JP2607209Y2 - Continuous heating device - Google Patents

Description

[Detailed description of the invention]

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a continuous heating apparatus for heat-treating electronic and optical parts, such as liquid crystal displays and optical devices, which require heating in a clean environment.

[0002]

2. Description of the Related Art Conventionally, as a continuous heating device of this kind,
A heating furnace for heating the object to be heated by hot air, and a walking beam transfer device having a fixed beam and a moving beam and penetrating the object to be heated from the inlet to the outlet of the heating furnace, wherein the fixed beam and the moving beam are made of ceramic. It is known that the object to be heated is heated by a down-flow mechanism in which an atmosphere is blown downward from a ceiling of a heating furnace through a space between heaters provided on the ceiling and the air is forcibly exhausted from a lower part of the heating furnace. (See Japanese Utility Model Publication No. 4-10556).

[0003]

In the above-described conventional continuous heating apparatus, the object to be heated is fitted in grooves provided horizontally and side by side on the support for the object to be heated, and is supported vertically. However, since a small gap is formed between the heated object and the groove wall of the heated object support, the heated object vibrates during transportation and heating to generate dust, so that sufficient cleanliness cannot be secured. There was a problem. Further, since the ceramic beam is expensive, there is a problem that the manufacturing cost of the entire apparatus is high.

[0004] An object of the present invention is to provide a continuous heating apparatus capable of ensuring sufficient cleanliness and reducing manufacturing costs.

[0005]

A continuous heating apparatus according to the present invention is a box-shaped furnace body having an inlet and an outlet at front and rear ends.
And a cassette in which a plurality of plate-like objects to be heated are held horizontally
And the cassette is loaded from the inlet of the furnace body and loaded from the outlet
Walking beam, and at the entrance and exit of the furnace
To shut off the atmosphere inside the furnace and the outside air and walk
Shutter that can be opened when transporting cassettes by the scanning beam
And a heater for generating a heating atmosphere provided above the furnace.
And a fan for circulation of atmosphere, and
Formation of circulation paths each provided with an atmosphere passage hole
Left and right vertical dividers, located below heater and fan
The horizontal partition plate for forming the circulation path and one of the left and right vertical partitions
And a filter provided inside the cutting plate.
The heated heating atmosphere is applied to one of the vertical
After passing through the heater, it is sprayed on the object to be heated from the side,
It is circulated through the other vertical partition .

It is preferable that the inside of the heating furnace is maintained at about 350 ° C. or less, the walking beam is made of heat-resistant steel, and the filter is made of HEPA.

[0007]

According to the continuous heating device of the present invention , a plurality of plate-shaped
The cassette holding the object to be heated horizontally is a walking bee.
The atmosphere inside the furnace and the outside
Heated atmosphere heated by a heater in a state where air is shut off
Dust passes through one vertical partition and filter
After that, the object to be heated is sprayed from the side,
Circulated through vertical dividers. Thus, for a plurality of plate-shaped heated to be horizontally held in the cassette, than the heating atmosphere Ru blown from the side, without the heated object during transport and heating vibrates, the furnace Generation of dust can be prevented. Further, by holding a plurality of objects to be heated horizontally in the heated object storage cassette and heating them, it is possible to improve the processing capacity with respect to the apparatus installation area.

By keeping the inside of the heating furnace at about 350 ° C. or lower, even if both the fixed beam and the moving beam are made of heat-resistant steel, these beams do not bend. Therefore, it is not necessary to provide the beam reinforcing support member through the bottom wall of the heating furnace, and it is possible to prevent dust from entering from outside the furnace.

By providing the HEPA filter in the atmosphere circulation path in the heating furnace, dust in the furnace is collected and the atmosphere in the furnace can be always kept clean.

[0010]

An embodiment of the present invention will be described below with reference to the drawings. In this specification, the front and rear are based on the moving direction of the object to be heated, and the front of the moving direction, that is, the right in FIG. In addition, the left and right mean rearward, that is, the left and right in FIGS. 2 and 3.

FIGS. 1 to 3 show a continuous heating device according to the present invention. The continuous heating device includes a heating furnace (1) for heating an object to be heated by hot air, and a walking beam transfer device (2). A cassette for storing heated objects
(3) A plate-like electronic / optical component (hereinafter, referred to as an object to be heated (4)) such as a liquid crystal display or an optical device horizontally supported by (3) is heated up to 350 ° C.

