JP2644675B2 - Wire displacement correction device for wire type processing equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire processing apparatus using, for example, a wire whose surface is coated with diamond, and more particularly to a wire displacement correcting apparatus.

[0002]

2. Description of the Related Art An electric discharge wire cutting apparatus is known as an apparatus capable of cutting a workpiece along a line which changes in a complicated manner. This is to cause a discharge between the work and the wire and melt the work by the discharge heat, and by moving the work in the X-Y direction, it is possible to accurately process the work into a required contour. It is indispensable for processing. However, there are disadvantages in that the apparatus is expensive, the processing speed is extremely slow, and further, there is a major drawback that non-conductive materials cannot be processed.

[0003] As an alternative to the discharge wire cutting apparatus having such a problem, a diamond wire in which diamond is chemically coated on the surface of the wire,
A device for cutting the material linearly using this diamond wire has been developed. FIG. 12 conceptually shows a wire processing apparatus using this diamond wire.

In FIG. 12, a diamond wire 45 is provided.
Is supplied from the upper drum 43 and wound around the lower drum 63 to travel from above to below at a predetermined speed.
The work 17 is located between the upper drum 43 and the lower drum 63.
There is a moving table 92 on which is mounted. Moving table 92
Is connected to one end of a rope 93 attached to a pulley 94, and a weight 95 is attached to the other end of the rope 93.
The moving table 92 attempts to move linearly in the direction pulled by the weight 95, and the work 17 comes into contact with the diamond wire 45 at a constant pressure. Above and below the workpiece 17, there are wire guide rollers 90 and 91 rotatably supported by brackets. Wire guide rollers 90, 9
Numeral 1 guides the traveling of the diamond wire 45 and receives the pressure applied to the diamond wire 45 to prevent the traveling route of the diamond wire 45 from changing. Thus, the work 17 is cut linearly by bringing the work 17 into contact with the diamond wire 45 running at a predetermined speed at a constant pressure.

[0005]

According to the diamond wire processing apparatus described above, the diamond wire processing apparatus is most suitable for processing a die material made of a cemented carbide or the like. Processing is possible, processing speed is fast,
There is an advantage that the cost of the apparatus is low. However, such a diamond wire type processing apparatus has been developed only recently, and there are many problems to be solved.
As one of them, it has been found that when the work is pressed against the wire with a predetermined pressure, the wire holder is bent between the works and the position of the wire is shifted from the predetermined position, thereby deteriorating the processing accuracy. Incidentally, in the conventional example shown in FIG. 12, since the pressing pressure of the work 17 against the wire 45 is determined by the weight 95, it is necessary to replace the weight 95 in accordance with various processing conditions. Since it was difficult to replace the 95 finely, it was difficult to obtain an appropriate pressing pressure.

[0006] The present invention has been made in view of such a viewpoint, and even if the position of the wire is shifted due to the contact pressure of the workpiece with the wire, the wire displacement correction of the wire type processing apparatus which can maintain the processing accuracy. It is intended to provide a device.

[0007]

According to the first aspect of the present invention,
A table on which the work is placed, a guide roller disposed so as to sandwich the table, and rotatably supported by a roller holder; and a work stretched between the guide rollers and running in the longitudinal direction to move the work. In a wire type machining apparatus having a wire to be cut, a motor for driving a table in two directions perpendicular to each other is provided, and an optical two-way displacement meter for detecting a displacement amount of the wire in a direction perpendicular to each other is provided. A control device is provided for correcting the feed amount by the motor by the amount of displacement in the direction orthogonal to each other detected by the detection signal of the optical two-way displacement meter, and correcting the wire displacement caused by the application of a load. Things. According to a second aspect of the present invention, the optical two-way displacement meters are provided on both sides of the table, and the average value of the optical two-way displacement meters on both sides is calculated and used as the displacement amount of the control device. . According to a third aspect of the present invention, the optical two-way displacement device is provided on one side of the table.

