記録再生装置を提供できる。Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording / reproducing apparatus that performs recording and reproduction by a magnetic head disposed on a magnetic disk surface while rotating a hard magnetic disk at a high speed. <Prior Art> As is well known, this type of magnetic recording / reproducing apparatus is a hard magnetic disk in which a magnetic thin film is formed on a rigid substrate made of aluminum by a method such as a magnetic fine particle coating method, a plating method or a sputtering method. By rotating the magnetic head at high speed, a dynamic pressure is generated between the magnetic disk and the floating magnetic head, and the magnetic head is floated while maintaining a floating amount by a minute air bearing, thereby achieving magnetic recording. Read is performed. <Problems to be Solved by the Invention> In this type of magnetic recording / reproducing apparatus, in order to achieve high-density magnetic recording, it is necessary to reduce the flying height of the magnetic head as much as possible and reduce the spacing loss. is there. However, if the flying height is reduced to reduce the spacing loss, the magnetic head collides with the surface of the magnetic disk under the influence of the surface characteristics of the magnetic disk and vibration during high-speed rotation. Problems such as head damage and head crash are likely to occur, and durability is reduced. In order to avoid this problem, conventionally, the flying height g of the magnetic head 2 is set to 0.1 μm to 0.3 μm to ensure durability. For this reason, there has been a limit to the reduction of spacing loss and the resulting high-density magnetic recording. As a conventional technique aiming at high-density magnetic recording by reducing the flying height, a technique described in, for example, JP-A-61-287002 is known. In this known technique, recording and reproduction are performed by moving a magnetic disk and a magnetic head, each having a perpendicular magnetic recording layer made of a cobalt-based alloy film formed on a rigid substrate, at relatively high speed while substantially in contact with each other. . However, in this prior art, the surface of the perpendicular magnetic recording layer formed as a metal film or an alloy film having a low hardness,
Since recording and reproduction are performed by bringing the magnetic head into substantial contact with the magnetic head, there is a problem that the magnetic disk is liable to be damaged, a head crash or the like occurs, and there is a concern about durability. <Means for Solving the Problems> In order to solve the conventional problems described above, the present invention provides a method of rotating a magnetic disk having a magnetic recording layer on a rigid substrate and having substantially the same thickness at a high speed, And a magnetic head arranged on the magnetic disk surface,
A magnetic recording / reproducing apparatus that generates dynamic pressure by the high-speed rotation and performs recording and reproduction between the magnetic disk and the magnetic head, wherein the rigid base is made of glass, chemically strengthened soda aluminosilicate glass or ceramic. Any one of the above as a main component, at least the surface layer of the magnetic recording layer is an oxide layer, a nitride layer or an oxide film, the magnetic head includes a read / write element consisting of a thin film element, At least in the outermost cylinder of the magnetic disk, the magnetic head is lifted from the surface of the magnetic disk, and at least the innermost cylinder of the magnetic disk, while substantially contacting the magnetic head with the surface of the magnetic disk, for recording and recording. Reproduction is performed. <Operation> In the present invention, at least the innermost cylinder performs small recording / reproduction while the magnetic head is substantially in contact with the magnetic disk surface, so that spacing loss is reduced, and excellent recording / reproduction characteristics and recording density are obtained. Characteristics are obtained. Moreover, since the magnetic head floats above the magnetic disk surface at least in the outermost cylinder of the magnetic disk, contact between the magnetic disk and the magnetic head hardly occurs on the outer peripheral side where damage when the magnetic head comes into contact is increased. For this reason, the durability is improved. Further, since at least the surface layer of the magnetic recording layer is formed of a hard oxide layer, nitride layer or oxide film, damage due to contact between the magnetic disk and the magnetic head is reduced, and durability is improved. The rigid substrate is made of glass, chemically strengthened soda-aluminosilicate glass or ceramic. By using such a rigid substrate, a magnetic disk having a surface roughness RMAX of 100 ° or less can be obtained. Surface roughness RMAX less than 100mm, especially 50mm
In the following range, even when the magnetic disk and the magnetic head are substantially brought into contact with each other to perform recording and reproduction, the head. Accidents such as crashes can be avoided, durability can be improved, spacing loss can be reduced, and high-density recording can be achieved. The magnetic head includes a read / write element formed of a thin-film element, and therefore, a magnetic recording / reproducing apparatus including the thin-film magnetic head can be realized. As a result, a magnetic recording / reproducing apparatus for high-density recording and high-speed data transfer is realized. Embodiment FIG. 1 is a front view of a magnetic recording / reproducing apparatus according to the present invention, and FIG. 2 is a plan view of the same. In the figure, 1 is a magnetic disk, 2 is a magnetic head, 3 is a gimbal type support device,
Reference numeral 4 denotes a head positioning device. The magnetic disk 1 is driven to rotate in the direction of arrow a by a rotation drive mechanism (not shown). The magnetic head 2 is supported by a gimbal system supporting device 3 and is positioned by a positioning device 4 on the rotational diameter O1 by an arrow.
