JP2602425B2 - Amorphous magneto-optical layer - Google Patents

Amorphous magneto-optical layer

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Publication number
JP2602425B2
JP2602425B2 JP59088077A JP8807784A JP2602425B2 JP 2602425 B2 JP2602425 B2 JP 2602425B2 JP 59088077 A JP59088077 A JP 59088077A JP 8807784 A JP8807784 A JP 8807784A JP 2602425 B2 JP2602425 B2 JP 2602425B2
Authority
JP
Japan
Prior art keywords
magneto
amorphous
optical layer
optical
effect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59088077A
Other languages
Japanese (ja)
Other versions
JPS60231307A (en
Inventor
元治 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP59088077A priority Critical patent/JP2602425B2/en
Publication of JPS60231307A publication Critical patent/JPS60231307A/en
Application granted granted Critical
Publication of JP2602425B2 publication Critical patent/JP2602425B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【発明の詳細な説明】 技術分野 本発明はハードデイスク、フロツピーデイスク、ドキ
ュメントフアイル等に使用される光磁気記録媒体の磁気
光学層に関するものであり、特に磁気光学効果に優れた
非晶質磁気光学層に係るものである。
Description: TECHNICAL FIELD The present invention relates to a magneto-optical layer of a magneto-optical recording medium used for a hard disk, a floppy disk, a document file, and the like, and in particular, an amorphous magneto-optical layer excellent in a magneto-optical effect. Pertains to layers.

従来技術 近年、半導体レーザー光により磁気記録を行う光磁気
記録媒体が高密度記録用として種々研究されている。特
に高密度記録用として使用されるためには磁性膜がその
膜面に垂直な方向に磁化容易軸を有することが必要とさ
れる。従来、これら光磁気記録媒体に用いられる磁性膜
としてはGd−Co,Gd−Fe,Tb−Fe,Gd−Tb−Fe,Tb−Dy−Fe
等の非晶質合金を用いたもの等が知られているが、これ
ら非晶質合金磁性体を用いた光磁気記録媒体は記録感度
が高く半導体レーザー光によつて高速度(周波数、数MH
Zにおいて)で記録できるという利点はあるものの磁気
光学効果が十分満足できるものではない問題点を有する
ものである。かかることからGd−Tb−Fe−Coより成る4
元非晶質磁性膜を用いることによりカー回転角を大きく
して磁気光学効果を向上させることが特開昭58−196639
号公報に提案されている。このような非晶質合金磁性体
を用いて光磁気記録媒体を作るには一般にガラス板のよ
うな基板上に前記磁性体を真空蒸着、スパツタリング等
の方法で付着させて磁性膜を形成している。こうして得
られる光磁気記録媒体への記録・再生は次のようにして
行われる。すなわち、記録は磁性膜のキユリー温度また
は補償温度近傍における温度変化に対応した保磁力の急
激な変化特性を利用して情報信号で変調されたレーザー
光を磁性膜に照射加熱して磁性膜表面磁化の向きを反転
させることにより行われる。また再生ほこうして反転記
録された磁性膜のカー回転角を読出すことにより行われ
る。このように非晶質合金磁性体のように光が透過しに
くい場合の情報信号の記録・再生はカー効果を利用する
ものである。カー効果とは磁性体の表面で光が反射する
際の偏光面の回転現象であり、a)極(polar)効果、
b)縦(longitudinal)効果、c)横(transverse)効
果があり、特に非晶質合金磁性体の場合にはaの極効果
が用いられ、そのカー回転角θKを利用して再生が行わ
れる。従つてカー回転角θKが少しでも大きくなればそ
れだけ磁気光学効果が増し、再生特性が向上することに
なる。
2. Description of the Related Art In recent years, various studies have been made on magneto-optical recording media for performing magnetic recording using semiconductor laser light for high-density recording. In particular, in order to be used for high-density recording, the magnetic film needs to have an easy axis of magnetization in a direction perpendicular to the film surface. Conventionally, magnetic films used in these magneto-optical recording media include Gd-Co, Gd-Fe, Tb-Fe, Gd-Tb-Fe, Tb-Dy-Fe
However, magneto-optical recording media using these amorphous alloy magnetic materials have high recording sensitivity and high speed (frequency, several MHz) by semiconductor laser light.
Although there is an advantage that recording can be performed in ( Z ), there is a problem that the magneto-optical effect is not sufficiently satisfactory. Therefore, Gd-Tb-Fe-Co4
Japanese Patent Application Laid-Open No. Sho 58-196639 discloses that the Kerr rotation angle is increased by using the original amorphous magnetic film to improve the magneto-optical effect.
No. 1993. In order to make a magneto-optical recording medium using such an amorphous alloy magnetic material, a magnetic film is generally formed by depositing the magnetic material on a substrate such as a glass plate by a method such as vacuum evaporation or sputtering. I have. Recording and reproduction on the magneto-optical recording medium thus obtained are performed as follows. In other words, the recording is performed by irradiating the magnetic film with a laser beam modulated by an information signal by utilizing the rapid change characteristic of the coercive force corresponding to the temperature change near the Curie temperature or the compensation temperature of the magnetic film and heating the magnetic film surface. Is performed by reversing the direction of. Also, the reading is performed by reading the Kerr rotation angle of the magnetic film which has been reversely recorded in the reproducing manner. As described above, the recording and reproduction of the information signal in the case where the light is hardly transmitted like the amorphous alloy magnetic material utilizes the Kerr effect. The Kerr effect is a rotation phenomenon of a plane of polarization when light is reflected on the surface of a magnetic material, and a) a polar effect,
There are b) a longitudinal (longitudinal) effect and c) a transverse (transverse) effect. In particular, in the case of an amorphous alloy magnetic material, the pole effect of a is used, and reproduction is performed using the Kerr rotation angle θK. . Therefore, if the Kerr rotation angle θK is slightly increased, the magneto-optical effect is increased and the reproduction characteristics are improved.

