JP2635043B2 - Thermal ink jet print head - Google Patents

Thermal ink jet print head

Info

Publication number
JP2635043B2
JP2635043B2 JP62107854A JP10785487A JP2635043B2 JP 2635043 B2 JP2635043 B2 JP 2635043B2 JP 62107854 A JP62107854 A JP 62107854A JP 10785487 A JP10785487 A JP 10785487A JP 2635043 B2 JP2635043 B2 JP 2635043B2
Authority
JP
Japan
Prior art keywords
ink
nozzle
heating element
print head
resistance heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP62107854A
Other languages
Japanese (ja)
Other versions
JPS62259864A (en
Inventor
アルフレッド・アイツング・パン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HP Inc
Original Assignee
HP Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HP Inc filed Critical HP Inc
Publication of JPS62259864A publication Critical patent/JPS62259864A/en
Application granted granted Critical
Publication of JP2635043B2 publication Critical patent/JP2635043B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/1412—Shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14145—Structure of the manifold
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/03—Specific materials used
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/11—Embodiments of or processes related to ink-jet heads characterised by specific geometrical characteristics

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Description

【発明の詳細な説明】 〔従来技術及びその問題点〕 従来の熱インクジエットプリントヘッド２を、第２図
に示す。熱インクジエット（TIJ）において技術的に解
決すべき課題として、組み立ての問題、即ちノズル板１
の脱離の問題がある。従来では各ノズル板１は、第3A図
に示すように、エポキシにより、抵抗構造３に個別に装
着される。これは非常にコストのかかる工程であり、且
つ種々の問題を起こす可能性をもっている。例えば、こ
の作業ではノズル板１のアラインメントがうまくいかな
いことがよくある。従来技術を簡単に示す第3A図では細
かい部分は省略してある。TIJプリントヘッド２の種々
の構成要素は、それぞれ熱膨張率が違うので、接着剤が
硬化するとき、ノズル板が脱離しようとする傾向があ
る。このような装着の問題があるため、従来のTIJプリ
ントヘッドでは、ノズルの数が制限されてしまうという
欠点があった。DETAILED DESCRIPTION OF THE INVENTION [Prior Art and its Problems] A conventional thermal ink jet print head 2 is shown in FIG. The technical problem to be solved in the thermal ink jet (TIJ) is the problem of assembly, that is, the nozzle plate 1
There is a problem of desorption. Conventionally, each nozzle plate 1 is individually mounted on the resistance structure 3 by epoxy as shown in FIG. 3A. This is a very costly process and has the potential to cause various problems. For example, in this operation, the alignment of the nozzle plate 1 often does not go well. In FIG. 3A, which briefly shows the prior art, detailed parts are omitted. Since the various components of the TIJ printhead 2 have different coefficients of thermal expansion, the nozzle plate tends to detach when the adhesive cures. Due to such a mounting problem, the conventional TIJ print head has a disadvantage that the number of nozzles is limited.

従来のTIJプリントヘッド２では、インクの補充速度
も問題になる。補充速度によってプリント速度が制限さ
れる。第3B図に示した従来のTIJプリントヘッド２で
は、インクの流れを制限する摩擦の大きな溝７を通って
ノズル６に達する。In the conventional TIJ print head 2, the ink replenishment speed also becomes a problem. The print speed is limited by the replenishment speed. In the conventional TIJ print head 2 shown in FIG. 3B, the ink reaches the nozzle 6 through a groove 7 having a large friction that restricts the ink flow.

ここに従来例として引用する「モノリシックインクジ
ェットプリントヘッド」と称する米国特許第4,438,191
号（本願出願人の出願に係る、特開昭59−95156号）に
記載した発明では、上記した問題を一部解決しうるモノ
リシックインジェットプリントヘッドが提案されてい
る。しかしながら、このプリントヘッドの製造には、新
たに次のような問題が生じる。即ち、インク穴の形成、
加熱室（firing chamber）その他の場所からのドライフ
ィルム残しの除去、ノズルの正確なアラインメント、そ
の他様々な製造上の問題である。また、従来のモノリシ
ックプリントヘッドのノズルは散開（diverge）させる
ことができなかった。U.S. Pat. No. 4,438,191 entitled "Monolithic Inkjet Printhead," which is hereby incorporated by reference.
In the invention described in JP-A-59-95156 (filed by the applicant of the present application), a monolithic ink jet print head capable of partially solving the above-mentioned problem has been proposed. However, the production of the print head has the following new problems. That is, formation of ink holes,
Removal of dry film residue from the firing chamber and other locations, accurate alignment of nozzles, and various other manufacturing issues. Also, the nozzles of conventional monolithic printheads have not been able to diverge.

