JP2639336B2 - High frequency current measurement sensor - Google Patents
High frequency current measurement sensorInfo
- Publication number
- JP2639336B2 JP2639336B2 JP32678293A JP32678293A JP2639336B2 JP 2639336 B2 JP2639336 B2 JP 2639336B2 JP 32678293 A JP32678293 A JP 32678293A JP 32678293 A JP32678293 A JP 32678293A JP 2639336 B2 JP2639336 B2 JP 2639336B2
- Authority
- JP
- Japan
- Prior art keywords
- frequency current
- conductor
- sensor
- measurement sensor
- current measurement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Measuring Leads Or Probes (AREA)
- Measurement Of Current Or Voltage (AREA)
Description
【0001】[0001]
【産業上の利用分野】本発明は高周波電流測定用センサ
に関し、特に非接触で電流を測定する方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sensor for measuring high-frequency current, and more particularly to a method for measuring current without contact.
【0002】[0002]
【従来の技術】従来の高周波電流測定用センサに関する
構成を図3に示す。2. Description of the Related Art FIG. 3 shows a configuration of a conventional high-frequency current measuring sensor.
【0003】尚、図3は、「IEEE TRANSAC
TIONS ON MICROWAVE THEORY
AND TECHNIQUES,VOL.MTT−2
8,NO.7,JULY,1980」に記載されている
高周波電流測定用センサである。本図において探針10
1は、同軸ケーブル102の芯線に接続される。同軸ケ
ーブル102は検波器51に接続されている。FIG. 3 is a diagram showing an example of IEEE TRANSAC.
TIONS ON MICROWAVE THEORY
AND TECHNIQUES, VOL. MTT-2
8, NO. 7, JULY, 1980 ". In this figure, the probe 10
1 is connected to the core wire of the coaxial cable 102. The coaxial cable 102 is connected to the detector 51.
【0004】次に、この実施例1の動作原理について説
明する。図4に示すように、探針101を被測定物(導
体103)に近づけると、導体103を流れる高周波電
流によって生じる電界のうち、探針101の向きと同じ
向きの成分によって、探針101に高周波電流が誘起さ
れる。この電流の検波器51で検波すれは、被測定物を
流れる高周波電流を知ることができる。Next, the operation principle of the first embodiment will be described. As shown in FIG. 4, when the probe 101 is brought closer to the object to be measured (conductor 103), the component of the electric field generated by the high-frequency current flowing through the conductor 103, which has the same direction as the direction of the probe 101, causes the probe 101 to move. A high frequency current is induced. When the current is detected by the current detector 51, the high-frequency current flowing through the device under test can be known.
【0005】図5は「IEEE TRANSACTIO
NS ON MICROWAVETHEORY AND
TECHNIQUES,VOL.40,NO.8,A
UGUST,1992」に記載されている第2の従来例
の高周波電流測定用センサである。本図において導体線
21は一端を導体管11に接続し、他端を導体管11の
側壁に設けられたコプレーナー線路33に接続される。
コプレーナ線路33は検波器51に接続されている。FIG. 5 is a diagram showing an example of IEEE TRANSACTION.
NS ON MICROWAVEHEORY AND
TECHNIQUES, VOL. 40, NO. 8, A
UGUST, 1992 ". In the figure, one end of the conductor wire 21 is connected to the conductor tube 11, and the other end is connected to a coplanar line 33 provided on a side wall of the conductor tube 11.
The coplanar line 33 is connected to the detector 51.