[0008]

When the table is moved while the wire is running, the work placed on the table hits the wire, the pressure applied to the wire is received by the wire guide roller, and the work is cut in the direction of movement of the table.
Pressure is applied to the wire to cause displacement of the wire, and the optical two-way displacement meter outputs the displacement of the wire accordingly. The control device calculates the amount of displacement from the detection signal of the optical two-way displacement meter, and controls the table driving motor by adding the amount of displacement. As a result, the feed force of the table is appropriately controlled, the positional deviation of the wire due to the application of the load is corrected, and the workpiece can be processed with high accuracy.

[0009]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of a wire feeder according to an embodiment of the present invention; In FIG. 1, the main body of the wire-type processing device includes a lower frame 1, an upper frame 3, and an intermediate frame 2 connecting these frames 1 and 3. An auxiliary frame 4 is fixed in the upper frame 3. The lower frame 1 is formed in a table shape, and an X-axis table 12 and a Y-axis table 7
A Y table 5 is attached. The XY table 5 may have a known configuration. In the illustrated example, the Y-axis table 7 has a Y-axis guide 6 provided on the bottom thereof in a Y-axis direction along a rail provided on the lower frame 1 (FIG. 1).
In the direction perpendicular to the plane of the drawing) and a Y-axis ball screw 9 (see FIG. 5) by a Y-axis servo motor 8.
Is driven in the Y-axis direction by being rotationally driven. X
The axis table 12 has an X-axis guide 11 provided at the bottom thereof.
(See FIG. 6) can be moved in the X-axis direction (the left-right direction in FIG. 1) along a rail provided on the Y-axis table 7, and the X-axis servo motor 13 rotates the X-axis ball screw 14. When driven, it is driven in the X-axis direction.

The auxiliary plate 1 is placed on the X-axis table 12.
6 is fixed, and the work 17 is mounted on the auxiliary plate 16 by an appropriate mounting means. X axis table 1
2. A window hole is formed in the Y-axis table 7, and a window hole 15 (see FIG. 5) is also formed in the auxiliary plate 16.

Bearings 19 and 18 are mounted on the inner side (left side in FIG. 1) of the lower frame 1 and the auxiliary frame 4 by appropriate bearing housings, and penetrate the auxiliary frame 4, the upper frame 3 and the intermediate frame 2 vertically. A drive shaft 21 whose upper and lower ends reach the lower frame 1 and the auxiliary frame 4 is rotatably supported by the bearings 19 and 18. The drive shaft 21 has a timing pulley 23 attached near the upper end and a timing pulley 24 attached to the lower end, and is driven to rotate by a pulse motor 22 connected to the upper end.

The upper frame 3 projects like an eave in parallel with the lower frame 1, and an upper drum 43 around which a diamond wire 45 is wound is loaded in the upper frame 3. As shown in detail in FIG. 2, a bearing stand 25 is fixed to the auxiliary frame 4, and each inner ring of two bearings 26 made of ball bearings is press-fitted on the outer peripheral side of the bearing stand 25. A timing pulley 41 is fitted on each outer ring of the bearing 26, and one end of the pulley 41 has a flange 6.
7 are integrally connected. A timing belt 42 between the timing pulley 41 and the timing pulley 23;
Is hung. The timing belt 42 is, for example, a toothed belt, and the relative positional relationship between the timing pulley 41 and the timing pulley 23 is always constant. The flange 67 has a boss at the center, and the ball spline shaft 29 is inserted into the boss so as to be integrally rotatable.

A bearing stand 25 is provided on the upper frame 3.
The gear housing 33 penetrates the upper frame 3 and is fixed immediately below the upper frame 3. A bearing housing 34 is inserted into the gear housing 33 so as to be movable in the axial direction but not to rotate. A rack 36 is formed on a part of the outer peripheral surface of the bearing housing 34, and a pinion 37 provided on the gear housing 33 is engaged with the rack 36. The pinion 37 is rotated by operating the operation knob from outside to drive the rack 36 to move the bearing housing 34 up and down.

