JP2603384Y2 - Pyroelectric infrared detector - Google Patents

Pyroelectric infrared detector

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Publication number
JP2603384Y2
JP2603384Y2 JP1993027971U JP2797193U JP2603384Y2 JP 2603384 Y2 JP2603384 Y2 JP 2603384Y2 JP 1993027971 U JP1993027971 U JP 1993027971U JP 2797193 U JP2797193 U JP 2797193U JP 2603384 Y2 JP2603384 Y2 JP 2603384Y2
Authority
JP
Japan
Prior art keywords
cap
optical filter
bonding material
infrared detector
cut
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1993027971U
Other languages
Japanese (ja)
Other versions
JPH0680139U (en
Inventor
賢一 後藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daishinku Corp
Original Assignee
Daishinku Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daishinku Corp filed Critical Daishinku Corp
Priority to JP1993027971U priority Critical patent/JP2603384Y2/en
Publication of JPH0680139U publication Critical patent/JPH0680139U/en
Application granted granted Critical
Publication of JP2603384Y2 publication Critical patent/JP2603384Y2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Radiation Pyrometers (AREA)

Description

【考案の詳細な説明】[Detailed description of the invention]

【0001】[0001]

【産業上の利用分野】本考案は、人体検知システム等に
用いられる焦電型赤外線検出器に係り、特に外部ノイズ
の影響を極力排除した焦電型赤外線検出器に関するもの
である。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pyroelectric infrared detector used in a human body detection system and the like, and more particularly to a pyroelectric infrared detector which minimizes the influence of external noise.

【0002】[0002]

【従来の技術】既によく知られているように、焦電体は
赤外線を受けるとその熱エネルギーを吸収して温度変化
を生じ、自発分極が変化し、表面に電荷が生じる。この
ように微少温度変化に比例して表面に電荷が誘起され、
この電荷が外部回路によって電流または電圧として検出
される。焦電型赤外線検出器はこのような焦電効果を利
用し、人体検出等に用いられている。
2. Description of the Related Art As is well known, when a pyroelectric body receives infrared rays, it absorbs its thermal energy and causes a change in temperature, causing a change in spontaneous polarization and a charge on the surface. In this way, charge is induced on the surface in proportion to the minute temperature change,
This charge is detected as a current or a voltage by an external circuit. The pyroelectric infrared detector uses such a pyroelectric effect and is used for human body detection and the like.

【0003】従来の焦電型赤外線検出器の構成例を図3
とともに説明する。金属製のベース73の上面に3本の
リード端子731,732,733を突出させ、これら
リード端子の上にプリント配線基板72を3点支持し、
さらにこの基板の上下面に回路部品721,722並び
に支持体761,762が搭載され、焦電素子71をこ
の支持体上に支持する。そして、光線入射窓を有する金
属製のキャップ74に平板状の光学フィルタ75を接合
し、このキャップ74でこれら各部品を被覆する構成で
あった。この光学フィルタ75はシリコンウェハー等の
導体あるいは半導体からなる非絶縁性基板を基体とし、
この表裏面のうち少なくとも一面に、図示していないが
赤外線を透過せるための周波数選択性絶縁膜を形成し、
その後所定の大きさ、形状に切断して得られる。この切
断面(すなわち側面)は導体あるいは半導体部分が露出
しているために、切断面を含んで前記キャップ74と導
電性接合材Sにて導電接合することにより、金属性のキ
ャップと光学フィルタが導通し、電気的なシールドが行
える。また、図4に示すように、この光学フィルタ75
のキャップへの接着において、気密性を向上させるため
に、まず例えばエポキシ樹脂系の絶縁性の接合材S1で
予備接着を行っておき、その後導電性の接合材S2で電
気的接合を行うことにより、同じように電気的なシール
ドが行える。なお、光学フィルタ75は、非絶縁性基板
751の表裏面に周波数選択性絶縁膜752が設けられ
た構成である。
FIG. 3 shows a configuration example of a conventional pyroelectric infrared detector.
It will be explained together. Three lead terminals 731, 732, and 733 protrude from the upper surface of the metal base 73, and three points of the printed wiring board 72 are supported on these lead terminals,
Further, circuit components 721 and 722 and supports 761 and 762 are mounted on the upper and lower surfaces of the substrate, and the pyroelectric element 71 is supported on the support. Then, a flat optical filter 75 is joined to a metal cap 74 having a light incident window, and these components are covered with the cap 74. The optical filter 75 has a non-insulating substrate made of a conductor or semiconductor such as a silicon wafer as a base,
A frequency-selective insulating film (not shown) for transmitting infrared light is formed on at least one of the front and rear surfaces,
Thereafter, it is obtained by cutting into a predetermined size and shape. Since the conductor or the semiconductor portion is exposed on the cut surface (that is, the side surface), the metal cap and the optical filter are electrically connected to the cap 74 including the cut surface by the conductive bonding material S. It conducts and provides electrical shielding. In addition, as shown in FIG.
In order to improve airtightness in bonding to the cap, first, for example, preliminary bonding is performed with an epoxy resin-based insulating bonding material S1 and then electrical bonding is performed with a conductive bonding material S2. In the same manner, electrical shielding can be performed. The optical filter 75 has a configuration in which a frequency-selective insulating film 752 is provided on the front and back surfaces of a non-insulating substrate 751.

