JP2610561B2 - Apparatus and method for coating curtain in clean room - Google Patents

Apparatus and method for coating curtain in clean room

Info

Publication number
JP2610561B2
JP2610561B2 JP4160694A JP16069492A JP2610561B2 JP 2610561 B2 JP2610561 B2 JP 2610561B2 JP 4160694 A JP4160694 A JP 4160694A JP 16069492 A JP16069492 A JP 16069492A JP 2610561 B2 JP2610561 B2 JP 2610561B2
Authority
JP
Japan
Prior art keywords
clean room
ventilation
curtain
curtain coating
port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP4160694A
Other languages
Japanese (ja)
Other versions
JPH06430A (en
Inventor
裕一 津田
稔 冨田
重信 古賀
和利 豊若
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp
Priority to JP4160694A priority Critical patent/JP2610561B2/en
Publication of JPH06430A publication Critical patent/JPH06430A/en
Application granted granted Critical
Publication of JP2610561B2 publication Critical patent/JP2610561B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、鋼板を被塗装物とする
クリ−ンル−ム内におけるカ−テン塗装装置及びその方
法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus and a method for coating a curtain in a clean room having a steel plate as an object to be coated.

【0002】[0002]

【従来の技術】従来、走行する被塗装物の上方から塗料
をカ−テン状に自由落下させて塗装を行なうカ−テン塗
装装置において、カ−テン塗装装置内をクリ−ンル−ム
にする必要から図2に示す実開平3−102276号公
報のように、クリ−ンル−ム10内に被塗装物2の上方
に換気用給気口15、下方に換気用排気口14を設け、
塗料カ−テン7と並行して換気流を流し、クリ−ンル−
ム10内外の気流を分離し、また、被塗装物2のクリ−
ンル−ム10と走出口12に流入外気流に対抗する気流
の吹出口13を設け、外気流のクリ−ンル−ム内10へ
の流入を遮断する装置が提案されている。これによれば
被塗装物2の走行口と走出口から流入しようとする外気
流に対抗する気流によって遮蔽することができ、走行風
等の外気流から塗料カ−テンを保持できる。
2. Description of the Related Art Conventionally, in a curtain coating apparatus in which a paint is freely dropped in the form of a curtain from above a running object to be painted, the interior of the curtain coating apparatus is made to have a clean room. From the necessity, as shown in Japanese Utility Model Laid-Open No. 3-102276 shown in FIG. 2, a ventilation inlet 15 is provided above the object 2 to be coated and a ventilation outlet 14 is provided below the cleaner 2 in the clean room 10.
Ventilation flow is applied in parallel with paint curtain 7, and clean
The air flow inside and outside the system 10 is separated and the object 2 is cleaned.
An apparatus has been proposed in which an airflow outlet 13 is provided in the room 10 and the run-out port 12 to oppose the inflow outside airflow, and the inflow of the outside airflow into the cleanroom 10 is blocked. According to this, the coating can be shielded by an airflow that opposes an external airflow that is going to flow in from the running port and the running exit of the workpiece 2, and the paint curtain can be held from an external airflow such as a running wind.

【0003】更には排気口より上方の給気口へ換気流を
流すことによって、すなわち、重力方向に自由落下する
塗料カ−テンと並行させて換気流を流すことによって、
換気流による塗料カ−テンの乱れを防止する。また、ク
リ−ンル−ム内は走入口と走出口を流入外気に対抗する
気流によって実質的にシ−ルできるので、クリ−ンル−
ムのみの小さい容積を換気すればよいため、換気効率を
著しく高めることができる点で一応の成果を果たしてい
る。
Further, by flowing a ventilation flow to an air supply port above an exhaust port, that is, by flowing a ventilation flow in parallel with a paint curtain that freely falls in the direction of gravity.
Prevents paint curtain disturbance due to ventilation flow. In addition, since the entrance and exit of the clean room can be substantially sealed by the airflow against the inflow outside air, the clean room can be cleaned.
Since only a small volume of the ventilation system needs to be ventilated, the ventilation efficiency can be remarkably increased, which has been achieved to some extent.