しかしながら、前述のGd−Tb−Fe−Coより成る4元非
晶質磁性体のカー回転角θKは0.4deg程度と小さく、光
再生特性が十分満足されるものとはいい難いものであ
る。
However, the Kerr rotation angle θK of the aforementioned quaternary amorphous magnetic material composed of Gd-Tb-Fe-Co is as small as about 0.4 deg, and it is difficult to say that the optical reproduction characteristics are sufficiently satisfied.

目的 本発明の目的は膜面に垂直な方向に磁化容易軸を有す
る非晶質合金磁性体におけるカー回転角θKをより増大
せしめ、それにより光再生特性を向上させた非晶質磁気
光学層を提供することにある。
An object of the present invention is to provide an amorphous magneto-optical layer in which the Kerr rotation angle θK in an amorphous alloy magnetic material having an easy axis of magnetization in a direction perpendicular to the film surface is further increased, thereby improving the light reproduction characteristics. To provide.

構成 本発明は膜面に垂直な方向に磁化容易軸を有する {(GdxTb1-x(Fe1-zCoz1-y1-aSna または {(GdxTb1-x(Fe1-zCoz1-y1-bCnb (ただし、0<x<1、0.1≦y≦0.4、0<z≦0.5、
0.001≦a<0.04、0.001≦b<0.02)の非晶質磁気光学
層である。
Configuration present invention has an axis of easy magnetization in a direction perpendicular to the film plane {(Gd x Tb 1-x ) y (Fe 1-z Co z) 1-y} 1-a Sn a or {(Gd x Tb 1 -x ) y (Fe 1-z Co z ) 1-y1-b Cn b (where 0 <x <1, 0.1 ≦ y ≦ 0.4, 0 <z ≦ 0.5,
0.001 ≦ a <0.04, 0.001 ≦ b <0.02).

本発明非晶質磁気光学層は適宜の支持体上に真空蒸
着、スパツタリング、イオンプレーテイング等の方法で
膜厚0.01〜1μm程度に形成する。
The amorphous magneto-optical layer of the present invention is formed on an appropriate support to a thickness of about 0.01 to 1 μm by a method such as vacuum deposition, sputtering, or ion plating.

スパツタリングにて磁性体の薄膜形成を行う場合に
は、各磁性体成分を各個にあるいは組合わせてターゲツ
トとし、磁性体組成はターゲツト表面の面積比でコント
ロールすようにする。
When a magnetic thin film is formed by sputtering, each magnetic component is used individually or in combination as a target, and the composition of the magnetic material is controlled by the area ratio of the target surface.

支持体としては、ガラス、プラスチツク、セラミツク
等が使用できる。また本発明非晶質磁気光学層と支持体
との間、あるいは上面に保護層、断熱層、反射層等が任
意に設けられる。
As the support, glass, plastic, ceramic, and the like can be used. A protective layer, a heat insulating layer, a reflective layer, and the like are optionally provided between the amorphous magneto-optical layer of the present invention and the support or on the upper surface.