【0004】[0004]

【考案が解決しようとする課題】上記したような赤外線
検出器には、赤外線のみならず各種の電気機器から発せ
られる他の電磁波が光学フィルタを通して入射してく
る。これら他の電磁波は赤外線検出器にとっては有害な
ノイズとなり、赤外線の検出に誤動作を生じさせる要因
となっていた。上記電気的なシールドを行うことによ
り、他の電磁波は金属製のキャップ、金属製ベースを介
して、特定のリード端子からアースされる。これによ
り、上記誤動作を一定のレベルにまで低下させることが
可能となっていた。しかし、最近、移動体通信等が急増
し、これらから発せられる高周波電界ノイズは送信出力
が大きいことも相俟って、上記シールドでは不十分な場
合があった。すなわち、光学フィルタの切断面に露出し
た導体あるいは半導体部分はその表面積が小さく、また
表面張力の得にくい構成であるために、充分な導通が得
られないので、充分なシールド効果を得られず、誤動作
を生じさせる原因となっていた。また、図4の光線入射
窓付近の部分拡大断面図に示すように、絶縁性の接合材
で予備接着を行った場合、この予備接着用の接合材がキ
ャップと光学フィルタの接合面からはみ出して、光学フ
ィルタの切断面の多くの部分を覆ってしまうことがあっ
た。このような場合、後からつけた導電性接合材がこの
切断面に充分につかず、必要な導通がとれないことがあ
った。
The infrared detector as described above receives not only infrared rays but also other electromagnetic waves emitted from various electric devices through an optical filter. These other electromagnetic waves become harmful noises for the infrared detector and cause malfunction in infrared detection. By performing the above-described electrical shielding, other electromagnetic waves are grounded from a specific lead terminal via a metal cap and a metal base. As a result, the malfunction can be reduced to a certain level. However, recently, mobile communication and the like have rapidly increased, and high-frequency electric field noise generated from these has been sometimes insufficient with the above-mentioned shield, in combination with a large transmission output. In other words, the conductor or semiconductor portion exposed on the cut surface of the optical filter has a small surface area, and has a configuration in which surface tension is difficult to obtain, so that sufficient conduction cannot be obtained. This has caused a malfunction. Further, as shown in a partially enlarged cross-sectional view near the light incident window in FIG. 4, when the preliminary bonding is performed with an insulating bonding material, the bonding material for the preliminary bonding protrudes from the bonding surface between the cap and the optical filter. In some cases, many portions of the cut surface of the optical filter are covered. In such a case, the conductive bonding material applied later may not sufficiently adhere to the cut surface, and necessary conduction may not be obtained.

【0005】本考案は上記問題点を解決するためになさ
れたもので、送信出力が大きい高周波電界ノイズがこの
赤外線検出器に入射した場合でも、誤動作の少ない焦電
型赤外線検出器を得ることを目的とするものである。
The present invention has been made to solve the above-mentioned problem, and an object of the present invention is to provide a pyroelectric infrared detector which has less malfunction even when high-frequency electric field noise having a large transmission output is incident on the infrared detector. It is the purpose.