【0004】[0004]

【発明が解決しようとする課題】前述した実開平3−1
02276号公報にあっては、クリ−ンル−ム内のシ−
ルの目的は達成しているが、しかし、クリ−ンル−ム内
に例えば作業員が入る場合、室内の有機物の環境基準と
される最低基準平均風速0.2m/sec以上の風速が
必要となり、この風速になるとクリ−ンル−ム内での塗
料カ−テンに乱れが生じ、この乱れを抑制出来ない問題
があった。本発明はこれらの問題を解決し、換気効果を
高め、かつ塗料カ−テンに乱す気流の発生を防止しなが
ら、最低基準平均風速0.2m/sec以上の風速を与
えることが可能なカ−テン塗装装置及びその方法を提供
することを目的とする。
SUMMARY OF THE INVENTION
No. 02276 discloses a seal in a clean room.
However, when a worker enters the clean room, for example, a wind speed of 0.2 m / sec or more, which is the minimum standard wind speed which is an environmental standard for organic matter in the room, is required. At this wind speed, there is a problem that the paint curtain in the clean room is disturbed, and this disturbance cannot be suppressed. The present invention solves these problems, enhances the ventilation effect, and prevents the generation of an air current that disturbs the paint curtain, while providing a wind speed higher than the minimum reference average wind speed of 0.2 m / sec. An object of the present invention is to provide a ten coating apparatus and a method thereof.

【0005】[0005]

【課題を解決するための手段】本発明は従来技術の課題
を有利に解決するものであって、上記目的を達成するた
めに発明者らは鋭意工夫を重ねた結果、クリーンルーム
内での換気効率を高め、しかも塗料カーテンを乱す気流
の発生を防止しながら、最低基準平均風速0.2m/s
ec以上の風速を与えることを可能としたもので、その
発明の要旨とするところは、 (1)クリーンルーム内におけるカーテン塗装装置にお
いて、クリーンルーム上部左右にカーテン塗装装置部換
気用給気口及びクリーンルーム換気用給気口を各々配設
し、一方クリーンルーム底部左右にはカーテン塗装装置
部換気用排気口及びクリーンルーム換気用排気口を各配
設すると共に、各排気口に風速制御用ダンパを設けて、
該カーテン塗装装置の周囲の気体流速を緩和させること
を特徴とするクリーンルーム内におけるカーテン塗装装
置。 (2)前記(1)記載の装置において、カーテン塗装装
置への給気平均風速を0.2m/sec未満及び周囲へ
の給気平均風速を0.2m/sec以上とすることを特
徴とするクリーンルーム内におけるカーテン塗装方法に
ある。
DISCLOSURE OF THE INVENTION The present invention advantageously solves the problems of the prior art. As a result of the inventors' intensive efforts to achieve the above object, the ventilation efficiency in a clean room has been improved. And a minimum standard average wind speed of 0.2 m / s while preventing airflow that disturbs the paint curtain
The gist of the present invention is as follows. (1) In a curtain coating device in a clean room, the curtain coating device is switched on the left and right of the upper part of the clean room.
Air supply port for air supply and air supply port for clean room ventilation are provided respectively.
On the other hand, on the left and right of the bottom of the clean room, curtain coating equipment
Air outlets for ventilation of the room and
And a wind speed control damper at each exhaust port.
A curtain coating apparatus in a clean room, wherein a gas flow velocity around the curtain coating apparatus is reduced. (2) The apparatus according to (1 ), wherein the average supply air velocity to the curtain coating apparatus is less than 0.2 m / sec and the average supply air velocity to the surroundings is 0.2 m / sec or more. Curtain coating method in a clean room.

