JPH08230192A - Manufacture of thermal ink jet type print head - Google Patents

Manufacture of thermal ink jet type print head

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Publication number
JPH08230192A
JPH08230192A JP4231796A JP4231796A JPH08230192A JP H08230192 A JPH08230192 A JP H08230192A JP 4231796 A JP4231796 A JP 4231796A JP 4231796 A JP4231796 A JP 4231796A JP H08230192 A JPH08230192 A JP H08230192A
Authority
JP
Japan
Prior art keywords
ink
nozzle
print head
heat generating
generating resistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4231796A
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Japanese (ja)
Other versions
JP2716418B2 (en
Inventor
Alfred I-Tsung Pan
アルフレッド・アイツング・パン
Original Assignee
Hewlett Packard Co <Hp>
ヒューレット・パッカード・カンパニー
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Priority to US85674086A priority Critical
Priority to US856740 priority
Application filed by Hewlett Packard Co <Hp>, ヒューレット・パッカード・カンパニー filed Critical Hewlett Packard Co <Hp>
Publication of JPH08230192A publication Critical patent/JPH08230192A/en
Application granted granted Critical
Publication of JP2716418B2 publication Critical patent/JP2716418B2/en
Anticipated expiration legal-status Critical
Application status is Expired - Lifetime legal-status Critical

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/164Production of nozzles manufacturing processes thin film formation
    • B41J2/1642Production of nozzles manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14016Structure of bubble jet print heads
    • B41J2/14088Structure of heating means
    • B41J2/14112Resistive element
    • B41J2/1412Shape
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14016Structure of bubble jet print heads
    • B41J2/14088Structure of heating means
    • B41J2/14112Resistive element
    • B41J2/14129Layer structure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14016Structure of bubble jet print heads
    • B41J2/14145Structure of the manifold
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1601Production of bubble jet print heads
    • B41J2/1603Production of bubble jet print heads of the front shooter type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/1626Production of nozzles manufacturing processes etching
    • B41J2/1629Production of nozzles manufacturing processes etching wet etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/1631Production of nozzles manufacturing processes photolithography
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/1632Production of nozzles manufacturing processes machining
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/1637Production of nozzles manufacturing processes molding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/164Production of nozzles manufacturing processes thin film formation
    • B41J2/1643Production of nozzles manufacturing processes thin film formation thin film formation by plating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/164Production of nozzles manufacturing processes thin film formation
    • B41J2/1646Production of nozzles manufacturing processes thin film formation thin film formation by sputtering
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01Embodiments of or processes related to ink-jet heads
    • B41J2202/03Specific materials used
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01Embodiments of or processes related to ink-jet heads
    • B41J2202/11Embodiments of or processes related to ink-jet heads characterised by specific geometrical characteristics

Abstract

PROBLEM TO BE SOLVED: To realize the exact and easy alignment between a heat generating resistor for evaporating ink and a nozzle and, in addition, reduce cavitation damage and heighten ink feeding speed.
SOLUTION: By providing an annular frame so as to position in the fashion for surrounding a heat generating resistor 15 and forming a nozzle part 17 inside the annular frame by growing metal layer by plating, the automatical alignment between the heat generating resistor and the nozzle is realized. Thus, the manufacturing of a large-scaled print head becomes also possible. in order to make plating possible, an ink holding part 11 and the nozzle part 17 are directly connected with each other. On a beam locating between the ink holding part 11 and the nozzle part 17, the heat generating resistor 15 is provided. Thus, the effect such that the cavitating force due to the collapse of bubble is absorbed by the ink to be supplied and feeding of ink is also quick is realized.
COPYRIGHT: (C)1996,JPO

Description

【発明の詳細な説明】 DETAILED DESCRIPTION OF THE INVENTION

【0001】 [0001]

【産業上の利用分野】本発明は、インクジェット式プリントヘッドとその製造方法に係り、特に、ノズルのセルフアラインメントの可能なプリントヘッドとその製造方法に関する。 The present invention relates relates to a method of manufacturing an ink jet printhead, in particular, possible printhead self-alignment of the nozzle and a method for manufacturing the same.