A bearing 53 made of a ball bearing is fitted in the bearing housing 34, and a pressing member 46 is inserted from the lower end of the bearing housing 34. The pressing member 46 presses the outer ring of the bearing 53 from below. A flange at the lower end of the member 46 is screwed to the bearing housing 34. The spindle housing 27 is further screwed to the lower end of the holding member 46, and the outer ring of a bearing 54 composed of a ball bearing is press-fitted to the inner periphery of the lower end of the spindle housing 27.
A cover 31 is further screwed to a lower end of the cover. The spindle 28 is press-fitted into the inner rings of the two bearings 53 and 54, and the spindle 28 is pivotably supported.
A ball spline nut 3 is provided at the upper end of the spindle 28.
Numeral 0 is provided via a coupling 28 a made of an elastic material, and the ball spline shaft 29 is fitted to the ball spline nut 30. By fitting the ball spline nut 30 and the ball spline shaft 29, the spindle 28 can move relative to the ball spline shaft 29 in the axial direction, and rotates integrally with the rotation of the ball spline shaft 29. Has become.

The lower surface of the cover 31 and the upper surface of the flange formed integrally with the spindle 28 are intricately intertwined to form the labyrinth 32, and chips generated when processing the work 17 enter the bearing 54. Is prevented from doing so. The lower end of the spindle 28 projects downward from the cover 31, and a wire guide roller 35 is provided at the lower end of the spindle 28. The wire guide roller 35 includes two guide rollers 35a and 35b. These guide rollers 35a and 35b are rotatably supported in a vertical plane by support shafts 39 and 40 provided through the spindle 28 in the horizontal direction. Although not shown, each of the guide rollers 35a and 35b has a circumferential groove having a semicircular cross section on the outer periphery. The outer peripheries of the guide rollers 35a and 35b contact each other at the center of the cross section of the spindle 28, and at this contact portion, both peripheral grooves form a small circular space.

The diamond wire 45 drawn from the upper drum 43 described with reference to FIG.
9, the guide roller 3 is provided at the lower end of the spindle 28 through the center hole of the spindle 28.
After being passed through the circular space formed by the peripheral grooves 5a and 35b, it is pulled out from the lower end of the spindle 28 to the outside. The spindle 28 forms a roller holding body that holds the guide roller 35.

In FIG. 1, a bearing stand 57 is fixed to the top plate of the lower frame 1 by penetrating the top plate from top to bottom. As shown in detail in FIG. 3, a base flange 58 is screwed to the bearing stand 57, and a bearing housing 48 is screwed on the base flange 58. The inner race of the bearing 47 is press-fitted into the outer periphery of the lower end of the bearing stand 57, and the inner race of the bearing 49 is press-fitted into the inner periphery of the upper end of the bearing housing 48. Bearing 4
Reference numerals 7 and 49 comprise ball bearings. The center hole of the bearing housing 48 and the bearing stand 57 has a spindle 5
0 is inserted, and the spindle 50 is pressed into the inner ring of the bearing 49. The outer ring of the bearing 47 is pressed into the inner peripheral side of the timing pulley 61, and the lower end of the pulley 61 has a flange 6.
8 is screwed. The boss of the flange 68 and the spindle 50 are substantially integrally connected by a key and a keyway. When the pulley 61 is driven to rotate, the spindle 50 rotates integrally with the flange 68. A timing belt 62 is hung between the timing pulley 61 and the timing pulley 24. Timing belt 6
Reference numeral 2 denotes a timing pulley
1 and the relative positional relationship with the timing pulley 24 are kept constant.

A cover 51 is provided on the upper end of the bearing housing 48.
Is fixed, and a part of the cover 51 and a part of the spindle 50 are intricately intertwined to form a labyrinth 52, which prevents chips generated when processing the work 17 from entering the bearing 49. . A wire guide roller 55 is provided at the upper end of the spindle 50. The wire guide roller 55 includes two guide rollers 55a, 55
5b. Each of the guide rollers 55a and 55b is supported by a support shaft 5 provided to penetrate the spindle 50 in the horizontal direction.
9, 60 so as to be rotatable in a vertical plane. Each of the guide rollers 55a and 55b has a circumferential groove on the outer periphery. When the outer circumferences of the guide rollers 55a and 55b come into contact with each other, the circumferential grooves of both guide rollers 55a and 55b form a small circular space.

