JP2600242B2 - Aluminum electrolytic capacitor - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to an aluminum electrolytic capacitor used for various electronic devices.

2. Description of the Related Art An aluminum electrolytic capacitor is generally composed of a positive electrode having an electrochemically roughened surface of an aluminum foil coated with a chemical conversion dielectric film, and an aluminum electrode having an electrochemically roughened surface opposite to the positive electrode. The element impregnated with the driving electrolyte is wound in a cylindrical case with aluminum bottom and the lead wire is pulled out from each electrode, and the opening of the case is opened with an elastic sealing body. Was sealed.

As a recent technique, a technique has been developed for increasing the surface area by depositing titanium as a cathode foil and using it as a large-capacity cathode foil to reduce the size of a capacitor.

Problems to be Solved by the Invention In the production of vapor-deposited electrode foil by a continuous vapor-deposition process, a method using an electron beam (hereinafter abbreviated as EB) as an energy source is more suitable than productivity. When the tungsten filament is energized, the tungsten filament is heated and electrons are ejected and accelerated by the electric field to become EB.
In addition, during the production of a titanium vapor deposition electrode, vapor deposition is performed at a low vacuum of about 10 ^-4 Torr in order to increase the vapor deposition surface area, so that the filament life is short and it cannot withstand continuous use.

The short filament life shortens the continuous vapor deposition time, and the vapor deposition electrode foil length is short. As a result, the continuous winding workability and productivity by an automatic machine during winding as the electrode foil of an electrolytic capacitor are extremely poor. was there.

The present invention solves the problem caused by such a short filament life.

Means for Solving the Problems In order to solve this problem, the present invention provides a method of depositing titanium on an aluminum foil substrate by using an electron gun using a filament having a shape in which a line at a position where a cation flow collides during deposition is removed. The electrode foil thus formed and the electrode foil opposite thereto are wound via a separator to form a capacitor element, and the capacitor element is impregnated with a driving electrolyte.

The filament used in the present invention developed in this manner is hardly susceptible to the ion bombardment phenomenon even when EB deposition is performed in a low vacuum atmosphere of 10 ^-4 Torr, and the filament is used continuously without breakage of the filament for a long time. That is, continuous vapor deposition can be performed.

Embodiments FIGS. 1a and 1b are a plan view and a perspective view, respectively, showing a filament shape of an electron gun according to one embodiment of the present invention. Install in a direction that does not collide with the filament.

As a factor that determines the life of the filament, as shown in Fig. 2, when the EB passes, the atmospheric gas and the vaporized vapor are ionized and the cation Is accelerated by the negative high voltage applied to the filament 1 and the filament 1
The main thing is to break the filament 1 by ion bombardment.

FIG. 2 is a schematic configuration diagram of an EB vapor deposition apparatus, wherein 1 is a filament of an EB electron gun, 2 is an anode for accelerating electrons emitted from the filament 1, 3 is a deflection magnet that deflects EB, 4 is EB, 5 Is a melting crucible, 6 is titanium, 7 is an aluminum foil substrate, and 8 is a cation stream generated by EB4.

In the present invention, as shown in FIGS. 2, 3 and 4, the shape of the filament 1 is improved to prevent the accelerated cations from colliding with the filament 1 and bombarding the ions, and the cations are removed from the filament. Not to hit one,
The breaking of the filament 1 is prevented to extend the life.

Since the filament 1 is heated by energization and emits electrons, in order to obtain the same electron beam output under the same conditions as the conventional filament 1, the generation amount, generation range and center value of EB4 must be the same at the same mounting position. Is required, and the wire diameter, length, and shape are also restricted. Further, since the temperature of the filament 1 becomes high, the shape is controlled so that the filament 1 is not damaged by thermal stress. As a result of various studies under such conditions, the present invention has been found.

FIGS. 5 and 6 show the shape of a conventional filament.
A wave shape as shown in FIG. 5 and a spiral shape as shown in FIG. 6 are generally used.

Also, the projected view from the anode side where the EB is accelerated is the effective electron beam of the EB to the deposition crucible, and the filament is as easy as possible to control the position of the EB as much as the accelerating anode. The more concentrated, the more concentrated the EB energy is, the more efficient it is, and it becomes a flat wave shape or a spiral shape. Also, helical coiled filaments of lighting bulbs which emit beams in all directions are unsuitable for the reasons mentioned above.

As shown in FIG. 2, the cations generated by EB4 (mainly argon ions of the atmosphere gas) are deflected by the deflection magnetic field of EB4, accelerated by the high negative piezoelectric field of filament 1, and collide with filament 1. In general, the reason why the EB is deflected by a magnetic field is to place the electron gun of the filament 1 at a position that does not hinder either the vapor deposition base material or the crucible 5 in FIG.
As for the position where the cation collides with the filament 1, the cation has a larger mass than the electron, and when deflected and accelerated, the trajectory collides with the filament 1 through a trajectory having a large diameter outside the EB 4, causing spatter and disconnection. That is, the ion bombard phenomenon. Since the lower portion of the filament 1 is broken by ion bombardment as indicated by the dotted line 9 in FIGS. 3 and 4, a filament having no line is used at the lower portion of the center of the filament 1.