【0002】 [0002]

【従来技術】従来の熱インクジェット式プリントヘッド2を、第2図に示す。 BACKGROUND OF THE INVENTION The conventional thermal ink jet printhead 2, shown in Figure 2. 熱インクジェットにおいて技術的に解決すべき課題として、組み立ての問題、即ちノズル板1の脱離の問題がある。 As a problem to be solved technically in thermal ink jet, there are assembly problems, i.e. of the nozzle plate 1 elimination problem. 従来では各ノズル板1は、第3A図に示すように、エポキシにより、抵抗構造3に個別に装着される。 Each nozzle plate 1 in the prior art, as shown in FIG. 3A, the epoxy, are mounted individually to the resistance structure 3. これは非常にコストのかかる工程であり、且つ種々の問題を起こす可能性をもっている。 This is a very costly process, and and have the potential to cause various problems. 例えば、この作業ではノズル板1のアラインメントがうまくいかないことがよくある。 For example, in this work it is often the alignment of the nozzle plate 1 does not work. 従来技術を簡単に示す第3A The 3A which shows a prior art simple
図では細かい部分は省略してある。 Small part in the drawing is omitted. 熱インクジェットプリントヘッド2の種々の構成要素は、それぞれ熱膨張率が違うので、接着剤が硬化するとき、ノズル板が脱離しようとする傾向がある。 Various components of a thermal ink jet printhead 2, since each thermal expansion rate is different, when the adhesive cures, there is a tendency for the nozzle plate and desorbed so. このような接着の問題があるため、従来の熱インクジェットプリントヘッドでは、ノズルの数が制限されてしまうという欠点があった。 Because of this adhesion problems, in the conventional thermal ink jet printhead, it has a drawback that the number of nozzles is limited.

【0003】従来の熱インクジェットプリントヘッド2 Conventional thermal ink jet printhead 2
では、インクの補充速度も問題になる。 In the replenishment rate of the ink is also a problem. 補充速度によってプリント速度が制限される。 Print speed is limited by the replenishment rate. 第3B図に示した従来の熱インクジェットプリントヘッド2では、インクは、インクの流れを制限する摩擦の大きな溝7を通ってノズル6に達する。 In conventional thermal ink jet printhead 2 as shown in Figure 3B, the ink reaches the nozzle 6 through the large groove 7 of the friction that limits the flow of ink.

【0004】ここに従来例として引用する「モノリシックインクジェットプリントヘッド」と称する米国特許第4,438,191号(本願出願人の出願に係る、特開昭59−95156号)に記載した発明では、上記した問題を一部解決しうる「モノリシックインクジェットプリントヘッド」が提案されている。 [0004] In the invention described herein cited as a conventional example referred to as "monolithic ink jet print head" U.S. Patent No. 4,438,191 (according to the applicant of the application, JP 59-95156), the It can solve some of the problems mentioned above "monolithic ink jet print head" has been proposed. しかしながら、このプリントヘッドの製造には、新たに次のような問題が生じる。 However, the production of this printhead produces newly the following problem. 即ち、インク穴の形成、加熱室(firing chambe That is, the formation of the ink holes, the heating chamber (firing Chambe
r)その他の場所からのドライフィルム残えきの除去、 r) removal of the dry film residual Station from other locations,
ノズルの正確なアラインメント、その他様々な製造上の問題である。 The exact alignment of the nozzle, other are various manufacturing problems. また、従来のモノリシックプリントヘッドのノズルは散開(diverge)させることができなかった。 The nozzle of the conventional monolithic print head could not be spread out (diverge).

【0005】また、従来のインクジェットプリントヘッドには泡がつぶれることにより、また補充インクのために抵抗に衝撃が与えられる。 Further, by bubble collapse in the conventional ink jet printhead, also impact is applied to the resistance for refill ink. このキャビテーション(点食)の力が繰り返し加わることにより、抵抗が破壊してしまうという欠点があった。 By repeatedly applied force of the cavitation (pitting), resistance is a defect that destroys.

【0006】 [0006]

【発明が解決しようとする課題】本発明に係る、ノズルとインク保持部(ink well)とを一体的に形成したモノリシック熱インクジェット式プリントヘッド及びその製造方法は、上記した従来のプリントヘッドにおけるノズルの取り付けやインク流の問題を解決するものである。 According to the present invention 0005], the nozzles and the ink holding portion (ink well) integrally formed with monolithic thermal inkjet printhead and a manufacturing method thereof and a nozzle in the conventional print head described above It solves the mounting and the ink flow problem.