Driven and positioned in the direction of b1 or b2, so that in a given cylinder T1-Tn, the magnetic recording. Reproduction is performed. Here, recording and reproduction are performed while the magnetic head 2 is substantially in contact with the surface of the magnetic disk 1 using at least the innermost cylinder T1. According to such a configuration, spacing loss is reduced, and excellent recording / reproducing characteristics and recording density characteristics are obtained. Further, in the magnetic disk 1, at least the surface layer of the magnetic recording layer is formed of an oxide layer, nitride layer or oxide film having high hardness, as will be described later in detail. By doing so, damage due to contact between the magnetic disk 1 and the magnetic head 2 is reduced, and durability is improved. Magnetic disk 1
In the outer peripheral side cylinder, the magnetic head 2
Surface. The magnetic disk 1 is a medium having a surface roughness RMAX of 100 ° or less, preferably 50 ° or less and having good surface properties. As shown in FIG. 3, the magnetic disk 1 has a magnetic recording layer 102 formed on a surface of a rigid base 101 by a vacuum film forming method. The thickness of the magnetic recording layer 102 formed by the vacuum film forming method is 0.5 μm.
m or less, the surface properties of the rigid substrate 101 are directly reflected as the surface properties of the recording layer 102. Therefore, the rigid substrate 101 has a surface roughness RMAX of 100 ° or less. As a specific example of such a rigid substrate, a rigid substrate mainly composed of glass, chemically strengthened soda-aluminosilicate glass or ceramic is suitable. When the surface roughness RMAX is 100 ° or less, especially 50 ° or less, even if the magnetic disk 1 and the magnetic head 2 are substantially brought into contact with each other to perform recording and reproduction, the head. Avoid accidents such as crashes, improve durability, reduce spacing loss,
High density recording can be achieved. The magnetic recording layer 102 can be made of a magnetic oxide or a magnetic nitride such as γ-Fe 2 O 3 having high hardness. When the magnetic layer of the magnetic recording layer 102 is made of a metal or an alloy, an oxide layer or a nitride layer 102a is provided on the surface as shown in FIG. 3, or as shown in FIG. , Surface is oxide film 10
2b. By doing so, the hardness of the surface of the magnetic recording layer 102 is increased, the durability is improved, and damage to the magnetic disk 1 can be prevented even when recording and reproduction are performed with the magnetic head 2 substantially in contact. The oxide layer and the nitride layer 102a can be formed by reactive sputtering, reactive evaporation, or the like. Also,
The oxide film 102b is made of iron, such as Co-Cr or Co-Ni.
The surface of the magnetic recording layer 102 made of a metal or alloy containing at least one of cobalt and nickel can be intentionally oxidized by a reactive plasma treatment or the like. In the magnetic disk 1, the recording residual magnetization of the magnetic recording layer 102 may be either perpendicular recording whose main component is perpendicular to the film surface or in-plane recording whose main component is the in-film component. .
Although not shown, a lubricant may be applied to the surface of the magnetic recording layer 102. FIG. 5 and FIG. 6 are views showing the assembly structure of the magnetic head 2 and the gimbal support device 3. FIG. The magnetic head 2 has a read / write element 22 attached to the air outflow end side of a slider 21 made of a ceramic structure, and the surface 24 opposite to the flying surface 23 is provided by the gimbal type support device 3 driven by the positioning device 4. To support pitch and roll movements by applying a load. The read / write element 22 is a thin film element formed according to a process similar to the IC manufacturing technology. The support device 3 fixes one end of a support body 32 made of an elastic metal thin plate to a rigid arm portion 31 attached to the positioning device 4 by means of couplings 311 and 312, and has a free end at one end in the longitudinal direction of the support body 32. A flexible body 33 also made of a thin metal plate is attached to one end, and the magnetic head 2 is attached to the lower surface of the flexible body 33 (see FIGS. 1 and 2). The support 32 has a portion attached to the rigid arm portion 31 as an elastic spring portion 321, and a rigid beam portion 322 is formed continuously with the elastic spring portion 321. Rigid beam section 322
Has flanges 322a and 322b formed on both sides by bending. The flexible body 33 connects the two outer flexible frames 331 and 332 extending substantially in parallel with the longitudinal axis of the support 32, and the outer flexible frames 331 and 332 at an end remote from the support 32. Horizontal frame
333 and the outer flexible frame portions 331, 332 from substantially the center of the horizontal frame 333.
And has a central tongue-shaped portion 334 having a free end at the tip, and one end on the side opposite to the direction of the horizontal frame 333 is provided near the free end of the support 32. It is attached by means such as welding. On the upper surface of the central tongue 334 of the flexible body 33, for example, a hemispherical load projection 335 is provided.
35 allows the load to be transmitted from the free end of the support 32 to the central tongue 334. The surface 24 of the magnetic head 2 is fixed to the lower surface of the central tongue-shaped portion 334 by means such as bonding. The shape of the magnetic head 2, the rigidity of the support device 3, the spring pressure, and the like are determined in consideration of the number of rotations of the magnetic disk 1, and the magnetic head 2 is at least substantially positioned on the surface of the magnetic disk 1 by the innermost cylinder T 1. It is determined to be in contact. <Effects of the Invention> As described above, according to the present invention, the durability of the magnetic disk and the magnetic head is improved, the spacing loss is reduced, and the magnetic recording / reproducing suitable for high-density recording and high-speed data transfer is achieved. Equipment can be provided.

