JP2590319B2 - Surface treatment system - Google Patents

Description

The present invention relates to a surface treatment apparatus system used for surface treatment such as plating and cleaning.

[Conventional technology]

The conventional surface treatment apparatus is provided with an inlet 1 for the surface treatment liquid 2 at the center of the bottom plate 19 of the tank body 4 as shown in the sectional view of FIG.
A perforated plate 3 having a small hole is placed in front of the inlet 1, and an overflow portion 5 is provided around an opening 6 of the tank body 4. Further, an overflow return pipe is provided at a lower end of the overflow section 5.
Attach 17 and connect the other end to the heating tank 15. A heat exchanger 16 is immersed in the surface treatment liquid 2 in the heating tank 15, and a pipe 20 is drawn out from the side surface, and is connected to the pump A 11, the filter 10, the inlet pipe 9, and the inlet 1.

In such a configuration, first, the surface treatment liquid 2 introduced from the inlet 1 passes through the small holes of the perforated plate 3 and further rises to reach the opening 6. Further, the surface treatment liquid 2 which has overflowed from the opening 6 due to an increase in the surface treatment liquid 2 introduced from the inlet 1 flows down to the overflow section 5 provided around the opening 6 and is transmitted through the overflow return pipe 17 for heating. After returning to the tank 15 and adjusting the temperature by the heat exchanger 16, the surface treatment force 2 sucked from the pipe 20 by the pump A11 passes through the filter 10 to the inlet pipe 9, and further from the inlet 1 to the tank body 4
It is introduced into.

It is known that in the above-mentioned state, the surface-treated object 7 is hooked on a jig 8, thrown between the perforated plate 3 and the opening 6, immersed, and pulled up to perform surface treatment.

[Problems to be solved by the invention]

However, in the conventional surface treatment apparatus, the surface treatment liquid 2 for the surface treatment object 7 is first introduced into the inlet 1 as shown in the surface treatment liquid flow 18.
The surface treatment liquid 2 introduced from above spreads not only in front of the inlet 1 but also throughout the perforated plate 3 because of the perforated plate 3 and further rises through small holes in the perforated plate 3, but rises near the tank body 4. Although the surface treatment liquid flow 18 rises smoothly along the wall surface of the tank body 4 as it is said to be a partial wall flow, the surface treatment liquid flow 18 in the central part of the tank body 4 is close to the opening 6 from the outside. The perforated plate 3 enters the central part and becomes a downward flow.
, And becomes a migrating flow that rises again along the wall surface of the tank body 4. In addition, when the amount of introduction from the introduction port 1 is increased or decreased, the speed of the surface treatment liquid 2 ejected from the small holes of the perforated plate 3 becomes faster or slower, so that the above-described wall flow and the downward flow at the central portion Is extremely confused, and the surface treatment liquid flow 18 does not have a stable pattern, and the flow rate and the liquid temperature of the surface treatment liquid 2 in the tank body 4 are not constant. For this reason, when the surface treatment solution 2 is an electroless plating solution, an etching solution, an acid for cleaning, an alkali solution, or the like, the passing speed with the surface of the workpiece 7 immediately affects the quality. Variations in the etching depth and the degree of cleaning increase. Further, fine dust introduced into the surface treatment liquid 2 from the surface treatment object 7, the jig 8, or the opening 6 for the upward flow, the downward flow, and the migrating flow of the surface treatment liquid flow 18 as described above; The dust and the like are not immediately discharged to the overflow section 5 but migrate in the tank body 4 and adhere to the surface-treated material 7.
When an electroless plating solution is used as the surface treatment liquid 2, a convex is formed on the surface of the object to be treated 7; when the etching liquid is used, the etching remains; Surface treatment quality cannot be obtained. Further, when an electroless plating solution is used as the surface treatment solution 2, fine dust, dust, fine-particle metals, etc. in the electroless plating solution begin to deposit metal with each nucleus as a nucleus, and initially float in the electroless plating solution. However, since the weight gradually increases, the precipitation of the precipitate begins to fall and deposits on the bottom plate 19 through the upper surface of the perforated plate 3 or the small holes of the perforated plate 3, thereby significantly shortening the life of the electroless plating solution. There were problems such as hiding.

