JP2616654B2 - One-dimensional pyroelectric sensor array - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION The present invention reduces vibration noise,
The present invention relates to a one-dimensional pyroelectric sensor array that improves the S / N ratio.

[0002]

2. Description of the Related Art FIG. 20 and FIG.
A one-dimensional pyroelectric sensor array as described in JP-A-9-13926 is shown.

A through hole 2 is formed in the support substrate 1 at a position where a pyroelectric element group to be described later is arranged. The pyroelectric element group 3 made of lead zirconate titanate-based porcelain, lead titanate-based porcelain, or the like has its end connected to the support substrate 1 with, for example, a conductive adhesive 4. This pyroelectric element group 3
Is formed in one pyroelectric plate along its width direction, and by sequentially forming the slits 5 along the length direction of the pyroelectric plate, each of the pyroelectric elements 3a is formed. It is separated.

An electrode 6 is formed on the surface of each pyroelectric element 3a. Electrodes 7 are formed on the back surface of each pyroelectric element 3a, respectively. These electrodes 7 are connected to each other, and are electrically connected to the outside by the conductive adhesive 4 described above. Leads (not shown) are individually connected to the electrodes 6, and the leads are connected to a drive circuit, and outputs are taken out as time-series signals.

An array of pyroelectric sensors having such a structure is as follows.
Since each pyroelectric element is separated, crosstalk due to thermal diffusion can be reduced and sensitivity can be improved.

[0006]

[SUMMARY OF THE INVENTION However, since the both ends of each pyroelectric element 3a is fixed to the supporting substrate 1, Da
Even if a cut is made in the support substrate 1 by ising or the like, the support substrate 1
1, heat is transmitted to the adjacent pyroelectric element 3a to generate electric charge.
Let it live. The pyroelectric plate is provided with a plurality of focuses by slits 5.
Since it is divided into the electric elements 3a, a noise signal is generated by the mechanical vibration of each pyroelectric element 3a. Noise due to this vibration is generated irrespective of the light absorptivity, and lowers the S / N ratio.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-described drawbacks, and further improves sensitivity and reduces crosstalk.
It is an object of the present invention to provide a one-dimensional pyroelectric sensor array which is reduced and has an improved S / N ratio.

[0008]

Means for Solving the Problems In order to achieve the above object, the present invention is configured as follows. That is, first, before the space through the pyroelectric plate, the front and rear surfaces of the pyroelectric body plate
A plurality of pyroelectric pieces each having a free end formed by separating a part of the pyroelectric plate ; and a first pyroelectric piece provided on a first surface of the pyroelectric piece.
And a second electrode, a third electrode provided on a second surface of the pyroelectric piece, and the pyroelectric body on the pyroelectric plate.
A supporting member for supporting a portion other than the free end of the piece , wherein one of the first electrode portion and the second electrode portion and the third electrode portion constitute a light receiving / detecting portion ;
At least, a light-absorbing hand is provided on the portion of the pyroelectric body at the light-receiving detector.
A step is formed, and the other of the first electrode portion and the second electrode portion and the third electrode portion constitute a vibration noise detector.

Second, one of the first electrode and the second electrode is formed to include the light receiving electrode portion and the extraction electrode portion.
At the same time, the light receiving electrode portion is arranged close to the free end of the pyroelectric body piece.
And the other of the first electrode and the second electrode is formed to include the vibration noise electrode and its extraction electrode , and the third electrode is opposed to the first electrode and the second electrode. It is formed at the position.

Third, a first electrode and a second electrode formed on the same surface of each pyroelectric element are electrically connected to each other on the surface of the pyroelectric element. Are electrically connected to each other at a connection electrode portion provided on the surface of the pyroelectric body .

Fourth, a pyroelectric plate is interposed between the first pyroelectric layer and the second pyroelectric layer, and between the first pyroelectric layer and the second pyroelectric layer. A plurality of pyroelectric pieces separated by a space penetrating the front and back surfaces of the pyroelectric plate to form a plurality of pyroelectric pieces, and a first electrode on the surface of the first pyroelectric layer. Forming a second electrode on the surface of the second pyroelectric layer, providing a first intermediate electrode between the first pyroelectric layer and the heat insulating layer, And a second intermediate electrode provided between the pyroelectric layer and the heat insulating layer.