【0007】また、本発明は、製造費を削減し、信頼性を高めるという目的を達成しようとするものである。 [0007] In addition, the present invention is to reduce manufacturing costs, it is intended to achieve the objective of increasing the reliability. 製造費削減の一部は、発熱手段とノズルとの位置合わせの困難を全て除くという製造工程の自動化により達成される。 Some of the manufacturing cost reduction is achieved by automating the manufacturing process of excluding any difficulty positioning the heating means and the nozzle. 信頼性改善の一部は、抵抗の寿命が延びたことと、 Some of the reliability improvement and the life of the resistor is extended,
プリントヘッドのインクの流れがスムーズになったことにより達成される。 Ink flow print head is achieved by now smoothly. 本発明によって初めて、熱インクジェット式プリントヘッドにおいて、ページ幅のプリントヘッドアレーを構成することが可能になる。 Only by the present invention, in a thermal ink jet printhead, it is possible to configure the print head array pagewidth.

【0008】 [0008]

【課題を解決するための手段】本発明の特徴として、第1図に示すように、自動的にアラインメントが行われるノズル19が設けられている。 As a feature of the present invention SUMMARY OF THE INVENTION As shown in Figure 1, automatically aligned nozzle 19 is provided made. 従来の方法では、第2図に図示したノズル板1が中心からずれてしまう(ミスアライン)ことがあった。 In the conventional method, a nozzle plate 1 illustrated in Figure 2 was sometimes deviates from the center (misaligned). ミスアラインのために、ドットが広がり、プリントが斜めになったりする。 For misalignment, dot spread, print may become skewed. こうした欠点が本発明によって除去される。 These disadvantages are eliminated by the present invention.

【0009】本発明のモノリシリックプリントヘッド2 [0009] monolinoleate of the present invention Shirikku print head 2
0は、抵抗の故障を少なくする。 0, to reduce the failure of the resistance. 第2図に示す従来の熱インクジェットプリントヘッドでは、泡のつぶれ、及びインクの補充のために抵抗に衝撃が与えられる。 In a conventional thermal ink jet printhead shown in FIG. 2, collapse of foam, and the impact is applied to the resistor for replenishment of the ink. 第1図に示すモノリシック熱インクジェットプリントヘッド2 Monolithic thermal ink jet printhead 2 as shown in Figure 1
0ではつぶれる泡は、補充されるインクとぶつかるようになっている。 In 0 collapsing bubbles it is adapted to collide with the ink to be replenished. このため、インクがキャビテーション力をほとんど吸収する。 For this reason, the ink is mostly absorbed cavitation force. 残りのキャビテーション力は、抵抗等の発熱手段を上に載置したカンチレバー梁(cantil The remaining cavitation forces, a cantilever beam the heating means is placed above such as a resistor (Cantil
ever beam。 ever beam. 以下、張り出し部とも言う)によって吸収される。 Below, it is absorbed by also referred to) and the overhanging portion. 延性ニッケルにより構成したカンチレバー梁は、インク保持部の中に浮かんでいるような形に形成される。 Cantilever beam constituted by ductile nickel is formed in the shape as floating in the ink retaining portion. 抵抗に加わる機械的力は、インクそれ自体と同様、カンチレバー梁のフレキシビリティにより緩衝される。 Mechanical force applied to the resistance, similar to the ink itself, it is buffered by the flexibility of the cantilever beam.

【0010】また本発明によれば、プリント速度がインクの補充速度によって制限されることはない。 [0010] According to the present invention, there is no possibility that printing speed is limited by the rate of replenishment ink. 第1図に示すように、インク保持部11は加熱要素15に直接的に接続されている。 As shown in FIG. 1, the ink retaining portion 11 is directly connected to the heating element 15. この直接的な接続によりインク流への抵抗が軽減される。 Resistance to the ink flow is reduced by the direct connection. このため、プリント速度がインクの補充速度によって制限されることがなくなる。 Therefore, it becomes unnecessary to print speed is limited by the rate of replenishment ink.