The diamond wire 45 drawn from the upper spindle 28 is drawn into the lower spindle 50 and passed through a circular space formed by the circumferential grooves of the guide rollers 55a and 55b. The spindle 50 constitutes a roller holder for holding the guide roller 55.
The diamond wire 45 passing through the spindle 50 is
It is wound around the lower drum 63 shown in FIG. As shown in FIGS. 1, 3, and 6, the wire guide roller 55 of the spindle 50 has advanced into the XY table 5.

As shown in FIGS. 2 and 10, on the outer peripheral surface of the spindle housing 27, load detectors 76 and 77 are attached at 90 ° intervals in the circumferential direction. The two load detectors 76 and 77 are arranged at an interval of 90 ° in this way, and constitute a two-way load detector that detects components of the load applied to the guide roller 35 in directions orthogonal to each other. ing. As the load detectors 76 and 77, for example, a well-known strain gauge type load cell can be used, and this is bonded to the outer peripheral surface of the spindle housing 27. The detection outputs of the load detectors 76 and 77 are input to the control device 65 shown in FIG.

As shown in FIGS. 3 and 11, load detectors 96 and 97 are also mounted on the outer peripheral surface of the bearing housing 48 at intervals of 90 ° in the circumferential direction. The two load detectors 96 and 97 constitute a two-way load detector that detects components of the load applied to the guide roller 55 in directions orthogonal to each other. The load detectors 96 and 97 can also be constituted by well-known strain gauge type load cells, and are bonded to the outer peripheral surface of the bearing housing 48. Load detector 9
6 and 97 are output from terminals 98 and 99, respectively, as shown in FIG.
Is input to the control device 65 shown in FIG.

As shown in FIG. 1, the Y-axis servo motor 8, the X-axis servo motor 13 and the motor 22 are
Is controlled by Since the surface of the diamond wire 45 is chemically coated with diamond, each of the guide rollers 35a, 35b, 55a, 55
It is also desirable to coat the surface with diamond so that b does not wear due to contact with wire 45.

Here, the operation of the parts described so far will be described. Since the size of the work 17 is various, the pinion 37 shown in FIG. 2 is driven to rotate, the bearing housing 34 is moved up and down via a rack 36 meshing with the pinion 37, and the presser unit integrally connected to the bearing housing 34 is formed. Member 46, spindle housing 27, spindle 2
Move 8 up and down. Since the guide roller 35 moves up and down together with the spindle 28, the guide roller 35 is brought close to the work 17 so as not to contact the upper surface. At this time, the ball spline nut 30 also moves relative to the ball spline shaft 29 in the axial direction.

Next, the diamond wire 45 is supplied from the upper drum 43 and is wound on the lower drum 63 so as to travel at a constant speed from top to bottom. The control device 65 controls the servomotors 8 and 13 to move the XY table 5, and moves the work 17 along a predetermined line. The work 17 is the upper and lower wire guides 3
Since the diamond wire 45 is in contact with the diamond wire 45 between the portions 5 and 55, the workpiece 17 is cut in the moving direction of the work 17.

The controller 65 also controls the servo motors 8, 1
The rotation of the pulse motor 22 is controlled in synchronization with the control of Step 3. The drive shaft 21 is driven to rotate by the rotation of the pulse motor 22, and the spindle 28 is turned via the upper timing pulley 23, the timing belt 42, the timing pulley 41 flange 67, the ball spline shaft 29, and the ball spline nut 30, and In synchronization with this, the lower timing pulley 24, the timing belt 62,
The spindle 50 is turned via the timing pulley 61 and the flange 68. The upper and lower rotation transmission systems have the same design conditions, and the upper and lower spindles 28 and 50 rotate synchronously at the same angle to form the upper and lower wire guide rollers 35.
a, 35b, 55a, 55b support shafts 39, 40, 5
9 and 60 are turned so as to be always orthogonal to the moving direction of the XY table 5. Upper and lower spindles 28,
50 rotates around the wire 45 pulled by the spindles 28 and 50 and moves the upper and lower guide rollers 3.
5 and 55 are also wire guide rollers 35a and 35b, respectively.
The wire 45 turns around the wire 45 pulled between the wire guide rollers 55a and 55b.