Fifth, the first electrode portion and the first intermediate electrode portion constitute a light receiving and detecting portion, and the second electrode portion and the second intermediate electrode portion constitute a vibration noise detecting portion. .

[0013]

The noise signal due to the mechanical vibration of the pyroelectric element is generated in the light receiving and detecting section irrespective of the light absorptivity, and lowers the S / N ratio of the signal output from the light receiving and detecting section. For this reason, the pyroelectric piece is provided with a vibration noise detection section adjacent to the light reception detection section. The light reception detection unit generates a light reception signal, but becomes a signal on which a vibration noise signal is superimposed.
Generate a vibration noise signal. The vibration noise is removed from the output signal by adding signals obtained from the light reception detection unit and the vibration noise detection unit to opposite polarities.

In this case, since the light receiving detecting section and the vibration noise detecting section are formed on the same pyroelectric piece, the potential and the shape of the generated noise signal are substantially the same, and the light receiving signal generated from the light receiving detecting section is obtained. Vibration noise can be removed. Specifically, the connection is made such that the polarization directions of the light reception detection unit and the vibration noise detection unit are opposite to each other.

In the case where the pyroelectric piece is formed in a multilayer structure in which the pyroelectric layer is disposed via a heat insulating layer, thermal energy due to light reception is not diffused to the vibration noise detecting section.
The light receiving sensitivity is improved. Furthermore, one end of the pyroelectric piece is a free end
And does not come into contact with the support member.
Causes the surface temperature of the pyroelectric body to rise and generates a lot of charge
Therefore, the sensitivity is greatly improved and the free end of the pyroelectric
Crosstalk to neighboring pyroelectric strips is significantly lower
You.

[0016]

Embodiments of the present invention will be described below in detail with reference to the accompanying drawings. 1 to 3 show a first embodiment of a one-dimensional pyroelectric sensor array according to the present invention. The one-dimensional pyroelectric sensor array 11 has a pyroelectric plate 12 as a substrate.
As a material constituting the pyroelectric plate 12, a lead zirconate titanate-based porcelain, a lead titanate-based porcelain, a lithium tantalate-based porcelain, or the like is used, and a material obtained by a generally known method is used.

The pyroelectric plate 12 has a rectangular shape that is long horizontally, and is cut from the first side 12a toward the second side 12b to form two or more plural slit-shaped spaces 13. ing. By forming the space 13 through the front and back surfaces of the pyroelectric plate 12 in this way, a pyroelectric piece (sensor portion) 14 having the first side 12a side as a free end is formed.

The surface of each pyroelectric element 14 has a first side 12
The first electrode 15 extending from the side a in the direction of the second side 12b
And the second electrode 17 are juxtaposed with a gap therebetween. On the first electrode 15 on the first side 12a side (free end side), a light absorbing film 16 made of, for example, Ni-Cr, platinum black or the like is formed. A third electrode (counter electrode) 19 is formed on the free end side of the back surface of the pyroelectric plate 12 so as to face the first electrode 15 portion and the second electrode 17 portion.

Therefore, in the sensor section of this example, the first electrode 15 and the third electrode 19 constitute a light receiving and detecting section, and the second electrode 17 and the third electrode 19 detect vibration noise. Unit is configured.

A lead wire (not shown) is electrically connected to each first electrode 15 individually.
Reference numeral 7 is connected by a connection electrode portion 17c, and a lead wire (not shown) is connected thereto. Also, the second side 1 of the pyroelectric plate 12
The 2b side is fixed by a support member (not shown).

In the illustrated example, the case where the light absorbing film 16 is formed on the first side 12a side of the pyroelectric piece 14 has been described. However, the light absorbing film 16 may be formed on the entirety of the first electrode 15. The one electrode 15 itself may be formed of a carbon-based paint, a metal black material, or the like.