【0011】 [0011]

【実施例】以下、本発明を図面に示す実施例に基づいて説明する。 BRIEF DESCRIPTION based on examples illustrating the present invention with reference to the drawings. 第1図は、本発明方法により製造された実施例に係る、一体的に形成された(integrated)ノズル及びインクつぼ(ink well、以下インク供給部、又はインク保持部と言う)を有するモノリシック熱インクジェット式プリントヘッドの断面図を示している。 Figure 1 is according to the example prepared by the method of the present invention, a monolithic heat with integrally formed (integrated) nozzles and the ink fountain (ink well, below the ink supply portion, or say an ink holding portion) It shows a cross-sectional view of an ink jet printhead. 第4図はモノリシックプリントヘッド20の平面図を示している。 Figure 4 shows a plan view of a monolithic print head 20.
インク保持部は基板10内にあってインクを保持・供給する。 The ink holding unit holding and supplying ink be within the substrate 10. 発熱手段(加熱要素)である抵抗層15はインクを蒸発させる。 A heat generating means (heating element) resistive layer 15 to evaporate the ink. ガス状のインク(水蒸気、グリコール及びインク色素粒子)は、ノズル部17に移動する。 Gaseous ink (water vapor, glycol and ink dye particles) is moved to the nozzle portion 17. コンパウンドボア(compound bore:例えば、中心を共通にし且つ異なる内径の連続的な曲面を有する穴)ノズル1 Compound bore (Compound bore: For example, the hole has a continuous curved surface and different inner diameters to the center in common) nozzle 1
9は、累積したガス状インクの圧力によってインクをノズルから放出させるべく、該ガス状インクを導くものである。 9, in order to release the ink from the nozzles by the pressure of accumulated gaseous ink, and guides the gaseous ink.

【0012】熱障壁、すなわち断熱層21は、ニッケルのカンチレバー梁(張り出し部)12や、ニッケル基板40に熱が流れるのを防止する。 [0012] Thermal barrier, i.e. heat-insulating layer 21 prevents the cantilever beam (projecting portion) 12 and the nickel, the heat flows through the nickel substrate 40. このような組み合わせにより、抵抗層15からの熱はインクを加熱し、プリントヘッド20内でむだになってしまうことがない。 Such a combination heat from the resistive layer 15 heats the ink, never become waste in the print head 20. (所定の)パターンに形成された導体層23は、カンチレバー梁12上を除き、抵抗層15を短絡する。 (Predetermined) conductive formed on the pattern layer 23, except for the cantilever beam 12 above, shorting the resistive layer 15. 保護層25 The protective layer 25
は、ノズル19を形成するためのニッケルめっき工程中、導体23による短絡を防ぐ働きをする。 During nickel plating process for forming the nozzle 19 and serves to prevent a short circuit caused by a conductor 23. 保護層25 The protective layer 25
はまた、各層の化学的機械的損傷をも防護する。 Also it protects also the chemical mechanical damage of each layer. 導体層27は、ノズル19を構成せしめるための面を形成すべく、製造工程中に被着される。 Conductor layer 27, to form a surface for allowing constructing the nozzle 19, is deposited during the manufacturing process. つまり、ノズル19はその面の上に構成される。 That is, the nozzle 19 is constructed on its surface.

【0013】モノリシック熱インクジェット式プリントヘッド20を製造する工程は、いくつかの段階からなる。 [0013] process for manufacturing a monolithic thermal ink jet printhead 20 consists of several stages. 第5A図に示すガラスまたはシリコンの基板10上に、約1000オングストローム(約0.1μm)の導体層30をスパッタリング技術を用いて被着させる。 On the substrate 10 of glass or silicon is shown in Figure 5A, it is deposited using a sputtering technique a conductive layer 30 of about 1000 angstroms (approximately 0.1 [mu] m). 導体層30に通電することにより、その表面をニッケルめっきを施しうるような面とする処理を行う。 By energizing the conductive layer 30 performs a process of the surface with a surface such as may plated with nickel. 次に、第5 Next, the 5
B図に示すように、ドライフィルムマスク32を導体層30に被せる。 As shown in Figure B, it is covered with a dry film mask 32 to the conductor layer 30. このマスク32は、直径2から3ミル(約50μmから75μm)で、第1図のカンチレバー梁12及び第9図の13の位置決めを行う。 The mask 32 is a 3 mil diameter 2 (75 [mu] m to about 50 [mu] m), performs 13 positioning of the cantilever beam 12 and the ninth diagram of Figure 1. 第5C図はマスク32が取りうる様々な別実施例を示す。 The 5C drawing shows the various alternative embodiments where the mask 32 can take. マスク3 Mask 3
8は、第4図に示すプリントヘッド20に対応する。 8 corresponds to the print head 20 shown in Figure 4. マスク34は第10図に示すプリントヘッド60に対応する。 Mask 34 corresponding to the print head 60 shown in FIG. 10.