The filament 1 needs an appropriate wire diameter and length in order to generate thermoelectrons by being heated by energization as a resistor,
The shape of the filament 1 is also restricted. In addition, since the cation flow secondary generated by the EB passes through the position surrounded by the dotted line 9 in the filament diagrams of FIGS.
The filament 1 shown in the figure can be used continuously for a long time without receiving ion bombardment. Further, the filament 1 has a shape without corners so as not to be broken by thermal stress.

An example in which titanium is deposited on an aluminum foil substrate using the filament of the present invention will be described. For comparison, data obtained when the conventional spiral wound filament shown in FIG. 6 was used.

Vacuum 5. ⁰ × 10 ^-4 Torr as vacuum conditions, in an Ar gas atmosphere was carried titanium deposition in EB output 6. ⁰ KW, substrate foil Okugyo speed 1.0 m / min. Table 1 shows the vapor deposition distance until the filament was cut.

As can be seen from the data in Table 1, the filament of the present invention has a ten-fold or longer life as compared with the conventional filament. In addition, the capacitance values of the data in Table 1, that is, the capacitance values of the titanium vapor-deposited foils are equivalent, and it can be seen that the characteristics were not reduced and the characteristics were maintained due to the improvement in the filament shape of the present invention.

The vapor deposition apparatus used can deposit only up to a maximum of 500 m continuous from the crucible volume, but will be able to be used continuously until the filament of the present invention is cut by expanding the crucible volume in the future.

In the embodiment, the conventional filament was continuously vapor-deposited until cutting, but the filament of the embodiment of the present invention stopped the vapor deposition every 500 m, supplied titanium to the crucible, continued the vapor deposition after pre-melting for about 5 minutes, 26 accumulated before filament breaks
30m deposition was performed.

Advantageous Effects of the Invention As described above, according to the present invention, a continuous use of a conventional filament can be performed ten times or more, the length of the vapor deposition foil can be increased, and the conventional filament-use vapor deposition foil can be used as an electrode foil of an electrolytic capacitor when wound on a capacitor element. In this case, the connection portion has to be removed at 192 m, and the connection portion is wound up, and the factor of occurrence of troubles such as mixing of defective products is greatly improved by using the filament of the present invention. Even in the case of the current equipment, there is no connection for continuous 500m.
Continuous deposition up to 3000 m is possible. As an effect in continuous vapor deposition, the vapor deposition foil becomes longer.

 The number of lots is small and easy to manage.

The joining portion at the beginning and end of the vapor-deposited foil is reduced, and the material yield is improved.

Preparation of foil, vacuuming from atmospheric pressure to set vacuum conditions, vacuum adjustment by introducing argon gas,
In addition, the time loss required for the preliminary melting of titanium and the like is reduced, and the productivity (operating rate) is improved, and the cost is reduced.

By using a longer foil, the number of stops and the number of connections in the width cutting slitter operation of the foil is reduced, and the productivity is improved.

Also in the winding operation of the capacitor element using the foil, the productivity is similarly improved, which greatly contributes to the cost reduction of the capacitor which is a mass-produced electronic component.

Since evaporation is continued under the same conditions, the quality is stabilized and greatly contributes to quality improvement.

The effect is obtained.

As described above, the electrolytic capacitor using the titanium vapor-deposited foil of the present invention has higher productivity, lower cost and higher quality than those of the electrolytic capacitor using the conventional titanium vapor-deposited foil, and is of great industrial value.

[Brief description of the drawings]

1a and 1b are a plan view and a perspective view of a filament according to one embodiment of the present invention, FIG. 2 is a schematic configuration diagram of an EB vapor deposition apparatus, and FIG.
FIG. 4 is an explanatory diagram for explaining a cutting position of a conventional EB filament, FIG. 4 is an explanatory diagram showing an example of a filament shape avoiding an ion bombardment position as in FIG. 1, and FIGS.
FIG. 6 is a plan view and a perspective view of a conventional corrugated filament, and FIG.
a and b are a plan view and a perspective view of a conventional spiral wound filament. 1 ... filament, 6 ... titanium, 7 ... aluminum foil base material.

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Nobuyoshi Kanzaki 1006 Kazuma Kadoma, Osaka Prefecture Inside Matsushita Electric Industrial Co., Ltd. (56) References JP-A-61-180420 (JP, A) JP-A-61-156716 (JP, A) JP-A-63-194320 (JP, A)

Claims (2)

(57) [Claims] 1. An electron gun using a filament having a shape in which a line at a position where a cation flow collides during vapor deposition is used.
An electrode foil made by depositing titanium on an aluminum foil substrate and an electrode foil facing the electrode foil are wound through a separator to form a capacitor element, and the capacitor element is impregnated with a driving electrolyte. And aluminum electrolytic capacitor. 2. An electron gun using a filament having a shape in which a line at a position where a cation flow collides during vapor deposition is used.
Electrode foil for aluminum electrolytic capacitors with titanium deposited on an aluminum foil substrate.