The polarization direction of the pyroelectric plate 12 is the direction indicated by the arrow in FIG. The polarization direction may be reverse. Also,
The light absorbing film 16 may be formed on the second electrode as shown in FIG. In this embodiment, with respect to the first electrode 15 or the second electrode 17, it is preferable to place a light shielding plate on the front surface of the electrode on which the light absorbing film 16 is not formed to shield light.

The driving mode of the one-dimensional pyroelectric sensor array will be described with reference to FIGS. FIG. 4 shows a driving circuit for one pyroelectric element 14 in the embodiment of FIG. 1, and the same driving circuit is provided for the other pyroelectric elements. The FET gate G is
The first electrode 15 is connected to the first electrode 15, and the second electrode 17 is connected to the ground. When a DC voltage is applied from the drain electrode D and the first electrode 15 is irradiated with light, an electric charge is generated in the pyroelectric plate 12 based on a temperature change with respect to the ambient temperature. , A voltage is generated across the resistor Rg.

This voltage is impedance-converted by a source follower circuit of the FET, and as a voltage change across the resistor Rs, an AC signal is extracted from the source electrode S by being superimposed on a DC bias voltage.

According to this circuit configuration, the first electrode 15 and the second electrode 17 are polarized in the same polarity with respect to the opposing third electrode 19, respectively. Therefore, in terms of an equivalent circuit, the two sensors are connected in series and with opposite polarities. When light is irradiated, the first electrode 15 on which the light absorbing film 16 is formed As compared with the second electrode 17 on which the absorbing film 16 is not formed, more electric charges are generated by the amount corresponding to the difference in the light absorptivity.

On the other hand, noise due to mechanical vibration is generated equally in both the first electrode 15 and the second electrode 17 irrespective of the difference in optical absorptance. However, since the polarities of polarization are opposite to each other, both noises are generated. , The polarity of the charges generated is reversed and canceled, and as a result, the S / N ratio is improved.

FIG. 5 shows another example of a driving circuit for one pyroelectric element 14 in the configuration example of FIG.
Electric charges are generated from the second electrode 17 side forming 6. In this example, the second electrode 15 part and the third electrode 19 part constitute a light reception detection unit, and the first electrode 17
The portion and the third electrode 19 make up a vibration noise detection unit.

FIGS. 6 to 8 show a second embodiment of the one-dimensional pyroelectric sensor array according to the present invention. The same parts as those in the first embodiment are denoted by the same reference numerals, and the following description focuses on the characteristic parts.

The first electrode 15 and the second electrode 17 are juxtaposed on the same surface of the pyroelectric element 14, and are connected to each other by a connection electrode 17e. Such an electrode configuration is performed for each pyroelectric piece 14. A third electrode 19 is formed on the back surface of the pyroelectric piece 14. This third electrode 19
Are the counter electrode portion 19a of the pyroelectric body 14 and the first side 12
An extraction electrode portion 19b extending halfway from the side a to the second side 12b, a connection electrode portion 19c on the second side 12b side, and further connected to the connection electrode portion 19c and drawn out to the front side of the pyroelectric plate 12. And the folded electrode 19d. The opposing electrode portion 17a is connected to the light receiving electrode portion 1 on the front side via the pyroelectric body 14.
5a.

As shown in FIG. 8, the first electrode 15 and the third
The directions of polarization between the electrodes 19 and between the second electrode 17 and the third electrode 19 are opposite to each other. This polarization is performed by separating the first electrode and the second electrode and setting the first electrode 15
A DC voltage is applied between the second electrode 17 and the third electrode 19 to polarize in one direction, and then a reverse DC voltage is applied between the second electrode 17 and the third electrode 19 to polarize in the opposite direction. After the polarization processing, the first electrode 15 and the second electrode 17 are electrically connected.

FIGS. 9 and 10 show a drive circuit when one pyroelectric element piece 14 is taken out of the configuration examples shown in FIGS. As is clear from the figure, the first electrode 15 and the second electrode 17 are connected in parallel,
Electrode 19 is connected to ground. Since the operation principle can be understood based on the contents described with reference to FIGS. 4 and 5, the detailed contents are omitted. It goes without saying that such a drive circuit is provided for each pyroelectric element piece 14.