【0006】[0006]

【課題を解決するための手段】上記問題点を解決するた
めに、本考案による焦電型赤外線検出器は、金属性キャ
ップに形成された光線入射窓の内側に、非絶縁性基板を
基体とし少なくともその表面に赤外線を透過させるため
の周波数選択性絶縁膜を形成した光学フィルタを取着
し、この光学フィルタに対応するキャップ内部の所定の
位置に焦電素子を収納してなる焦電型赤外線検出器であ
って、前記非絶縁性基板には焦電素子側の外周近傍の一
部または全部を板厚方向に切削した切削部を形成するこ
とにより、当該非絶縁性基板の一部が露出した厚肉部と
薄肉部が設けられ、当該光学フィルタは前記切削部形成
の反対面を前記金属性キャップに当接させ、前記薄肉部
と金属性キャップとを絶縁性接合材により接合するとと
もに、前記厚肉部と金属性キャップとを導電性接合材で
電気的機械的接合したことを特徴としている。
In order to solve the above problems, a pyroelectric infrared detector according to the present invention comprises a non-insulating substrate as a base inside a light incident window formed in a metal cap. At least an optical filter formed with a frequency-selective insulating film for transmitting infrared light on its surface is attached, and a pyroelectric infrared ray is formed by housing a pyroelectric element at a predetermined position inside a cap corresponding to the optical filter. A detector, wherein a portion of the non-insulating substrate is partially or entirely cut in the thickness direction on the non-insulating substrate in the vicinity of the outer periphery of the pyroelectric element, thereby exposing a portion of the non-insulating substrate. A thick portion and a thin portion are provided, and the optical filter abuts the opposite surface of the cut portion formation on the metal cap, and joins the thin portion and the metal cap with an insulating bonding material, The thick part An attribute cap conductive bonding material is characterized in that the electrical and mechanical joining.

【0007】[0007]

【作用】光学フィルタの外周近傍の焦電素子側の面が一
部切削され、薄肉部分と厚肉部分を有する切削部を形成
した構成である。この切削部においては光学フィルタの
導体あるいは半導体からなる非絶縁性部分が大きく露出
しているので、この部分に導電性接合材を塗布しキャッ
プと導電接合することにより、導通状態が向上し電気的
シールドが強化される。よって、ノイズとなる不要な電
磁波を充分にアースすることが可能となる。また、大き
な表面張力を得ることができるので機械的接続強度も強
化することができる。
The surface on the pyroelectric element side near the outer periphery of the optical filter is partially cut to form a cut portion having a thin portion and a thick portion. In this cut portion, a non-insulating portion made of a conductor or a semiconductor of the optical filter is largely exposed. By applying a conductive bonding material to this portion and conductively bonding with the cap, the conduction state is improved and the electrical connection is improved. The shield is strengthened. Therefore, it is possible to sufficiently ground unnecessary electromagnetic waves that become noise. In addition, since a large surface tension can be obtained, the mechanical connection strength can be enhanced.

【0008】また、このキャップと光学フィルタの接合
において、まず絶縁性の接合材で予備接着し、その後導
電性接合材で両者を接合するような場合、図2に示すよ
うに最初に接着した絶縁性の接合材は、薄肉部分の境界
部分(エッジ部分)で表面張力により止まる。よって、
厚肉部分の切削部分が露出している状態を確保すること
ができるので、次の導電性接合材をこの厚肉部分の切削
部分に塗布することにより、充分な電気的シールドが行
える。
In the case of joining the cap and the optical filter in advance by preliminarily bonding with an insulating bonding material and then bonding the two with a conductive bonding material, as shown in FIG. The bonding material stops at a boundary portion (edge portion) of the thin portion due to surface tension. Therefore,
Since the cut portion of the thick portion can be kept exposed, sufficient electric shielding can be performed by applying the next conductive bonding material to the cut portion of the thick portion.

