JP2596473B2 - Optical information recording medium - Google Patents

Optical information recording medium

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Publication number
JP2596473B2
JP2596473B2 JP3070292A JP7029291A JP2596473B2 JP 2596473 B2 JP2596473 B2 JP 2596473B2 JP 3070292 A JP3070292 A JP 3070292A JP 7029291 A JP7029291 A JP 7029291A JP 2596473 B2 JP2596473 B2 JP 2596473B2
Authority
JP
Japan
Prior art keywords
recording medium
recording
optical information
information recording
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP3070292A
Other languages
Japanese (ja)
Other versions
JPH05229259A (en
Inventor
準 渡辺
善親 田尻
泰 宮園
隆司 山岸
Original Assignee
非酸化物ガラス研究開発株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 非酸化物ガラス研究開発株式会社 filed Critical 非酸化物ガラス研究開発株式会社
Priority to JP3070292A priority Critical patent/JP2596473B2/en
Publication of JPH05229259A publication Critical patent/JPH05229259A/en
Application granted granted Critical
Publication of JP2596473B2 publication Critical patent/JP2596473B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Thermal Transfer Or Thermal Recording In General (AREA)
  • Optical Record Carriers And Manufacture Thereof (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明はレ―ザ―光の光パルスを
照射することにより情報信号を記録する光記録媒体に関
するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical recording medium for recording an information signal by irradiating an optical pulse of laser light.

【0002】[0002]

【従来の技術】非晶質を結晶質との相変化が可逆的に行
われる記録材料は、その非晶質相と結晶相とのレ―ザ―
光の反射率が異なることを利用して情報の記録を行う。
即ち、初期状態として結晶状態となっている記録層にレ
―ザ―光を照射すると、該当する照射部は急熱急冷され
ることにより非晶質状態に変化し、非照射部とは反射率
の異なるピットが形成される(記録)。さらに、記録層
に形成されたピットに記録時よりも弱いレ―ザ―光を照
射すると、該当する照射部は穏やかに加熱冷却され非晶
質状態のピットは初期状態である結晶状態に戻る(消
去)。これらの、非晶質相と結晶相との間の相転移が可
逆的に行える、言い換えれば、記録と消去が可逆的に行
える書換え可能な記録材料としては、例えば、Ge−S
b−Te(例えば、特開昭63−228433等)が報告されて
いる。これらの記録材料をプラスチック製の基板あるい
はガラス製の基板上に、直接または下地層を介して所定
の厚さの薄膜を成膜し、その上に保護層、さらに場合に
よっては反射層を積層して光記録媒体の基本構成として
いる。ここで用いられる下地層および保護層にはSiO
2 ,ZnS,Si34 ,AlN,Al23 等の誘電
体膜やそれらの混合物、例えばZnSとSiO2 の組合
せ等がある。また、反射層としてはAu,Al,Ni−
Cr等の金属や合金が用いられている。これらの成膜方
法としては、蒸着法、EB蒸着法、スパッタリング法等
が用いられている。
2. Description of the Related Art A recording material in which a phase change between an amorphous phase and a crystalline phase is performed reversibly is performed by using a laser having an amorphous phase and a crystalline phase.
Information is recorded using the fact that the light reflectances are different.
That is, when a recording layer that is in a crystalline state as an initial state is irradiated with laser light, the corresponding irradiated part is rapidly heated and rapidly cooled to change to an amorphous state, and the non-irradiated part has a reflectance. Are formed (recorded). Further, when the pits formed in the recording layer are irradiated with laser light weaker than at the time of recording, the corresponding irradiated portion is gently heated and cooled, and the pits in the amorphous state return to the crystalline state as the initial state ( Erase). These rewritable recording materials capable of reversibly performing a phase transition between an amorphous phase and a crystalline phase, in other words, reversibly recording and erasing, include, for example, Ge-S
b-Te (for example, JP-A-63-228433) has been reported. These recording materials are formed on a plastic substrate or a glass substrate by forming a thin film of a predetermined thickness directly or via an underlayer, and a protective layer and, in some cases, a reflective layer are laminated thereon. This is the basic configuration of the optical recording medium. The underlayer and the protective layer used here are SiO 2
2 , a dielectric film such as ZnS, Si 3 N 4 , AlN, and Al 2 O 3 and a mixture thereof, such as a combination of ZnS and SiO 2 . Au, Al, Ni-
Metals and alloys such as Cr are used. As these film forming methods, an evaporation method, an EB evaporation method, a sputtering method and the like are used.