However, as is apparent from comparison with FIG. 4 and FIG. 5, since the first electrode and the second electrode are connected in parallel, a large capacitance is obtained due to the dielectric constant of the pyroelectric plate 12.
As a result, the output decreases.

In the example of FIG. 10, the light absorbing film 16 is
It is formed on the third electrode 19 corresponding to the position of the first electrode 15. In this example, the third electrode 19 on which the light absorbing film 16 is formed is the light receiving side. But the third
Heat diffusion from the portion of the electrode 19 where the light absorbing film 16 is formed to the portion where the light absorbing film 16 is not formed,
Between the first electrode 15 and the third electrode 19 and the second electrode 17
And the third electrode 19 has a small temperature difference, resulting in a disadvantage that the output becomes small. Therefore, it is more preferable to structurally configure as shown in FIGS.

Also in this example, the first electrode 15 and the third electrode 19 constitute a light-receiving detector, and the second electrode 17 and the third electrode 19 constitute a vibration noise detector. Is done. Further, it is preferable that a light shielding plate is provided on the front surface of the second electrode 17.

FIGS. 11 to 13 show a third embodiment of a one-dimensional pyroelectric sensor array according to the present invention. The same parts as those in the first embodiment are denoted by the same reference numerals, and the following description focuses on the characteristic parts.

A first electrode 15 is provided on the surface of the pyroelectric piece 14.
And a second electrode 17 are formed. First electrode 15
The light-receiving electrode portion 15a formed wide at the tip end of the pyroelectric piece 14 and the extraction electrode portion 15b and the second side 12b side extending halfway from the first side 12a to the second side 12b. And a connection electrode portion 15c. Second electrode 1
7 is a light-receiving electrode 15 from the free end 12a of the pyroelectric piece 14.
The vibration noise electrode portion 17 formed wide at a position interposed by a
a, and a connection electrode 17c for connecting the extraction electrode portion 17b extending halfway from the first side 12a to the second side 12b and the extraction electrode portion 17b of each pyroelectric piece 14 with each other.

On the back side of the pyroelectric piece 14, the light-receiving electrode 1
5a and the vibration noise electrode portion 17a are substantially identical in shape,
The counter electrode 19 is formed to have the same area.
The arrow shown in the pyroelectric piece 14 in FIG. 13 is the polarization direction. This polarization direction may be reversed.

In this embodiment, the light absorbing film 16 is formed on the light receiving electrode portion 15a. In this case, the pyroelectric piece 14
There is a light receiving area on the tip side, so less heat escapes. In other words, the higher the surface temperature, the greater the amount of generated charges, which increases sensitivity and increases crosstalk. Is also effectively suppressed. In this example,
The first electrode 15 and the third electrode 19 constitute a light reception detection unit, and the second electrode 17 and the third electrode 19 constitute a vibration noise detection unit. Further, it is preferable that a light shielding plate is provided on the front surface of the second electrode 17.

FIG. 14 shows a fourth embodiment of the one-dimensional pyroelectric sensor array according to the present invention. FIG. 14 shows only the pyroelectric pieces 24 which are an important part of the sensor array, and it is understood that the pyroelectric pieces 24 are actually arranged in an array.

FIG. 14 shows a one-dimensional pyroelectric sensor array 21 (not shown in its entirety), which uses a pyroelectric plate 22 as a substrate. The pyroelectric plate 22 is formed on the upper pyroelectric layer 2 in the drawing.
2a, an intermediate heat insulating layer 22b and a lower pyroelectric layer 2
2c.

A first electrode 25 is formed on the upper surface of the upper pyroelectric layer 22a at the tip. The first electrode 25 is provided on the first side of the pyroelectric layer 22a.
a, and an extraction electrode portion 25 extending toward the base side of the pyroelectric layer 22a.
b and the connection electrode portion 25c on the base side of the pyroelectric layer 22a. The light absorbing film 26 is formed on the light receiving electrode portion 25a.
Are formed. On the lower surface of the pyroelectric layer 22a, a first intermediate electrode 28a is formed at a portion facing the light receiving electrode portion 25a via the pyroelectric layer 22a.