Each cassette (3) has a plurality of upper and lower heated object storage portions (33) for supporting the peripheral portion of the heated object (4). Are held horizontally.

The walking beam transport device (2) comprises a pair of mutually parallel fixed beams (5) penetrating the lower end of the heating furnace (1) and extending back and forth, and a pair of fixed beams inside the fixed beam (5). It has a pair of parallel moving beams (6) which are arranged in parallel and are slightly longer than the fixed beam (5). Conveys the heated cassette (3). An elevating device (12) for raising and lowering the moving beam (6) and an advancing / retracting device (13) for moving the moving beam (6) forward and backward are provided outside the heating furnace (1).

The heating furnace (1) has a box-shaped furnace body (7). In front and behind the furnace body (7), a cassette (3) transfer entrance (34) (35) is provided. The entrances (34) and (35) are closed by shutters (36) and (37), respectively. These shutters (3
6) By (37), the atmosphere in the furnace and the outside air are shut off, and the cleanliness and the temperature in the furnace are maintained.

As shown in FIG. 3, inside the furnace body (7), a heater (8) is provided at the upper right and a centrifugal fan (9) for circulating the atmosphere is provided to the left. Left vertical partition plate (38) for circulation path formation with an atmosphere passage hole to the right of the left side wall of the furnace body (7)
A right vertical partition plate (39) for circulation path formation with an atmosphere passage hole on the left side of the right side wall of the furnace body (7) is located below the heater (8) and the fan (9). Each plate (40) is provided. HEP inside the left vertical partition (38)
An A filter (11) is provided. As a result, the atmosphere heated by the heater (8) is circulated by the fan (9),
(7) Between the left side wall and the left vertical partition plate (38) for forming the circulation path, the HEPA filter (11), and the object to be heated in the furnace body (7).
(4) The side flow that blows from the left side, between the right side wall of the furnace body (7) and the right vertical partition plate (39) for forming the circulation path, the heater
(8) and fan (9) and horizontal divider for forming circulation path (40)
An atmosphere circulation path (10) is formed to circulate between the atmosphere. The atmosphere is cleaned by the HEPA filter (11) in the atmosphere circulation path (10) before being sprayed on the object (4). An exhaust pipe (41) is connected between the left side wall of the furnace body (7) and the left vertical partition plate (38) for forming a circulation path.

The fixed beam (5) and the moving beam (6)
For example, since it is made of heat-resistant steel such as SUS304 and the maximum operating temperature of the heating furnace (1) is 350 ° C., both beams (5) and (6)
Although it is made of steel, it has sufficient strength to support the cassette (3) but does not bend, and it is necessary to provide a beam reinforcing support member through the bottom wall of the heating furnace (1). There is no.

The moving beam lifting and lowering device 12 is constructed as follows.

The left and right moving beams (6) are supported by moving beam supporters (14) at both front and rear ends. The moving beam support table (14) includes a moving beam support plate (15) for receiving the lower ends of the left and right moving beams (6), and a horizontal plate portion extending below the moving beam support plate (15) and extending back and forth at the lower end thereof. It comprises a pair of left and right moving beam support bars (16) having (17). The outer surface of a roller (19) attached to the upper end of a vertical lifting plate (18) is in contact with the lower surface of the horizontal plate (17), and the moving beam support (14) is ) Is supported by the lifting plate (18). The lower end of the lifting plate (18)
It is attached via a vertical rod (21) to the front end of a rotatable arm (20) whose center is attached to a rotating shaft (19) extending left and right. A lift cam (22) is in contact with the rear end of the arm (20) from above. When the cam (22) is rotated, the arm (20) rotates, and the elevating plate (18) moves up and down with the rotation of the arm (20), and accordingly, the elevating plate (18)
The moving beam support (14) supported by the moving beam (6) is raised and lowered. Front and rear and left and right cams (2
2) is synchronized, and the left and right moving beams (6) are raised and lowered synchronously while keeping the horizontal state.

The forward / backward movement device (13) of the moving beam (6) is constructed as follows.