【0006】[0006]

【作用】以下、本発明を図面に従って詳細に説明する。
図1は本発明に係るカ−テン塗装装置の全体を示す側面
図である。図1におけるカ−テン塗装装置は、塗装ロ−
ル3、ドクタ−ロ−ル4、ドクタ−ブレ−ド6にて構成
される。これによれば被塗装物2の走行口貯留された塗
料9は、塗装ロ−ル3の回転によって、塗装ロ−ル3と
ドクタ−ロ−ル4の間隙から、塗装ロ−ル3面に沿って
下方に吐出される。6は塗装ロ−ル3の軸方向に配され
たブレ−ドで、塗装ロ−ル3の表面から塗料を掻き取っ
て、塗料カ−テン7を形成して流下される。
The present invention will be described below in detail with reference to the drawings.
FIG. 1 is a side view showing the entire curtain coating apparatus according to the present invention. The curtain coating apparatus shown in FIG.
A doctor roll 3, a doctor roll 4, and a doctor blade 6. According to this, the paint 9 stored in the running port of the workpiece 2 is transferred from the gap between the paint roll 3 and the doctor roll 4 to the surface of the paint roll 3 by the rotation of the paint roll 3. It is discharged downward along. Reference numeral 6 denotes a blade arranged in the axial direction of the coating roll 3, which scrapes the coating from the surface of the coating roll 3 to form a coating curtain 7 and flows down.

【0007】このようにして、流下された塗料カ−テン
7は被塗装物2の上方に塗膜8を形成する。一方、クリ
−ンル−ム10内外の気流を分離するために、クリ−ン
ル−ム10内の被塗装物2の走出口12に流入外気流に
対抗する気流の吹出口13を設け、外気流のクリ−ンル
−ム内10への流入を遮断する装置から構成されてい
る。すなわち、被塗装物2の走行口11と走出口12に
設けた吹出口13から流入外気流に対抗する気流を吹き
出させることにより、外気に対してクリ−ンル−ム10
を実質的にシ−ルできるので、被塗装物2の走行風等の
外気流から塗料カ−テンを保護することができる。
[0007] In this way, the paint curtain 7 that has flowed down forms a coating film 8 above the workpiece 2. On the other hand, in order to separate the air flow inside and outside the clean room 10, the air outlet 13 for the air flow which opposes the inflow outside air flow is provided at the run-out port 12 of the workpiece 2 inside the clean room 10, Of the clean room 10 is blocked. That is, by blowing out an airflow that opposes the inflowing external airflow from the airflow port 11 provided at the running port 11 and the runout port 12 of the workpiece 2, the clean room 10 is protected against the outside air.
Can be substantially sealed, so that the paint curtain can be protected from an external airflow such as a running wind of the workpiece 2.

【0008】また、カ−テン塗装装置部換気用排気口1
4およびクリ−ンル−ム換気用排気口17は、塗装環境
中に粉塵を舞い上がらせずに溶剤等の揮発物を排気する
ために、被塗装物よりも下方に設け、さらに、カ−テン
塗装装置部換気用給気口15およびクリ−ンル−ム換気
用給気口16はクリ−ンル−ム10内の換気流を下向き
に流動させるために、上記換気用排気口14および17
より上方に設ける。しかし、上記換気用給気口15およ
び16の位置は図1に示すように、被塗装物2よりも下
方に限定する必要はなく、被塗装物2よりも上方の、ク
リ−ンル−ム10内の上部に設けても良い。このような
配置にすることにより、クリ−ンル−ム10内全体の換
気流を下向きに流動させることが、より容易になる。
An exhaust port 1 for ventilation of a curtain coating unit.
An exhaust port 4 and a clean room ventilation outlet 17 are provided below the object to be coated in order to exhaust volatile substances such as solvents without causing dust to fly up in the coating environment. The ventilating air supply port 15 and the clean room ventilating air supply port 16 are provided for the ventilation outlets 14 and 17 to allow the ventilation flow in the clean room 10 to flow downward.
Provided above. However, as shown in FIG. 1, the position of the ventilation air supply ports 15 and 16 does not need to be limited to a position lower than the object 2 to be coated. It may be provided in the upper part of the inside. With such an arrangement, it becomes easier to cause the ventilation flow in the entire clean room 10 to flow downward.