On the upper surface of the lower pyroelectric layer 22c, a second intermediate electrode 28b is formed at a portion facing the first intermediate electrode 28a via the heat insulating layer 22b. A second electrode 27 is formed on the lower surface of the pyroelectric layer 22c. The second electrode 27 includes a vibration noise electrode portion 27a, an extraction electrode portion (not shown), and a connection electrode portion (not shown). Of these, the vibration noise electrode portion 27a is formed at a portion facing the second intermediate electrode 28b via the pyroelectric layer 22c. Further, the extraction electrode portion is formed by an upper pyroelectric layer 22.
It is formed in a state similar to that of the configuration example of the extraction electrode portion 25b formed on the upper surface of a. The connection electrode portion is electrically connected to an adjacent connection electrode portion.

The intermediate electrode connecting portion 28c is
b, and electrically connects the first intermediate electrode 28a and the second intermediate electrode 28b. Incidentally, the configuration in which the first intermediate electrode 28a and the second intermediate electrode 28b are connected by the intermediate electrode connecting portion 28c is the same as the third electrode 1 in FIG.
This corresponds to 9. In the figure, pyroelectric layers 22a, 22
The arrow shown in c is the polarization direction. The polarization directions may be opposite to each other.

In order to produce a one-dimensional pyroelectric sensor array having the above-described structure, an upper pyroelectric layer 22a on which the first electrode 25 and the first intermediate electrode 28a are previously formed, a heat insulating layer 22b, and Second electrode 27 and second intermediate electrode 28
A lower pyroelectric layer 22c having b is prepared, these are stacked in the thickness direction, and joined by an adhesive. After that, the intermediate electrode connecting portion 28c is formed.

In the polarization process, the first electrode 25 and the second electrode 27 are connected to one end of a DC power supply, and the intermediate electrode connection portion 28c
To the other end of the DC power supply. As another method, the pyroelectric layers 22a, 22
2c may be used and then joined together with the heat insulating layer 22b. As still another method, an unfired pyroelectric layer 22a,
22c and the heat insulating layer 22b (in this case, both made of a ceramic material) may be stacked, fired and integrated.

A plurality of pyroelectric plates 22 are stacked, solidified with wax or the like, formed into a slit-like space 23 and separated into pyroelectric pieces 24 to form a sensor array.

FIG. 15 shows a driving circuit of one pyroelectric element piece 24 (sensor part).
Since the operating principle of this drive circuit can be understood based on the contents described with reference to FIGS. 4 and 5, the detailed contents are omitted. However, the following can be said from the structural features of this embodiment.

The upper pyroelectric layer 22a and the lower pyroelectric layer 2
2c is thermally insulated by the heat insulating layer 22b, so that even if the light absorption film 26 is irradiated with light, the temperature of the upper pyroelectric layer 22a rises, Heat diffusion to 22c is suppressed. Accordingly, in terms of an equivalent circuit, it is the same as the case where two pyroelectric elements are connected in series and reversely, so that noise due to vibration is canceled and the charge generated by light irradiation from the upper pyroelectric layer 22a is effective. And the S / N ratio is improved.

In this example, the light receiving electrode section 25a and the first intermediate electrode 28a constitute a light receiving detecting section, and the vibration noise electrode section 27a and the second intermediate electrode 28b constitute a vibration noise detecting section. ing.

FIGS. 16 to 18 show a fifth embodiment of the one-dimensional pyroelectric sensor array according to the present invention. Since each component shown in the drawings has a portion that overlaps with the fourth embodiment shown in FIGS. 14 and 15, the same portions are assigned the same reference numerals, and the following description focuses on the characteristic portions.

A major difference from the fourth embodiment shown in FIGS. 14 and 15 is that the polarization directions of the upper pyroelectric layer 22a and the lower pyroelectric layer 22c are the same as indicated by the arrows. That is. The polarization direction may be reverse.