【0006】次に、この従来例2の動作原理について説
明する。図6に示すように、センサ直下に被測定物が存
在する場合、被測定物(導体103)を流れる高周波電
流によって生じる磁界は導体線21を囲むようにして発
生する。このため、被測定物を流れる高周波電流のう
ち、導体線21と同じ方向成分を持つ成分が導体線21
に誘起される。この電流を検波器51で検波すれば、被
測定物を流れる高周波電流を知ることができる。また、
図7に示すようにセンサから離れて被測定物が存在する
場合、被測定物を流れる高周波電流によって生じる磁界
は導体線21を囲まない。このため、被測定物が遠い場
合には導体線21に誘起される高周波電流は無くなる。Next, the operation principle of the second conventional example will be described. As shown in FIG. 6, when an object to be measured exists immediately below the sensor, a magnetic field generated by a high-frequency current flowing through the object to be measured (conductor 103) is generated so as to surround conductor line 21. Therefore, a component having the same directional component as that of the conductor wire 21 in the high-frequency current flowing through the device under test is
Is induced. If this current is detected by the detector 51, the high-frequency current flowing through the device under test can be known. Also,
When an object to be measured is present away from the sensor as shown in FIG. 7, a magnetic field generated by a high-frequency current flowing through the object to be measured does not surround the conductor wire 21. Therefore, when the object to be measured is far away, the high-frequency current induced in the conductor wire 21 disappears.
【0007】[0007]
【発明が解決しようとする課題】従来例1の高周波電流
測定用センサでは、電界の垂直方向成分に反応するた
め、被測定物を流れる高周波電流の大きさは検出できる
ものの、電流の向きまでは検出できない。The sensor for measuring high-frequency current of the prior art 1 reacts to the vertical component of the electric field, so that the magnitude of the high-frequency current flowing through the device under test can be detected. Not detectable.
【0008】また、従来例2の高周波電流測定用センサ
では、導体線21と同じ方向成分の高周波電流の大きさ
しか検出できない。このため、他方向の高周波電流を検
出するためには、センサ自体を機械的に90度回転させ
る必要があるため、測定に時間がかかった。The high-frequency current measuring sensor of the second conventional example can detect only the magnitude of the high-frequency current in the same direction component as that of the conductor wire 21. Therefore, in order to detect the high-frequency current in the other direction, it is necessary to mechanically rotate the sensor itself by 90 degrees, so that it takes a long time for the measurement.
【0009】[0009]
【課題を解決するための手段】本発明の目的は、センサ
を機械的に回転させて高周波電流の検出方向を切り替え
るものではなく、電気的に検出方向を切り替えることを
目的としている。従って、本発明は上記課題を解決する
ため、 被測定物に流れる高周波電流を測定する高周波電
流測定用センサにおいて、直線状の導体管の端面に第
1、第2の導体線を直交して配置し、前記第1の導体線
に共に同一方向の第1、第2のピンダイオードを設け、
前記第2の導体線に共に同一方向で前記第1、第2のピ
ンダイオードの方向と逆方向の第3、第4のピンダイオ
ードを設け、前記第1、第2の導体線のそれぞれ一端を
前記導体管に接続し他端を前記第1、第2の同軸ケーブ
ルに接続したセンサ部と、前記第1、第2の同軸ケーブ
ルにバイアス電圧を供給するバイアス部と、前記第1、
第2の同軸ケーブルの高周波電流を検波し検波出力を得
る検波器部とを具備する。また、前記バイアス電圧を正
又は負にすることにより前記高周波電流の検出方向を切
り替えることを特徴とする。SUMMARY OF THE INVENTION An object of the present invention is not to mechanically rotate a sensor to switch the detection direction of a high-frequency current, but to switch the detection direction electrically. Therefore, the present invention solves the above problems.
Therefore, a high-frequency
In a flow measurement sensor, the end of a straight
1, the second conductor wire is arranged orthogonally, and the first conductor wire is
Are provided with first and second pin diodes in the same direction,
The first and second pins are connected to the second conductor line in the same direction.
Third and fourth pin diodes opposite to the direction of the diode
And a first end of each of the first and second conductor wires is provided.
The other ends of the first and second coaxial cables are connected to the conductor tube.
A sensor unit connected to the first and second coaxial cables;
A bias unit for supplying a bias voltage to the
Detects the high-frequency current of the second coaxial cable and obtains a detection output
And a detector unit. Further, the bias voltage is set to be positive.
Or, by making it negative, the detection direction of the high-frequency current is switched off.
It is characterized by being replaced .