【0014】次に、電気めっきにより、露出した基板1 [0014] Then, by electroplating, the exposed substrate 1
0に、1から1.5ミル(約25μmから38μm)のニッケル層40を形成する。 0, to form a nickel layer 40 of 1 to 1.5 mil (38 [mu] m to about 25 [mu] m). カンチレバー梁12はこのようにして形成される。 The cantilever beam 12 is formed in this way. めっき終了後、ドライフィルムマスク38を除去して、第6B図に示すカンチレバー梁12を露出させる。 After completion of the plating, by removing the dry film mask 38 to expose the cantilever beam 12 shown in Figure 6B. 保持部11も、多段階の工程により形成される。 Holding portion 11 is also formed by a multi-step process. まず、スパッタリングにより、保護金属層42を被着させる。 First, by sputtering, depositing a protective metal layer 42. この層は金からなり、厚さは100 This layer is made of gold, the thickness 100
0オングストローム(0.1μm)である。 0, which is the angstrom (0.1μm). 次に、マスク44により保持部の位置を決める。 Next, determine the position of the holding portion by the mask 44. それから、シリコンにはKOH、ガラスにはHFといった化学的なウェットエッチング工程により保持部11を形成する。 Then, the silicon KOH, the glass forms a holding portion 11 by chemical wet etching process such as HF. 保持部42とマスク層44を除去すると、第6C図に示すような構造となる。 Removal of the holder 42 and the mask layer 44, the structure as shown in FIG. 6C.

【0015】次にLPCVD(減圧CVD法:low pres [0015] Next, LPCVD (low pressure CVD method: low pres
sure chemical vapor deposition)によるSiO2 またその他の誘電材料によりなる断熱層21を被着させる。 sure chemical vapor deposition) SiO2 Also by depositing an insulating layer 21 made by other dielectric material.
これは、第1図、第7図に示すように、保持部11の内側、ニッケルめっき層40の上、カンチレバー梁12のまわりに、1.5μmの厚さで被着される。 This is the first view, as shown in FIG. 7, the inside of the holding portion 11, on the nickel plating layer 40, around the cantilever beam 12, is deposited in a thickness of 1.5 [mu] m. 断熱層21 The heat-insulating layer 21
は、抵抗層21が効率よく働くのを助ける。 , The resistance layer 21 to help the work efficiently. 断熱層21 The heat-insulating layer 21
の上には、第1図の第7A図に示すようにタンタルアルミニウム等の材料より成る抵抗層15が1000オングストローム(0.1μm)から3000オングストローム(0.3μm)の厚さに被着される。 Over is deposited resistive layer 15 made of a material of tantalum aluminum or the like, as shown in Figures 7A of FIG. 1 from 1000 angstroms (0.1 [mu] m) to a thickness of 3000 Angstroms (0.3 [mu] m) . 次に、厚さ50 Then, a thickness of 50
00オングストローム(0.5μm)の金またはアルミニウムからなる導体層23が、抵抗層15に選択的にパターン付けされ、抵抗層15の一部を短絡させる。 00 Å conductor layer 23 made of gold or aluminum (0.5 [mu] m) is selectively patterned with the resistive layer 15, shorting a portion of the resistive layer 15. 導体層23は、カンチレバー梁にはなく、したがって、カンチレバー梁では抵抗層15が働くことができる。 Conductor layer 23 is not in the cantilever beam, thus, can be resistive layer 15 acts in the cantilever beam. 導体層23の上には、シリコンカーバイト(SiC)やSi3 On the conductive layer 23, a silicon carbide (SiC) and Si3
N4 その他の誘電材料より成る保護層がLPCVD法を用いて被着される。 N4 protective layer made of other dielectric materials are deposited by the LPCVD method. この層は化学的機械的損傷からプリントヘッドを保護する。 This layer protects the print head from the chemical mechanical damage.

【0016】導体層27は1000から5000オングストローム(0.1から0.5μm)の厚さで保護層2 The conductor layer 27 is a protective layer 2 with a thickness of 1000 to 5000 Angstroms (0.5 [mu] m 0.1)
5に被着される。 5 is deposited on. これはスパッタリングによって形成される。 It is formed by sputtering. 導体層27は、電気めっきでノズル19を形成する面をなす。 Conductive layer 27 forms a surface forming a nozzle 19 by electroplating. 次に第7B図に示すように、ウェットエッチング工程で、導体層27の所定部分をエッチングし、 Next, as shown in Figure 7B, a wet etching process, a predetermined portion of the conductor layer 27 are etched,
残りの導体層27だけが、形成されるノズルの基底部に位置するようにする。 Only the remaining conductive layer 27, to be positioned at the base of the nozzles formed.