【0009】このような状態において、クリ−ンル−ム
10内のカ−テン塗装装置の上部にカ−テン塗装装置部
換気用給気口15、下部にカ−テン塗装装置部換気用排
気口14を設け、また、その周囲の天井にクリ−ンル−
ム換気用給気口16、下部床面にクリ−ンル−ム換気用
排気口17を設け、風速制御用ダンパ−18、19を設
置する。カ−テン塗装装置周囲での作業を可能とするた
めに、給気口16と排気口17の平均風速は有機物環境
基準に定められている0.2m/sec以上とする。ま
た、カ−テン塗装装置部上下のカ−テン塗装装置部換気
用給気口15とカ−テン塗装装置部換気用排気口14
は、塗料カ−テンの乱れを防止するために0.2m/s
ec未満とする。
In such a state, an air supply port 15 for ventilation of the curtain coating unit in the upper part of the curtain coating unit in the clean room 10 and an exhaust port for ventilation of the curtain coating unit in the lower part. 14 and the surrounding ceiling has a clean room.
An air supply port 16 for air ventilation, an exhaust port 17 for clean room ventilation on the lower floor, and dampers 18 and 19 for controlling wind speed are installed. In order to enable the work around the curtain coating apparatus, the average wind speed of the air supply port 16 and the exhaust port 17 is set to 0.2 m / sec or more specified in the organic matter environmental standard. Further, an air supply port 15 for ventilation of the curtain coating unit above and below the curtain coating unit and an exhaust port 14 for ventilation of the curtain coating unit.
Is 0.2 m / s to prevent disturbance of paint curtain.
ec.

【0010】[0010]

【実施例】図1に示す本発明のロ−ラ−タイプのカ−テ
ン塗装装置を用いて塗装を実施する場合に、例えば帯状
鋼板等の被塗装物2を矢印の方向に走行させ、その上方
に配置した塗装ロ−ル3とドクタ−ロ−ル4との間から
塗料9をカ−テン7状に自由落下させ、被塗装物2上に
塗膜8を形成して塗装を行なう。カ−テン塗装装置1
は、塗料が外気に曝される部分をクリ−ンル−ム10内
に収容してある。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS When a coating is performed using a roller type curtain coating apparatus of the present invention shown in FIG. 1, a workpiece 2 such as a strip-shaped steel plate is moved in the direction of an arrow. The coating material 9 is allowed to fall freely in the form of a curtain 7 from between the coating roll 3 and the doctor roll 4 arranged above, and a coating film 8 is formed on the object 2 to be coated. Curtain coating equipment 1
In FIG. 1, a portion where the paint is exposed to the outside air is accommodated in a clean room 10.

【0011】クリ−ンル−ム10は被塗装物2の走行口
11および走出口12と走行口11および走出口12に
設けた流入外気流に対抗する気流の吹出口13と被塗装
物走行位置より下方のカ−テン塗装装置部換気用排気口
14およびクリ−ンル−ム換気用排気口17とこの排気
口より上方のカ−テン塗装装置部換気用給気口15およ
びクリ−ンル−ム換気用給気口16とを有し、且つ上記
各開口部以外が密閉されている。クリ−ンル−ム10内
では、換気流はカ−テン塗装装置部換気用給気口15お
よびクリ−ンル−ム換気用給気口16からカ−テン塗装
装置部換気用排気口14およびクリ−ンル−ム換気用排
気口17に下向きに流動し、これによりクリ−ンル−ム
10内全体の換気流が緩く下向きに流動させる。
The clean room 10 is provided with a running port 11 and a running port 12 for the workpiece 2 and an air flow outlet 13 provided at the running port 11 and the running port 12 for opposing the inflowing external air flow and a running position of the workpiece. A lower exhaust port 14 for ventilation of the coating apparatus and an exhaust port 17 for ventilation of the clean room, and an upper intake port 15 for ventilation of the coating apparatus and a clean room above the exhaust port. It has a ventilation air supply port 16 and is closed except for the openings. In the clean room 10, the ventilation flow is supplied from the air inlet 15 for the curtain coating unit and the air inlet 16 for the ventilation of the clean room to the exhaust port 14 for ventilation of the curtain unit and the screen. The air flows downwardly through the air outlet 17 for ventilation of the clean room, whereby the ventilation flow in the entire clean room 10 flows slowly downward.