In FIG. 17, the extraction electrode portion 27b and the connection electrode portion 27c of the second electrode 27, which are not shown in FIG. 14, are indicated by dotted lines. The extraction electrode portion 27b of the second electrode 27 is formed so as not to overlap with the extraction electrode portion 25b of the first electrode 25. This is to prevent a decrease in sensitivity due to an increase in capacitance between the extraction electrode portion 25b and the extraction electrode portion 27b.

FIG. 19 shows a drive circuit of one of the above-mentioned sensor arrays, taking up one sensor unit. This drive circuit is connected in parallel as in FIG. Structurally, the upper pyroelectric layer 22a and the lower pyroelectric layer 22a
14C is the same as the fourth embodiment shown in FIG. 14 in that it is thermally insulated by the heat insulating layer 22b. Therefore, even if the temperature of the upper pyroelectric layer 22a rises due to irradiation of the light absorbing film 26 with light, the lower pyroelectric layer 2
Thermal diffusion to 2c is suppressed. In addition, the operation principle is the same as that of FIG.
In this example, the second electrode 27 and the second intermediate electrode 28b constitute a vibration noise detector.

[0054]

As described above, the one-dimensional pyroelectric sensor array of the present invention is
The configuration described above has the following effects. (1) Since one end of each pyroelectric body piece is a free end, a noise signal due to mechanical vibration of the pyroelectric body piece becomes larger than before.
However, since the vibration noise detection section is provided in parallel with the light reception detection section, noise generated in the light reception detection section is canceled for each pyroelectric piece, and as a result, the S / N of the sensor array is reduced. The ratio improves.

(2) Since the photodetection section and the vibration noise detection section are provided for each pyroelectric element piece, the vibration noise generated in the photodetection section and the vibration noise generated in the vibration noise detection section are substantially the same. Vibration noise can be effectively removed from the light reception signal generated from the detection unit.

(3) Each pyroelectric piece is separated by a space penetrating the front and back surfaces of the pyroelectric plate , and one end of the pyroelectric piece is a free end.
Has become. As a result, heat diffusion from each pyroelectric piece is free
The sensitivity decreases as the distance from the edge decreases. simultaneous
In addition, the noise signal is removed for each pyroelectric
Since the signal of other pyroelectric elements is not affected because crosstalk due to thermal diffusion is suppressed, each pyroelectric element
Not only the S / N ratio of the sensor array but also the S / N ratio of the entire sensor array
Can be done.

(4) There is a secondary effect that the noise signal due to the temperature in the environment where the sensor array is placed can be removed from the received light signal by providing the vibration noise detecting section.

[Brief description of the drawings]

FIG. 1 is a configuration plan view showing a first embodiment of a one-dimensional pyroelectric sensor array of the present invention.

FIG. 2 is a partially enlarged perspective view of the sensor array of FIG. 1;

FIG. 3 is a configuration plan view showing a modified example of the sensor array of FIG. 1;

FIG. 4 is a circuit connection diagram showing a driving circuit of the sensor array of FIG. 1;

FIG. 5 is a circuit connection diagram showing another embodiment of the driving circuit of the sensor array of FIG. 1;

FIG. 6 is a configuration plan view showing a second embodiment of the one-dimensional pyroelectric sensor array of the present invention.

FIG. 7 is a back view of FIG. 6 viewed from the back side in the same position.

FIG. 8 is a partially enlarged perspective view of the sensor array of FIG. 6;

FIG. 9 is a circuit connection diagram showing a driving circuit of the sensor array of FIG. 6;

FIG. 10 is a circuit connection diagram showing another embodiment of the driving circuit of the sensor array of FIG. 6;

FIG. 11 is a configuration plan view showing a third embodiment of the one-dimensional pyroelectric sensor array of the present invention.

FIG. 12 is a back view of FIG. 11 as viewed from the back side in the same position.