At the front and rear ends of the fixed beam (5), a pair of left and right horizontal guide portions (25) projecting forward and backward is provided on a fixed beam support plate (24) immediately below the fixed beam (5). The horizontal guides (25) are fitted with grooves (27) provided on the upper surfaces of a pair of left and right movable plates (26) arranged at an interval from each other. Moving beam support (14)
The left and right moving beam support rods (16) respectively penetrate the left and right moving plates (26), and each moving plate (26) is provided with a through hole. The ascending and descending guide and ascending positioning cylinder (23) into which (16) is inserted is fixed. The middle of the vertical plate (28) is fixed to the left edge of the right moving plate (26), and a roller guide groove (29) extending from near the lower end to the upper end is fixed on the left surface of the vertical plate (28). Is provided.
A swing arm (30) is disposed below and to the right of the left movable plate (26), and a roller (31) protruding rightward from the upper end of the swing arm (30) is provided with a roller guide groove (29). ). The groove width of the roller guide groove (29) is equal to the diameter of the roller (31), and the roller (31) can move up and down in the roller guide groove (29), but cannot move back and forth. The oscillating arm (30) changes from a vertical state shown by a chain line in FIGS. 2 and 3 to an inclined state shown by a solid line in FIG. The lower end of
It is fixed to a swing shaft (32) extending left and right. Swing arm
When (30) swings from the vertical state to the inclined state, a force is exerted on the vertical plate (28), and thus on the right moving plate (26), in order to advance it. This force is applied to the lift guide and lift positioning cylinder (23) and the moving beam support rod (16).
To the movable beam support (14). Since the moving beam support (14) is supported by the elevating plate (18) via the roller (19), it moves forward regardless of whether the elevating plate (18) is in the up state or the down state. . When the swing arm swings in the direction opposite to the above, the movable beam support (14) moves backward.

In the above continuous heating apparatus, the entrance and exit shutters (36) and (37) are raised, and the sensors provided at the rising ends of the shutters (36) and (37) are turned on.
Starts the transfer operation. The moving beam (6) is a lifting device
(12) and the movement of the retraction device (13), the cassette (3) on the fixed beam (5) is raised and supported, and after advancing, the cassette (3) is lowered on the fixed beam (5), Further retreats and returns to the original position. Elevating device (12) and reciprocating device (13)
Door shutter by the operation completion signal from the drive unit
(36) (37) is lowered, and a series of operations is completed.

According to the above continuous heating device, the object to be heated does not vibrate during transportation and heating, and generation of dust in the furnace can be prevented. Further, the beam reinforcing support member penetrates the bottom wall of the heating furnace. Therefore, it is possible to prevent the intrusion of dust from outside the furnace, and to improve the processing capacity with respect to the installation area of the apparatus.

With the above-described effects, the heating furnace can be cleaned up to class 10.

Moreover, since both the fixed beam and the moving beam are made of heat-resistant steel, the manufacturing cost can be reduced.

[0025]

According to the continuous heating device of the present invention, the object to be heated does not vibrate during transportation and heating, and the generation of dust in the furnace can be prevented, and the processing capacity for the installation area of the device is improved. Can be done.

[Brief description of the drawings]

FIG. 1 is a front view of a continuous heating device according to the present invention.

FIG. 2 is a side view taken along the line II-II of FIG.

FIG. 3 is a sectional view taken along line III-III in FIG.

[Explanation of symbols]

(1) Heating furnace (2) Walking beam conveyor (3) Cassette for storing heated object (4) Heated object (5) Fixed beam (6) Moving beam (7) Furnace (8) Heater (9) Atmosphere Circulation fan (10) Atmospheric circulation path (11) HEPA filter (34) Outlet (35) Inlet (36) Exit shutter (37) Inlet shutter (38) Left vertical partition plate for circulation path formation (39) For circulation path formation Right vertical divider (40) Horizontal divider for forming circulation path

Claims (1)

(57) [Scope of request for utility model registration] 1. A box type having an inlet and an outlet at front and rear ends.
A furnace body and a cassette for holding a plurality of plate-like objects to be heated horizontally.
And cassettes are loaded from the inlet of the furnace body and loaded from the outlet
Walking beams and the furnace body entrance and exit
To shut off the atmosphere inside the furnace and the outside air and
The shutter that can be opened when transporting cassettes using the King Beam
And a heater for generating a heating atmosphere provided above the furnace.
And the fan for circulation of the atmosphere and the inside of the left and right side walls of the furnace body
Circulation path type each provided with an atmosphere passage hole
Left and right vertical dividers and heaters and fans.
Horizontal divider for forming the circulation path and one of the left and right vertical
With a filter provided inside the partition plate,
The heated heating atmosphere is applied to one of the vertical partition and the filter.
After passing through the filter,
And a continuous heating device circulated through the other vertical partition .