【図面の簡単な説明】 第１図は本発明に係る磁気記録再生装置の正面図、第２
図は同じくその平面図、第３図は本発明に係る磁気記録
再生装置を構成する磁気ディスクの一部拡大断面図、第
４図は同じく別の実施例における一部拡大断面図、第５
図及び第６図は磁気ヘッドと支持装置の組立構造を示す
図である。 １……磁気ディスク、２……磁気ヘッド ３……支持装置、４……位置決め装置BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a front view of a magnetic recording / reproducing apparatus according to the present invention, FIG.
FIG. 3 is a plan view of the same, FIG. 3 is a partially enlarged sectional view of a magnetic disk constituting the magnetic recording / reproducing apparatus according to the present invention, FIG.
FIG. 6 and FIG. 6 are views showing an assembly structure of the magnetic head and the supporting device. 1 magnetic disk 2 magnetic head 3 support device 4 positioning device

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭62−20125（ＪＰ，Ａ) 特開 昭61−162825（ＪＰ，Ａ) 特開 昭52−65898（ＪＰ，Ａ) 特開 昭61−210511（ＪＰ，Ａ)   ────────────────────────────────────────────────── ─── Continuation of front page    (56) References JP-A-62-20125 (JP, A)                 JP-A-61-162825 (JP, A)                 JP-A-52-65898 (JP, A)                 JP-A-61-210511 (JP, A)

Claims (1)