【0009】[0009]

【実施例】本考案による実施例を焦電型赤外線検出器を
例に取り、図面とともに説明する。図1は焦電型赤外線
検出器の断面図である。焦電素子1はチタン酸鉛系の焦
電性を有するセラミックからなり、板厚方向に分極処理
され、かつ矩形形状に切断加工されている。この焦電素
子1の表面には、図示していないが2つの受光用の金属
膜電極(CrあるいはNi−Cr等)が所定の間隔で設
けられており、裏面においては上記受光用の金属膜電極
に対応した金属膜電極(Ag等)が設けられている。な
お、受光用の電極は共通接続されている。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment according to the present invention will be described with reference to the drawings, taking a pyroelectric infrared detector as an example. FIG. 1 is a sectional view of a pyroelectric infrared detector. The pyroelectric element 1 is made of a lead titanate-based pyroelectric ceramic, is polarized in the thickness direction, and is cut into a rectangular shape. Although not shown, two light receiving metal film electrodes (such as Cr or Ni—Cr) are provided on the front surface of the pyroelectric element 1 at predetermined intervals, and on the back surface, the light receiving metal film is provided. A metal film electrode (Ag or the like) corresponding to the electrode is provided. Note that the light receiving electrodes are commonly connected.

【0010】この焦電素子1はプリント配線基板2に支
持体61,62を介して搭載されている。また、プリン
ト配線基板2の裏面には外部回路を構成するFET,抵
抗等の回路部品21,22が取り付けられており、前記
焦電素子と必要な電気的接続がなされている。ベース3
は金属製のシェル3aに絶縁ガラスを介して、リード端
子31,32が植設されており,リード端子33がシェ
ル3aと電気的に導通した状態で植設されている。これ
らリード端子の上部に前記プリント配線基板が搭載さ
れ、必要な電気的接続がなされている。
The pyroelectric element 1 is mounted on a printed wiring board 2 via supports 61 and 62. Further, circuit components 21 and 22 such as FETs and resistors constituting an external circuit are attached to the back surface of the printed wiring board 2 to make necessary electrical connections with the pyroelectric element. Base 3
The lead terminals 31 and 32 are planted in a metal shell 3a via insulating glass, and the lead terminal 33 is planted in a state of being electrically connected to the shell 3a. The printed wiring board is mounted on these lead terminals, and necessary electrical connections are made.

【0011】これら各構成要素を封止するキャップ4は
金属製であり、上面には光線入射窓41が設けられてい
る。図2は図1の光学フィルタ部分の拡大断面図である
が、この図2に示すように、この光線入射窓41の内方
に取り付けられる光学フィルタ5は、例えばシリコン等
の非絶縁性基板51(導体あるいは半導体)の表裏面に
赤外線のみを透過させるための周波数選択性絶縁膜52
を形成した構成であり、かつ、この光学フィルタの外周
近傍の焦電素子側が切削され、前記絶縁膜52下部の非
絶縁性基板51が露出し、薄肉部分と厚肉部分を有する
切削部5aを形成している。そして前記キャップ4とこ
の光学フィルタ5の対向面に、まずエポキシ樹脂系の絶
縁性接合材S1を塗布し、これらを当接させ機械的に予
備接着を行う。ここで用いた絶縁性接合材S1は塗布量
が多くても、その表面張力より前記切削部5aの薄肉部
のエッジ部分で止まる。そして、次に厚肉部分の切削部
5aに導電性接合材S2を塗布することにより、キャッ
プ4と光学フィルタ5が電気的接続されかつ機械的接続
の強化がなされる。必要部品をベースに搭載した後、キ
ャップにて気密封止を行って焦電型赤外線検出器が完成
する。
The cap 4 for sealing these components is made of metal, and a light incident window 41 is provided on the upper surface. FIG. 2 is an enlarged cross-sectional view of the optical filter portion of FIG. 1. As shown in FIG. 2, the optical filter 5 attached inside the light-incident window 41 includes a non-insulating substrate 51 such as silicon. Frequency-selective insulating film 52 for transmitting only infrared rays on the front and back surfaces of (conductor or semiconductor)
And the pyroelectric element side near the outer periphery of the optical filter is cut, the non-insulating substrate 51 below the insulating film 52 is exposed, and the cut portion 5a having a thin portion and a thick portion is formed. Has formed. First, an epoxy resin-based insulating bonding material S1 is applied to the opposing surfaces of the cap 4 and the optical filter 5, and these are brought into contact with each other to mechanically perform preliminary bonding. Even if the applied amount of the insulating bonding material S1 used here is large, the insulating bonding material S1 stops at the edge of the thin portion of the cutting portion 5a due to its surface tension. Then, by applying the conductive bonding material S2 to the cut portion 5a of the thick portion, the cap 4 and the optical filter 5 are electrically connected and the mechanical connection is strengthened. After mounting the necessary components on the base, the cap is hermetically sealed to complete the pyroelectric infrared detector.