【0010】[0010]
【実施例】次に本発明について図面を参照して説明す
る。図1は本発明の原理を示す図である。高周波電流測
定用センサのセンサ部2は、導体管1の一端において、
導体線21〜24を十字形に接続し、PINダイオード
11,13の一端を導体管1に、他端をそれぞれ導体線
21,23に接続され、またPINダイオード12,1
4の一端を同軸管31,32に、他端を導体線22,2
4にそれぞれ接続される。同軸管31,32の出力は、
高周波信号用検波器51,52からなる検波器部3を経
て検波出力端子54へ接続される。さらに同軸管31,
32の出力は高周波阻止インダクタンス41,42から
なるバイアス回路4を経て、バイアス入力53へ接続さ
れる。DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the present invention will be described with reference to the drawings. FIG. 1 is a diagram showing the principle of the present invention. The sensor part 2 of the high-frequency current measuring sensor is provided at one end of the conductor tube 1.
The conductor wires 21 to 24 are connected in a cross shape, one ends of the PIN diodes 11 and 13 are connected to the conductor tube 1 and the other ends are connected to the conductor wires 21 and 23, respectively.
4 is connected to the coaxial tubes 31 and 32, and the other end is connected to the conductor wires 22 and 2.
4 respectively. The outputs of the coaxial tubes 31 and 32 are
It is connected to a detection output terminal 54 via a detector section 3 composed of high-frequency signal detectors 51 and 52. Further, the coaxial tube 31,
The output of 32 is connected to a bias input 53 via a bias circuit 4 composed of high-frequency blocking inductances 41 and 42.
【0011】次に、本発明の動作について説明する。バ
イアス入力53に正の電圧を加えると、PINダイオー
ド11,12は逆方向バイアスとなり、高周波的に非導
通状態となる。一方、PINダイオード13,14は順
方向バイアスとなり、高周波的に導通状態となる。この
場合、図2に示すように高周波電流測定用センサのセン
サ部2を被測定物に近ずけた場合に被測定物を流れる電
流が、導体線23,24と平行な電流成分だけが検出さ
れる。また、逆にバイアス入力に負の電圧を加えると、
PINダイオード11,12は順方向バイアスとなり、
高周波的に導通状態となる。一方、PINダイオード1
3,14は逆方向バイアスとなり、高周波的に非導通状
態となる。この場合、被測定物を流れる電流の内、導体
線21,22と平行な電流成分だけが検出される。Next, the operation of the present invention will be described. When a positive voltage is applied to the bias input 53, the PIN diodes 11 and 12 become reverse biased and become nonconductive at high frequencies. On the other hand, the PIN diodes 13 and 14 become forward-biased and become conductive at high frequencies. In this case, as shown in FIG. 2, when the sensor unit 2 of the high-frequency current measuring sensor is moved close to the object, only the current component parallel to the conductor wires 23 and 24 is detected in the current flowing through the object. You. Conversely, when a negative voltage is applied to the bias input,
PIN diodes 11 and 12 become forward biased,
It becomes conductive at high frequencies. On the other hand, PIN diode 1
3 and 14 are reverse biased and become non-conductive at high frequencies. In this case, of the current flowing through the device under test, only the current component parallel to the conductor wires 21 and 22 is detected.
【0012】なお、高周波電流の取り出しに同軸管を用
いているが、コプレーナ線路を用いてもよい。Although a coaxial tube is used for extracting a high-frequency current, a coplanar line may be used.
【0013】また、本実施例では導体管1を直方体で構
成したが、直交する導体線21〜24が一端に接続でき
るものであれば、本形状に限るものでなく例えば円柱導
体管でも構成できる。In this embodiment, the conductor tube 1 is formed of a rectangular parallelepiped. However, as long as the conductor wires 21 to 24 can be connected to one end thereof, the present invention is not limited to this shape. .
【0014】[0014]
【発明の効果】以上説明したように、本発明による高周
波電流測定用センサは、バイアス入力の正負を反転させ
ることにより電気的に高周波電流の検出方向が切り替え
られる。このため、センサを機械的に回転させて高周波
電流の検出方向を切り替える必要が無い。As described above, in the high-frequency current measuring sensor according to the present invention, the direction of detection of the high-frequency current can be electrically switched by inverting the polarity of the bias input. Therefore, there is no need to mechanically rotate the sensor to switch the detection direction of the high-frequency current.
【図1】本発明の動作原理を示す図である。FIG. 1 is a diagram showing the operation principle of the present invention.