【0003】[0003]

【発明が解決しようとする課題】情報社会の発達に伴
い、これまで以上に情報伝達の高速化および記録情報保
持の信頼性が要求されるようになってきている。この記
録媒体上の情報の保持耐久性は、記録層の非晶質相の結
晶化温度が高いほど良い。ここで、上述のGe−Sb−
Te非晶質膜の結晶化温度はいずれも 180℃以下であり
必ずしも充分であるとは言えない。そこでGe−Sb−
Teの3元系の共晶組成Ge15Sb61.5Te23.5が 200
℃以上の結晶化温度を有することを見い出した。しか
し、消去時間は400 ns程度で必ずしも高速消去に充分で
あるとは言えない。本発明は高速消去可能な光情報記録
媒体を提供することを目的とする。
With the development of the information society, there has been an increasing demand for faster information transmission and reliability in holding recorded information. The higher the crystallization temperature of the amorphous phase of the recording layer, the better the retention durability of the information on the recording medium. Here, the above Ge-Sb-
The crystallization temperature of each of the Te amorphous films is not more than 180 ° C., which is not always sufficient. So Ge-Sb-
Te 15 ternary eutectic composition Ge 15 Sb 61.5 Te 23.5 is 200
It has been found to have a crystallization temperature of at least ℃. However, an erase time of about 400 ns is not always sufficient for high-speed erase. An object of the present invention is to provide an optical information recording medium that can be erased at high speed.

【0004】[0004]

【課題を解決するための手段】上記目的を達成するた
め、本発明の書換え可能な光情報記録媒体は、Ge−S
b−Teの3元系の共晶組成Ge15Sb61.5Te23.5
Ga,Pbの内少なくとも1種類の元素を含有させたこ
とを特徴とする。記録膜のベ―ス組成は、成膜条件など
の誤差により±2at%程度ずれることがあるが、その場
合にも上記目的を達成できる。
In order to achieve the above object, a rewritable optical information recording medium of the present invention has a Ge-S
A ternary eutectic composition of b-Te Ge 15 Sb 61.5 Te 23.5 contains at least one element of Ga and Pb. The base composition of the recording film may deviate by about ± 2 at% due to an error such as a film forming condition. In such a case, the above object can be achieved.

【0005】[0005]

【作用】Ge−Sb−Teの3元系の共晶組成Ge15
61.5Te23.5にGa或いはPbがド―プされると、そ
れらが結晶核となり結晶化速度を速めたものと考えられ
る。添加物の添加量が本発明の範囲未満の場合は消去時
間の短縮効果はなく、範囲よりも多い場合には記録消去
が困難となる。
[Action] Ge-Sb-Te ternary eutectic composition Ge 15 S
It is considered that when Ga or Pb is doped into b 61.5 Te 23.5 , they become crystal nuclei to increase the crystallization speed. When the amount of the additive is less than the range of the present invention, there is no effect of shortening the erasing time, and when the amount is larger than the range, it becomes difficult to erase the recording.

【0006】[0006]