効果 このようにして得られる {(GdxTb1-x(Fe1-zCoz1-y1-aSna または {(GdxTb1-x(Fe1-zCoz1-y1-bCnb (ただし、0<x<1、0.1≦y≦0.4、0<z≦0.5、
0.001≦a<0.04、0.001≦b<0.02)膜からなる非晶質
磁気光学層に情報信号で変調されたレーザー光を照射加
熱した場合、前記非晶質磁気光学層のカー回転角θKが
従来のものに比べて大きいため、これをカー効果により
再生する際の光再生特性が良好となり、S/N比が向上す
るとともに記録ピツト数も増大し、高密度記録再生可能
な光磁気記録媒体が得られることになる。
Effect thus obtained {(Gd x Tb 1-x ) y (Fe 1-z Co z) 1-y} 1-a Sn a or {(Gd x Tb 1-x ) y (Fe 1-z Co z ) 1-y1-b Cn b (where 0 <x <1, 0.1 ≦ y ≦ 0.4, 0 <z ≦ 0.5,
0.001 ≦ a <0.04, 0.001 ≦ b <0.02) When the amorphous magneto-optical layer made of a film is irradiated with a laser beam modulated by an information signal and heated, the Kerr rotation angle θK of the amorphous magneto-optical layer is Therefore, the magneto-optical recording medium capable of high-density recording / reproduction is improved in light reproduction characteristics when reproducing it by the Kerr effect, improving the S / N ratio and increasing the number of recording pits. Will be obtained.

以下に実施例を示す。 Examples will be described below.

実 施 例 スライドガラス支持体上にスパツタリング法により約
1500〜2000Åの膜厚のGd−Tb−Fe−Co−Mからなる非晶
質磁気光学層を形成した。ターゲツトはコンポジツト法
を用い、Fe0.9Co0.1合金円板の上にGd0.5Tb0.5の合金チ
ツプおよびMチツプをのせて構成し、各組成比をターゲ
ツト表面の面積比でコントロールしつつ薄膜形成した。
Example of application Approx.
An amorphous magneto-optical layer made of Gd-Tb-Fe-Co-M with a thickness of 1500 to 2000 mm was formed. The target was formed using a composite method by placing an alloy chip of Gd 0.5 Tb 0.5 and an M chip on a Fe 0.9 Co 0.1 alloy disk, and forming a thin film while controlling each composition ratio by the area ratio of the target surface.

各非晶質磁気光学層の作成(スパツタリング)条件を
次表に示す。
The conditions for forming (sputtering) each amorphous magneto-optical layer are shown in the following table.

各非晶質磁気光学層は保磁力Hcの大きい補償組成付近
の(Fe0.9Co0.10.78(Gd0.5Tb0.50.22もしくは(Fe
0.9Co0.10.79(Gd0.5Tb0.50.21の組成において(Gd
0.5Tb0.5)の一部をMで置換するという形、すなわち
(Fe0.9Co0.10.78{(Gd0.5Tb0.51-xMx}0.22もし
くは(Fe0.9Co0.10.79{(Gd0.5Tb0.51-XMx}0.21
とし、、MがCuの場合には前者の組成、MがSnの場合に
は後者の組成となし、作製した。
Each amorphous magneto-optical layer has a (Fe 0.9 Co 0.1 ) 0.78 (Gd 0.5 Tb 0.5 ) 0.22 or (Fe
0.9 Co 0.1 ) 0.79 (Gd 0.5 Tb 0.5 ) 0.21 composition (Gd
0.5 Tb 0.5 ) is replaced by M, that is, (Fe 0.9 Co 0.1 ) 0.78 {(Gd 0.5 Tb 0.5 ) 1-x Mx} 0.22 or (Fe 0.9 Co 0.1 ) 0.79 {(Gd 0.5 Tb 0.5 ) 1-X Mx} 0.21
When M was Cu, the former composition was used, and when M was Sn, the latter composition was used.

膜の評価は基板側からHe−Neレーザー(λ=633nm)
を照射し、カー効果を用いてカー回転角θKおよび保磁
力Hcを求めた。
He-Ne laser (λ = 633nm) from the substrate side
And the Kerr rotation angle θK and the coercive force Hc were determined using the Kerr effect.