【0012】なお、必要に応じてこの導電性接合材の上
部にエポキシ系の接合材等を塗布し、機械的接合を強化
あるいは気密性の強化を図ってもよい。また、気密性に
優れた導電性接合材を用いる場合は、上記のように予備
接着は必要とせず、導電性接合材のみで電気的機械的接
合を行ってもよい。さらに回路部品は必ずしもキャップ
内部に配置する必要はなく、外部のプリント基板等に外
付けする構成をとってもよい。
If necessary, an epoxy-based bonding material or the like may be applied on the conductive bonding material to enhance mechanical bonding or airtightness. When a conductive bonding material having excellent airtightness is used, the pre-adhesion is not required as described above, and electrical and mechanical bonding may be performed using only the conductive bonding material. Further, the circuit components need not necessarily be arranged inside the cap, and may be configured to be externally attached to an external printed circuit board or the like.

【0013】[0013]

【考案の効果】本考案によれば、光学フィルタの外周近
傍の焦電素子側の面が一部切削され、薄肉部分と厚肉部
分を有する切削部を形成した構成であり、これにより光
学フィルタの導体あるいは半導体からなる非絶縁性部分
が大きく露出しているので、この部分に導電性接合材を
塗布しキャップと導電接合することにより、導通状態が
向上し電気的シールドが強化される。特に、このキャッ
プと光学フィルタの接合において、まず絶縁性の接合材
で予備接着し、その後導電性接合材で両者を接合するよ
うな場合、最初に接着した絶縁性の接合材は、薄肉部分
の境界部分(エッジ部分)で表面張力により止めること
ができる。よって、厚肉部分の切削部分が露出している
状態を確保することができ、次の導電性接合材をこの厚
肉部分の切削部に塗布することにより、充分な電気的シ
ールドが行える。以上により、ノイズとなる不要な電磁
波を充分にシールドし、アースすることが可能となり、
最近、急増している移動体通信機器からの送信出力が大
きい高周波電界ノイズがこの赤外線検出器に入射した場
合でも、誤動作の少ない焦電型赤外線検出器を得ること
ができる。また、大きな表面張力を得ることができるの
で機械的接続強度も強化することができ、キャップの気
密効果も向上する。
According to the present invention, the surface on the pyroelectric element side near the outer periphery of the optical filter is partially cut to form a cut portion having a thin portion and a thick portion. Since a non-insulating portion made of a conductor or a semiconductor is largely exposed, a conductive bonding material is applied to this portion and conductively bonded to the cap, thereby improving the conduction state and strengthening the electric shield. In particular, in joining the cap and the optical filter, when preliminarily bonding with an insulating bonding material, and then bonding the two with a conductive bonding material, the insulating bonding material that is bonded first has a thin portion. It can be stopped at the boundary part (edge part) by surface tension. Therefore, a state where the cut portion of the thick portion is exposed can be ensured, and sufficient electrical shielding can be performed by applying the next conductive bonding material to the cut portion of the thick portion. As described above, it is possible to sufficiently shield unnecessary electromagnetic waves that become noise and to ground them.
Even if high-frequency electric field noise having a large transmission output from a mobile communication device, which has been rapidly increasing recently, enters this infrared detector, a pyroelectric infrared detector with less malfunction can be obtained. Further, since a large surface tension can be obtained, the mechanical connection strength can be enhanced, and the airtightness of the cap can be improved.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本考案による焦電型赤外線検出器の実施例を示
す断面図。
FIG. 1 is a sectional view showing an embodiment of a pyroelectric infrared detector according to the present invention.