【0017】次に、ドーナツ状のドライフィルムブロック52を導体層27にラミネートする。 Next, laminated donut-shaped dry film block 52 to the conductor layer 27. これらブロック52はノズル19を形成するためのフレームをなす。 These blocks 52 forming the frame for forming the nozzle 19. 本実施例においては、ノズル19は二段階のめっき工程で構成される。 In the present embodiment, the nozzle 19 is composed of a two-stage plating process. 最初の工程が終了したときには、第8A図に示すようになっている。 When the first step is completed is as shown in FIG. 8A. ノズル19のベースが、1. Base of nozzle 19, 1.
5から2.0ミル(約38から51μm)の厚さで導体層27に電気めっきにより形成され、この厚さは(最終的)なノズル19の高さと等しくなっている。 5 is formed by electroplating the conductive layer 27 from a thickness of 2.0 mils (51 [mu] m to about 38), this thickness is equal to the height of the nozzle 19 a (final). 次に、ガラス板またはその他の平板状の誘電材料56を、第8B Next, a dielectric material 56 of glass or other flat, the 8B
図に示すようにノズル19に押し付ける。 It is pressed against the nozzle 19 as shown in FIG. この板56 The plate 56
は、ニッケルめっき工程の第2段階において、ノズル1 , In the second stage of the nickel plating step, the nozzle 1
9の鋳型として作用する。 To act as a template for 9. さらに、電気めっき工程を続けて、第8C図に示すようにノズル19を形成する。 Moreover, it continued electroplating process to form a nozzle 19 as shown in 8C FIG. ノズル19が完成した後、板56を除去する。 After the nozzle 19 is completed, to remove the plate 56. この結果、 As a result,
第1図に示すようなプリントヘッド20が構成される。 Print head 20 as shown in Figure 1 is constructed.

【0018】なおノズル19は、他の方法を用いて形成してもよい。 [0018] Note that the nozzle 19 may be formed using other methods. 例えば、板56を使用せず、一段階のめっき工程でノズル19を構成することもできる。 For example, instead of using a plate 56, it is also possible to configure the nozzles 19 in one stage of the plating process.

【0019】第9図は、プリントヘッド20の他の実施例を示す。 [0019] Figure 9 shows another embodiment of the print head 20. この形のノズル19は、コンパウンドボアとも称すべきものである。 Nozzle 19 of this form is intended to be referred to as compound bore. これは、ノズル19から放出されるインク流を調整する。 This adjusts the ink flow emitted from the nozzle 19. コンパウンドボアノズルから放出されるインク流は、直径が小さく、広がりがごくわずかである。 Ink flow emitted from the compound bore nozzle, smaller in diameter, broadening is negligible. カンチレバー梁(張り出し部)13は、中心に向けて突出しており、発熱体15がこの張り出し部13の上に載置されている。 Cantilever beam (overhang) 13 protrudes toward the center, the heating element 15 is placed on the projecting portion 13. このプリントヘッドの実施例は、第1図に示すプリントヘッド20と同じ方法で形成される。 Example of the print head is formed in the same manner as the print head 20 shown in Figure 1. 工程での主な相違は、層40を基板10にめっきするとき用いられるマスクの型である。 The main difference in the process is the type of mask used when plating layer 40 on the substrate 10. カンチレバー梁12用のマスク38の代わりに、マスク34又は3 Instead of a mask 38 for the cantilever beam 12, the mask 34 or 3
6のようなマスクを使用する。 The use of a mask such as 6.

【0020】上記した本発明の実施例において、プリントヘッドはインクを射出するものであり、このインクは水、グリコール、色素粒子を含有するものであるものとして説明したが、他の物質を射出するのに用いることもできることは言うまでもない。 [0020] In embodiments of the present invention described above, the printhead is intended to eject ink, the ink is water, glycol, have been described as those containing dye particles, injecting the other material It can of course be also be used to.