Therefore, the present invention solves such a conventional problem by making the surface treatment liquid flow rate and flow direction constant at least within a range in which the object to be treated is immersed to eliminate the migrating flow, and to prevent precipitation metal, fine dust, dust, etc. The purpose of this is to quickly discharge out of the tank body.

[Means for solving the problem]

In order to solve the above problems, the surface treatment apparatus of the present invention is provided with a surface treatment liquid filled in a tank, an overflow section of the surface treatment liquid provided in an opening of the tank, and a lower part of the tank. A perforated plate having a plurality of holes, a first inlet for the surface treatment liquid provided near the opening of the tank and below the overflow section, and a first suction port provided at the bottom of the tank. A first tank comprising a surface treatment liquid filled in the tank, a second inlet, a third inlet, and a second suction port provided on a side wall of the tank. The second tank, the first suction port and the second inlet are connected by a pipe, and a first pump is disposed in the middle of the pipe, and the overflow part and the third inlet are The second suction port and the first introduction port are connected by a pipe, and A second pump is arranged in the middle of one pipe, and the discharge amount of the second pump is equal to the discharge amount of the first pump and the overflow amount of the overflow section, and each value is a positive value. Under certain conditions, the surface treatment liquid is circulated between the first tank and the second tank.

(Operation)

When the surface treatment liquid is introduced from the introduction port of the surface treatment apparatus configured as described above, since the introduction amount is larger than the amount sucked from the small holes of the perforated plate, the surface treatment liquid starts overflowing from the opening, A state in which the suction from the small holes of the perforated plate and the overflow in the surface treatment liquid are performed at the same time.
Therefore, fine dust, dust and the like brought in from the opening are discharged to the outside of the tank by overflow to maintain a clean surface treatment liquid, and a constant surface treatment liquid is always sucked out of the small holes of the perforated plate and taken out of the tank. Therefore, a constant downward flow and a uniform liquid temperature can be ensured, and the deposited metal and the like can be quickly discharged out of the tank by the downward flow.

〔Example〕

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
An opening 6 is provided in the upper part of the tank body 4 as shown in the sectional view of FIG. 1, and an overflow part 5 is attached around the opening. Under the opening 6, the inlets 1 are provided around the tank body 4 at equal intervals. Further, a perforated plate 3 having a large number of small holes is placed in the lower part of the tank body 4, and the suction pipe A 1 is inserted from the center of the lowermost bottom plate 19.
2. The pump B13 and the return pipe 14 are connected in this order, and the end of the return pipe 14 opens to the heating tank 15. As described above, the overflow return pipe 17 attached to a part of the overflow section 5 opens to the heating tank 15. On the other hand, the pipe 20 drawn from the heating tank 15 is connected to the inlet 1 of the tank body 4 via the pump A11, the filter 10, and the inlet pipe 9. The heat exchanger 16 is put into the heating tank 15.

In the above configuration, the surface treatment liquid 2 charged into the heating tank 15 is temperature-controlled by the heat exchanger 16 and is pumped through the pipe 20.
Enter A11. The surface treatment liquid entering the pump A11 is discharged under pressure, enters the filter 10, collects fine dust, dust and the like, and is discharged through the introduction pipe 9 from the introduction port 1 into the tank body 4, and most of the liquid is collected. As a descending flow, it passes through the small hole of the perforated plate 3 below the tank body 4, is sucked from the suction pipe A 12 connected to the suction port of the pump B 13, and returns to the heating tank 15 from the return pipe 14. On the other hand, part of the surface treatment liquid introduced from the inlet 1
After overflowing, the flow returns from the overflow section 5 to the heating tank 15 through the overflow return pipe 17. In this way, the surface treatment liquid 2 whose temperature has been adjusted is introduced from the inlet 1 and forms a downward flow to the heating tank 15 via the pump B13, and an upward flow to overflow from the opening 6 and the overflow return pipe 17 Is returned to the heating tank 15 during normal operation when the surface treatment can be performed, and the flow of the surface treatment liquid 2 at that time is as shown by the surface treatment liquid flow 18. First, the surface treatment liquid 2 introduced from the introduction port 1 proceeds on the extension of the introduction port 1 as it is, but an amount corresponding to the surface treatment liquid 2 sucked through the perforated plate 3 descends downward. start. In this case, since the small holes of the perforated plate 3 are evenly distributed on the plane of the perforated plate 3, the surface treatment liquid 2 is uniformly suctioned at any portion. As a result, the surface treatment liquid 2 introduced from the inlet 1
Is an orderly descending flow from the position slightly lower than the inlet 1 to the perforated plate 3 with almost no difference in flow velocity. On the other hand, the part of the surface treatment liquid 2 introduced from the inlet 1 that has not become a downward flow rises toward the opening 6 and eventually overflows to the overflow part 5 due to overflow. The condition for creating such a state is a pump
A11 discharge amount = pump B13 suction amount + overflow amount is required, and each value must be a positive value. Other surface treatment liquid 2
The downward flow and the upward flow can be adjusted by adjusting the discharge or suction amounts of the pumps A11 and B13, respectively.