また、従来のインクジエットプリントヘッドには泡が
つぶれることにより、また補充のインクのための抵抗に
衝撃が与えられる。このキャビテーション（点食）の力
が繰り返し加わることにより、抵抗が破壊してしまうと
いう欠点があった。Also, the collapse of bubbles in conventional ink jet printheads also impacts the resistance for refill ink. There is a drawback that the resistance is destroyed by repeatedly applying the force of the cavitation (pitting).

〔発明が解決しようとする問題点及びその手段〕 本発明に係る、ノズルとインク保持部（ink well）と
を一体的に形成したモノリシック熱インクジェット式プ
リントヘッド及びその製造方法は、上記した従来のプリ
ントヘッドにおけるノズルの取り付けやインク流の問題
を解決するものである。[Problems to be Solved by the Invention and Means Thereof] A monolithic thermal inkjet printhead in which a nozzle and an ink well are integrally formed and a method of manufacturing the same according to the present invention are described above. An object of the present invention is to solve the problems of nozzle installation and ink flow in a print head.

また、本発明は、製造費を削減し、信頼性を高めると
言う目的を達成することができる。製造費削減の一部
は、発熱手段とノズルとの位置合わせの困難を全て除く
という製造工程の自動化により達成される。信頼性改善
の一部は、抵抗の寿命が延びたこと、プリントヘッドの
インクの流れがスムーズになったことにより達成され
る。本発明によって初めて、熱インクジェット式プリン
トヘッドにおいて、ページ幅のプリントヘッドアレーを
構成することが可能になる。Further, the present invention can achieve the object of reducing manufacturing costs and increasing reliability. Part of the reduction in manufacturing costs is achieved by automation of the manufacturing process, which eliminates all difficulties in aligning the heating means with the nozzles. Part of the reliability improvement is achieved through longer resistor life and smoother printhead ink flow. The present invention makes it possible for the first time to construct a pagewidth printhead array in a thermal ink jet printhead.

本発明の特徴として、第１図に示すように、自動的に
アラインメントが行われるノズル19が設けられている。
従来の方法では、第２図に図示したノズル板１が中心か
らずれてしまう（ミスアライン）ことがあった。ミスア
ラインのために、ドットが広がり、プリントが斜めにな
ったりする。こうした欠点が本発明によって除去され
る。As a feature of the present invention, as shown in FIG. 1, there is provided a nozzle 19 for performing automatic alignment.
In the conventional method, the nozzle plate 1 shown in FIG. 2 may be shifted from the center (misalignment). Misalignment causes dots to spread and prints to be skewed. These disadvantages are eliminated by the present invention.

本発明のモノリシックプリントヘッド20は、抵抗の故
障を少なくする。第２図に示す従来のTIJプリントヘッ
ドでは、泡のつぶれ、及びインクの補充のために抵抗に
衝撃が与えられる。第１図に示すモノリシックTIJプリ
ントヘッド20ではつぶれる泡は、補充されるインクとぶ
つかるようになっている。このため、インクがキャビテ
ーション力をほとんど吸収する。残りのキャビテーショ
ン力は、抵抗等の発熱手段を上に載置したカンチレバー
梁（cantilever beam。以下、張り出し部とも言う）に
よって吸収される。延性ニッケルにより構成したカンチ
レバー梁は、インク保持部の中に浮かんでいるような形
に形成される。抵抗に加わる機械的力は、インクそれ自
体と同様、カンチレバー梁のフレキシビリティにより緩
衝される。The monolithic printhead 20 of the present invention reduces resistance failure. In the conventional TIJ print head shown in FIG. 2, the resistance is impacted due to the collapse of bubbles and the replenishment of ink. In the monolithic TIJ print head 20 shown in FIG. 1, the collapsed bubbles collide with the refilled ink. Therefore, the ink absorbs almost the cavitation force. The remaining cavitation force is absorbed by a cantilever beam (hereinafter, also referred to as an overhang) on which a heating means such as a resistance is placed. The cantilever beam made of ductile nickel is formed so as to float in the ink holding portion. The mechanical force on the resistance is buffered by the flexibility of the cantilever beam, as is the ink itself.

また本発明によれば、プリント速度がインクの補充速
度によって制限されることはない。第１図に示すよう
に、インク保持部11は加熱要素15に直接的に接続されて
いる。この直接的な接続によりインク流への抵抗が軽減
される。このため、プリント速度がインクの補充速度に
よって制限されることがなくなる。Further, according to the present invention, the printing speed is not limited by the ink replenishment speed. As shown in FIG. 1, the ink holding unit 11 is directly connected to the heating element 15. This direct connection reduces the resistance to ink flow. Therefore, the printing speed is not limited by the ink replenishment speed.