【実施例1】以下に本発明の実施例を示す。記録膜、保
護膜等の成膜はRFマグネトロンスパッタリングによっ
て行った。洗浄されたガラス片にGe15Sb61.5Te
23.5にGa+Pb 0.5〜12.3at%含ませたスパッタリン
グタ―ゲットを用いて、Ar=3mTorrを導入してRF
パワ―50Wで膜厚約150 nmのZnS−SiO2 混合物に
よる保護膜を積層成膜した。この試料を窒素雰囲気中、
温度 240℃で約30分間加熱し初期結晶化した。あるい
は、連続光または1KHz のパルス光で記録消去特性評価
領域をレ―ザ―アニ―ルして初期結晶化した。各試料に
ついて、パルス幅30ns、波長830 nmのレ―ザ―光により
直径約 0.6μmの記録ピットを形成し、その記録ピット
を消去することができる消去パルス幅(消去時間)を調
べた。その結果を第1表に示した。この結果より明らか
なように本発明のGa,Pbの内少なくとも1種類の元
素を含有するGe15Sb61.5Te23.5記録膜は150 ns以
下で消去可能であった。
Embodiment 1 An embodiment of the present invention will be described below. The formation of the recording film, the protective film, and the like was performed by RF magnetron sputtering. Ge 15 Sb 61.5 Te was added to the washed glass piece.
Using a sputtering target containing 0.5 to 12.3 at% of Ga + Pb in 23.5 , introducing Ar = 3 mTorr and RF
The protective film according to film thickness ZnS-SiO 2 mixture of about 0.99 nm were laminated to form a film with power -50 W. Place this sample in a nitrogen atmosphere.
It was heated at a temperature of 240 ° C for about 30 minutes for initial crystallization. Alternatively, the initial crystallization was performed by laser annealing of the recording / erasing characteristics evaluation region with continuous light or 1 KHz pulse light. For each sample, a recording pit having a diameter of about 0.6 μm was formed with laser light having a pulse width of 30 ns and a wavelength of 830 nm, and the erasing pulse width (erasing time) capable of erasing the recording pit was examined. The results are shown in Table 1. As is clear from these results, the Ge 15 Sb 61.5 Te 23.5 recording film containing at least one element of Ga and Pb of the present invention was erasable in 150 ns or less.

【0007】次に、結晶化開始温度を熱分析(DSC)
によって調べた。熱分析の際の昇温速度は毎分10℃であ
る。その結果を第1表に示した。この結果より明らかな
ように本発明のGa,Pbの少なくとも1種類の元素を
含有するGe15Sb61.5Te23.5薄膜の結晶化開始温度
は 180℃を越えていた。ところで、記録膜のベ―ス組成
は、成膜条件などの実験誤差により±2at%程度ずれる
場合があり、その場合(Ge15±2Sb61.5±2Te2
3.5±2)も同様の結果が得られた。 第1表 添加物 添加量 消去時間 結晶化開始温度 at% ns ℃ なし 0 400 225 Ga 1.8 150 233 Ga 3.8 100 247 Ga 6.2 記録消去困難 Pb 0.5 150 227 Pb 1.0 130 225 Pb 5.0 100 200 Pb 8.5 100 187 Pb 9.5 記録消去困難
Next, the crystallization onset temperature is determined by thermal analysis (DSC).
Investigated by. The rate of temperature rise during thermal analysis is 10 ° C. per minute. The results are shown in Table 1. As is clear from these results, the crystallization onset temperature of the Ge 15 Sb 61.5 Te 23.5 thin film containing at least one element of Ga and Pb of the present invention exceeded 180 ° C. By the way, the base composition of the recording film may be deviated by about ± 2 at% due to experimental errors such as film forming conditions. In such a case, (Ge15 ± 2Sb61.5 ± 2Te2
3.5 ± 2) gave similar results. Table 1 Additives Addition amount Erasure time Crystallization start temperature at% ns ° C None 0 400 225 Ga 1.8 150 233 Ga 3.8 100 247 Ga 6.2 Recording / erasing difficult Pb 0.5 150 227 Pb 1.0 130 225 Pb 5.0 100 200 Pb 8.5 100 187 Pb 9.5 Recording / erasing difficult

【0008】[0008]

【比較例】消去時間および結晶化開始温度の比較例とし
ては、Ge15Sb61.5Te23.5(共晶組成)記録膜のデ
―タを第1表に示した、評価条件は実施例と同様であ
る。Ga 6.2at%添加及びPb 9.5at%添加の場合には
記録消去が困難であった。
Comparative Example As a comparative example of the erasing time and the crystallization start temperature, data of a Ge 15 Sb 61.5 Te 23.5 (eutectic composition) recording film is shown in Table 1, and the evaluation conditions are the same as those of the example. is there. In the case of adding 6.2 at% of Ga and 9.5 at% of Pb, recording and erasing were difficult.