FIG. 13 is a partially enlarged perspective view of the sensor array of FIG. 11;

FIG. 14 is a partially enlarged perspective view showing a fourth embodiment of the one-dimensional pyroelectric sensor array of the present invention.

FIG. 15 is a circuit connection diagram showing one embodiment of a driving circuit of the sensor array of FIG. 14;

FIG. 16 is a partially enlarged perspective view showing a fifth embodiment of the one-dimensional pyroelectric sensor array of the present invention.

FIG. 17 is a plan view of a part of the sensor array of FIG. 16;

FIG. 18 is a partial front view showing a part of the sensor array of FIG. 16;

FIG. 19 is a circuit connection diagram showing one embodiment of a drive circuit of the sensor array of FIG. 16;

FIG. 20 is a configuration plan view showing a conventional example of the present invention.

FIG. 21 is a cross-sectional configuration view taken along line XX of FIG. 20;

[Explanation of symbols]

 11, 21 are one-dimensional pyroelectric sensor arrays 12, 22 are pyroelectric plates 13, 23 are spaces 14, 24 are pyroelectric pieces 15, 25 are first electrodes 15a, 25a are light receiving electrode portions 16, 26. Is a light absorbing film 17, 27 is a second electrode 17a, 27a is a vibration noise electrode portion 19 is a third electrode 22a is a first pyroelectric layer 22b is a heat insulating layer 22c is a second pyroelectric layer 28a , 28b are intermediate electrodes

Claims (5)

(57) [Claims] 1. A pyroelectric plate, and a part of the pyroelectric plate is separated by a space penetrating the front and back surfaces of the pyroelectric plate, and one end of the pyroelectric plate is self-supported.
A plurality of pyroelectric pieces formed at the ends; first and second electrodes provided on a first surface of the pyroelectric piece ; and a plurality of pyroelectric pieces provided on a second surface of the pyroelectric piece. A third electrode and the pyroelectric plate
For supporting a portion other than the free end of the pyroelectric piece in the device
A light receiving detection unit is configured by one of the first electrode portion and the second electrode portion and the third electrode portion.
And at least the light receiving detector of the pyroelectric piece
A one-dimensional pyroelectric sensor , wherein a light absorbing means is formed in a portion of the first electrode portion and the other of the first electrode portion and the second electrode portion and the third electrode portion constitute a vibration noise detecting section. array. 2. A method according to claim 1, wherein one of the first electrode and the second electrode includes a light-receiving electrode portion and an extraction electrode portion thereof.
The light-receiving electrode portion is disposed in proximity to the free end of the pyroelectric piece.
And, wherein the first electrode and the other of the second electrode portion is formed to include its extraction electrode portion vibrating noise electrode unit, positions the third electrode facing the first electrode and the second electrode 2. The one-dimensional pyroelectric sensor array according to claim 1, wherein the one-dimensional pyroelectric sensor array is formed. 3. A first electrode and a second electrode formed on the same surface of each pyroelectric element are electrically connected to each other on the surface of the pyroelectric element. the third electrode the
2. The one-dimensional pyroelectric sensor array according to claim 1, wherein the connecting electrode portions provided on the pyroelectric body are electrically connected to each other. 4. A thermal insulation wherein a pyroelectric plate is interposed between a first pyroelectric layer and a second pyroelectric layer, and between the first pyroelectric layer and the second pyroelectric layer. A plurality of pyroelectric pieces separated from each other by a space penetrating the front and back surfaces of the pyroelectric plate to form a plurality of pyroelectric pieces; and forming a first electrode on the surface of the first pyroelectric layer. Forming a second electrode on the surface of the second pyroelectric layer,
A first intermediate electrode is provided between the first pyroelectric layer and the heat insulating layer, and a second intermediate electrode is provided between the second pyroelectric layer and the heat insulating layer. A one-dimensional pyroelectric sensor array comprising: 5. A light receiving and detecting section is constituted by a first electrode section and a first intermediate electrode section, and a vibration noise detecting section is constituted by a second electrode section and a second intermediate electrode section. Claim
Item 1. A one-dimensional pyroelectric sensor array according to Item 4 .