【図2】本発明の一実施例を示す図である。FIG. 2 is a diagram showing one embodiment of the present invention.
【図3】従来例1の実施例を示す図である。FIG. 3 is a diagram showing an example of Conventional Example 1.
【図4】図3に示した従来例1のセンサの動作原理を示
す図である。FIG. 4 is a diagram showing an operation principle of the sensor of the conventional example 1 shown in FIG.
【図5】従来例2の実施例を示す図である。FIG. 5 is a diagram showing an embodiment of Conventional Example 2.
【図6】図5に示した従来例2において、センサ直下に
被測定物がある場合の動作原理を示す図である。6 is a diagram illustrating an operation principle in a case where an object to be measured is located immediately below a sensor in Conventional Example 2 illustrated in FIG.
【図7】図5に示した従来例2において、センサから離
れて被測定物がある場合の動作原理を示す図である。FIG. 7 is a diagram illustrating an operation principle in a case where an object to be measured is located away from a sensor in Conventional Example 2 illustrated in FIG. 5;
1 導体管 2 センサ 3 検波器部 4 バイアス部 11〜14 PINダイオード 21〜24 導体線 31〜32 同軸線路 33 コプレーナ線路 41〜42 高周波阻止インダクタンス 51〜52 検波器 101 探針 102 同軸ケーブル DESCRIPTION OF SYMBOLS 1 Conductor tube 2 Sensor 3 Detector part 4 Bias part 11-14 PIN diode 21-24 Conductor wire 31-32 Coaxial line 33 Coplanar line 41-42 High frequency blocking inductance 51-52 Detector 101 Probe 102 Coaxial cable
Claims (2)
周波電流測定用センサにおいて、 直線状の導体管の端面に第1、第2の導体線を直交して
配置し、前記第1の導体線に共に同一方向の第1、第2
のピンダイオードを設け、前記第2の導体線に共に同一
方向で前記第1、第2のピンダイオードの方向と逆方向
の第3、第4のピンダイオードを設け、前記第1、第2
の導体線のそれぞれ一端を前記導体管に接続し他端を前
記第1、第2の同軸ケーブルに接続したセンサ部と、 前記第1、第2の同軸ケーブルにバイアス電圧を供給す
るバイアス部と、 前記第1、第2の同軸ケーブルの高周波電流を検波し検
波出力を得る検波器部とからなる ことを特徴とする高周
波電流測定用センサ。1. A high-frequency current measuring device for measuring a high-frequency current flowing through an object to be measured.
In the frequency current measuring sensor, the first and second conductor wires are orthogonal to the end face of the linear conductor tube.
And the first and second conductor wires are arranged in the same direction in the first and second directions.
And the same as the second conductor wire.
Direction opposite to the direction of the first and second pin diodes
The third and fourth pin diodes are provided, and the first and second pin diodes are provided.
One end of each conductor wire is connected to the conductor tube and the other end is
A bias voltage is supplied to the sensor unit connected to the first and second coaxial cables and the first and second coaxial cables.
And a high-frequency current of the first and second coaxial cables.
A high-frequency current measurement sensor, comprising: a detector for obtaining a wave output .
より前記高周波電流の検出方向を切り替えることを特徴
とする高周波電流測定センサ。2. The method according to claim 1, wherein the bias voltage is positive or negative.
A high-frequency current measurement sensor, wherein the detection direction of the high-frequency current is switched .
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP32678293A JP2639336B2 (en) | 1993-12-24 | 1993-12-24 | High frequency current measurement sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP32678293A JP2639336B2 (en) | 1993-12-24 | 1993-12-24 | High frequency current measurement sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH07181206A JPH07181206A (en) | 1995-07-21 |
JP2639336B2 true JP2639336B2 (en) | 1997-08-13 |
Family
ID=18191647
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP32678293A Expired - Lifetime JP2639336B2 (en) | 1993-12-24 | 1993-12-24 | High frequency current measurement sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2639336B2 (en) |
-
1993
- 1993-12-24 JP JP32678293A patent/JP2639336B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH07181206A (en) | 1995-07-21 |
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Legal Events
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Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 19970325 |