【0009】[0009]

【発明の効果】以上のように、本発明によるGe−Sb
−Te3元系の共晶組成Ge15Sb61 .5Te23.5にG
a、Pbの内少なくとも1種類の元素をド―プした記録
層を有する光情報記録媒体は、消去時間が十分に速いも
のである。
As described above, the Ge-Sb according to the present invention has been described.
-Te3-element eutectic composition Ge 15 Sb 61 .5 Te 23.5 in G
An optical information recording medium having a recording layer doped with at least one element of a and Pb has a sufficiently short erasing time.

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭63−76120(JP,A) 特開 平5−116455(JP,A) 特開 昭63−225934(JP,A) 特開 平1−118229(JP,A) ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-63-76120 (JP, A) JP-A-5-116455 (JP, A) JP-A-63-225934 (JP, A) JP-A-1- 118229 (JP, A)

Claims (4)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 Ge,Sb,Teの3元系の共晶組成G
e15(±2)Sb61.5(±2)Te23.5(±2)にG
a,Pbの内の少なくとも1種類の元素を含有した記録
薄膜を有することを特徴とする光情報記録媒体。
1. A ternary eutectic composition G of Ge, Sb and Te
G to e15 (± 2) Sb61.5 (± 2) Te23.5 (± 2)
An optical information recording medium having a recording thin film containing at least one of a and Pb.
【請求項2】 Ge15(±2)Sb61.5(±2)Te2
3.5(±2)を100 at%としてGa+Pbが 0.5〜12.3a
t%含有することを特徴とする請求項1記載の光情報記
録媒体。
2. Ge15 (± 2) Sb61.5 (± 2) Te2
Ga + Pb is 0.5 to 12.3a with 3.5 (± 2) being 100 at%.
2. The optical information recording medium according to claim 1, wherein the optical information recording medium contains t%.
【請求項3】 Ge15(±2)Sb61.5(±2)Te2
3.5(±2)を100 at%としてGaが 1.8〜 3.8at%含
有することを特徴とする請求項1記載の光情報記録媒
体。
3. Ge15 (± 2) Sb61.5 (± 2) Te2
2. The optical information recording medium according to claim 1, wherein Ga is contained at 1.8 to 3.8 at%, where 3.5 (± 2) is 100 at%.
【請求項4】 Ge15(±2)Sb61.5(±2)Te2
3.5(±2)を100 at%としてPbが 0.5〜 8.5at%含
有することを特徴とする請求項1記載の光情報記録媒
体。
4. Ge15 (± 2) Sb61.5 (± 2) Te2
2. The optical information recording medium according to claim 1, wherein Pb is contained in an amount of 0.5 to 8.5 at%, where 3.5 (± 2) is 100 at%.
JP3070292A 1991-03-12 1991-03-12 Optical information recording medium Expired - Lifetime JP2596473B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3070292A JP2596473B2 (en) 1991-03-12 1991-03-12 Optical information recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3070292A JP2596473B2 (en) 1991-03-12 1991-03-12 Optical information recording medium

Publications (2)

Publication Number Publication Date
JPH05229259A JPH05229259A (en) 1993-09-07
JP2596473B2 true JP2596473B2 (en) 1997-04-02

Family

ID=13427256

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3070292A Expired - Lifetime JP2596473B2 (en) 1991-03-12 1991-03-12 Optical information recording medium

Country Status (1)

Country Link
JP (1) JP2596473B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1936612B1 (en) * 1999-05-19 2009-09-02 Mitsubishi Kagaku Media Co., Ltd. Recording at constant angular velocity
JP2003034081A (en) * 2000-09-14 2003-02-04 Ricoh Co Ltd Phase change type optical information recording medium
JP2003228834A (en) * 2002-01-30 2003-08-15 Ricoh Co Ltd Information recording system and optical recording medium

Also Published As

Publication number Publication date
JPH05229259A (en) 1993-09-07

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