〔実施例〕〔Example〕

以下、本発明を図面に示す実施例に基づいて説明す
る。第１図は、本発明の実施例による、一体的に形成さ
れた（integrated）ノズル及びインクつぼ（ink well、
以下インク供給部、又はインク保持部と言う）を有する
モノリシック熱インクジェット式プリントヘッドの断面
図を示している。第４図はモノリシックプリントヘッド
20の上面図を示している。インク保持部は基板10内にあ
ってインクを保持・供給する。発熱手段（加熱要素）で
ある抵抗層15はインクを蒸発させる。ガス状のインク
（水蒸気、グリコール及びインク色素粒子）は、ノズル
部17に移動する。コンパウンドボア（compound bore:例
えば、中心を共通にし且つ異なる内径の連続的な曲面を
有する穴）ノズル19は、累積したガス状のインクの圧力
によってインクをノズルから放出させるべく、該ガス状
インクを導くものである。Hereinafter, the present invention will be described based on embodiments shown in the drawings. FIG. 1 shows an integrated nozzle and ink well, according to an embodiment of the present invention.
FIG. 1 shows a cross-sectional view of a monolithic thermal inkjet print head having an ink supply unit or an ink holding unit. Fig. 4 shows a monolithic print head
20 shows a top view of FIG. The ink holding unit is located in the substrate 10 and holds and supplies ink. The resistance layer 15, which is a heating means (heating element), evaporates the ink. The gaseous ink (water vapor, glycol and ink pigment particles) moves to the nozzle unit 17. A compound bore (e.g., a hole having a common center and a continuous curved surface of different internal diameters) nozzles 19 allows the gaseous ink to be ejected from the nozzles by the accumulated pressure of the gaseous ink. To guide.

熱障壁、すなわち断熱層21は、ニッケルのカンチレバ
ー梁（張り出し部）12や、ニッケル基板40に熱が流れる
のを防止する。このような組み合わせにより、抵抗層15
からの熱はインクを加熱し、プリントヘッド20内でむだ
になってしまうことがない。（所定の）パターンに形成
された導体層23は、カンチレバー梁12を除き、抵抗層15
を短絡する。保護層25は、ノズル19を形成するためのニ
ッケルめっき工程中、導体23による短絡を防ぐ働きをす
る。保護層25はまた、各層の化学的機械的損傷をも防護
する。導体層27は、ノズル19を構成せしめるための面を
形成すべく、製造工程中に被着される。つまり、ノズル
19はその面の上に構成される。The heat barrier, that is, the heat insulating layer 21 prevents heat from flowing to the nickel cantilever beam (overhang portion) 12 and the nickel substrate 40. By such a combination, the resistance layer 15
Heat from the ink heats the ink and does not waste in the printhead 20. Except for the cantilever beam 12, the conductor layer 23 formed in the (predetermined) pattern has a resistance layer 15
Short circuit. The protective layer 25 functions to prevent a short circuit due to the conductor 23 during the nickel plating process for forming the nozzle 19. The protective layer 25 also protects each layer from chemical and mechanical damage. The conductor layer 27 is applied during the manufacturing process to form a surface on which the nozzle 19 is formed. That is, the nozzle
19 is constructed on that face.

モノリシック熱インジェット式プリントヘッド20を製
造する工程は、いくつかの段階からなる。第5A図に示す
ガラスまたはシリコンの基板10上に、約1000Å（約0.1
μｍ）の導体層30をスパッタリング技術を用いて被着さ
せる。導体層30に通電することにより、その表面をニッ
ケルめっきを施しうるような面とする処理を行う。次
に、第5B図に示すように、ドライフィルムマスク32を導
体層30に被せる。このマスク32は、直径２から３ミル
（約50μｍから75μｍ）で、第１図のカンチレバー梁12
及び第９図の13の位置決めを行う。第5C図はマスク32が
取りうる様々な別実施例を示す。マスク38は、第４図に
示すプリントヘッド20に対応する。マスク34は第10図に
示すプリントヘッド60に対応する。The process of manufacturing a monolithic thermal jet printhead 20 comprises several steps. On a glass or silicon substrate 10 shown in FIG.
μm) of the conductor layer 30 is deposited using a sputtering technique. By applying a current to the conductor layer 30, a process is performed to make the surface of the conductor layer 30 a surface on which nickel plating can be applied. Next, as shown in FIG. 5B, a dry film mask 32 is put on the conductor layer 30. The mask 32 has a diameter of 2 to 3 mils (about 50 μm to 75 μm) and has a cantilever beam 12 shown in FIG.
And the positioning of 13 in FIG. 9 is performed. FIG. 5C shows various alternative embodiments that the mask 32 can take. The mask 38 corresponds to the print head 20 shown in FIG. The mask 34 corresponds to the print head 60 shown in FIG.