The surface-treated object 7 hooked on the jig 8 is put into the operating state as described above through the opening 6, and is immersed between a position slightly lower than the inlet 1 and immediately near the perforated plate 3. Perform surface treatment. The flow of the surface treatment liquid when the jig 8 and the surface treatment object 7 are immersed in the surface treatment liquid 2 is almost the same as the state before the jig 8 and the surface treatment object 7 are introduced. The state of the surface treatment liquid flow 18 itself is maintained. In the above embodiment, increasing the vertical distance between the inlet 1 and the surface-treated object 7 makes the velocity and direction of the downward flow passing through the surface of the surface-treated object 7 more stable and uniform. In this case, the position of the overflow section 5 is lowered downward, and the inlet 1 is raised upward. That is, it can be easily realized by providing the inlet 1 in the overflow part 5, and the inlet 1 is connected to the tank body 4
Can be performed by inserting a pipe into the inner peripheral portion of the opening 6 from above in place of the side surface.

〔The invention's effect〕

The present invention provides an inlet near the opening as described above, and a surface treatment liquid in a range where the surface treatment liquid is immersed by a structure in which the surface treatment liquid overflows from the opening and is sucked from the small holes of the perforated plate. The flow velocity and flow direction are made uniform, and the deposited metal particles in the surface treatment liquid are carried out of the tank body by the downward flow sucked from the perforated plate 3 portion. Further, fine dust and fluff are quickly discharged out of the tank by overflow. By discharging to the surface, there are remarkable effects such as improvement of the surface quality of the object to be treated and improvement of the service life of the surface treatment liquid.

[Brief description of the drawings]

 FIG. 1 is a sectional view of a surface treatment apparatus according to the present invention. FIG. 2 is a sectional view of a conventional surface treatment apparatus. DESCRIPTION OF SYMBOLS 1 ... Inlet 2 ... Surface treatment liquid 3 ... Perforated plate 4 ... Tank body 6 ... Opening 7 ... Surface treatment object 18 ... Surface treatment liquid flow

Continued on the front page (51) Int.Cl. ⁶ Identification number Agency reference number FI Technical display location H05K 3/42 6921-4E H05K 3/42 Z

Claims (1)

(57) [Claims] 1. A surface treatment liquid filled in a tank, an overflow section of the surface treatment liquid provided in an opening of the tank, a perforated plate having a plurality of holes provided in a lower part of the tank, and an opening of the tank. A first tank provided with a first inlet for the surface treatment liquid provided in the vicinity of and below the overflow section, and a first suction port provided at the bottom of the tank; Surface treatment liquid, a second tank provided with a second inlet, a third inlet, and a second suction port provided in a side wall of the tank, the first suction port and the second suction port. The second inlet is connected by a pipe and a first pump is arranged in the middle of the pipe, the overflow section and the third inlet are connected by a pipe, and the second suction port is provided. And the first inlet is connected by a pipe, and a second pump is disposed in the middle of the pipe, In serial condition discharge amount of the second pump overflow amount and equal and the value of each of the discharge amount and the overflow portion of the first pump is a positive value, the first tank and the second
A surface treatment liquid circulating between the tanks.