【図2】図1の要部拡大図。FIG. 2 is an enlarged view of a main part of FIG.

【図3】従来例を示す断面図FIG. 3 is a sectional view showing a conventional example.

【図4】他の従来例を示す部分拡大断面図FIG. 4 is a partially enlarged sectional view showing another conventional example.

【符号の説明】[Explanation of symbols]

1、71 焦電素子 2、72 プリント配線基板 3、73 ベース 31、32、33、731、732、733 リード端
子 4、74 キャップ 5、75 光学フィルタ 5a 切削部
1, 71 Pyroelectric element 2, 72 Printed wiring board 3, 73 Base 31, 32, 33, 731, 732, 733 Lead terminal 4, 74 Cap 5, 75 Optical filter 5a Cutting part

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7,DB名) G01J 1/02 - 1/06 G01J 5/02 G01V 9/04 G08B 13/19 - 13/191 G08B 17/00 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. 7 , DB name) G01J 1/02-1/06 G01J 5/02 G01V 9/04 G08B 13/19-13/191 G08B 17 / 00

Claims (1)

(57)【実用新案登録請求の範囲】(57) [Scope of request for utility model registration] 【請求項1】 金属性キャップに形成された光線入射窓
の内側に、非絶縁性基板を基体とし少なくともその表面
に赤外線を透過せるための周波数選択性絶縁膜を形成
した光学フィルタを取着し、この光学フィルタに対応す
るキャップ内部の所定の位置に焦電素子を収納してなる
焦電型赤外線検出器であって、 前記非絶縁性基板には焦電素子側の外周近傍の一部また
は全部を板厚方向に切削した切削部を形成することによ
り、当該非絶縁性基板の一部が露出した厚肉部と薄肉部
が設けられ、当該光学フィルタは前記切削部形成の反対
面を前記金属性キャップに当接させ、前記薄肉部と金属
性キャップとを絶縁性接合材により接合するとともに、
前記厚肉部と金属性キャップとを導電性接合材で電気的
機械的接合したことを特徴とする焦電型赤外線検出器。
Inside of 1. A light entrance window which is formed on the metal cap, attach the optical filter and the non-insulating substrate to form a frequency-selective insulating film for transmitting infrared rays to at least the surface of the substrate A pyroelectric infrared detector including a pyroelectric element housed in a predetermined position inside a cap corresponding to the optical filter, wherein the non-insulating substrate has a portion near an outer periphery on a pyroelectric element side. Or by forming a cut part that is cut in the thickness direction
Thick and thin portions where a part of the non-insulating substrate is exposed.
Is provided, and the optical filter is opposite to the cut portion formation.
The thin portion and the metal
With the conductive cap with an insulating bonding material,
The thick portion and the metallic cap are electrically connected with a conductive bonding material.
A pyroelectric infrared detector characterized by being mechanically joined .
JP1993027971U 1993-04-27 1993-04-27 Pyroelectric infrared detector Expired - Fee Related JP2603384Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1993027971U JP2603384Y2 (en) 1993-04-27 1993-04-27 Pyroelectric infrared detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1993027971U JP2603384Y2 (en) 1993-04-27 1993-04-27 Pyroelectric infrared detector

Publications (2)

Publication Number Publication Date
JPH0680139U JPH0680139U (en) 1994-11-08
JP2603384Y2 true JP2603384Y2 (en) 2000-03-06

Family

ID=12235772

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1993027971U Expired - Fee Related JP2603384Y2 (en) 1993-04-27 1993-04-27 Pyroelectric infrared detector

Country Status (1)

Country Link
JP (1) JP2603384Y2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006120862A1 (en) * 2005-05-11 2006-11-16 Murata Manufacturing Co., Ltd. Infrared sensor and its manufacturing process

Also Published As

Publication number Publication date
JPH0680139U (en) 1994-11-08

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