次に、電気めっきにより、露出した基板10に、１から
1.5ミル（約25μｍから38μｍ）のニッケル層40を形成
する。カンチレバー梁12はこのようにして形成される。
めっき終了後、ドライフィルムマスク38を除去して、第
6B図に示すカンチレバー梁12を露出させる。保持部11
も、耐段階の工程により形成される。まず、スパッタリ
ングにより、保護金属層42を被着させる。この層は金か
らなり、厚さは1000Å（0.1μｍ）である。次に、マス
ク44により保持部の位置を決める。それから、シリコン
にはKOH、ガラスにはHFといった化学的なウェットエッ
チング工程により保持部11を形成する。保護金属層42と
マスク層44を除去すると、第6C図に示すような構造とな
る。Next, by electroplating, the exposed substrate 10 is
A 1.5 mil (about 25-38 μm) nickel layer 40 is formed. The cantilever beam 12 is formed in this way.
After the plating is completed, the dry film mask 38 is removed and the second
The cantilever beam 12 shown in FIG. 6B is exposed. Holder 11
Is also formed by the process of the withstand stage. First, the protective metal layer 42 is deposited by sputtering. This layer is made of gold and has a thickness of 1000 ° (0.1 μm). Next, the position of the holding unit is determined by the mask 44. Then, the holding portion 11 is formed by a chemical wet etching process such as KOH for silicon and HF for glass. When the protective metal layer 42 and the mask layer 44 are removed, a structure as shown in FIG. 6C is obtained.

次にLPCVD（減圧CVD法:low pressure chemical vapor
deposition）によるSiO2またその他の誘電材料により
なる断熱層21を被着させる。これは、第１図、第７図に
示すように、保持部11の内側、ニッケルめっき層40の
上、カンチレバー梁12のまわりに、1.5μｍの厚さで被
着される。断熱層21は、抵抗層21が効率よく働くのを助
ける。断熱層21の上には、第１図と第7A図に示すように
タンタルアルミニウム等の材料より成る抵抗層15が1000
Å（0.1μｍ）から3000Å（0.3μｍ）の厚さに被着され
る。次に、厚さ5000Å（0.5μｍ）の金またはアルミニ
ウムからなる導体層23が、抵抗層15に選択的にパターン
付けされ、抵抗層15の一部を短絡させる。導体層23は、
カンチレバー梁にはなく、したがって、カンチレバー梁
では抵抗層15が働くことができる。導体層23の上には、
シリコンカーバイト（SiC）やSi3N4その他の誘電材料よ
り成る保護層がLPCVD法を用いて被着される。この層は
化学的機械的損傷からプリントヘッドを保護する。Next, LPCVD (low pressure chemical vapor method)
A heat insulating layer 21 made of SiO 2 or other dielectric material is deposited by deposition. As shown in FIGS. 1 and 7, this is applied to the inside of the holding portion 11, on the nickel plating layer 40, around the cantilever beam 12, with a thickness of 1.5 μm. The heat insulating layer 21 helps the resistance layer 21 work efficiently. As shown in FIGS. 1 and 7A, a resistance layer 15 made of a material such as tantalum aluminum is
Deposited in thickness from Å (0.1 μm) to 3000 Å (0.3 μm). Next, a conductor layer 23 made of gold or aluminum having a thickness of 5000 ° (0.5 μm) is selectively patterned on the resistance layer 15 to short-circuit a part of the resistance layer 15. The conductor layer 23
There is no cantilever beam, so the resistance layer 15 can work on the cantilever beam. On the conductor layer 23,
A protective layer of silicon carbide (SiC), Si 3 N 4 or other dielectric material is applied using LPCVD. This layer protects the printhead from chemical and mechanical damage.

導体層27は1000から5000Å（0.1から0.5μｍ）の厚さ
で保護層25に被着される。これはスパッタリングによっ
て形成される。導体層27は、電気めっきでノズル19を形
成する面をなす。次に第7B図に示すように、ウェットエ
ッチング工程で、導体層27の所定部分をエッチングし、
残りの導体層27だけが、形成されるノズルの基底部に位
置するようにする。The conductor layer 27 is applied to the protective layer 25 at a thickness of 1000 to 5000 ° (0.1 to 0.5 μm). It is formed by sputtering. The conductor layer 27 has a surface on which the nozzle 19 is formed by electroplating. Next, as shown in FIG.7B, in a wet etching step, a predetermined portion of the conductor layer 27 is etched,
Only the remaining conductor layer 27 is located at the base of the nozzle to be formed.