As described above, the upper and lower wire guide rollers 3
5, 55 are the respective wire guide rollers 35a, 35
Since the support shafts 39, 40, 59, 60 of b, 55a, 55b are always turned so as to be orthogonal to the moving direction of the XY table 5, even if the moving direction of the XY table 5 is changed, Wire guide rollers 35a, 35b, 55
a and 55b can reliably receive the pressure generated by the contact of the wire 45 with the work 17, and therefore, the work can be cut along a complicated line. Further, the wire guide rollers 35 and 55 each have two peripheral grooved wire guide rollers as a pair, and their peripheral surfaces are brought into contact with each other, and the wire 45 is passed through the space formed by the peripheral groove at the contact portion. , Wire 45
Can be more reliably received.

In order to process the work 17 with high accuracy, it is necessary to press the work 17 against the wire 45 with an appropriate pressure. To this end, the feed force of the table 5 by the servomotors 8 and 13 is controlled by the control device 65. It is necessary to control appropriately. The control device 65 shown in FIG. 1 includes two-directional load detectors 77 and 76 (see FIG. 10) provided on the spindle 28 as a roller holder and the spindle 50.
Based on the detection signals of the two-direction load detectors 96 and 97 (see FIG. 11) provided in the above, the components of the loads applied to the upper guide roller 35 and the lower guide roller 55 in the mutually orthogonal directions are calculated. The servo motors 8 and 13 are controlled so that the calculated value becomes an appropriate value, and the feed force of the XY table 5 is controlled.

When a load is applied to the wire 45 by the pressing force of the work 17, the wire 45 bends in a direction in which the load is applied, and the position thereof shifts, so that the cutting position of the work 17 by the wire 45 shifts. Accuracy cannot be maintained. Thus, in the illustrated embodiment, the wire 45
A two-way displacement meter for detecting the displacement amount of the two-way displacement sensor is provided, and the displacement is corrected by the displacement amount detected by the two-way displacement meter. Hereinafter, this wire displacement compensator will be mainly described.

In FIG. 2, an outer retainer 83 is attached to the lower end surface of the gear housing 33 which covers the outer periphery of the upper spindle 28, and a plate-like displacement is provided on the lower end surface of the outer retainer 83 via a stay 84. A total bracket 85 is attached. The displacement meter bracket 85 has a hole 85a at the center, and a portion of the guide roller 35 at the tip of the spindle 28 protrudes from the hole 85a.

In FIG. 4, a light projecting portion 70a, a light receiving portion 70b, a light projecting portion 71a, and a light receiving portion 71b are attached to the lower end surface of the displacement meter bracket 85 at intervals of 90 ° in the circumferential direction around the hole 85a. Have been. A pair of laser-type measuring devices is configured by the light-emitting unit 70a and the light-receiving unit 70b facing each other, and another pair of laser-type measuring devices is configured by another light-emitting unit 71a and the light-receiving unit 71b. An optical two-way displacement meter 80 is constituted by two laser measuring devices.

In FIG. 3, a stay 86 is attached to an upper end surface of a bearing stand 57 which covers the outer periphery of the lower spindle 50, and a displacement gauge bracket 87 is attached to an upper end surface of the stay 86. The displacement meter bracket 87 has a hole 87a at the center, and the guide roller 55 at the upper end of the spindle 50 protrudes from the hole 87a.

In FIG. 5, a light projecting portion 74a, a light receiving portion 74b, a light projecting portion 75a, and a light receiving portion 75b are attached to the lower end surface of the displacement meter bracket 87 at 90 ° intervals around the hole 87a in the circumferential direction. Have been. One set of laser-type measuring devices is constituted by the light emitting unit 74a and the light-receiving unit 74b facing each other, and another set of laser-type measuring devices is constituted by another light-emitting unit 75a and the light-receiving unit 75b. An optical two-way displacement meter 81 is composed of two laser measuring devices.