(57)【特許請求の範囲】 １．剛性基体上に磁気記録層を設けたほぼ同一厚みを有
する磁気ディスクを高速回転させ、前記磁気ディスク
と、前記磁気ディスク面の上に配置された磁気ヘッドと
の間に、前記高速回転による動圧を発生させ、前記磁気
ディスクと前記磁気ヘッドとの間で、記録及び再生を行
なう磁気記録再生装置において、 前記剛性基体を、ガラス、化学強化されたソーダアルミ
ノ珪酸ガラスまたはセラミックの何れかを主成分とする
ものによって構成し、 前記磁気記録層の少なくとも表面層を酸化物層、窒化物
層または酸化皮膜とし、 前記磁気ヘッドは、薄膜素子でなる読み書き素子を備え
ており、 少なくとも前記磁気ディスクの最外周シリンダでは前記
磁気ヘッドを前記磁気ディスク面から浮上させ、前記磁
気ディスクの少なくとも最内周シリンダで、前記磁気ヘ
ッドを前記磁気ディスク面に実質的に接触させながら、
記録及び再生を行なうこと を特徴とする磁気記録再生装置。 ２．前記磁気ディスクの表面粗さＲMAXを100Å以下とし
たことを特徴とする特許請求の範囲第１項に記載の磁気
記録再生装置。 ３．前記基体は、表面粗さＲMAXが100Å以下であること
を特徴とする特許請求の範囲第１項または第２項に記載
の磁気記録再生装置。 ４．前記磁気記録層は、真空成膜法で形成されているこ
とを特徴とする特許請求の範囲第１項、第２項または第
３項に記載の磁気記録再生装置。 ５．前記酸化物層及び前記窒化物層は、反応性スパッタ
または反応性蒸着等によって形成されていることを特徴
とする特許請求の範囲第１項、第２項、第３項または第
４項に記載の磁気記録再生装置。 ６．前記酸化皮膜は、鉄、コバルト、ニッケルのうち、
少なくとも一種を含む金属または合金でなる磁気記録層
の表面を、反応性プラズマ処理等により酸化してもので
あることを特徴とする特許請求の範囲第１項、第２項、
第３項または第４項に記載の磁気記録再生装置。 ７．前記磁気ディスクの記録残留磁化は膜面に対して垂
直方向の成分を主成分とすることを特徴とする特許請求
の範囲第１項、第２項、第３項、第４項、第５項または
第６項に記載の磁気記録再生装置。 ８．前記磁気ディスクの記録残留磁化は、膜面内成分を
主成分とすることを特徴とする特許請求の範囲第１項、
第２項、第３項、第４項、第５項または第６項に記載の
磁気記録再生装置。(57) [Claims] A magnetic disk having a magnetic recording layer provided on a rigid substrate and having substantially the same thickness is rotated at a high speed, and a dynamic pressure generated by the high-speed rotation is applied between the magnetic disk and a magnetic head disposed on the surface of the magnetic disk. In the magnetic recording / reproducing apparatus for performing recording and reproduction between the magnetic disk and the magnetic head, the rigid substrate is made of glass, chemically strengthened soda aluminosilicate glass or ceramic as a main component. Wherein at least the surface layer of the magnetic recording layer is an oxide layer, a nitride layer, or an oxide film; and the magnetic head includes a read / write element formed of a thin film element. In the outer cylinder, the magnetic head is lifted from the surface of the magnetic disk, and at least the innermost cylinder of the magnetic disk, While making the magnetic head substantially contact the magnetic disk surface,
A magnetic recording and reproducing apparatus for performing recording and reproduction. 2. 2. The magnetic recording / reproducing apparatus according to claim 1, wherein the surface roughness RMAX of the magnetic disk is set to 100 ° or less. 3. 3. The magnetic recording / reproducing apparatus according to claim 1, wherein the substrate has a surface roughness RMAX of 100 [deg.] Or less. 4. 4. The magnetic recording / reproducing apparatus according to claim 1, wherein the magnetic recording layer is formed by a vacuum film forming method. 5. The said oxide layer and the said nitride layer are formed by reactive sputtering, reactive vapor deposition, etc., The Claims 1, 2, 3 or 4 characterized by the above-mentioned. Magnetic recording and reproducing device. 6. The oxide film is iron, cobalt, nickel,
3. The method according to claim 1, wherein the surface of the magnetic recording layer made of a metal or alloy containing at least one kind is oxidized by a reactive plasma treatment or the like.
Item 5. A magnetic recording / reproducing device according to item 3 or 4. 7. 6. A recording medium according to claim 1, wherein said recording residual magnetization of said magnetic disk mainly comprises a component perpendicular to a film surface. Or a magnetic recording / reproducing apparatus according to claim 6. 8. 2. The recording residual magnetization of the magnetic disk according to claim 1, wherein a main component is an in-plane component.
Item 7. A magnetic recording / reproducing apparatus according to Item 2, 3, 4, 5, or 6.
JP62213289A 1987-08-27 1987-08-27 Magnetic recording / reproducing device Expired - Lifetime JP2664907B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62213289A JP2664907B2 (en) 1987-08-27 1987-08-27 Magnetic recording / reproducing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62213289A JP2664907B2 (en) 1987-08-27 1987-08-27 Magnetic recording / reproducing device

Publications (2)

Publication Number Publication Date
JPS6455704A JPS6455704A (en) 1989-03-02
JP2664907B2 true JP2664907B2 (en) 1997-10-22

Family

ID=16636650

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62213289A Expired - Lifetime JP2664907B2 (en) 1987-08-27 1987-08-27 Magnetic recording / reproducing device

Country Status (1)

Country Link
JP (1) JP2664907B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2783181B2 (en) * 1995-03-08 1998-08-06 日本電気株式会社 Manufacturing method of fixed magnetic disk drive

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5265898A (en) * 1975-11-26 1977-05-31 Nippon Telegr & Teleph Corp <Ntt> Preparing oxidized magnetic thin film
JPS61162825A (en) * 1985-01-14 1986-07-23 Hitachi Metals Ltd Production of thin magnetic co-ni recording medium
JPS61210511A (en) * 1985-03-15 1986-09-18 Tdk Corp Thin-film magnetic head for flexible medium and magnetic storage device using magnetic head
JPH0762945B2 (en) * 1985-07-19 1995-07-05 株式会社東芝 Magnetic disk device

Also Published As

Publication number Publication date
JPS6455704A (en) 1989-03-02

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