次に、ドーナツ状のドライフィルムブロック52を導体
層27にラミネートする。これらブロック52はノズル19を
形成するためのフレームをなす。本実施例においては、
ノズル19は二段階のめっき工程で構成される。最初の工
程が終了したときには、第8A図に示すようになってい
る。ノズル19のベースが、1.5から2.0ミル（約38から51
μｍ）の厚さで導体性27に電気めっきにより形成され、
この厚さは（最終的）なノズル19の高さと等しくなって
いる。次に、ガラス板またはその他の平板状の誘電材料
56を、第8B図に示すようにノズル19に押し付ける。この
板56は、ニッケルめっき工程の第２段階において、ノズ
ル19の鋳型として作用する。さらに、電気めっき工程を
続けて、第8C図に示すようにノズル19を形成する。ノズ
ル19が完成した後、板56を除去する。この結果、第１図
に示すようなプリントヘッド20が構成される。Next, a donut-shaped dry film block 52 is laminated on the conductor layer 27. These blocks 52 form a frame for forming the nozzles 19. In this embodiment,
The nozzle 19 is constituted by a two-stage plating process. When the first step is completed, it is as shown in FIG. 8A. The base of nozzle 19 is 1.5 to 2.0 mils (about 38 to 51 mils)
μm) and is formed by electroplating on conductive 27
This thickness is equal to the (final) nozzle 19 height. Next, a glass plate or other flat dielectric material
56 is pressed against nozzle 19 as shown in FIG. 8B. This plate 56 acts as a mold for the nozzle 19 in the second stage of the nickel plating process. Further, the electroplating step is continued to form the nozzle 19 as shown in FIG. 8C. After the nozzle 19 is completed, the plate 56 is removed. As a result, a print head 20 as shown in FIG. 1 is formed.

なお、ノズル19は、他の方法を用いて形成してもよ
い。例えば、板56を使用せず、一段階のめっき工程でノ
ズル19を構成することもできる。Note that the nozzle 19 may be formed using another method. For example, the nozzle 19 can be configured by a single-stage plating process without using the plate 56.

第９図は、プリントヘッド20の他の実施例を示す。こ
の形のノズル19は、コンパウンドボアとも称すべきもの
である。これは、ノズル19から放出されるインク流を調
整する。コンパウンドボアノズルから放出されるインク
流は、直径が小さく、広がりがごくはずかである。カン
チレバー梁（張り出し部）13は、中心に向けて突出して
おり、発熱体15がこの張り出し部13の上に載置されてい
る。このプリントヘッドの実施例は、第１図に示すプリ
ントヘッド20と同じ方法で形成される。工程での主な相
違は、層40を基板10にめっきするとき用いられるマスク
の型である。カンチレバー梁12用のマスク38の代わり
に、マスク34又は36のようなマスクを使用する。FIG. 9 shows another embodiment of the print head 20. This type of nozzle 19 can also be called a compound bore. This regulates the ink flow emitted from the nozzle 19. The ink stream emitted from the compound bore nozzle is small in diameter and very likely to spread. The cantilever beam (overhanging portion) 13 protrudes toward the center, and the heating element 15 is placed on the overhanging portion 13. This embodiment of the printhead is formed in the same manner as the printhead 20 shown in FIG. The main difference in the process is the type of mask used when plating layer 40 on substrate 10. Instead of mask 38 for cantilever beam 12, a mask such as mask 34 or 36 is used.

上記した本発明の実施例において、プリントヘッドは
インクを射出するものであり、このインクは水、グリコ
ール、色素粒子を含有するものであるものとして説明し
たが、他の物質を射出するのに用いることもできること
は言うまでもない。In the embodiments of the present invention described above, the print head is for ejecting ink, and this ink is described as containing water, glycol, and pigment particles, but is used for ejecting other substances. It goes without saying that you can also do things.

〔効 果〕(Effect)

本発明は、上記のように構成されているものであるか
ら、ノズル部とインク保持部とが一体的に形成されてお
り、発熱体はその間に位置する張り出し部に載置されて
いるので、泡のつぶれ等によるキャビテーション力が補
充インクによって緩衝され、発熱体の受ける損傷が極め
て小さくなり、寿命が飛躍的に延びるという効果が得ら
れる。それにより、信頼性の高いプリントヘッドを提供
しうるという効果が得られる。Since the present invention is configured as described above, the nozzle portion and the ink holding portion are integrally formed, and the heating element is placed on the overhang portion located therebetween, so that The cavitation force due to the collapse of bubbles and the like is buffered by the supplemental ink, so that the damage to the heating element is extremely small, and the effect of dramatically extending the service life is obtained. As a result, an effect that a highly reliable print head can be provided is obtained.

また、ノズル部とインク保持部とが直接的に接続され
ているので、インクの補充速度が速くなり、プリント速
度自体の高速化を図ることができると言う効果が得られ
る。Further, since the nozzle portion and the ink holding portion are directly connected, the effect is obtained that the ink replenishment speed is increased and the printing speed itself can be increased.