【0021】 [0021]

【発明の効果】本発明に係るプリントヘッドは、上述のように、ノズル部とインク保持部とが一体的に形成されており、発熱体はその間に位置する張り出し部に載置されているので、泡のつぶれ等によるキャビテーション力が補充インクによって緩衝され、発熱体の受ける損傷が極めて小さくなり、寿命が飛躍的に延びるという効果が得られる。 Print head according to the present invention, as described above, the nozzle portion and the ink retaining portion are formed integrally, since the heating element is placed on the extending portion located therebetween , cavitation force caused by such collapse of foam is buffered by refilling ink, damage received by the heating element is extremely small, the effect is obtained that the life extending dramatically. それにより、信頼性の高いプリントヘッドを提供しうるという効果が得られる。 Thereby, the effect is obtained that may provide a highly reliable print heads. また、ノズル部とインク保持部とが直接的に接続されているので、インクの補充速度が速くなり、プリント速度自体の高速化を図ることができると言う効果が得られる。 Further, since the nozzle portion and the ink holding portion is directly connected, replenishment rate of the ink becomes faster, which produces the effect of making it possible to speed up the printing speed itself can be obtained. また、本発明に係るプリントヘッドの製造方法は、発熱体及びノズルの位置決めを別々に行うのでなく、製造工程において、自ずと両者の位置が一致するようになっているので、原理的に位置ずれが生じにくく、ミスアラインによるドットの広がりや傾斜が防止され、従来のような細心な位置合わせ作業が必要ないので製造コストの低減を図ることができるという効果が得られる。 A method of manufacturing a print head according to the present invention, the heating element and rather than positioning the nozzle separately, in the manufacturing process, is naturally because so both positions match, theoretically positional deviation occurs hardly, is prevented dot spread and tilt by misalignment, the effect that since the conventional is unnecessary meticulous positioning operation such that it can reduce the manufacturing cost can be obtained. また、広い範囲にわたって多数のノズルを有するようなプリントヘッドを製造しうるという効果が得られる。 Further, effect that can produce a print head having a plurality of nozzles over a wide range.

【図面の簡単な説明】 BRIEF DESCRIPTION OF THE DRAWINGS

【図1】本発明の実施例に係る熱インクジェット式プリントヘッドの断面図。 Sectional view of a thermal inkjet printhead according to an embodiment of the present invention; FIG.

【図2】従来例に係る熱インクジェット式プリントヘッドの斜視図。 2 is a perspective view of a thermal ink jet printhead according to a conventional example.

【図3A】従来例に係る熱インクジェット式プリントヘッドの断面図。 Figure 3A is a cross-sectional view of a thermal ink jet printhead according to a conventional example.

【図3B】図3Aに示すプリントヘッドの一部断面図。 [Figure 3B] partial cross-sectional view of the printhead shown in Figure 3A.

【図4】本発明の実施例に係るプリントヘッドのノズルを除いた状態を示す平面図。 Figure 4 is a plan view showing a state excluding the nozzles of the print head according to an embodiment of the present invention.

【図5A】本発明の実施例に係る製造工程に於ける基板を示す断面図。 Figure 5A is a cross-sectional view showing the in substrate manufacturing process according to an embodiment of the present invention.

【図5B】図5Aに示す基板にマスクを被せた状態を示す断面図。 Figure 5B is a sectional view showing a state in which covering the mask substrate shown in Figure 5A.

【図5C】本発明の実施例に係るマスクの形状を示すための平面図。 Plan view showing the shape of a mask according to the embodiment of FIG. 5C invention.

【図6A】カンチレバー梁(張り出し部)と保持部との形成の工程を示す断面図。 Figure 6A is a cross-sectional view showing the step of forming the holding portion cantilever beam (overhang).

【図6B】カンチレバー梁(張り出し部)と保持部との形成の工程を示す断面図。 Figure 6B is a cross-sectional view showing the step of forming the holding portion cantilever beam (overhang).

【図6C】カンチレバー梁(張り出し部)と保持部との形成の工程を示す断面図。 Figure 6C is a cross-sectional view showing the step of forming the holding portion cantilever beam (overhang).

【図7A】抵抗層と保護層との形成を示す断面図。 Figure 7A is a cross-sectional view showing the formation of the resistance layer and the protective layer.

【図7B】ノズルを形成するための導体層とドーナツ形の枠とを示す断面図。 Figure 7B is a cross-sectional view showing the conductor layer and the toroidal frame for forming the nozzle.

【図8A】ノズルを形成する工程を示す断面図。 8A is cross-sectional view showing a step of forming a nozzle.

【図8B】ノズルを形成する工程を示す断面図。 Figure 8B is a sectional view showing a step of forming a nozzle.