The optical two-way displacement meters 80 and 81 detect displacement amounts of the wire 45 in the X-axis direction and the Y-axis direction at the respective installation positions, and commercially available ones can be used. For example, the light projecting unit polarizes the laser beam with a polygon mirror or the like, and then emits the parallel light beam by a collimator lens (Fθ lens). The light receiving unit condenses the parallel light beam scanned by the wire 45 with a light receiving lens. The light is received by the light receiving element, and the wire 4
The position of the wire 45 can be detected by calculating the timing at which the shadow is generated by 5.

The two optical two-way displacement meters 80 and 81
Is input to the control device 65 shown in FIG. 1 and is used for correcting the displacement of the wire 45. Hereinafter, the position shift correction operation will be described with reference to FIGS. 7 to 9. Here, X is the command value in the X direction, Y is the command value in the Y direction, Vx is the command speed in the X direction, Vy is the command speed in the Y direction, δx1 is the displacement in the X direction of the upper measuring device, and δy1 is the Y value in the upper measuring device. Δx2 is the X-direction displacement of the lower measuring device, δy2 is the Y-direction displacement of the lower measuring device, Δx1 is the X-direction displacement of the wire on the upper surface of the wire, Δy1 is the Y-direction displacement of the wire on the upper surface of the wire, Δx2 is the wire Is the X-direction displacement of the wire under the work, Δy2 is the Y-direction displacement of the wire under the work, Δx1 'is the displacement of the wire in the X-axis direction at the measurement point, and Δy1' is the displacement of the wire at the measurement point in the Y-axis direction. The displacement Δx2 ′ is the displacement of the wire at the measurement point in the X-axis direction, and Δy2 ′ is the displacement of the wire at the measurement point in the Y-axis direction.

As shown in FIG. 9, first, numerical command information is read, and when X = 0, 0 is set to δx1 and when Y = 0, δy1 is set.
Is substituted for 0, and when X = 0, 0 is substituted for δx2,
When = 0, 0 is substituted for δy2. Next, the X-direction command value X is set to the value of x0, the Y-direction command value Y is set to the value of y0, the X-direction command speed Vx is set to the value of vx, and the Y-direction command speed is set to Vy. Substitute the value of vy. Further, Px, which is the load in the X-axis direction, and Py, which is the load in the Y-axis direction, are obtained from the two-direction load detector, and the combined load P is calculated from these Px and Py.

After the feed speed of the XY table 5 is controlled to an appropriate feed speed based on the combined load P, a wire displacement correction operation is performed. First, the values of Vx and Vy are left as they are, the value of Δx1 'is substituted for δx1, and the value of Δy1' is substituted for δy1.
, The value of Δx2 ′ is substituted for δx2, and the value of Δy2 ′ is substituted for δy2. Next, the amount of displacement of the wire 45 on the upper surface side of the work 17 is calculated. Here, the guide roller 35
Assuming that the dimension from the rotation center to the measurement point of the optical two-way displacement meter is e1 and the dimension from the measurement point to the upper end of the work is f1, the displacement amounts Δx1 and Y of the wire 45 in the X-axis direction on the upper surface of the work 17 The value of the amount of displacement Δy1 in the axial direction is calculated by the following equation. Δx1 = Δx1 ′ × (e1 + f1) ÷ e1 Δy1 = Δy1 ′ × (e1 + f1) ÷ e1 Further, the displacement amount of the wire 45 on the lower surface side of the work 17 is calculated. Here, assuming that the dimension from the rotation center of the guide roller 55 to the measurement point of the optical two-way displacement meter is e2 and the dimension from the measurement point to the lower end of the work is f2, the work 1
The values of the displacement .DELTA.x2 in the X-axis direction and the displacement .DELTA.y2 in the Y-axis direction of the wire 45 at the lower surface 7 are calculated by the following equations. Δx2 = Δx2 ′ × (e2 + f2) ÷ e2 Δy2 = Δy2 ′ × (e2 + f2) ÷ e2 After calculating Δx1, Δy1, Δx2 and Δy2, the average value is calculated by the following formula, and the displacement amount in the X direction and Y Calculate the amount of displacement in the direction. Δx = (Δx1 + Δx2) ÷ 2 Δy = (Δy1 + Δy2) ÷ 2

Since the displacement amounts Δx and Δy of the wire 45 on the XY axis are calculated in this manner, the command values X and Y are obtained by adding the calculated Δx and Δy, respectively. Since the servo motors 8 and 13 are controlled by the command values X and Y, the cutting position of the work 17 by the wire 45 is corrected by the positional deviation amounts Δx and Δy, and the wire 45 Even if the position is deviated by the load, the work 17 is accurately processed. After correcting the command values X and Y as described above, it is determined whether or not the command information is completed. If the command information is completed, the control operation is completed. If not, the above-described wire displacement correction operation is repeated again.