また、発熱体及びノズルの位置決めを別々に行うので
はなく、製造工程において、自ずと両者の位置が一致す
るようになっているので、原理的に位置ずれが生じにく
く、ミスアラインによるドットの広がりや傾斜が防止さ
れ、従来のような細心な位置合わせ作業が必要ないので
製造コストの低減を図ることができるという効果が得ら
れる。In addition, the positioning of the heating element and the nozzle is not performed separately, but the positions of the heating element and the nozzle are naturally coincident with each other in the manufacturing process. Is prevented, and since there is no need for a meticulous alignment work as in the related art, the effect that the manufacturing cost can be reduced can be obtained.

また、広い範囲にわたって多数のノズルを有するよう
なプリントヘッドを製造しうるという効果が得られる。Further, there is an effect that a print head having a large number of nozzles over a wide range can be manufactured.

【図面の簡単な説明】[Brief description of the drawings]

第１図は本考案の実施例に係る熱インクジェット式プリ
ントヘッドの断面図、第２図は従来例に係る熱インクジ
ェット式プリントヘッドの斜視図、第3A図は従来例に係
る熱インクジェット式プリントヘッドの断面図、第3B図
は第3A図に示すプリントヘッドの一部断面図、第４図乃
至第10図は本発明の実施例に係り、第４図はプリントヘ
ッドのノズルを除いた状態を示す上面図、第5A図は製造
工程に於ける基板を示す断面図、第5B図は第5A図に示す
基板にマスクを被せた状態を示す断面図、第5C図は種々
のマスクの形状を示すための上面図、第6A図及び第6B図
及び第6C図はカンチレバー梁（張り出し部）と保持部と
の形成の工程を示す断面図、第7A図は抵抗層と保護層と
の形成を示す断面図、第7B図はノズルを形成するための
導体層とドーナツ形の枠とを示す断面図、第8A図及び第
8B図及び第8C図はノズルを形成する工程を示す断面図、
第９図は別実施例に係る熱インクジェット式プリントヘ
ッドの断面図、第10図は第９図に示すプリントヘッドの
上面図である。 10:基板、 11:インク保持部、 12,13:カンチレバー梁（張り出し部）、 15:発熱手段（発熱体、加熱要素）の一例たる抵抗層、 19:ノズル、 21:断熱層、 23:導体層、 25:保護層、 34,36,38:マスク、 52:ドーナツ状マスクブロック、 56:平板。FIG. 1 is a sectional view of a thermal ink jet print head according to an embodiment of the present invention, FIG. 2 is a perspective view of a thermal ink jet print head according to a conventional example, and FIG. 3A is a thermal ink jet print head according to a conventional example. 3B is a partial cross-sectional view of the print head shown in FIG. 3A, FIGS. 4 to 10 are related to the embodiment of the present invention, and FIG. 4 is a view of the print head excluding nozzles. FIG. 5A is a cross-sectional view showing a substrate in a manufacturing process, FIG. 5B is a cross-sectional view showing a state in which a mask is put on the substrate shown in FIG. 5A, and FIG. 5C shows various mask shapes. 6A, 6B, and 6C are cross-sectional views showing a process of forming a cantilever beam (extending portion) and a holding portion, and FIG. 7A is a diagram showing the formation of a resistive layer and a protective layer. FIG. 7B is a sectional view showing a conductive layer and a donut-shaped frame for forming a nozzle. Sectional view illustrating, FIG. 8A and the
8B and 8C are cross-sectional views showing steps of forming a nozzle.
FIG. 9 is a sectional view of a thermal ink jet print head according to another embodiment, and FIG. 10 is a top view of the print head shown in FIG. 10: Substrate, 11: Ink holding part, 12, 13: Cantilever beam (projection part), 15: Resistance layer as an example of heating means (heating element, heating element), 19: Nozzle, 21: Heat insulation layer, 23: Conductor Layer, 25: protective layer, 34, 36, 38: mask, 52: donut mask block, 56: flat plate.