【0012】この場合に、風速制御用ダンパ−18およ
び19を設け、カ−テン塗装装置周囲での作業を可能と
するために換気用給気口16と換気用排気口17の平均
風速は、0.2m/sec以上とする。また、カ−テン
塗装装置部上下の給気口15と排気口14は塗料カ−テ
ンの乱れを防止するために0.2m/sec未満とす
る。特に、平均風速0.2m/sec以上とした理由
は、クリ−ンル−ム内に例えば作業員が入る場合には室
内の有機物の環境基準とされている最低基準平均風速
0.2m/sec以上を必要とする環境基準に基づくも
のである。しかし、この風速になるとクリ−ンル−ム内
での塗料カ−テンに乱れが生じ、被塗装物の表面に均一
な膜厚の形成することが出来ない。従ってこの乱れを抑
制する必要がある。そこで塗料カ−テンの乱れを防止す
るために、クリ−ンル−ム内での環境基準は保持しなが
ら、一方塗料カ−テンの乱れのない平均風速0.2m/
sec未満の別の給気口および排気口を設けた。しか
も、平均風速0.2m/sec未満の給気口および排気
口はカ−テン塗装装置部の周囲近傍の上下に設けるよう
に配置した。
In this case, the wind speed control dampers 18 and 19 are provided, and in order to enable the work around the curtain coating device, the average wind speed of the ventilation inlet 16 and the ventilation outlet 17 is as follows. At least 0.2 m / sec. The air supply port 15 and the exhaust port 14 above and below the curtain coating unit are set at less than 0.2 m / sec in order to prevent disturbance of the paint curtain. In particular, the reason why the average wind speed is 0.2 m / sec or more is that, for example, when a worker enters the clean room, the minimum standard average wind speed is 0.2 m / sec or more, which is an environmental standard for indoor organic matter. It is based on environmental standards that require However, at this wind speed, the paint curtain in the clean room is disturbed, and a uniform film thickness cannot be formed on the surface of the object to be coated. Therefore, it is necessary to suppress this disturbance. Therefore, in order to prevent the turbulence of the paint curtain, while maintaining the environmental standard in the clean room, the mean wind speed of 0.2 m / m without turbulence of the paint curtain is maintained.
Separate inlets and outlets less than sec were provided. In addition, the supply and exhaust ports having an average wind speed of less than 0.2 m / sec were arranged so as to be provided above and below the periphery of the curtain coating unit.

【0013】この結果、クリ−ンル−ム内全体での環境
条件は平均風速0.2m/sec以上保持でき、クリ−
ンル−ム内での作業員の有機則上の最低基準は確保さ
れ、しかもクリ−ンル−ム内でのカ−テン塗装での換気
流が下向きに流動するので、重力方向に自由落下する塗
料カ−テンを全く乱すことなく、安定したカ−テン塗装
が可能となった。また、被塗装物2の走行口11と走出
口12に設けた吐出口13から、流入外気流に対抗する
気流を吹き出すことにより、外気に対してクリ−ンル−
ムを実質的にシ−ルできるので、被塗装物2の走行風等
の外気流から塗料カ−テンを保護することができる。
As a result, the environmental conditions in the entire clean room can be maintained at an average wind speed of 0.2 m / sec or more.
The minimum standard of the organic rules of workers in the room is secured, and the ventilation flow of curtain painting in the clean room flows downward. Stable cartoning was possible without disturbing the car at all. Further, by blowing out an airflow that opposes the inflowing external airflow from the discharge port 13 provided at the running port 11 and the runout port 12 of the workpiece 2, clean air is removed from the outside air.
Since the film can be substantially sealed, the paint curtain can be protected from an external airflow such as a running wind of the work 2 to be coated.