それらの結果を第1図及び第2図に示す。これらの図
よりX、すなわちMの量を増加させることによりHcは小
さくなるもののθKは大きくなることがわかる。本実施
例では(Gd0.5Tb0.5)の一部をMで置換したため、M量
を増大させると異方性に寄与しているTbの量が減り、Hc
は小さくなるためM量をそれ程増大できなかつたが、
(Fe0.9Co0.1)と(Gd0.5Tb0.5)の量の比を一定にして
M量を増すようにすればHcの低下は抑えられM量を増大
させることができる。
The results are shown in FIG. 1 and FIG. From these figures, it can be seen that increasing the amount of X, ie, M, decreases Hc but increases θK. In this embodiment, a part of (Gd 0.5 Tb 0.5 ) is replaced by M. Therefore, when the amount of M is increased, the amount of Tb contributing to the anisotropy decreases, and Hc
Has not been able to increase the amount of M so much because
If the ratio of (Fe 0.9 Co 0.1 ) and (Gd 0.5 Tb 0.5 ) is kept constant and the amount of M is increased, the decrease in Hc can be suppressed and the amount of M can be increased.

ここで改めて各実施例における非晶質磁気光学層にお
いて最もカー回転角θKが大きくなる場合のGd−Tb−Fe
−Co−M膜組成、カー回転角θKおよびMを含有させな
い場合と比べたθKの増加値を示す。
Here, Gd-Tb-Fe in the case where the Kerr rotation angle θK is the largest in the amorphous magneto-optical layer in each of the embodiments is again described.
-Co-M film composition, Kerr rotation angle θK, and the increase in θK compared to the case where M is not contained are shown.

【図面の簡単な説明】[Brief description of the drawings]

第1図及び第2図は本実施例における各非晶質磁気光学
層中のMの量を変えた場合のθKおよびHcの変化図であ
る。
FIGS. 1 and 2 are diagrams showing changes in θK and Hc when the amount of M in each amorphous magneto-optical layer in this embodiment is changed.

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】{(GdxTb1-x(Fe1-zCoz1-y1-aSn
a または {(GdxTb1-x(Fe1-zCoz1-y1-bCnb (ただし、0<x<1、0.1≦y≦0.4、0<z≦0.5、
0.001≦a<0.04、0.001≦b<0.02)の組成式で示され
る膜面に垂直な方向に磁化容易軸を有する非晶質磁気光
学層。
(1) {(Gd x Tb 1-x ) y (Fe 1-z Co z ) 1-y1-a Sn
a or {(Gd x Tb 1-x ) y (Fe 1 -z Co z ) 1-y1-b Cn b (where 0 <x <1, 0.1 ≦ y ≦ 0.4, 0 <z ≦ 0.5,
An amorphous magneto-optical layer having an easy axis of magnetization in a direction perpendicular to the film surface represented by a composition formula of 0.001 ≦ a <0.04, 0.001 ≦ b <0.02).
JP59088077A 1984-05-01 1984-05-01 Amorphous magneto-optical layer Expired - Lifetime JP2602425B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59088077A JP2602425B2 (en) 1984-05-01 1984-05-01 Amorphous magneto-optical layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59088077A JP2602425B2 (en) 1984-05-01 1984-05-01 Amorphous magneto-optical layer

Publications (2)

Publication Number Publication Date
JPS60231307A JPS60231307A (en) 1985-11-16
JP2602425B2 true JP2602425B2 (en) 1997-04-23

Family

ID=13932796

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JP59088077A Expired - Lifetime JP2602425B2 (en) 1984-05-01 1984-05-01 Amorphous magneto-optical layer

Country Status (1)

Country Link
JP (1) JP2602425B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61172237A (en) * 1985-01-28 1986-08-02 Kyocera Corp Photoelectromagnetic recording element
JP2601796B2 (en) * 1985-12-05 1997-04-16 日立マクセル株式会社 Magneto-optical recording medium
US4950556A (en) * 1987-10-26 1990-08-21 Minnesota Mining And Manufacturing Company Magneto-optic recording medium

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58165306A (en) * 1982-03-26 1983-09-30 Hitachi Ltd Vertical magnetic recording medium
JPS5968854A (en) * 1982-09-28 1984-04-18 Seiko Instr & Electronics Ltd Photomagnetic recording medium
JPS5961011A (en) * 1982-09-30 1984-04-07 Ricoh Co Ltd Optical magnetic recording medium
JPS60101741A (en) * 1983-11-05 1985-06-05 Canon Inc Photomagnetic recording medium
JPS60101739A (en) * 1983-11-05 1985-06-05 Canon Inc Photomagnetic recording medium

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JPS60231307A (en) 1985-11-16

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