Claims (12)

(57)【特許請求の範囲】(57) [Claims] 【請求項１】泡が形成されるノズル部と該ノズル部に供
給すべきインクの少なくとも一部を保持するインク保持
部との間に抵抗発熱体が位置し、該抵抗発熱体の前記泡
が形成される側と反対の側から少なくとも一部のインク
を供給する構造の熱インクジェットプリントヘッドにお
いて、 前記ノズル部と前記インク保持部とが一体的に形成さ
れ、それらの間に位置すべく掛けられた梁の上に前記抵
抗発熱体が設けられており、該梁は、前記抵抗発熱体の
発熱により形成された泡がつぶれるときに生じるキャビ
テーション力の一部を前記インク保持部から供給される
インクが吸収できる形状となっていることを特徴とする
熱インクジェットプリントヘッド。1. A resistance heating element is located between a nozzle part where bubbles are formed and an ink holding part which holds at least a part of ink to be supplied to the nozzle part, and the bubbles of the resistance heating element are In a thermal ink jet print head configured to supply at least a portion of ink from a side opposite to a side on which the nozzle is formed, the nozzle unit and the ink holding unit are integrally formed, and are hung to be positioned therebetween. The resistance heating element is provided on the beam, and the beam supplies a part of the cavitation force generated when the bubble formed by the heat generation of the resistance heating element is collapsed to the ink supplied from the ink holding unit. A thermal ink-jet printhead characterized in that it has a shape that can absorb water. 【請求項２】前記梁は、前記泡の形成される方向から見
た形状が、Ｓ字形状であることを特徴とする特許請求の
範囲第１項に記載の熱インクジェットプリントヘッド。2. The thermal ink jet print head according to claim 1, wherein the beam has an S-shape when viewed from a direction in which the bubbles are formed. 【請求項３】前記梁は、該梁が前記泡のつぶれたときに
生じるキャビテーション力を吸収するに十分な弾性を有
することを特徴とする特許請求の範囲第１項又は第２項
に記載の熱インクジェットプリントヘッド。3. The beam according to claim 1, wherein the beam has sufficient elasticity to absorb cavitation force generated when the beam collapses. Thermal inkjet printhead. 【請求項４】前記梁は、ニッケルからなることを特徴と
する特許請求の範囲第１項又は第２項又は第３項に記載
の熱インクジェットプリントヘッド。4. A thermal ink jet print head according to claim 1, wherein said beam is made of nickel. 【請求項５】前記ノズル部および前記インク保持部は、
複数の部材から構成されているものであることを特徴と
する特許請求の範囲第１項又は第２項又は第３項又は第
４項に記載の熱インクジェットプリントヘッド。5. The ink jet printer according to claim 1, wherein the nozzle unit and the ink holding unit are
5. The thermal inkjet printhead according to claim 1, wherein the thermal inkjet printhead comprises a plurality of members. 【請求項６】前記梁は、前記ノズル部および前記インク
保持部のいずれか一方又は両方の内側面の一部から掛け
られているものであることを特徴とする特許請求の範囲
第１項又は第２項又は第３項又は第４項又は第５項に記
載の熱インクジェットプリントヘッド。6. The method according to claim 1, wherein said beam is hung from a part of an inner surface of one or both of said nozzle portion and said ink holding portion. Item 6. The thermal ink jet printhead according to item 2, 3 or 4, or 5. 【請求項７】前記梁は、前記ノズル部および前記インク
保持部のいずれか一方又は両方の内側面の一部から別の
一部へ掛けられているものであることを特徴とする特許
請求の範囲第６項に記載の熱インクジェットプリントヘ
ッド。7. The apparatus according to claim 1, wherein said beam is hung from a part of an inner surface of one or both of said nozzle part and said ink holding part to another part. 7. A thermal ink jet printhead according to claim 6, wherein: 【請求項８】前記梁は、前記ノズル部および前記インク
保持部のいずれか一方又は両方の内側面の一部からその
反対側へ掛けられているものであることを特徴とする特
許請求の範囲第７項に記載の熱インクジェットプリント
ヘッド。8. The apparatus according to claim 1, wherein said beam is hung from a part of an inner surface of one or both of said nozzle portion and said ink holding portion to an opposite side thereof. 8. A thermal inkjet printhead according to claim 7. 【請求項９】前記ノズル部は、環状のフレームから内側
に金属層をオリフィス開口を残してめっき成長させるこ
とにより形成されたものであることを特徴とする特許請
求の範囲第１項又は第２項又は第３項又は第４項又は第
８項に記載の熱インクジェットプリントヘッド。9. A nozzle according to claim 1, wherein said nozzle portion is formed by plating and growing a metal layer inside said annular frame while leaving an orifice opening. Item 9. The thermal inkjet printhead according to item 3, item 3, item 4, or item 8. 【請求項１０】前記梁は、前記泡の形成される方向から
見た形状が、環状であり、前記ノズル部および前記イン
ク保持部のいずれか一方又は両方の内側面から内側に張
り出すように掛けられているものであることを特徴とす
る特許請求の範囲第１項に記載の熱インクジエットプリ
ントヘッド。10. The beam has a ring shape as viewed from the direction in which the bubbles are formed, and protrudes inward from the inner surface of one or both of the nozzle portion and the ink holding portion. 2. The thermal ink jet print head according to claim 1, wherein the thermal ink jet print head is hung. 【請求項１１】下記（ａ）乃至（ｅ）の工程を有する、 泡が形成されるノズル部と該ノズル部に供給すべきイン