【0014】[0014]

【発明の効果】以上述べたように、本発明のカ−テン塗
装装置は換気効率を高めながら、作業者の安全性を確保
することが出来、また、塗料カ−テンを全く乱すことな
く、極めて安定したカ−テン塗装が可能となり、均一な
膜厚の被覆ができる顕著な効果を奏するものである。
As described above, the curtain coating apparatus according to the present invention can ensure the safety of workers while improving the ventilation efficiency, and does not disturb the paint curtain at all. Extremely stable curtain coating can be achieved, and a remarkable effect that coating with a uniform film thickness can be achieved.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明に係るカ−テン塗装装置の全体を示す側
面図、
FIG. 1 is a side view showing an entire curtain coating apparatus according to the present invention;

【図2】従来のカ−テン塗装装置の全体側面図である。FIG. 2 is an overall side view of a conventional curtain coating apparatus.

【符号の説明】[Explanation of symbols]

1 カーテン塗装装置、 2 被塗装物、 3 塗装ロール、 4 ドクターロール、 6 ドクターブレード、 7 塗料カーテン、 8 塗膜、 9 塗料、 10 クリーンルーム、 11 走行口、 12 走出口、 13 吹出口、 14 カーテン塗装装置部換気用排気口、 15 カーテン塗装装置部換気用給気口、 16 クリーンルーム換気用給気口、 17 クリーンルーム換気用排気口、 18、19 風速制御用ダンパー。 Reference Signs List 1 curtain coating device, 2 objects to be coated, 3 coating rolls, 4 doctor rolls, 6 doctor blades, 7 paint curtains, 8 paint films, 9 paints, 10 clean rooms, 11 running outlets, 12 running outlets, 13 outlets, 14 curtains Ventilation outlet for coating unit, 15 Ventilation inlet for curtain coating unit, 16 Ventilation inlet for clean room, 17 Ventilation outlet for clean room, 18, 19 Wind speed control damper.

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 クリーンルーム内におけるカーテン塗装
装置において、クリーンルーム上部左右にカーテン塗装
装置部換気用給気口及びクリーンルーム換気用給気口を
各々配設し、一方クリーンルーム底部左右にはカーテン
塗装装置部換気用排気口及びクリーンルーム換気用排気
口を各配設すると共に、各排気口に風速制御用ダンパを
設けて、該ーテン塗装装置の周囲の気体流速を緩和さ
せることを特徴とするクリーンルーム内におけるカーテ
ン塗装装置。
1. A curtain coating device in a clean room, wherein the left and right upper portions of the clean room are coated with curtains.
Air supply vents for equipment and clean room ventilation
Each is installed, while curtains are located on the left and right of the bottom of the clean room
Exhaust port for painting equipment ventilation and exhaust for clean room ventilation
While the arrangement of the mouth, the exhaust port by providing a wind speed control damper, a curtain coating device in a clean room, characterized in that to relieve the gas flow rate around the said a curtain coating apparatus.
【請求項2】 請求項1記載の装置において、カ−テン
塗装装置への給気平均風速を0.2m/sec未満及び
周囲への給気平均風速を0.2m/sec以上とするこ
とを特徴とするクリ−ンル−ム内におけるカ−テン塗装
方法。
2. The apparatus according to claim 1, wherein an average air supply air velocity to the curtain coating apparatus is less than 0.2 m / sec and an average air supply air velocity to the surroundings is 0.2 m / sec or more. A method for coating a curtain in a clean room.
JP4160694A 1992-06-19 1992-06-19 Apparatus and method for coating curtain in clean room Expired - Lifetime JP2610561B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4160694A JP2610561B2 (en) 1992-06-19 1992-06-19 Apparatus and method for coating curtain in clean room

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4160694A JP2610561B2 (en) 1992-06-19 1992-06-19 Apparatus and method for coating curtain in clean room

Publications (2)

Publication Number Publication Date
JPH06430A JPH06430A (en) 1994-01-11
JP2610561B2 true JP2610561B2 (en) 1997-05-14

Family

ID=15720451

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4160694A Expired - Lifetime JP2610561B2 (en) 1992-06-19 1992-06-19 Apparatus and method for coating curtain in clean room

Country Status (1)

Country Link
JP (1) JP2610561B2 (en)

Also Published As

Publication number Publication date
JPH06430A (en) 1994-01-11

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