【図8C】ノズルを形成する工程を示す断面図。 Figure 8C is a sectional view showing a step of forming a nozzle.

【図9】別実施例に係る熱インクジェット式プリントヘッドの断面図。 FIG. 9 is a cross-sectional view of a thermal inkjet printhead according to another embodiment.

【図10】図9に示すプリントヘッドの平面図。 Figure 10 is a plan view of the printhead shown in FIG.

【符号の説明】 DESCRIPTION OF SYMBOLS

10:基板 11:インク保持部 15:抵抗発熱体 17:ノズル部 10: substrate 11: ink retaining portion 15: the resistance heating body 17: nozzle unit

【手続補正書】 [Procedure amendment]

【提出日】平成8年3月29日 [Filing date] 1996 March 29,

【手続補正1】 [Amendment 1]

【補正対象書類名】明細書 [Correction target document name] specification

【補正対象項目名】特許請求の範囲 [Correction target item name] the scope of the appended claims

【補正方法】変更 [Correction method] change

【補正内容】 [Correction contents]

【特許請求の範囲】 [The claims]

【請求項7前記ノズルを形成する工程は、前記種層か 7. A step of forming the nozzle, or the seed layer
らノズルを形成する層を途中までめっき成長させる第一 First to plating grow layers forming the Luo nozzle partway
の工程と、その層からからさらに前記フレームをおおう And steps will oh further said frame from from the layer
ようにめっき成長させ、該フレームの内側に奥から先端 It was plated grown to the tip from the back to the inside of the frame
に向かってその口径が次第に狭くなるような形状のノズ Nozzle shape as its diameter becomes gradually narrower toward the
ル開口を形成する第二の工程とからなることを特徴とす It is characterized in that it consists of a second step of forming a Le opening
る特許請求の範囲第6項に記載のインクジェット・プリ Inkjet pre according to paragraph 6 claims that
ントヘッドの製造方法。 Method of manufacturing the printheads.

Claims (1)

    【特許請求の範囲】 [The claims]
  1. 【請求項1】インク保持部と接続すべく基板内に抵抗発熱体を設け、該基板上に前記抵抗発熱体を囲むように位置する環状のフレームを設け、前記環状のフレームから内側に金属層をオリフィス開口を残してめっき成長させることによりノズル部を形成する工程を有することを特徴とする熱インクジェット式プリントヘッドの製造方法。 1. A provided a resistance heating element in order the substrate to connect the ink retaining portion, the annular frame is located so as to surround the resistive heating element on the substrate provided, the metal layer inwardly from the annular frame method for manufacturing a thermal inkjet printhead which is characterized by comprising the step of forming the nozzle portion by a plating growth leaving an orifice opening.
JP8042317A 1986-04-28 1996-02-29 Method for manufacturing a thermal ink jet printhead Expired - Lifetime JP2716418B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US85674086A true 1986-04-28 1986-04-28
US856740 1986-04-28

Publications (2)

Publication Number Publication Date
JPH08230192A true JPH08230192A (en) 1996-09-10
JP2716418B2 JP2716418B2 (en) 1998-02-18

Family

ID=25324393

Family Applications (2)

Application Number Title Priority Date Filing Date
JP62107854A Expired - Fee Related JP2635043B2 (en) 1986-04-28 1987-04-28 Heat Inkujietsuto type print head
JP8042317A Expired - Lifetime JP2716418B2 (en) 1986-04-28 1996-02-29 Method for manufacturing a thermal ink jet printhead

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP62107854A Expired - Fee Related JP2635043B2 (en) 1986-04-28 1987-04-28 Heat Inkujietsuto type print head

Country Status (3)

Country Link
EP (2) EP0367303A1 (en)
JP (2) JP2635043B2 (en)
DE (1) DE3771269D1 (en)

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US7465036B2 (en) 2002-11-23 2008-12-16 Silverbrook Research Pty Ltd Thermal ink jet printhead with bubble nucleation laterally offset from nozzle
US7581822B2 (en) 2002-11-23 2009-09-01 Silverbrook Research Pty Ltd Inkjet printhead with low voltage ink vaporizing heaters

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Publication number Publication date
DE3771269D1 (en) 1991-08-14
EP0367303A1 (en) 1990-05-09
JP2635043B2 (en) 1997-07-30
EP0244214B1 (en) 1991-07-10
EP0244214A1 (en) 1987-11-04
JPS62259864A (en) 1987-11-12
JP2716418B2 (en) 1998-02-18

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