クの少なくとも一部を保持するインク保持部との間に抵
抗発熱体が位置し、該抵抗発熱体の前記泡が形成される
側と反対の側から少なくとも一部のインクを供給する構
造の熱インクジェットプリントヘッドにおいて、前記ノ
ズル部と前記インク保持部とが一体的に形成され、それ
らの間に位置すべく掛けられた梁の上に前記抵抗発熱体
が設けられており、該梁は、前記抵抗発熱体の発熱によ
り形成された泡がつぶれるときに生じるキャビテーショ
ン力の一部を前記インク保持部から供給されるインクが
吸収できる形状となっている熱インクジェットプリント
ヘッドの製造方法。 （ａ）基板の一方の面に梁の形状を決めるマスキングを
ほどこし、エッチングを行って梁を形成する工程。 （ｂ）前記基板の他方の面にインク保持部の形状を決め
るマスキングをほどこし、エッチングを行ってインク保
持部を形成する工程。 （ｃ）前記梁に抵抗発熱体層を被着させる工程。 （ｄ）前記基板上に前記梁を囲むように環状の種層を設
ける工程。 （ｅ）前記環状の種層の半径方向内側に金属層を開口部
を残してめっき成長させることによりノズル部を形成す
る工程。11. A resistive heating method comprising the following steps (a) to (e), wherein a resistive heat is generated between a nozzle portion where bubbles are formed and an ink holding portion which holds at least a part of ink to be supplied to the nozzle portion. In a thermal ink jet print head having a structure in which a body is located and at least a part of ink is supplied from a side of the resistance heating element opposite to a side where the bubbles are formed, the nozzle part and the ink holding part are integrated. And the resistance heating element is provided on a beam hung to be positioned therebetween, the beam having a cavitation force generated when bubbles formed by the heat generation of the resistance heating element collapse. A method for manufacturing a thermal ink jet print head, wherein a part of the ink jet print head is shaped to absorb ink supplied from the ink holding unit. (A) A step of forming a beam by performing masking on one surface of a substrate to determine the shape of the beam and performing etching. (B) a step of applying masking for determining the shape of the ink holding portion on the other surface of the substrate, and performing etching to form the ink holding portion. (C) applying a resistance heating element layer to the beam. (D) providing an annular seed layer on the substrate so as to surround the beam. (E) a step of forming a nozzle portion by plating and growing a metal layer radially inward of the annular seed layer while leaving an opening. 【請求項１２】泡が形成されるノズル部と該ノズル部に
供給すべき液体の少なくとも一部を保持する液体保持部
との間に抵抗発熱体が位置し、該抵抗発熱体の前記泡が
形成される側と反対の側から少なくとも一部の液体を供
給する構造の液体粒反射装置において、 前記ノズル部と前記液体保持部とが一体的に形成され、
それらの間に位置すべく掛けられた梁の上に前記抵抗発
熱体が設けられており、該梁は、前記抵抗発熱体の発熱
により形成された泡がつぶれるときに生じるキャビテー
ション力の一部を前記液体保持部から供給される液体が
吸収できる形状となっていることを特徴とする液体粒発
射装置。12. A resistance heating element is located between a nozzle part where bubbles are formed and a liquid holding part that retains at least a part of liquid to be supplied to the nozzle part, and the bubbles of the resistance heating element are In a liquid particle reflecting device configured to supply at least a part of liquid from a side opposite to a side on which the nozzle is formed, the nozzle unit and the liquid holding unit are integrally formed,
The resistance heating element is provided on a beam hung between them, and the beam generates a part of the cavitation force generated when a bubble formed by the heat generation of the resistance heating element collapses. A liquid particle launching device having a shape capable of absorbing a liquid supplied from the liquid holding unit.
JP62107854A 1986-04-28 1987-04-28 Thermal ink jet print head Expired - Fee Related JP2635043B2 (en)

Applications Claiming Priority (2)

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US85674086A 1986-04-28 1986-04-28
US856740 1986-04-28

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JP8042317A Division JP2716418B2 (en) 1986-04-28 1996-02-29 Manufacturing method of thermal ink jet print head

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JPS62259864A JPS62259864A (en) 1987-11-12
JP2635043B2 true JP2635043B2 (en) 1997-07-30

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EP0367303A1 (en) 1990-05-09
DE3771269D1 (en) 1991-08-14
JPH08230192A (en) 1996-09-10
EP0244214B1 (en) 1991-07-10
JP2716418B2 (en) 1998-02-18
JPS62259864A (en) 1987-11-12
EP0244214A1 (en) 1987-11-04

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