In the above-described embodiment, the optical two-way displacement meters are arranged vertically, but may be arranged on either one. For example, when the two-way displacement meter is arranged only on the upper side, Δx1 and Δy1 are calculated by Δx1 = Δx1 ′ × (e1 + f1) ÷ e1 Δy1 = Δy1 ′ × (e1 + f1) ÷ e1. Is Δy. By adding Δx and Δy to the command value, the work 17 can be machined with high accuracy. The same applies to the case where a two-way displacement meter is arranged only on the lower side. Δx2 = Δx2 ′ × (e2 + f2) ÷ e2 Δy2 = Δy2 ′ × (e2 + f2) ÷ e2, and Δx2 and Δy2 are calculated. Δy2 may be set to Δy. By adding Δx and Δy to the command value, the work 17 can be machined with high accuracy.

In each of the embodiments described above, a diamond wire is used as the wire. However, the present invention can be applied to a processing apparatus using another processing wire instead of the diamond wire. Further, although a laser measuring device was used as an optical two-way displacement meter, the present invention is not limited to this.
A directional displacement meter may be configured.

[0040]

According to the present invention, there is provided an optical two-way displacement meter having a motor for driving the table in two directions orthogonal to each other and detecting the amount of displacement of the wire in the directions orthogonal to each other. Since the displacement of the wire due to the application of the load is corrected based on the displacement amount detected by the two-way displacement meter, the workpiece can be machined accurately even if the wire is displaced due to bending.

[Brief description of the drawings]

FIG. 1 is a side cross-sectional view showing an embodiment of a wire displacement correction device of a wire processing apparatus according to the present invention.

FIG. 2 is an enlarged side sectional view showing an upper spindle portion in the embodiment.

FIG. 3 is an enlarged side sectional view showing a lower spindle portion in the embodiment.

FIG. 4 is a plan view showing a part of the upper optical two-way displacement meter.

FIG. 5 is a plan view showing a relationship between the lower spindle portion and an XY table.

FIG. 6 is an enlarged side sectional view showing a main part of the lower spindle portion.

FIG. 7 is a diagram schematically showing a displacement of the wire on the X axis.

FIG. 8 is a diagram schematically showing a displacement of the wire on the Y axis.

FIG. 9 is a flowchart showing a control operation of the wire displacement device.

FIG. 10 is a sectional view taken along the line AA in FIG. 2;

FIG. 11 is a sectional view taken along line BB in FIG. 3;

FIG. 12 is a side view conceptually showing an example of a conventional wire-type processing apparatus.

[Explanation of symbols]

 5 Table 35, 55 Guide roller 17 Work 45 Wire 80, 81 Optical two-way displacement meter

Claims (3)

(57) [Claims] 1. A table on which a work is placed, a guide roller disposed so as to sandwich the table, and rotatably supported by a roller holding member; And a motor for driving the table in two directions orthogonal to each other, and detecting an amount of displacement of the wire in directions orthogonal to each other. A two-way displacement meter is provided. The feed amount by the motor is corrected by the displacement amount in the direction orthogonal to each other detected by the detection signal of the optical two-way displacement meter, and the position of the wire due to the application of the load A wire displacement correction device for a wire-type processing device having a control device for correcting a displacement. 2. An optical two-way displacement meter is provided on both sides of a table, and a control device calculates an average value of the optical two-way displacement meters on both sides and uses the calculated average value as a displacement amount. 2. A wire displacement correction device for the wire-type processing device according to 1. 3. The wire displacement correcting device for a wire type working device according to claim 1, wherein the optical two-way displacement device is provided on one side of the table.